CN207395918U - Temperature and pressure compound sensor - Google Patents
Temperature and pressure compound sensor Download PDFInfo
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- CN207395918U CN207395918U CN201721329577.2U CN201721329577U CN207395918U CN 207395918 U CN207395918 U CN 207395918U CN 201721329577 U CN201721329577 U CN 201721329577U CN 207395918 U CN207395918 U CN 207395918U
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Abstract
The utility model discloses a kind of temperature and pressure compound sensors, it is characterised in that：Including pressure-inducing nozzle, pedestal, elastomer, shell, thermo-sensitive resistor.The surface of elastomer manufactures four thin film strain resistors by ion beam sputtering process and forms Wheatstone bridge, for measuring pressure medium.The surface of elastomer sticks the thermo-sensitive resistor for measuring medium temperature.Due to by sputtered thin film pressure transducer pressure-inducing nozzle and pedestal separate machined, and, pressure-inducing nozzle is machined with stress isolation slot, sensor with pressure medium measurement pipeline when being connected, larger stress will not be conducted to pressure sensor elastomer caused by the mechanical torque of spanner and deformation, it can ensure that the measurement accuracy and long-time stability of sensor, while increase economical and practical thermo-sensitive resistor for measuring medium temperature.The high-performance temperature and pressure compound sensor product that high certainty of measurement, stability are good, can measure temperature simultaneously can so be obtained.
Description
Technical field
The utility model is related to the compound biographies of temperature and pressure that a kind of pressure sensor more particularly to a kind of temperature, pressure measure simultaneously
Sensor.
Background technology
Sputtered thin film pressure transducer is a kind of pressure sensor of function admirable, it has high certainty of measurement, stability
Well, the advantages that measurement temperature range is wide, range ability is big, in Aeronautics and Astronautics, military project, nuclear industry, petrochemical industry, traffic, metallurgy, food
Many fields such as product, medicine, Internet of Things are applied.But common sputtered thin film pressure transducer does not possess temperature survey work(
Can or possess temperature measurement function, but need to increase temperature sensitive thin film on the basis of presser sensor function film is prepared
Preparation and photoetching process, technology difficulty it is high, low production efficiency, product cost is high.In addition, existing pressure sensor pressure-inducing nozzle
It is integrally machined with pedestal, for pressure sensor when being connected with measurement pipeline, stress caused by the mechanical torque of spanner can be rapid
On conduction to pressure sensor elastomer, sensor sensing element is produced bigger effect, makes sensor accuracy class and stabilization
Property substantially reduces.
However, in the field of pressure measurement of reality, often economy is needed easily to measure Jie while pressure measurement
Matter temperature.
Therefore, exploitation is a kind of good with high certainty of measurement, stability, while energy economy easily measures medium temperature, length
The temperature and pressure compound sensor of phase reliably working is of crucial importance.
By sputtered thin film pressure transducer pressure-inducing nozzle and pedestal separate machined and design stress isolation channel, it is ensured that the machine of spanner
Stress caused by tool torque will not conduct on pressure sensor elastomer so as to ensureing sensor long-term stable operation；Simultaneously
Increase economical and practical thermo-sensitive resistor for measuring medium temperature, solve the problems, such as above-mentioned.
Utility model content
The purpose of this utility model is to provide a kind of temperature and pressure compound sensors, in view of the deficiencies of the prior art, are retaining
Outside original advantage of sputtered thin film pressure transducer, the purpose that temperature, pressure measures simultaneously is realized.
For solution more than technical problem, the technical solution of the utility model is：A kind of temperature and pressure compound sensor, feature exist
In：Including pressure-inducing nozzle, pedestal, elastomer, shell, thermo-sensitive resistor.
The surface of elastomer manufactures four thin film strain resistors by ion beam sputtering process and forms Wheatstone bridge, uses
In measurement pressure medium.
The surface of elastomer sticks the thermo-sensitive resistor for measuring medium temperature.
Stress isolation slot is machined on the outside of the pressure-inducing nozzle middle and upper part, to ensure stress caused by the mechanical torque of spanner
Will not conduct on the elastomer so as to ensureing sensor long-term stable operation.
Compared with prior art, had the beneficial effect that possessed by the utility model：Due to by sputtered thin film pressure transducer
Pressure-inducing nozzle and pedestal separate machined, also, pressure-inducing nozzle is machined with stress isolation slot, and sensor connects with pressure medium measurement pipeline
When connecing, larger stress will not be conducted to pressure sensor elastomer caused by the mechanical torque of spanner and deformation, can ensure that
The measurement accuracy and long-time stability of sensor, while increase economical and practical thermo-sensitive resistor for measuring medium temperature.So
The high-performance temperature and pressure compound sensor product that high certainty of measurement, stability are good, can measure temperature simultaneously can be obtained.
Description of the drawings
Fig. 1 is the structure diagram of the temperature and pressure compound sensor of the utility model.
In figure：1st, pressure-inducing nozzle, 11, tracting pressuring hole, 12, stress isolation slot, 2, pedestal
3rd, elastomer, 4, shell, 5, thermo-sensitive resistor, 6, pressure pad
13rd, pressure signal line, 14, temperature signal line
Specific embodiment
As shown in Figure 1, a kind of temperature and pressure compound sensor, including pressure-inducing nozzle 1, pedestal 2, elastomer 3, shell 4, thermo-sensitive resistor
5.The pressure-inducing nozzle 1 is using the impulse structural member of mechanical processing, and lower end center is machined with the tracting pressuring hole 11 introduced for pressure,
Stress isolation slot 12 is machined on the outside of middle and upper part, to ensure sensor when being connected with pressure medium measurement pipeline, the machine of spanner
Stress caused by tool torque will not conduct on the elastomer 3 so as to ensureing sensor long-term stable operation.
The elastomer 3 is a kind of Elastic Cylindrical element, and surface manufactures four films by ion beam sputtering process should
Become resistance and form Wheatstone bridge (being not drawn into figure), for measuring pressure medium.The input/output signal of Wheatstone bridge leads to
The pressure signal line 13 (only drawing two in figure) being welded on pressure pad 6 is crossed to be attached with the external world.
The small-sized thermo-sensitive resistor 5 is close on 3 surface of elastomer, and when medium acts on elastomer, medium temperature passes
The surface of the elastomer 3 is led, the thermo-sensitive resistor 5 can be convenient for measuring medium temperature.The temperature signal of the thermo-sensitive resistor 5
It is attached by temperature signal line 14 (one is only drawn in figure) with the external world.
The elastomer 3 is mounted on the upper end of the pressure-inducing nozzle 1, and the two joint carries out circumferential sealing and welds to be formed completely
Sealing it is whole.The pressure-inducing nozzle 1 that elastomer 3 is welded is embedded in the lower end boss of the pedestal 2 and carries out circumferential sealing welding.
At this moment, the stress isolation slot 12 is formd between the pressure-inducing nozzle 1 and pedestal 2, to isolate the machine that spanner turns pedestal 2
Stress caused by tool torque will not be conducted on the elastomer 3, so as to ensure sensor long-term stable operation.
Shell 4 is that a kind of circular cylindrical shell is stopped, and upper end is provided with the outlet hole passed through convenient for 3 input/output signal line of elastomer.
The outer lug boss of lower end and the pedestal 2 is coincide and circumferential sealing welds to form a complete sealing entirety.
Sensor operating principles：When pressure medium is entered by the tracting pressuring hole 11, the elastomer 3 is made to be under pressure work
With this electric bridge disequilibrium of the favour on 3 surface of elastomer outwards exports the electricity proportional to pressure by pressure signal line 13
Signal is achieved with sensor pressure size by detecting the electric signal.It can easily be surveyed by thermo-sensitive resistor 5 simultaneously
Medium temperature is measured, realizes the duplex measurement of temperature, pressure.
The above is only the better embodiment of the utility model, is not construed as the limit to the scope of the utility model
System, and the right that the utility model is advocated is not limited thereto, all personages for being familiar with this field skill, according to
Technology contents disclosed by the utility model, can think easily and equivalence changes, the scope of protection of the utility model should all be fallen into
It is interior.
Claims (1)
1. a kind of temperature and pressure compound sensor, it is characterised in that：Including pressure-inducing nozzle (1), pedestal (2), elastomer (3), shell (4),
Thermo-sensitive resistor (5)；
Elastomer (3) surface manufactures four thin film strain resistors by ion beam sputtering process and forms Wheatstone bridge, uses
In measurement pressure medium；
The thermo-sensitive resistor (5) is sticked for measuring medium temperature in elastomer (3) surface；
Stress isolation slot (12) is machined on the outside of pressure-inducing nozzle (1) middle and upper part, to ensure caused by the mechanical torque of spanner
Stress will not conduct on the elastomer (3) so as to ensureing sensor long-term stable operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721329577.2U CN207395918U (en) | 2017-10-17 | 2017-10-17 | Temperature and pressure compound sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721329577.2U CN207395918U (en) | 2017-10-17 | 2017-10-17 | Temperature and pressure compound sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207395918U true CN207395918U (en) | 2018-05-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721329577.2U Active CN207395918U (en) | 2017-10-17 | 2017-10-17 | Temperature and pressure compound sensor |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108692769A (en) * | 2018-06-01 | 2018-10-23 | 无锡莱顿电子有限公司 | A kind of temperature pressure combinations sensor |
| CN108931314A (en) * | 2018-08-14 | 2018-12-04 | 中国电子科技集团公司第三十八研究所 | A kind of temperature, pressure integral sensor core and preparation method thereof |
| CN111397776A (en) * | 2019-11-13 | 2020-07-10 | 中国科学院微电子研究所 | Temperature and pressure composite sensor |
| CN111896876A (en) * | 2020-08-10 | 2020-11-06 | 昆山市和风清晖能源科技有限公司 | Ag-C-PDMS temperature and pressure sensor for monitoring running state of lithium battery |
| CN114659561A (en) * | 2022-03-25 | 2022-06-24 | 湖南启泰传感科技有限公司 | Temperature and pressure integrated sensor and packaging method |
| CN116337145A (en) * | 2023-02-22 | 2023-06-27 | 松诺盟科技有限公司 | Nano-film temperature and pressure composite sensor and preparation method and application thereof |
-
2017
- 2017-10-17 CN CN201721329577.2U patent/CN207395918U/en active Active
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108692769A (en) * | 2018-06-01 | 2018-10-23 | 无锡莱顿电子有限公司 | A kind of temperature pressure combinations sensor |
| CN108931314A (en) * | 2018-08-14 | 2018-12-04 | 中国电子科技集团公司第三十八研究所 | A kind of temperature, pressure integral sensor core and preparation method thereof |
| CN108931314B (en) * | 2018-08-14 | 2019-11-15 | 中国电子科技集团公司第三十八研究所 | A kind of temperature, pressure integral sensor core and preparation method thereof |
| CN111397776A (en) * | 2019-11-13 | 2020-07-10 | 中国科学院微电子研究所 | Temperature and pressure composite sensor |
| CN111896876A (en) * | 2020-08-10 | 2020-11-06 | 昆山市和风清晖能源科技有限公司 | Ag-C-PDMS temperature and pressure sensor for monitoring running state of lithium battery |
| CN114659561A (en) * | 2022-03-25 | 2022-06-24 | 湖南启泰传感科技有限公司 | Temperature and pressure integrated sensor and packaging method |
| CN114659561B (en) * | 2022-03-25 | 2024-03-15 | 湖南启泰传感科技有限公司 | Temperature and pressure integrated sensor |
| CN116337145A (en) * | 2023-02-22 | 2023-06-27 | 松诺盟科技有限公司 | Nano-film temperature and pressure composite sensor and preparation method and application thereof |
| CN116337145B (en) * | 2023-02-22 | 2024-01-23 | 松诺盟科技有限公司 | Nano-film temperature and pressure composite sensor and preparation method and application thereof |
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Legal Events
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180925 Address after: 410331 A5, Changsha e center, No. 18, Xiang Tai Road, Liuyang, Hunan. Patentee after: Technology Co., Ltd. Address before: 102101 building 26, No. 8, Feng Gu Road, Badaling Development Zone, Yanqing, Beijing. Patentee before: BEIJING ZHONGHANG XINGSHENG MEASUREMENT AND CONTROL TECHNOLOGY CO., LTD. |