CN108931314B - A kind of temperature, pressure integral sensor core and preparation method thereof - Google Patents
A kind of temperature, pressure integral sensor core and preparation method thereof Download PDFInfo
- Publication number
- CN108931314B CN108931314B CN201810923978.3A CN201810923978A CN108931314B CN 108931314 B CN108931314 B CN 108931314B CN 201810923978 A CN201810923978 A CN 201810923978A CN 108931314 B CN108931314 B CN 108931314B
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- China
- Prior art keywords
- stainless steel
- feeler lever
- temperature
- pressure
- elastomer
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/22—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L2009/0066—Mounting arrangements of diaphragm transducers; Details thereof, e.g. electromagnetic shielding means
- G01L2009/0067—Mounting arrangements of diaphragm transducers; Details thereof, e.g. electromagnetic shielding means with additional isolating diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L2019/0053—Pressure sensors associated with other sensors, e.g. for measuring acceleration, temperature
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Nonlinear Science (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The invention discloses a kind of temperature, pressure integral sensor cores and preparation method thereof, the stainless steel feeler lever has hollow portion, the thermistor is placed on the bottom of the hollow portion of stainless steel feeler lever, silica gel is filled between the thermistor and stainless steel feeler lever, the top of the stainless steel feeler lever and stainless steel elastomer are connected as one, the top of the stainless steel adapting piece and stainless steel elastomer are linked together, the stainless steel adapting piece is set on stainless steel feeler lever, and the top of stainless steel elastomer is arranged in the pressure-sensitive film.The present invention effectively integrates stainless steel probe rod type temperature sensor and Thin Stainless Steel membrane pressure sensor, the direct contact measurement medium of stainless steel feeler lever, it can be realized the high-acruracy survey and quick response of temperature, and full soldering stainless steel structure, it is hermetically sealed, No leakage, high reliablity are suitable for various gases, fluid pressure and temperature and measure occasion.
Description
Technical field
The temperature, pressure integral sensor more particularly to a kind of temperature that the present invention relates to a kind of based on piezoresistive effect
Pressure integral sensor core and preparation method thereof.
Background technique
Temperature, pressure one stainless steel sensor core, it is intended to realize the integrated of temperature and pressure measurement, simultaneously
Realize temperature, the detection of the high-precision of pressure.Temperature sensor, pressure sensor have very wide in fields such as automobile, industry, space flight
General application is the most important two kinds of sensors of sensor field.Temperature and pressure sensor is often used together, into
It is also required to carry out the measurement of temperature or pressure mostly when liquid, atmospheric pressure or temperature measure in row pipeline or container.
Compared to the sensor of temperature, pressure one, two independent sensors need to install respectively, need two sets of process connectivity ports
With electrical connection port, the electrical complexity of a possibility that pressure medium is revealed and monitoring system is increased.For example, being sent out in automobile
The monitoring of motivation air conditioner coolant, brake system, natural cylinder block needs to carry out temperature and pressure measurement, temperature and pressure simultaneously in applying
The sensor of one can reduce process connectivity port, reduce linkage editor, substantially reduce monitoring medium refrigerant, natural gas, brake
A possibility that working medias such as vehicle oil are revealed, improves the reliability of system.Therefore, temperature, pressure integrative sensor have been complied with small
Type, integrated development need are an important trends of sensor industry development.
Chinese invention patent application: a kind of high-precision temperature pressure sensor (105466483 A of CN), using MEMS core
Piece carry out pressure measurement, chip pressure-sensitive face directly by pressure guide hole contact survey pressure medium, chip be highly prone to dust pickup and
The corrosion of the media such as steam, temperature-measuring thermistor are also directly exposed in measuring medium, also the corrosion of unbearable working media,
Reliability is very poor；Chinese utility model patent: compound type temperature pressure sensor (202267563 U of CN), by thermistor packet
It is enclosed in oil filling core body, heating power, which needs to conduct step by step, gets to thermistor, can not effectively measure the temperature of working media completely
Degree, and the response time is extremely slow.
Summary of the invention
Technical problem to be solved by the present invention lies in: it cannot achieve two kinds of sensors in the prior art and be effectively combined
Together, it responds rapidly to simultaneously, provides a kind of temperature, pressure integral sensor core and preparation method thereof.
The present invention is to solve above-mentioned technical problem, a kind of temperature, pressure integral type of the invention by the following technical programs
Sensor core, including thermistor, pressure-sensitive film, stainless steel feeler lever, stainless steel elastomer and stainless steel adapting piece；It is described not
The steel feeler lever that becomes rusty has hollow portion, and the thermistor is placed on the bottom of the hollow portion of stainless steel feeler lever, the thermistor with
Silica gel is filled between stainless steel feeler lever, the top of the stainless steel feeler lever and stainless steel elastomer be connected as one, it is described not
The top of rust steel fastener and stainless steel elastomer are linked together, and the stainless steel adapting piece is set on stainless steel feeler lever, institute
State the top that stainless steel elastomer is arranged in pressure-sensitive film.
The stainless steel elastomer is disc structure, and the center of the stainless steel elastomer is offered for stainless steel feeler lever
The central through hole passed through, the central through hole offer ring-shaped groove outside, and the periphery of the ring-shaped groove is solid construction.
As one of preferred embodiment of the invention, the resistance value of the thermistor is drawn by connecting lead wire along stainless steel feeler lever
Out.
The pressure-sensitive film includes four varistors, two zero-regulator resistors；The varistor and zero-regulator resistor pass through
Plain conductor connects to form Wheatstone bridge, and there are four export for power input and differential signal Wheatstone bridge tool
Lead pad.
As one of preferred embodiment of the invention, the stainless steel feeler lever and stainless steel elastomer pass through welding and are linked as one
Body.
As one of preferred embodiment of the invention, the stainless steel adapting piece and stainless steel elastomer pass through welding and are linked as one
Body.
As one of preferred embodiment of the invention, the stainless steel elastomer is made of 17-4H stainless steel.
As one of preferred embodiment of the invention, the stainless steel adapting piece and stainless steel feeler lever are 304,204 stainless steels
It is made.
As one of preferred embodiment of the invention, connection screw thread is provided on the outside of the stainless steel adapting piece.For even
Connect external devices.
A kind of preparation method of temperature, pressure integral sensor core, comprising the following steps:
(1) stainless steel elastomer, stainless steel adapting piece are made, stainless steel feeler lever is then made, is stuck in its bottom not
The bottom of rust steel fastener；
(2) insulating layer, graphical is successively made in the upper surface of stainless steel elastomer by thick-film technique or sputtering technology
Piezoresistance layer, graphical zero-regulator resistor layer, patterned lead layer, graphical pad layer and insulating layer form pressure-sensitive film；
(3) stainless steel elastomer and stainless steel feeler lever are welded together；
(4) stainless steel elastomer is welded together with stainless steel adapting piece；
(5) thermistor with connecting lead wire is assembled with stainless steel feeler lever, and carries out silicone filler.
The present invention has the advantage that the present invention by stainless steel probe rod type temperature sensor and stainless steel compared with prior art
Diaphragm pressure sensor effectively integrates, and the direct contact measurement medium of stainless steel feeler lever can be realized the high-precision of temperature
Degree measurement and quick response, and full soldering stainless steel structure, hermetically sealed, No leakage, high reliablity are suitable for various gases, liquid
Body pressure and temperature measure occasion.
Detailed description of the invention
Fig. 1 is of the invention to cut open schematic diagram；
Fig. 2 is the top view of Fig. 1.
Specific embodiment
It elaborates below to the embodiment of the present invention, the present embodiment carries out under the premise of the technical scheme of the present invention
Implement, the detailed implementation method and specific operation process are given, but protection scope of the present invention is not limited to following implementation
Example.
As depicted in figs. 1 and 2, a kind of temperature, pressure integral sensor core of the present embodiment, including thermistor 1,
Pressure-sensitive film 7, stainless steel feeler lever 4, stainless steel elastomer 6 and stainless steel adapting piece 9；The stainless steel feeler lever 4 has hollow portion,
The thermistor 1 is placed on the bottom of the hollow portion of stainless steel feeler lever 4, fills out between the thermistor 1 and stainless steel feeler lever 4
Filled with silica gel 2, the top of the stainless steel feeler lever 4 and stainless steel elastomer 6 are connected as one, the stainless steel adapting piece 9
Top and stainless steel elastomer 6 are linked together, and the stainless steel adapting piece 9 is set on stainless steel feeler lever 4, the pressure-sensitive film
7 are arranged in the top of stainless steel elastomer 6.
The stainless steel elastomer 6 is disc structure, and the center of the stainless steel elastomer 6 is offered to be visited for stainless steel
The central through hole 61 that bar 4 passes through, the central through hole 61 offer ring-shaped groove 62 outside, and the periphery of the ring-shaped groove 62 is real
Core structure 63.The structure of the stainless steel elastomer 6 of the present embodiment can generate deformation effectively to the pressure felt, thus
Realize the measurement to pressure.
The resistance value of the thermistor 1 is drawn by connecting lead wire 3 along stainless steel feeler lever 4, and realization has temperature data
Effect transmission.
The pressure-sensitive film 7 includes four varistors, 71, two zero-regulator resistors 72；The varistor 71 and zeroing electricity
Resistance 72 forms Wheatstone bridge by the connection of plain conductor 73, and there are four be used for power input and difference for the Wheatstone bridge tool
The lead pad 74 of signal output.
The stainless steel feeler lever 4 and stainless steel elastomer 6 are linked together by welding, form the first weld seam 8.It is described stainless
Steel fastener 9 and stainless steel elastomer 6 are linked together by welding, form the second weld seam 5.
The stainless steel elastomer 6 is made of 17-4H stainless steel.The stainless steel adapting piece 9 and stainless steel feeler lever 4 are
304,204 stainless steels are made.
The outside of the stainless steel adapting piece 9 is provided with connection screw thread 10.For connecting external devices.
Preparation process is as follows:
(1) it by machining production stainless steel elastomer 6, stainless steel adapting piece 9, is then made of metal stretching technique
Stainless steel feeler lever 4 makes its bottom be stuck in the bottom of stainless steel adapting piece 9；
(2) insulating layer, graphical is successively made in the upper surface of stainless steel elastomer 6 by thick-film technique or sputtering technology
Piezoresistance layer, 72 layers of graphical zero-regulator resistor, patterned lead layer, graphical pad layer and insulating layer form pressure-sensitive film 7；
(3) stainless steel elastomer 6 and stainless steel feeler lever 4 are welded together by Laser Welding；
(4) stainless steel elastomer 6 and stainless steel adapting piece 9 are welded together by Laser Welding；
(5) thermistor 1 with connecting lead wire 3 is assembled with stainless steel feeler lever 4, and carries out the filling of silica gel 2.When
When stainless steel elastomer 6 is under pressure that deformation occurs, corresponding 71 value of varistor can generate variation, so that Wheatstone bridge is defeated
Voltage signal corresponding with pressure out, realizes the measurement of pressure.In sensor core body running, stainless steel feeler lever 4 can be contacted
To working media to be measured, heat is quickly transmitted to thermistor 1 by way of heat transfer, and 1 heated resistance of thermistor occurs
Variation corresponding with temperature, to realize the measurement of temperature.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (10)
1. a kind of temperature, pressure integral sensor core, which is characterized in that visited including thermistor, pressure-sensitive film, stainless steel
Bar, stainless steel elastomer and stainless steel adapting piece；The stainless steel feeler lever has hollow portion, and the thermistor is placed on stainless
The bottom of the hollow portion of steel feeler lever is filled with silica gel between the thermistor and stainless steel feeler lever, the stainless steel feeler lever
Top and stainless steel elastomer are connected as one, and the top of the stainless steel adapting piece and stainless steel elastomer are linked together, institute
It states stainless steel adapting piece to be set on stainless steel feeler lever, the top of stainless steel elastomer, temperature-sensitive electricity is arranged in the pressure-sensitive film
The connecting lead wire of resistance is drawn along stainless steel feeler lever, and the center of stainless steel elastomer offers the center passed through for stainless steel feeler lever
Through-hole.
2. a kind of temperature, pressure integral sensor core according to claim 1, which is characterized in that the stainless steel bomb
Property body be disc structure, ring-shaped groove is offered outside the central through hole, the periphery of the ring-shaped groove is solid construction.
3. a kind of temperature, pressure integral sensor core according to claim 1, which is characterized in that the thermistor
Resistance value by connecting lead wire along stainless steel feeler lever draw.
4. a kind of temperature, pressure integral sensor core according to claim 1, which is characterized in that the pressure-sensitive film
Including four varistors, two zero-regulator resistors；The varistor connected with zero-regulator resistor by plain conductor to be formed favour this
Energization bridge, there are four the lead pad exported for power input and differential signal for the Wheatstone bridge tool.
5. a kind of temperature, pressure integral sensor core according to claim 1, which is characterized in that the stainless steel is visited
Bar and stainless steel elastomer are linked together by welding.
6. a kind of temperature, pressure integral sensor core according to claim 1, which is characterized in that the stainless steel connects
Fitting and stainless steel elastomer are linked together by welding.
7. a kind of temperature, pressure integral sensor core according to claim 1, which is characterized in that the stainless steel bomb
Property body is made of 17-4H stainless steel.
8. a kind of temperature, pressure integral sensor core according to claim 1, which is characterized in that the stainless steel connects
Fitting and stainless steel feeler lever are made of 304,204 stainless steels.
9. a kind of temperature, pressure integral sensor core according to claim 1, which is characterized in that the stainless steel connects
Connection screw thread is provided on the outside of fitting.
10. a kind of preparation method of temperature, pressure integral sensor core as described in any one of claims 1 to 9, special
Sign is, comprising the following steps:
(1) stainless steel elastomer, stainless steel adapting piece are made, stainless steel feeler lever is then made, its bottom is made to be stuck in stainless steel
The bottom of connector；
(2) insulating layer, graphical pressure drag are successively made in the upper surface of stainless steel elastomer by thick-film technique or sputtering technology
Layer, graphical zero-regulator resistor layer, patterned lead layer, graphical pad layer and insulating layer form pressure-sensitive film；
(3) stainless steel elastomer and stainless steel feeler lever are welded together；
(4) stainless steel elastomer is welded together with stainless steel adapting piece；
(5) thermistor with connecting lead wire is assembled with stainless steel feeler lever, and carries out silicone filler.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810923978.3A CN108931314B (en) | 2018-08-14 | 2018-08-14 | A kind of temperature, pressure integral sensor core and preparation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810923978.3A CN108931314B (en) | 2018-08-14 | 2018-08-14 | A kind of temperature, pressure integral sensor core and preparation method thereof |
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| CN108931314A CN108931314A (en) | 2018-12-04 |
| CN108931314B true CN108931314B (en) | 2019-11-15 |
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| CN111157165B (en) * | 2019-12-29 | 2022-03-18 | 西安中星测控有限公司 | MCS pressure sensor and preparation method thereof |
| CN113555293B (en) * | 2021-07-21 | 2023-06-27 | 中国电子科技集团公司第三十八研究所 | Method for testing temperature stress field of silicon substrate type transceiver component |
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| JP2001174352A (en) * | 1999-12-15 | 2001-06-29 | Tokin Corp | Pressure/temperature sensor and pressure/temperature composite detecting element |
| CN2839604Y (en) * | 2005-10-18 | 2006-11-22 | 成都航空仪表公司 | Conjunctive sensor device for monitoring temperature and pressure |
| CN201707167U (en) * | 2010-05-18 | 2011-01-12 | 北京遥测技术研究所 | Ultralow-temperature diaphragm pressure/temperature compound sensor |
| CN202033054U (en) * | 2011-04-21 | 2011-11-09 | 郑州弘毅电子技术有限公司 | Pressure/temperature integrated sensor |
| CN102812224A (en) * | 2009-12-10 | 2012-12-05 | 埃尔特克有限公司 | Integrated Sensor For Humidity, Temperature And Pressure In Exhaust Gas |
| CN105136377A (en) * | 2015-08-18 | 2015-12-09 | 熊辉 | Sputtering film hammering union pressure sensor |
| CN207395918U (en) * | 2017-10-17 | 2018-05-22 | 北京中航兴盛测控技术有限公司 | Temperature and pressure compound sensor |
-
2018
- 2018-08-14 CN CN201810923978.3A patent/CN108931314B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001174352A (en) * | 1999-12-15 | 2001-06-29 | Tokin Corp | Pressure/temperature sensor and pressure/temperature composite detecting element |
| CN2839604Y (en) * | 2005-10-18 | 2006-11-22 | 成都航空仪表公司 | Conjunctive sensor device for monitoring temperature and pressure |
| CN102812224A (en) * | 2009-12-10 | 2012-12-05 | 埃尔特克有限公司 | Integrated Sensor For Humidity, Temperature And Pressure In Exhaust Gas |
| CN201707167U (en) * | 2010-05-18 | 2011-01-12 | 北京遥测技术研究所 | Ultralow-temperature diaphragm pressure/temperature compound sensor |
| CN202033054U (en) * | 2011-04-21 | 2011-11-09 | 郑州弘毅电子技术有限公司 | Pressure/temperature integrated sensor |
| CN105136377A (en) * | 2015-08-18 | 2015-12-09 | 熊辉 | Sputtering film hammering union pressure sensor |
| CN207395918U (en) * | 2017-10-17 | 2018-05-22 | 北京中航兴盛测控技术有限公司 | Temperature and pressure compound sensor |
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