CN102768094B - A kind of fiber bragg grating pressure sensor - Google Patents

A kind of fiber bragg grating pressure sensor Download PDF

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Publication number
CN102768094B
CN102768094B CN201210280902.6A CN201210280902A CN102768094B CN 102768094 B CN102768094 B CN 102768094B CN 201210280902 A CN201210280902 A CN 201210280902A CN 102768094 B CN102768094 B CN 102768094B
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fiber grating
flexible sheet
temperature
optical fiber
body cavity
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CN102768094A (en
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曹春耕
杜新民
孙斌
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SHANGHAI SENSORLEAD CO Ltd
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SHANGHAI SENSORLEAD CO Ltd
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Abstract

The present invention relates to a kind of fiber bragg grating pressure sensor, including outside protective pipe, pressure measurement fiber grating, flexible substrates and flexible sheet, flexible sheet is located in outside protective pipe, outside protective pipe is separated to form measured stream body cavity and reference stream body cavity, measured stream body cavity connects detected fluid, reference stream body cavity connects air, flexible substrates are located at reference fluid intracavitary, and it is fixedly connected with flexible sheet, pressure sensor also includes temperature-measuring optical fiber grating, the temperature-measuring optical fiber grating is serially connected with same optical fiber with pressure measurement fiber grating, the optical fiber passes through from flexible substrates and flexible sheet, pressure measurement fiber grating is located at reference fluid intracavitary, the both ends of pressure measurement fiber grating are separately fixed in flexible substrates and flexible sheet, temperature-measuring optical fiber grating is located at detected fluid intracavitary, one end connection pressure measurement fiber grating of temperature-measuring optical fiber grating, the other end is free end.Compared with prior art, the present invention has the advantages of measurement accuracy is high.

Description

A kind of fiber bragg grating pressure sensor
Technical field
The present invention relates to a kind of pressure sensor, more particularly, to a kind of fiber grating pressure sensing with temp sensing function Device.
Background technology
Fluid pressure sensor is a kind of widely used sensor, as bridge, dam, the hydrology, tunnel, chemical industry, meteorology, The conventional sensing element of side slope etc., examinations or monitoring.In existing various detecting strategies, because temperature interference, electromagnetism are done Disturb, security, the over long distances reason such as transmission, service life, reliability, the pressure that can not solve this serial industry well is visited Survey problem.
And fiber bragg grating pressure sensor can be then solved in current existing detecting strategy, because temperature interference, electromagnetism are done Disturb, security, the problem of transmission, service life, reliability etc. cause over long distances.But existing fiber grating pressure sensing Device does not have temp sensing function typically, because fiber grating has temperature, the characteristic of strain cross sensitivity, it is therefore necessary to enter trip temperature Compensation;Secondly, in the encapsulating structure of existing fiber grating pressure sensor, flexible sheet or flexible substrates are directly and outside protective pipe It is rigidly connected, the stress of outside protective pipe can disturb pressure measurement fiber grating, so as to influence measurement accuracy;In addition, existing product is hit by a bullet Property diaphragm side reference stream body cavity without and atmosphere, it is impossible to effectively eliminate sensor internal residual gas pressure or outside The influence of atmospheric pressure change.
The content of the invention
It is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide a kind of measurement accuracy is high Fiber bragg grating pressure sensor.
The purpose of the present invention can be achieved through the following technical solutions:
A kind of fiber bragg grating pressure sensor, including outside protective pipe, pressure measurement fiber grating, flexible substrates and flexible sheet, Described flexible sheet is located in outside protective pipe, and outside protective pipe is separated to form into measured stream body cavity and reference stream body cavity, described Measured stream body cavity connects detected fluid, described reference stream body cavity connection air, and described flexible substrates are located at reference stream body cavity It is interior, and be fixedly connected with flexible sheet, described pressure sensor also includes temperature-measuring optical fiber grating, and the temperature-measuring optical fiber grating is with surveying Pressure fiber grating is serially connected with same optical fiber, and the optical fiber passes through from flexible substrates and flexible sheet, described pressure measurement fiber grating Positioned at reference fluid intracavitary, the both ends of pressure measurement fiber grating are separately fixed in flexible substrates and flexible sheet, described thermometric Fiber grating is located at detected fluid intracavitary, and one end connection pressure measurement fiber grating of temperature-measuring optical fiber grating, the other end is free end;
When measuring, the pressure differential of flexible sheet both sides measured stream body cavity and reference stream body cavity acts on flexible sheet, So that flexible sheet produces deformation and drives pressure measurement fiber grating to produce axial deformation, so as to measure Fluid pressure, temperature-measuring optical fiber light Grid are located at detected fluid intracavitary, and the temperature of detected fluid, and the measurement knot to pressure measurement fiber grating are measured by its temperature-sensing property Fruit carries out temperature-compensating.
" O " type sealing ring is provided between described outside protective pipe and flexible sheet, " O " type sealing ring is somebody's turn to do and is used to improve sealing Property and eliminate influence of the deformation to flexible sheet of outside protective pipe.
Described flexible substrates have one or more passages, make the air communication of flexible substrates both sides.
Described flexible substrates and the edge of flexible sheet are provided with the pressing structure to cooperate, and flexible substrates pass through fixation Platen is pressed together on flexible sheet.
Described fixed platen is provided with one or more passages, makes the air communication of fixed platen both sides.
The reference stream body cavity side of described outside protective pipe is provided with an air connectivity hole, described reference stream body cavity and air Between connected by the air connectivity hole.
The measured stream body cavity side of described outside protective pipe is provided with filter screen.
Protection capillary is arranged with outside described temperature-measuring optical fiber grating.
The both ends of described pressure measurement fiber grating are fixed in flexible substrates and flexible sheet by way of welding.
Described flexible substrates are provided with prestretching nut, and the prestretching nut is changed by the position of threaded adjusting fixed platen Become the pressing position of flexible substrates, both ends is fixed on the pressure measurement fiber grating of flexible substrates and flexible sheet in pre-stretching shape State.
Compared with prior art, the present invention has advantages below:
One, temperature interference is eliminated, invention increases temp sensing function, the temperature of detected fluid can be measured, and to root Temperature-compensating is carried out to pressure measurement result according to the temperature.
Two, do not influenceed by extraneous stress, it is close provided with " O " type sealing ring between outside protective pipe and flexible sheet of the invention Seal structure, the stress completely cut off between outside protective pipe and flexible member, in actual test often sensor by extraneous stress Interference, Isolation stress can improve the degree of accuracy of test, while make fluid pressure sensor application more extensive.
Three, inner atmosphere balance, the present invention in fixation clip and flexible substrates by setting passage, on outside protective pipe Air connectivity hole is set, by whole reference stream body cavity and atmosphere, effectively eliminates sensor internal residual gas pressure or outer The influence of portion's atmospheric pressure change, in the test as absolute pressure and relative pressure, it is only necessary to change the company of air pressure inside Logical mode is with regard to that can solve the influence of sensor internal gas pressure.
Brief description of the drawings
Fig. 1 is the structural representation of an embodiment of the present invention;
Fig. 2 be another embodiment of the present invention temperature-measuring optical fiber grating with pressure measurement optical fiber Bragg grating encapsulation in flexible sheet, bullet Property substrate, fixed platen assembling after installation diagram;
Fig. 3 is the structural representation of flexible sheet in another embodiment, wherein (a) is front view, (b) is sectional view;
Fig. 4 is the structural representation of fixed platen in another embodiment, wherein (a) is front view, (b) is sectional view;
Fig. 5 is the structural representation of flexible substrates in another embodiment, wherein (a) is front view, (b) is sectional view;
In figure, 1 it is filter screen, 2 is that protection capillary 2,3 is flexible sheet, 4 is " O " type sealing ring, 5 is pad, 6 is Outside protective pipe, 7 be air connectivity hole, 8 be plug, 9 be flexible substrates, 10 be prestretching nut, 11 be fixed platen, 12 be ventilation Hole, 13 be pressure measurement fiber grating, 14 be temperature-measuring optical fiber grating, 15 be pedestal.
Embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.
Embodiment 1
As shown in figure 1, a kind of fiber bragg grating pressure sensor, including outside protective pipe 6, pressure measurement fiber grating 13, temperature measuring optical Fine grating 14, fixed platen 11, flexible substrates 9 and flexible sheet 3.Flexible sheet 3 is located in outside protective pipe 6, by outside protective pipe 6 It is separated to form measured stream body cavity and reference stream body cavity, measured stream body cavity connection detected fluid, reference stream body cavity connection air.Outer guarantor The measured stream body cavity side of pillar 6 is provided with filter screen 1, and reference stream body cavity side is provided with plug 8 and air connectivity hole 7 so that reference stream Connected between body cavity and air, effectively eliminate the influence of sensor internal residual gas pressure or outside atmospheric pressure change.Outside " O " type sealing ring 4 is provided between protection pipe 6 and flexible sheet 3, " O " type sealing ring 4 is somebody's turn to do and is used to improve sealing and eliminates outer Influence of the deformation of protection pipe to flexible sheet, its mounting groove are opened on outside protective pipe 6.
Flexible substrates 9 are located at reference fluid intracavitary, and the edge of its edge and flexible sheet is provided with the pressing knot to cooperate Structure, and fixation is pressed by fixed platen 11 by this pressing structure.The rear portion of flexible substrates 9 is provided with prestretching nut 10, the prestretching Nut 10 passes through the position of threaded adjusting fixed platen 11, the pressing position of change flexible substrates 9.Flexible substrates 9 and fixed pressure Passage 12 is designed with disk 11, air is circulated in the both sides of flexible substrates 9 and fixed platen 11, ensures whole reference Fluid cavity air pressure is consistent.
Temperature-measuring optical fiber grating 14 and pressure measurement fiber grating 13 are serially connected with same optical fiber, and the optical fiber is from flexible substrates 9 and bullet The center of property diaphragm 3 passes through, and pressure measurement fiber grating 13 is located at reference fluid intracavitary, and its both ends is respectively welded at the He of flexible substrates 9 On two pads 5 of flexible sheet 3, pretensioned state is in by adjusting the pressure measurement fiber grating of prestretching nut 10, is surveyed Warm fiber grating 14 is located at detected fluid intracavitary, and outer cover is provided with protection capillary 2, and one end connection of temperature-measuring optical fiber grating 14 is surveyed Fiber grating 13 is pressed, the other end is free end;
When measuring, the pressure differential of flexible sheet both sides measured stream body cavity and reference stream body cavity acts on flexible sheet, So that flexible sheet produces deformation and drives pressure measurement fiber grating to produce axial deformation, so as to measure Fluid pressure, temperature-measuring optical fiber light Grid are located at detected fluid intracavitary, and the temperature of detected fluid, and the measurement knot to pressure measurement fiber grating are measured by its temperature-sensing property Fruit carries out temperature-compensating.
Embodiment 2
As shown in figs. 2 to 4, " O " the type sealing ring 4 of the fiber bragg grating pressure sensor in this example is provided with two, and it is pacified Tankage is opened on flexible sheet.Flexible substrates 9 and fixed platen 11 are respectively provided with one group of passage 12, wherein flexible substrates 9 On the quantity of passage 12 be 4, the quantity of passage 12 in fixed platen 11 is 6.The pad 5 of optical fiber can be located at one On individual pedestal 15, the pedestal 15 can be directly prepared into an entirety with flexible sheet 3, flexible substrates 9, can also be used as independent zero Part is connected with flexible sheet 3, flexible substrates 9.

Claims (6)

1. a kind of fiber bragg grating pressure sensor, including outside protective pipe, pressure measurement fiber grating, flexible substrates and flexible sheet, institute The flexible sheet stated is located in outside protective pipe, and outside protective pipe is separated to form into measured stream body cavity and reference stream body cavity, described quilt Flow measurement body cavity connects detected fluid, described reference stream body cavity connection air, it is characterised in that described flexible substrates are located at ginseng Examine in fluid cavity, and be fixedly connected with flexible sheet, described pressure sensor also includes temperature-measuring optical fiber grating, the temperature-measuring optical fiber Grating is serially connected with same optical fiber with pressure measurement fiber grating, and the optical fiber passes through from flexible substrates and flexible sheet, described pressure measurement Fiber grating is located at reference fluid intracavitary, and the both ends of pressure measurement fiber grating are separately fixed in flexible substrates and flexible sheet, institute The temperature-measuring optical fiber grating stated is located at detected fluid intracavitary, one end connection pressure measurement fiber grating of temperature-measuring optical fiber grating, and the other end is Free end,
When measuring, the pressure differential of flexible sheet both sides measured stream body cavity and reference stream body cavity acts on flexible sheet so that Flexible sheet produces deformation and drives pressure measurement fiber grating to produce axial deformation, so as to measure Fluid pressure, temperature-measuring optical fiber grating position In detected fluid intracavitary, the temperature of detected fluid is measured by its temperature-sensing property, and the measurement result of pressure measurement fiber grating is entered Trip temperature compensates;
" O " type sealing ring is provided between described outside protective pipe and flexible sheet, should " O " type sealing ring be used for improve sealing with And eliminate influence of the deformation of outside protective pipe to flexible sheet;
Described flexible substrates and the edge of flexible sheet are provided with the pressing structure to cooperate, and flexible substrates pass through fixed platen It is pressed together on flexible sheet;
Described fixed platen is provided with one or more passages, makes the air communication of fixed platen both sides;
Described flexible substrates have one or more passages, make the air communication of flexible substrates both sides.
A kind of 2. fiber bragg grating pressure sensor according to claim 1, it is characterised in that the ginseng of described outside protective pipe Examine fluid cavity side and be provided with an air connectivity hole, connected between described reference stream body cavity and air by the air connectivity hole It is logical.
A kind of 3. fiber bragg grating pressure sensor according to claim 1, it is characterised in that the quilt of described outside protective pipe Flow measurement body cavity side is provided with filter screen.
A kind of 4. fiber bragg grating pressure sensor according to claim 1, it is characterised in that described temperature-measuring optical fiber grating It is arranged with protection capillary outside.
A kind of 5. fiber bragg grating pressure sensor according to claim 1, it is characterised in that described pressure measurement fiber grating Both ends be fixed on by way of welding in flexible substrates and flexible sheet.
6. a kind of fiber bragg grating pressure sensor according to claim 1, it is characterised in that set in described flexible substrates There is prestretching nut, the prestretching nut changes the pressing position of flexible substrates, make both ends by the position of threaded adjusting fixed platen The pressure measurement fiber grating for being fixed on flexible substrates and flexible sheet is in pretensioned state.
CN201210280902.6A 2012-08-08 2012-08-08 A kind of fiber bragg grating pressure sensor Active CN102768094B (en)

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Publication number Priority date Publication date Assignee Title
CN103033308A (en) * 2012-12-17 2013-04-10 中国船舶重工集团公司第七一五研究所 Fiber grating pressure sensor with temperature real-time fine compensation
CN103115694B (en) * 2013-01-17 2015-02-04 中国地震局地壳应力研究所 Fiber Bragg grating (FBG) high-sensitivity temperature sensor based on low-melting-point glass welding
CN103344317B (en) * 2013-07-08 2016-08-10 武汉理工大学 Non-contact optical fiber grating vibration sensor and vibration measurement device and method
CN103439048A (en) * 2013-08-13 2013-12-11 中国航空工业集团公司北京长城计量测试技术研究所 Packaging structure easy to install and test of optical fiber pressure sensor
CN103925948B (en) * 2014-04-30 2016-09-07 中南大学 Coal mine explosion-proof type fiber grating pressure and temp multi-parameter sensor
CN104055509B (en) * 2014-07-04 2017-03-15 武汉汉双技术有限公司 Intracavity operation pressure monitoring system, regulating system and method
CN104864914B (en) * 2015-06-04 2017-03-08 武汉理工大学 Cylinder gas pressure based on Fibre Optical Sensor and temperature on-line testing method and system
CN106382999B (en) * 2016-09-06 2019-03-22 哈尔滨工业大学 Road fiber grating maximum principal stress sensor
CN109443629A (en) * 2018-10-29 2019-03-08 西安天舁敏道光电科技有限公司 A kind of differential pressure fibre-optical probe structure and its differential pressure fibre optical sensor

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CN1334920A (en) * 1998-12-04 2002-02-06 塞德拉公司 Bragg grating pressure sensor
CN201155997Y (en) * 2008-02-25 2008-11-26 北京基康科技有限公司 Optical fiber grating osmometer
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CN101408463A (en) * 2008-11-20 2009-04-15 曹春耕 Optical fiber grating static water level

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