CN109100080A - Quick response diaphragm pressure sensor and its manufacturing method - Google Patents
Quick response diaphragm pressure sensor and its manufacturing method Download PDFInfo
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- CN109100080A CN109100080A CN201811195291.9A CN201811195291A CN109100080A CN 109100080 A CN109100080 A CN 109100080A CN 201811195291 A CN201811195291 A CN 201811195291A CN 109100080 A CN109100080 A CN 109100080A
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- elastomer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
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- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a kind of quick response diaphragm pressure sensor and its manufacturing methods, including manufacture to connect casting die, sensing assembly, shell, conditioning circuit plate, interior outer lead, buffer etc..Each component is assembled and carries out fatigue and thermocycling, quick response diaphragm pressure sensor is made.Due to increasing buffer in sensor tracting pressuring hole, the upper end of buffer is provided with minor diameter pressure through-hole, it is not easy to flow out when being full of fluid media (medium) in tracting pressuring hole, when surveying pressure again, the sensitive diaphragm of elastomer can quickly experience pressure value by fluid media (medium), substantially increase the response speed of pressure sensor.In this way, pressure sensor has many advantages, such as that precision is high, stability is good, high reliablity, long working life, response speed simultaneously.
Description
Technical field
The present invention relates to sensor technical field more particularly to a kind of quick response diaphragm pressure sensor and its manufacturers
Method.
Background technique
Sputtered thin film pressure transducer is a kind of pressure sensor of function admirable, it has, and measurement accuracy is high, range is big,
The advantages that operating temperature range is wide, high reliablity, good stability, in aerospace, weaponry, petrochemical industry, metallurgy, energy
It is used widely in many fields such as source, traffic, industrial stokehold, Internet of Things.
The Normal practice of existing diaphragm pressure sensor product is that elastomer is welded on pressure-inducing nozzle, connects casting die or draws
Pressure mouth has a long section tracting pressuring hole, and when measuring pressure every time, fluid needs to get to the stress surface of elastomer full of tracting pressuring hole, surveys
It is slow to measure response speed, is not suitable for high-frequency pressure and measures occasion.
Therefore, it develops and a kind of remains with diaphragm pressure sensor excellent performance, fast response time quick response film
Pressure sensor is of crucial importance.
Sputtered thin film pressure transducer be using vacuum atom film deposition techniques, by insulating materials, Strain sensing material,
Protection materials etc. are deposited on surface of elastomer and the pressure sensor of a kind of function admirable that is formed, it has, and precision is high, stablizes
The advantages that property is good, operating temperature range is wide, high reliablity, long working life.Using in sputtered thin film pressure transducer tracting pressuring hole
Increase the method for buffer, greatly improves response speed when measuring pressure, can be very good to solve the above problems.
Summary of the invention
It is an object of the invention in view of the above-mentioned problems, providing a kind of quick response diaphragm pressure sensor and its manufacturer
Method, to realize that measurement accuracy is high, stability is good, operating temperature range is wide, high reliablity, long working life, fast response time etc.
Advantage.
In order to solve the above technical problems, the technical scheme is that a kind of quick response diaphragm pressure sensor manufactures
Method, comprising the following steps:
S1. inverted U cup-shaped elastomeric body is manufactured using machining process, the elastomer upper surface is polished directly, benefit
Being manufactured on the upper surface of the elastomer with film deposition techniques and pattern transfer technology there is sensitization to answer pressure
Power transformation hinders and is formed measuring circuit, carries out the high temperature anneal to the elastomer later；Elastomer upper surface periphery adds
Work is appeared on the stage edge, and the elastomer lower, outer perimeter is machined with sealing recess portion；
S2. using machining method manufacture have positioned at center tracting pressuring hole, be located at central upper portion position with it is described
The first recess chamber from bottom to up of tracting pressuring hole connection, the second recess chamber, third recess chamber, connecing for lower periphery press connecing for screw thread
Casting die；The lower end of the tracting pressuring hole for connecing casting die is machined with buffering internal screw thread；
S3. there is the round hole positioned at center, the upper snap ring positioned at top edge, position using the method manufacture of machining
In the retaining ring of the lower snap ring of lower edge；
S4. small with six side's inner hole of lower central, the top communicated with the six sides inner hole using the method manufacture of machining
The externally threaded buffer of buffering of diameter pressure through-hole, lower periphery；
S5. by sealing snare on the sealing recess portion of the elastomer, and will be described in the elastomer indentation with sealing ring
The the first recess chamber for connecing casting die will connect the second recess chamber of casting die, complete elastic parts described described in retaining ring insertion
Connect the assembly of casting die；Due to there is a presence of sealing ring and retaining ring, it is described connect casting die and elastic parts form one it is complete
Sealing is whole；
S6. it is intracavitary and fixed conditioning circuit plate to be mounted on the third recess for connecing casting die；
S7. welding equipment is utilized, lead is drawn in the lead pad of the elastomer and is welded to the conditioning circuit plate
Signal input part；
S8. the signal output end of the conditioning circuit plate is connect with the contact pin for being partially submerged into shell upper end by outer lead；
S9. the lower part of the housing is entangled and connects casting die, and connect the housing seal face of casting die, while in the shell and connecing pressure
The contact position of part carries out circumferential sealing welding；
S10. it using the buffering external screw thread of the buffer and the buffering screw-internal thread fit for connecing casting die, inserts a tool into described
It is screwed into tracting pressuring hole in six side's inner holes of buffer and by buffer, quick response diaphragm pressure sensor has been made；Work as fluid
Tracting pressuring hole, the inner cavity full of elastomer, due to the upper end minor diameter pressure through-hole of the buffer, impulse are pressed into through six side's inner holes
The fluid media (medium) being full of in hole is not easy to flow out, and when surveying pressure again, the sensitive diaphragm of elastomer can be quickly by the fluid media (medium)
Pressure value is experienced, the response speed of pressure sensor is improved；
S11. the quick response diaphragm pressure sensor product is subjected to high/low temperature and fatigue test；
S12. mark and calibration are carried out to the quick response diaphragm pressure sensor product, and encapsulates storage.
Preferably, the quick response diaphragm pressure sensor is made using the above method.
Compared with prior art, the advantageous effect of present invention is that: due in sputtered thin film pressure transducer impulse
Increasing buffer in hole, the upper end of buffer is provided with minor diameter pressure through-hole, is not easy to flow out when being full of fluid media (medium) in tracting pressuring hole,
When surveying pressure again, the sensitive diaphragm of elastomer can quickly experience pressure value by fluid media (medium), substantially increase pressure
The response speed of sensor.In this way, diaphragm pressure sensor has simultaneously, precision is high, stability is good, high reliablity, working life
The advantages that length, response speed.
The main performance index of quick response diaphragm pressure sensor of the invention is as follows:
Measurement range: 0~1~100MPa synthesis precision: 0.1%FS~0.5%FS
Operating temperature range: -70 DEG C~250 DEG C response speeds :≤1ms；
Zero temperature drift :≤± 0.005%FS/ DEG C long-time stability :≤± 0.1%FS/
Detailed description of the invention
Fig. 1 is the diagrammatic cross-section of quick response diaphragm pressure sensor of the invention.
Fig. 2 connects casting die diagrammatic cross-section for quick response diaphragm pressure sensor of the invention.
Fig. 3 is the elastic parts diagrammatic cross-section of quick response diaphragm pressure sensor of the invention.
Fig. 4 is the buffer diagrammatic cross-section of quick response diaphragm pressure sensor of the invention.
Fig. 5 is the retaining ring diagrammatic cross-section of quick response diaphragm pressure sensor of the invention.
Fig. 6 is that medium schematic diagram is full of in quick response diaphragm pressure sensor tracting pressuring hole of the invention.
In figure: 1, connecing casting die；2, elastic parts；3, shell；4, conditioning circuit plate；5, lead；6, outer lead；7, it buffers
Device；8, contact pin；9, connector；
11, tracting pressuring hole；12, pressure screw thread is connect；13, internal screw thread is buffered；14, the first recess chamber；15, the second recess chamber；16,
Three recess chambers；17, housing seal face；18, fluid media (medium)；
21, recess portion is sealed；22, elastomer；23, inner cavity；24, upper surface；25, retaining ring；26, it appears on the stage edge；27, lead welds
Disk；28, sealing ring；71, external screw thread is buffered；72, six side's inner hole；73, pressure through-hole；
251, upper snap ring；252, lower snap ring；；253, round hole.
Specific embodiment
The preferred embodiment of the present invention is illustrated below in conjunction with attached drawing, it should be understood that preferred implementation described herein
Example is merely to illustrate and explain the present invention, and is not intended to restrict the invention.
As shown in Fig. 1,2,3,4,5,6, a kind of quick response diaphragm pressure sensor is fallen using machining process manufacture
22 upper surface 24 of elastomer is polished directly, utilizes film deposition techniques and pattern transfer by U-shaped cup-shaped elastomeric body 22
Technology manufactures the strain resistor to pressure with sensitization on the upper surface 24 of the elastomer 22 and forms measuring circuit,
The high temperature anneal is carried out to the elastomer 22 later.The 22 upper surface periphery of elastomer, which is machined with, appears on the stage along 26, lower part
Periphery is machined with sealing recess portion 21.
Casting die 1 is connect using the method manufacture of machining, it is described connect casting die 1 and be located at center be machined with tracting pressuring hole 11,
The first recess chamber 14 from bottom to up, the second recess chamber being connected to the tracting pressuring hole 11 are machined with positioned at central upper portion position
15, third recess chamber 16.1 lower periphery of casting die that connects is machined with for connecing with what tested pressure pipeline or pressure vessel were connect
Press screw thread 12.The lower end of the tracting pressuring hole 11 for connecing casting die 1 is machined with the buffering internal screw thread 13 for installing buffer 7.
Retaining ring 25 is manufactured using the method for machining, the retaining ring 25 is located at center and is machined with convenient for lead
By round hole 235, be machined with upper snap ring 251 positioned at top edge, be machined with lower snap ring 252 positioned at lower edge.
Buffer 7 is manufactured using the method for machining, 7 lower central of buffer is machined with six side's inner holes 72, with
The top that the six sides inner hole 72 communicates is machined with the pressure through-hole 73 that diameter is 0.4 to 0.8mm, and this minor diameter through-hole is convenient for
Conducting pressure and be not easy that liquid is made to backflow.7 lower periphery of buffer is machined with buffering external screw thread 71.
By 28 sets of sealing ring on the sealing recess portion 21 of the elastomer 22, and by the elastomer with sealing ring 28
The retaining ring 25 is embedded in the second recess chamber 15 for connecing casting die 1 by the first recess chamber 14 that casting die 1 is connect described in 22 indentations.
The upper snap ring 251 of the retaining ring 25 and lower snap ring 252 are just fitted close with the second recess chamber 15, are formd to the elasticity
The tight locking of body 22.Elastic parts 2 and the assembly for connecing casting die 1 are completed in this way.Due to having sealing ring 28 and retaining ring
25 presence, it is described connect casting die 1 and elastic parts 2 to form a complete sealing whole.
By conditioning circuit plate 4 be mounted on it is described connect it is in the third recess chamber 16 of casting die 1 and fixed.
Using welding equipment, lead 5 is drawn in the lead pad 27 of the elastomer 22, passes through the retaining ring 25
Round hole 253, be welded to the signal input part of the conditioning circuit plate 4.
The signal output end of the conditioning circuit plate 4 is connected with the contact pin 8 for being partially submerged into 3 upper end of shell by outer lead 6
It connects.
3 lower part of shell is entangled to the housing seal face 17 for connecing casting die 1, and connecing casting die 1, while in the shell
3 carry out circumferential sealing welding with the contact position for connecing casting die 1.
Cooperated using the buffering external screw thread 71 and the buffering internal screw thread 13 for connecing casting die 1 of the buffer 7, tool is inserted
Enter in six side's inner holes 72 of the buffer 7 and buffer 7 is screwed into tracting pressuring hole 11, quick response diaphragm pressure biography has been made
Sensor.When fluid is pressed into tracting pressuring hole 11 through six side's inner holes 72, the inner cavity 23 full of elastomer 22 is upper due to the buffer 7
Hold minor diameter pressure through-hole 73, the fluid media (medium) 18 being full of in tracting pressuring hole 11 is not easy to flow out, when surveying pressure again, elastomer 22 it is quick
Pressure value can quickly be experienced by the fluid media (medium) 18 by feeling diaphragm, improve the response speed of pressure sensor.
The quick response diaphragm pressure sensor product is subjected to high/low temperature and fatigue test, then carries out mark and mark
It is fixed, and encapsulate storage.
A kind of corresponding quick response diaphragm pressure sensor manufacturing method, comprising the following steps:
S1. inverted U cup-shaped elastomeric body 22 is manufactured using machining process, 22 upper surface 24 of elastomer is subjected to grinding throwing
Light, being manufactured on the upper surface 24 of the elastomer 22 using film deposition techniques and pattern transfer technology has sensitivity to pressure
The strain resistor of effect simultaneously forms measuring circuit, carries out the high temperature anneal to the elastomer 22 later；The elastomer 22
Upper surface periphery, which is machined with, appears on the stage along 26, and 22 lower, outer perimeter of elastomer is machined with sealing recess portion 21；
S2. there is the tracting pressuring hole 11 positioned at center using the method manufacture of machining, be located at central upper portion position and institute
The first recess chamber 14 from bottom to up of the connection of tracting pressuring hole 11, the second recess chamber 15, third recess chamber 16, lower periphery is stated to connect
Pressure screw thread 12 connects casting die 1；The lower end of the tracting pressuring hole 11 for connecing casting die 1 is machined with buffering internal screw thread 13；
S3. there is the round hole 235 positioned at center, the upper snap ring positioned at top edge using the method manufacture of machining
251, positioned at the retaining ring 25 of the lower snap ring 252 of lower edge；
S4. it is communicated using the method manufacture of machining with six side's inner hole 72 of lower central, with the six sides inner hole 72 upper
The buffer 7 for buffering external screw thread 71 of portion's minor diameter pressure through-hole 73, lower periphery；
S5. by 28 sets of sealing ring on the sealing recess portion 21 of the elastomer 22, and by the elastomer with sealing ring 28
The retaining ring 25 is embedded in the second recess chamber 15 for connecing casting die 1 by the first recess chamber 14 that casting die 1 is connect described in 22 indentations,
Elastic parts 2 is completed in the assembly for connecing casting die 1；Due to there is a presence of sealing ring 28 and retaining ring 25, it is described connect casting die 1 with
It is whole that elastic parts 2 forms a complete sealing；
S6. by conditioning circuit plate 4 be mounted on it is described connect it is in the third recess chamber 16 of casting die 1 and fixed；
S7. welding equipment is utilized, lead 5 is drawn in the lead pad 27 of the elastomer 22 and is welded to the conditioning circuit
The signal input part of plate 4；
S8. the signal output end of the conditioning circuit plate 4 is connected with the contact pin 8 for being partially submerged into 3 upper end of shell by outer lead 6
It connects；
S9., 3 lower part of shell is entangled to the housing seal face 17 for connecing casting die 1, and connecing casting die 1, while in the shell 3
Circumferential sealing welding is carried out with the contact position for connecing casting die 1；
S10. cooperated using the buffering external screw thread 71 of the buffer 7 and the buffering internal screw thread 13 for connecing casting die 1, tool is inserted
Enter in six side's inner holes 72 of the buffer 7 and buffer 7 is screwed into tracting pressuring hole 11, quick response diaphragm pressure biography has been made
Sensor；When fluid is pressed into tracting pressuring hole 11 through six side's inner holes 72, the inner cavity 23 full of elastomer 22 is upper due to the buffer 7
Hold minor diameter pressure through-hole 73, the fluid media (medium) 18 being full of in tracting pressuring hole 11 is not easy to flow out, when surveying pressure again, elastomer 22 it is quick
Pressure value can quickly be experienced by the fluid media (medium) 18 by feeling diaphragm, improve the response speed of pressure sensor；
S11. the quick response diaphragm pressure sensor product is subjected to high/low temperature and fatigue test；
S12. mark and calibration are carried out to the quick response diaphragm pressure sensor product, and encapsulates storage.
Product concrete operating principle are as follows: the quick response diaphragm pressure sensor is tested by connecing the pressure access of screw thread 12
On pressure pipeline or container, it is pressed into tracting pressuring hole 11 when Fluid pressure passes through six side's inner holes 72, reaches the inner cavity 23 of elastomer 22, makees
Used in the stress surface of elastomer 22, the measuring circuit on the stress surface exports the electric signal proportional to pressure, the electricity
The conditioned conditioning of circuit board 4 of signal is exported through outer lead 6 to contact pin 8 at standard signal.Aerial lug accesses connector 9, can be with
It detects output signal, the size of pressure value can be obtained.
The above is only better embodiment of the invention, is not construed as limitation of the scope of the invention, Er Qieben
It invents advocated scope of the claims to be not limited thereto, all personages for being familiar with this field skill, according to presently disclosed
Technology contents, can think easily and equivalence changes, should all fall within the scope of protection of the present invention.
Claims (2)
1. a kind of quick response diaphragm pressure sensor manufacturing method, which comprises the following steps:
S1. using machining process manufacture inverted U cup-shaped elastomeric body (22), the elastomer (22) upper surface (24) is carried out
Grinding and polishing is manufactured on the upper surface (24) of the elastomer (22) to pressure using film deposition techniques and pattern transfer technology
Power has the strain resistor of sensitization and forms measuring circuit, carries out the high temperature anneal to the elastomer (22) later；
Elastomer (22) the upper surface periphery, which is machined with, appears on the stage along (26), and elastomer (22) lower, outer perimeter is machined with sealing recess portion
(21)；
S2. using machining method manufacture have positioned at center tracting pressuring hole (11), be located at central upper portion position with
The first recess chamber (14) from bottom to up of the tracting pressuring hole (11) connection, the second recess chamber (15), third recess chamber (16), under
Pressure screw thread (12) that connects on portion periphery connects casting die (1)；The lower end of the tracting pressuring hole (11) for connecing casting die (1) is machined with spiral shell in buffering
Line (13)；
S3. there is round hole (235), the upper card positioned at top edge positioned at center using the method manufacture of machining
Ring (251), positioned at lower edge lower snap ring (252) retaining ring (25)；
S4. there is six side's inner hole (72) of lower central using the method manufacture of machining, communicated with the six sides inner hole (72)
Top minor diameter pressure through-hole (73), lower periphery buffering external screw thread (71) buffer (7)；
S5. sealing ring (28) is covered on the sealing recess portion (21) of the elastomer (22), and described will has sealing ring (28)
Elastomer (22) indentation described in connect the first recess chamber (14) of casting die (1), casting die will be connect described in the retaining ring (25) insertion
(1) the second recess chamber (15) completes elastic parts (2) in the assembly for connecing casting die (1)；Due to having sealing ring (28) and lock
The presence of tight ring (25), connect casting die (1) and elastic parts (2) form a complete sealing entirety；
S6. conditioning circuit plate (4) is mounted in the third recess chamber (16) for connecing casting die (1) and fixed；
S7. welding equipment is utilized, lead (5) are drawn in the lead pad (27) of the elastomer (22) and are welded to the tune
Manage the signal input part of circuit board (4)；
S8. by the signal output end of the conditioning circuit plate (4) and inserting for shell (3) upper end is partially submerged by outer lead (6)
Needle (8) connection；
S9. the shell (3) lower part is entangled and connects casting die (1), and connect the housing seal face (17) of casting die (1), while
The shell (3) and the contact position for connecing casting die (1) carry out circumferential sealing welding；
S10. cooperated using the buffering external screw thread (71) and the buffering internal screw thread (13) for connecing casting die (1) of the buffer (7),
It inserts a tool into six side's inner holes (72) of the buffer (7) and buffer (7) is screwed into tracting pressuring hole (11), be made fast
Speed response diaphragm pressure sensor；When fluid through six side's inner holes (72) be pressed into tracting pressuring hole (11), be full of elastomer (22) inner cavity
(23), due to the upper end minor diameter pressure through-hole (73) of the buffer (7), the fluid media (medium) (18) that is full of in tracting pressuring hole (11)
It is not easy to flow out, when surveying pressure again, the sensitive diaphragm of elastomer (22) can quickly be experienced suffered by the fluid media (medium) (18)
Pressure value improves the response speed of pressure sensor；
S11. the quick response diaphragm pressure sensor product is subjected to high/low temperature and fatigue test；
S12. mark and calibration are carried out to the quick response diaphragm pressure sensor product, and encapsulates storage.
2. quick response diaphragm pressure sensor according to claim 1, which is characterized in that using described in claim 1
Quick response diaphragm pressure sensor manufacturing method be made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811195291.9A CN109100080A (en) | 2018-10-15 | 2018-10-15 | Quick response diaphragm pressure sensor and its manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811195291.9A CN109100080A (en) | 2018-10-15 | 2018-10-15 | Quick response diaphragm pressure sensor and its manufacturing method |
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| CN109100080A true CN109100080A (en) | 2018-12-28 |
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| CN201811195291.9A Pending CN109100080A (en) | 2018-10-15 | 2018-10-15 | Quick response diaphragm pressure sensor and its manufacturing method |
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| CN109506826A (en) * | 2017-09-14 | 2019-03-22 | 森萨塔科技公司 | Pressure sensor with improved deformeter |
| CN109932109A (en) * | 2019-03-07 | 2019-06-25 | 胡波 | Microminiature quick response absolute pressure transducer |
| CN110763395A (en) * | 2019-10-30 | 2020-02-07 | 南京高华科技股份有限公司 | Pressure measuring device |
| CN110823424A (en) * | 2019-11-28 | 2020-02-21 | 徐州双裕电子技术有限公司 | Method for manufacturing film type pressure sensor |
| WO2023211112A1 (en) * | 2022-04-26 | 2023-11-02 | Autonics Corporation | Sensor module |
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Application publication date: 20181228 |
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