CN207662543U - Engineering machinery diaphragm pressure sensor - Google Patents
Engineering machinery diaphragm pressure sensor Download PDFInfo
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- CN207662543U CN207662543U CN201820042300.XU CN201820042300U CN207662543U CN 207662543 U CN207662543 U CN 207662543U CN 201820042300 U CN201820042300 U CN 201820042300U CN 207662543 U CN207662543 U CN 207662543U
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Abstract
Include being machined with the pressure-inducing nozzle of side boss and top boss on the pulse damper of impulse through-hole lower part, top by there is external screw thread, the impulse through-hole for penetrating through center outside lower end, be equipped with the utility model discloses a kind of engineering machinery diaphragm pressure sensor；The sensing element manufactured using ion beam sputtering technology and precision photolithography technology；Circuit board support；Shell；Connector；The hybrid circuit board composition of signal conditioning circuit and protection circuit composition.Pressure sensor core is manufactured as a result of Sputtering Thinfilm Technology, sensitive material atomic deposition is on elastomer, sensitive material is realized to merge with the atom of elastomer, in conjunction with mixing modulate circuit technology so that sensor has the advantages that precision is high, stability is good, operating temperature range is wide, reliability is high, long working life.
Description
Technical field
The utility model is related to sensor technical field more particularly to a kind of engineering machinery diaphragm pressure sensors.
Background technology
Engineering machinery working condition is more severe, and the requirement to pressure sensor is high.Engineering machinery pressure sensor master at present
To be used is that slider slides generation respective resistivity values to measure pressure size on resistance board, and main problem is machine
Tool abrasion is big, and precision is low, and service life is short, and reliability is not high.
Therefore, the high pressure sensing for being suitble to engineering machinery to use of a kind of precision height, long working life, reliability is developed
Device is of crucial importance.
Sputtered thin film pressure transducer core is to use vacuum atom film deposition techniques, by insulating materials, strain sensitive
Material etc. is deposited on surface of elastomer and the pressure sensor of a kind of function admirable that is formed, it has, and precision is high, stability is good,
The advantages that operating temperature range is wide, reliability is high, long working life.Utilize sputtered thin film pressure transducer core and modulate circuit
Combination, manufacture high performance thin film pressure sensor can be very good to solve the above problems in engineering machinery field application.
Utility model content
The purpose of this utility model is that in view of the above-mentioned problems, a kind of engineering machinery diaphragm pressure sensor is provided, with reality
The advantages that existing precision is high, stability is good, operating temperature range is wide, reliability is high, long working life.
In order to solve the above technical problems, the technical solution of the utility model is：A kind of engineering machinery diaphragm pressure sensor,
It is characterised in that it includes by there is external screw thread outside lower end, the impulse through-hole for penetrating through center, be equipped under the impulse through-hole
The pulse damper in portion, top are machined with side boss and push up the pressure-inducing nozzle of boss；Utilize ion beam sputtering technology and precision photolithography
The sensing element of technology manufacture；Circuit board support；Shell；Connector；The mixing electricity of signal conditioning circuit and protection circuit composition
Road board group is at the signal conditioning circuit is connected there are four terminal with the presser sensor circuit of the sensitive component surfaces, works as institute
When stating sensing element compression, the presser sensor circuit output electric signal proportional to pressure is through the signal conditioning circuit tune
Manage into standard output signals.
The protection circuit have prevent power supply reversal connection, anti-lightning strike function.
0.5 to 0.8mm through-hole is machined at the top of the pulse damper.
Compared with prior art, it is had the beneficial effect that possessed by the utility model：As a result of Sputtering Thinfilm Technology system
Pressure sensor core is made, sensitive material atomic deposition realizes sensitive material and is merged with the atom of elastomer on elastomer,
So that sensor has the advantages that precision is high, stability is good, operating temperature range is wide, reliability is high, long working life.In conjunction with mixed
Modulate circuit technology is closed, makes diaphragm pressure sensor equally with precision is high, stability is good, reliability is high, long working life
Advantage.
The main performance index of the engineering machinery diaphragm pressure sensor of the utility model is as follows：
Measurement range：0~1~200MPa synthesis precisions：0.2%FS~0.5%FS
Operating temperature range：- 55 DEG C~125 DEG C consumption electric currents：≤8mA；
Zero temperature drift：≤ ± 0.02%FS/ DEG C long-time stability：≤ ± 0.1%FS/
Description of the drawings
Fig. 1 is the engineering machinery diaphragm pressure sensor diagrammatic cross-section of the utility model.
Fig. 2 is the engineering machinery diaphragm pressure sensor circuit block diagram of the utility model.
In figure：1, pressure-inducing nozzle；2, sensing element；3, circuit board support；4, shell；
5, connector；6, hybrid circuit board；7, outer lead；8, lead；
9, needle is connected；11, external screw thread；12, impulse through-hole；13, pulse damper；
14, side boss；15, boss is pushed up；21, presser sensor circuit；61, signal conditioning circuit；
62, circuit is protected.
Specific implementation mode
The preferred embodiment in the utility model is illustrated below in conjunction with attached drawing, it should be understood that described herein preferred
Embodiment is only used for describing and explaining the present invention, and is not intended to limit the utility model.
As shown in Figure 1, 2, a kind of engineering machinery diaphragm pressure sensor manufactures impulse using the method for mechanical processing first
There is external screw thread 11, centre to have the impulse through-hole 12 of perforation, the impulse through-hole for mouth 1,1 lower end of pressure-inducing nozzle outside
12 lower parts are equipped with pulse damper 13, and 1 top of the pressure-inducing nozzle is machined with side boss 14 and top boss 15.It is described pulse damped
13 top of device is machined with 0.5 to 0.8mm through-hole.
Circuit board support 3 is manufactured using machining process and shell 4 is spare.
Sensing element 2 is manufactured using machining process, using ion beam sputtering technology and precision photolithography technology described
The upper surface manufacture presser sensor circuit 21 of sensing element 2.There are four the equal films of resistance value for the tool of presser sensor circuit 21
Resistance and composition Wheatstone bridge.When the sensing element 2 is pressurized, Wheatstone bridge loses out balance, generation and pressure
Proportional electric signal.
The hybrid circuit board 6 that manufacture is made of signal conditioning circuit 61 and protection circuit 62.The signal conditioning circuit 61
Be connected with the presser sensor circuit 21 there are four terminal, when the sensing element 2 is pressurized, Wheatstone bridge export with institute
By the proportional electric signal conditioning of pressure at standard output signals, such as 4~20mA, 0.5~4.5V etc..Circuit 62 is protected to have anti-
Only power supply reversal connection, the functions such as anti-lightning strike.
2 lower part of the sensing element is linked on the top boss 15 of the pressure-inducing nozzle 1 and is welded in joint secure seal
It connects.
The circuit board support 3 is mounted on the top outer rim step of the sensing element 2 and fixed；By the mixing
Circuit board peace 6 is on the circuit board support 3.
The presser sensor circuit 21 is connect with the hybrid circuit board 6 by lead 8.
The shell 4 is mounted on the side boss 14 of pressure-inducing nozzle 1 simultaneously sealing welding.
9 lower end of connection needle inside hybrid circuit board 6 and connector 5 is connected by outer lead 7；By the connector 5
It coincide with the shell 4 and secure seal is welded.
The external screw thread 11 of the pressure-inducing nozzle 1 is connect with Alternating Test machine, carries out pressure alternation test；It will complete alternation examination
The product tested, which is put into high-low temperature chamber, carries out thermocycling.
Concrete operating principle is：When pressure acts on sensing element 2, four resistances of the Wheatstone bridge are sent out
Changing, electric bridge lose out the Differential Output electric signal proportional to pressure.Electric signal is improved by signal conditioning circuit 61
At standard transmitter output signal and by protect circuit 62 outward export, detect output standard signal can be obtained it is suffered
The size of pressure value.
The above is only the better embodiment of the utility model, is not construed as the limit to the scope of the utility model
System, and the right that the utility model is advocated is not limited thereto, all personages for being familiar with this field skill, according to
Technology contents disclosed by the utility model, can think easily and equivalence changes, the scope of protection of the utility model should all be fallen into
It is interior.
Claims (3)
1. a kind of engineering machinery diaphragm pressure sensor, which is characterized in that including by having external screw thread (11), perforation outside lower end
The impulse through-hole (12) at center is equipped with and is machined with side on the pulse damper (13) of impulse through-hole (12) lower part, top
The pressure-inducing nozzle (1) of boss (14) and top boss (15)；The sensitivity member manufactured using ion beam sputtering technology and precision photolithography technology
Part (2)；Circuit board support (3)；Shell (4)；Connector (5)；Signal conditioning circuit (61) and protection circuit (62) form mixed
It closes circuit board (6) to form, there are four the presser sensors of terminal and the sensing element (2) surface for the signal conditioning circuit (61)
Circuit (21) is connected, and when the sensing element (2) are pressurized, presser sensor circuit (21) exports the electricity proportional to pressure
Signal is improved through the signal conditioning circuit (61) into standard output signals.
2. engineering machinery diaphragm pressure sensor according to claim 1, which is characterized in that protection circuit (62) tool
Prevent power supply reversal connection, anti-lightning strike function.
3. engineering machinery diaphragm pressure sensor according to claim 1, which is characterized in that the pulse damper (13)
Top is machined with 0.5 to 0.8mm through-hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820042300.XU CN207662543U (en) | 2018-01-11 | 2018-01-11 | Engineering machinery diaphragm pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820042300.XU CN207662543U (en) | 2018-01-11 | 2018-01-11 | Engineering machinery diaphragm pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207662543U true CN207662543U (en) | 2018-07-27 |
Family
ID=62945185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820042300.XU Active CN207662543U (en) | 2018-01-11 | 2018-01-11 | Engineering machinery diaphragm pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207662543U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109100080A (en) * | 2018-10-15 | 2018-12-28 | 伟业智芯（北京）科技有限公司 | Quick response diaphragm pressure sensor and its manufacturing method |
| CN109100079A (en) * | 2018-10-15 | 2018-12-28 | 伟业智芯（北京）科技有限公司 | Novel union pressure sensor and manufacturing method |
| CN109100078A (en) * | 2018-10-15 | 2018-12-28 | 伟业智芯（北京）科技有限公司 | Elastic parts compression type pressure sensor and its manufacturing method |
-
2018
- 2018-01-11 CN CN201820042300.XU patent/CN207662543U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109100080A (en) * | 2018-10-15 | 2018-12-28 | 伟业智芯（北京）科技有限公司 | Quick response diaphragm pressure sensor and its manufacturing method |
| CN109100079A (en) * | 2018-10-15 | 2018-12-28 | 伟业智芯（北京）科技有限公司 | Novel union pressure sensor and manufacturing method |
| CN109100078A (en) * | 2018-10-15 | 2018-12-28 | 伟业智芯（北京）科技有限公司 | Elastic parts compression type pressure sensor and its manufacturing method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191219 Address after: 410331 A5, Changsha e center, No. 18, Xiang Tai Road, Liuyang, Hunan. Patentee after: Suno Alliance Technology Co., Ltd. Address before: 102101 Beijing city Yanqing district town of Badaling Development Zone wind Valley four No. 8 Building No. 26 hospital Patentee before: BEIJING ZHONGHANG XINGSHENG MEASUREMENT AND CONTROL TECHNOLOGY CO., LTD. |
|
| TR01 | Transfer of patent right |