CN107014438B - High temperature high pressure liquid pressure based on ceramic package, sensor for measuring temperature - Google Patents
High temperature high pressure liquid pressure based on ceramic package, sensor for measuring temperature Download PDFInfo
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- CN107014438B CN107014438B CN201710272213.3A CN201710272213A CN107014438B CN 107014438 B CN107014438 B CN 107014438B CN 201710272213 A CN201710272213 A CN 201710272213A CN 107014438 B CN107014438 B CN 107014438B
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- temperature
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- ceramic shell
- metal
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The high temperature high pressure liquid pressure that the invention discloses a kind of based on ceramic package, sensor for measuring temperature, relevant conditioning circuit forms inside the sensitive element of pressure sensor being mainly made of variable capacitance, temperature sensor sensing element, ceramic shell, sensor signal transmission lead and measuring instrumentss.If thinking the pressure and temperature of measurement liquid, only the pressure wrapped up by ceramic shell, temperature sensor sensing element need to be contacted fluid to be measured, the signal that sensor sensing element measures, which is transferred to the measuring circuit inside measuring instrumentss, by sensor lead to measure.This sensor can not only measure fluid pressure, and fluid temperature can also be measured simultaneously, conducive to influence of the analysis fluid temperature to fluid pressure, carry out temperature-compensating, and the unicity for measuring liquid relevant parameter at present has very big superior, and measurement accuracy is also higher.
Description
Technical field
The present invention provides the sensors that one kind can measure high temperature high pressure liquid pressure, temperature simultaneously, and for surveying
The pressure of amount, temperature data can be would indicate that by measuring instrumentss to belong to electronic measuring device field.
Background technique
Traditional pressure sensor cannot bear the limitation of impacting with high pressure due to sensing element, be merely able to measurement pressure common
Liquid is not able to satisfy measurement request then for highly pressurised liquid.In addition, having very for carrying out liquid pressure measurement under hot environment
More limitations, sensing element are unable to high temperature resistant, can also damage measuring circuit.Also, the pressure data measured also will receive high temperature
It influences, influences measurement accuracy.
Summary of the invention
The present invention provides the sensor that one kind can measure high temperature high pressure liquid pressure, temperature simultaneously, pressure sensors
Sensing element can high temperature resistant, and measure fluid pressure while, measures the temperature of a liquid, and the temperature data measured can be to pressure
Force data compensates, and improves measurement accuracy, extends the function of sensor measurement.
The technical solution adopted by the present invention to solve the technical problems is: this sensor is passed by the pressure that variable capacitance forms
Sensor sensing element, temperature sensor sensing element, ceramic shell, sensor signal transmission lead are related to inside measuring instrumentss
Conditioning circuit composition；Sensitive element of pressure sensor is by metal top crown, high dielectric constant dielectric, vacuum air cavity and gold
Subordinate's pole plate composition, metal top crown, metal bottom crown are located at the inner wall up and down of ceramic shell, and high dielectric constant insulation is situated between
Matter is close to metal top crown, is vacuum air cavity between high dielectric constant dielectric and metal bottom crown；Entire pressure sensor
It is wrapped up around sensing element by ceramic shell；Temperature sensor sensing element and sensitive element of pressure sensor pass through manufacture craft
Being made of one structure, surrounding are also wrapped up by ceramic shell.Ceramic shell side wall has hollow out duck eye, convenient for high dielectric constant is exhausted
Gap vacuum pumping air cavity between edge medium and metal bottom crown, in addition metal top crown and metal bottom crown pass through small respectively
Aerial lead is connected to the circuit inside measuring instrumentss.It specifically includes:
Ceramic shell, package sensitive element of pressure sensor and temperature sensor sensing element, its role is to resist liquid
Body high temperature and directly receiving liquid high pressure impact；
Metal top crown is located at ceramic shell upper inside walls, and acting on composition sensitive element of pressure sensor can power transformation
Hold the top crown of structure；
High dielectric constant dielectric is close to form vacuum air cavity between metal top crown, with metal bottom crown, be made
With being to provide big dielectric constant, increase the variation range of sensitive element of pressure sensor variable capacitance；
Vacuum air cavity, between high dielectric constant dielectric and metal bottom crown, its role is to be pole under metal
Deformation occurs provides enough spaces for plate；
Metal bottom crown is located at inner wall on the downside of ceramic shell, with metal top crown, high dielectric constant dielectric and true
Air chamber collectively constitutes the variable capacitor structure of sensitive element of pressure sensor；
Temperature sensor sensing element, is wrapped up by ceramic shell, and its role is to measure the temperature of liquid；
Temperature sensor wires, one end connect temperature sensor sensing element, and one end is connected to measuring instrumentss, act on
It is that the temperature data for measuring temperature sensor sensing element is transmitted to measuring instrumentss；
Metal top crown lead, one end connect pole on the metal of Ceramic shell internal by the aperture of ceramic shell side wall
Plate, one end are connected to the measuring circuit inside measuring instrumentss；
Metal bottom crown lead, one end connect pole under the metal of Ceramic shell internal by the aperture of ceramic shell side wall
Plate, one end are connected to the measuring circuit inside measuring instrumentss；
Measuring instrumentss, inside have the conditioning circuit of processing pressure, temperature signal, and the pressure that measurement can be obtained
Power, temperature data are shown.
The invention has the advantages that the present invention can measure high temperature high pressure liquid pressure, temperature, pressure sensor simultaneously
Sensing element and temperature sensor sensing element are wrapped up by ceramic shell, and ceramic shell can bear high temperature, can be to sensor
Sensing element is protected.Also, the part of ceramic shell contact liq thickeies, and increases the anti-high pressure ability of sensor.Separately
Outside, the temperature data measured can carry out temperature-compensating to pressure data, improve measurement accuracy, extend the measurement of sensor
Function.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples.
Fig. 1 is sensor of the invention display model figure；
Fig. 2 is sensor internal structure chart when the present invention is not affected by hydraulic shock；
Fig. 3 be the present invention by hydraulic shock when sensor internal structure chart；
Figure label explanation: 1, ceramic shell, 2, metal top crown, 3, high dielectric constant dielectric, 4, vacuum air cavity,
5, metal bottom crown, 6, temperature sensor sensing element, 7, temperature sensor wires, 8, metal top crown lead, 9, under metal
Pole plate lead, 10, measuring instrumentss, 11, the distance between bottom crown on metal.
Specific embodiment
Such as Fig. 2, Fig. 3, shown, by the sensitive element of pressure sensor wrapped up by ceramic shell, the sensitive member of temperature sensor
Part contacts fluid to be measured, and fluid to be measured impacts ceramic shell lower part when measurement, makes ceramic shell lower knuckle, drives pole under metal
Plate benging, metal top crown are fixed, and the distance between two-plate is opposite to become smaller, and sensitive element of pressure sensor capacitance becomes
Change, leads to be connected to the resonance frequency inside measuring instrumentss and change, measuring instrumentss internal resonance loop inductance
A frequency sweep circuit is coupled, frequency sweep circuit measures pressure data according to the variation of frequency.Temperature sensor sensing element contacts quilt
Temperature signal can also be obtained by surveying liquid, be also communicated to inside measuring instrumentss by lead and handled by conditioning circuit, last measuring instrument
Table will measure pressure, temperature data while show.
Claims (1)
1. a kind of high temperature high pressure liquid pressure based on ceramic package, sensor for measuring temperature, it is characterised in that: this sensor by
The sensitive element of pressure sensor of variable capacitance composition, temperature sensor sensing element, ceramic shell, sensor signal transmission are drawn
Relevant conditioning circuit composition inside line and measuring instrumentss；Sensitive element of pressure sensor is by metal top crown, high dielectric constant
Dielectric, vacuum air cavity and metal bottom crown composition, metal top crown, metal bottom crown are located at the upper and lower of ceramic shell
Inner wall, high dielectric constant dielectric are close to metal top crown, are true between high dielectric constant dielectric and metal bottom crown
Air chamber；It is wrapped up around entire sensitive element of pressure sensor by ceramic shell；Temperature sensor sensing element and pressure sensing
Device sensing element is also wrapped up by ceramic shell by manufacture craft being made of one structure, surrounding；Ceramic shell side wall has hollow out
Duck eye, convenient for by the gap vacuum pumping air cavity between high dielectric constant dielectric and metal bottom crown, other pole on metal
Plate and metal bottom crown are connected to the circuit inside measuring instrumentss by small aerial lead respectively, specifically include:
Ceramic shell, package sensitive element of pressure sensor and temperature sensor sensing element, its role is to resist liquid height
Temperature and directly receiving liquid high pressure impact；
Metal top crown is located at ceramic shell upper inside walls, acts on and constitutes sensitive element of pressure sensor variable capacitance knot
The top crown of structure；
High dielectric constant dielectric is close to form vacuum air cavity between metal top crown, with metal bottom crown, be acted on
In providing big dielectric constant, increase the variation range of sensitive element of pressure sensor variable capacitance；
Vacuum air cavity, between high dielectric constant dielectric and metal bottom crown, its role is to be metal bottom crown hair
Raw deformation provides enough spaces；
Metal bottom crown is located at inner wall on the downside of ceramic shell, with metal top crown, high dielectric constant dielectric and vacuum gas
Chamber collectively constitutes the variable capacitor structure of sensitive element of pressure sensor；
Temperature sensor sensing element, is wrapped up by ceramic shell, and its role is to measure the temperature of liquid；
Temperature sensor wires, one end connect temperature sensor sensing element, and one end is connected to measuring instrumentss, its role is to
The temperature data that temperature sensor sensing element measures is transmitted to measuring instrumentss；
Metal top crown lead, one end connect the metal top crown of Ceramic shell internal by the aperture of ceramic shell side wall, and one
End is connected to the measuring circuit inside measuring instrumentss；
Metal bottom crown lead, one end connect the metal bottom crown of Ceramic shell internal by the aperture of ceramic shell side wall, and one
End is connected to the measuring circuit inside measuring instrumentss；
Measuring instrumentss, inside have the conditioning circuit of processing pressure, temperature signal, and pressure, the temperature that measurement can be obtained
Degree evidence is shown.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710272213.3A CN107014438B (en) | 2017-04-24 | 2017-04-24 | High temperature high pressure liquid pressure based on ceramic package, sensor for measuring temperature |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710272213.3A CN107014438B (en) | 2017-04-24 | 2017-04-24 | High temperature high pressure liquid pressure based on ceramic package, sensor for measuring temperature |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107014438A CN107014438A (en) | 2017-08-04 |
| CN107014438B true CN107014438B (en) | 2019-05-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710272213.3A Expired - Fee Related CN107014438B (en) | 2017-04-24 | 2017-04-24 | High temperature high pressure liquid pressure based on ceramic package, sensor for measuring temperature |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107014438B (en) * | 2017-04-24 | 2019-05-10 | 西北工业大学 | High temperature high pressure liquid pressure based on ceramic package, sensor for measuring temperature |
| CN109341752A (en) * | 2018-08-14 | 2019-02-15 | 襄阳臻芯传感科技有限公司 | A kind of idle call pressure-temperature sensor |
| EP3753607A1 (en) * | 2019-06-17 | 2020-12-23 | Marioff Corporation OY | Sprinkler bulb |
| CN110572081B (en) * | 2019-09-11 | 2021-04-23 | 湖北金顿电气有限公司 | Pressure protection device and method for liquid resistor soft start cabinet |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6079276A (en) * | 1995-02-28 | 2000-06-27 | Rosemount Inc. | Sintered pressure sensor for a pressure transmitter |
| CN201138215Y (en) * | 2008-01-07 | 2008-10-22 | 南京高华科技有限公司 | Pressure and temperature synthesized sensing construction |
| CN101526404A (en) * | 2009-01-19 | 2009-09-09 | 中国电子科技集团公司第四十八研究所 | Temperature and pressure compound sensor |
| CN202304895U (en) * | 2011-10-27 | 2012-07-04 | 中国电子科技集团公司第四十八研究所 | Sputtered film chip for realizing simultaneous test of temperature and pressure signals |
| CN107014438A (en) * | 2017-04-24 | 2017-08-04 | 西北工业大学 | High temperature high pressure liquid pressure, sensor for measuring temperature based on ceramic package |
-
2017
- 2017-04-24 CN CN201710272213.3A patent/CN107014438B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6079276A (en) * | 1995-02-28 | 2000-06-27 | Rosemount Inc. | Sintered pressure sensor for a pressure transmitter |
| CN201138215Y (en) * | 2008-01-07 | 2008-10-22 | 南京高华科技有限公司 | Pressure and temperature synthesized sensing construction |
| CN101526404A (en) * | 2009-01-19 | 2009-09-09 | 中国电子科技集团公司第四十八研究所 | Temperature and pressure compound sensor |
| CN202304895U (en) * | 2011-10-27 | 2012-07-04 | 中国电子科技集团公司第四十八研究所 | Sputtered film chip for realizing simultaneous test of temperature and pressure signals |
| CN107014438A (en) * | 2017-04-24 | 2017-08-04 | 西北工业大学 | High temperature high pressure liquid pressure, sensor for measuring temperature based on ceramic package |
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| CN107014438A (en) | 2017-08-04 |
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