CN208998967U - A kind of integrated pressure sensor - Google Patents
A kind of integrated pressure sensor Download PDFInfo
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- CN208998967U CN208998967U CN201821141590.XU CN201821141590U CN208998967U CN 208998967 U CN208998967 U CN 208998967U CN 201821141590 U CN201821141590 U CN 201821141590U CN 208998967 U CN208998967 U CN 208998967U
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- capacitor
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- pressure sensor
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Abstract
The utility model provides a kind of integrated pressure sensor, belongs to sensor technical field.The utility model mainly includes top-down three layers of LTCC substrate, it is characterized in that, the upper surface of first layer LTCC substrate is printed with the spiral inductance of circular flat, the lower surface of first layer LTCC substrate is printed with capacitor top crown, Packed glass is set on second layer LTCC substrate, the upper surface of third layer LTCC substrate is printed with capacitor bottom crown, and the spiral inductance ectonexine is connect by metal throuth hole with capacitor top crown and capacitor bottom crown respectively and constitutes the circuit LC.The utility model integrated pressure sensor is inherently encapsulated using the multilayer ceramic substrate based on LTCC technique, realizes the miniaturization of sensor bulk.The utility model is that basic common burning porcelain and glass can be improved the yield rate of device, survey pressure range and reliability by the technique of this dissimilar materials matching co-firing with LTCC technology.
Description
Technical field
The utility model belongs to pressure sensor technique field, and in particular to a kind of integrated pressure sensing of high reliability
Device.
Background technique
In the epoch of current rapid development of information technology, important component of the sensor as information acquisition system, referred to as
The source of modern information technologies.Pressure sensor receives external pressure by sensitive membrane as one kind and is converted into electric signal
Element, many engineering fields transient pressure measurement in play a significant role.According to working principle difference, pressure sensor
Piezoelectric type, pressure resistance type and three kinds of condenser type can be divided into.Piezoresistive pressure sensor frequency response is high, precision is high, high sensitivity, but
It is affected by temperature larger, complex process.Piezoelectric pressure indicator easy processing, working band be wide, high sensitivity, but sensory device
With temperature raising depolarization can occur for material.Capacitance pressure transducer, input energy is small, high sensitivity, electricity parameter are opposite changes
Greatly, temperature stability is good, is more suitably applied to high temperature, the adverse circumstances such as chemistry.
Currently, pressure passes under the ever-increasing background of requirement of the novel electron system to Circuit assembly density and function
Sensor just towards miniaturization, develop by the direction of high reliability.Low-temperature co-fired ceramics (Low Temperature Co-fired
Ceramic, LTCC) technology because high frequency characteristics it is good, high reliablity, adaptability is good, at low cost, is able to carry out from encapsulating, convenient for small
The features such as type and the preparation for being widely used in sensor.Current LTCC pressure sensor generally includes four layers, first layer
Upper surface is brushed with planar square-spiral inductance and capacitor top crown, and the second layer sets Packed pressure cavities, and the 4th layer brushed with electricity
Pole plate is held, upper and lower two parts interconnect (such as patent 201310029417.6) by through-hole.Above-mentioned 201310029417.6 make
Cavity is avoided to deform in lamination or sintering process with sacrificial layer technology, it is ensured that sensor component surfacing, but
The cell pressure measurement range of this design is small, and reliability is to be improved.
Utility model content
To overcome above structure defect, the utility model provides a kind of integrated pressure sensor, and the sensor is using heterogeneous
The technique of match materials cofiring improves the yield rate, measurement range and reliability of sensor.
To achieve the above object, the utility model provides the following technical solutions:
A kind of integrated pressure sensor, including top-down three layers of LTCC substrate, the upper surface of first layer LTCC substrate
It is printed with the spiral inductance of circular flat, the lower surface of first layer LTCC substrate is printed with capacitor top crown, second layer LTCC base
On piece sets Packed glass, and the upper surface of third layer LTCC substrate is printed with capacitor bottom crown, inside and outside the spiral inductance
Layer is connect by metal throuth hole with capacitor top crown and capacitor bottom crown respectively and constitutes the circuit LC.
Further, electric signal is radiate by spiral inductance described in the utility model by way of electromagnetic field.
Further, deformation occurs in extraneous pressure change for capacitor top crown described in the utility model, on capacitor
Bottom crown distance changes, so that capacitance be made to change.
Further, inductance internal layer described in the utility model is connect with capacitor top crown, under inductance outer layer and capacitor
Pole plate connects and forms the circuit LC, converts frequency signal for pressure signal.
Further, the glass of sealing described in the utility model is the medium of flat capacitor.
It further, is basic common burning porcelain and glass preparation pressure sensor with LTCC technology in the utility model, it can
To obtain the sensor frequency characteristic by emulation.
Further, inductance value is a constant in the utility model, and capacitive part measures pressure, when ambient pressure changes
When, ambient pressure and glass pressure formed pressure difference capacitor top crown is pressurized deformation occurs, on capacitor between bottom crown away from
It changes from d, capacitor C changes, so that the resonance frequency f of the lc circuit of sensor be made to change.
The utility model in such a way that sacrificial layer technology improves sensor yield rate, proposes one compared to existing sensor
Kind novel model, that is, use glass medium as the medium of square parallel plate capacitor, make that device both improved on the whole at
Product rate realizes high reliability again and surveys pressure range, and completes the design of miniaturization.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model pressure sensor；
Fig. 2 is the surface structure schematic diagram of the utility model pressure sensor；
Fig. 3 is the schematic perspective view of the utility model pressure sensor；
Fig. 4 tests 200bar pressure displacement characteristic result figure by specific embodiment；
Fig. 5 tests 0~200bar pressure capacitance characterization result figure by specific embodiment；
Fig. 6 tests 0~200bar bias power frequency characterization result figure by specific embodiment.
Wherein, 1 is capacitor bottom crown, and 2 be through-hole, and 3 be spiral inductance, and 4 be LTCC substrate, and 5 capacitor top crowns, 6 be glass
Glass medium.
Specific embodiment
The utility model specific embodiment is described in detail below in conjunction with Figure of description:
The content with reference to shown in Fig. 1, the utility model embodiment provide a kind of pressure based on dissimilar materials matching co-firing
Sensor, comprising: spiral inductance 3, spiral inductance 3 are located at 4 upper surface of first layer LTCC substrate, and internal layer connects capacitor top crown
5, outer layer connects capacitor bottom crown 1, and capacitance structure is made of capacitor top crown 5, capacitor bottom crown 1 and glass medium 6, on capacitor
Pole plate 5 is located at 4 lower surface of first layer LTCC substrate, and capacitor bottom crown 1 is located at 4 upper surface of third layer LTCC substrate, glass medium 6
Between capacitor top crown 5 and capacitor bottom crown 1, and the shape and size one with capacitor top crown 5 and capacitor bottom crown 1
It causes.Wherein capacitor top crown 5 and capacitor bottom crown 1 are by through-hole 2 and inductance connection, to be equivalent to concatenated lc circuit.It passes
The LTCC ceramic diaphragm lamination that the LTCC substrate 4 of sensor is all made of same material forms, the inductance and capacitor and through-hole 2 of top layer
It is all made of silver paste.
Capacitive part measures pressure, and when ambient pressure variation, ambient pressure and glass pressure form pressure difference and make electricity
Holding the compression of top crown 5, deformation occurs, and the distance d between capacitor top crown 5 and capacitor bottom crown 1 changes, and capacitor C becomes
Change, so that the lc circuit resonance frequency f of sensor changes.The effect of inductance part is coupled with antenna, and antenna is worked as
Input frequency it is consistent with the resonant frequency of sensor circuit when, great variety can occur for the impedance phase angle of antenna, thus
Know the resonant frequency of sensor circuit.
For the present embodiment in design, inductance is equivalent inductance to be estimated with empirical equation, and the design of capacitor is according to parallel
The design of plate capacitor theory, inductance lsWith capacitor csIt is calculated by following formula:
Wherein:It is the mean radius of spiral winding, calculation formula is as follows:
It is packing ratio, calculation formula is as follows:
It is the magnetic conductivity of green sheet material, w is coil width, and s is coil-span, and n is coil turn, and rs rises for coil
Beginning radius.
In formula: csFor capacitance, A is pole plate positive area, and d is pole plate spacing, and ε is the dielectric constant of medium, condenser type
The ε and A of sensor are constant, and initial spacing is d0, initial capacitance C0, when pressure effect, initial valueIt reduces
Δ d, relationship are as follows:
It brings capacitor calculation formula into, can obtain
The calculation formula of resonant frequency is as follows:
Available corresponding size is calculated according to above formula, is modeled and is emulated excellent using finite element analysis software
Change, finally obtains lc circuit structure shown in Fig. 1.
This example is specific by determining to the two primary structure emulation of circular planar spiral inductance 3 and square plate formula capacitor
Size and position:
Circular planar spiral inductance 3 is located at 4 upper surface of first layer LTCC substrate, and internal layer connects capacitor top crown 5, and outer layer connects
Connect capacitor bottom crown 1.Coil start radius length is 4mm, coil width 0.3mm, coil-span 0.3mm, wire circle
For 4 circle, coil with a thickness of 0.01mm.
Bottom crown and intermediate glass are parallel to each other on capacitor, constitute flat capacitor, and capacitor top crown 5 is located at first layer
4 lower surface of LTCC substrate, capacitor bottom crown 1 are located at 4 upper surface of third layer LTCC substrate.Wherein capacitor top crown 5 passes through through-hole 2
Inductance internal layer is connected, capacitor bottom crown 1 connects inductance outer layer by through-hole 2, to be equivalent to concatenated LC electricity together with inductance
Road.Square capacitance top crown 5 and 1 area of capacitor bottom crown are 4mm*4mm, and 6 volume of glass medium is 4mm*4mm*0.3mm.Its
The dielectric constant of middle glass medium 6 is 5.1, Young's modulus 60GPa, Poisson's ratio 0.21.The dielectric constant of LTCC substrate 4 is
18, Young's modulus 128GPa, Poisson's ratio 0.28.
1/4 model placement property figure simulation result such as Fig. 3 institute of pressure sensor that the utility model specific embodiment is done
Show, the working sensor is under 0~200bar pressure, and in maximum pressure effect, the sensitive membrane of sensor is displaced 3.7e-4mm.
From finding out in capacitance characteristic Fig. 4 after emulation, capacitance is 0.8445pF under zero pressure, and capacitance is with pressure
Increase and increase, the linearity of curve is fine, and capacitor increases 3.4fF under maximum pressure effect.
Find out in frequency domain characteristic simulation result diagram, which is 316.19MHz, frequency and pressure
Negative correlation is presented, frequency reduces 640KHZ under the maximum pressure.
The utility model can be measured by the coupling principle between coil, can be under contactless state by pressure
Signal is converted into frequency signal and sends test antenna to, can both work at normal temperatures and pressures, can also dislike in high temperature, high pressure etc.
It works long hours under bad environment, high sensitivity, stability are good and are not easy to be disturbed；And its compact structure, manufacturing process are simple.
The utility model proposes a kind of new compared to existing sensor in such a way that sacrificial layer technology improves sensor yield rate simultaneously
The model of type, that is, use glass medium 6 as the medium of square parallel plate capacitor, the yield rate for having improved device both
High reliability is realized again and surveys pressure range, and completes the design of miniaturization
The embodiments of the present invention are expounded in conjunction with attached drawing above, but the utility model is not limited to
The specific embodiment stated, above-mentioned specific embodiment is only schematical, rather than restrictive, the common skill of this field
Art personnel are not departing from the utility model aims and scope of the claimed protection situation under the enlightenment of the utility model
Under, many forms can be also made, these are belonged within the protection of the utility model.
Claims (5)
1. a kind of integrated pressure sensor, including top-down three layers of LTCC substrate, which is characterized in that first layer LTCC substrate
Upper surface be printed with the spiral inductance of circular flat, the lower surface of first layer LTCC substrate is printed with capacitor top crown, second
Packed glass is set on layer LTCC substrate, the upper surface of third layer LTCC substrate is printed with capacitor bottom crown, the spiral
Inductance ectonexine is connect by metal throuth hole with capacitor top crown and capacitor bottom crown respectively and constitutes the circuit LC.
2. integrated pressure sensor according to claim 1, which is characterized in that the spiral inductance passes through electric signal
The form of electromagnetic field is radiate.
3. integrated pressure sensor according to claim 1, which is characterized in that the capacitor top crown is in ambient pressure
Deformation occurs when variation, and bottom crown distance changes on capacitor, so that capacitance be made to change.
4. integrated pressure sensor according to claim 1, which is characterized in that the inductance internal layer and capacitor top crown
Connection, inductance outer layer connect with capacitor bottom crown and form the circuit LC, convert frequency signal for pressure signal.
5. integrated pressure sensor according to claim 1, which is characterized in that the glass of the sealing is flat electricity
The medium of appearance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821141590.XU CN208998967U (en) | 2018-07-17 | 2018-07-17 | A kind of integrated pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821141590.XU CN208998967U (en) | 2018-07-17 | 2018-07-17 | A kind of integrated pressure sensor |
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| Publication Number | Publication Date |
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| CN208998967U true CN208998967U (en) | 2019-06-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821141590.XU Expired - Fee Related CN208998967U (en) | 2018-07-17 | 2018-07-17 | A kind of integrated pressure sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109141689A (en) * | 2018-07-17 | 2019-01-04 | 东莞成启瓷创新材料有限公司 | A kind of low-temperature co-fired ceramics LTCC pressure sensor |
| CN113155348A (en) * | 2021-02-26 | 2021-07-23 | 西安微电子技术研究所 | Piezoresistive pressure sensor signal processing module and integration method thereof |
-
2018
- 2018-07-17 CN CN201821141590.XU patent/CN208998967U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109141689A (en) * | 2018-07-17 | 2019-01-04 | 东莞成启瓷创新材料有限公司 | A kind of low-temperature co-fired ceramics LTCC pressure sensor |
| CN113155348A (en) * | 2021-02-26 | 2021-07-23 | 西安微电子技术研究所 | Piezoresistive pressure sensor signal processing module and integration method thereof |
| CN113155348B (en) * | 2021-02-26 | 2023-09-12 | 西安微电子技术研究所 | Piezoresistive pressure sensor signal processing module and integration method thereof |
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190618 Termination date: 20210717 |
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| CF01 | Termination of patent right due to non-payment of annual fee |