CN203132736U - Differential surface-acoustic-wave temperature sensor - Google Patents
Differential surface-acoustic-wave temperature sensor Download PDFInfo
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- CN203132736U CN203132736U CN 201320069048 CN201320069048U CN203132736U CN 203132736 U CN203132736 U CN 203132736U CN 201320069048 CN201320069048 CN 201320069048 CN 201320069048 U CN201320069048 U CN 201320069048U CN 203132736 U CN203132736 U CN 203132736U
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Abstract
The utility model relates to a differential surface-acoustic-wave temperature sensor comprising a housing, a housing cover, a piezoelectric substrate, a first surface-acoustic-wave resonator and a second surface-acoustic-wave resonator, wherein the piezoelectric substrate is fixed on the bottom in the housing and the housing and the housing cover are mutually connected in a sealing manner. Innovative points of the temperature sensor are that the temperature sensor also comprises a first piezoelectric film, the first surface-acoustic-wave resonator is arranged on a surface of the piezoelectric substrate, the first piezoelectric film is mounted on a residual surface of the piezoelectric substrate and a surface and periphery of the first surface-acoustic-wave resonator, and the second surface-acoustic-wave resonator are disposed on a surface of the first piezoelectric film. The differential surface-acoustic-wave temperature sensor provided by the utility model has the advantages of compact structure, high measurement precision and low production cost.
Description
Technical field
The utility model is specifically related to a kind of differential type surface acoustic wave temperature sensor, be applicable to the human body temperature monitoring, or the high temperature detection in the hazardous environment, or the temperature remote sensing of the temperature monitoring of crucial rotary mechanical part such as generating and power transmission and power transformer etc. etc.
Background technology
A main application of existing surface acoustic wave sensor is temperature sensor.Passive and wireless temperature sensor based on surface acoustic wave has been widely used in the actual life, for example, in hospital patient temperature is monitored, or carry out the real-time monitoring of body temperature and blood pressure in the implant into body, or the monitoring of exhausr port high temperature in the turbine engine operational process, or the monitoring of the interior temperature of steel industry smelting vessel lining field, or the temperature monitoring of the crucial contact that is electrically connected in the intelligent grid, perhaps real-time monitoring of the temperature and pressure of vehicle tyre etc.
As everyone knows, the design of existing surface acoustic wave temperature sensor mainly contains two kinds in resonator and lag line.A single port SAW (Surface Acoustic Wave) resonator is to change to measure variation of temperature by the resonance frequency of measuring resonator; A delay line filter is to change to measure variation of temperature by the time delay of measuring lag line.And the surface acoustic wave temperature sensor of said structure may be used in wired and wireless two kinds of measurement/monitoring systems.
If be applied under the not high situation of thermometric accuracy requirement, a single port resonator is normally adopted in the design of surface acoustic wave temperature sensor.Though and the sound surface temperature sensor of this structure is simple in structure, cost is also low, and is applicable to a frequency read/write and simultaneously multiple spot is carried out monitoring temperature; But the surface acoustic wave temperature sensor that carries out temperature survey or other physical parameters measurements as single port resonator of this use has following shortcoming:
Owing in manufacturing process, have variable factor, therefore, when product export, need calibrate each sensor;
Because the variation of ageing equipment and environment need be carried out regularly or the calibration of not timing each sensor in application process;
The aging measuring accuracy that can directly influence sensor of sensor device;
Measurement result is subjected to the influence of distance between sensor and the rf readers easily;
Measure and be subjected to electromagnetic interference between sensor and the frequency read/write easily.
Because above-mentioned all restrictions, use the temperature measurement system of the surface acoustic wave temperature sensor establishment of a single port resonator, do not measure the reference signal of temperature, measuring accuracy is not high, before measuring, need to calibrate, and the operating cost of the temperature measurement system of this structure is also than higher.
When if temperature measurement accuracy becomes more crucial system requirements, just be necessary to adopt the surface acoustic wave temperature sensor of being formed by two single port resonators to carry out the difference measurement of temperature.The design of two single port resonators in the past mainly contains following dual mode:
Two single port resonators are positioned at the identical sound wave direction of propagation on same piezoelectric substrate surface, but have different resonance frequencies;
Two single port resonators are positioned at the different sound waves direction of propagation on same piezoelectric substrate surface, and have different resonance frequencies;
Though and the surface acoustic wave temperature sensor of said structure has remedied the indeterminable shortcoming of only bringing with a resonator, increased the size of sensor, also increased production cost.
Summary of the invention
The purpose of this utility model is: a kind of compact conformation, measuring accuracy height are provided, and the low differential type surface acoustic wave temperature sensor of production cost, to overcome the deficiencies in the prior art.
In order to achieve the above object, first technical scheme of the present utility model is: a kind of differential type surface acoustic wave temperature sensor, comprise housing, cap, piezoelectric substrate, first SAW (Surface Acoustic Wave) resonator and second sound surface resonator, described piezoelectric substrate is fixed on the bottom in the housing, described housing and cap are tightly connected, its innovative point is: also comprise first piezoelectric membrane, described first SAW (Surface Acoustic Wave) resonator is located at the surface of piezoelectric substrate, and first piezoelectric membrane is located on the surface and periphery of the residual surface of piezoelectric substrate and first SAW (Surface Acoustic Wave) resonator, and described second sound surface resonator is located at the surface of first piezoelectric membrane.
In above-mentioned first technical scheme, described housing and cap are respectively metal shell and metal cap, perhaps are respectively ceramic shell and metal cap.
In above-mentioned first technical scheme, described first piezoelectric membrane is zinc paste or aluminium nitride, and piezoelectric substrate is quartzy or lithium niobate or lithium tantalate,
Or adamas
In above-mentioned first technical scheme, described first SAW (Surface Acoustic Wave) resonator and second sound surface resonator overlap or overlap or intersect in the projection of vertical direction.
In above-mentioned first technical scheme, when described first SAW (Surface Acoustic Wave) resonator and second sound surface resonator intersected in the projection of vertical direction, both angles were in 0 ° ~ 180 ° scopes.
In order to achieve the above object, second technical scheme of the present utility model is: a kind of differential type surface acoustic wave temperature sensor, comprise housing, cap, first SAW (Surface Acoustic Wave) resonator and second sound surface resonator, described housing and cap are tightly connected, its innovative point is: also comprise substrate base, first piezoelectric membrane and second piezoelectric membrane, described substrate base is fixed on the bottom in the housing, second piezoelectric membrane is located at the surface of substrate base, first SAW (Surface Acoustic Wave) resonator is located on second piezoelectric membrane, first piezoelectric membrane is located at the residual surface of second piezoelectric membrane and surface and the periphery of first SAW (Surface Acoustic Wave) resonator, and described second sound surface resonator is located at the surface of first piezoelectric membrane.
In above-mentioned second technical scheme, described housing and cap are respectively metal shell and metal cap, perhaps are respectively ceramic shell and metal cap.
In above-mentioned second technical scheme, described first piezoelectric membrane is zinc paste or aluminium nitride, and second piezoelectric membrane is silicon dioxide, and substrate base is silicon crystal.
In above-mentioned second technical scheme, described first SAW (Surface Acoustic Wave) resonator and second sound surface resonator overlap or overlap or intersect in the projection of vertical direction.
In above-mentioned second technical scheme, when described first SAW (Surface Acoustic Wave) resonator and second sound surface resonator intersected in the projection of vertical direction, both angles were in 0 ° ~ 180 ° scopes.
In order to achieve the above object, the 3rd technical scheme of the present utility model is: a kind of differential type surface acoustic wave temperature sensor, comprise housing, cap, first SAW (Surface Acoustic Wave) resonator and second sound surface resonator, described housing and cap are tightly connected, its innovative point is: also comprise piezoelectric substrate, first piezoelectric membrane and second piezoelectric membrane, described piezoelectric substrate is fixed on the bottom in the housing, second piezoelectric membrane is located at the surface of piezoelectric substrate, first SAW (Surface Acoustic Wave) resonator is located on second piezoelectric membrane, first piezoelectric membrane is located at the residual surface of second piezoelectric membrane and surface and the periphery of first SAW (Surface Acoustic Wave) resonator, and described second sound surface resonator is located at the surface of first piezoelectric membrane.
In above-mentioned the 3rd technical scheme, described housing and cap are respectively metal shell and metal cap, perhaps are respectively ceramic shell and metal cap.
In above-mentioned the 3rd technical scheme, described first piezoelectric membrane is zinc paste, and second piezoelectric membrane is aluminium nitride; Perhaps described first piezoelectric membrane is aluminium nitride, and second piezoelectric membrane is zinc paste, and piezoelectric substrate is adamas.
In above-mentioned the 3rd technical scheme, described first SAW (Surface Acoustic Wave) resonator and second sound surface resonator overlap or overlap or intersect in the projection of vertical direction.
In above-mentioned the 3rd technical scheme, when described first SAW (Surface Acoustic Wave) resonator and second sound surface resonator intersected in the projection of vertical direction, both angles were in 0 ° ~ 180 ° scopes.
The good effect that the utility model has is: owing to after having adopted above-mentioned differential type arrangement of temperature sensor, two SAW (Surface Acoustic Wave) resonator are arranged on two different physical surfaces, and are arranged to layer structure; Compare with in the prior art two SAW (Surface Acoustic Wave) resonator being arranged on the same piezoelectric substrate surface, chip size of the present utility model has reduced 50% at least; Again owing to SAW propagating characteristic (acoustic velocity on two different physical surfaces, electromechanical coupling factor etc.) difference, make that the temperature coefficient of two sound surface resonance devices is also different, therefore, the resonance frequency that is caused by temperature variation of two resonators changes also different, one of them SAW (Surface Acoustic Wave) resonator is used for providing reference or reference temperature measuring-signal, another SAW (Surface Acoustic Wave) resonator is used for providing the difference temperature signal, the difference on the frequency of the different resonance frequencies by analyzing two SAW (Surface Acoustic Wave) resonator, can obtain the small temperature variation of measured body accurately, thereby realize high-precision differential type temperature survey.
Description of drawings
Fig. 1 is the structural representation of first kind of embodiment of the utility model;
Fig. 2 is the structural representation of second kind of embodiment of the utility model;
Fig. 3 is the structural representation of the third embodiment of the utility model.
Embodiment
Below in conjunction with accompanying drawing and the embodiment that provides, the utility model is further described, but is not limited thereto.
As shown in Figure 1, a kind of differential type surface acoustic wave temperature sensor, comprise housing 1, cap 2, piezoelectric substrate 3, first SAW (Surface Acoustic Wave) resonator 4 and second sound surface resonator 6, described piezoelectric substrate 3 is fixed on the bottom in the housing 1, described housing 1 and cap 2 are tightly connected, its innovative point is: also comprise first piezoelectric membrane 5, described first SAW (Surface Acoustic Wave) resonator 4 is located at the surface of piezoelectric substrate 3, and first piezoelectric membrane 5 is located on the surface and periphery of the residual surface of piezoelectric substrate 3 and first SAW (Surface Acoustic Wave) resonator 4, and described second sound surface resonator 6 is located at the surface of first piezoelectric membrane 5.
As shown in Figure 1, described housing 1 and cap 2 are respectively metal shell and metal cap, perhaps are respectively ceramic shell and metal cap.
First piezoelectric membrane 5 described in the utility model is zinc paste or aluminium nitride, and piezoelectric substrate 3 is quartzy or lithium niobate or lithium tantalate,
Or adamas, or other piezoelectric crystals.
As shown in Figure 1, in order to make compact conformation of the present utility model, reduce the size of sensor, first SAW (Surface Acoustic Wave) resonator 4 described in the utility model overlaps or overlaps or intersect with the projection of second sound surface resonator 6 at vertical direction.
First SAW (Surface Acoustic Wave) resonator 4 described in the utility model and second sound surface resonator 6 are when the projection of vertical direction is intersected, both angles are in 0 ° ~ 180 ° scopes, concrete numerical value is decided by the maximal value of the difference of two direction surface acoustic wave time delay temperatures coefficient, can guarantee that like this first SAW (Surface Acoustic Wave) resonator 4 and the sensitivity of the difference measurement of second sound surface resonator 6 are the best.
The acoustic wave energy that first SAW (Surface Acoustic Wave) resonator 4 and second sound surface resonator 6 produce among the embodiment 1 all concentrates in the degree of depth of a wave length of sound of piezoelectric substrate 3 and piezoelectric membrane 5 bottoms, and time delay temperature coefficient (TCD) or the frequency-temperature coefficient (TCF) of these two different acoustic wave propagation paths are different simultaneously.By analyzing the difference on the frequency from the resonance frequency of two different SAW (Surface Acoustic Wave) resonator, just can obtain the subtle change of measured body temperature accurately.
As shown in Figure 2, a kind of differential type surface acoustic wave temperature sensor, comprise housing 1, cap 2, first SAW (Surface Acoustic Wave) resonator 4 and second sound surface resonator 6, described housing 1 and cap 2 are tightly connected, its innovative point is: also comprise substrate base 3 ', first piezoelectric membrane 5 and second piezoelectric membrane 8, described substrate base 3 ' is fixed on the bottom in the housing 1, second piezoelectric membrane 8 is located at the surface of substrate base 3 ', first SAW (Surface Acoustic Wave) resonator 4 is located on second piezoelectric membrane 8, first piezoelectric membrane 5 is located at the residual surface of second piezoelectric membrane 8 and surface and the periphery of first SAW (Surface Acoustic Wave) resonator 4, and described second sound surface resonator 6 is located at the surface of first piezoelectric membrane 5.
First piezoelectric membrane 5 described in the utility model is zinc paste or aluminium nitride, and second piezoelectric membrane 8 is silicon dioxide, and substrate base 3 ' is silicon crystal.
As shown in Figure 2, in order to make compact conformation of the present utility model, reduce the size of sensor, first SAW (Surface Acoustic Wave) resonator 4 described in the utility model overlaps or overlaps or intersect with the projection of second sound surface resonator 6 at vertical direction.
First SAW (Surface Acoustic Wave) resonator 4 described in the utility model and second sound surface resonator 6 are when the projection of vertical direction is intersected, both angles are in 0 ° ~ 180 ° scopes, concrete numerical value is decided by the maximal value of the difference of two direction surface acoustic wave time delay temperatures coefficient, can guarantee that like this first SAW (Surface Acoustic Wave) resonator 4 and the sensitivity of the difference measurement of second sound surface resonator 6 are the best.
As shown in Figure 3, a kind of differential type surface acoustic wave temperature sensor, comprise housing 1, cap 2, first SAW (Surface Acoustic Wave) resonator 4 and second sound surface resonator 6, described housing 1 and cap 2 are tightly connected, its innovative point is: also comprise piezoelectric substrate 3, first piezoelectric membrane 5 and second piezoelectric membrane 8, described piezoelectric substrate 3 is fixed on the bottom in the housing 1, second piezoelectric membrane 8 is located at the surface of piezoelectric substrate 3, first SAW (Surface Acoustic Wave) resonator 4 is located on second piezoelectric membrane 8, first piezoelectric membrane 5 is located at the residual surface of second piezoelectric membrane 8 and surface and the periphery of first SAW (Surface Acoustic Wave) resonator 4, and described second sound surface resonator 6 is located at the surface of first piezoelectric membrane 5.
First piezoelectric membrane 5 described in the utility model is zinc paste, and second piezoelectric membrane 8 is aluminium nitride; Perhaps described first piezoelectric membrane 5 is aluminium nitride, and second piezoelectric membrane 8 is zinc paste, and piezoelectric substrate 3 is adamass.
As shown in Figure 3, in order to make compact conformation of the present utility model, reduce the size of sensor, first SAW (Surface Acoustic Wave) resonator 4 described in the utility model overlaps or overlaps or intersect with the projection of second sound surface resonator 6 at vertical direction.
First SAW (Surface Acoustic Wave) resonator 4 described in the utility model and second sound surface resonator 6 are when the projection of vertical direction is intersected, both angles are in 0 ° ~ 180 ° scopes, concrete numerical value is decided by the maximal value of the difference of two direction surface acoustic wave time delay temperatures coefficient, can guarantee that like this first SAW (Surface Acoustic Wave) resonator 4 and the sensitivity of the difference measurement of second sound surface resonator 6 are the best.
If when first SAW (Surface Acoustic Wave) resonator 4 of the utility model embodiment 1, embodiment 2 and embodiment 3 and second sound surface resonator 6 overlapped in the projection of vertical direction, the sound wave direction of propagation was consistent, but resonance frequency is different; When if first SAW (Surface Acoustic Wave) resonator 4 and second sound surface resonator 6 intersect in the projection of vertical direction, guaranteed that there is the angle of non-zero the sound wave direction of propagation that two SAW (Surface Acoustic Wave) resonator produce, has different resonance frequencies, guaranteed that two SAW (Surface Acoustic Wave) resonator have different time delay temperatures coefficient (TCD) or frequency-temperature coefficient (TCF), by analyzing from the difference on the frequency of the different resonance frequencies of two SAW (Surface Acoustic Wave) resonator, we can obtain the small temperature variation of measured body accurately.
The utility model is beamed back measuring-signal simultaneously in order to ensure first SAW (Surface Acoustic Wave) resonator 4 and second sound surface resonator 6, and guarantee that signal intensity is the strongest, first SAW (Surface Acoustic Wave) resonator 4 and second sound surface resonator 6 are connected in parallel, and are bonded to bottom in the housing 1 by lead-in wire.
Among the utility model embodiment 1, embodiment 2 and the embodiment 3, first SAW (Surface Acoustic Wave) resonator 4 is used for providing reference or reference temperature measuring-signal, second sound surface resonator 6 is used for providing the difference temperature signal, the orientation of first SAW (Surface Acoustic Wave) resonator 4 and second sound surface resonator 6 is come to determine in such a way: first SAW (Surface Acoustic Wave) resonator 4 is selected on the minimum direction of propagation of time delay temperature coefficient (TCD), and second sound surface resonator 6 is selected on the maximum direction of propagation of time delay temperature coefficient (TCD).So just can improve thermometric sensitivity to greatest extent.Certainly, also can be that second sound surface resonator 6 is used for providing reference or reference temperature measuring-signal, first SAW (Surface Acoustic Wave) resonator 4 is used for providing the difference temperature signal, and at this moment the decision principle of two SAW (Surface Acoustic Wave) resonator orientations is still decided by the maximal value of the difference of two direction surface acoustic wave time delay temperatures coefficient.
When the utility model uses, differential type surface acoustic wave temperature sensor is connected on the little radio-frequency antenna.Radiofrequency signal is sent by the radio-frequency queries device earlier, is received by the utility model; Temperature influence and amended signal is fired back by radio-frequency antenna is received by interrogator again.Comprised the temperature information of measured body from radiofrequency signal of the present utility model, by handling the difference from two resonant frequency shifts, we can measure/monitor the temperature variation of measurand in real time and accurately.Because do not need to add in addition power supply when sensor uses, the temperature sensing of realization is fully wireless and passive.
Structure disclosed in the utility model also can be used for the differential type pressure transducer, the differential type vibration transducer, or the differential type of other physical parameters is measured.
Claims (15)
1. differential type surface acoustic wave temperature sensor, comprise housing (1), cap (2), piezoelectric substrate (3), first SAW (Surface Acoustic Wave) resonator (4) and second sound surface resonator (6), described piezoelectric substrate (3) is fixed on the bottom in the housing (1), described housing (1) and cap (2) are tightly connected, it is characterized in that: also comprise first piezoelectric membrane (5), described first SAW (Surface Acoustic Wave) resonator (4) is located at the surface of piezoelectric substrate (3), and first piezoelectric membrane (5) is located on the surface and periphery of the residual surface of piezoelectric substrate (3) and first SAW (Surface Acoustic Wave) resonator (4), and described second sound surface resonator (6) is located at the surface of first piezoelectric membrane (5).
2. differential type surface acoustic wave temperature sensor according to claim 1, it is characterized in that: described housing (1) and cap (2) are respectively metal shell and metal cap, perhaps are respectively ceramic shell and metal cap.
3. differential type surface acoustic wave temperature sensor according to claim 1, it is characterized in that: described first piezoelectric membrane (5) is zinc paste or aluminium nitride, piezoelectric substrate (3) is quartzy or lithium niobate or lithium tantalate, or adamas.
4. differential type surface acoustic wave temperature sensor according to claim 1 is characterized in that: described first SAW (Surface Acoustic Wave) resonator (4) overlaps or overlaps or intersect with the projection of second sound surface resonator (6) at vertical direction.
5. differential type surface acoustic wave temperature sensor according to claim 1, it is characterized in that: when described first SAW (Surface Acoustic Wave) resonator (4) and second sound surface resonator (6) intersected in the projection of vertical direction, both angles were in 0 ° ~ 180 ° scopes.
6. differential type surface acoustic wave temperature sensor, comprise housing (1), cap (2), first SAW (Surface Acoustic Wave) resonator (4) and second sound surface resonator (6), described housing (1) and cap (2) are tightly connected, it is characterized in that: also comprise substrate base (3 '), first piezoelectric membrane (5) and second piezoelectric membrane (8), described substrate base (3 ') is fixed on the bottom in the housing (1), second piezoelectric membrane (8) is located at the surface of substrate base (3 '), first SAW (Surface Acoustic Wave) resonator (4) is located on second piezoelectric membrane (8), first piezoelectric membrane (5) is located at the residual surface of second piezoelectric membrane (8) and surface and the periphery of first SAW (Surface Acoustic Wave) resonator (4), and described second sound surface resonator (6) is located at the surface of first piezoelectric membrane (5).
7. differential type surface acoustic wave temperature sensor according to claim 6, it is characterized in that: described housing (1) and cap (2) are respectively metal shell and metal cap, perhaps are respectively ceramic shell and metal cap.
8. differential type surface acoustic wave temperature sensor according to claim 6, it is characterized in that: described first piezoelectric membrane (5) is zinc paste or aluminium nitride, and second piezoelectric membrane (8) is silicon dioxide, and substrate base (3 ') is silicon crystal.
9. differential type surface acoustic wave temperature sensor according to claim 6 is characterized in that: described first SAW (Surface Acoustic Wave) resonator (4) overlaps or overlaps or intersect with the projection of second sound surface resonator (6) at vertical direction.
10. differential type surface acoustic wave temperature sensor according to claim 6, it is characterized in that: when described first SAW (Surface Acoustic Wave) resonator (4) and second sound surface resonator (6) intersected in the projection of vertical direction, both angles were in 0 ° ~ 180 ° scopes.
11. differential type surface acoustic wave temperature sensor, comprise housing (1), cap (2), first SAW (Surface Acoustic Wave) resonator (4) and second sound surface resonator (6), described housing (1) and cap (2) are tightly connected, it is characterized in that: also comprise piezoelectric substrate (3), first piezoelectric membrane (5) and second piezoelectric membrane (8), described piezoelectric substrate (3) is fixed on the bottom in the housing (1), second piezoelectric membrane (8) is located at the surface of piezoelectric substrate (3), first SAW (Surface Acoustic Wave) resonator (4) is located on second piezoelectric membrane (8), first piezoelectric membrane (5) is located at the residual surface of second piezoelectric membrane (8) and surface and the periphery of first SAW (Surface Acoustic Wave) resonator (4), and described second sound surface resonator (6) is located at the surface of first piezoelectric membrane (5).
12. differential type surface acoustic wave temperature sensor according to claim 11 is characterized in that: described housing (1) and cap (2) are respectively metal shell and metal cap, perhaps are respectively ceramic shell and metal cap.
13. differential type surface acoustic wave temperature sensor according to claim 11 is characterized in that: described first piezoelectric membrane (5) is zinc paste, and second piezoelectric membrane (8) is aluminium nitride; Perhaps described first piezoelectric membrane (5) is aluminium nitride, and second piezoelectric membrane (8) is zinc paste, and piezoelectric substrate (3) is adamas.
14. differential type surface acoustic wave temperature sensor according to claim 11 is characterized in that: described first SAW (Surface Acoustic Wave) resonator (4) overlaps or overlaps or intersect with the projection of second sound surface resonator (6) at vertical direction.
15. differential type surface acoustic wave temperature sensor according to claim 11, it is characterized in that: when described first SAW (Surface Acoustic Wave) resonator (4) and second sound surface resonator (6) intersected in the projection of vertical direction, both angles were in 0 ° ~ 180 ° scopes.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201320069048 CN203132736U (en) | 2013-02-06 | 2013-02-06 | Differential surface-acoustic-wave temperature sensor |
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| CN 201320069048 CN203132736U (en) | 2013-02-06 | 2013-02-06 | Differential surface-acoustic-wave temperature sensor |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103134606A (en) * | 2013-02-06 | 2013-06-05 | 常州智梭传感科技有限公司 | Differential type acoustic surface wave temperature sensor |
| CN103557987A (en) * | 2013-10-10 | 2014-02-05 | 软控股份有限公司 | Surface acoustic wave sensor packaging structure |
| CN104101451A (en) * | 2014-07-17 | 2014-10-15 | 电子科技大学 | Acoustic surface wave sensor with double sensitive sources |
| CN104359584A (en) * | 2014-11-12 | 2015-02-18 | 中国科学院微电子研究所 | High-temperature surface acoustic wave temperature sensor |
| CN112964384A (en) * | 2021-03-16 | 2021-06-15 | 山东深思智能科技有限公司 | Resonator type wireless passive temperature sensor and working method |
-
2013
- 2013-02-06 CN CN 201320069048 patent/CN203132736U/en not_active Withdrawn - After Issue
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103134606A (en) * | 2013-02-06 | 2013-06-05 | 常州智梭传感科技有限公司 | Differential type acoustic surface wave temperature sensor |
| CN103557987A (en) * | 2013-10-10 | 2014-02-05 | 软控股份有限公司 | Surface acoustic wave sensor packaging structure |
| CN104101451A (en) * | 2014-07-17 | 2014-10-15 | 电子科技大学 | Acoustic surface wave sensor with double sensitive sources |
| CN104101451B (en) * | 2014-07-17 | 2016-08-31 | 电子科技大学 | Sensitive source surface acoustic wave sensor |
| CN104359584A (en) * | 2014-11-12 | 2015-02-18 | 中国科学院微电子研究所 | High-temperature surface acoustic wave temperature sensor |
| CN112964384A (en) * | 2021-03-16 | 2021-06-15 | 山东深思智能科技有限公司 | Resonator type wireless passive temperature sensor and working method |
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Granted publication date: 20130814 Effective date of abandoning: 20141022 |
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