CN204013438U - A kind of SAW (Surface Acoustic Wave) resonator - Google Patents
A kind of SAW (Surface Acoustic Wave) resonator Download PDFInfo
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- CN204013438U CN204013438U CN201420420830.5U CN201420420830U CN204013438U CN 204013438 U CN204013438 U CN 204013438U CN 201420420830 U CN201420420830 U CN 201420420830U CN 204013438 U CN204013438 U CN 204013438U
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- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 70
- 238000013461 design Methods 0.000 abstract description 17
- 238000005259 measurement Methods 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000001133 acceleration Effects 0.000 abstract description 2
- 230000001360 synchronised effect Effects 0.000 description 15
- 239000000758 substrate Substances 0.000 description 5
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 3
- 229910052744 lithium Inorganic materials 0.000 description 3
- 230000032683 aging Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
The utility model discloses a kind of SAW (Surface Acoustic Wave) resonator, comprise an interdigital transducer, the reflecting grating that is arranged at interdigital transducer both sides and resonance chamber; Described resonance chamber, between interdigital transducer and reflecting grating, or is positioned at the middle part of interdigital transducer.The structure of bimodulus SAW resonator of the present utility model differs from traditional bimodulus fundamentally having, i.e. two single modes design is placed on the design of a SAW resonator on chip, the utility model is a design, rather than two independently designs on a chip, therefore, resonator of the present utility model is not easy to be subject to the impact of difference in manufacture process, and chip size is 50% left and right that two traditional singlemode resonance devices design simultaneously, so chip cost is lower.Single port bimodulus SAW resonator of the present utility model is widely used as the wireless sourceless sensor of difference measurement mode, as temperature sensor, and pressure sensor, acceleration/vibration sensor, strain transducer etc.
Description
Technical field
The utility model relates to a kind of SAW (Surface Acoustic Wave) resonator, particularly a kind of SAW (Surface Acoustic Wave) resonator.
Background technology
Wireless sensor technology, to the detection of mobile object and at hazardous environment, as high temperature, has great application prospect in the measurement application in the scenes such as high electromagnetic radiation.Transducer based on surface acoustic wave (SAW) is complete passive (without battery), has very high reliability in many application.When surface acoustic wave sensor coordinates with wireless echo read write line, wireless information transfer scope can reach 5 meters.
By measuring the variation of single port SAW resonator resonance frequency, the variation of delay line filter centre frequency, the variation of differential delay line or reflection delay line time delay, the variations in temperature that we can measure.For example, in the general situation of thermometric required precision, a SAW temperature sensor adopts a single port singlemode resonance device conventionally.This mode is simple, and cost is low, carries out multi-point monitoring more applicable for single radio frequency read write line simultaneously.In prior art, there is the design of two kinds of different single port single mode SAW resonators: synchronous and anti-synchronous.In the design of synchronous SAW resonator, reflecting grating electrode has formed the periodic expansion of central IDT electrode, that is, and and Λ
rEFequal Λ
iDT, cavity length Lc is (2n+1) Λ
iDT/ 2, wherein n is an integer.Such as Figure of description 1 is the example of S11 frequency response of SAW resonator of the single port single mode of a synchronous mode.Although anti-synchronous mode is (being positioned at 439.1MHz) existing, it is very weak comparing with synchronous mode (435.6MHz).Yet in the design of anti-synchronous single port SAW resonator, center cavity is no longer (2n+1) Λ
iDT/ 2, and the cycle of transducer electrode and the cycle of reflecting grating be different in general, i.e. Λ
rEF≠ Λ
iDT.Figure of description 2 is examples for the frequency response of the anti-synchronous SAW resonator S11 of a single port single mode.Although synchronous mode is (being positioned at 430.1MHz) existing, it is very weak comparing with anti-synchronous mode (434.2MHz).
The measurement of using single port singlemode resonance device to carry out temperature or other physical quantity has following shortcoming: (1), due to the difference in manufacture process, each transducer needs to calibrate; (2), due to the variation of device aging and environment, before measurement, need each transducer to calibrate; (3) measure and be subject to the impact that sensor component is aging; (4) measure the impact that is subject to the distance between transducer and RF reader; (5) measure and to be subject to the Electromagnetic Interference between sensor head and frequency read/write in this environment.
Due to the problems referred to above, the operation cost of using single single port single mode SAW resonator to be engaged in temperature survey or any other physical quantity is higher.When the precision of measuring being had to higher requirement, adopt difference measurement mode, in a design, there are two singlemode resonance devices.It is normally placed on two single mode SAW resonators physically on one single chip, connects concurrently on electric, and is encapsulated in airtightly in a single metal or ceramic packaging.In the prior art, the thermometric SAW transducer of difference is all to use two single port singlemode resonance devices: (1) two resonator is located at same Piezoelectric Substrates surface, and the two direction of propagation is identical but resonance frequency different; Or (2) two resonators are located at same Piezoelectric Substrates surface, the two direction of propagation different (two uneven sound wave tracks), their resonance frequency can be the same or different.Because these two kinds of modes are all two independently designs on a chip, therefore, it is easily subject to the impact of difference in manufacture process, and chip size is larger simultaneously, and cost is high.
Utility model content
The purpose of this utility model is to solve the problem that prior art exists, and provides a kind of Measurement sensibility accurate, and chip size is little, the SAW (Surface Acoustic Wave) resonator that cost is low, and it is the SAW (Surface Acoustic Wave) resonator that single port but can be supported the mode of resonance that two intensity is equal simultaneously.
The technical scheme that realizes the utility model object is a kind of SAW (Surface Acoustic Wave) resonator, comprises an interdigital transducer, the reflecting grating that is arranged at interdigital transducer both sides and resonance chamber; Described resonance chamber, between interdigital transducer and reflecting grating, or is positioned at the middle part of interdigital transducer; The periods lambda of interdigital transducers electrodes
iDTperiods lambda with reflecting grating electrode
rEFbetween pass be Λ
iDT≠ Λ
rEF; 0.5<N
iDT| rs|<0.6, | rs| is the reflection coefficient of each electrode of interdigital transducer.
The long Lc of external cavity of described SAW (Surface Acoustic Wave) resonator is 1.5 Λ
iDT, Λ
rEF/ Λ
iDTbe 1.0027, the quantity of interdigital transducers electrodes is 219.
Elaborate mentality of designing of the present utility model below: in aforementioned background art by the agency of in resonator, generally only have a dominant pattern, i.e. synchronous or anti-synchronous mode.Its contrary pattern is the unwanted performance that simultaneously also can reduce resonator.These two patterns of the present utility model (comprising synchronous and anti-synchronous) match and coexist, and there is identical intensity, to form the SAW resonator of a single port bimodulus, its key is the different (Λ of cycle that use external cavity and make IDT and reflecting grating electrode
rEF≠ Λ
iDT) support anti-synchronous mode, with central IDT, support synchronous mode, in order to support synchronous mode with central IDT, adopt the mode of the number that increases IDT electrode.
Adopt after technique scheme, the utlity model has following useful effect: the structure of bimodulus SAW resonator of the present utility model differs from traditional bimodulus fundamentally having, i.e. two single modes design is placed on the design of a SAW resonator on chip, the utility model is a design, rather than two independently designs on a chip, therefore, resonator of the present utility model is not easy to be subject to the impact of difference in manufacture process, chip size is 50% left and right that two traditional singlemode resonance devices design simultaneously, so chip cost is lower.Single port bimodulus SAW resonator of the present utility model is widely used as the wireless sourceless sensor of difference measurement mode, as temperature sensor, and pressure sensor, acceleration/vibration sensor, strain transducer etc.
Accompanying drawing explanation
For content of the present utility model is more easily expressly understood, according to specific embodiment also by reference to the accompanying drawings, the utility model is described in further detail, wherein below
Fig. 1 is the S11 frequency response chart of the SAW resonator of single port synchronous mode.
Fig. 2 is the S11 frequency response chart of the SAW resonator of the anti-synchronous mode of single port.
Fig. 3 is the S11 analog result that IDT has the single port SAW resonator of 119 electrodes, and it has only shown anti-synchronous mode as seen from the figure.
Fig. 4 is the single port bimodulus SAW resonator with external cavity.
Fig. 5 is the single port bimodulus SAW resonator with center cavity.
Fig. 6 is the S11 analog result that IDT has the single port bimodulus SAW resonator of 219 electrodes, it demonstrate synchronous and counter synchronize double mode.
Fig. 7 is the S11 measured result of the single port bimodulus SAW resonator based on 128 ゜ Y-X lithium niobates.
Fig. 8 is the difference temperature measurement result of the single port bimodulus SAW resonator based on 128 ゜ Y-X lithium niobates.
Embodiment
(embodiment 1)
The design of the single port bimodulus SAW resonator of the present embodiment is asynchronous in itself, by the resonator in design IDT, realized bimodulus (synchronous and anti-synchronous) SAW resonator, rather than traditional single mode (synchronous or anti-synchronous) resonator, because the number of electrodes of IDT is more than common IDT number of electrodes, therefore on IDT, encourage generation sound table ripple and form synchronous resonant; Meanwhile, in the electrode cycle of electrode cycle ≠ reflecting grating of IDT, on IDT, form anti-synchronous resonant, so just produced two moulds.
See Fig. 4 and Fig. 5, the SAW (Surface Acoustic Wave) resonator of the present embodiment comprises an interdigital transducer 1, is arranged at reflecting grating 2 and the resonance chamber 3 of interdigital transducer 1 both sides; As shown in Figure 4, be the single port bimodulus SAW (Surface Acoustic Wave) resonator with external cavity, two resonance chambers 3 lay respectively between interdigital transducer 1 and reflecting grating 2; As shown in Figure 5, be the single port bimodulus SAW (Surface Acoustic Wave) resonator with inner chamber, resonance chamber 3 is positioned at the middle part of interdigital transducer 1.The periods lambda of interdigital transducer 1 electrode
iDTperiods lambda with reflecting grating 2 electrodes
rEFbetween pass be Λ
iDT≠ Λ
rEF, the intensity on the synchronous resonant peak that SAW (Surface Acoustic Wave) resonator produces equates with the high peak intensity of anti-synchronous resonant.
As shown in Figure 3 and Figure 6, in the utility model, the IDT number of electrodes of single port bimodulus SAW resonator is more than the IDT number of electrodes of the SAW resonator of single port single mode conventionally.Fig. 3 is the simulation result of the anti-synchronous SAW resonator S11 frequency response of single port single mode.The external cavity length of this single mode SAW resonator is 1.5 Λ
iDT, Λ
rEF/ Λ
iDTbe that 1.0027, IDT has 119 strip electrodes, substrate is that ST is to the quartz of cutting.Fig. 6 is the simulation result of frequency response of the S11 of a single-ended bimodulus SAW resonator.From Fig. 6, can obviously see, its S11 frequency response has two modes of resonance.The external cavity length of this single mode SAW resonator is 1.5 Λ
iDT, Λ
rEF/ Λ
iDTbe 1.0027, but the quantity of IDT electrode is increased to 219, this piezoelectric substrate remains the quartz of ST-cutting.
Fig. 7 shows the frequency response based on the measured S11 of a single port bimodulus SAW resonator of 128 ° of YX lithium niobate substrate.Although not yet optimised, it has clearly illustrated two patterns of S11 response.Fig. 8 shows the temperature results of using a single port bimodulus SAW resonator actual measurement based on 128 ° of YX lithium niobates.
Above-described specific embodiment; the purpose of this utility model, technical scheme and beneficial effect are further described; institute is understood that; the foregoing is only specific embodiment of the utility model; be not limited to the utility model; all within spirit of the present utility model and principle, any modification of making, be equal to replacement, improvement etc., within all should being included in protection range of the present utility model.
Claims (2)
1. a SAW (Surface Acoustic Wave) resonator, is characterized in that: comprise an interdigital transducer (1), be arranged at reflecting grating (2) and the resonance chamber (3) of interdigital transducer (1) both sides; Described resonance chamber (3) is positioned between interdigital transducer (1) and reflecting grating (2), or is positioned at the middle part of interdigital transducer (1); The periods lambda of interdigital transducer (1) electrode
iDTperiods lambda with reflecting grating (2) electrode
rEFbetween pass be Λ
iDT≠ Λ
rEF; 0.5<N
iDT| rs|<0.6, | rs| is the reflection coefficient of each electrode of interdigital transducer (1).
2. a kind of SAW (Surface Acoustic Wave) resonator according to claim 1, is characterized in that: the long Lc of external cavity of described SAW (Surface Acoustic Wave) resonator is 1.5 Λ
iDT, Λ
rEF/ Λ
iDTbe 1.0027, the quantity of interdigital transducer (1) electrode is 219.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420420830.5U CN204013438U (en) | 2014-07-28 | 2014-07-28 | A kind of SAW (Surface Acoustic Wave) resonator |
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| CN201420420830.5U CN204013438U (en) | 2014-07-28 | 2014-07-28 | A kind of SAW (Surface Acoustic Wave) resonator |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI598974B (en) * | 2015-11-27 | 2017-09-11 | 樹德科技大學 | Non-destructive evaluation method for wafer-level piezoelectric material and equipment for measurement of the same |
| CN108871627A (en) * | 2018-07-16 | 2018-11-23 | 重庆大学 | A kind of difference double resonance type acoustic wave pressure sensor |
-
2014
- 2014-07-28 CN CN201420420830.5U patent/CN204013438U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI598974B (en) * | 2015-11-27 | 2017-09-11 | 樹德科技大學 | Non-destructive evaluation method for wafer-level piezoelectric material and equipment for measurement of the same |
| CN108871627A (en) * | 2018-07-16 | 2018-11-23 | 重庆大学 | A kind of difference double resonance type acoustic wave pressure sensor |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141210 |
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| CF01 | Termination of patent right due to non-payment of annual fee |