CN205488485U - Integrated surface acoustic wave effect force transducer who has antenna structure - Google Patents
Integrated surface acoustic wave effect force transducer who has antenna structure Download PDFInfo
- Publication number
- CN205488485U CN205488485U CN201620233385.0U CN201620233385U CN205488485U CN 205488485 U CN205488485 U CN 205488485U CN 201620233385 U CN201620233385 U CN 201620233385U CN 205488485 U CN205488485 U CN 205488485U
- Authority
- CN
- China
- Prior art keywords
- acoustic wave
- interdigital transducer
- surface acoustic
- piezoelectric substrate
- reflecting grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
The utility model discloses an integrated surface acoustic wave effect force transducer who has antenna structure, piezoelectricity basement (1) is cylindrical structure, is equipped with the recess on the terminal surface of piezoelectricity basement (1), and interdigital transducer IDT (4) and reflecting grating (5) are located among the recess, interdigital transducer IDT (4) are located the middle part of recess, and reflecting grating (5) are located the both sides of interdigital transducer IDT (4) respectively, and the both ends of interdigital transducer IDT (4) link to each other with electrode surface (2), and electrode surface (2) are fan -shapedly and extend to the terminal surface edge of piezoelectricity basement (1), are provided with on piezoelectricity basement (1) the terminal surface between electrode surface (2) antenna pattern (3). The utility model discloses integrate antenna structure with the SAW device for the signal of SAW device can directly be launched through the antenna, has reduced the size of device greatly, has extended SAW effect force transducer's application range, can effectively be used for among the effort measurement of adverse circumstances.
Description
Technical field
This utility model relates to a kind of surface acoustic wave force sensors, particularly to a kind of surface acoustic wave force sensors being integrated with antenna structure.
Background technology
Surface acoustic wave (surface acoustic wave, SAW) is that English physicist Rayleigh concentrates on, at a kind of energy that the eighties in 19th century finds during Study of Seismic ripple once in a while, the sound wave that ground surface is propagated.Surface acoustic wave is a kind of elastic wave propagated on the shallow surface of solid, if it exists dry model, mainly includes that the standard of Rayleigh ripple, Love ripple, Lamb wave, B2G ripple, leakage shearing surface acoustic wave and quick surface acoustic wave pattern indulges leaky surface acoustic wave etc..
Nineteen sixty-five, U.S. White and Voltmer are delivered the paper of entitled " a kind of new type of SAW acoustic-electric converter ", are achieved the key breakthrough of surface acoustic wave techniques, use interdigital transducer IDT to excite SAW first, accelerate the development of surface acoustic wave techniques.SAW sensor is the product that electronic technology combines with material science, it is made up of SAW agitator, sensitive interfacial film material and oscillating circuit, the core component of SAW sensor is SAW agitator, by piezoelectric substrate be deposited on the interdigital transducer of difference in functionality on substrate and formed, there is two kinds of delay line type (DL type) resonator type (R type).
SAW sensor is the up-and-coming youngster of the sensor such as pottery, quasiconductor of continuing.Compared with traditional sensors, it has, and performance is high, volume is little, can bear the advantages such as extreme operating conditions (such as high temperature, strong electromagnetic radiation).Additionally, SAW sensor can realize passive, without externally fed, this makes it more can be competent at noncontacting measurement than traditional sensor, such as: the physical-chemical parameters detection under the conditions of high speed rotor, rapid moving object and sealed object inside etc. are various.Owing to interdigital transducer can be joined directly together with radio-frequency radiation antenna, reach the purpose of transceiving radio frequency signal, so wireless application can be done directly, enormously simplify the structure of SAW sensor node.Simplest SAW sensor node is only made up of surface acoustic wave piezoelectricity coding sensing unit chip and the antenna being joined directly together, and low cost is suitable to popularization and application.
Owing to the surface acoustic wave velocity of sound is more much lower than the electromagnetic wave light velocity, acoustic surface wave propagation 4mm distance, can time delay one microseconds.One microsecond time delay, be enough to avoid the interference of low coverage (< 100 meters) interior radio frequency multiple reflections clutter, substantially increase the signal to noise ratio of effective echo, be conducive to increasing the reading/writing distance of reflection delay type SAW sensor or reducing the RF radiation power of read write line.
SAW sensor is operable with wider ambient temperature range.Using conventional piezoquartz, device maximum operating temperature can be more than 200 DEG C.Use particularly encapsulation, have been demonstrated to longer-term and be operated in 300 DEG C of environment.According to extraordinary piezoelectric, the operating temperature of sensor can be higher.
Surface acoustic wave sensor because of its passive and wireless measure, the outstanding advantages such as volume is little, highly sensitive, good stability, accommodative ability of environment are strong, had become as one of selection of microsensor design.IC technology and the fast development of MEMS technology the most in recent years, makes the cost of making SAW device be greatly reduced, and accelerates surface acoustic wave sensor and moves towards the speed of the marketization from theoretical research.For SAW force sensors, research both domestic and external is all for measuring fluid pressure, especially has been achieved for significant achievement in terms of automotive tire pressure measurement.But, the signal transmission system of current SAW force sensors, it is necessary to depend on and think integrated IC circuit engineering with SAW device, cause its volume and increase, it is impossible to be applied among the extreme environments such as tiny slit.Antenna structure, for this problem, is carried out integrated with SAW device based on MEMS technology by this utility model so that the signal of SAW device can directly be launched by antenna, substantially reduces the size of device, has expanded the use of SAW force sensors.
Utility model content
The purpose of this utility model is to overcome the deficiencies in the prior art, one is provided to carry out integrated by antenna structure with SAW device, the signal making SAW device can directly be launched by antenna, substantially reduce the size of device, expand the use of SAW force sensors, made SAW sensor can be effective to the surface acoustic wave force sensors being integrated with antenna structure among the Force measurement of adverse circumstances.
The purpose of this utility model is achieved through the following technical solutions: be integrated with the surface acoustic wave force sensors of antenna structure, including piezoelectric substrate, electrode surface, antenna pattern, interdigital transducer IDT and reflecting grating, piezoelectric substrate is cylindrical structural, one end face of piezoelectric substrate is provided with groove, interdigital transducer IDT and reflecting grating are positioned among groove, interdigital transducer IDT is positioned at the middle part of groove, reflecting grating lays respectively at the both sides of interdigital transducer IDT, the two ends of interdigital transducer IDT are connected with electrode surface, electrode surface is in fan-shaped and extend to the end face edge of piezoelectric substrate, it is provided with antenna pattern on piezoelectric substrate end face between electrode surface.
Specifically, described piezoelectric substrate uses single crystal quartz piezoelectric substrate or multi-layer substrate, and interdigital transducer IDT is made up of cross one another finger electrode, and reflecting grating is made up of pycnomorphous connected finger, and antenna pattern is annular mutually cross modal.
Further, described electrode surface, antenna pattern and reflecting grating are symmetrical structure.
The beneficial effects of the utility model are: interdigital transducer IDT and reflecting grating figure are formed at the groove surfaces of piezoelectric substrate end face by photoetching process, a kind of periphery fixed circular membrane sheet structure of composition, when active force acts on piezoelectric substrate surface, the material constant of piezoelectric substrate changes, cause the change of the SAW description situation propagated in piezoelectric substrate surface, the i.e. mid frequency of resonator offsets, and this frequency shift (FS) can be launched by the antenna being attached thereto；Antenna structure is carried out integrated with SAW device, the signal making SAW device can directly be launched by antenna, substantially reduce the size of device, expanded the range of SAW force sensors, also make SAW sensor can be efficiently applied among the Force measurement of adverse circumstances.
Accompanying drawing explanation
Fig. 1 is sensor construction schematic diagram of the present utility model；
Fig. 2 is sensor plan structure figure of the present utility model；
Fig. 3 is interdigital transducer IDT of the present utility model and reflecting grating dimensional drawing；
Fig. 4 is the power sensing structure illustraton of model of sensor of the present utility model；
Description of reference numerals: 1-piezoelectric substrate, 2-electrode surface, 3-antenna pattern, 4-interdigital transducer IDT, 5-reflecting grating.
Detailed description of the invention
Further illustrate the technical solution of the utility model below in conjunction with the accompanying drawings, but the content that this utility model is protected is not limited to the following stated.
Such as Fig. 1, shown in Fig. 2, it is integrated with the surface acoustic wave force sensors of antenna structure, including piezoelectric substrate 1, electrode surface 2, antenna pattern 3, interdigital transducer IDT4 and reflecting grating 5, piezoelectric substrate 1 is cylindrical structural, one end face of piezoelectric substrate 1 is provided with groove, interdigital transducer IDT4 and reflecting grating 5 are positioned among groove, interdigital transducer IDT4 is positioned at the middle part of groove, reflecting grating 5 lays respectively at the both sides of interdigital transducer IDT4, the two ends of interdigital transducer IDT4 are connected with electrode surface 2, electrode surface 2 is in fan-shaped and extend to the end face edge of piezoelectric substrate 1, it is provided with antenna pattern 3 on piezoelectric substrate 1 end face between electrode surface 2.
Specifically, described piezoelectric substrate 1 uses single crystal quartz piezoelectric substrate or multi-layer substrate, and interdigital transducer IDT4 is made up of cross one another finger electrode, and reflecting grating 5 is made up of pycnomorphous connected finger, and antenna pattern 3 is annular mutually cross modal.
Further, described electrode surface 2, antenna pattern 3 and reflecting grating 5 are symmetrical structure.
As it is shown on figure 3, wherein finger and gap equidimension parameter need to be determined according to the mid frequency of resonator.Be connected with interdigital transducer IDT4 both sides is symmetrical electrode surface 2 and peripheral antenna pattern 3, and wherein antenna pattern 3 is designed as annular mutually cross modal, can be gone out by electromagnetic signal emitting, carry out communication with peripheral circuit.
The operation principle of surface acoustic wave force sensors of the present utility model is: as shown in Figure 1, groove is shaped by MEMS etching technics, interdigital transducer IDT4 and reflecting grating 5 figure are formed at groove surfaces by photoetching process, a kind of periphery fixed circular membrane sheet structure of composition, as shown in Figure 4, when active force acts on piezoelectric substrate 1 surface, owing to the material constant of piezoelectric substrate 1 can change, cause the change of the SAW description situation propagated in piezoelectric substrate 1 surface, the i.e. mid frequency of resonator offsets, and this frequency shift (FS) can be launched by the antenna being attached thereto.The SAW device that this integrated level is high is greatly reduced SAW device structure, can be effective among the Force measurement of adverse circumstances.
Those of ordinary skill in the art is it will be appreciated that embodiment described here is to aid in reader understanding's principle of the present utility model, it should be understood that protection domain of the present utility model is not limited to such special statement and embodiment.Those of ordinary skill in the art can make various other various concrete deformation and combination without departing from this utility model essence according to these technology enlightenment disclosed in this utility model, and these deformation and combination are still in protection domain of the present utility model.
Claims (6)
1. it is integrated with the surface acoustic wave force sensors of antenna structure, it is characterized in that, including piezoelectric substrate (1), electrode surface (2), antenna pattern (3), interdigital transducer IDT (4) and reflecting grating (5), piezoelectric substrate (1) is cylindrical structural, one end face of piezoelectric substrate (1) is provided with groove, interdigital transducer IDT (4) and reflecting grating (5) and is positioned among groove；Interdigital transducer IDT (4) is positioned at the middle part of groove, reflecting grating (5) lays respectively at the both sides of interdigital transducer IDT (4), the two ends of interdigital transducer IDT (4) are connected with electrode surface (2), electrode surface (2), in fan-shaped and extend to the end face edge of piezoelectric substrate (1), piezoelectric substrate (1) end face between electrode surface (2) is provided with antenna pattern (3).
Surface acoustic wave force sensors the most according to claim 1, it is characterised in that described piezoelectric substrate (1) uses single crystal quartz piezoelectric substrate or multi-layer substrate.
Surface acoustic wave force sensors the most according to claim 1, it is characterised in that described interdigital transducer IDT (4) is made up of cross one another finger electrode.
Surface acoustic wave force sensors the most according to claim 1, it is characterised in that described reflecting grating (5) is made up of pycnomorphous connected finger.
Surface acoustic wave force sensors the most according to claim 1, it is characterised in that described antenna pattern (3) is annular mutually cross modal.
Surface acoustic wave force sensors the most according to claim 1, it is characterised in that described electrode surface (2), antenna pattern (3) and reflecting grating (5) are symmetrical structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620233385.0U CN205488485U (en) | 2016-03-24 | 2016-03-24 | Integrated surface acoustic wave effect force transducer who has antenna structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620233385.0U CN205488485U (en) | 2016-03-24 | 2016-03-24 | Integrated surface acoustic wave effect force transducer who has antenna structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205488485U true CN205488485U (en) | 2016-08-17 |
Family
ID=56652620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620233385.0U Expired - Fee Related CN205488485U (en) | 2016-03-24 | 2016-03-24 | Integrated surface acoustic wave effect force transducer who has antenna structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205488485U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106452518A (en) * | 2016-11-22 | 2017-02-22 | 上海安费诺永亿通讯电子有限公司 | NFC (near field communication) structure and electronic equipment |
| CN107631827A (en) * | 2017-09-11 | 2018-01-26 | 重庆大学 | A kind of surface acoustic wave chip of high-temp pressure sensor based on silicon crystal unit and piezoelectric membrane and preparation method thereof |
| CN109569392A (en) * | 2018-12-21 | 2019-04-05 | 北京工业大学 | A kind of active micro-mixer of Y type based on surface acoustic wave |
-
2016
- 2016-03-24 CN CN201620233385.0U patent/CN205488485U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106452518A (en) * | 2016-11-22 | 2017-02-22 | 上海安费诺永亿通讯电子有限公司 | NFC (near field communication) structure and electronic equipment |
| CN107631827A (en) * | 2017-09-11 | 2018-01-26 | 重庆大学 | A kind of surface acoustic wave chip of high-temp pressure sensor based on silicon crystal unit and piezoelectric membrane and preparation method thereof |
| CN109569392A (en) * | 2018-12-21 | 2019-04-05 | 北京工业大学 | A kind of active micro-mixer of Y type based on surface acoustic wave |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205488485U (en) | Integrated surface acoustic wave effect force transducer who has antenna structure | |
| Wang et al. | Optimal design on SAW sensor for wireless pressure measurement based on reflective delay line | |
| US20180209857A1 (en) | Wireless temperature sensor based chip | |
| CN101644772A (en) | Acoustic surface wave icing sensor capable of accessing wirelessly | |
| CN102052986A (en) | Wireless passive surface acoustic wave (SAW) impedance load transducer | |
| CA2348723A1 (en) | A wireless communication system using surface acoustic wave (saw) second harmonic techniques | |
| KR101202878B1 (en) | Wireless measurement apparatus and method using surface acoustic wave based micro-sensor | |
| CN107289883A (en) | A kind of wireless passive sonic surface wave strain transducer of differential type resonator type | |
| CN105716759A (en) | Rotating shaft torque measuring device based on surface transverse wave | |
| CN100593700C (en) | SAW pressure sensor and method for fabricating the sensor part | |
| CN103870872B (en) | Acoustic surface wave pressure sensing label for underground pipes | |
| RU2585487C1 (en) | Passive temperature sensor operating on surface acoustic waves | |
| CN107230819A (en) | It is integrated with the surface acoustic wave force sensors of antenna structure | |
| CN102435344A (en) | Sound surface wave temperature sensor | |
| CN107228641A (en) | Micro- position sensor based on surface acoustic wave | |
| US20050138998A1 (en) | System for measuring pressure and/or temperature of a tire | |
| Wang et al. | Wireless and passive gyroscope based on surface acoustic wave gyroscopic effect | |
| CN109374157B (en) | Surface acoustic wave pressure sensor based on loss detection | |
| RU2537751C2 (en) | Sensitive element of surface acoustic waves for temperature measurement | |
| CN103033298B (en) | Surface acoustic wave sensor for slit and manufacture method thereof | |
| CN105333972A (en) | Double-acoustic-path acoustic surface wave temperature sensor | |
| CN205647458U (en) | High sensitivity's bi -polar is to resonant mode surface acoustic wave detector | |
| CN205482849U (en) | Little position sensor based on surface acoustic wave | |
| CN114942444A (en) | Flexible surface acoustic wave icing sensor based on wireless and passive | |
| CN100571026C (en) | SAW (Surface Acoustic Wave) delay line with single phase single direction structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160817 Termination date: 20180324 |