CN103870872B - Acoustic surface wave pressure sensing label for underground pipes - Google Patents
Acoustic surface wave pressure sensing label for underground pipes Download PDFInfo
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- CN103870872B CN103870872B CN201410100459.9A CN201410100459A CN103870872B CN 103870872 B CN103870872 B CN 103870872B CN 201410100459 A CN201410100459 A CN 201410100459A CN 103870872 B CN103870872 B CN 103870872B
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- reflecting grating
- piezoelectric substrate
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Abstract
The invention discloses an acoustic surface wave pressure sensing label for underground pipes. The sensing label comprises a label chip, a label antenna and a label outer shell arranged outside the label chip. The label chip comprises a piezoelectric substrate, an interdigital transducer deposited on the piezoelectric substrate and reflecting gratings. The piezoelectric substrate is formed by piezoelectric single crystals. The interdigital transducer is a double-way interdigital transducer. The acoustic surface wave pressure sensing label for the underground pipes has the advantages of being free of sources and lines, long in identification distance, high in antijamming capability and suitable for severe environments.
Description
Technical field
The present invention relates to a kind of pressure transducer label, more particularly to a kind of surface acoustic wave (SAW) pressure for underground utilities
Sensing label.
Background technology
At present, in China's modernization construction, with industries such as water, electric power, coal gas, particularly the continuous of communication line sends out
Exhibition, increasing pipeline is embedded in underground, the change however as the time and some anthropic factors, will make original ground subscript
Know specified underground utilities, with drawing, some changes occur, so can bring inconvenience to attendant, particularly at certain
Important location, such as traffic main artery a bit, desert area etc., only rely on drawing and experience to be to be difficult to judge route.Meanwhile, with
The non-standard operation of the complication of underground piping, diversification, and engineering construction is so that pipeline digs the accident causing frequently sends out by mistake
Raw, have a strong impact on orthobiosiss and the personal safety as well as the property safety of the people, therefore, realized seeming outstanding to underground utilities mark and positioning
For necessity.
Object is identified at a distance and the technology that identifies in, the technology of main flow is radio RF recognition technology
(Radio Frequency Identification, RFID), general rfid system includes reader and radio-frequency (RF) tag two parts.
Radio-frequency (RF) tag generally uses traditional IC tag, and the processing technology of use is common CMOS technology, and its operating frequency can
To be divided into low frequency（30kHz-300kHz）, medium-high frequency（3MHz-30MHz）And hyperfrequency（300MHz-3GHz）.Wherein, low frequency and
Medium-high frequency label is generally passive label, and its work capacity is by inductive mode from the radiating near field of reader coupling coil
Middle acquisition.When transmitting data between low frequency and medium-high frequency label and reader, need to be located in the near field region of reader antenna radiation.
The reading distance of low frequency and medium-high frequency label is close, is generally less than 1 meter.In ultrahigh-frequency radio-frequency tag, passive label
Identification distance generally higher than 1m, typical case is 4-6m, but its poor anti jamming capability, penetrance is strong, is not suitable for underground
Complex environment.
In addition, it is necessary to real-time monitoring is carried out to the running status of underground utilities, to find pipeline leakage in time, when first
Between take emergency measures, to greatest extent reduce loss.The parameter that underground utilities are mainly monitored has：Pressure, temperature etc..Wherein,
Pressure parameter monitoring is extremely important, because underground utilities are once leak, pressure parameter arises that exception.But, commonly use at present
Pressure transducer great majority be all active.Active sensor typically adopts cell powers, can produce some drawbacks：With
Can contaminated soil and water when underground utilities；When temperature is very low, battery capacity will reduce, and leads to reliability unstable.
Therefore, a kind of RF identification being applied to underground utilities of necessary design and pressure sensing label.
Content of the invention
For above the deficiencies in the prior art, present invention aim at providing a kind of surface acoustic wave for underground utilities
(Surface Acoustic Wave, SAW) pressure sensing label, to solve, IC tag identification distance traditional at present is near, it is dry to resist
Disturb the problems such as ability and active pressure transducer battery pollution environment.
The present invention adopts following technical proposals：
A kind of surface acoustic wave (SAW) pressure sensing label for underground utilities, this sensing label includes label chip, label sky
Line includes piezoelectric substrate, is deposited on piezoelectric substrate with the label shell being arranged on outside label chip, described label chip
Interdigital transducer and reflecting grating.
Described piezoelectric substrate is made up of piezoelectric single crystal.
Described interdigital transducer adopts two-way interdigital transducer.
Described interdigital transducer and reflecting grating are made up of metallic aluminium.
Described reflecting grating includes first, second baroreflex grid and mark reflecting grating, described first, second baroreflex grid
Equal to the distance at interdigital transducer center.
Beneficial effects of the present invention are as follows：
This new type of SAW pressure sensing label for underground utilities has passive and wireless, sets apart from remote, anti-
Interference performance is strong and the advantage that is applied to adverse circumstances.
Brief description
Fig. 1 is surface acoustic wave (SAW) pressure sensing label structural representation；
Fig. 2 is interdigital transducer IDT structure chart；
Fig. 3 is the structure chart of label antenna；
Fig. 4 is the cross section structure figure of surface acoustic wave (SAW) pressure sensing label；
Fig. 5 is the Making programme figure of SAW ID-tag；
Fig. 6 identifies sensor-based system fundamental diagram for acoustic surface wave radio frequency；
Fig. 7 is reader structural representation.
Specific embodiment
Below in conjunction with accompanying drawing, the present invention will be described in detail.
Fig. 1 is the structural representation of surface acoustic wave (SAW) pressure sensing label, and surface acoustic wave (SAW) pressure sensing label is by piezoelectric substrate
1st, interdigital transducer 2, baroreflex grid 3, baroreflex grid 4, mark reflecting grating 5, label antenna 6 and label shell 7 form.Its
In, the distance that baroreflex grid 3 and 4 arrive IDT center is equal, when not applying pressure to label, the echo letter of 3 and 4 generations
There is no time difference between number；When applying pressure to baroreflex grid 3, surface acoustic wave is propagated on the piezoelectric substrate below 3
Speed will change, and just has time difference, the size of time difference and the pressure size born between the echo-signal of 3 and 4 generations
There is relation, just can detect, by measuring the time difference between 3 and 4 generation echo-signals, the pressure that label bears.Mark is anti-
Penetrate grid 5 and comprise a series of reflecting gratings, the coding of label can be changed by the number and position changing reflecting grating, each pressure passes
The corresponding unique coding of sense label.
Piezoelectric substrate 1 is to be made up of piezoelectric, produces surface acoustic wave by piezoelectric effect.Piezoelectric substrate in the present embodiment
From piezoelectric single crystal YZ-LiNbO3.
Interdigital transducer 2 is SAW interdigital transducer, is the metal that the shape making on piezoelectric substrate surface is intersected as finger
Pattern, its effect is to excite and receive surface acoustic wave SAW (Surface Acoustic Wave, SAW), completes electroacoustic, acoustic-electric
Energy is changed.Interdigital transducer IDT structure is as shown in Figure 2.Interdigital cycle P=2 (a+b), wherein, a is interdigital width；B is interdigital
Spacing；W is aperture, refers to the length of overlapped part between adjacent two fingers.When applied electronic signal frequency is equal to the feature of transducer
During frequency, the interdigital wave phase exciting of each pair is identical, the launching efficiency highest of IDT.
In the present embodiment, IDT can be a two-way interdigital transducer, and the surface acoustic wave of generation is respectively to interdigital transducer
Left and right both direction is propagated.Its interdigital width is equal with interdigital spacing, and interdigital sound aperture W is constant.Exciting and connecing as SAW
Receive transducer, its characteristic frequency, bandwidth and SAW intensity are by its structures shape.
The reflecting grating of the present embodiment design is to be made up of metal electrode, and one has three groups, and one group identifies reflecting grating 5 and two groups
Baroreflex grid 3,4, two groups of baroreflex grid are individually positioned in IDT both sides, effectively utilize the acoustic wave energy of generation.
Because SAW is not easily susceptible to the interference in the external world in piezoelectric substrate upload sowing time, therefore SAW pressure sensing label can disliked
Use under bad environment, such as underground, liquid and metal environment.The signal energy that in SAW pressure sensing label, piezoelectric substrate consumes
Ratio integrated circuit much less, in the presence of a harsh environment, the energy attenuation of SAW signal is much smaller, compared to IC tag, SAW pressure
Sensing label can overcome the attenuation effect of metal and liquid.
In SAW pressure sensing label, there are accurate proportionate relationship the position of reflecting grating and pulse echo time, thus can
To carry out careful design to control the pulse echo time to the position of reflecting grating.The coding of SAW pressure sensing label is by its knot
Structure determines, its structure determines that when making, the coding of each label cannot be distorted, therefore SAW pressure sensing mark
It is signed with very high security performance.
Fig. 3 is the structure chart of label antenna, and the present embodiment uses micro-strip paster antenna, and 10 is feeding line portion, and 11 are
Medium substrate, therefore have be simple to manufacture, radianting capacity is strong and low cost and other advantages.
Fig. 4 is the cross section structure figure of surface acoustic wave (SAW) pressure sensing label, as shown in the figure：12 is label shell, for protecting
Label antenna and label chip；13 is micro-strip paster antenna；14 is lead, is connected to antenna for drawing IDT；15 is label
The encapsulation of chip, for forming confined space, protects to label chip；16 seal cavities being formed for Tag Packaging, tool
There is constant reference pressure；17 is ambient pressure functional port, and ambient pressure can be tap water liquid medium or natural gas gas
Medium；18 is the diaphragm being located on piezoelectric substrate, and ambient pressure passes through the cantilever beam right side that iris action is formed in piezoelectric substrate 20
End, and then extraneous pressure change is embodied by the deformation on piezoelectric substrate；19 is binding agent, for by piezoelectric substrate
Left-half be bonded in encapsulation, play the effect of maintenance, and the mark reflecting grating of left-half be used for encoded, lead to
Crossing such design SAW can be made not changed by ambient pressure when propagating on piezoelectric substrate left-half surface is affected, piezoelectricity
Substrate forms a cantilever beam structure.Pressure official post diaphragm inside and outside diaphragm produces certain linear deformation, and deformation can act on again
The cantilever beam structure being formed in piezoelectric substrate, makes piezoelectric substrate produce deformation, changes the velocity of wave of acoustic surface wave propagation, and then change
The time delay of echo-signal.Pressure information may finally be obtained by measuring the time delay of echo-signal.
The manufacturing process of label chip includes substrate making, metal film production, resist coating, mask plate make, exposure is aobvious
Shadow and corrosion such as are removed photoresist at the operation, and manufacturing process is as shown in Figure 5.
Piezoelectric substrate materials select piezoelectric monocrystal YZ-LiNbO3, for ensureing the precision of piezoelectric substrate cut direction, use X-ray
Direction Finder determines crystal-cut direction.Cut the substrate surface that obtains very coarse it is impossible to be used directly to make label, need to use
Corundum is ground to substrate surface, then is polished, to reach the smoothness of requirement, being finally carried out.Through this it is
The piezoelectric substrate of column processing can be only used for making SAW pressure sensing label.
After substrate is ready to, need to plate layer of metal film on lithium niobate substrate, here from the method system being evaporated in vacuo
Make metal film.Typically require metallic film uniformly, good conductivity, and be firmly combined with substrate, metal membrane material is typically selected
Aluminum, because aluminum conductivity is high, stable chemical performance and relatively cheap.
Here the photoresist adopting needs to meet these conditions：Adhesion is strong, stability is high, corrosion-resistant.In order in area
Photoresist is evenly coated with the substrate surface of very little, adopts spin coating method here.
The various parameters of calculating outgoing label as requested, such as IDT finger beam, finger gap, interdigital logarithm, sound aperture, instead
Penetrate grid finger beam, finger gap, aperture etc., with IDT and the reflection gate figure of L-Edit Software on Drawing outgoing label chip, produce figure
Shape egative film, this egative film becomes mask plate after treatment, and mask plate here is the hard mask plate made using etching method.
Exposure is to be irradiated above mask plate using ultraviolet light, requires light exposure suitably, glue is thick or covers during exposure
The contact with substrate for the film is tight.Figure after exposure is put in developer solution, can be dissolved in after the photoresist developing of exposed portion
Developer solution is removed, and remaining glued membrane can form a figure the same with mask plate.Glued membrane figure covers in metal film table
Face, is responsible for the following metal film of protection.Can expand after glued membrane development rinsing, soften, need to carry out firmly treatment it is therefore an objective to increase
The adhesion of glued membrane and corrosion resistance.
This substrate is immersed in a kind of metal erosion solution, erodes unprotected metal film, shielded metal
Film can stay, and uses organic solvent（As ethanol, acetone）Dissolve photoresist, so can be obtained by being deposited on piezoelectric substrate
IDT and reflecting grating.
Fig. 6 identifies sensor-based system work by the acoustic surface wave radio frequency that pressure sensing label 8 and SAW reader 9 form
Make schematic diagram, communicated by radio frequency signal between pressure sensing label 8 and reader 9.Communication module 10 is realized readding
Read device with the communication between control centre, other equipment.
During system work, reader transmitting high frequency inquiry pulse is received by label antenna and is transferred to interdigital transducer
(Interdigital Transducer, IDT), IDT converts electrical signals into SAW signal by inverse piezoelectric effect.SAW is in base
Three groups of reflecting gratings being made up of elongate bar can be encountered when propagating in piece surface, produces reflection and transmission, forms three groups by sound wave
The reflection echo of composition, the number of sound wave and time delay correspond to reflecting grating number and placement location, first group and second group
Echo time difference between reflection comprises the pressure information detecting, and the 3rd group of reflection echo comprises coding information.Reflection
Echo is converted into pulse echo signal by IDT by direct piezoelectric effect and is transmitted to reader through label antenna.SAW pressure sensing mark
Sign and pressure is measured by first group and second group of reflecting grating, pressure size is different, between the reflection echo of two groups of reflecting grating generations
Time difference just different；Encoded by the 3rd group of reflecting grating number and placement location, coding is different, the echo-signal of generation
Also just different.Reader can be by receiving and processing heat transfer agent and the coding information that echo-signal reads label.
If Fig. 7 is described reader structural representation, described reader is by master control borad 73, display screen 74, reader antenna
75th, power supply 76 and reader shell 77 form.Wherein, master control borad 73 is by radio-frequency module 78, signal processing module 79 and communication mould
Block 70 forms.Described radio-frequency module includes transmitter module, receiver module and transceiver insulation device.Described transmitter module is further
Including signal generation unit and signal amplification unit.Described receiver module further includes wave filter, amplifier, frequency mixer and adopts
Sample device.Reader antenna 75 is used for realizing the wireless telecommunications of surface acoustic wave sensing label and reader.
Reader work when, in radio-frequency module transmitter module by signal generation unit produce fixed frequency letter
Number, launched by reader antenna after signal amplification unit amplifies；Transmission signal is received by surface acoustic wave sensing label
Return echo signal afterwards, echo-signal is received by reader antenna and is transferred to receiver module, and by the wave filter in receiver module
It is transferred to signal processing module after filtering, amplifier amplification, frequency mixer mixing and sampler samples to process；Because radiofrequency signal
Transmitting and reception, all using same reader antenna, can produce between transmission signal and receipt signal and interfere, so adopting
With transceiver insulation device, transmission signal and receipt signal are isolated.The radiofrequency signal that receiver module transmission is come, transmission
To signal processing module.Signal processing module is processed to the digital signal that receiver module transmits using DSP and FPGA, extracts
Eigenvalue, obtains coding information and heat transfer agent.Obviously, the above embodiment of the present invention is only intended to clearly illustrate the present invention
Example, and it is not the restriction to embodiments of the present invention, for those of ordinary skill in the field,
Can also make other changes in different forms on the basis of described above, all of embodiment cannot be given here
With exhaustion, every belong to the obvious change that technical scheme extended out or change the guarantor still in the present invention
The row of shield scope.
Claims (4)
1. a kind of surface acoustic wave (SAW) pressure sensing label for underground utilities is it is characterised in that this sensing label includes label core
Piece, label antenna and be arranged on label shell outside label chip, described label chip includes piezoelectric substrate, is deposited on piezoelectricity
Interdigital transducer on substrate and reflecting grating；
Described reflecting grating includes first pressure reflecting grating, second pressure reflecting grating and mark reflecting grating, described first pressure reflection
The distance at grid and second pressure reflecting grating to interdigital transducer center is equal；
Described piezoelectric substrate is cantilever beam structure, connects ambient pressure functional port below the free end of described piezoelectric substrate, described
First pressure reflecting grating is deposited on above the free end of described piezoelectric substrate, described mark reflecting grating, second pressure reflecting grating and
Interdigital transducer is all deposited on above the fixing end of described piezoelectric substrate.
2. a kind of surface acoustic wave (SAW) pressure sensing label for underground utilities according to claim 1 is it is characterised in that institute
State piezoelectric substrate to be made up of piezoelectric single crystal.
3. a kind of surface acoustic wave (SAW) pressure sensing label for underground utilities according to claim 2 is it is characterised in that institute
State interdigital transducer and adopt two-way interdigital transducer.
4. a kind of surface acoustic wave (SAW) pressure sensing label for underground utilities according to claim 1 and 2, its feature exists
It is made up of metallic aluminium in, described interdigital transducer and reflecting grating.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410100459.9A CN103870872B (en) | 2014-03-18 | 2014-03-18 | Acoustic surface wave pressure sensing label for underground pipes |
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| CN201410100459.9A CN103870872B (en) | 2014-03-18 | 2014-03-18 | Acoustic surface wave pressure sensing label for underground pipes |
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| CN103870872B true CN103870872B (en) | 2017-02-15 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104200262A (en) * | 2014-09-09 | 2014-12-10 | 北京中讯四方科技股份有限公司 | Large-capacity surface acoustic wave radio frequency tag |
| CN104766120B (en) * | 2015-05-04 | 2018-03-30 | 无锡市好达电子有限公司 | Thermometric RF tag and the navaid light fixture of the label can be installed |
| CN106918719A (en) * | 2015-12-28 | 2017-07-04 | 软控股份有限公司 | Less radio-frequency acceleration transducer based on surface acoustic wave techniques |
| CN106569000A (en) * | 2016-10-08 | 2017-04-19 | 中国电力科学研究院 | System and method of carrying out wireless and passive detection on current |
| CN110020566A (en) * | 2019-04-18 | 2019-07-16 | 上海交通大学烟台信息技术研究院 | Subsurface equipment electron marker based on surface acoustic wave techniques |
| CN112529137B (en) * | 2021-02-09 | 2021-05-28 | 深圳市水务工程检测有限公司 | Water supply pipeline electronic tag based on Internet of things |
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| CN101593289A (en) * | 2008-05-28 | 2009-12-02 | 北京中食新华科技有限公司 | Passive electronic tag for surface acoustic wave radio frequency identification |
| CN201681414U (en) * | 2009-12-18 | 2010-12-22 | 中国科学院声学研究所 | Acoustic surface wave radio frequency electronic tag |
| CN103268514A (en) * | 2013-05-23 | 2013-08-28 | 安徽大学 | Radio frequency identification system based on SAW technology |
| CN103512600A (en) * | 2013-10-18 | 2014-01-15 | 重庆邮电大学 | Multifunctional safety monitoring device |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101593289A (en) * | 2008-05-28 | 2009-12-02 | 北京中食新华科技有限公司 | Passive electronic tag for surface acoustic wave radio frequency identification |
| CN201681414U (en) * | 2009-12-18 | 2010-12-22 | 中国科学院声学研究所 | Acoustic surface wave radio frequency electronic tag |
| CN103268514A (en) * | 2013-05-23 | 2013-08-28 | 安徽大学 | Radio frequency identification system based on SAW technology |
| CN103512600A (en) * | 2013-10-18 | 2014-01-15 | 重庆邮电大学 | Multifunctional safety monitoring device |
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