CN103870872A - Acoustic surface wave pressure sensing label for underground pipes - Google Patents
Acoustic surface wave pressure sensing label for underground pipes Download PDFInfo
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- CN103870872A CN103870872A CN201410100459.9A CN201410100459A CN103870872A CN 103870872 A CN103870872 A CN 103870872A CN 201410100459 A CN201410100459 A CN 201410100459A CN 103870872 A CN103870872 A CN 103870872A
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Abstract
The invention discloses an acoustic surface wave pressure sensing label for underground pipes. The sensing label comprises a label chip, a label antenna and a label outer shell arranged outside the label chip. The label chip comprises a piezoelectric substrate, an interdigital transducer deposited on the piezoelectric substrate and reflecting gratings. The piezoelectric substrate is formed by piezoelectric single crystals. The interdigital transducer is a double-way interdigital transducer. The acoustic surface wave pressure sensing label for the underground pipes has the advantages of being free of sources and lines, long in identification distance, high in antijamming capability and suitable for severe environments.
Description
Technical field
The present invention relates to a kind of pressure transducer label, particularly relate to a kind of surface acoustic wave (SAW) pressure sensing label for underground utilities.
Background technology
At present, in China's modernization construction, along with the development of the industries, particularly communication line such as water, electric power, coal gas, increasing pipeline is embedded in underground, but along with variation and some human factors of time, originally identify specified underground utilities on the ground, with drawing, some variations occur making, can bring inconvenience to maintainer like this, particularly in some important location, such as traffic main artery, desert area etc., only relying on drawing and experience is to be difficult to judge route.Meanwhile, along with complicated, the diversification of underground pipeline, and the operation lack of standardization of engineering construction, make pipeline dig the accident causing frequently occurs by mistake, have a strong impact on the people's normal life and personal safety as well as the property safety, therefore, realized underground utilities mark and location are seemed to particularly necessary.
In the technology that object is identified at a distance and identified, the technology of main flow is radio RF recognition technology (Radio Frequency Identification, RFID), and general rfid system comprises reader and radio-frequency (RF) tag two parts.What radio-frequency (RF) tag adopted conventionally is traditional IC tag, and the manufacture craft of use is common CMOS technique, and its frequency of operation can be divided into low frequency (30kHz-300kHz), medium-high frequency (3MHz-30MHz) and ultrahigh frequency (300MHz-3GHz).Wherein, low frequency and medium-high frequency label are generally passive label, and its work capacity obtains from the radiation near field of reader pickup coil by inductive coupling mode.While transmitting data between low frequency and medium-high frequency label and reader, need be positioned at the near field region of reader antenna radiation.The reading distance of low frequency and medium-high frequency label is very near, is generally less than 1 meter.In ultrahigh-frequency radio-frequency tag, the decipherment distance of passive label is generally greater than 1m, and typical case is 4-6m, but its poor anti jamming capability, and penetrability is not strong, is not suitable for underground complex environment.
In addition, need to carry out Real-Time Monitoring to the running status of underground utilities, to find in time pipeline leakage, the very first time is taked emergency measures, reduces to greatest extent loss.The parameter that underground utilities are mainly monitored has: pressure, temperature etc.Wherein, pressure parameter monitoring is extremely important, once because underground utilities leak, pressure parameter just there will be extremely.But conventional pressure transducer great majority are all active at present.Active sensor generally adopts battery that power supply is provided, and can produce some drawbacks: meeting contaminated soil and water during for underground utilities; In the time that temperature is very low, battery capacity will reduce, and causes reliability unstable.
Therefore, a kind of radio-frequency (RF) identification and pressure sensing label that is applicable to underground utilities of necessary design.
Summary of the invention
For above the deficiencies in the prior art, the object of the invention is to provide a kind of surface acoustic wave for underground utilities (Surface Acoustic Wave, SAW) pressure sensing label, the problems such as at present traditional IC tag decipherment distance is near to solve, poor anti jamming capability and active pressure transducer battery pollution environment.
The present invention adopts following technical proposals:
A kind of surface acoustic wave (SAW) pressure sensing label for underground utilities, this sensing label comprises label chip, label antenna and is arranged on the label shell of label chip outside, and described label chip comprises piezoelectric substrate, is deposited on interdigital transducer and reflecting grating on piezoelectric substrate.
Described piezoelectric substrate is made up of piezoelectric single crystal.
Described interdigital transducer adopts two-way interdigital transducer.
Described interdigital transducer and reflecting grating are made up of metallic aluminium.
Described reflecting grating comprises first, second baroreflex grid and mark reflecting grating, and described first, second baroreflex grid equate to the distance at interdigital transducer center.
Beneficial effect of the present invention is as follows:
This new type of SAW pressure sensing label for underground utilities has advantages of passive and wireless, sets distance, antijamming capability is strong and is applicable to rugged surroundings.
Accompanying drawing explanation
Fig. 1 is surface acoustic wave (SAW) pressure sensing label structural representation;
Fig. 2 is interdigital transducer IDT structural drawing;
Fig. 3 is the structural drawing of label antenna;
Fig. 4 is the cross section structure figure of surface acoustic wave (SAW) pressure sensing label;
Fig. 5 is the making process flow diagram of surface acoustic wave label;
Fig. 6 is acoustic surface wave radio frequency identification sensor-based system fundamental diagram;
Fig. 7 is reader structural representation.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be described in detail.
Fig. 1 is the structural representation of surface acoustic wave (SAW) pressure sensing label, and surface acoustic wave (SAW) pressure sensing label is made up of piezoelectric substrate 1, interdigital transducer 2, baroreflex grid 3, baroreflex grid 4, mark reflecting grating 5, label antenna 6 and label shell 7.Wherein, the distance at baroreflex grid 3 and 4 DaoIDT centers equates, in the time not exerting pressure to label, not free poor between 3 and 4 echoed signals that produce; In the time exerting pressure to baroreflex grid 3, the speed of propagating on the piezoelectric substrate of surface acoustic wave below 3 will change, just poor if having time between 3 and 4 echoed signals that produce, time extent and the pressure size of bearing have relation, just can detect by measuring for 3 and 4 mistimings that produce between echoed signal the pressure that label bears.Mark reflecting grating 5 comprises a series of reflecting gratings, can change the coding of label by changing the number of reflecting grating and position, the corresponding unique coding of each pressure sensing label.
Piezoelectric substrate 1 is to be made up of piezoelectric, produces surface acoustic wave by piezoelectric effect.In the present embodiment, piezoelectric substrate is selected piezoelectric single crystal YZ-LiNbO3.
Interdigital transducer 2 is SAW interdigital transducers, that the shape picture of making on piezoelectric substrate surface is pointed the metal pattern intersecting, its effect is excite and receive surface acoustic wave SAW (Surface Acoustic Wave, SAW), completes the energy conversion of electroacoustic, acoustic-electric.Interdigital transducer IDT structure as shown in Figure 2.Interdigital cycle P=2 (a+b), wherein, a is interdigital width; B is interdigital spacing; W is aperture, refers to the length of overlapped part between adjacent two fingers.In the time that additional electric signal frequency equals the characteristic frequency of transducer, every pair of interdigital wave phase exciting is identical, and the launching efficiency of IDT is the highest.
In the present embodiment, IDT can be a two-way interdigital transducer, and the surface acoustic wave of generation is propagated to interdigital transducer left and right both direction respectively.Its interdigital width equates with interdigital spacing, and interdigital sound aperture W is constant.As exciting and receiving transducer of SAW, its characteristic frequency, bandwidth and SAW intensity are by its structures shape.
The reflecting grating of the present embodiment design is to be made up of metal electrode, and one has three groups, and one group of mark reflecting grating 5 and 3,4, two groups of baroreflex grid of two groups of baroreflex grid are placed on respectively IDT both sides, effectively utilize the acoustic wave energy of generation.
Because SAW uploads and is not vulnerable to extraneous interference sowing time at piezoelectric substrate, therefore SAW pressure sensing label can use under rugged surroundings, such as underground, liquid and metal environment.The signal energy that in SAW pressure sensing label, piezoelectric substrate consumes is than integrated circuit much less, and under rugged surroundings, the energy attenuation of SAW signal is much smaller, and than IC tag, SAW pressure sensing label can overcome the attenuation effect of metal and liquid.
In SAW pressure sensing label, there are accurate proportionate relationship the position of reflecting grating and pulse echo time, thereby can carry out accurately design to the position of reflecting grating and carry out the gating pulse echo time.The coding of SAW pressure sensing label is by its structures shape, and its structure is just definite in the time making, and the coding of each label cannot be distorted, and therefore SAW pressure sensing label has very high security performance.
Fig. 3 is the structural drawing of label antenna, and what the present embodiment adopted is micro-strip paster antenna, and 10 be feeder line part, and 11 be medium substrate, therefore have manufacture simply, radianting capacity by force and low cost and other advantages.
Fig. 4 is the cross section structure figure of surface acoustic wave (SAW) pressure sensing label, as shown in the figure: 12 is label shell, for the protection of label antenna and label chip; 13 is micro-strip paster antenna; 14 for lead-in wire, is connected to antenna for IDT is drawn; 15 is the encapsulation of label chip, is used to form confined space, and label chip is protected; 16 seal chambers for Tag Packaging formation, have constant reference pressure; 17 is ambient pressure functional port, and ambient pressure can be tap water liquid medium or rock gas gas medium; 18 for being located at the diaphragm on piezoelectric substrate, the semi-girder right-hand member that ambient pressure forms in piezoelectric substrate 20 by iris action, and then extraneous pressure is changed and embodied by the deformation on piezoelectric substrate; 19 is cementing agent, for the left-half of piezoelectric substrate is bonded in to encapsulation, play the effect of maintenance, and the mark reflecting grating of left-half is used for encoding, the impact that not changed by ambient pressure can make SAW propagate on piezoelectric substrate left-half surface by such design time, piezoelectric substrate forms a cantilever beam structure.The inside and outside pressure official post diaphragm of diaphragm produces certain linear deformation, and deformation can act on again the cantilever beam structure that piezoelectric substrate forms, and makes piezoelectric substrate produce deformation, changes the velocity of wave of acoustic surface wave propagation, and then changes the time delay of echoed signal.Finally can obtain pressure information by the time delay of measuring echoed signal.
The manufacturing process of label chip comprises substrate making, metal film making, resist coating, mask plate making, exposure imaging and the corrosion operation such as remove photoresist, and manufacturing process as shown in Figure 5.
Piezoelectric substrate material is selected piezoelectric monocrystal YZ-LiNbO3, is the precision that guarantees piezoelectric substrate cut direction, determines crystal-cut direction with X-ray Direction Finder.The substrate surface that cutting obtains is very coarse, cannot directly be used for making label, need to grind substrate surface with emery, then carry out polishing to meet the requirements of smoothness, finally cleans.Piezoelectric substrate through this series of processes just can be for making SAW pressure sensing label.
After substrate is ready to, need on lithium niobate substrate, plate layer of metal film, select the method for vacuum evaporation to make metal film here.General Requirements metallic film is even, good conductivity, and is combined with substrate firmly, and the general aluminium of metal membrane material, because aluminium conductance is high, stable chemical performance and more cheap.
Here the photoresist adopting need to meet these conditions: adhesion is strong, stability is high, corrosion-resistant.In order to apply equably photoresist on the very little substrate surface of area, adopt spin coating method here.
Calculate as requested the various parameters of label, such as IDT finger beam, finger gap, interdigital logarithm, sound aperture, reflecting grating finger beam, finger gap, aperture etc., with IDT and the reflecting grating figure of L-Edit Software on Drawing outgoing label chip, produce figure egative film, this egative film becomes mask plate after treatment, and the mask plate is here the hard mask plate that adopts etching method to make.
Exposure is to use ultraviolet light to irradiate above mask plate, requires exposure suitable when exposure, and glue is thick or mask is tight with contacting of substrate.Figure after exposure is put into developer solution, can be dissolved in developer solution and be removed after the photoresist developing of exposed portion, remaining glued membrane can form a figure the same with mask plate.Glued membrane figure covers metallic film surface, responsible protection metal film below.After glued membrane development rinsing, can expand, soften, need to carry out firmly treatment, object is adhesion and the corrosion resistance that increases glued membrane.
This substrate is immersed in a kind of metal erosion solution; erode not protected metal film; shielded metal film can stay, and has dissolved photoresist with organic solvent (as alcohol, acetone), so just can obtain being deposited on IDT and reflecting grating on piezoelectric substrate.
The acoustic surface wave radio frequency identification sensor-based system fundamental diagram that Fig. 6 is made up of pressure sensing label 8 and surface acoustic wave reader 9, communicates by radio frequency signal between pressure sensing label 8 and reader 9.Communication module 10 realizes reader with the communication between control center, other equipment.
When system works, reader transmitting high frequency inquiry pulse is received and is transferred to interdigital transducer (Interdigital Transducer, IDT) by label antenna, and IDT converts SAW signal by inverse piezoelectric effect to electric signal.SAW can encounter three groups of reflecting gratings that are made up of elongate bar in the time that substrate surface is propagated, produce reflection and transmission, form three groups of reflection echos that formed by sound wave, the number of sound wave and time delay correspondence reflecting grating number and placement location, echo time between first group and second group reflection is poor is comprising the pressure information detecting, the 3rd group of reflection echo comprising coded message.Reflection echo converts pulse echo signal by IDT to by direct piezo electric effect and is transmitted to reader through label antenna.SAW pressure sensing label is by first group and second group of reflecting grating gaging pressure, and pressure varies in size, and the mistiming between the reflection echo of two groups of reflecting grating generations is just different; Encode by the 3rd group of reflecting grating number and placement location, coding is different, and the echoed signal of generation is also just different.Reader can carry out by receiving and process echoed signal heat transfer agent and the coded message of reading tag.
As Fig. 7 be as described in reader structural representation, described reader is made up of master control borad 73, display screen 74, reader antenna 75, power supply 76 and reader shell 77.Wherein, master control borad 73 is made up of radio-frequency module 78, signal processing module 79 and communication module 70.Described radio-frequency module comprises transmitter module, receiver module and transmitting-receiving spacer assembly.Described transmitter module further comprises again signal generation unit and signal amplification unit.Described receiver module further comprises wave filter, amplifier, frequency mixer and sampling thief.Reader antenna 75 is for realizing the wireless telecommunications of surface acoustic wave sensing label and reader.
Reader when work, in radio-frequency module transmitter module produce the signal of fixed frequency by signal generation unit, after signal amplification unit amplifies, launched by reader antenna; Transmit and receive rear return echo signal by surface acoustic wave sensing label, echoed signal is received and is transferred to receiver module by reader antenna, and by being transferred to signal processing module processing after the filter filtering in receiver module, amplifier amplification, frequency mixer mixing and sampling thief sampling; Because transmitting and receiving of radiofrequency signal all used same reader antenna, transmitting and receiving between signal to produce phase mutual interference, so adopt transmitting-receiving spacer assembly to isolate transmitting and receiving signal.The radiofrequency signal that transmission comes for receiver module, is transferred to signal processing module.The digital signal that signal processing module adopts DSP and FPGA to transmit receiver module is processed, and extracts eigenwert, obtains coded message and heat transfer agent.Obviously; the above embodiment of the present invention is only for example of the present invention is clearly described; and be not the restriction to embodiments of the present invention; for those of ordinary skill in the field; can also make other changes in different forms on the basis of the above description; here cannot give all embodiments exhaustively, everyly belong to apparent variation or the still row in protection scope of the present invention of variation that technical scheme of the present invention extends out.
Claims (5)
1. the surface acoustic wave (SAW) pressure sensing label for underground utilities, it is characterized in that, this sensing label comprises label chip, label antenna and is arranged on the label shell of label chip outside, and described label chip comprises piezoelectric substrate, is deposited on interdigital transducer and reflecting grating on piezoelectric substrate.
2. a kind of surface acoustic wave (SAW) pressure sensing label for underground utilities according to claim 1, is characterized in that, described piezoelectric substrate is made up of piezoelectric single crystal.
3. a kind of surface acoustic wave (SAW) pressure sensing label for underground utilities according to claim 2, is characterized in that, described interdigital transducer adopts two-way interdigital transducer.
4. a kind of surface acoustic wave (SAW) pressure sensing label for underground utilities according to claim 1 and 2, is characterized in that, described interdigital transducer and reflecting grating are made up of metallic aluminium.
5. according to a kind of surface acoustic wave (SAW) pressure sensing label for underground utilities described in claim 1 or 2 or 3, it is characterized in that, described reflecting grating comprises first, second baroreflex grid and mark reflecting grating, and described first, second baroreflex grid equate to the distance at interdigital transducer center.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104200262A (en) * | 2014-09-09 | 2014-12-10 | 北京中讯四方科技股份有限公司 | Large-capacity surface acoustic wave radio frequency tag |
| CN104766120A (en) * | 2015-05-04 | 2015-07-08 | 无锡市好达电子有限公司 | Radio frequency tag capable of measuring temperature and illuminant lamp with same |
| CN106569000A (en) * | 2016-10-08 | 2017-04-19 | 中国电力科学研究院 | System and method of carrying out wireless and passive detection on current |
| CN106918719A (en) * | 2015-12-28 | 2017-07-04 | 软控股份有限公司 | Less radio-frequency acceleration transducer based on surface acoustic wave techniques |
| CN110020566A (en) * | 2019-04-18 | 2019-07-16 | 上海交通大学烟台信息技术研究院 | Subsurface equipment electron marker based on surface acoustic wave techniques |
| CN112529137A (en) * | 2021-02-09 | 2021-03-19 | 深圳市水务工程检测有限公司 | Water supply pipeline electronic tag based on Internet of things |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101593289A (en) * | 2008-05-28 | 2009-12-02 | 北京中食新华科技有限公司 | Passive electronic tag for surface acoustic wave radio frequency identification |
| CN201681414U (en) * | 2009-12-18 | 2010-12-22 | 中国科学院声学研究所 | Acoustic surface wave radio frequency electronic tag |
| CN103268514A (en) * | 2013-05-23 | 2013-08-28 | 安徽大学 | Radio frequency identification system based on SAW technology |
| CN103512600A (en) * | 2013-10-18 | 2014-01-15 | 重庆邮电大学 | Multifunctional safety monitoring device |
-
2014
- 2014-03-18 CN CN201410100459.9A patent/CN103870872B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101593289A (en) * | 2008-05-28 | 2009-12-02 | 北京中食新华科技有限公司 | Passive electronic tag for surface acoustic wave radio frequency identification |
| CN201681414U (en) * | 2009-12-18 | 2010-12-22 | 中国科学院声学研究所 | Acoustic surface wave radio frequency electronic tag |
| CN103268514A (en) * | 2013-05-23 | 2013-08-28 | 安徽大学 | Radio frequency identification system based on SAW technology |
| CN103512600A (en) * | 2013-10-18 | 2014-01-15 | 重庆邮电大学 | Multifunctional safety monitoring device |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104200262A (en) * | 2014-09-09 | 2014-12-10 | 北京中讯四方科技股份有限公司 | Large-capacity surface acoustic wave radio frequency tag |
| CN104766120A (en) * | 2015-05-04 | 2015-07-08 | 无锡市好达电子有限公司 | Radio frequency tag capable of measuring temperature and illuminant lamp with same |
| CN106918719A (en) * | 2015-12-28 | 2017-07-04 | 软控股份有限公司 | Less radio-frequency acceleration transducer based on surface acoustic wave techniques |
| CN106569000A (en) * | 2016-10-08 | 2017-04-19 | 中国电力科学研究院 | System and method of carrying out wireless and passive detection on current |
| CN110020566A (en) * | 2019-04-18 | 2019-07-16 | 上海交通大学烟台信息技术研究院 | Subsurface equipment electron marker based on surface acoustic wave techniques |
| CN112529137A (en) * | 2021-02-09 | 2021-03-19 | 深圳市水务工程检测有限公司 | Water supply pipeline electronic tag based on Internet of things |
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