CN101644772A - Acoustic surface wave icing sensor capable of accessing wirelessly - Google Patents
Acoustic surface wave icing sensor capable of accessing wirelessly Download PDFInfo
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- CN101644772A CN101644772A CN200810118006A CN200810118006A CN101644772A CN 101644772 A CN101644772 A CN 101644772A CN 200810118006 A CN200810118006 A CN 200810118006A CN 200810118006 A CN200810118006 A CN 200810118006A CN 101644772 A CN101644772 A CN 101644772A
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- interdigital transducer
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Abstract
The invention provides an acoustic surface wave icing sensor capable of accessing wirelessly, which is used for sensitive detection for icing phenomenon on the surface of an object. The acoustic surface wave icing sensor capable of accessing wirelessly comprises a piezoelectric substrate, a waveguide layer, an interdigital transducer, a reflecting grating and an antenna, wherein the interdigital transducer and the reflecting grating are deposited on the piezoelectric substrate and used for transmitting and receiving the acoustic surface wave through piezoelectric effect and inverse piezoelectric effect. The waveguide layer is attached to the piezoelectric substrate, and is positioned between the interdigital transducer and the reflecting grating or extended to two sides from the interdigital transducer and the reflecting grating and covers the interdigital transducer and the reflecting grating. In addition, the acoustic surface wave icing sensor also comprises an encapsulation layer for protecting the interdigital transducer, the reflecting grating, the antenna and the piezoelectric substrate. The acoustic surface wave icing sensor with the structure can access wirelessly, has small volume and high sensitivity, can be horizontally mounted, and can be produced on a large scale by integrating the antenna and a sensing chip.
Description
Technical field
The present invention relates to a kind of freezing sensor, but relate in particular to a kind of acoustic surface wave icing sensor of accessing wirelessly.
Background technology
Document [SPIE Conference on Smart Electronics and MEMS, 1999,3673 (3): 284-291] (document 1) carried out preliminary description to acoustic surface wave icing sensor, point out the variation that acoustic surface wave icing sensor comes sensing surface to freeze by the SAW (Love ripple) that utilizes the SH type, because the Love ripple is very sensitive to the variation on surface, thereby also usually is used for biochemical trace detection.Reported by the Love wave sensor such as document [Electronics Letters, 2000,36 (19): 1672-1673] and to have added the experiment that bio-sensitive film detects the biochemical composition of trace.And other type of wave of surface acoustic wave also has very sensitive response to the physical influence on surface, thereby the detection that surface acoustic wave sensor is used for freezing process also has very high sensitivity.Simultaneously, because the frequency of operation of surface acoustic wave sensor generally in radio band, can directly receive and emitting radio frequency signal by interdigital transducer, these characteristics are very suitable for the measurement of wireless and passive.Document [Measurement, 2008,41 (5): 579-588] (document 2) has been reported and has been utilized the surface acoustic wave sensor of wireless and passive that temperature, pressure etc. is measured.The characteristic that surface acoustic wave sensor energy wireless and passive is measured has huge advantage for its application in the engineering field.
In addition, at the application scenario of acoustic surface wave icing sensor, have for the requirement of antenna: the physical size of antenna is little; Has the directivity that omnidirectional or hemisphere cover; Have high-gain, the signal that maximum possible can be provided is to the surface acoustic wave sensing chip; Impedance matching is good, and no matter surface acoustic wave sensor is in what direction, and the polarization of antenna can both be complementary with interrogating signal.The characteristics that dipole antenna has is simple in structure, efficient is high both can independently be used, and also can be used as the radiating element of large-scale antenna.Fractal antenna, loop antenna etc. also can be realized the miniaturization of surface acoustic wave sensor antenna, but with respect to the printed dipole sub antenna, efficient is low, the structure relative complex.
But, the principle research of acoustic surface wave icing sensor has only been proposed in the above-mentioned document 1, clearly do not propose how to realize wireless measurement, and the disclosed freezing sensor of surface acoustic wave that utilizes is big owing to volume in the document 2, loss is big, and structure is compact and can't be applied to body surface and freeze in the condition detection field.Therefore, the more advanced icing detection method of using and studying at present comprises: infrared method, condenser type method, hot flow type method, oscillatory type method.But these sensing system complexity are bulky, are not suitable for many places and install, and can only install at key position, can not comprehensively monitor and measure freezing.For example, a kind of resonant mode freezing sensor device is disclosed in the utility model patent instructions of China Patent No. ZL200620096802.8, it is at tubular Stainless Steel Shell one end welding vibrating diaphragm, the other end forms closed chamber by the back shroud sealing, and the piezoelectric element that on vibrating diaphragm, bonds, utilize the direct piezo electric effect of piezoelectric element and the vibration frequency change relation of inverse piezoelectric effect and vibrating diaphragm to realize the detection of freezing.Though this piezoelectric resonant diaphragm type sensor volume, weight are less, can flush positions such as being installed on aircraft wing, its sensitivity is lower, structure and signal Processing more complicated, and production cost is higher.In addition, a kind of fibre-optical freezing sensor is disclosed in the Chinese invention patent Shen Qing Publication instructions of number of patent application 200710051934.8, but also bad for the responsive effect of thin glare ice, and above-mentioned two kinds of freezing sensors can not carry out the wireless and passive measurement.Icing monitoring technical field for lifting airscrew, because rotor is subjected to the restriction of aircraft electrical equipment, the freezing sensor that existing volume is bigger can not be installed at rotor, generation has a strong impact on and the icing meeting of rotor is to flight safety, therefore, present freezing sensor still can't solve effectively to the icing monitoring of lifting airscrew.
Summary of the invention
But the object of the present invention is to provide a kind of acoustic surface wave icing sensor of accessing wirelessly, overcome the shortcoming that existing freezing sensor can not wireless measurement, can carry out sensitive detection the body surface phenomenon of freezing.
The present invention is achieved by the following technical solutions:
But the acoustic surface wave icing sensor of a kind of accessing wirelessly of the present invention is characterized in that, comprising: piezoelectric substrate, ducting layer, interdigital transducer, reflecting grating and antenna, described piezoelectric substrate, interdigital transducer and reflecting grating are formed SAW (Surface Acoustic Wave) delay line.
Described interdigital transducer, reflecting grating are deposited on the described piezoelectric substrate, are used for by piezoelectric effect and inverse piezoelectric effect surface acoustic wave being transmitted and received.
Described ducting layer is attached on the described piezoelectric substrate, is extending and covering interdigital transducer and reflecting grating to both sides between described interdigital transducer and the reflecting grating or between interdigital transducer and reflecting grating.
Described antenna inserts the outside of described interdigital transducer along described SAW (Surface Acoustic Wave) delay line, is used for radio communication.
In addition; acoustic surface wave icing sensor of the present invention also comprises encapsulated layer; form the sensitizing range outside when encapsulating the zone between described interdigital transducer and described reflecting grating of described ducting layer being exposed to, remainder is encapsulated to protect described interdigital transducer, reflecting grating, antenna and piezoelectric substrate.Described piezoelectric substrate is for can excite R wave, Love wave, surface to plunder the piezoelectric crystal of ripple, pseudo surface wave.
Described interdigital transducer and reflecting grating are realized by definite shape plated metal finger on piezoelectric substrate, can be transmitted and received surface acoustic wave by piezoelectric effect and inverse piezoelectric effect.
Described ducting layer adopts low velocity of sound film, and comprising: silicon dioxide, zinc paste, polymethylmethacrylate (PMMA), polyimide (PI), photoresist etc., the velocity of sound is low in the velocity of sound of velocity ratio in piezoelectric substrate of ducting layer.
Described antenna is dipole antenna and other plane small size antenna, can make by identical technology in interdigital transducer and reflecting grating are deposited on the same plane of substrate.
After described sensor received the radiofrequency signal of certain frequency by antenna, radiofrequency signal excited the formation surface acoustic wave by the interdigital transducer on the piezoelectric substrate, propagated in substrate and ducting layer.After the sensitizing range was collected water droplet or formed ice sheet, the frequency of surface acoustic wave and insertion loss will change, and what propagate in ducting layer and substrate is dissimilar surface acoustic waves, again interdigital transducer is arrived in these wave reflections by reflecting grating.By dipole antenna signal reflex is gone out.Just can access the information of icing and ice layer thickness by the variation of detection of echoes signal.
The invention has the advantages that wireless and passive of the present invention is measured can provide application form very flexibly to the measurement at these positions.Because the surface acoustic wave sensor volume is little, and is operated in rf frequency, can directly receive and emitting radio frequency signal, do not need power supply that it is powered, thereby surface acoustic wave sensor has very large application potential in every field.Acoustic surface wave icing sensor of the present invention has the various advantages of surface acoustic wave sensor, can accessing wirelessly, volume is little, can flush installation, and highly sensitive, under various application scenarios, can bring into play its distinctive application advantage, for example not only can be installed in and be used to the detection of freezing on the aircraft rotary wing, also can be applied in the detection that highway freezes.
The present invention uses conveniently, volume is little, highly sensitive, the energy wireless measurement, and by antenna and sensing chip is integrated, and can produce in enormous quantities, cheap.
Description of drawings
Fig. 1 is the floor map of the acoustic surface wave icing sensor of first embodiment of the invention.
Fig. 2 is the diagrammatic cross-section of the acoustic surface wave icing sensor of first embodiment of the invention.
Fig. 3 is the acoustic surface wave icing sensor encapsulation back synoptic diagram of first embodiment of the invention.
Fig. 4 is the floor map of the acoustic surface wave icing sensor of second embodiment of the invention.
Fig. 5 is the diagrammatic cross-section of the acoustic surface wave icing sensor of second embodiment of the invention.
Fig. 6 is the acoustic surface wave icing sensor encapsulation back synoptic diagram of second embodiment of the invention.
Embodiment
Below, with reference to accompanying drawing the specific embodiment of the present invention is described in detail.
As shown in Figure 1 and Figure 2, this acoustic surface wave icing sensor mainly comprises: piezoelectric substrate 3, interdigital transducer 1, reflecting grating 2, antenna 5 and photoresist ducting layer 4 and encapsulated layer 6.By develop a film, operation such as plated film, whirl coating, photoetching, cleaning, dipole antenna 5, interdigital transducer 1 and reflecting grating 2 are attached on the piezoelectric substrate 3 of ST900X quartz, centre frequency is 433～500MHZ, unloaded insertion loss by antenna 5 is 15～25dB, by operations such as whirl coating, preceding baking, photoetching, back bakings, SU8 2050 photoresist ducting layers 4 are attached on the piezoelectric substrate 3, and between interdigital transducer 1 and reflecting grating 2, thickness is 2～3 μ m.By ceramic package layer 6 interdigital transducer 1, reflecting grating 2, antenna 5 and piezoelectric substrate 3 are protected, and SU8 2050 photoresist ducting layers 4 all are exposed to outer as the sensitizing range, the front elevation after its encapsulation as shown in Figure 3.When SU8 2050 photoresist ducting layers 4 surfaces have ice sheet to form, the electromagnetic signal that receives by antenna 5 of interdigital transducer 1 then, be converted into acoustical signal by inverse piezoelectric effect, acoustical signal arrives reflecting grating 2 after propagating as the photoresist ducting layer 4 of sensitizing range, acoustical signal is after reflecting grating 2 reflections, return interdigital transducer 1, interdigital transducer 1 changes acoustical signal into electric signal by piezoelectric effect, and by antenna 5 signal is launched with form of electromagnetic wave.After water layer changed solid-state ice into by liquid state, the insertion loss meeting of electromagnetic signal produced the variation of 20～30dB, and the variation in thickness of ice sheet can make the frequency generation respective change of echo.Reception by antenna 5 and send electromagnetic signal sends to the R-T unit of electromagnetic signal with the change information that inserts loss and frequency, then these signals is handled the relevant information that obtains freezing.
Concrete technology is made and principle such as embodiment 1, as Fig. 4, shown in Figure 5.Difference is: in the process that (1) is attached to SU82050 photoresist ducting layer 4 on the piezoelectric substrate 3, the area of photoresist ducting layer 4 is covered interdigital transducer 1 and reflecting grating 2; (2) outside when encapsulation be exposed to a part of zone of SU 82050 photoresist ducting layers 4, it as the sensitizing range, is effectively protected interdigital transducer 1 and reflecting grating 2.The emission of the 6 pairs of electromagnetic waves of encapsulated layer with receive not influence, but encapsulated layer 6 can effectively protect for fork value transducer and reflecting grating, makes sensor can be applied in the physical environment of more complicated, the structure after the encapsulation as shown in Figure 6.
Specific embodiments such as embodiment 1, structure such as Fig. 4, shown in Figure 5.Difference is: (1) utilizes PMMA glue as ducting layer, and PMMA glue is attached on the piezoelectric substrate 3, covers on interdigital transducer 1 and the reflecting grating 2; (2) piezoelectric substrate 3 adopts 360 lithium tantalates.
Claims (6)
1, but a kind of acoustic surface wave icing sensor of accessing wirelessly is characterized in that, comprising: piezoelectric substrate, ducting layer, interdigital transducer, reflecting grating and antenna, and described piezoelectric substrate, interdigital transducer and reflecting grating are formed SAW (Surface Acoustic Wave) delay line;
Described interdigital transducer, reflecting grating are deposited on the described piezoelectric substrate, are used for by piezoelectric effect and inverse piezoelectric effect surface acoustic wave being transmitted and received;
Described ducting layer is attached on the described piezoelectric substrate, is extending and covering interdigital transducer and reflecting grating to both sides between described interdigital transducer and the reflecting grating or between interdigital transducer and reflecting grating;
Described antenna inserts the outside of described interdigital transducer along described SAW (Surface Acoustic Wave) delay line, is used for radio communication.
2, acoustic surface wave icing sensor according to claim 1; it is characterized in that; this acoustic surface wave icing sensor also comprises encapsulated layer; form the sensitizing range outside when encapsulating the zone between described interdigital transducer and described reflecting grating of described ducting layer being exposed to, remainder is encapsulated to protect described interdigital transducer, reflecting grating, antenna and piezoelectric substrate.
3, acoustic surface wave icing sensor according to claim 1 is characterized in that, described piezoelectric substrate is for can excite R wave, Love wave, surface to plunder the piezoelectric crystal of ripple or pseudo surface wave.
4, acoustic surface wave icing sensor according to claim 1 is characterized in that, described ducting layer adopts low velocity of sound film, comprising: silicon dioxide, zinc paste, polymethylmethacrylate, polyimide or photoresist.
5, acoustic surface wave icing sensor according to claim 1 is characterized in that, described antenna is dipole antenna or other plane small size antenna, is positioned at same plane with interdigital transducer and reflecting grating.
6, acoustic surface wave icing sensor according to claim 5 is characterized in that, described antenna is deposited on the described piezoelectric substrate with interdigital transducer, reflecting grating.
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| CN200810118006A CN101644772A (en) | 2008-08-06 | 2008-08-06 | Acoustic surface wave icing sensor capable of accessing wirelessly |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103414006A (en) * | 2013-08-13 | 2013-11-27 | 常州智梭传感科技有限公司 | Ultra-thin passive wireless acoustic surface wave sensor |
| CN106248786A (en) * | 2016-07-08 | 2016-12-21 | 中国电力科学研究院 | Gases Dissolved in Transformer Oil based on surface acoustic wave techniques detection device and method |
| CN106291411A (en) * | 2016-08-30 | 2017-01-04 | 哈尔滨工业大学深圳研究生院 | A kind of wireless and passive detection device in magnetic field |
| CN108463694A (en) * | 2015-12-22 | 2018-08-28 | 恩德斯+豪斯流量技术股份有限公司 | Converter apparatus and the measuring system constituted using this converter apparatus |
| CN109212026A (en) * | 2018-09-25 | 2019-01-15 | 合肥工业大学 | A kind of solid sound detection device based on surface wave |
| CN110146596A (en) * | 2018-11-28 | 2019-08-20 | 南京航空航天大学 | A kind of Love Wave Device structure and detection method for detergent residues detection |
| CN111366932A (en) * | 2018-12-26 | 2020-07-03 | 中国科学院声学研究所 | Icing sensor based on surface acoustic wave oscillator |
| CN111505119A (en) * | 2020-05-08 | 2020-08-07 | 清华大学 | Flexible ultrasonic fatigue damage detection device and manufacturing method thereof |
| CN111650447A (en) * | 2020-04-24 | 2020-09-11 | 中国人民解放军陆军工程大学 | Surface acoustic wave solid-state electric field sensor |
| CN112764039A (en) * | 2019-11-06 | 2021-05-07 | 中国科学院声学研究所 | Surface acoustic wave icing sensor based on reflection delay line and system thereof |
| CN115783268A (en) * | 2023-02-08 | 2023-03-14 | 中国空气动力研究与发展中心低速空气动力研究所 | Composite airplane icing detection device and method |
-
2008
- 2008-08-06 CN CN200810118006A patent/CN101644772A/en active Pending
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103414006A (en) * | 2013-08-13 | 2013-11-27 | 常州智梭传感科技有限公司 | Ultra-thin passive wireless acoustic surface wave sensor |
| CN108463694A (en) * | 2015-12-22 | 2018-08-28 | 恩德斯+豪斯流量技术股份有限公司 | Converter apparatus and the measuring system constituted using this converter apparatus |
| US11326913B2 (en) | 2015-12-22 | 2022-05-10 | Endress + Hauser Flowtec Ag | Transducer apparatus as well as measuring system formed by means of such a transducer apparatus |
| CN106248786A (en) * | 2016-07-08 | 2016-12-21 | 中国电力科学研究院 | Gases Dissolved in Transformer Oil based on surface acoustic wave techniques detection device and method |
| CN106291411A (en) * | 2016-08-30 | 2017-01-04 | 哈尔滨工业大学深圳研究生院 | A kind of wireless and passive detection device in magnetic field |
| CN109212026B (en) * | 2018-09-25 | 2021-06-04 | 合肥工业大学 | Surface wave-based structure-borne sound detection device |
| CN109212026A (en) * | 2018-09-25 | 2019-01-15 | 合肥工业大学 | A kind of solid sound detection device based on surface wave |
| CN110146596A (en) * | 2018-11-28 | 2019-08-20 | 南京航空航天大学 | A kind of Love Wave Device structure and detection method for detergent residues detection |
| CN110146596B (en) * | 2018-11-28 | 2021-06-15 | 南京航空航天大学 | Love wave device structure for detecting residual quantity of detergent and detection method |
| CN111366932A (en) * | 2018-12-26 | 2020-07-03 | 中国科学院声学研究所 | Icing sensor based on surface acoustic wave oscillator |
| CN111366932B (en) * | 2018-12-26 | 2022-07-12 | 中国科学院声学研究所 | Icing sensor based on surface acoustic wave oscillator |
| CN112764039A (en) * | 2019-11-06 | 2021-05-07 | 中国科学院声学研究所 | Surface acoustic wave icing sensor based on reflection delay line and system thereof |
| CN111650447A (en) * | 2020-04-24 | 2020-09-11 | 中国人民解放军陆军工程大学 | Surface acoustic wave solid-state electric field sensor |
| CN111505119A (en) * | 2020-05-08 | 2020-08-07 | 清华大学 | Flexible ultrasonic fatigue damage detection device and manufacturing method thereof |
| CN115783268A (en) * | 2023-02-08 | 2023-03-14 | 中国空气动力研究与发展中心低速空气动力研究所 | Composite airplane icing detection device and method |
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Application publication date: 20100210 |