CN110146596A - A kind of Love Wave Device structure and detection method for detergent residues detection - Google Patents
A kind of Love Wave Device structure and detection method for detergent residues detection Download PDFInfo
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- CN110146596A CN110146596A CN201811438587.9A CN201811438587A CN110146596A CN 110146596 A CN110146596 A CN 110146596A CN 201811438587 A CN201811438587 A CN 201811438587A CN 110146596 A CN110146596 A CN 110146596A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract
The invention discloses a kind of Love Wave Device structures and detection method for detergent residues detection.Love Wave Device is single-ended binary channels delay line type structure, interdigital transducer uses single phase unidirectional transducer, two reflecting gratings are respectively set on upper and lower two channels of device, are located at the arranged on left and right sides in fluid-sensitive area, and the corresponding echo-signal of four reflecting gratings is non-interference in time.Device Zhi Xuyige fluid-sensitive area, top half and lower half portion are respectively liberalization, the two different electricity structures of metallization.Using on PDMS panel with the consistent boss of fluid-sensitive area size as liquid bath, realize close sealing to avoid leakage plus PMMA double-sided adhesive between liquid bath and fluid-sensitive area.Using artificial nerve network model analysis method, not only can detect detergent residual quantity concentration by the pulse echo signal characteristic value of device, can also real-time monitoring environment temperature, and eliminate influence of the variation of ambient temperature to testing result.
Description
Technical field
The present invention relates to a kind of acoustic wave device more particularly to a kind of Love Wave Device knots for detergent residues detection
Structure and detection method belong to novel sensor field.
Background technique
Smart home is the typical field of application of intelligence sensor, and there is also challenges while facing opportunity.To wash
For clothing machine, intelligent washing machine does not require nothing more than washing machine with the conventional funcs such as intelligent switch, intelligent-rinsing, it is also desirable to stand with
The angle at family provides more practical function, such as the detergent residual quantity of intelligent measurement washing machine.Realize detergent residues detection,
It can not only clean and stop, make clothing rinsed clean, ill symptoms occur after preventing detergent and skin contact, moreover it is possible to which change disappears
The person's of expense habit, is put into suitable detergent as needed, to keep away detergent-free waste, makes more environment-friendly, washing machine is more
Green is more environmentally friendly.
Washing machine detergent is made of six kinds of substances such as surfactant, and wherein surfactant is mostly important, is accounted for entire
The 15%-40% of detergent ingredients.Surfactant can be divided into four kinds: anion, nonionic, cation, amphoteric ion, wherein yin
Ionic surface active agent it is most widely used, be secondly nonionic surfactant, such as liquid detergent such as washing powder.Currently, non-
Ionic surface active agent using more and more extensive, the reason is that nonionic has many significant compared with anionic surfactant
Advantage, if stability height, compatibility is good, stronger emulsifying capacity, wetting ability, washability and resistance to hard water ability etc..
Chemical sensor, including titration, red, orange, green, blue, yellow (ROGBY), voltammetry, electricity are mainly used in liquid sensory field at present
Position method etc..Titration and red, orange, green, blue, yellow (ROGBY) are difficult to integrate with washing machine, and voltammetry and conductivity sensor are convenient to be used in and wash
On clothing machine, but conductivity sensor is not suitable for the nonconducting surfactant of measurement, using voltammetry be also unsuitable for measuring it is non-from
Sub- surfactant.
Sonic sensor is a kind of novel sensor.Sonic sensor utilizes piezoelectricity using piezoelectric material as Sensitive Apparatus
Effect inspires elastic wave by interdigital transducer, mainly according to the propagation characteristic of sound wave with measurand on piezoelectric substrate
Variation is to realize detection function.Usually, sonic sensor can be divided into surface acoustic wave sensor, sound Plate Mode Sensor, Le Fu
Wave sensor three types.Wherein, love wave sensor is most suitable for liquid phase detection.
When sonic sensor is detected for liquid phase, usually there is following two scheme:
Scheme one: plus one layer of specific chemical or biofilm or coating on the piezoelectric substrate of excitation sound wave, the film or
Coating can adsorb the object to be measured of specified chemical ingredient, by mass loading effect so that the resonance frequency of sonic sensor occurs
Variation, the measurement according to the relational implementation of resonance frequency and testing concentration to testing concentration.Its advantage is that having special choosing
Selecting property, it is insensitive to other not adsorbable objects.The disadvantage is that complex process, needs to remove film or painting when measuring next time
The substance being adsorbed before on layer, operation is cumbersome, and durability, reliability be not high.
Scheme two: it does not need to increase specific chemical or biofilm or coating, using " universality fingerprint detection method ", i.e.,
The object to be measured of various concentration has different fingerprints, corresponding density, viscosity, dielectric constant, the spy that conductivity is fingerprint
Sign, realized by characteristic parameters such as the density, viscosity, dielectric constant, the conductivity that measure object to be measured indirectly to its ingredient or
The detection of concentration.Its advantage is that manufacture craft is relatively simple, and due to not needing specific chemical or biological coating, more
It is durable, reliability is higher.The disadvantage is that not having specific selectivity, it is easy sensitive to environmental factors such as temperature.
Document " J. L. Vivancos, Z. Racz, M. Cole, et al. Detergents sensing
System based on SH-SAW devices. Procedia Engineering, 2011,25:1125-1128 " and
“J. L. Vivancos, Z. Racz, M. Cole, et al. Surface acoustic wave based
analytical system for the detection of liquid detergents. Sensors and
Actuators B:Chemical, 2012,171-172:469-477 " pass through actual fabrication mode of resonance horizontal shear sound table
Surface wave device and actual test are described sonic sensor from principle and are washed using scheme two " universality fingerprint detection method " detection
The feasibility of agent residual quantity is washed, but there is following problems:
(1) it needs to control temperature at 22 ± 0.1 DEG C when cannot eliminate influence of the temperature to testing result, therefore test.
(2) two acoustic wave devices of liberalization and metallization are needed when testing, and either liberalization is still metallized device
Reference channel and corresponding reference fluids are required, the cumbersome and complicated of measurement process is thus brought.
(3) although describing using the micro- sap cavity of PDMS and by screwing on screw to avoid the side of leakage when detergent detection
Method, but in actual use, it often will appear screw and twist more loose to which still leakage or screw twists tightlier sound wave to be caused to decline
Subtract the broken situation of excessive or even piezoelectric substrate to occur.
(4) although test result demonstrates various concentration detergent from principle and will lead to the change of acoustic wave device propagation characteristic
Change, but do not describe the solution of corresponding inverse problem, i.e., how to know tool according to the variation of acoustic wave device propagation characteristic
The detergent residual quantity concentration value of body.
Patent of invention " a kind of Love Wave Device structure and detection method for liquid Multi-parameter sensing " (application number:
201510124141.9, the applying date: 2015.03.20) only it can be achieved with a Love Wave Device to fluid density, viscosity, Jie
The parallel detection of electric constant and conductivity, but influence of the temperature to testing result cannot be eliminated, and testing liquid needs to distinguish
In two liquid baths in Liang Ge fluid-sensitive area, operating process is cumbersome.In addition to this, interdigital transducing is used in view of device
Device is deposited on piezoelectric substrate surface middle part and two reflecting gratings are respectively deposited at the form of the left and right sides, deposits with two reflecting gratings
It is compared in the ipsilateral conventional device of piezoelectric substrate, increases one times in the size of length direction, the miniaturization for being unfavorable for device is real
It is existing.
Patent of invention " a kind of multi-fork refer to parallel connection type Love Wave Device structure and its bulk liquid detection method " (application number:
201510207974.1, the applying date: 2015.04.28) although can disappear while realizing to liquid more characteristic parameters parallel detection
Influence except temperature to testing result, but testing liquid also needs to be located in two liquid baths, and device is in length direction
Size is equally longer.In addition to this, due to the time delay echo that device output signal is between interdigital, with delay line type device architecture
Reflecting grating reflection echo compare, signal time delay and amplitude significantly reduce the sensitivity of fluid characteristics parameter.
Summary of the invention
Technical problem to be solved by the invention is to provide a kind of Love Wave Device knots for detergent residues detection
Structure and detection method use single-ended binary channels delay line type Love Wave Device and the realization pair of artificial nerve network model analysis method
The detection of detergent residual quantity, at the same can also real-time monitoring environment temperature and eliminate variation of ambient temperature to detergent residual quantity examine
Survey the influence of result.
The present invention uses following technical scheme to solve above-mentioned technical problem:
A kind of Love Wave Device structure for detergent residues detection, Love Wave Device use single-ended binary channels delay line type
Structure, including piezoelectric substrate, interdigital transducer, the first reflecting grating, the second reflecting grating, third reflecting grating, the 4th reflecting grating, piezoelectricity
Film, fluid-sensitive area；
Wherein, interdigital transducer is deposited on the left of piezoelectric substrate；
The top half that first reflecting grating, the 4th reflecting grating are deposited on piezoelectric substrate constitutes the first propagation ducts of Love wave；
The lower half portion that second reflecting grating, third reflecting grating are deposited on piezoelectric substrate constitutes the second propagation ducts of Love wave；
First reflecting grating, the second reflecting grating, third reflecting grating, the 4th reflecting grating aperture be equal, and be slightly less than interdigital transducing
The half in device aperture, so that two propagation ducts of Love wave are independent of one another；
Fluid-sensitive area is set between the first reflecting grating, the second reflecting grating and third reflecting grating, the 4th reflecting grating, and length is small
In the distance between the second reflecting grating and third reflecting grating, width is equal with the aperture of interdigital transducer；
Piezoelectric membrane sputters at piezoelectric substrate surface and covers interdigital transducer, the first reflecting grating, the second reflecting grating, third reflection
Grid, the 4th reflecting grating, fluid-sensitive area.
Further preferred scheme as the present invention for the Love Wave Device structure of detergent residues detection, the liquid
The top half of body sensitizing range and lower half portion are respectively different electricity structures, wherein top half is liberalization electrical junction
Structure, lower half portion are metallization electricity structure.
Further preferred scheme as the present invention for the Love Wave Device structure of detergent residues detection, the liquid
The piezoelectric membrane surface of the lower half portion of body sensitizing range is coated with the metallic film of one layer of ground connection.
Further preferred scheme as the present invention for the Love Wave Device structure of detergent residues detection, the pressure
Electric substrate is 36 ° of YX lithium tantalates, and the piezoelectric membrane is zinc-oxide film.
Further preferred scheme as the present invention for the Love Wave Device structure of detergent residues detection, the fork
Finger transducer is single phase unidirectional transducer, propagates the Love wave inspired only on the right side of piezoelectric substrate, is avoided conventional interdigital
The problem of energy converter leads to energy loss half because of two-way propagation when exciting Love wave.
Further preferred scheme as the present invention for the Love Wave Device structure of detergent residues detection, first is anti-
It is different at a distance from interdigital transducer to penetrate grid, the second reflecting grating, third reflecting grating, the 4th reflecting grating, when ensuring to test
The corresponding echo-signal of four reflecting gratings is non-interference in time.
Further preferred scheme as the present invention for the Love Wave Device structure of detergent residues detection, if first
Reflecting grating is L1 at a distance from interdigital transducer, and the second reflecting grating is L2, third reflecting grating and fork at a distance from interdigital transducer
The distance of finger transducer is L3, and the 4th reflecting grating is L4 at a distance from interdigital transducer, then the difference of the difference of L1 and L2, L3 and L4
Value should be greater than the half of Love wave propagation distance within the radio-frequency queries pulse duration that external reader emits；Guaranteeing to find pleasure in
When Pu's wave passes through fluid-sensitive area decaying will not it is excessive under the premise of, the difference of L2 and L3 are answered as big as possible, make Love Wave Device
It is sensitiveer to the residues detection of detergent.
Further preferred scheme as the present invention for the Love Wave Device structure of detergent residues detection, detection are washed
When washing agent residual quantity, Love Wave Device firstly the need of by common sticking double faced adhesive tape on the PCB bottom plate of customization, then in device
The lower part that customization is put in surface has the PDMS panel of small boss, the boss size and Love Wave Device on PDMS panel
Fluid-sensitive area size is consistent, the liquid bath as load detergent Liquid Residue；
Plus size and the consistent PMMA double-sided adhesive of the two between liquid bath and the fluid-sensitive area of Love Wave Device, then exist
Screw is screwed at corresponding location hole on PDMS panel and PCB bottom plate to realize the integrative installation technology of Love Wave Device and liquid bath；
The effect of PMMA double-sided adhesive is to realize the sealing of liquid bath and fluid-sensitive area, and it is stubborn to avoid occurring when not using PMMA double-sided adhesive screw
It is more loose to which leakage or screw are twisted compared with tightly causing the situation that acoustic attenuation is excessive or even piezoelectric substrate is broken to occur.
Using the detergent residues detection method of Love Wave Device structure, include the following steps:
Step A: it is controllable in environment temperature, under the experiment condition that detergent residual sample solution concentration can be matched arbitrarily, to Love wave device
Part is tested, and mass data is obtained；
Step B: artificial nerve network model is established according to the data that step A is obtained and trained to reader, and the input quantity of model is
The pulse echo signal characteristic value of Love Wave Device, the output quantity of model are environment temperature and detergent Liquid Residue concentration；
Step C: under conditions of environment temperature is unknown, detergent Liquid Residue to be measured is introduced into liquid bath；
Step D: reader emits radio-frequency queries pulse electrical signal, which is entered by the radio-frequency maser on PCB bottom plate
The pulse electrical signal is converted to Love wave signals and propagated to device right end by interdigital transducer, interdigital transducer；
Love wave signals in the E: the first propagation ducts of step encounter the first reflecting grating and generate part reflection and fractional transmission；Through
The Love wave signals of one reflecting grating reflection enter back into interdigital transducer and are converted into the first pulse echo signal, pass through PCB bottom plate
On radio-frequency maser return to reader；Love wave signals through the transmission of the first reflecting grating pass through the top half in fluid-sensitive area, meet
Part reflection and fractional transmission are generated to the 4th reflecting grating；Love wave signals through the reflection of the 4th reflecting grating are using fluid-sensitive
The top half in area, the first reflecting grating enter interdigital transducer and are converted into the 4th pulse echo signal, by PCB bottom plate
Radio-frequency maser returns to reader；
Love wave signals in the F: the second propagation ducts of step encounter the second reflecting grating and generate part reflection and fractional transmission；Through
The Love wave signals of two reflecting gratings reflection enter back into interdigital transducer and are converted into the second pulse echo signal, pass through PCB bottom plate
On radio-frequency maser return to reader；Love wave signals through the transmission of the second reflecting grating pass through the lower half portion in fluid-sensitive area, meet
Part reflection and fractional transmission are generated to third reflecting grating；The Love wave signals reflected through third reflecting grating are using fluid-sensitive
The lower half portion in area, the second reflecting grating enter interdigital transducer and are converted into third pulse echo signal, by PCB bottom plate
Radio-frequency maser returns to reader；
Step G: the echo-signal that reader analysis processing obtains calculates the first pulse echo signal and the second pulse echo signal
Between phase difference, the phase difference between the first pulse echo signal and the 4th pulse echo signal, the 4th pulse echo signal
Amplitude, the phase difference between the second pulse echo signal and third pulse echo signal, the amplitude of third pulse echo signal,
Characteristic value as pulse echo signal；
Step H: above-mentioned pulse echo signal characteristic value is inputted trained artificial neural network by reader, obtains environment temperature
With the concentration of detergent Liquid Residue.
Further, step A is specifically divided into following steps:
Step a: the detergent of known concentration is remained sample introduction liquid bath by given environment temperature；
Step b: it according to the step identical as step D, step E, step F, step G, obtains and given environment temperature and known dense
The corresponding pulse echo signal characteristic value of detergent residual sample of degree；
Step c: in the case where environment temperature is constant, by the concentration of certain step-size change detergent residual sample, step is repeated
A, step b；
Step d: pressing certain step-size change environment temperature, repeats step a, step b, step c.
The invention adopts the above technical scheme compared with prior art, has following technical effect that
1. the chemical sensor phase being widely used with liquid sensory fields such as titration, red, orange, green, blue, yellow (ROGBY), voltammetry, potentiometrys
Than being easy to integrated with washing machine, and be suitable for various types of surfactants in measurement detergent；
2. with the sonic sensor liquid phase detection side for adding one layer of specific chemical or biofilm or coating on piezoelectric substrate
Method is compared, and manufacture craft is relatively simple, and it is more durable, reliability is higher；
3. using single phase single direction interdigital transducer, be conducive to the miniaturization of device；Using single-ended delay line type structure, can be improved
Detection sensitivity；Using channel structure, device Zhi Xuyige fluid-sensitive area；
4. device only one fluid-sensitive area is simultaneously located in a liquid bath, operating process is simple when detergent is introduced liquid bath；
5. plus PMMA double-sided adhesive, it can be achieved that the close sealing of liquid bath and fluid-sensitive area between liquid bath and fluid-sensitive area；
6. using artificial nerve network model analysis method, it can not only be detected and be washed by the pulse echo signal characteristic value of device
Wash agent residual quantity concentration, can also real-time monitoring environment temperature, and eliminate influence of the variation of ambient temperature to testing result.
Detailed description of the invention
Fig. 1 is Love Wave Device structural schematic diagram of the invention；
Fig. 2 is Love Wave Device structure top cross-sectional view of the invention；
Fig. 3 is Love Wave Device structure longitudinal profile schematic diagram of the invention；
Fig. 4 is PDMS panel construction schematic diagram of the invention；
Fig. 5 is PDMS panel construction top cross-sectional view of the invention；
Fig. 6 is PDMS panel construction longitudinal profile schematic diagram of the invention；
Fig. 7 is Love Wave Device pulse echo signal schematic diagram of the invention；
Fig. 8 is artificial neural network structure's model schematic of the invention.
Label title in above-mentioned figure: 1. piezoelectric substrates, 2. interdigital transducers, 3. first reflecting gratings, 4. second is anti-
Penetrate grid, 5. third reflecting gratings, 6. the 4th reflecting gratings, 7. piezoelectric membranes, 8. fluid-sensitive areas, 9. liquid baths, 10. positioning
Hole, 11. inquiry pulses, 12. first pulse echo signals, 13. second pulse echo signals, 14. third pulse echos letter
Number, 15. the 4th pulse echo signals, the phase difference between 16. first pulse echo signals and the second pulse echo signal,
17. the phase difference between the first pulse echo signal and the 4th pulse echo signal, 18. second pulse echo signals and third
Phase difference between pulse echo signal, the amplitude of 19. third pulse echo signals, the width of 20. the 4th pulse echo signals
Value, 21. environment temperatures, 22. detergent residual quantity concentration.
Specific embodiment
Technical solution of the present invention is described in detail with reference to the accompanying drawing, those skilled in the art of the present technique are understood that
, unless otherwise defined, all terms (including technical terms and scientific terms) used herein have with belonging to the present invention
The identical meaning of the general understanding of those of ordinary skill in field.It should also be understood that such as defined in the general dictionary
Those terms, which should be understood that, to be had a meaning that is consistent with the meaning in the context of the prior art, and unless as here one
Sample definition, will not be explained in an idealized or overly formal meaning.
As shown in Figure 1, Figure 2, Figure 3 shows, a kind of Love Wave Device structure for detergent residues detection.The Love wave
Device is single-ended binary channels delay line type structure, including piezoelectric substrate 1, interdigital transducer 2, the first reflecting grating 3, the second reflecting grating
4, third reflecting grating 5, the 4th reflecting grating 6, piezoelectric membrane 7 and fluid-sensitive area 8.Wherein, 1 material therefor of piezoelectric substrate is 36 °
YX lithium tantalate, 7 material therefor of piezoelectric membrane are zinc oxide.Piezoelectric membrane 7 sputters at 1 surface of piezoelectric substrate and covers interdigital transducing
Device 2, the first reflecting grating 3, the second reflecting grating 4, third reflecting grating 5, the 4th reflecting grating 6, fluid-sensitive area 8.Interdigital transducer 2 is heavy
Product is single phase unidirectional transducer in 1 left side of piezoelectric substrate, propagates the Love wave inspired only on the right side of piezoelectric substrate, keeps away
Exempt from the problem of leading to energy loss half because of two-way propagation when conventional interdigital transducer excitation Love wave, is conducive to Love Wave Device
Miniaturization.The top half that first reflecting grating 3, the 4th reflecting grating 6 are deposited on piezoelectric substrate 1 constitutes first biography of Love wave
Channel is broadcast, the lower half portion that the second reflecting grating 4, third reflecting grating 5 are deposited on piezoelectric substrate 1 constitutes second propagation of Love wave
Channel.First reflecting grating 3, the second reflecting grating 4, third reflecting grating 5, the 4th reflecting grating 6 aperture be equal, and be slightly less than fork
The half in 2 aperture of finger transducer, so that two propagation ducts of Love wave are independent of one another.
First reflecting grating 3, the second reflecting grating 4, third reflecting grating 5, the 4th reflecting grating 6 are each at a distance from interdigital transducer 2
It is not identical, to ensure that the corresponding echo-signal of four reflecting gratings is non-interference in time when testing.If the first reflecting grating 3 and fork
The distance of finger transducer 2 is L1, the second reflecting grating 4 is L2 at a distance from interdigital transducer 2, third reflecting grating 5 and interdigital transducing
The distance of device 2 is L3, the 4th reflecting grating 6 is L4 at a distance from interdigital transducer 2, then the difference of the difference of L1 and L2, L3 and L4
It should be greater than the half of Love wave propagation distance within the radio-frequency queries pulse duration that external reader emits.Guaranteeing happy Pu
When wave passes through fluid-sensitive area decaying will not it is excessive under the premise of, the difference of L2 and L3 are answered as big as possible, make Love Wave Device pair
The residues detection of detergent is sensitiveer.
Fluid-sensitive area 8 be set to the first reflecting grating 3, the second reflecting grating 4 and third reflecting grating 5, the 4th reflecting grating 6 it
Between, for length less than the distance between the second reflecting grating 4 and third reflecting grating 5, width is equal with the aperture of interdigital transducer 2.
The top half in fluid-sensitive area 8 and lower half portion are respectively different electricity structures, and wherein top half is liberalization electricity
Structure, lower half portion are metallization electricity structure.Also, 7 surface of piezoelectric membrane of the lower half portion in fluid-sensitive area 8 is coated with one
The metallic film of layer ground connection.By setting liberalization electricity structure and metallize electricity structure fluid-sensitive area top half,
Lower half portion, it is corresponding with two propagation ducts of Love wave, with two kinds of density of separating, washing agent Liquid Residue, viscosity mechanical parameters
Influence with two kinds of dielectric constant, conductivity electrical parameters to reflecting grating echo-signal.
When using Love Wave Device structure detection detergent residual quantity of the invention, Love Wave Device is firstly the need of by general
Then logical sticking double faced adhesive tape puts the face PDMS with small boss of customization on the PCB bottom plate of customization right above device
Plate.PDMS panel is as shown in Fig. 4, Fig. 5, Fig. 6,8 ruler of fluid-sensitive area of boss size and Love Wave Device on PDMS panel
It is very little consistent, it is used as the load remaining liquid bath 9 of detergent.Size is added between liquid bath 9 and the fluid-sensitive area 8 of Love Wave Device
With the consistent PMMA double-sided adhesive of the two, screw then is screwed on reality at corresponding location hole 10 on PDMS panel and PCB bottom plate
The integrative installation technology of existing Love Wave Device and liquid bath 9；The effect of PMMA double-sided adhesive is to realize the envelope of liquid bath 9 and fluid-sensitive area 8
It closes, avoids occurring when not using PMMA double-sided adhesive screw and twist more loose to which leakage or screw twist tightlier sound wave to be caused to decline
Subtract the broken situation of excessive or even piezoelectric substrate 1 to occur.
The pulse echo signal of Love Wave Device is as shown in Figure 7.Inquiry pulse 11 is to be coupled to from reader emission link
The radio-frequency queries pulse signal of reader receives link, the first pulse echo signal 12 are the corresponding echo letter of the first reflecting grating 3
Number, the second pulse echo signal 13 is the corresponding echo-signal of the second reflecting grating 4, and third pulse echo signal 14 is third reflection
The corresponding echo-signal of grid 5, the 4th pulse echo signal 15 are the corresponding echo-signal of the 4th reflecting grating 6.First pulse echo
The time delay and freedom of signal 12, the second pulse echo signal 13, third pulse echo signal 14, the 4th pulse echo signal 15
Change, the Love wave spread speed of metallization electricity structure has certain corresponding relationship, the first pulse echo signal 12, the second arteries and veins
Rush echo-signal 13, third pulse echo signal 14, the amplitude of the 4th pulse echo signal 15 and liberalization, metallization electrical junction
The Love wave propagation attenuation of structure has certain corresponding relationship.
The artificial neural network structure's mould used when using Love Wave Device structure detection detergent residual quantity of the invention
Type is as shown in Figure 8.The input quantity of model is the pulse echo signal characteristic value of Love Wave Device, is respectively as follows: the first pulse echo
Phase difference 16, the first pulse echo signal between signal and the second pulse echo signal and between the 4th pulse echo signal
Phase difference 18, third pulse echo signal between phase difference 17, the second pulse echo signal and third pulse echo signal
The amplitude 20 of amplitude 19 and the 4th pulse echo signal.The output quantity of model is environment temperature 21 and detergent residual quantity concentration
22。
Detecting step is as follows:
1) controllable in environment temperature 21, under the experiment condition that detergent residual sample solution concentration 22 can be matched arbitrarily, to Love wave device
Part is tested, and mass data is obtained；
2) reader is established according to the data that step 1 obtains and trains artificial nerve network model；
3) under conditions of environment temperature 21 is unknown, detergent Liquid Residue to be measured is introduced into liquid bath 9；
4) reader emits radio-frequency queries pulse electrical signal, which is entered interdigital by the radio-frequency maser on PCB bottom plate
The pulse electrical signal is converted to Love wave signals and propagated to device right end by energy converter 2, interdigital transducer 2；
5) Love wave signals in first propagation ducts encounter the first reflecting grating 3 generation part reflection and fractional transmission；Through
The Love wave signals of one reflecting grating 3 reflection enter back into interdigital transducer 2 and are converted into the first pulse echo signal 12, pass through PCB
Radio-frequency maser on bottom plate returns to reader；Love wave signals through the transmission of the first reflecting grating 3 pass through the upper half in fluid-sensitive area 8
Point, it encounters the 4th reflecting grating 6 and generates part reflection and fractional transmission；Through the 4th reflecting grating 6 reflection Love wave signals using
The top half in fluid-sensitive area 8, the first reflecting grating 3 are converted into the 4th pulse echo signal 15 into interdigital transducer 2, lead to
The radio-frequency maser crossed on PCB bottom plate returns to reader；
6) Love wave signals in second propagation ducts encounter the second reflecting grating 4 generation part reflection and fractional transmission；Through
The Love wave signals of two reflecting gratings 4 reflection enter back into interdigital transducer 2 and are converted into the second pulse echo signal 13, pass through PCB
Radio-frequency maser on bottom plate returns to reader；Love wave signals through the transmission of the second reflecting grating 2 pass through the lower half in fluid-sensitive area 8
Point, it encounters third reflecting grating 5 and generates part reflection and fractional transmission；Through third reflecting grating 5 reflect Love wave signals using
The lower half portion in fluid-sensitive area 8, the second reflecting grating 4 are converted into third pulse echo signal 14 into interdigital transducer 2, lead to
The radio-frequency maser crossed on PCB bottom plate returns to reader；
7) reader analysis processing obtains pulse echo signal characteristic value；
8) above-mentioned pulse echo signal characteristic value is inputted trained artificial neural network by reader, obtains 21 He of environment temperature
The concentration 22 of detergent Liquid Residue.
Its step 1 can be subdivided into following steps:
A) environment temperature 21 is given, the detergent of known concentration is remained into sample introduction liquid bath 9；
B) it according to the step identical as above-mentioned steps 4, step 5, step 6, step 7, obtains and given environment temperature 21 and known
The corresponding pulse echo signal characteristic value of detergent residual sample of concentration；
C) in the case where environment temperature 21 is constant, by the concentration 22 of certain step-size change detergent residual sample, step is repeated
A, step b；
D) certain step-size change environment temperature 21 is pressed, step a, step b, step c are repeated.
The above is only some embodiments of the invention, it is noted that for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (10)
1. a kind of Love Wave Device structure for detergent residues detection, it is characterised in that: Love Wave Device is using single-ended
Binary channels delay line type structure, including piezoelectric substrate (1), interdigital transducer (2), the first reflecting grating (3), the second reflecting grating (4),
Third reflecting grating (5), the 4th reflecting grating (6), piezoelectric membrane (7), fluid-sensitive area (8)；
Wherein, interdigital transducer (2) is deposited on the left of piezoelectric substrate (1)；
The top half that first reflecting grating (3), the 4th reflecting grating (6) are deposited on piezoelectric substrate (1) constitutes the first biography of Love wave
Broadcast channel；
The lower half portion that second reflecting grating (4), third reflecting grating (5) are deposited on piezoelectric substrate (1) constitutes the second biography of Love wave
Broadcast channel；
First reflecting grating (3), the second reflecting grating (4), third reflecting grating (5), the 4th reflecting grating (6) aperture be equal, and slightly
Less than the half in interdigital transducer (2) aperture, so that two propagation ducts of Love wave are independent of one another；
Fluid-sensitive area (8) is set to the first reflecting grating (3), the second reflecting grating (4) and third reflecting grating (5), the 4th reflecting grating
(6) between, length is less than the distance between the second reflecting grating (4) and third reflecting grating (5), width and interdigital transducer (2)
Aperture it is equal；
Piezoelectric membrane (7) sputters at piezoelectric substrate (1) surface and covers interdigital transducer (2), the first reflecting grating (3), second instead
Penetrate grid (4), third reflecting grating (5), the 4th reflecting grating (6), fluid-sensitive area (8).
2. the Love Wave Device structure according to claim 1 for detergent residues detection, it is characterised in that: described
The top half in fluid-sensitive area (8) and lower half portion are respectively different electricity structures, wherein top half is liberalization electricity
Structure is learned, lower half portion is metallization electricity structure.
3. the Love Wave Device structure according to claim 1 or 2 for detergent residues detection, it is characterised in that:
Piezoelectric membrane (7) surface of the lower half portion of the fluid-sensitive area (8) is coated with the metallic film of floor ground connection.
4. the Love Wave Device structure according to claim 1 for detergent residues detection, it is characterised in that: described
Piezoelectric substrate (1) is 36 ° of YX lithium tantalates, and the piezoelectric membrane (7) is zinc-oxide film.
5. the Love Wave Device structure according to claim 1 for detergent residues detection, it is characterised in that: described
Interdigital transducer (2) is single phase unidirectional transducer, propagates the Love wave inspired only on the right side of piezoelectric substrate, avoids routine
The problem of interdigital transducer leads to energy loss half because of two-way propagation when exciting Love wave.
6. the Love Wave Device structure according to claim 1 for detergent residues detection, it is characterised in that: first
Reflecting grating (3), the second reflecting grating (4), third reflecting grating (5), the 4th reflecting grating (6) at a distance from interdigital transducer (2) respectively not
It is identical, to ensure that the corresponding echo-signal of four reflecting gratings is non-interference in time when testing.
7. the Love Wave Device structure for detergent residues detection according to claim 1 or 6, it is characterised in that:
If the first reflecting grating (3) is L1 at a distance from interdigital transducer (2), the second reflecting grating (4) is at a distance from interdigital transducer (2)
L2, third reflecting grating (5) are L3 at a distance from interdigital transducer (2), and the 4th reflecting grating (6) is at a distance from interdigital transducer (2)
For L4, then the difference of the difference of L1 and L2, L3 and L4 should be greater than Love wave and holds in the radio-frequency queries pulse that external reader emits
The half of propagation distance in the continuous time；Guarantee Love wave pass through fluid-sensitive area when decaying will not be excessive under the premise of, L2 with
The difference of L3 is answered as big as possible, keeps Love Wave Device sensitiveer to the residues detection of detergent.
8. the Love Wave Device structure according to claim 1 for detergent residues detection, it is characterised in that: detection
When detergent residual quantity, Love Wave Device firstly the need of by common sticking double faced adhesive tape on the PCB bottom plate of customization, then in device
The lower part that customization is put right above part has the PDMS panel of small boss, boss size and Love Wave Device on PDMS panel
Fluid-sensitive area (8) size it is consistent, as load detergent Liquid Residue liquid bath (9)；
Plus size and the consistent PMMA double-sided adhesive of the two between liquid bath (9) and the fluid-sensitive area (8) of Love Wave Device, so
Screw is screwed at corresponding location hole (10) on PDMS panel and PCB bottom plate afterwards to realize Love Wave Device and liquid bath (9)
Integrative installation technology；The effect of PMMA double-sided adhesive is to realize the sealing of liquid bath (9) and fluid-sensitive area (8), avoids not using PMMA
Occur screw when double-sided adhesive and twists more loose to which leakage or screw are twisted compared with tightly causing acoustic attenuation excessive or even piezoelectric substrate
(1) broken situation occurs.
9. the detergent residues detection method based on the Love Wave Device structure described in claim 1 to 8, it is characterised in that:
Include the following steps:
Step A: environment temperature (21) controllably, it is right under detergent residual sample solution concentration (22) experiment condition that can arbitrarily match
Love Wave Device is tested, and mass data is obtained；
Step B: artificial nerve network model is established according to the data that step A is obtained and trained to reader, and the input quantity of model is
The pulse echo signal characteristic value of Love Wave Device, the output quantity of model are environment temperature (21) and detergent Liquid Residue concentration
(22)；
Step C: under conditions of environment temperature (21) is unknown, detergent Liquid Residue to be measured is introduced into liquid bath (9)；
Step D: reader emits radio-frequency queries pulse electrical signal, which is entered by the radio-frequency maser on PCB bottom plate
The pulse electrical signal is converted to Love wave signals and propagated to device right end by interdigital transducer (2), interdigital transducer (2)；
Love wave signals in the E: the first propagation ducts of step encounter the first reflecting grating (3) and generate part reflection and fractional transmission；
The Love wave signals reflected through the first reflecting grating (3) enter back into interdigital transducer (2) and are converted into the first pulse echo signal
(12), reader is returned to by the radio-frequency maser on PCB bottom plate；Love wave signals through the first reflecting grating (3) transmission pass through liquid
The top half of sensitizing range (8) encounters the 4th reflecting grating (6) and generates part reflection and fractional transmission；It is anti-through the 4th reflecting grating (6)
The Love wave signals penetrated enter interdigital transducer (2) quilt using the top half of fluid-sensitive area (8), the first reflecting grating (3)
The 4th pulse echo signal (15) is converted to, reader is returned to by the radio-frequency maser on PCB bottom plate；
Love wave signals in the F: the second propagation ducts of step encounter the second reflecting grating (4) and generate part reflection and fractional transmission；
The Love wave signals reflected through the second reflecting grating (4) enter back into interdigital transducer (2) and are converted into the second pulse echo signal
(13), reader is returned to by the radio-frequency maser on PCB bottom plate；Love wave signals through the second reflecting grating (4) transmission pass through liquid
The lower half portion of sensitizing range (8) encounters third reflecting grating (5) and generates part reflection and fractional transmission；It is anti-through third reflecting grating (5)
The Love wave signals penetrated enter interdigital transducer (2) quilt using the lower half portion of fluid-sensitive area (8), the second reflecting grating (4)
Third pulse echo signal (14) are converted to, reader is returned to by the radio-frequency maser on PCB bottom plate；
Step G: the echo-signal that reader analysis processing obtains calculates the first pulse echo signal (12) and the second pulse echo
Phase difference between signal (13), the phase difference between the first pulse echo signal (12) and the 4th pulse echo signal (15),
The amplitude of 4th pulse echo signal (15), the phase between the second pulse echo signal (13) and third pulse echo signal (14)
Potential difference, the amplitude of third pulse echo signal (14), the characteristic value as pulse echo signal；
Step H: above-mentioned pulse echo signal characteristic value is inputted trained artificial neural network by reader, obtains environment temperature
(21) and the concentration of detergent Liquid Residue (22).
10. the method according to claim 9 for carrying out detergent residues detection using Love Wave Device structure, feature
Be: step A is specifically divided into following steps:
Step a: the detergent of known concentration is remained sample introduction liquid bath (9) by given environment temperature (21)；
Step b: it according to the step identical as step D, step E, step F, step G in claim 9, obtains and given environment temperature
Spend the corresponding pulse echo signal characteristic value of detergent residual sample of (21) and known concentration；
Step c: in the case where environment temperature (21) is constant, the concentration (22) of sample is remained by certain step-size change detergent,
Repeat step a, step b；
Step d: pressing certain step-size change environment temperature (21), repeats step a, step b, step c.
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