CN109569392A - A kind of active micro-mixer of Y type based on surface acoustic wave - Google Patents
A kind of active micro-mixer of Y type based on surface acoustic wave Download PDFInfo
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- CN109569392A CN109569392A CN201811573443.4A CN201811573443A CN109569392A CN 109569392 A CN109569392 A CN 109569392A CN 201811573443 A CN201811573443 A CN 201811573443A CN 109569392 A CN109569392 A CN 109569392A
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- mixer
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- interdigital
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/30—Micromixers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F31/00—Mixers with shaking, oscillating, or vibrating mechanisms
Abstract
The invention discloses a kind of active micro-mixer of Y type based on surface acoustic wave, the micro-mixer is a kind of active micro-mixer that the solution collectively constituted by interdigital transducer and Y type channel micro-mixer efficiently mixes, and belongs to liquid microring array and SAW device technical field in biochip and micro-total analysis system.The micro-mixer includes a piece of piezoelectric substrate, two staggered arc interdigital electrodes and a Y type micro-mixer channel.Interdigital transducer excitation generates the high sound intensity surface wave focused, by LiNbO3Piezoelectric substrate travels in Y type microchannel.Surface acoustic wave is applied in fluid in the form of acoustic streaming power, forms certain disturbance and vortex, is extended the flow path of fluid in a mixer, is obviously improved solution diffusion effect, significantly enhances the mixed performance of micro-mixer.
Description
Technical field
The invention belongs to liquid microring array in biochip and micro-total analysis system and SAW device technical field,
Technology is related to a kind of active microring array that the solution collectively constituted by interdigital transducer and Y type channel micro-mixer efficiently mixes
Device.
Background technique
Surface acoustic wave (SAW) technology is that one kind is integrated with the multidisciplinary cross one another neck such as acoustics, electronics, materialogy
Domain.Surface acoustic wave has the characteristics that frequency is high, spread speed is low, wavelength is short, is now widely used for sensor, filter and vibration
Swing device etc..Surface acoustic wave is mainly motivated by interdigital transducer and is generated, and interdigital transducer is by piezoelectric substrate and is deposited on table
Metal interdigital electrode (interdigital transducers, the IDTs) two parts in face form.When applying on interdigital transducer
When the alternating current of certain frequency, piezoelectric substrate can generate periodic shape because of the offset of charge-site under the action of electric field
Become, is blazed abroad in substrate surface along the direction perpendicular to electrode in the form of elastic wave, form surface acoustic wave.
It is micro-fluidic be in the channel having a size of several to several hundred microns manipulation nanoliter to picoliters volume (10-9~10-12L) sample
The systematic science and technology of product, have the advantages that required sample volume it is small, it is high-efficient, at low cost, be easily integrated, be widely used in
In the various fields such as cell culture, drug test, cell capture and disease detection, have broad application prospects.Micro-mixer
It is the important pretreating device realizing micro-scale volume fluid in microflow control technique and rapidly and efficiently mixing.The typical case of Micro-flows is special
Sign is that the Re of flowing is very low, greatly all in laminar region, is layered the flowing not blended and causes mixing difficulty.In macroscopic arts
In, there are enough spaces for utilizing, is the well-mixed main means of acquisition by turbulent flow, and the laminar flow under minute yardstick
Characteristic significantly limits the mixed performance of conventional mixing techniques.Realize that the mixing of solution rapidly and efficiently has weight on the micro scale
The application value wanted.Micro-mixer is according to whether there is or not outside energy drivings to be divided into active and two kinds of passive type.Compared to passive type
Micro-mixer, active micro-mixer is due to there is the input of outside energy, and mixed performance is obvious under conditions of low entry flow
Better than passive type, it can be achieved that solution example is sufficiently mixed.According to the difference of extraneous input energy, active micro-mixer is divided into
Multiple types, wherein surface acoustic wave driving fluid mixing techniques are a kind of modes that novel rush is mixed.
Unique interaction promotes surface acoustic wave and microflow control technique good combination between sound wave and fluid media (medium), is micro-
Mixing field provides a kind of new mode.Interdigital transducer can convert the electrical signal to surface acoustic wave and propagate through piezoelectric substrate
It into micro-fluidic chip, is applied in fluid in the form of acoustic streaming power, fluid can generate disturbance and rotation under the action of acoustic streaming power
Whirlpool can accelerate the mixing of solution, be obviously improved the mixing intensity of micro-mixer, to reach at low Re sample solution rapidly and efficiently
Mixed purpose.
The structure size and input voltage of different interdigital transducers can produce different frequency, different wave length and various amplitude
Surface acoustic wave, being finally applied to the acoustic streaming power of fluid in channel also can be different, optimize the structure size of interdigital transducer for
Micro-mixer mixed performance is promoted to be of great significance.
Summary of the invention
The object of the present invention is to provide the active microring arrays that a kind of interdigital transducer is combined with Y type micro-mixer channel
Device can be such that sample solution realizes at low Re and rapidly and efficiently mix.
The technical solution adopted by the present invention be a kind of arc-shaped electrode interdigital transducer and Y type channel combine based on sound table
The active micro-mixer of surface wave.It is micro- mixed including a piece of piezoelectric substrate, two staggered arc interdigital electrodes and a Y type
Clutch channel.The active micro-mixer by low propagation loss, high electromechanical coupling factor arc interdigital transducer by sound table
Surface wave propagation realizes being sufficiently mixed for solution into Y type channel, using acoustic streaming power.
A kind of active micro-mixer of Y type based on surface acoustic wave, including it is two interdigital transducer arc-shaped electrodes 1, a piece of
LiNbO3Monocrystalline piezoelectric substrate 2 and a Y type channel micro-mixer, Y type channel micro-mixer include two entrance 3 of Y type channel, mix
Close channel 4 and Y type channel outlet 5；Two interdigital transducer arc-shaped electrodes 1 are plated in LiNbO3In monocrystalline piezoelectric substrate 2, in sound table
Y type channel micro-mixer is placed on surface wave propagation direction, the channel of Y type channel micro-mixer is bonded in LiNbO3Monocrystalline piezoelectric base
On bottom 2, the direction of hybrid channel 4 is vertical with the direction of propagation of the surface acoustic wave of interdigital transducer arc-shaped electrode 1.Y type channel two
Entrance 3 is connected by hybrid channel 4 and Y type channel outlet 5.
The material of interdigital transducer arc-shaped electrode 1 is aluminium film, with a thickness of 0.002mm, is inserted into mutually by two and is not contacted
Electrode composition.Have in each electrode 15 it is interdigital, form 15 pairs of interdigital structures altogether after insertion mutually, every interdigital width and
It is all 0.05mm that adjacent two the distance between interdigital, and the angle of arc is 60 °, and longest interdigital length is 4.8mm, shortest
Interdigital length is 1.8mm.
LiNbO3Monocrystalline piezoelectric substrate 2 is LiNbO3Monocrystal material is cut using 128 ° of rotation Y-directions, is propagated in X direction.
The size of hybrid channel 4 is width 0.3mm, high 0.1mm.Two length at entry of two entrance 3 of Y type channel are 2mm,
Angle is 90 °；The length of hybrid channel 4 is 7mm.
The material of arc-shaped electrode is aluminium film, with a thickness of 0.002mm, is inserted into mutually by two and discontiguous electrode 1 forms,
Concrete shape is as shown in Figure 2.Have in each electrode 15 it is interdigital, mutually insertion after form 15 pairs of interdigital structures altogether, every is interdigital
Width and it is adjacent two it is the distance between interdigital be 0.05mm, the angle of arc is 60 °, and longest interdigital length is
4.8mm, shortest interdigital length are 1.8mm.Two arc-shaped electrodes are plated in piezoelectric substrate 2, piezoelectric substrate LiNbO3Monocrystalline
Material, the material surface roughness is small, and energy transformation ratio is high, and propagation loss is small, the big advantage of electromechanical coupling factor, sound surface
Wave performance and cut type and the direction of propagation are closely related.The present invention is using 128 ° of rotation Y-direction cuttings, the LiNbO that X-direction is propagated3
Monocrystalline, the LiNbO of direction cutting3The loss of monocrystalline piezoelectric substrate sound wave is minimum, best performance.The sound table that interdigital transducer generates
Surface wave wavelength is 0.2mm, frequency 19.5MHz.It is micro- logical to placed a Y type on interdigital transducer acoustic surface wave propagation direction
Road, the direction in channel and the direction of propagation of surface acoustic wave are vertical.Y type channel is made of two entrances 3 and a hybrid channel 4,
Channel size wide 0.3mm, high 0.1mm.Two length at entry of channel is 2mm, and angle is 90 °, and hybrid channel length is 7mm.
The fluid of two kinds of different components enters micro-mixer from two entrance uniform flows respectively, converges in hybrid channel, finally
It is flowed out from outlet 5.Two kinds of different component fluids promote two kinds during hybrid channel is flowed, using the effect of surface acoustic wave
The mixing of fluid.
The present invention has the advantage that afterwards by adopting the above technical scheme
1. the present invention can motivate generation surface acoustic wave to travel in Y type channel through piezoelectric substrate by interdigital transducer, with
The form of acoustic streaming power is applied on fluid, forms disturbance and vortex to promote the mixing of two kinds of different component fluids.
2. arc interdigital transducer structure of the invention can more be such that surface acoustic wave is focused, act on the range in channel compared with
Short, surface acoustic wave intensity is higher, and acoustic streaming power is bigger, and mixed degree is promoted to become apparent from.
3. the present invention can effectively improve mixing efficiency of different component fluid under the conditions of low Re, fluid under minute yardstick is realized
Efficient mixing, preferable mixed effect can be realized under the conditions of simple channel design.
Detailed description of the invention
Fig. 1 is the active micro-mixer three dimensional structure diagram of a kind of Y type based on surface acoustic wave mentioned in invention；
Fig. 2 is the top view of interdigital transducer arc-shaped electrode in the invention；
In figure: 1, interdigital transducer arc-shaped electrode, 2, LiNbO3Monocrystalline piezoelectric substrate, 3, two entrance of Y type channel, 4, mixing
Channel, 5, Y type channel outlet.
Specific embodiment
Active micro mixer chip production based on surface acoustic wave of the invention is broadly divided into three parts, and first part is
The production of interdigital transducer, second part are the production of Y type micro-fluidic chip, and Part III is that two parts are carried out to bonding to add
Heat.
The production method of interdigital transducer is cut in 128 ° of rotation Y-directions, the LiNbO that X-direction is propagated3Monocrystalline piezoelectric base
The arc-shaped electrode that two are inserted into mutually is plated in surface in the way of plated film on bottom.First with vapor deposition film method in piezoelectricity base
Bottom surface deposits the thick aluminium film of one layer of 0.002mm, smears a layer photoresist using whirl coating technology on surface, is then covered using optics
Lid substrate develops after carrying out ultraviolet exposure, finally carries out metal erosion and connecting wire, completes interdigital transducer part
Production.
The production of Y type micro-fluidic chip, Y type micro-fluidic chip material be polydimethylsiloxane, method use with
Interdigital transducer makes similar SU-8 negative photo technology and carries out convex erosion.Silicon wafer is cleared up first, using getting rid of
Then the method for glue carries out silicon wafer exposure using mask plate and development is washed, finally in silicon wafer in surface spin coating SU-8 photoresist
On pour PDMS and carry out thermosetting, the production of Y type micro-fluidic chip is completed after entrance completes punching.
It is heated after interdigital transducer is carried out plasma treatment precise alignment with Y type micro-fluidic chip and completes within 4 hours to be bonded.
Interdigital transducer can be with after being passed through alternating current for active micro mixer chip based on surface acoustic wave of the invention
Excitation generates the high sound intensity surface wave focused, by LiNbO3Piezoelectric substrate travels in Y type microchannel.In Y type microchannel
In the fluids of two kinds of different components from channel, two entrance uniform flows enters micro-mixer respectively, converged in hybrid channel, by sound
The region of surface wave propagation, surface acoustic wave are applied in fluid in the form of acoustic streaming power, form certain disturbance and vortex, finally
It exports and flows out from micro-mixer.The addition of surface acoustic wave extends the flow path of fluid in a mixer, makes solution diffusion effect
It should be obviously improved, significantly enhance the mixed performance of micro-mixer.
Claims (4)
1. a kind of active micro-mixer of Y type based on surface acoustic wave, it is characterised in that: including two interdigital transducer arc electricity
Pole (1), a piece of LiNbO3Monocrystalline piezoelectric substrate (2) and a Y type channel micro-mixer, Y type channel micro-mixer include that Y type is logical
Two entrance of road (3), hybrid channel (4) and Y type channel outlet (5)；Two interdigital transducer arc-shaped electrodes (1) are plated in LiNbO3It is single
On brilliant piezoelectric substrate (2), Y type channel micro-mixer, the channel of Y type channel micro-mixer are placed on acoustic surface wave propagation direction
It is bonded in LiNbO3In monocrystalline piezoelectric substrate (2), the direction of hybrid channel (4) and the sound table of interdigital transducer arc-shaped electrode (1)
The direction of propagation of surface wave is vertical；Two entrance (3) of Y type channel is connected by hybrid channel (4) and Y type channel outlet (5).
2. a kind of active micro-mixer of Y type based on surface acoustic wave according to claim 1, it is characterised in that: interdigital
The material of energy converter arc-shaped electrode (1) is aluminium film, with a thickness of 0.002mm, is inserted into mutually by two and discontiguous electrode forms；
Have in each electrode 15 it is interdigital, form 15 pairs of interdigital structures altogether after insertion mutually, every interdigital width and adjacent two forks
The distance between finger is all 0.05mm, and the angle of arc is 60 °, and longest interdigital length is 4.8mm, and shortest interdigital length is
1.8mm。
3. a kind of active micro-mixer of Y type based on surface acoustic wave according to claim 1, it is characterised in that: LiNbO3
Monocrystalline piezoelectric substrate (2) is LiNbO3Monocrystal material is cut using 128 ° of rotation Y-directions, is propagated in X direction.
4. a kind of active micro-mixer of Y type based on surface acoustic wave according to claim 1, it is characterised in that: mixing
The size in channel (4) is width 0.3mm, high 0.1mm；Two length at entry of two entrance (3) of Y type channel are 2mm, and angle is
90°；The length of hybrid channel (4) is 7mm.
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Cited By (6)
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| CN109967148A (en) * | 2019-04-24 | 2019-07-05 | 西安交通大学 | A kind of integrated form temperature control system suitable for surface acoustic wave fluid channel |
| CN111085281A (en) * | 2020-01-08 | 2020-05-01 | 西安交通大学 | Surface acoustic wave regulated high-flux micro-droplet generation device and method |
| CN112526777A (en) * | 2020-12-04 | 2021-03-19 | 西安交通大学 | Acousto-optic lens chip based on surface acoustic wave refractive index field virtual carving |
| CN112827518A (en) * | 2021-01-08 | 2021-05-25 | 北京工业大学 | Reusable high-viscosity liquid drop generating device based on surface acoustic waves |
| CN113351265A (en) * | 2021-05-26 | 2021-09-07 | 西安交通大学 | Micro-wire magnetic field-based micro-fluid magnetic mixing driving system and processing method |
| CN113996362A (en) * | 2021-12-03 | 2022-02-01 | 郑州轻工业大学 | Liquid drop fusion microfluidic device and method based on focusing acoustic surface regulation |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109967148A (en) * | 2019-04-24 | 2019-07-05 | 西安交通大学 | A kind of integrated form temperature control system suitable for surface acoustic wave fluid channel |
| CN111085281A (en) * | 2020-01-08 | 2020-05-01 | 西安交通大学 | Surface acoustic wave regulated high-flux micro-droplet generation device and method |
| CN111085281B (en) * | 2020-01-08 | 2021-05-14 | 西安交通大学 | Surface acoustic wave regulated high-flux micro-droplet generation device and method |
| CN112526777A (en) * | 2020-12-04 | 2021-03-19 | 西安交通大学 | Acousto-optic lens chip based on surface acoustic wave refractive index field virtual carving |
| CN112827518A (en) * | 2021-01-08 | 2021-05-25 | 北京工业大学 | Reusable high-viscosity liquid drop generating device based on surface acoustic waves |
| CN113351265A (en) * | 2021-05-26 | 2021-09-07 | 西安交通大学 | Micro-wire magnetic field-based micro-fluid magnetic mixing driving system and processing method |
| CN113351265B (en) * | 2021-05-26 | 2022-10-25 | 西安交通大学 | Processing method of micro-wire magnetic field-driven microfluid magnetic mixing system |
| CN113996362A (en) * | 2021-12-03 | 2022-02-01 | 郑州轻工业大学 | Liquid drop fusion microfluidic device and method based on focusing acoustic surface regulation |
| CN113996362B (en) * | 2021-12-03 | 2023-02-03 | 郑州轻工业大学 | Liquid drop fusion microfluidic device and method based on focusing surface acoustic wave regulation |
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Application publication date: 20190405 |