CN109967148A - A kind of integrated form temperature control system suitable for surface acoustic wave fluid channel - Google Patents
A kind of integrated form temperature control system suitable for surface acoustic wave fluid channel Download PDFInfo
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- CN109967148A CN109967148A CN201910332292.1A CN201910332292A CN109967148A CN 109967148 A CN109967148 A CN 109967148A CN 201910332292 A CN201910332292 A CN 201910332292A CN 109967148 A CN109967148 A CN 109967148A
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- fluid channel
- integrated form
- lithium niobate
- temperature control
- acoustic wave
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/18—Means for temperature control
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- General Health & Medical Sciences (AREA)
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- Chemical Kinetics & Catalysis (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Thermotherapy And Cooling Therapy Devices (AREA)
Abstract
A kind of integrated form temperature control system suitable for surface acoustic wave fluid channel, including rectangle lithium niobate base bottom, rectangle lithium niobate base is fitted with Peltier cooling module below bottom, rectangle lithium niobate base is vapor-deposited with focus type interdigital transducer at the upper side of bottom, integrated form thermometric thermal resistance is vapor-deposited on the rectangle lithium niobate base bottom of focus type interdigital transducer focal point, the top local deposits at the rectangle lithium niobate base bottom of integrated form thermometric thermal resistance side have a silica membrane, are bonded with Y type PDMS fluid channel by oxygen plasma surface modification on silica membrane；Promote the mixing of minute yardstick fluid in fluid channel using surface acoustic wave, the temperature of reaction solution and timely feedbacks to temperature control system in integrated form thermometric thermal resistance real-time detection fluid channel, be adjusted by temperature of the Peltier cooling module to reacting fluid；The present invention completes the micro- reaction of biochemical enzymatic of various temperature sensitivity, and integrated level height, good portability, sample requirement are few, and temperature control is precisely quick.
Description
Technical field
The invention belongs to technical field of micro-nano manufacture, and in particular to a kind of integrated form temperature suitable for surface acoustic wave fluid channel
Control system.
Background technique
With the continuous development of minute manufacturing technology, micromation, rapid, integrated of the people for various biochemical reactions
Change, the requirement of economization are higher and higher.Surface acoustic wave microfluidic system in minute manufacturing technology can integrated detection circuit, together
When complete mixing in biochemical reaction, reaction, detection etc. and links and realize intelligentized control method.Existing surface acoustic wave microfluidic system
The efficiency that reacting fluid microring array is mainly controlled by changing input voltage controls the process of biochemical reaction.But it improves
While input voltage, due to the fuel factor of surface acoustic wave, so that the temperature of reacting fluid gradually rises, the raising of temperature then can
The problems such as causing the activity of enzyme reduces (or even inactivation), cell cracking and protein denaturation, so as to cause biochemical anti-under minute yardstick
The process answered is out of hand.Therefore, how to realize that the minute yardstick fluid mixing under accurate temperature control is a problem of crucial importance,
The control mixed to minute yardstick fluid may be implemented in the prior art, but rarely has and carry out closed loop to the temperature of minute yardstick reacting fluid
Control.
Summary of the invention
In order to overcome the disadvantages of the above prior art, the purpose of the present invention is to provide one kind to be suitable for surface acoustic wave miniflow
The integrated form temperature control system in road may be implemented the minute yardstick fluid mixing under accurate temperature control, complete the biochemistry of various temperature sensitivity
The micro- reaction of enzymatic, integrated level height, good portability, sample requirement are few, and temperature control is precisely quick.
In order to achieve the above objectives, the present invention is realised by adopting the following technical scheme:
A kind of integrated form temperature control system suitable for surface acoustic wave fluid channel, including rectangle lithium niobate base bottom 1, rectangle niobic acid
The lower section of lithium substrate 1 is fitted with Peltier cooling module 6, and it is interdigital that the upper side at rectangle lithium niobate base bottom 1 is vapor-deposited with focus type
Energy converter 2 is vapor-deposited with integrated form thermometric thermal resistance 3 on the rectangle lithium niobate base bottom 1 of 2 focal point of focus type interdigital transducer, collects
The top local deposits at the rectangle lithium niobate base bottom 1 of 3 side of accepted way of doing sth thermometric thermal resistance have silica membrane 4, and silica is thin
Y type PDMS fluid channel 5 is bonded with by oxygen plasma surface modification on film 4；
The integrated form thermometric thermal resistance 3 be include an elongated metal wire structure 9, the both ends of metal wire structure 9
It is connected with thermometric electrode 10, metal wire structure 9 is located at 4 bottom of silica membrane.
1 material of rectangle lithium niobate base bottom is that 128 ° of Y cut lithium niobate piezoelectric monocrystal.
The focus type interdigital transducer 2 is by 8 groups of an arc-shaped interdigital transducer 7 and arc-shaped Bragg reflection grid
At, wherein arc-shaped interdigital transducer 7 is made of 10 pairs of fingers altogether, arc-shaped Bragg reflection grid 8 are made of 5 fingers altogether,
The aperture of arc-shaped interdigital transducer 7 is 10 millimeters, and center of circle angle is 90 degree.
The silica membrane 4 is the process deposits by PECVD at the upper surface of rectangle lithium niobate base bottom 1.
The Y type fluid channel that the PDMS polymer that the Y type PDMS fluid channel 5 solidifies overmolded for one piece is constituted, a length of 30
Millimeter, width are 10 millimeters, are highly 5 millimeters, and respectively there are the groove of 3 millimeters deeps in two sides, and the whole height of Y type fluid channel is 200 micro-
Rice, the width of two secondary fluid courses are 100 microns, and length is 5 millimeters；The width of sprue is 200 microns, and length is 16 microns.
The Y type PDMS fluid channel 5 is dumbbell shape, and the PDMS after being solidified using cutter model cutting is bonded to rectangle
1 center position of lithium niobate base bottom.
1 height of rectangle lithium niobate base bottom is 500 microns, focus type interdigital transducer 2 and integrated form thermometric thermoelectricity
Hindering 3 height is 100 nanometers, and the height of silica membrane 4 is 300 nanometers, and the height of Y type PDMS fluid channel 5 is 5 millimeters；Pa
The height of your patch cooling module 6 is 4 millimeters.
The metal wire structure 9 is 20 microns one wide, long 15 millimeters of double bending structures.
Compared with the existing technology, the beneficial effects of the present invention are: leading to two kinds of reaction solutions by syringe pump respectively when reacting
Enter Y type PDMS fluid channel 5, focus type interdigital transducer 2 is applied to gather through the amplified sinusoidal alternating voltage of power amplifier
The sound surface traveling wave that burnt type interdigital transducer 2 excites, which is radially propagated, converges at focal point, the surface acoustic wave radiation finally assembled
Enter Y type PDMS fluid channel 5 and cause acoustic streaming, to promote the mixing of two kinds of reaction solutions, and then is controlled by changing input voltage
The process of biochemical reaction processed.
The metal wire structure 9 of integrated form thermometric thermal resistance 3 of the invention is integrated in the lower section of Y type PDMS fluid channel 5, can be with
The temperature of reaction solution in real-time detection fluid channel is simultaneously timely feedbacked to temperature control system, eventually by being fitted in rectangle lithium niobate base
The temperature of reacting fluid is adjusted in the Peltier cooling module 6 of 1 lower section of bottom, closes to the temperature of minute yardstick reacting fluid
Ring control；Silica membrane 4 has effectively obstructed reaction solution and integrated form thermometric thermal resistance 3 simultaneously, there is Thermal conductivity
While, integrated form thermometric thermal resistance 3 is effectively prevented by reaction corrosion.
Present system integrated level height, good portability, sample requirement are few, and temperature controls precisely quick, Y type PDMS fluid channel
5 may be implemented continuous fluid reaction, can promote the biological enzymatic reaction of various temperature sensitivity.
Detailed description of the invention
Fig. 1 is three-dimensional structure view of the invention.
Fig. 2 is top view of the invention.
Fig. 3 is cross-sectional view of the invention.
Fig. 4 is thermometric thermal resistance top view of the invention.
Specific embodiment
Below in conjunction with attached drawing, the present invention is described in further detail:
Referring to FIG. 1, FIG. 2 and FIG. 3, a kind of integrated form temperature control system suitable for surface acoustic wave fluid channel, including rectangle niobium
Sour lithium substrate 1, the lower section at rectangle lithium niobate base bottom 1 are fitted with Peltier cooling module 6, the top one at rectangle lithium niobate base bottom 1
Side is vapor-deposited with focus type interdigital transducer 2, is vapor-deposited with collection on the rectangle lithium niobate base bottom 1 of 2 focal point of focus type interdigital transducer
The top local deposits of accepted way of doing sth thermometric thermal resistance 3, the rectangle lithium niobate base bottom 1 of 3 side of integrated form thermometric thermal resistance have titanium dioxide
Silicon thin film 4 is bonded with Y type PDMS fluid channel 5 by oxygen plasma surface modification on silica membrane 4；
Referring to Fig. 3 and Fig. 4, the integrated form thermometric thermal resistance 3 be include an elongated metal wire structure 9, metal
The both ends of cable architecture 9 and thermometric electrode 10 connect, and metal wire structure 9 is located at 4 bottom of silica membrane.
1 material of rectangle lithium niobate base bottom is that 128 ° of Y cut lithium niobate piezoelectric monocrystal.
Referring to Fig. 2, the focus type interdigital transducer 2 is by an arc-shaped interdigital transducer 7 and arc-shaped Prague
Reflecting grating 8 forms, wherein arc-shaped interdigital transducer 7 is made of 10 pairs of fingers altogether, arc-shaped Bragg reflection grid 8 are altogether by 5
Finger composition, the aperture of arc-shaped interdigital transducer 7 are 10 millimeters, and center of circle angle is 90 degree.
The silica membrane 4 is the process deposits by PECVD at the upper surface of rectangle lithium niobate base bottom 1.
The Y type fluid channel that the PDMS polymer that the Y type PDMS fluid channel 5 solidifies overmolded for one piece is constituted, a length of 30
Millimeter, width are 10 millimeters, are highly 5 millimeters, and respectively there are the groove of 3 millimeters deeps in two sides, and the whole height of Y type fluid channel is 200 micro-
Rice, the width of two secondary fluid courses are 100 microns, and length is 5 millimeters；The width of sprue is 200 microns, and length is 16 microns.
The Y type PDMS fluid channel 5 is dumbbell shape, PDMS (the PDMS prepolymer after being solidified using cutter model cutting
Mass ratio with curing agent is 10: 1), being bonded to 1 center position of rectangle lithium niobate base bottom.
1 height of rectangle lithium niobate base bottom is 500 microns, focus type interdigital transducer 2 and integrated form thermometric thermoelectricity
Hindering 3 height is 100 nanometers, and the height of silica membrane 4 is 300 nanometers, and the height of PDMS fluid channel 5 is 5 millimeters；Peltier
The height of cooling module 6 is 4 millimeters.
The metal wire structure 9 is 20 microns one wide, long 15 millimeters of double bending structures.
The operation principle of the present invention is that: two kinds of reaction solutions are each led by Y type PDMS fluid channel 5 by syringe pump, to poly-
Burnt type interdigital transducer 2 applies to excite through the amplified sinusoidal alternating voltage of power amplifier, focus type interdigital transducer 2
Sound surface traveling wave, which is radially propagated, converges at focal point, and the surface acoustic wave finally assembled, which is radiated, causes sound into Y type PDMS fluid channel 5
Stream to promote the mixing of two kinds of reaction solutions, and then controls the process of biochemical reaction by changing input voltage；With defeated
The raising for entering voltage, due to the fuel factor of surface acoustic wave, so that the temperature of reacting fluid gradually rises, thermometric thermal resistance 3 is integrated
In the lower section of Y type PDMS fluid channel 5, the thermometric thermal resistance 3 of metal wire structure 9 and the composition of thermometric electrode 10 can be with real-time detection Y
The temperature of reaction solution in type PDMS fluid channel 5 is simultaneously timely feedbacked to temperature control system, eventually by being fitted in rectangle lithium niobate base
The temperature of reacting fluid is adjusted in the Peltier cooling module 6 of 1 lower section of bottom.The invention system integrated level height, good portability,
Sample requirement is few, and temperature control is precisely quick, and continuous fluid reaction may be implemented in Y type PDMS fluid channel 5, can promote a variety of temperature
Spend sensitive biological enzymatic reaction.
The present invention causes miniflow effect to be integrated with by focus type interdigital transducer 2 using the sound of focus type sound surface traveling wave
Thermometric thermal resistance 3 and Y type PDMS fluid channel 5, can control the process of a variety of continuous fluid reactions, and temperature control system can supervise in real time
Reacting liquid temperature is surveyed and adjusted, guarantees that reaction carries out at a suitable temperature, which can promote the biology of various temperature sensitivity
Enzymatic reaction.The present invention uses minute manufacturing technique, substantially reduces equipment volume, the integrated level compared with existing traditional equipment
Height, good portability, energy saving, processing cost are low, sample requirement is few, and device takes external full fixed equipment completion mix, is anti-
It should be exported with signal, avoid traditional equipment because of the defect that equipment dependability caused by component movement reduces.
Claims (8)
1. a kind of integrated form temperature control system suitable for surface acoustic wave fluid channel, including rectangle lithium niobate base bottom (1), feature exists
In: it is fitted with below rectangle lithium niobate base bottom (1) Peltier cooling module (6), the upper side at rectangle lithium niobate base bottom (1)
It is vapor-deposited with focus type interdigital transducer (2), is deposited on the rectangle lithium niobate base bottom (1) of focus type interdigital transducer (2) focal point
There is integrated form thermometric thermal resistance (3), the top at the rectangle lithium niobate base bottom (1) of integrated form thermometric thermal resistance (3) side is locally heavy
Product has silica membrane (4), is bonded with Y type PDMS miniflow by oxygen plasma surface modification on silica membrane (4)
Road (5)；
The integrated form thermometric thermal resistance (3) includes an elongated metal wire structure (9), the both ends of metal wire structure (9)
It is connected with thermometric electrode (10), metal wire structure (9) is located at silica membrane (4) bottom.
2. a kind of integrated form temperature control system suitable for surface acoustic wave fluid channel according to claim 1, it is characterised in that:
Rectangle lithium niobate base bottom (1) material is that 128 ° of Y cut lithium niobate piezoelectric monocrystal.
3. a kind of integrated form temperature control system suitable for surface acoustic wave fluid channel according to claim 1, it is characterised in that:
The focus type interdigital transducer (2) is by an arc-shaped interdigital transducer (7) and arc-shaped Bragg reflection grid (8) group
At wherein arc-shaped interdigital transducer (7) is made of 10 pairs of fingers altogether, arc-shaped Bragg reflection grid (8) are altogether by 5 finger groups
At the aperture of arc-shaped interdigital transducer (7) is 10 millimeters, and center of circle angle is 90 degree.
4. a kind of integrated form temperature control system suitable for surface acoustic wave fluid channel according to claim 1, it is characterised in that:
The silica membrane (4) is the process deposits by PECVD at the upper surface of rectangle lithium niobate base bottom (1).
5. a kind of integrated form temperature control system suitable for surface acoustic wave fluid channel according to claim 1, it is characterised in that:
The Y type PDMS fluid channel (5) is the Y type fluid channel that one piece of PDMS polymer for solidifying overmolded is constituted, a length of 30 millimeters, wide
It is 10 millimeters, is highly 5 millimeters, respectively there is the groove of 3 millimeters deeps in two sides, and the whole height of Y type fluid channel is 200 microns, two
The width of secondary fluid course is 100 microns, and length is 5 millimeters；The width of sprue is 200 microns, and length is 16 microns.
6. a kind of integrated form temperature control system suitable for surface acoustic wave fluid channel according to claim 1, it is characterised in that:
The Y type PDMS fluid channel (5) is dumbbell shape, and the PDMS after being solidified using cutter model cutting is bonded to rectangle lithium niobate
Substrate (1) center position.
7. a kind of integrated form temperature control system suitable for surface acoustic wave fluid channel according to claim 1, it is characterised in that:
The rectangle lithium niobate base bottom (1) is highly 500 microns, focus type interdigital transducer (2) and integrated form thermometric thermal resistance (3)
Height is 100 nanometers, and the height of silica membrane (4) is 300 nanometers, and the height of Y type PDMS fluid channel (5) is 5 millimeters；Pa
The height of your patch cooling module (6) is 4 millimeters.
8. a kind of integrated form temperature control system suitable for surface acoustic wave fluid channel according to claim 1, it is characterised in that:
The metal wire structure (9) is 20 microns one wide, long 15 millimeters of double bending structures.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910332292.1A CN109967148B (en) | 2019-04-24 | 2019-04-24 | Integrated temperature control system suitable for surface acoustic wave micro-channel |
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| CN201910332292.1A CN109967148B (en) | 2019-04-24 | 2019-04-24 | Integrated temperature control system suitable for surface acoustic wave micro-channel |
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| CN109967148B CN109967148B (en) | 2020-08-04 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113996362A (en) * | 2021-12-03 | 2022-02-01 | 郑州轻工业大学 | Liquid drop fusion microfluidic device and method based on focusing acoustic surface regulation |
| CN117305102A (en) * | 2023-11-10 | 2023-12-29 | 中南大学 | Acoustic flow control device for sorting outer vesicles in plasma sample and use method thereof |
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| CN113996362A (en) * | 2021-12-03 | 2022-02-01 | 郑州轻工业大学 | Liquid drop fusion microfluidic device and method based on focusing acoustic surface regulation |
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