CN106076219B - It is a kind of to be applied to mixing, particle rich and the microfabricated chemical reactor device separated - Google Patents
It is a kind of to be applied to mixing, particle rich and the microfabricated chemical reactor device separated Download PDFInfo
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- CN106076219B CN106076219B CN201610407634.8A CN201610407634A CN106076219B CN 106076219 B CN106076219 B CN 106076219B CN 201610407634 A CN201610407634 A CN 201610407634A CN 106076219 B CN106076219 B CN 106076219B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00002—Chemical plants
- B01J2219/00004—Scale aspects
- B01J2219/00011—Laboratory-scale plants
- B01J2219/00013—Miniplants
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00801—Means to assemble
- B01J2219/0081—Plurality of modules
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00851—Additional features
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00873—Heat exchange
- B01J2219/0088—Peltier-type elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00889—Mixing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/0095—Control aspects
- B01J2219/00952—Sensing operations
- B01J2219/00954—Measured properties
- B01J2219/00961—Temperature
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Abstract
It is a kind of to be applied to mixing, particle rich and the microfabricated chemical reactor device separated, including circular-base, big interdigital transducer, lower diaphragm plate, small interdigital transducer group, upper diaphragm and structure of controlling temperature, wherein big interdigital transducer is sputtered in circular-base；Lower diaphragm plate is sputtered in circular-base and covers big interdigital transducer；Small interdigital transducer group is sputtered on barrier film；Upper diaphragm sputters on barrier film and covers small interdigital transducer group；Structure of controlling temperature is sputtered in upper diaphragm.The present invention can complete the mixing of reaction solution simultaneously, the enrichment of particle suitably facilitates other many microfabricated chemical reactors with the series reaction such as separating, while structure of controlling temperature can in real time monitor and adjust reacting liquid temperature, ensure that reaction is carried out at a suitable temperature.The invention equipment is simply portable, and for integrated level height, it is necessary to which sample is less, energy consumption is relatively low, and reaction efficiency is high, temperature control fast accurate, and reaction is open easy to operate and safeguards, is integrated with a variety of difference in functionalitys.
Description
Technical field
The invention belongs to technical field of micro-nano manufacture, is related to a kind of suitable for mixing, particle rich and the macro separated
Reaction member.
Background technology
With the continuous development of minute manufacturing technology, people are for being miniaturized of various reactions, rapid, integrated, warp
The requirement more and more higher of Jiization.Microfluidic system in minute manufacturing technology can integrated detection circuit, while complete as chemistry
Mix, react in reaction, detection etc. and realizes intelligentized control method at link.But existing microfluidic system relies primarily on different runners point
Stage is completed, and links are realized by different runners to be difficult to really integrate, and runner easily blocks, and is not easily cleaned maintenance,
It is with high costs.Promote reagent mixing and reaction mainly by mechanical oscillation at present, equipment is difficult to integrate, and efficiency is very when reagent is less
It is low.
The content of the invention
It is an object of the invention to provide one kind can integrate reagent mixing, reaction, detection or even particle rich with separating
Multi-functional to be applied to mixing, particle rich and the microfabricated chemical reactor device separated, the device has small volume, efficiency high, easy
It is integrated, can temperature control the characteristics of.
To reach above-mentioned purpose, the present invention, which adopts the following technical scheme that, to be achieved：
It is a kind of to be applied to mixing, particle rich and the microfabricated chemical reactor device separated, including circular-base, big interdigital transducing
Device, lower diaphragm plate, small interdigital transducer group, upper diaphragm and structure of controlling temperature, wherein big interdigital transducer is sputtered in circular-base；
Lower diaphragm plate is sputtered in circular-base and covers big interdigital transducer；Small interdigital transducer group is sputtered on barrier film；Upper diaphragm
Sputter on barrier film and cover small interdigital transducer group；Structure of controlling temperature is sputtered in upper diaphragm.
Further improve of the invention is that the circular-base material is piezoelectric lithium columbate crystal.
Further improve of the invention is that the big interdigital transducer is by the interdigital and circular reflecting grating group of a pair of involutes
Into the base circle diameter (BCD) of involute is 2 millimeters, and the center of circle of basic circle overlaps with the center of circle of circular-base, and involute expanded angle is
1080 degree, the periphery of involute is furnished with circular reflecting grating.
Further improve of the invention is that the lower diaphragm plate, lower diaphragm plate are silica membrane.
Of the invention further improve is that the circular-base highly is 500 μm, big interdigital transducer, small interdigital changes
Energy device group and the height of structure of controlling temperature are 50nm；Upper diaphragm and the height of lower diaphragm plate are 70nm.
Further improve of the invention is, if the small interdigital transducer group is changed by stem structure identical involute is interdigital
Energy device composition, the interdigital expanded angle of involute is 1080 degree, and the center of circle of the basic circle of involute is evenly distributed on basic circle, several
Involute is interdigital to being uniformly arranged, and the base radius of involute is set on demand.
Further improve of the invention is that the structure of controlling temperature is made up of Peltier and temperature detecting resistance, Peltier, thermometric
Resistance and basic circle are concentric circles.
Relative to prior art, the beneficial effects of the invention are as follows：During reaction, reaction solution is directly dropped in into device center, it is right
Big interdigital transducer and each interdigital fourth finger transducer of small interdigital transducer group apply the alternating voltage of corresponding frequencies respectively, respectively
Surface acoustic wave caused by individual interdigital transducer any point is all propagated along the tangential direction of oneself basic circle.In the work of big interdigital transducer
Rotated with lower drop around basic circle, on basic circle, they can be incited somebody to action in each fork value transducer basic circle center of circle of fork value transducer group
Different sized particles corresponding to the surface acoustic wave of respective different frequency are enriched in the basic circle of oneself.Temperature detecting resistance and Peltier group
Into temperature control system can ensure that reaction solution maintains suitable reaction temperature.
The temperature control system of temperature detecting resistance and Peltier composition of the present invention can ensure that reaction solution maintains suitable reaction temperature.
Only apply suitable frequency conversion alternating voltage to big interdigital transducer, drop rotates under surface acoustic wave excitation around basic circle, can be with
Realize particle rich, promote reagent mixing, reaction to carry out；If each interdigital transducer of small interdigital transducer group is applied again simultaneously
Add the alternating voltage of corresponding frequencies, the surface acoustic wave for the different frequency that each fork value transducing energy device is excited can be by corresponding to not
It is enriched to respectively in the basic circle of oneself with sized particles, realizes the separation of particle.
The invention equipment is simply portable, and for integrated level height, it is necessary to which sample is less, energy consumption is relatively low, and reaction efficiency is high, temperature control
Fast accurate, reaction is open easy to operate and safeguards, is integrated with a variety of difference in functionalitys.
The mixing of reaction solution, the enrichment of particle can be completed simultaneously with the series reaction such as separating using the present invention, simultaneously
It also is adapted for the microfabricated chemical reactor for promoting other many.
Brief description of the drawings
Fig. 1 is the sectional view of the present invention.
Fig. 2 is the top view of big interdigital transducer of the invention.
Fig. 3 is the top view of lower diaphragm plate of the present invention and small interdigital transducer group.
Fig. 4 is the view that structure of controlling temperature of the present invention is bowed.
In figure：1 is substrate, and 2 be big interdigital transducer, and 3 be lower diaphragm plate, and 4 be small interdigital transducer group, and 5 be upper diaphragm, 6
It is Peltier for structure of controlling temperature, 7,8 be temperature detecting resistance, and 9 be big interdigital transducer basic circle, and 10 be reflecting grating.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail.
Referring to Fig. 1, the present invention is applied to reagent mixing, particle rich and the open micro chemical reactor separated to be a kind of
Part, including circular-base 1, big interdigital transducer 2, lower diaphragm plate 3, small interdigital transducer group 4, upper diaphragm 5 and structure of controlling temperature 6,
Wherein big interdigital transducer 2 is sputtered in circular-base 1；Lower diaphragm plate 3 is sputtered in circular-base 1 and by big interdigital transducer 2
Covering；Small interdigital transducer group 4 is sputtered on barrier film 3；Upper diaphragm 5 sputters on barrier film 3 and covers small interdigital transducer group 4
Lid；Structure of controlling temperature 6 is sputtered in upper diaphragm 5.
The height of circular-base 1 is 500 μm, big interdigital transducer 2, small interdigital transducer group 4 and structure of controlling temperature 6
Highly it is 50nm；Upper diaphragm 5 and the height of lower diaphragm plate 3 are 70nm.
Referring to Fig. 2, the big interdigital transducer 2 is that a pair of the involutes sputtered in circular-base 1 are interdigital.It is interdigital greatly to change
Energy device 2 is made up of the interdigital and circular reflecting grating 10 of a pair of involutes, 9 a diameter of 2 millimeters of the basic circle of involute, the center of circle of basic circle 9
Overlapped with the center of circle of circular-base 1, involute expanded angle is 1080 degree, and the periphery of involute is furnished with circular reflecting grating 10.
Referring to Fig. 3, the small interdigital transducer group 4 is that the one group of involute sputtered on lower diaphragm plate 3 is interdigital right.It is small interdigital
If transducer group 4 is made up of stem structure identical involute interdigital transducer, the interdigital expanded angle of involute is 1080 degree, gradually
The center of circle of the basic circle to burst at the seams is evenly distributed on basic circle 9, and several involutes are interdigital to being uniformly arranged, and the base radius of involute is pressed
Demand is set.
Referring to Fig. 4, structure of controlling temperature 6 is made up of Peltier 7 and temperature detecting resistance 8, Peltier 7, temperature detecting resistance 8 and basic circle 9
For concentric circles.
Working method of the present invention is as follows：Reaction solution is dropped in the center of reaction member of the present invention, if only to big interdigital transducing
Device applies the frequency-changing AC voltage of certain frequency scope, because surface acoustic wave caused by interdigital transducer any point is all along from hexyl
Round tangential direction is propagated, and big interdigital transducer 2 excites surface acoustic wave to promote drop to be rotated around basic circle 9, can realize promotion
The mixing of reaction solution, by reaction solution particle rich to basic circle 9 and promote react carry out each function；If simultaneously to small fork
Each small interdigital transducer of finger transducer group 4 applies the alternating voltage of respective frequencies, and each small interdigital transducer can be by each
Different sized particles are enriched in the basic circle of oneself corresponding to the surface acoustic wave of different frequency, so as to realize different scale particle
Separation.Structure of controlling temperature 6 includes can in real time being monitored with the Peltier 7 and temperature detecting resistance 8 of heating and cooling and being adjusted reaction liquid temperature
Degree, ensure that reaction is carried out at a suitable temperature.
The present invention causes miniflow effect using the sound of surface acoustic wave, using involute characteristic using involute interdigital transducer as core
The heart, the mixing of reaction solution can be completed simultaneously, the enrichment of particle also is adapted for promoting other to be permitted with the series reaction such as separating
More microfabricated chemical reactors, structure of controlling temperature can in real time monitor and adjust reacting liquid temperature, ensure that reaction is entered at a suitable temperature
OK.The present invention uses micro-nano technology technique, substantially reduces equipment volume, and integrated level is high compared with existing legacy equipment, carries
Convenient, saving energy consumption, processing cost is low, needs sample few, while avoids biography using entirely fixed equipment during the course of the reaction
Equipment of uniting is because the defects of equipment dependability caused by part motion reduces.
Claims (6)
1. a kind of be applied to mixing, particle rich and the microfabricated chemical reactor device separated, it is characterised in that including circular-base
(1), big interdigital transducer (2), lower diaphragm plate (3), small interdigital transducer group (4), upper diaphragm (5) and structure of controlling temperature (6), wherein
Big interdigital transducer (2) is sputtered in circular-base (1)；Lower diaphragm plate (3) is sputtered in circular-base (1) and will big interdigital transducing
Device (2) covers；Small interdigital transducer group (4) is sputtered on barrier film (3)；Upper diaphragm (5) sputters on barrier film (3) and will be small interdigital
Transducer group (4) covers；Structure of controlling temperature (6) is sputtered in upper diaphragm (5)；
The big interdigital transducer (2) is made up of the interdigital and circular reflecting grating (10) of a pair of involutes, and the basic circle (9) of involute is straight
Footpath is 2 millimeters, and the center of circle of basic circle (9) overlaps with the center of circle of circular-base (1), and involute expanded angle is 1080 degree, involute
Periphery be furnished with circular reflecting grating (10).
It is 2. according to claim 1 a kind of suitable for mixing, particle rich and the microfabricated chemical reactor device separated, its feature
It is, circular-base (1) material is piezoelectric lithium columbate crystal.
It is 3. according to claim 1 a kind of suitable for mixing, particle rich and the microfabricated chemical reactor device separated, its feature
It is, the lower diaphragm plate (3), lower diaphragm plate (5) are silica membrane.
It is 4. according to claim 1 a kind of suitable for mixing, particle rich and the microfabricated chemical reactor device separated, its feature
It is, the circular-base (1) is highly 500 μm, big interdigital transducer (2), small interdigital transducer group (4) and structure of controlling temperature
(6) height is 50nm；Upper diaphragm (5) and the height of lower diaphragm plate (3) are 70nm.
It is 5. according to claim 1 a kind of suitable for mixing, particle rich and the microfabricated chemical reactor device separated, its feature
It is, the small interdigital transducer group (4) stem structure identical involute interdigital transducer if be made up of, the interdigital exhibition of involute
Angle of release degree is 1080 degree, and the center of circle of the basic circle of involute is evenly distributed on basic circle (9), and several involutes are interdigital to uniformly setting
Put, the base radius of involute is set on demand.
It is 6. according to claim 1 a kind of suitable for mixing, particle rich and the microfabricated chemical reactor device separated, its feature
It is, the structure of controlling temperature (6) is made up of Peltier (7) and temperature detecting resistance (8), Peltier (7), temperature detecting resistance (8) and base
Circle (9) is concentric circles.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610407634.8A CN106076219B (en) | 2016-06-12 | 2016-06-12 | It is a kind of to be applied to mixing, particle rich and the microfabricated chemical reactor device separated |
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| CN201610407634.8A CN106076219B (en) | 2016-06-12 | 2016-06-12 | It is a kind of to be applied to mixing, particle rich and the microfabricated chemical reactor device separated |
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| CN106076219B true CN106076219B (en) | 2017-12-15 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109967148A (en) * | 2019-04-24 | 2019-07-05 | 西安交通大学 | A kind of integrated form temperature control system suitable for surface acoustic wave fluid channel |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109781805B (en) * | 2018-12-21 | 2020-05-19 | 西安交通大学 | Surface acoustic wave micro-reaction system for improving electrochemical reaction efficiency of trace liquid |
| CN109781810B (en) * | 2019-02-26 | 2020-04-10 | 西安交通大学 | Array surface acoustic wave paper base microfluidic system for rapidly detecting concentration of heavy metal ions |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| EP2809428A4 (en) * | 2012-01-31 | 2015-11-04 | Penn State Res Found | Microfluidic manipulation and sorting of particles using tunable standing surface acoustic wave |
| CN103667051A (en) * | 2013-12-20 | 2014-03-26 | 河南省医药科学研究院 | Surface acoustic micro-fluidic chip for tumor cell separation |
| CN104928173B (en) * | 2015-05-26 | 2017-04-26 | 西安交通大学 | Three-dimensional integrated microchemical reaction device applicable to mixing and disruption of cells |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109967148A (en) * | 2019-04-24 | 2019-07-05 | 西安交通大学 | A kind of integrated form temperature control system suitable for surface acoustic wave fluid channel |
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Effective date of registration: 20201225 Address after: 214200 No.53, Xinguan East Road, Guanlin Town, Yixing City, Wuxi City, Jiangsu Province Patentee after: WUXI JIANGNAN CABLE Co.,Ltd. Address before: Beilin District Xianning West Road 710049, Shaanxi city of Xi'an province No. 28 Patentee before: XI'AN JIAOTONG University |