CN109967148B - Integrated temperature control system suitable for surface acoustic wave micro-channel - Google Patents
Integrated temperature control system suitable for surface acoustic wave micro-channel Download PDFInfo
- Publication number
- CN109967148B CN109967148B CN201910332292.1A CN201910332292A CN109967148B CN 109967148 B CN109967148 B CN 109967148B CN 201910332292 A CN201910332292 A CN 201910332292A CN 109967148 B CN109967148 B CN 109967148B
- Authority
- CN
- China
- Prior art keywords
- channel
- micro
- lithium niobate
- integrated temperature
- temperature control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/18—Means for temperature control
Abstract
An integrated temperature control system suitable for a surface acoustic wave micro-channel comprises a rectangular lithium niobate substrate, wherein a Peltier refrigerating element is attached to the lower portion of the rectangular lithium niobate substrate, a focusing interdigital transducer is evaporated on one side above the rectangular lithium niobate substrate, an integrated temperature measuring thermal resistor is evaporated on the rectangular lithium niobate substrate at the focus of the focusing interdigital transducer, a silicon dioxide film is locally deposited on the upper portion of the rectangular lithium niobate substrate on one side of the integrated temperature measuring thermal resistor, and a Y-type PDMS micro-channel is bonded on the silicon dioxide film through oxygen plasma surface modification; the acoustic surface wave is utilized to promote the mixing of micro-scale fluid in the micro-channel, the integrated temperature measuring thermal resistor detects the temperature of reaction liquid in the micro-channel in real time and feeds the temperature back to the temperature control system in time, and the Peltier refrigeration element is used for adjusting the temperature of the reaction fluid; the invention can complete a plurality of temperature-sensitive biochemical enzymatic micro-reactions, and has the advantages of high integration level, good portability, less sample requirement and accurate and rapid temperature control.
Description
Technical Field
The invention belongs to the technical field of micro-nano manufacturing, and particularly relates to an integrated temperature control system suitable for an acoustic surface wave micro-channel.
Background
With the continuous development of micro-nano manufacturing technology, people have higher and higher requirements on miniaturization, rapidity, integration and economy of various biochemical reactions. The surface acoustic wave microfluidic system in the micro-nano manufacturing technology can integrate a detection circuit, simultaneously complete mixing, reaction, detection and other links in biochemical reaction, and realize intelligent control. The existing surface acoustic wave microfluidic system mainly controls the efficiency of micro-mixing of reaction fluid by changing input voltage so as to control the process of biochemical reaction. However, when the input voltage is increased, the temperature of the reaction fluid is gradually increased due to the thermal effect of the surface acoustic wave, and the increase of the temperature causes the problems of enzyme activity reduction (even inactivation), cell lysis, protein denaturation and the like, so that the progress of the biochemical reaction under the microscale is out of control. Therefore, how to realize the micro-scale fluid mixing under accurate temperature control is an extremely important problem, and the prior art can realize the control of the micro-scale fluid mixing, but the closed-loop control of the temperature of the micro-scale reaction fluid is rarely carried out.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide an integrated temperature control system suitable for a surface acoustic wave micro-channel, which can realize micro-scale fluid mixing under accurate temperature control, complete multiple temperature-sensitive biochemical enzymatic micro-reactions, and has the advantages of high integration level, good portability, less sample requirement and accurate and rapid temperature control.
In order to achieve the purpose, the invention adopts the following technical scheme to realize the purpose:
an integrated temperature control system suitable for a surface acoustic wave micro-channel comprises a rectangular lithium niobate substrate 1, wherein a Peltier refrigerating element 6 is attached to the lower portion of the rectangular lithium niobate substrate 1, a focusing interdigital transducer 2 is evaporated on one side above the rectangular lithium niobate substrate 1, an integrated temperature measuring thermal resistor 3 is evaporated on the rectangular lithium niobate substrate 1 at the focus of the focusing interdigital transducer 2, a silicon dioxide film 4 is locally deposited on the upper portion of the rectangular lithium niobate substrate 1 on one side of the integrated temperature measuring thermal resistor 3, and a Y-type PDMS micro-channel 5 is bonded on the silicon dioxide film 4 through oxygen plasma surface modification;
the integrated temperature measuring thermal resistor 3 comprises a slender metal wire structure 9, two ends of the metal wire structure 9 are connected with temperature measuring electrodes 10, and the metal wire structure 9 is positioned at the bottom of the silicon dioxide film 4.
The rectangular lithium niobate substrate 1 is made of a 128-degree Y-cut lithium niobate piezoelectric single crystal.
The focusing interdigital transducer 2 is composed of an arc interdigital transducer 7 and an arc Bragg reflection grating 8, wherein the arc interdigital transducer 7 is composed of 10 pairs of fingers, the arc Bragg reflection grating 8 is composed of 5 fingers, the aperture of the arc interdigital transducer 7 is 10 millimeters, and the circle center angle is 90 degrees.
The silicon dioxide film 4 is deposited on the rectangular lithium niobate substrate 1 by a PECVD process.
The Y-shaped PDMS micro-channel 5 is a Y-shaped micro-channel formed by solidifying and overturning PDMS polymers, the length is 30 mm, the width is 10 mm, the height is 5 mm, grooves with the depth of 3 mm are respectively arranged on two sides of the Y-shaped micro-channel, the overall height of the Y-shaped micro-channel is 200 micrometers, the width of two secondary channels is 100 micrometers, and the length is 5 mm; the width of the main channel is 200 microns, and the length is 16 microns.
The Y-shaped PDMS micro-channel 5 is dumbbell-shaped, and PDMS after being solidified is cut by using a cutter model and bonded at the central position of the rectangular lithium niobate substrate 1.
The height of the rectangular lithium niobate substrate 1 is 500 micrometers, the heights of the focusing interdigital transducer 2 and the integrated temperature measurement thermal resistor 3 are 100 nanometers, the height of the silicon dioxide film 4 is 300 nanometers, and the height of the Y-shaped PDMS micro-channel 5 is 5 millimeters; the peltier cooling element 6 has a height of 4 mm.
The metal line structure 9 is a double-bending structure with the width of 20 micrometers and the length of 15 millimeters.
Compared with the prior art, the invention has the beneficial effects that: during reaction, two reaction liquids are respectively introduced into the Y-shaped PDMS micro-channel 5 through an injection pump, a sine alternating voltage amplified by a power amplifier is applied to the focusing interdigital transducer 2, a sound surface traveling wave excited by the focusing interdigital transducer 2 is transmitted and converged at a focus along a radial direction, and the finally converged sound surface traveling wave is radiated into the Y-shaped PDMS micro-channel 5 to cause sound flow, so that the mixing of the two reaction liquids is promoted, and the progress of biochemical reaction is controlled by changing the input voltage.
The metal wire structure 9 of the integrated temperature measuring thermal resistor 3 is integrated below a Y-shaped PDMS micro-channel 5, the temperature of reaction liquid in the micro-channel can be detected in real time and fed back to a temperature control system in time, and finally the temperature of the reaction fluid is regulated through a Peltier refrigerating element 6 attached below a rectangular lithium niobate substrate 1, and the closed-loop control is carried out on the temperature of the micro-scale reaction fluid; meanwhile, the silicon dioxide film 4 effectively separates the reaction liquid and the integrated temperature-measuring thermal resistor 3, and the integrated temperature-measuring thermal resistor 3 is effectively prevented from being corroded by the reaction liquid while the silicon dioxide film has good heat conductivity.
The system has high integration level, good portability, less sample requirement and accurate and rapid temperature control, and the Y-shaped PDMS micro-channel 5 can realize continuous fluid reaction and promote various temperature-sensitive biological enzymatic reactions.
Drawings
Fig. 1 is a three-dimensional structural view of the present invention.
Fig. 2 is a top view of the present invention.
Fig. 3 is a cross-sectional view of the present invention.
FIG. 4 is a top view of the thermometric thermal resistance of the present invention.
Detailed Description
The invention is described in further detail below with reference to the accompanying drawings:
referring to fig. 1, 2 and 3, an integrated temperature control system suitable for a surface acoustic wave micro channel comprises a rectangular lithium niobate substrate 1, a peltier refrigerating element 6 is attached to the lower portion of the rectangular lithium niobate substrate 1, a focusing interdigital transducer 2 is evaporated on one side above the rectangular lithium niobate substrate 1, an integrated temperature measuring thermal resistor 3 is evaporated on the rectangular lithium niobate substrate 1 at the focus of the focusing interdigital transducer 2, a silica film 4 is locally deposited on the upper portion of the rectangular lithium niobate substrate 1 on one side of the integrated temperature measuring thermal resistor 3, and a Y-type PDMS micro channel 5 is bonded on the silica film 4 through oxygen plasma surface modification;
referring to fig. 3 and 4, the integrated thermometric thermal resistor 3 includes an elongated metal line structure 9, two ends of the metal line structure 9 are connected to the thermometric electrodes 10, and the metal line structure 9 is located at the bottom of the silicon dioxide thin film 4.
The rectangular lithium niobate substrate 1 is made of a 128-degree Y-cut lithium niobate piezoelectric single crystal.
Referring to fig. 2, the focusing type interdigital transducer 2 comprises an arc interdigital transducer 7 and an arc bragg reflection grating 8, wherein the arc interdigital transducer 7 comprises 10 pairs of fingers, the arc bragg reflection grating 8 comprises 5 fingers, the aperture of the arc interdigital transducer 7 is 10 millimeters, and the circle center angle is 90 degrees.
The silicon dioxide film 4 is deposited on the rectangular lithium niobate substrate 1 by a PECVD process.
The Y-shaped PDMS micro-channel 5 is a Y-shaped micro-channel formed by solidifying and overturning PDMS polymers, the length is 30 mm, the width is 10 mm, the height is 5 mm, grooves with the depth of 3 mm are respectively arranged on two sides of the Y-shaped micro-channel, the overall height of the Y-shaped micro-channel is 200 micrometers, the width of two secondary channels is 100 micrometers, and the length is 5 mm; the width of the main channel is 200 microns, and the length is 16 microns.
The Y-shaped PDMS micro-channel 5 is dumbbell-shaped, and PDMS (PDMS prepolymer and curing agent with a mass ratio of 10: 1) after being cut and cured by using a cutter model is bonded at the central position of the rectangular lithium niobate substrate 1.
The height of the rectangular lithium niobate substrate 1 is 500 micrometers, the heights of the focusing interdigital transducer 2 and the integrated temperature measurement thermal resistor 3 are 100 nanometers, the height of the silicon dioxide film 4 is 300 nanometers, and the height of the PDMS micro-channel 5 is 5 millimeters; the peltier cooling element 6 has a height of 4 mm.
The metal line structure 9 is a double-bending structure with the width of 20 micrometers and the length of 15 millimeters.
The working principle of the invention is as follows: two reaction liquids are respectively introduced into a Y-shaped PDMS micro-channel 5 through an injection pump, sine alternating voltage amplified by a power amplifier is applied to a focusing type interdigital transducer 2, a sound surface traveling wave excited by the focusing type interdigital transducer 2 is transmitted and converged at a focus along a radial direction, and finally the converged sound surface traveling wave is radiated into the Y-shaped PDMS micro-channel 5 to cause sound flow, so that the mixing of the two reaction liquids is promoted, and the progress of biochemical reaction is controlled by changing input voltage; along with the improvement of input voltage, because the heat effect of surface acoustic wave for the temperature of reaction fluid rises gradually, temperature measurement thermal resistance 3 is integrated in the below of Y type PDMS microchannel 5, and temperature measurement thermal resistance 3 that metal wire structure 9 and temperature measurement electrode 10 constitute can real-time detection Y type PDMS microchannel 5 in the temperature of reaction liquid and in time feed back to temperature control system, adjusts the temperature of reaction fluid through laminating paler subsides refrigeration component 6 below rectangular lithium niobate base 1 at last. The system has high integration level, good portability, less sample requirement and accurate and rapid temperature control, and the Y-shaped PDMS micro-channel 5 can realize continuous fluid reaction and promote various temperature-sensitive biological enzymatic reactions.
The invention utilizes the sound-induced microflow effect of the focusing type sound surface traveling wave, integrates the temperature measuring thermal resistor 3 and the Y-shaped PDMS micro-channel 5 through the focusing type interdigital transducer 2, can control the reaction process of various continuous fluids, can monitor and adjust the temperature of the reaction liquid in real time by a temperature control system, ensures that the reaction is carried out at a proper temperature, and can promote various temperature-sensitive biological enzymatic reactions. The invention adopts a micro-nano manufacturing process, greatly reduces the volume of equipment, has high integration level, good portability, energy consumption saving, low processing cost and less sample requirement compared with the traditional equipment, adopts external full-fixed equipment to complete mixing, reaction and signal output, and avoids the defect of reduced equipment reliability caused by part movement of the traditional equipment.
Claims (8)
1. The utility model provides an integrated form temperature control system suitable for surface acoustic wave microchannel, includes rectangle lithium niobate base (1), its characterized in that: a Peltier refrigerating element (6) is attached to the lower portion of a rectangular lithium niobate substrate (1), a focusing interdigital transducer (2) is evaporated on one side above the rectangular lithium niobate substrate (1), the focusing interdigital transducer (2) is composed of an arc interdigital transducer (7) and an arc Bragg reflection grating (8), an integrated temperature measurement thermal resistor (3) is evaporated on the rectangular lithium niobate substrate (1) at the focus of the focusing interdigital transducer (2), a silicon dioxide film (4) is locally deposited on the upper portion of the rectangular lithium niobate substrate (1) on one side of the integrated temperature measurement thermal resistor (3), a Y-type PDMS micro-channel (5) is bonded on the silicon dioxide film (4) through oxygen plasma surface modification, and the Y-type PDMS micro-channel (5) is of a dumbbell type;
the integrated temperature measurement thermal resistor (3) comprises a slender metal wire structure (9), two ends of the metal wire structure (9) are connected with the temperature measurement electrodes (10), and the metal wire structure (9) is located at the bottom of the silicon dioxide film (4).
2. The integrated temperature control system for the micro-channel of surface acoustic wave according to claim 1, wherein: the rectangular lithium niobate substrate (1) is made of a 128-degree Y-cut lithium niobate piezoelectric single crystal.
3. The integrated temperature control system for the micro-channel of surface acoustic wave according to claim 1, wherein: the circular-arc interdigital transducer (7) consists of 10 pairs of fingers, the circular-arc Bragg reflecting grating (8) consists of 5 fingers, the aperture of the circular-arc interdigital transducer (7) is 10 millimeters, and the angle of the circle center is 90 degrees.
4. The integrated temperature control system for the micro-channel of surface acoustic wave according to claim 1, wherein: the silicon dioxide film (4) is deposited on the rectangular lithium niobate substrate (1) by a PECVD process.
5. The integrated temperature control system for the micro-channel of surface acoustic wave according to claim 1, wherein: the Y-shaped PDMS micro-channel (5) is a Y-shaped micro-channel formed by solidifying and overturning PDMS polymers, the length of the Y-shaped micro-channel is 30 mm, the width of the Y-shaped micro-channel is 10 mm, the height of the Y-shaped micro-channel is 5 mm, grooves with the depth of 3 mm are respectively arranged on two sides of the Y-shaped micro-channel, the overall height of the Y-shaped micro-channel is 200 micrometers, the width of two secondary channels is 100 micrometers, and the length of the two secondary channels is; the width of the main channel is 200 microns, and the length is 16 microns.
6. The integrated temperature control system for the micro-channel of surface acoustic wave according to claim 1, wherein: the Y-shaped PDMS micro flow channel (5) cuts the solidified PDMS by using a cutter model and is bonded at the central position of the rectangular lithium niobate substrate (1).
7. The integrated temperature control system for the micro-channel of surface acoustic wave according to claim 1, wherein: the height of the rectangular lithium niobate substrate (1) is 500 micrometers, the heights of the focusing interdigital transducer (2) and the integrated temperature measurement thermal resistor (3) are 100 nanometers, the height of the silicon dioxide film (4) is 300 nanometers, and the height of the Y-shaped PDMS micro-channel (5) is 5 millimeters; the peltier cooling element (6) has a height of 4 mm.
8. The integrated temperature control system for the micro-channel of surface acoustic wave according to claim 1, wherein: the metal wire structure (9) is a double-bending structure with the width of 20 micrometers and the length of 15 millimeters.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910332292.1A CN109967148B (en) | 2019-04-24 | 2019-04-24 | Integrated temperature control system suitable for surface acoustic wave micro-channel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910332292.1A CN109967148B (en) | 2019-04-24 | 2019-04-24 | Integrated temperature control system suitable for surface acoustic wave micro-channel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109967148A CN109967148A (en) | 2019-07-05 |
| CN109967148B true CN109967148B (en) | 2020-08-04 |
Family
ID=67085912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910332292.1A Active CN109967148B (en) | 2019-04-24 | 2019-04-24 | Integrated temperature control system suitable for surface acoustic wave micro-channel |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109967148B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116273218A (en) * | 2021-12-03 | 2023-06-23 | 郑州轻工业大学 | Liquid drop fusion microfluidic method based on focused surface acoustic wave regulation and control liquid drop fusion microfluidic device |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4689704B2 (en) * | 2008-07-23 | 2011-05-25 | 日本電波工業株式会社 | Piezoelectric component and manufacturing method thereof |
| JPWO2010032712A1 (en) * | 2008-09-20 | 2012-02-09 | 国立大学法人長岡技術科学大学 | Microreactor |
| WO2016026005A1 (en) * | 2014-08-22 | 2016-02-25 | Rmit University | A chemical biochemical or biological analysis system utlizing luminescent detection |
| JP6705243B2 (en) * | 2016-03-25 | 2020-06-03 | セイコーエプソン株式会社 | Oscillator, electronic device and mobile unit |
| CN106076219B (en) * | 2016-06-12 | 2017-12-15 | 西安交通大学 | It is a kind of to be applied to mixing, particle rich and the microfabricated chemical reactor device separated |
| GB201617188D0 (en) * | 2016-10-10 | 2016-11-23 | University Court Of The University Of Glasgow The | Fragmentation using surface acoustic waves |
| CN207423635U (en) * | 2017-11-22 | 2018-05-29 | 苏州慧闻纳米科技有限公司 | A kind of micro-heater and gas sensor |
| CN109569392A (en) * | 2018-12-21 | 2019-04-05 | 北京工业大学 | A kind of active micro-mixer of Y type based on surface acoustic wave |
-
2019
- 2019-04-24 CN CN201910332292.1A patent/CN109967148B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN109967148A (en) | 2019-07-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109012769B (en) | Micro-fluidic liquid drop generation device and method based on surface acoustic wave | |
| US20190366333A1 (en) | Electro-wetting-based microfluidic droplet positioning system and method | |
| ES2776524T3 (en) | Fluid apparatus for manipulation of surface acoustic waves of fluid samples, use of fluid apparatus and process for the manufacture of fluid apparatus | |
| CN103585943A (en) | Micro-reactor suitable for micro-liquid mixing and biochemical reaction and manufacturing method thereof | |
| Evander et al. | Acoustophoresis in wet-etched glass chips | |
| CN101301990A (en) | Sonic surface wave microfluid driver for chip lab and manufacturing method thereof | |
| CN111085281B (en) | Surface acoustic wave regulated high-flux micro-droplet generation device and method | |
| CN109967148B (en) | Integrated temperature control system suitable for surface acoustic wave micro-channel | |
| EP2179279A1 (en) | Device for controlling fluid motion into micro/nanochannels by means of surface acoustic waves | |
| CN108405004B (en) | Liquid drop generation control method and system thereof | |
| CN102896007A (en) | Microfluidic control element and preparation method thereof | |
| CN110605147B (en) | Liquid crystal-based temperature control micro valve and single-stage and multi-stage control system thereof | |
| CN107824105B (en) | Micro mixer capable of adjusting solution concentration gradient based on moving bubbles | |
| CN102510278A (en) | Paper-based microfluid switch with acoustic surface wave as energy source | |
| CN106824315B (en) | The device and method of micro- liquid heating in a kind of detection zone of array chip | |
| CN104928173B (en) | Three-dimensional integrated microchemical reaction device applicable to mixing and disruption of cells | |
| CN208407027U (en) | A kind of drop formation control system | |
| US20240084369A1 (en) | Digital microfluidic apparatus and driving method therefor | |
| CN104960195A (en) | Joint structure used for flow casting control and weld stopping control of POCT chip product ultrasonic welding | |
| Hu et al. | Design and evaluation of three-dimensional zigzag chaotic micromixers for biochemical applications | |
| CN109781805B (en) | Surface acoustic wave micro-reaction system for improving electrochemical reaction efficiency of trace liquid | |
| CN109174426B (en) | Particle sorting device and method for sorting particles in liquid | |
| CN102419323A (en) | Device suitable for minim liquid mixed chemiluminescence reaction | |
| CN113996362B (en) | Liquid drop fusion microfluidic device and method based on focusing surface acoustic wave regulation | |
| CN110841731B (en) | Acoustic surface wave micro-fluidic device for particle separation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |