CN109967148B - Integrated temperature control system suitable for surface acoustic wave micro-channel - Google Patents

Integrated temperature control system suitable for surface acoustic wave micro-channel Download PDF

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CN109967148B
CN109967148B CN201910332292.1A CN201910332292A CN109967148B CN 109967148 B CN109967148 B CN 109967148B CN 201910332292 A CN201910332292 A CN 201910332292A CN 109967148 B CN109967148 B CN 109967148B
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lithium niobate
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temperature control
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CN109967148A (en
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王朝晖
白橙
郑腾飞
刘玥
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Xian Jiaotong University
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Abstract

An integrated temperature control system suitable for a surface acoustic wave micro-channel comprises a rectangular lithium niobate substrate, wherein a Peltier refrigerating element is attached to the lower portion of the rectangular lithium niobate substrate, a focusing interdigital transducer is evaporated on one side above the rectangular lithium niobate substrate, an integrated temperature measuring thermal resistor is evaporated on the rectangular lithium niobate substrate at the focus of the focusing interdigital transducer, a silicon dioxide film is locally deposited on the upper portion of the rectangular lithium niobate substrate on one side of the integrated temperature measuring thermal resistor, and a Y-type PDMS micro-channel is bonded on the silicon dioxide film through oxygen plasma surface modification; the acoustic surface wave is utilized to promote the mixing of micro-scale fluid in the micro-channel, the integrated temperature measuring thermal resistor detects the temperature of reaction liquid in the micro-channel in real time and feeds the temperature back to the temperature control system in time, and the Peltier refrigeration element is used for adjusting the temperature of the reaction fluid; the invention can complete a plurality of temperature-sensitive biochemical enzymatic micro-reactions, and has the advantages of high integration level, good portability, less sample requirement and accurate and rapid temperature control.

Description

一种适用于声表面波微流道的集成式温控系统An integrated temperature control system suitable for surface acoustic wave microchannels

技术领域technical field

本发明属于微纳制造技术领域，具体涉及一种适用于声表面波微流道的集成式温控系统。The invention belongs to the technical field of micro-nano manufacturing, and in particular relates to an integrated temperature control system suitable for surface acoustic wave micro flow channels.

背景技术Background technique

随着微纳制造技术的不断发展，人们对于各种生化反应的微型化、快速化、集成化、经济化的要求越来越高。微纳制造技术中的声表面波微流控系统能够集成检测电路，同时完成生化反应中混合、反应、检测等环节并实现智能化控制。现有的声表面波微流控系统主要通过改变输入电压来控制反应流体微混合的效率进而控制生化反应的进程。但是提高输入电压的同时，由于声表面波的热效应，使得反应流体的温度逐渐升高，温度的升高则会引起酶的活性降低(甚至失活)，细胞裂解和蛋白质变性等问题，从而导致微尺度下生化反应的进程失去控制。因此，如何实现精准温控下的微尺度流体混合是一个极其重要的问题，现有技术可以实现对微尺度流体混合的控制，但是鲜有对微尺度反应流体的温度进行闭环控制。With the continuous development of micro-nano manufacturing technology, people's requirements for the miniaturization, rapidity, integration and economy of various biochemical reactions are getting higher and higher. The surface acoustic wave microfluidic system in the micro-nano manufacturing technology can integrate the detection circuit, and at the same time complete the mixing, reaction, detection and other links in the biochemical reaction and realize intelligent control. The existing surface acoustic wave microfluidic system mainly controls the efficiency of the micro-mixing of the reaction fluid by changing the input voltage and then controls the process of the biochemical reaction. However, while increasing the input voltage, due to the thermal effect of the surface acoustic wave, the temperature of the reaction fluid gradually increases, and the increase in temperature will cause the enzyme activity to decrease (or even inactivation), cell lysis and protein denaturation and other problems, resulting in The progression of biochemical reactions at the microscale is out of control. Therefore, how to realize micro-scale fluid mixing under precise temperature control is an extremely important issue. Existing technologies can realize the control of micro-scale fluid mixing, but there are few closed-loop control of the temperature of micro-scale reactive fluids.

发明内容SUMMARY OF THE INVENTION

为了克服上述现有技术的缺点，本发明的目的在于提供一种适用于声表面波微流道的集成式温控系统，可以实现精准温控下的微尺度流体混合，完成多种温度敏感的生化酶促微反应，集成度高、便携性好、样本需求少，温度控制精准快速。In order to overcome the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide an integrated temperature control system suitable for surface acoustic wave micro-channels, which can realize micro-scale fluid mixing under precise temperature control, and complete various temperature-sensitive Biochemical enzymatic microreaction, high integration, good portability, less sample requirements, accurate and fast temperature control.

为达到上述目的，本发明采用如下技术方案予以实现：To achieve the above object, the present invention adopts the following technical solutions to be realized:

一种适用于声表面波微流道的集成式温控系统，包括矩形铌酸锂基底1，矩形铌酸锂基底1的下方贴合有帕尔贴制冷元件6，矩形铌酸锂基底1的上方一侧蒸镀有聚焦型叉指换能器2，聚焦型叉指换能器2焦点处的矩形铌酸锂基底1上蒸镀有集成式测温热电阻3，集成式测温热电阻3一侧的矩形铌酸锂基底1的上方局部沉积有二氧化硅薄膜4，二氧化硅薄膜4上通过氧等离子体表面改性键合有Y型PDMS微流道5；An integrated temperature control system suitable for surface acoustic wave microchannels, comprising a rectangular lithium niobate substrate 1, a Peltier refrigeration element 6 attached to the bottom of the rectangular lithium niobate substrate 1, and a rectangular lithium niobate substrate 1. A focusing interdigital transducer 2 is evaporated on the upper side, and an integrated temperature measuring thermistor 3 is evaporated on the rectangular lithium niobate substrate 1 at the focus of the focusing interdigital transducer 2. The integrated temperature measuring thermistor 3. A silicon dioxide film 4 is locally deposited above the rectangular lithium niobate substrate 1 on one side, and a Y-type PDMS microchannel 5 is bonded on the silicon dioxide film 4 through oxygen plasma surface modification;

所述的集成式测温热电阻3是包括一条细长的金属线结构9，金属线结构9的两端和测温电极10连接，金属线结构9位于二氧化硅薄膜4底部。The integrated temperature measuring thermistor 3 includes an elongated metal wire structure 9 , two ends of the metal wire structure 9 are connected to the temperature measuring electrodes 10 , and the metal wire structure 9 is located at the bottom of the silicon dioxide film 4 .

所述的矩形铌酸锂基底1材质为128°Y切铌酸锂压电单晶体。The material of the rectangular lithium niobate substrate 1 is 128°Y-cut lithium niobate piezoelectric single crystal.

所述的聚焦型叉指换能器2由一个圆弧形叉指换能器7和圆弧形布拉格反射栅8组成，其中圆弧形叉指换能器7共由10对指条组成，圆弧形布拉格反射栅8共由5条指条组成，圆弧形叉指换能器7的孔径为10毫米，圆心角度为90度。The focusing interdigital transducer 2 is composed of a circular arc interdigital transducer 7 and a circular arc Bragg reflection grating 8, wherein the circular arc interdigital transducer 7 is composed of 10 pairs of finger bars. The arc-shaped Bragg reflection grating 8 is composed of 5 finger bars in total. The arc-shaped interdigital transducer 7 has an aperture of 10 mm and a central angle of 90 degrees.

所述的二氧化硅薄膜4是由PECVD的工艺沉积在矩形铌酸锂基底1的上面。The silicon dioxide film 4 is deposited on the rectangular lithium niobate substrate 1 by the PECVD process.

所述的Y型PDMS微流道5为一块固化翻模的PDMS聚合物构成的Y型微流道，长为30毫米，宽为10毫米，高度为5毫米，两侧各有3毫米深的凹槽，Y型微流道的整体高度为200微米，两个次流道的宽度为100微米，长度为5毫米；主流道的宽度为200微米，长度为16微米。The Y-shaped PDMS micro-channel 5 is a Y-shaped micro-channel composed of a piece of PDMS polymer that has been cured and turned over. The length is 30 mm, the width is 10 mm, and the height is 5 mm. For the groove, the overall height of the Y-shaped microchannel is 200 micrometers, the width of the two secondary channels is 100 micrometers, and the length is 5 mm; the width of the main channel is 200 micrometers and the length is 16 micrometers.

所述的Y型PDMS微流道5为哑铃型，使用刀具模型切割固化后的PDMS，键合于矩形铌酸锂基底1中心位置处。The Y-shaped PDMS micro-channel 5 is a dumbbell shape, and the cured PDMS is cut by a cutter model and bonded to the center of the rectangular lithium niobate substrate 1 .

所述的矩形铌酸锂基底1高度为500微米，聚焦型叉指换能器2和集成式测温热电阻3高度为100纳米，二氧化硅薄膜4的高度为300纳米，Y型PDMS微流道5的高度为5毫米；帕尔贴制冷元件6的高度为4毫米。The height of the rectangular lithium niobate substrate 1 is 500 microns, the height of the focusing interdigital transducer 2 and the integrated temperature measuring thermal resistance 3 is 100 nanometers, the height of the silicon dioxide film 4 is 300 nanometers, and the height of the Y-type PDMS micro The height of the flow channel 5 is 5 mm; the height of the Peltier refrigeration element 6 is 4 mm.

所述的金属线结构9是一个宽20微米，长15毫米的双弯折结构。The metal wire structure 9 is a double-bent structure with a width of 20 microns and a length of 15 mm.

相对于现有技术，本发明的有益效果是：反应时，将两种反应液分别通过注射泵通入Y型PDMS微流道5，对聚焦型叉指换能器2施加以经功率放大器放大后的正弦交变电压，聚焦型叉指换能器2激发的声表面行波沿径向传播汇聚于焦点处，最终聚集的声表面波辐射入Y型PDMS微流道5引起声流，从而促进了两种反应液的混合，进而通过改变输入电压来控制生化反应的进程。Compared with the prior art, the beneficial effect of the present invention is: during the reaction, the two reaction solutions are respectively passed into the Y-type PDMS micro-channel 5 through a syringe pump, and the focusing interdigital transducer 2 is applied to be amplified by a power amplifier. After the sinusoidal alternating voltage, the surface acoustic traveling wave excited by the focusing interdigital transducer 2 propagates along the radial direction and converges at the focal point, and the finally collected surface acoustic wave is radiated into the Y-shaped PDMS microchannel 5 to cause acoustic flow, thereby The mixing of the two reaction solutions is promoted, and the progress of the biochemical reaction is controlled by changing the input voltage.

本发明的集成式测温热电阻3的金属线结构9集成在Y型PDMS微流道5的下方，可以实时检测微流道中的反应液的温度并及时反馈给温控系统，最终通过贴合在矩形铌酸锂基底1下方的帕尔贴制冷元件6对反应流体的温度进行调节，对微尺度反应流体的温度进行闭环控制；同时二氧化硅薄膜4有效的阻隔了反应液与集成式测温热电阻3，有良好导热性能的同时，有效地防止集成式测温热电阻3被反应液腐蚀。The metal wire structure 9 of the integrated temperature measuring thermal resistance 3 of the present invention is integrated under the Y-shaped PDMS microchannel 5, which can detect the temperature of the reaction liquid in the microchannel in real time and feed it back to the temperature control system in time. The Peltier refrigeration element 6 under the rectangular lithium niobate substrate 1 adjusts the temperature of the reaction fluid and performs closed-loop control of the temperature of the micro-scale reaction fluid; at the same time, the silicon dioxide film 4 effectively blocks the reaction solution and the integrated measurement The thermal resistance 3 has good thermal conductivity and can effectively prevent the integrated temperature measuring thermal resistance 3 from being corroded by the reaction liquid.

本发明系统集成度高、便携性好、样本需求少，温度控制精准快速，Y型PDMS微流道5可以实现连续流体反应，能够促进多种温度敏感的生物酶促反应。The system of the invention has high integration, good portability, less sample requirements, accurate and fast temperature control, and the Y-shaped PDMS microchannel 5 can realize continuous fluid reaction and can promote various temperature-sensitive biological enzymatic reactions.

附图说明Description of drawings

图1是本发明的三维结构视图。FIG. 1 is a three-dimensional structural view of the present invention.

图2是本发明的俯视图。Figure 2 is a plan view of the present invention.

图3是本发明的剖视图。FIG. 3 is a cross-sectional view of the present invention.

图4是本发明的测温热电阻俯视图。FIG. 4 is a top view of the temperature measuring thermal resistance of the present invention.

具体实施方式Detailed ways

以下结合附图对本发明做进一步的详细说明：Below in conjunction with accompanying drawing, the present invention is described in further detail:

参照图1、图2和图3，一种适用于声表面波微流道的集成式温控系统，包括矩形铌酸锂基底1，矩形铌酸锂基底1的下方贴合有帕尔贴制冷元件6，矩形铌酸锂基底1的上方一侧蒸镀有聚焦型叉指换能器2，聚焦型叉指换能器2焦点处的矩形铌酸锂基底1上蒸镀有集成式测温热电阻3，集成式测温热电阻3一侧的矩形铌酸锂基底1的上方局部沉积有二氧化硅薄膜4，二氧化硅薄膜4上通过氧等离子体表面改性键合有Y型PDMS微流道5；Referring to Figure 1, Figure 2 and Figure 3, an integrated temperature control system suitable for surface acoustic wave microchannels includes a rectangular lithium niobate substrate 1, and a Peltier refrigeration is attached to the bottom of the rectangular lithium niobate substrate 1 Element 6, a focusing interdigital transducer 2 is evaporated on the upper side of the rectangular lithium niobate substrate 1, and an integrated temperature measurement is evaporated on the rectangular lithium niobate substrate 1 at the focus of the focusing interdigital transducer 2 Thermal resistance 3, a silicon dioxide film 4 is locally deposited on the top of the rectangular lithium niobate substrate 1 on one side of the integrated temperature measuring thermal resistance 3, and Y-type PDMS is bonded on the silicon dioxide film 4 through oxygen plasma surface modification microchannel 5;

参照图3和图4，所述的集成式测温热电阻3是包括一条细长的金属线结构9，金属线结构9的两端和测温电极10连接，金属线结构9位于二氧化硅薄膜4底部。3 and 4, the integrated temperature measuring thermal resistance 3 includes an elongated metal wire structure 9, two ends of the metal wire structure 9 are connected to the temperature measuring electrodes 10, and the metal wire structure 9 is located in the silicon dioxide Film 4 bottom.

所述的矩形铌酸锂基底1材质为128°Y切铌酸锂压电单晶体。The material of the rectangular lithium niobate substrate 1 is 128°Y-cut lithium niobate piezoelectric single crystal.

参照图2，所述的聚焦型叉指换能器2由一个圆弧形叉指换能器7和圆弧形布拉格反射栅8组成，其中圆弧形叉指换能器7共由10对指条组成，圆弧形布拉格反射栅8共由5条指条组成，圆弧形叉指换能器7的孔径为10毫米，圆心角度为90度。Referring to FIG. 2 , the focusing interdigital transducer 2 is composed of a circular arc interdigital transducer 7 and a circular arc Bragg reflection grating 8 , wherein the circular arc interdigital transducer 7 consists of 10 pairs in total It consists of finger bars. The arc-shaped Bragg reflection grating 8 is composed of 5 finger bars. The aperture of the arc-shaped interdigital transducer 7 is 10 mm, and the center angle is 90 degrees.

所述的二氧化硅薄膜4是由PECVD的工艺沉积在矩形铌酸锂基底1的上面。The silicon dioxide film 4 is deposited on the rectangular lithium niobate substrate 1 by the PECVD process.

所述的Y型PDMS微流道5为一块固化翻模的PDMS聚合物构成的Y型微流道，长为30毫米，宽为10毫米，高度为5毫米，两侧各有3毫米深的凹槽，Y型微流道的整体高度为200微米，两个次流道的宽度为100微米，长度为5毫米；主流道的宽度为200微米，长度为16微米。The Y-shaped PDMS micro-channel 5 is a Y-shaped micro-channel composed of a piece of PDMS polymer that has been cured and turned over. The length is 30 mm, the width is 10 mm, and the height is 5 mm. For the groove, the overall height of the Y-shaped microchannel is 200 micrometers, the width of the two secondary channels is 100 micrometers, and the length is 5 mm; the width of the main channel is 200 micrometers and the length is 16 micrometers.

所述的Y型PDMS微流道5为哑铃型，使用刀具模型切割固化后的PDMS(PDMS预聚物和固化剂的质量比为10∶1)，键合于矩形铌酸锂基底1中心位置处。The Y-shaped PDMS microchannel 5 is a dumbbell-shaped, and the cured PDMS is cut with a cutter model (the mass ratio of PDMS prepolymer and curing agent is 10:1), and is bonded to the center position of the rectangular lithium niobate substrate 1 place.

所述的矩形铌酸锂基底1高度为500微米，聚焦型叉指换能器2和集成式测温热电阻3高度为100纳米，二氧化硅薄膜4的高度为300纳米，PDMS微流道5的高度为5毫米；帕尔贴制冷元件6的高度为4毫米。The height of the rectangular lithium niobate substrate 1 is 500 microns, the height of the focusing interdigital transducer 2 and the integrated temperature measuring thermal resistance 3 is 100 nanometers, the height of the silicon dioxide film 4 is 300 nanometers, and the PDMS microchannel The height of 5 is 5 mm; the height of Peltier refrigeration element 6 is 4 mm.

所述的金属线结构9是一个宽20微米，长15毫米的双弯折结构。The metal wire structure 9 is a double-bent structure with a width of 20 microns and a length of 15 mm.

本发明的工作原理为：通过注射泵将两种反应液分别通入Y型PDMS微流道5，对聚焦型叉指换能器2施加以经功率放大器放大后的正弦交变电压，聚焦型叉指换能器2激发的声表面行波沿径向传播汇聚于焦点处，最终聚集的声表面波辐射入Y型PDMS微流道5引起声流，从而促进了两种反应液的混合，进而通过改变输入电压来控制生化反应的进程；随着输入电压的提高，由于声表面波的热效应，使得反应流体的温度逐渐升高，测温热电阻3集成在Y型PDMS微流道5的下方，金属线结构9和测温电极10构成的测温热电阻3可以实时检测Y型PDMS微流道5中的反应液的温度并及时反馈给温控系统，最终通过贴合在矩形铌酸锂基底1下方的帕尔贴制冷元件6对反应流体的温度进行调节。该发明系统集成度高、便携性好、样本需求少，温度控制精准快速，Y型PDMS微流道5可以实现连续流体反应，能够促进多种温度敏感的生物酶促反应。The working principle of the present invention is as follows: the two reaction solutions are respectively introduced into the Y-type PDMS micro-channel 5 through a syringe pump, and a sinusoidal alternating voltage amplified by a power amplifier is applied to the focusing-type interdigital transducer 2, and the focusing-type The SAW excited by the interdigital transducer 2 propagates in the radial direction and converges at the focal point, and the finally collected SAW radiates into the Y-shaped PDMS microchannel 5 to cause acoustic flow, thereby promoting the mixing of the two reaction solutions. Then, the process of the biochemical reaction is controlled by changing the input voltage; with the increase of the input voltage, the temperature of the reaction fluid gradually increases due to the thermal effect of the surface acoustic wave, and the temperature measuring thermal resistance 3 is integrated in the Y-type PDMS microchannel 5. Below, the temperature measuring thermal resistance 3 formed by the metal wire structure 9 and the temperature measuring electrode 10 can detect the temperature of the reaction solution in the Y-shaped PDMS microchannel 5 in real time and feed it back to the temperature control system in time. The Peltier refrigeration element 6 under the lithium substrate 1 regulates the temperature of the reaction fluid. The system of the invention has high integration, good portability, less sample requirements, and accurate and fast temperature control. The Y-shaped PDMS microchannel 5 can realize continuous fluid reaction and can promote various temperature-sensitive biological enzymatic reactions.

本发明利用聚焦型声表面行波的声致微流效应，通过聚焦型叉指换能器2，集成了测温热电阻3和Y型PDMS微流道5，能够控制多种连续流体反应的进程，温控系统可以实时监测并调整反应液温度，保证反应在适宜的温度下进行，该系统可促进多种温度敏感的生物酶促反应。本发明采用微纳制造工艺，大大减小了设备体积，与现有传统设备相比集成度高、便携性好、节约能耗、加工成本低、样本需求少，器件采取外部全固定设备完成混合、反应和信号输出，避免了传统设备因为部件运动造成的设备可靠性降低的缺陷。The present invention utilizes the acoustically induced microfluidic effect of the focused surface acoustic traveling wave, integrates the temperature measuring thermal resistance 3 and the Y-type PDMS microfluidic channel 5 through the focused interdigital transducer 2, and can control the flow of various continuous fluid reactions. The temperature control system can monitor and adjust the temperature of the reaction solution in real time to ensure that the reaction is carried out at a suitable temperature. The system can promote a variety of temperature-sensitive biological enzymatic reactions. Compared with the existing traditional equipment, the invention adopts the micro-nano manufacturing process, which greatly reduces the volume of the equipment. Compared with the existing traditional equipment, the invention has high integration, good portability, energy saving, low processing cost and less sample demand. The device adopts external fully fixed equipment to complete mixing , response and signal output, avoiding the defect of traditional equipment that reduces equipment reliability due to component movement.

Claims (8)

1.一种适用于声表面波微流道的集成式温控系统，包括矩形铌酸锂基底(1)，其特征在于：矩形铌酸锂基底(1)的下方贴合有帕尔贴制冷元件(6)，矩形铌酸锂基底(1)的上方一侧蒸镀有聚焦型叉指换能器(2)，聚焦型叉指换能器(2)由一个圆弧形叉指换能器(7)和圆弧形布拉格反射栅(8)组成，聚焦型叉指换能器(2)焦点处的矩形铌酸锂基底(1)上蒸镀有集成式测温热电阻(3)，集成式测温热电阻(3)一侧的矩形铌酸锂基底(1)的上方局部沉积有二氧化硅薄膜(4)，二氧化硅薄膜(4)上通过氧等离子体表面改性键合有Y型PDMS微流道(5)，所述的Y型PDMS微流道(5)为哑铃型；1. an integrated temperature control system suitable for a surface acoustic wave microchannel, comprising a rectangular lithium niobate substrate (1), characterized in that: the bottom of the rectangular lithium niobate substrate (1) is fitted with Peltier refrigeration In the element (6), a focusing interdigital transducer (2) is vapor-deposited on the upper side of the rectangular lithium niobate substrate (1), and the focusing interdigital transducer (2) is transduced by a circular arc interdigital transducer (7) and a circular arc Bragg reflection grating (8), an integrated temperature measuring thermal resistance (3) is evaporated on the rectangular lithium niobate substrate (1) at the focus of the focusing interdigital transducer (2). , a silicon dioxide film (4) is locally deposited on the top of the rectangular lithium niobate substrate (1) on one side of the integrated temperature measuring thermal resistance (3), and the silicon dioxide film (4) is bonded by oxygen plasma surface modification A Y-shaped PDMS micro-channel (5) is combined, and the Y-shaped PDMS micro-channel (5) is dumbbell-shaped; 所述的集成式测温热电阻(3)包括一条细长的金属线结构(9)，金属线结构(9)的两端和测温电极(10)连接，金属线结构(9)位于二氧化硅薄膜(4)底部。The integrated temperature measuring thermal resistance (3) includes an elongated metal wire structure (9), two ends of the metal wire structure (9) are connected to the temperature measuring electrodes (10), and the metal wire structure (9) is located on the second side. The bottom of the silicon oxide film (4). 2.根据权利要求1所述的一种适用于声表面波微流道的集成式温控系统，其特征在于：所述的矩形铌酸锂基底(1)材质为128°Y切铌酸锂压电单晶体。2. An integrated temperature control system suitable for surface acoustic wave microchannels according to claim 1, characterized in that: the material of the rectangular lithium niobate substrate (1) is 128° Y-cut lithium niobate Piezoelectric single crystal. 3.根据权利要求1所述的一种适用于声表面波微流道的集成式温控系统，其特征在于：所述的圆弧形叉指换能器(7)共由10对指条组成，圆弧形布拉格反射栅(8)共由5条指条组成，圆弧形叉指换能器(7)的孔径为10毫米，圆心角度为90度。3. An integrated temperature control system suitable for surface acoustic wave micro-channels according to claim 1, characterized in that: the circular arc-shaped interdigital transducer (7) consists of 10 pairs of finger bars in total The arc-shaped Bragg reflection grating (8) is composed of 5 finger bars, the aperture of the arc-shaped interdigital transducer (7) is 10 mm, and the center angle is 90 degrees. 4.根据权利要求1所述的一种适用于声表面波微流道的集成式温控系统，其特征在于：所述的二氧化硅薄膜(4)是由PECVD的工艺沉积在矩形铌酸锂基底(1)的上面。4. an integrated temperature control system suitable for surface acoustic wave micro-channel according to claim 1, is characterized in that: described silicon dioxide film (4) is deposited on rectangular niobate by the process of PECVD On top of the lithium substrate (1). 5.根据权利要求1所述的一种适用于声表面波微流道的集成式温控系统，其特征在于：所述的Y型PDMS微流道(5)为一块固化翻模的PDMS聚合物构成的Y型微流道，长为30毫米，宽为10毫米，高度为5毫米，两侧各有3毫米深的凹槽，Y型微流道的整体高度为200微米，两个次流道的宽度为100微米，长度为5毫米；主流道的宽度为200微米，长度为16微米。5. An integrated temperature control system suitable for a surface acoustic wave micro-channel according to claim 1, characterized in that: the Y-shaped PDMS micro-channel (5) is a piece of PDMS polymerized by solidifying and turning the mold The Y-shaped microchannel composed of material is 30 mm long, 10 mm wide, 5 mm high, and has grooves 3 mm deep on both sides. The overall height of the Y-shaped microchannel is 200 microns. The width of the flow channel is 100 microns and the length is 5 mm; the width of the main channel is 200 microns and the length is 16 microns. 6.根据权利要求1所述的一种适用于声表面波微流道的集成式温控系统，其特征在于：所述的Y型PDMS微流道(5)使用刀具模型切割固化后的PDMS，键合于矩形铌酸锂基底(1)中心位置处。6. An integrated temperature control system suitable for a surface acoustic wave micro-channel according to claim 1, characterized in that: the Y-shaped PDMS micro-channel (5) uses a cutter model to cut the cured PDMS , which is bonded to the center of the rectangular lithium niobate substrate (1). 7.根据权利要求1所述的一种适用于声表面波微流道的集成式温控系统，其特征在于：所述的矩形铌酸锂基底(1)高度为500微米，聚焦型叉指换能器(2)和集成式测温热电阻(3)高度为100纳 米，二氧化硅薄膜(4)的高度为300纳 米，Y型PDMS微流道(5)的高度为5毫米；帕尔贴制冷元件(6)的高度为4毫米。7. An integrated temperature control system suitable for surface acoustic wave microchannels according to claim 1, characterized in that: the height of the rectangular lithium niobate substrate (1) is 500 microns, and the focusing type interdigital The height of the transducer (2) and the integrated temperature measuring thermistor (3) is 100 nanometers, the height of the silicon dioxide film (4) is 300 nanometers, and the height of the Y-type PDMS microchannel (5) is 5 mm; The height of the Ertie cooling element (6) is 4 mm. 8.根据权利要求1所述的一种适用于声表面波微流道的集成式温控系统，其特征在于：所述的金属线结构(9)是一个宽20微米，长15毫米的双弯折结构。8. An integrated temperature control system suitable for surface acoustic wave micro-channels according to claim 1, characterized in that: the metal wire structure (9) is a double 20 micron wide and 15 mm long double Bend structure.
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