CN103386332A - Method of transporting liquid drops by micro-fluidic chip - Google Patents
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Abstract
Description
技术领域 technical field
本发明属于生物医学技术领域,具体涉及一种微流控芯片输运液滴的方法。 The invention belongs to the technical field of biomedicine, and in particular relates to a method for transporting droplets by a microfluidic chip. the
背景技术 Background technique
微流控芯片的研究始于20世纪90年代初,Manz和Harrison等首先开展了早期的芯片电泳研究,首次提出微全分析系统等基本概念,并将微流控芯片定位为一般厚度不超过5毫米,面积最多不超过十几平方厘米的平面芯片。由于介电湿润效应自身具备诸多优势,越来越多地用来操控数字微流控芯片中的微液滴。 The research on microfluidic chips began in the early 1990s. Manz and Harrison first carried out early research on chip electrophoresis, first proposed basic concepts such as micro-total analysis systems, and positioned microfluidic chips as generally having a thickness of no more than 5 mm, and a planar chip with an area of no more than a dozen square centimeters. Due to its many advantages, the dielectric wetting effect is increasingly used to manipulate micro-droplets in digital microfluidic chips. the
在过去的二十年,在实验室研究和工业应用中数字微流控芯片呈现出蓬勃发展的趋势,尤其是基于微液滴操控的数字微流控芯片更是取得了很大的进展,目前被操控的液滴的体积可以达到微升甚至纳升级别,这样,在微尺度下,就可以对微升和纳升级别的液滴进行更精确的混合,液滴内部的化学反应也更加充分。另外,可以对液滴内部不同的生化反应过程进行监控,微液滴可以包含细胞和生物分子,比如蛋白质、DNA,这样就实现了更高通量的监控。在许多驱动微液滴的方法中,传统的方法是在微管道中实现微液滴的生成和控制,但微管道的制造工艺非常复杂,并且微管道很容易被堵塞,重复利用性不高,需要复杂的外围设备进行驱动。 In the past two decades, digital microfluidic chips have shown a vigorous development trend in laboratory research and industrial applications, especially digital microfluidic chips based on micro-droplet manipulation have made great progress. The volume of the manipulated droplets can reach the microliter or even nanoliter level, so that at the microscale, the microliter and nanoliter level droplets can be mixed more precisely, and the chemical reaction inside the droplet is more complete. . In addition, different biochemical reaction processes inside the droplet can be monitored, and the micro-droplet can contain cells and biomolecules, such as proteins and DNA, thus achieving higher throughput monitoring. Among many methods of driving micro-droplets, the traditional method is to realize the generation and control of micro-droplets in micro-channels, but the manufacturing process of micro-channels is very complicated, and micro-channels are easily blocked, and the reusability is not high. Requires complex peripherals to be driven. the
相比之下,采用电驱动有具有很多优点,这其中,基于介电湿润效应的微流控芯片具有其独特的优势,因为基于介电湿润的微流控芯片不需要微管道、微泵和微阀等复杂设备,其制作工艺简单、发热量小,响应迅速,功耗低、封装简单等,所以介电湿润效应被越来越多的用来操控数字微流控芯片 中的微液滴。基于介电湿润效应的微流控芯可以实现对微液滴的分配、分离、运输和合并操作。 In contrast, the use of electric drive has many advantages, among which, the microfluidic chip based on the dielectric wetting effect has its unique advantages, because the microfluidic chip based on the dielectric wetting effect does not require micropipes, micropumps and For complex devices such as microvalves, the manufacturing process is simple, the heat generation is small, the response is fast, the power consumption is low, and the packaging is simple, etc., so the dielectric wetting effect is used more and more to manipulate micro-droplets in digital microfluidic chips. . The microfluidic core based on the dielectric wetting effect can realize the distribution, separation, transportation and merging of micro-droplets. the
目前,国外对基于介电湿润的数字微流控芯片系统研究最为出色的是美国的加州大学洛杉矶分校、杜克大学、普渡大学;加拿大的多伦多大学、不列颠哥伦比亚大学;韩国的首尔高丽大学,浦项科技大学;比利时的鲁汶天主教大学;荷兰屯特大学等。 At present, the most outstanding foreign research on digital microfluidic chip systems based on dielectric wetting is the University of California, Los Angeles, Duke University, and Purdue University in the United States; the University of Toronto and the University of British Columbia in Canada; Seoul Korea University in South Korea, Pohang University of Science and Technology; Catholic University of Leuven in Belgium; University of Twente in the Netherlands, etc. the
发明内容 Contents of the invention
针对现有技术的不足,本发明的目的是为了降低数字微流控芯片的驱动电压,以降低芯片上的电场强度,避免对液滴中所包含的生物活性体造成损伤,同时可以提高数字微流控芯片的使用效率。 Aiming at the deficiencies of the prior art, the purpose of the present invention is to reduce the driving voltage of the digital microfluidic chip, so as to reduce the electric field strength on the chip, avoid causing damage to the biologically active bodies contained in the liquid droplets, and at the same time improve the digital microfluidic chip. The efficiency of the use of fluidic chips. the
为解决上述的技术问题,本发明的技术方案是这样实现的: For solving above-mentioned technical problem, technical scheme of the present invention is realized like this:
一种微流控芯片输运液滴的方法,包括: A method for transporting droplets in a microfluidic chip, comprising:
s1、提供一微流控芯片,所述的微流控芯片包括阵列设置的驱动电极,所述的驱动电极为半月形,在液滴输送方向上,驱动电极的一侧边缘为凸状的弧形,另一侧边缘为凹状的弧形,相邻电极间凹凸相对; s1. Provide a microfluidic chip. The microfluidic chip includes drive electrodes arranged in an array. The drive electrodes are half-moon-shaped. In the droplet transport direction, one edge of the drive electrodes is a convex arc shape, the edge on the other side is a concave arc shape, and the concavity and convexity between adjacent electrodes are opposite;
s2、在相邻驱动电极之间施加32V~60V的电势,以驱动位于驱动电极上的液滴运动。 s2. Applying a potential of 32V to 60V between adjacent driving electrodes to drive the movement of the liquid droplets on the driving electrodes. the
优选的,在上述的微流控芯片输运液滴的方法中,所述的微流控芯片包括相对设置的下极板和上极板,所述的下极板包括第一基底以及依次形成于所述第一基底上的所述的驱动电极、介电层和第一厌水层;所述的上极板包括第二基底以及形成于所述第二基底上的第二厌水层。 Preferably, in the above-mentioned method for transporting droplets by a microfluidic chip, the microfluidic chip includes a lower plate and an upper plate oppositely arranged, and the lower plate includes a first substrate and sequentially formed The driving electrode, the dielectric layer and the first water-repellent layer on the first base; the upper plate includes a second base and a second water-repellent layer formed on the second base. the
优选的,在上述的微流控芯片输运液滴的方法中,所述的第一基板和第二基板为ITO玻璃。 Preferably, in the above-mentioned method for transporting droplets by a microfluidic chip, the first substrate and the second substrate are ITO glass. the
优选的,在上述的微流控芯片输运液滴的方法中,所述的介电层的材质为SU-8。 Preferably, in the above-mentioned method for transporting droplets by a microfluidic chip, the material of the dielectric layer is SU-8. the
优选的,在上述的微流控芯片输运液滴的方法中,所述的第一厌水层和第二厌水层的材质为特氟龙。 Preferably, in the above-mentioned method for transporting droplets by a microfluidic chip, the material of the first water-repellent layer and the second water-repellent layer is Teflon. the
本申请还公开了一种微流控芯片的制作方法,包括: This application also discloses a method for making a microfluidic chip, including:
(a)采用ITO玻璃作为介电湿润微流控芯片的基底材料,通过湿法刻蚀技术加工出驱动电极和电极引线; (a) ITO glass is used as the substrate material of the dielectric wetted microfluidic chip, and the driving electrodes and electrode leads are processed by wet etching technology;
(b)通过旋涂SU-8作为芯片的介电层材料; (b) SU-8 was used as the dielectric layer material of the chip by spin-coating;
(c)采用电子氟化液作为溶剂稀释特氟龙溶液,通过旋涂、烘烤工艺得到厌水层,获得上极板; (c) Using electronic fluorinated liquid as solvent to dilute Teflon solution, obtain a water-repellent layer by spin coating and baking process, and obtain the upper plate;
(d)在ITO玻璃表面旋涂一层特氟龙涂层作为厌水层,获得上极板; (d) Spin-coat a layer of Teflon coating on the surface of ITO glass as a water-repellent layer to obtain the upper plate;
(e)用双面胶带将上下极板连接在一起,得到微流控芯片。 (e) Connect the upper and lower plates together with double-sided tape to obtain a microfluidic chip. the
与现有技术相比,本发明设计了半月形驱动电极数字微流控芯片,针对目前数字微流控芯片驱动电压比较高的现状,对比传统的驱动电极结构,研制出了一种新型的可以降低驱动电压的半月形驱动电极数字微流控芯片。基于介电湿润原理,分析微液滴所受介电湿润力和微液滴接触圆上有效三相接触线所对应弦长的关系。对比分析了传统的方形、叉齿形驱动电极与新型半月形驱动电极上液滴有效三相接触线所形成的弦长。分析出了三种驱动电极结构中半月形驱动电极所形成的有效弦长最大,从而得出了半月形驱动电极的数字微流控芯片上介电驱动力最大。通过设计制作的三种驱动电极介电湿润芯片分别对驱动液滴的效果进行实验验证。实验结果表明在所研制的半月形驱动电极数字微流控芯片上,其最小驱动电压分别比方形和叉齿形驱动电极芯片降低了约为37%和67%,另外,当有效驱动电压为60V时半月形驱动电极芯片上2μL去离子水微液滴的速度约为10cm/s,分别是方形与叉齿形驱动电极芯片上液滴速度的3倍和2倍。得到的实验数据证明了半月形驱动电极的数字微流控芯片能够很好的达到降低芯片驱动电压的目的。 Compared with the prior art, the present invention designs a half-moon-shaped driving electrode digital microfluidic chip. Aiming at the current situation that the driving voltage of the digital microfluidic chip is relatively high, compared with the traditional driving electrode structure, a new type of microfluidic chip is developed. A digital microfluidic chip with half-moon-shaped driving electrodes that reduces the driving voltage. Based on the principle of dielectric wetting, the relationship between the dielectric wetting force on the droplet and the corresponding chord length of the effective three-phase contact line on the contact circle of the droplet is analyzed. The chord length formed by the effective three-phase contact line of droplets on the traditional square and fork-shaped driving electrodes and the new half-moon-shaped driving electrodes was compared and analyzed. It is analyzed that the effective chord length formed by the half-moon-shaped driving electrode is the largest among the three driving electrode structures, and thus the dielectric driving force of the half-moon-shaped driving electrode on the digital microfluidic chip is the largest. The effect of driving droplets was verified experimentally by designing and manufacturing three kinds of driving electrode dielectric wetting chips. The experimental results show that the minimum driving voltage of the developed half-moon-shaped driving electrode digital microfluidic chip is about 37% and 67% lower than that of the square and fork-shaped driving electrode chips. In addition, when the effective driving voltage is 60V The speed of 2 μL deionized water micro-droplets on the half-moon-shaped driving electrode chip is about 10 cm/s, which is 3 times and 2 times of the droplet speed on the square and fork-shaped driving electrode chips, respectively. The obtained experimental data proves that the digital microfluidic chip with half-moon-shaped driving electrodes can well achieve the purpose of reducing the driving voltage of the chip. the
附图说明 Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。 In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention. Those skilled in the art can also obtain other drawings based on these drawings without creative work. the
图1所示为本发明具体实施例中微流控芯片的截面示意图; Fig. 1 is a schematic cross-sectional view of a microfluidic chip in a specific embodiment of the present invention;
图2所示为本发明具体实施例中三种驱动电极结构示意图; Fig. 2 shows three kinds of driving electrode structure schematic diagrams in the specific embodiment of the present invention;
图3所示为本发明具体实施例中半月形驱动电极结构示意图; Fig. 3 shows that in the specific embodiment of the present invention, half-moon drive electrode structure schematic diagram;
图4所示为本发明具体实施例中有效三相接触线分析俯视图; Fig. 4 shows that effective three-phase contact line analysis top view in the specific embodiment of the present invention;
图5所示为本发明具体实施例中半月形驱动电极阵列示意图; Figure 5 shows a schematic diagram of a half-moon drive electrode array in a specific embodiment of the present invention;
图6所示为本发明具体实施例中液滴体积与有效弦长; Fig. 6 shows droplet volume and effective chord length in the specific embodiment of the present invention;
图7a-7c所示为本发明具体实施例中芯片下极板主要制作工艺流程示意图; Figure 7a-7c shows the schematic diagram of the main manufacturing process flow of the lower plate of the chip in the specific embodiment of the present invention;
图8所示为本发明具体实施例中是液滴初始接触角实测图; Fig. 8 shows that in the specific embodiment of the present invention, it is the measured figure of the initial contact angle of the droplet;
图9所示为本发明具体实施例中三种驱动电极芯片上液滴运动视频截俯视图; Fig. 9 shows that in the specific embodiment of the present invention, three kinds of droplet movement videos on the driving electrode chip are top-down view;
图10所示为本发明具体实施例中液滴体积与最小驱动电压关系图; Fig. 10 shows that in the specific embodiment of the present invention, droplet volume and minimum drive voltage relation figure;
图11所示为本发明具体实施例中2μL液滴平均速度和驱动电压的关系。 FIG. 11 shows the relationship between the average velocity of a 2 μL droplet and the driving voltage in a specific embodiment of the present invention. the
具体实施方式 Detailed ways
本发明实施例公开了一种微流控芯片输运液滴的方法,包括: The embodiment of the present invention discloses a method for transporting liquid droplets by a microfluidic chip, including:
s1、提供一微流控芯片,所述的微流控芯片包括阵列设置的驱动电极,所述的驱动电极为半月形,在液滴输送方向上,驱动电极的一侧边缘为凸状的弧形,另一侧边缘为凹状的弧形,相邻电极间凹凸相对; s1. Provide a microfluidic chip. The microfluidic chip includes drive electrodes arranged in an array. The drive electrodes are half-moon-shaped. In the droplet transport direction, one edge of the drive electrodes is a convex arc shape, the edge on the other side is a concave arc shape, and the concavity and convexity between adjacent electrodes are opposite;
s2、在相邻驱动电极之间施加32V~60V的电势,以驱动位于驱动电极上的液滴运动。 s2. Applying a potential of 32V to 60V between adjacent driving electrodes to drive the movement of the liquid droplets on the driving electrodes. the
优选的,在上述的微流控芯片输运液滴20的方法中,所述的微流控芯片包括相对设置的下极板和上极板,所述的下极板包括第一基底11以及依次形成于所述第一基底上的所述的驱动电极12、介电层13和第一厌水层14;所述的上极板包括第二基底15以及形成于所述第二基底上的第二厌水层16。
Preferably, in the above-mentioned method for transporting
在上述的微流控芯片输运液滴的方法中,所述的第一基板和第二基板优选为ITO玻璃。应当说明,用作基板的材料并不固定,只要绝缘即可,如可以为石英、绝缘的硅片等,第一基板和第二基板也可以为不同的材质。 In the above method for transporting droplets by a microfluidic chip, the first substrate and the second substrate are preferably ITO glass. It should be noted that the material used as the substrate is not fixed, as long as it is insulated, such as quartz, insulating silicon wafer, etc., the first substrate and the second substrate can also be made of different materials. the
在上述的微流控芯片输运液滴的方法中,驱动电极可以由任何导电材料组成,其电极大小和间隔及具体电极的个数并不限定,本说明书仅以一定数目及规格的电极为例。电极的阵列方式可以为一维,也可以为二维。 In the above-mentioned method for transporting droplets by a microfluidic chip, the driving electrodes can be made of any conductive material, and the size and spacing of the electrodes and the number of specific electrodes are not limited. This specification only uses a certain number and specifications of electrodes as examples. example. The electrode array can be one-dimensional or two-dimensional. the
在上述的微流控芯片输运液滴的方法中,所述的介电层的材质优选为SU-8。应当说明的是,介电层应为绝缘介质材料但不限定,优选为介电常数较高、抗击穿能力较强的材料。 In the above method for transporting liquid droplets by a microfluidic chip, the material of the dielectric layer is preferably SU-8. It should be noted that the dielectric layer should be an insulating dielectric material, but is not limited thereto, preferably a material with a relatively high dielectric constant and strong breakdown resistance. the
在上述的微流控芯片输运液滴的方法中,所述的第一厌水层和第二厌水层的材质优选为特氟龙。 In the above-mentioned method for transporting droplets by a microfluidic chip, the material of the first water-repellent layer and the second water-repellent layer is preferably Teflon. the
本申请实施例还公开了一种微流控芯片的制作方法,包括: The embodiment of the present application also discloses a method for making a microfluidic chip, including:
(a)采用ITO玻璃作为介电湿润微流控芯片的基底材料,通过湿法刻蚀技术加工出驱动电极和电极引线; (a) ITO glass is used as the substrate material of the dielectric wetted microfluidic chip, and the driving electrodes and electrode leads are processed by wet etching technology;
(b)通过旋涂SU-8作为芯片的介电层材料; (b) SU-8 was used as the dielectric layer material of the chip by spin-coating;
(c)采用电子氟化液作为溶剂稀释特氟龙溶液,通过旋涂、烘烤工艺得到厌水层,获得上极板; (c) Using electronic fluorinated liquid as solvent to dilute Teflon solution, obtain a water-repellent layer by spin coating and baking process, and obtain the upper plate;
(d)在ITO玻璃表面旋涂一层特氟龙涂层作为厌水层,获得上极板; (d) Spin-coat a layer of Teflon coating on the surface of ITO glass as a water-repellent layer to obtain the upper plate;
(e)用双面胶带将上下极板连接在一起,得到微流控芯片。 (e) Connect the upper and lower plates together with double-sided tape to obtain a microfluidic chip. the
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行详细的描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例,都属于本发明保护的范围。 The technical solutions in the embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention. the
如图1中所示,驱动电极阵列位于厌水层和介电层下方,驱动电极数为左右两个。当右侧驱动电极加电时固-液界面之间的电容效应导致微液滴的接触角改变,从而在其内部产生压力差而驱动微液滴,微液滴就会从左边电极运动到右侧电极上,依次给控制电极加电就可以驱动微液滴沿着预先设定好的路径运动,实现对微液滴的各种操操控。驱动电压与接触角的关系可以由杨-李普曼方程进行描述,如式(1)所示: As shown in FIG. 1 , the driving electrode array is located under the water-repellent layer and the dielectric layer, and the number of driving electrodes is two on the left and the right. When the right driving electrode is powered on, the capacitive effect between the solid-liquid interface causes the contact angle of the micro-droplet to change, thereby generating a pressure difference inside it to drive the micro-droplet, and the micro-droplet will move from the left electrode to the right. On the side electrodes, powering up the control electrodes in turn can drive the micro-droplets to move along the preset path, and realize various manipulations of the micro-droplets. The relationship between the driving voltage and the contact angle can be described by the Yang-Lipmann equation, as shown in formula (1):
式(1)中,θV和θ0分别表示不加驱动电压时的初始接触角和加驱动电压V时的接触角,εr表示介电层的相对介电常数,ε0表示真空的介电常数,γLG表示“液-气”表面张力,V表示所加电压,d表示介电层的厚度。 In formula (1), θ V and θ 0 represent the initial contact angle when no driving voltage is applied and the contact angle when driving voltage V is applied, ε r represents the relative permittivity of the dielectric layer, and ε 0 represents the dielectric constant of the vacuum Electrical constant, γ LG represents the "liquid-gas" surface tension, V represents the applied voltage, and d represents the thickness of the dielectric layer.
图2中自左至右分别表示方形、叉齿形和半月形驱动电极,电极外轮廓都为1.4×1.4mm。 Figure 2 shows square, fork-shaped and half-moon-shaped driving electrodes from left to right, and the outer contours of the electrodes are all 1.4×1.4mm. the
图3所示为半月形驱动电极结构示意图。 FIG. 3 is a schematic diagram of the structure of the half-moon-shaped driving electrodes. the
图4所示液滴位于左侧电极之上,右侧电极导通,虚线圆形表示液滴的接触圆,图4中三种驱动电极情况下液滴接触圆半径相同,当右侧电极导通时,电极上方液滴接触圆上的有效三相接触线在水平方向上产生的介电湿润力可以表示为式(2): As shown in Figure 4, the droplet is located on the left electrode, and the right electrode is turned on. The dotted circle represents the contact circle of the droplet. The radius of the droplet contact circle is the same under the three driving electrodes in Figure 4. When the right electrode conducts When connected, the dielectric wetting force generated in the horizontal direction by the effective three-phase contact line on the droplet contact circle above the electrode can be expressed as formula (2):
式(3)中c表示每个单位面积的电容大小,γLG表示气液表面张力,V表示驱动电压的大小。由图2中左侧第一个图可知,作用在有效三相接触线X轴方向上的总的介电力可以沿着三相接触线进行积分得到,表示为式(4)。 In formula (3), c represents the capacitance per unit area, γ LG represents the gas-liquid surface tension, and V represents the driving voltage. It can be seen from the first figure on the left in Figure 2 that the total dielectric force acting on the effective three-phase contact line in the X-axis direction can be obtained by integrating along the three-phase contact line, expressed as formula (4).
式(4)中L表示有效三相接触线所形成的有效弦长,角度Φ如图4所示,由式(4)可以得出沿X轴方向上的介电湿润力和所加的驱动电压平方的大小成正比,和有效三相接触线所形成的弦长L成正比,因此,在相同的驱动电压下,有效三相接触线所形成的弦长L越大,作用在液滴上的介电湿润力也就越大。因此,在增大弦长的前提下,可以以较低的驱动电压获得理想的介电驱动力,从而实现降低数字微流控芯片驱动电压的目的。 In Equation (4), L represents the effective chord length formed by the effective three-phase contact line, and the angle Φ is shown in Figure 4. From Equation (4), the dielectric wetting force along the X-axis direction and the applied driving force can be obtained The magnitude of the square of the voltage is proportional to the chord length L formed by the effective three-phase contact line. Therefore, under the same driving voltage, the greater the chord length L formed by the effective three-phase contact line, the greater the effect on the droplet The greater the dielectric wetting force. Therefore, under the premise of increasing the chord length, the ideal dielectric driving force can be obtained at a lower driving voltage, thereby achieving the purpose of reducing the driving voltage of the digital microfluidic chip. the
当芯片其他物理参数一定时液滴接触角的改变受施加在芯片上的驱动电压的影响,电压越大,接触角改变量就会越大,直到液滴的接触角达到饱和。反过来,当驱动电压一定时,液滴接触角的改变量又会受到介电湿润芯片上其他物理参数的影响,如介电层的厚度和介电常数的大小,驱动电极的形状等,其中驱动电极的形状是基于介电湿润效应芯片中很重要的一个结构参数,因为驱动电极的形状会影响芯片中电场的分布,电场的分布会影响液滴接触角的改变,而液滴接触角的改变量是衡量介电湿润力大小的一个重要标准,为了获得较大的接触角改变量就对介电湿润芯片上驱动电极的形状有一定的要求。早期的研究中通常所使用的驱动电极是方形,如图2中左侧第一个图所示为单个方形驱动电极,图2中中间的电极是目前比较常用的叉齿形驱动电极。 When the other physical parameters of the chip are constant, the change of the droplet contact angle is affected by the driving voltage applied to the chip. The greater the voltage, the greater the change of the contact angle will be until the contact angle of the droplet reaches saturation. Conversely, when the driving voltage is constant, the change of droplet contact angle will be affected by other physical parameters on the dielectric wetting chip, such as the thickness of the dielectric layer and the size of the dielectric constant, the shape of the driving electrode, etc., among which The shape of the driving electrode is a very important structural parameter in the chip based on the dielectric wetting effect, because the shape of the driving electrode will affect the distribution of the electric field in the chip, and the distribution of the electric field will affect the change of the droplet contact angle, and the droplet contact angle The amount of change is an important criterion for measuring the size of the dielectric wetting force. In order to obtain a large amount of change in the contact angle, there are certain requirements on the shape of the driving electrodes on the dielectric wetting chip. The driving electrodes usually used in early research are square. The first figure on the left in Figure 2 shows a single square driving electrode, and the middle electrode in Figure 2 is the more commonly used fork-shaped driving electrode. the
针对方形和叉齿形驱动电极制作和使用过程中的不足之处,提出了新型的半月形驱动电极,其结构如图3所示,半月形驱动电极在水平方向右侧半部的形状是半圆形,和液滴在水平方向上的投影(液滴的截面圆)保持一致,这样,液滴开始运动时刻的前部和驱动电极会有一个比较均匀的距离,液滴受 力就会比较的均匀。当分别把图2中三种驱动电极按照一定的顺序排列组合就可以形成阵列电极芯片,同时使用这三种驱动电极组合起来的液滴驱动效果不在本文研究范围之内,本实施例只考虑这三种电极单独组合排列时的液滴驱动效果。 Aiming at the deficiencies in the manufacture and use of square and fork-shaped driving electrodes, a new half-moon-shaped driving electrode is proposed. Its structure is shown in Figure 3. The shape of the half-moon-shaped driving electrode on the right side of the horizontal direction is The circle is consistent with the projection of the droplet in the horizontal direction (the cross-sectional circle of the droplet). In this way, there will be a relatively uniform distance between the front part of the droplet and the driving electrode when the droplet starts to move, and the force on the droplet will be relatively evenly. When the three kinds of driving electrodes in Figure 2 are arranged and combined in a certain order, an array electrode chip can be formed. The droplet driving effect of using these three kinds of driving electrodes at the same time is not within the scope of this paper. This embodiment only considers these Droplet driving effect when the three electrodes are individually combined and arranged. the
图4中描述的是液滴截面圆(虚线圆)和2个方形,2个叉齿形和2个半月形驱动电极排列组合示意图。如图4中(a)所示,液滴截面圆大部分位于左侧电极之上,方形电极的尺寸为1.4×1.4mm;图4(b)中,叉齿形电极的外轮廓为1.4×1.4mm,叉齿长度为200μm,高度为157μm;图4中(c)图半月形电极的外轮廓为1.4×1.4mm,半月形驱动电极的圆弧半径为800μm。图4中三种驱动电极情况下液滴的初始位置相同,液滴的大部分都位于左侧电极之上;左侧驱动电极的排列初始位置也相同,右侧方形、叉齿形和半月形驱动电极导通;图4中粗实线表示液滴接触圆所形成的有效三相接触线。有效三相接触线是液滴接触圆位于导电驱动电极上方的一段圆弧,该圆弧与厌水层、空气介质相接触而形成。如前文所述,当右侧驱动电极导通时,有效三相接触线上沿X轴(液滴运动方向)向的每单位长度上的介电湿润力大小表示为式(2),把每单位长度的介电湿润力沿着有效三相接触线进行积分就可以得到作用于液滴上总的介电湿润力大小的表达式,如式(4)所示。 Figure 4 is a schematic diagram of the arrangement and combination of droplet cross-section circle (dotted circle) and 2 square, 2 fork-shaped and 2 half-moon-shaped driving electrodes. As shown in Fig. 4(a), most of the droplet cross-section circle is located on the left electrode, and the size of the square electrode is 1.4×1.4mm; in Fig. 4(b), the outer contour of the fork-shaped electrode is 1.4× 1.4mm, the length of the fork is 200μm, and the height is 157μm; the outer contour of the half-moon electrode in (c) of Figure 4 is 1.4×1.4mm, and the arc radius of the half-moon driving electrode is 800μm. The initial position of the droplet is the same for the three driving electrodes in Figure 4, and most of the droplet is located on the left electrode; the initial position of the left driving electrode is also the same, and the right side is square, fork-shaped and half-moon. The driving electrodes are turned on; the thick solid line in Figure 4 represents the effective three-phase contact line formed by the contact circle of the droplet. The effective three-phase contact line is a segment of the arc of the droplet contact circle above the conductive driving electrode, which is formed by contacting the water-repellent layer and the air medium. As mentioned above, when the right driving electrode is turned on, the dielectric wetting force per unit length along the X-axis (the direction of droplet movement) on the effective three-phase contact line is expressed as formula (2), and each The expression of the total dielectric wetting force acting on the droplet can be obtained by integrating the dielectric wetting force per unit length along the effective three-phase contact line, as shown in formula (4). the
图5表示半月形驱动电极阵列示意图,该阵列电极数为5个,驱动电极间间距为50μm。 Figure 5 shows a schematic diagram of a half-moon-shaped drive electrode array, the number of electrodes in the array is 5, and the distance between drive electrodes is 50 μm. the
为了使三种驱动电极情况下液滴初始时刻所受介电湿润力大小的推理具有一般普遍性,本实施例根据芯片所能够驱动液滴体积的范围,分别计算了不同液滴体积所对应的的有效三相接触线所对应的弦长L的长度,计算结果归纳为图6。图6可知,当液滴体积从1.89μL增大到4.79μL时,方形驱动电极结构上所形成的弦长L逐渐从零增大到最大值1400μm。当液滴体积为1.89μL时,叉齿形驱动电极上的弦长L为471μm,在方形和半月形驱动电极 上的弦长都为零的情况下,可以驱动液滴,但叉齿形驱动电极制作复杂,由于叉齿结构的存在,当电极导通时,尖端上的电场强度比较大容易损坏芯片。另外,叉齿形驱动电极结构上的最大有效弦长L为1298μm,小于方形和叉齿形驱动电极。半月形驱动电极上的弦长L变化情况是当液滴体积最小时,液滴的截面圆与右侧导电驱动电极圆弧相切,没有形成有效三相接触线,此时弦长L为零;当液滴体积从最小增大到最大时,弦长L总能保持在1400μm。图6中三种驱动电极结构上的弦长L都会随着液滴体积的增大而增大,其中,只要液滴的体积大于芯片能够驱动液滴的最小体积,半月形驱动电极增大的幅度最大。另外,在液滴体积大于芯片所能驱动的最小体积的情况下,通过图6分析可以得到当三种驱动电极芯片上液滴的体积相同时,半月形驱动电极上所能形成的有效弦长为三种驱动电极中最大的,这说明驱动同等体积大小的液滴采用半月形驱动电极时介电驱动力最大,而介电驱动力大就可以很好的保证芯片上液滴运动的连续性。 In order to make the inference of the magnitude of the dielectric wetting force at the initial moment of the droplet in the case of three kinds of driving electrodes general, this embodiment calculates the corresponding values of different droplet volumes according to the range of the droplet volume that the chip can drive. The length of the chord length L corresponding to the effective three-phase contact line, the calculation results are summarized in Figure 6. It can be seen from Figure 6 that when the droplet volume increases from 1.89 μL to 4.79 μL, the chord length L formed on the square driving electrode structure gradually increases from zero to the maximum value of 1400 μm. When the droplet volume is 1.89 μL, the chord length L on the fork-shaped driving electrode is 471 μm. When the chord length on the square and half-moon-shaped driving electrodes is zero, the droplet can be driven, but the fork-tooth-shaped driving electrode The fabrication of the electrode is complicated, and due to the existence of the fork structure, when the electrode is turned on, the electric field strength on the tip is relatively large and the chip is easy to be damaged. In addition, the maximum effective chord length L on the fork-tooth-shaped driving electrode structure is 1298 μm, which is smaller than the square and fork-tooth-shaped driving electrodes. The change of the chord length L on the half-moon-shaped driving electrode is that when the volume of the droplet is the smallest, the cross-sectional circle of the droplet is tangent to the arc of the conductive driving electrode on the right, and no effective three-phase contact line is formed. At this time, the chord length L is zero ; When the droplet volume increases from the smallest to the largest, the chord length L can always remain at 1400μm. The chord length L on the three driving electrode structures in Figure 6 will increase with the increase of the droplet volume. Among them, as long as the volume of the droplet is larger than the minimum volume that the chip can drive the droplet, the half-moon-shaped driving electrode will increase. The largest range. In addition, when the volume of the droplet is greater than the minimum volume that the chip can drive, the effective chord length that can be formed on the half-moon-shaped drive electrode can be obtained when the volume of the droplet on the three drive electrode chips is the same through the analysis of Figure 6 It is the largest among the three kinds of driving electrodes, which means that the dielectric driving force is the largest when the semi-moon-shaped driving electrode is used to drive the droplets of the same volume, and the large dielectric driving force can well ensure the continuity of the droplet movement on the chip . the
如图7a所示,采用ITO玻璃作为介电湿润微流控芯片的基底材料,通过湿法刻蚀技术加工出三种形状的驱动电极和电极引线。参图7b所示,通过旋涂SU-8作为芯片的介电层材料,SU-8的介电常数为3.2。在已刻好电极的ITO玻璃上均匀涂一层1μm厚的SU-8作为芯片的介电层。图7c所示为采用电子氟化液作为溶剂稀释DuPont公司的特氟龙溶液,通过旋涂,烘烤等工艺得到50纳米左右厚度的厌水层。芯片的上极板直接在ITO玻璃表面旋涂一层特氟龙涂层作为厌水层,制作工艺和下极板厌水层的制作工艺一样。然后用双面胶带作为上下极板连接在一起,上下极板间的间距H=300μm。 As shown in Figure 7a, ITO glass is used as the base material of the dielectrically wetted microfluidic chip, and three shapes of driving electrodes and electrode leads are processed by wet etching technology. As shown in FIG. 7b, SU-8 is used as the dielectric layer material of the chip by spin-coating SU-8, and the dielectric constant of SU-8 is 3.2. A layer of SU-8 with a thickness of 1 μm is evenly coated on the ITO glass with electrodes engraved as the dielectric layer of the chip. Figure 7c shows that the Teflon solution of DuPont Company is diluted with electronic fluorinated liquid as a solvent, and a water-repellent layer with a thickness of about 50 nanometers is obtained by spin coating, baking and other processes. The upper plate of the chip is directly spin-coated with a layer of Teflon coating on the surface of the ITO glass as the water-repellent layer, and the manufacturing process is the same as that of the water-repellent layer of the lower plate. Then use double-sided tape as the upper and lower plates to connect together, and the distance between the upper and lower plates is H=300μm. the
实验过程中,用微量注射器先将一定体积大小的去离子水液滴放置在芯片下极板相邻两个驱动电极上,由于芯片表面有特氟龙厌水层的存在,液滴的初始接触角θ0可以达到约为120°,如图8所示,然后用300μm厚的双面胶带将上极板和下极板组合在一起构成“三明治”结构。将信号发生器产生的信号电 压经压电陶瓷驱动电源放大产生驱动液滴所需的电压,频率固定为100Hz,去离子水液滴的运动情况由CCD照相机进行记录。 During the experiment, a deionized water droplet of a certain volume was placed on the two driving electrodes adjacent to the lower plate of the chip with a micro-injector. Due to the presence of a Teflon water-repellent layer on the chip surface, the initial contact of the droplet The angle θ 0 can reach about 120°, as shown in Figure 8, and then use 300μm thick double-sided tape to combine the upper plate and the lower plate to form a "sandwich" structure. The signal voltage generated by the signal generator is amplified by the piezoelectric ceramic drive power supply to generate the voltage required to drive the droplets. The frequency is fixed at 100Hz, and the motion of the deionized water droplets is recorded by a CCD camera.
2μL去离子水液滴运动情况视频截图如图9所示。由于是以ITO玻璃通过刻蚀得到驱动电极,而ITO玻璃具有透光性;另外,驱动电极上方涂有一层白色SU-8介电层;去离子水呈无色透明状,所以为了更好的显示驱动电极和液滴的相对位置,本实施例根据驱动电极的实际形状、位置和液滴的实际位置和外轮廓,在图9中(a)和(b)中用虚线将驱动电极和液滴外轮廓表示出来,图9中(c)的液滴形状没有用虚线进行表示,其轮廓为其实际形状。在图9中,A图,E图和I中液滴处于被驱动的初始时刻,图B,C和D;F,G和H;J,K和L图中分别按时序给驱动电极1,2和3加电。 The video screenshot of the movement of 2 μL deionized water droplets is shown in Figure 9. Because the driving electrodes are obtained by etching ITO glass, and ITO glass has light transmission; in addition, a white SU-8 dielectric layer is coated on the top of the driving electrodes; deionized water is colorless and transparent, so for better Show the relative position of the driving electrode and the liquid droplet. According to the actual shape and position of the driving electrode and the actual position and outer contour of the liquid droplet in this embodiment, the driving electrode and the liquid droplet are connected by dotted lines in (a) and (b) in Figure 9. The outline of the droplet is shown, and the shape of the droplet in (c) in Fig. 9 is not shown by a dotted line, and its outline is its actual shape. In Figure 9, the droplet is at the initial moment of being driven in Figure A, Figure E and I, Figures B, C and D; F, G and H; Figures J, K and L respectively give the drive electrode 1 in time sequence, 2 and 3 power up. the
由图9可知,在驱动电压VRM3=32V时,图9(a)中的方形驱动电极和9(b)中的叉齿形驱动电极上的液滴不能够被驱动,液滴的位置没有发生变化。在图9(c)中的I,J,K和L图中的液滴被成功驱动,液滴向右运动。在图9(c)中半月形驱动电极介电湿润芯片中,如驱动电极设计方案分析所述,有效三相接触线所形成的弦长比较长。当液滴被驱动时,液滴运动的前半部呈半圆形,和相邻右侧半月形驱动电极的左侧外轮廓圆弧距离相等,液滴右半部呈半圆形时,液滴前部各个部分受力均匀,液滴可以被成功驱动并向右运动。 It can be seen from Figure 9 that when the driving voltage V RM3 =32V, the droplet on the square driving electrode in Figure 9(a) and the fork-shaped driving electrode in Figure 9(b) cannot be driven, and the position of the droplet is not change. The droplets in plots I, J, K, and L in Fig. 9(c) were successfully driven, and the droplets moved to the right. In the half-moon-shaped driving electrode dielectric wetted chip in Fig. 9(c), as mentioned in the analysis of the driving electrode design scheme, the chord length formed by the effective three-phase contact line is relatively long. When the droplet is driven, the first half of the droplet movement is semicircular, which is equal to the arc distance of the left outer contour of the adjacent right half-moon-shaped driving electrode. When the right half of the droplet is semicircular, the droplet All parts of the front are evenly stressed, and the droplet can be successfully driven and moved to the right.
方形、叉齿形和半月形电极数字微流控芯片最小驱动电压与液滴体积的关系如图10所示。由图10可知,当液滴体积为最小的1.89μL时,只有叉齿形电极能够以38V左右的电压驱动液滴,这主要是因为当液滴截面圆较小时,叉齿设计的特殊结构会使相邻两个电极的相对距离得到了缩短,从而会产生一定大小的有效弦长为471μm。由图9可知随着液滴体积的增大三种驱动电极形状的能够驱动液滴运动的最小驱动电压都会增大,但传统的方形和叉齿形驱动电极增大的幅度要明显大于半月形驱动电极增大的幅度,当液滴体积达到最大的4.79μL时,方形和叉齿形电极的驱动电压分别为85V、90V, 而此时半月形驱动电极上的最小驱动电压为51V。由图10可知,除了最小体积外,半月形驱动电极芯片上的最小驱动电压比叉齿形驱动电极芯片所的最小驱动电压降低了约37%,比方形驱动电极芯片上的最小驱动电压降低了约67%,所以,对比方形和叉齿形驱动电极芯片,半月形驱动电极芯片可以以较低的驱动电压获得同等大小的介电驱动力。 The relationship between the minimum driving voltage of the digital microfluidic chip with square, fork-shaped and half-moon electrodes and the droplet volume is shown in Figure 10. It can be seen from Figure 10 that when the droplet volume is the smallest 1.89μL, only the fork-shaped electrode can drive the droplet with a voltage of about 38V, which is mainly because the special structure of the fork-teeth design will reduce the The relative distance between two adjacent electrodes is shortened, so that the effective chord length of a certain size is 471 μm. It can be seen from Figure 9 that with the increase of the droplet volume, the minimum driving voltage of the three driving electrode shapes that can drive the droplet movement will increase, but the increase of the traditional square and fork-shaped driving electrodes is significantly greater than that of the half-moon shape. When the droplet volume reaches the maximum of 4.79 μL, the driving voltages of the square and fork-shaped electrodes are 85V and 90V respectively, while the minimum driving voltage of the half-moon-shaped driving electrode is 51V. It can be seen from Figure 10 that, in addition to the minimum volume, the minimum driving voltage on the half-moon-shaped driving electrode chip is about 37% lower than the minimum driving voltage on the fork-shaped driving electrode chip, and it is lower than the minimum driving voltage on the square driving electrode chip. About 67%, so, compared with the square and fork-shaped driving electrode chips, the half-moon-shaped driving electrode chip can obtain the same dielectric driving force with a lower driving voltage. the
如图11所示是三种驱动电极芯片上2μL去离子水液滴的平均速度和驱动电压(驱动电压都为有效值)的关系图。为了减小误差,每个驱动电压值下三种芯片上液滴的驱动实验都进行5次,然后根据每个视频中液滴的运动距离和运动时间求出液滴在每个驱动电压下的平均速度。由图11可知,驱动电压越大,液滴的平均速度就越大。在三种驱动电极的最小驱动电压下,可以从液滴能够被成功驱动时的液滴平均速度对比中得出半月形驱动电极芯片上液滴的平均速度最大为1.8cm/s,明显大于方形和叉齿形驱动电极芯片上液滴的平均速度0.4cm/s和0.8cm/s。 As shown in Fig. 11, it is the relationship diagram between the average speed of 2 μL deionized water droplets on three driving electrode chips and the driving voltage (the driving voltage is an effective value). In order to reduce the error, the driving experiments of the droplets on the three types of chips were carried out 5 times under each driving voltage value, and then according to the moving distance and moving time of the droplets in each video, the droplet’s movement distance at each driving voltage was obtained. average speed. It can be seen from Figure 11 that the greater the driving voltage, the greater the average velocity of the droplets. Under the minimum driving voltage of the three driving electrodes, it can be obtained from the comparison of the average velocity of the droplets when the droplets can be successfully driven that the average velocity of the droplets on the half-moon-shaped driving electrode chip is up to 1.8cm/s, which is significantly larger than that of the square And the average velocity of the droplet on the fork-shaped drive electrode chip is 0.4cm/s and 0.8cm/s. the
综上所述,本发明基于杨-李普曼方程,经过推导,得出液滴所受介电驱动力的公式,由该液滴受力公式可知有效弦长越大,芯片上液滴所受到的介电驱动力就会越大。在一定条件下对比了数字微流控芯片中常用的方形、叉齿形驱动电极和半月形驱动电极上与液滴接触圆有关的有效弦长的大小,经分析半月形驱动电极上的有效弦长为三种驱动电极中最大的,所以半月形驱动电极的数字微流控芯片驱动同等体积大小的微液滴介电驱动力为最大。 In summary, the present invention is based on the Yang-Lipmann equation, and after derivation, the formula of the dielectric driving force on the droplet is obtained. From the force formula on the droplet, it can be known that the larger the effective chord length, the greater the force of the droplet on the chip. The greater the dielectric driving force received. Under certain conditions, the size of the effective chord length related to the droplet contact circle on the square and fork-shaped driving electrodes commonly used in digital microfluidic chips and the half-moon-shaped driving electrode was compared. After analyzing the effective chord length on the half-moon-shaped driving electrode The length is the largest among the three kinds of driving electrodes, so the digital microfluidic chip of the half-moon-shaped driving electrode drives the micro-droplets of the same volume with the largest dielectric driving force. the
对于本领域技术人员而言,显然本发明不限于上述示范性实施例的细节,而且在不背离本发明的精神或基本特征的情况下,能够以其他的具体形式实现本发明。因此,无论从哪一点来看,均应将实施例看作是示范性的,而且是非限制性的,本发明的范围由所附权利要求而不是上述说明限定,因此旨在将落在权利要求的等同要件的含义和范围内的所有变化囊括在本发明内。不应将权利要求中的任何附图标记视为限制所涉及的权利要求。 It will be apparent to those skilled in the art that the invention is not limited to the details of the above-described exemplary embodiments, but that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Accordingly, the embodiments should be regarded in all points of view as exemplary and not restrictive, the scope of the invention being defined by the appended claims rather than the foregoing description, and it is therefore intended that the scope of the invention be defined by the appended claims rather than by the foregoing description. All changes within the meaning and range of equivalents of the elements are embraced in the present invention. Any reference sign in a claim should not be construed as limiting the claim concerned. the
此外,应当理解,虽然本说明书按照实施方式加以描述,但并非每个实施方式仅包含一个独立的技术方案,说明书的这种叙述方式仅仅是为清楚起见,本领域技术人员应当将说明书作为一个整体,各实施例中的技术方案也可以经适当组合,形成本领域技术人员可以理解的其他实施方式。 In addition, it should be understood that although this specification is described according to implementation modes, not each implementation mode only contains an independent technical solution, and this description in the specification is only for clarity, and those skilled in the art should take the specification as a whole , the technical solutions in the various embodiments can also be properly combined to form other implementations that can be understood by those skilled in the art. the
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