CN103386332A - Method of transporting liquid drops by micro-fluidic chip - Google Patents
Method of transporting liquid drops by micro-fluidic chip Download PDFInfo
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- CN103386332A CN103386332A CN2013102859689A CN201310285968A CN103386332A CN 103386332 A CN103386332 A CN 103386332A CN 2013102859689 A CN2013102859689 A CN 2013102859689A CN 201310285968 A CN201310285968 A CN 201310285968A CN 103386332 A CN103386332 A CN 103386332A
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Abstract
The invention discloses a method of transporting liquid drops by a micro-fluidic chip. The method comprises following steps: step one, a micro-fluidic chip is provided, the micro-fluidic chip comprises array-arranged driving electrodes, the driving electrodes are in half-moon shapes, in the fluid drop transportation direction, one edge of each electrode is in a convex arc shape, the other edge of each electrode is in a concave arc shape, and the convex arc is opposite to the concave arc between two neighbored electrodes; step two, an electric potential between 32 V and 60 V is exerted between the neighbored driving electrodes to drive the liquid drops on the driving electrodes to move. The method of transporting liquid drops by a micro-fluidic chip aims to reduce the driving voltage of a digital micro-fluidic chip, so the electric field strength of the chip is reduced, damages to the biological activity organisms contained in the liquid drops are avoided, and the use efficiency of the digital micro-fluidic chip is improved at the same time.
Description
Technical field
The invention belongs to field of biomedicine technology, be specifically related to a kind of micro-fluidic chip and transport the method for drop.
Background technology
The research of micro-fluidic chip starts from early 1990s, at first Manz and Harrison etc. have carried out early stage chip electrophoresis research, the basic conceptions such as micro-total analysis system are proposed first, and orientate micro-fluidic chip as general thickness and be no more than 5 millimeters, area is no more than at most the planar chip of tens square centimeters., because the moistening effect of dielectric self possesses many advantages, be used for more and more controlling the little drop in digital microcurrent-controlled chip.
In the past twenty years, digital microcurrent-controlled chip presents flourish trend in laboratory research and commercial Application, especially the digital microcurrent-controlled chip based on little liquid drop control makes great progress especially, the volume of the drop of being controlled at present can reach microlitre and even receive upgrading not, like this, under minute yardstick, just can mix more accurately microlitre and other drop of upgrading of receiving, the chemical reaction of drop inside is also more abundant.In addition, can monitor the different biochemical reaction process in drop inside, little drop can comprise the Cell and organism molecule,, such as protein, DNA, has so just realized more high-throughout monitoring.In the method for the little drop of many drivings, traditional method is to realize the Generation and control of little drop in microchannel, but the manufacturing process of microchannel is very complicated, and microchannel is easy to blocked, reusing is not high, needs complicated ancillary equipment to drive.
By contrast, adopt electricity to drive to have and have lot of advantages, this wherein, micro-fluidic chip based on the moistening effect of dielectric has its unique advantage, because the micro-fluidic chip moistening based on dielectric do not need the complex device such as microchannel, Micropump and little valve, its manufacture craft is simple, caloric value is little, and response rapidly, low in energy consumption, encapsulation is simple etc., so the moistening effect of dielectric more and more is used for controlling the little drop in digital microcurrent-controlled chip.Can realize distribution, separation, transportation and union operation to little drop based on the micro-fluidic core of the moistening effect of dielectric.
At present, abroad to based on the moistening digital microcurrent-controlled chip system research of dielectric outstanding be University of California in Los Angeles, Duke University, the Purdue University of the U.S.; Canadian University of Toronto, UBC; The Soul Korea University of Korea S, Pu item University of Science and Technology; Belgian Catholic University of Louvain; Holland's especially big in village etc.
Summary of the invention
For the deficiencies in the prior art, the objective of the invention is in order to reduce the driving voltage of digital microcurrent-controlled chip, to reduce the electric-field intensity on chip, avoid the biologically active bodies injury to comprising in drop, can improve the service efficiency of digital microcurrent-controlled chip simultaneously.
For solving above-mentioned technical problem, technical scheme of the present invention is achieved in that
A kind of micro-fluidic chip transports the method for drop, comprising:
S1, provide a micro-fluidic chip, described micro-fluidic chip to comprise the drive electrode that array arranges, described drive electrode is semilune, on the drop throughput direction, one lateral edges of drive electrode is the arc of convex, and the opposite side edge is the arc of concavity, and is concavo-convex relative between adjacent electrode;
S2, apply the electromotive force of 32V～60V between the adjacent driven electrode, with driving, be positioned at liquid drop movement on drive electrode.
Preferably, transport in the method for drop at above-mentioned micro-fluidic chip, described micro-fluidic chip comprises bottom crown and the top crown that is oppositely arranged, described bottom crown comprise the first substrate and be formed at successively the described first suprabasil described drive electrode, dielectric layer and first is detested water layer; Described top crown comprises the second substrate and is formed at described second suprabasil second detests water layer.
Preferably, at above-mentioned micro-fluidic chip, transport in the method for drop, described first substrate and second substrate are ito glass.
Preferably, at above-mentioned micro-fluidic chip, transport in the method for drop, the material of described dielectric layer is SU-8.
Preferably, at above-mentioned micro-fluidic chip, transport in the method for drop, described first detests water layer and second, and to detest the material of water layer be Teflon.
Disclosed herein as well is a kind of preparation method of micro-fluidic chip, comprising:
(a) adopt the base material of ito glass as the moistening micro-fluidic chip of dielectric, by wet etching technique, process drive electrode and contact conductor;
(b) by the dielectric layer material of spin coating SU-8 as chip;
(c) adopt electronics to fluoridize liquid as solvent dilution Teflon solution, by spin coating, baking process, obtain detesting water layer, obtain top crown;
(d) detest water layer in the conduct of ito glass surface spin coating one deck teflon coatings, obtain top crown;
(e) with two-sided tape, upper bottom crown is linked together, obtain micro-fluidic chip.
Compared with prior art, the present invention has designed the digital microcurrent-controlled chip of semilune drive electrode, for the higher present situation of present digital microcurrent-controlled chip drives voltage ratio, contrast traditional drive electrode structure, developed a kind of novel digital microcurrent-controlled chip of semilune drive electrode that can reduce driving voltage.Based on the moistening principle of dielectric, analyze the suffered dielectric wetting power of little drop contact with little drop the upper effective three-phase line of contact of circle the relation of corresponding chord length.Comparative analysis the formed chord length of the effective three-phase line of contact of drop on traditional square, tooth shaped drive electrode and novel semilune drive electrode.Analyzed in three kinds of drive electrode structures the formed effectual chord length of semilune drive electrode maximum, thereby it is maximum to have drawn on the digital microcurrent-controlled chip of semilune drive electrode the dielectric driving force.Respectively the effect that drives drop is carried out experimental verification by three kinds of moistening chips of drive electrode dielectric that design and produce.Experimental result shows on the digital microcurrent-controlled chip of semilune drive electrode of developing, its minimum driving voltage has reduced and has been about 37% and 67% than square and tooth shaped drive electrode chip respectively, in addition, on semilune drive electrode chip, the speed of the 2 little drops of μ L deionized water is about 10cm/s when effective driving voltage is 60V, is respectively 3 times and 2 times of liquid drop speed on square and tooth shaped drive electrode chip.The experimental data that obtains has proved that the digital microcurrent-controlled chip of semilune drive electrode can be good at reaching the purpose that reduces chip drives voltage.
Description of drawings
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, below will the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Figure 1 shows that the schematic cross-section of micro-fluidic chip in the specific embodiment of the invention;
Figure 2 shows that three kinds of drive electrode structural representations in the specific embodiment of the invention;
Figure 3 shows that semilune drive electrode structural representation in the specific embodiment of the invention;
Figure 4 shows that in the specific embodiment of the invention, effective three-phase line of contact is analyzed top view;
Figure 5 shows that semilune driving electrode array schematic diagram in the specific embodiment of the invention;
Figure 6 shows that droplet size and effectual chord length in the specific embodiment of the invention;
Fig. 7 a-7c is depicted as the main fabrication processing schematic diagram of specific embodiment of the invention chips bottom crown;
Figure 8 shows that in the specific embodiment of the invention it is drop initial contact angle measured drawing;
Figure 9 shows that in the specific embodiment of the invention that on three kinds of drive electrode chips, the liquid drop movement video cuts top view;
Figure 10 shows that droplet size and minimum driving voltage graph of a relation in the specific embodiment of the invention;
Figure 11 shows that the relation of 2 μ L drop average speeds and driving voltage in the specific embodiment of the invention.
The specific embodiment
The embodiment of the invention discloses a kind of method that micro-fluidic chip transports drop, comprising:
S1, provide a micro-fluidic chip, described micro-fluidic chip to comprise the drive electrode that array arranges, described drive electrode is semilune, on the drop throughput direction, one lateral edges of drive electrode is the arc of convex, and the opposite side edge is the arc of concavity, and is concavo-convex relative between adjacent electrode;
S2, apply the electromotive force of 32V～60V between the adjacent driven electrode, with driving, be positioned at liquid drop movement on drive electrode.
Preferably, transport in the method for drop 20 at above-mentioned micro-fluidic chip, described micro-fluidic chip comprises bottom crown and the top crown that is oppositely arranged, described bottom crown comprise the first substrate 11 and be formed at successively the described first suprabasil described drive electrode 12, dielectric layer 13 and first is detested water layer 14; Described top crown comprises the second substrate 15 and is formed at described second suprabasil second detests water layer 16.
Transport in the method for drop at above-mentioned micro-fluidic chip, described first substrate and second substrate are preferably ito glass.Should illustrate, fixing as the material of substrate, as long as insulation, as can be for quartzy, the silicon chip that insulate etc., first substrate and second substrate also can be different materials.
Transport in the method for drop at above-mentioned micro-fluidic chip, drive electrode can be comprised of any conductive material, and the number of its electrode size and interval and concrete electrode does not limit, and this specification is only take the electrode of some and specification as example.The array way of electrode can be one dimension, also can be two dimension.
Transport in the method for drop at above-mentioned micro-fluidic chip, the material of described dielectric layer is preferably SU-8.Should be noted that dielectric layer should be the dielectric material but do not limit, and is preferably the material that dielectric constant is higher, breakdown characteristics is stronger.
Transport in the method for drop at above-mentioned micro-fluidic chip, described first detests water layer and the second material of detesting water layer is preferably Teflon.
The embodiment of the present application also discloses a kind of preparation method of micro-fluidic chip, comprising:
(a) adopt the base material of ito glass as the moistening micro-fluidic chip of dielectric, by wet etching technique, process drive electrode and contact conductor;
(b) by the dielectric layer material of spin coating SU-8 as chip;
(c) adopt electronics to fluoridize liquid as solvent dilution Teflon solution, by spin coating, baking process, obtain detesting water layer, obtain top crown;
(d) detest water layer in the conduct of ito glass surface spin coating one deck teflon coatings, obtain top crown;
(e) with two-sided tape, upper bottom crown is linked together, obtain micro-fluidic chip.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is described in detail, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Based on the embodiment in the present invention, those of ordinary skills obtain under the prerequisite of not making creative work every other embodiment, belong to the scope of protection of the invention.
As shown in fig. 1, driving electrode array is positioned at detests water layer and dielectric layer below, and the drive electrode number is two of left and right.Capacity effect when the right side drive electrode powers up between solid-liquid interface causes the contact angle of little drop to change, thereby section produces pressure differential and drives little drop within it, little drop will be from left side electrode movement on right electrodes, power up and just can drive little drop and move along pre-set path to control electrode successively, realize the various behaviour of little drop are controlled.The relation of driving voltage and contact angle can be described by poplar-lippmann's equation, shown in (1):
In formula (1), θ
VAnd θ
0The initial contact angle of expression while not adding driving voltage and the contact angle while adding driving voltage V respectively, ε
rThe relative dielectric constant of expression dielectric layer, ε
0The dielectric constant of expression vacuum, γ
LGExpression " liquid-gas " surface tension, V represents institute's making alive, d represents the thickness of dielectric layer.
Represent respectively from left to right square, tooth shaped and semilune drive electrode in Fig. 2, the electrode outline is all 1.4 * 1.4mm.
Figure 3 shows that semilune drive electrode structural representation.
Drop shown in Figure 4 is positioned on left electrodes, the right electrodes conducting, dashed circle represents the contact circle of drop, in Fig. 4 in three kinds of drive electrode situations drop contact radius of circle identical, when the right electrodes conducting, the dielectric wetting power that the effective three-phase line of contact on electrode top drop contact circle produces in the horizontal direction can be expressed as formula (2):
In formula (3), c represents the capacitance size of each unit are, γ
LGExpression gas-liquid surface tension force, V represents the size of driving voltage.As can be known, the total dielectric power on effective three-phase line of contact X-direction of acting on can be carried out integration along three-phase line of contact and be obtained, and is expressed as formula (4) by first figure of left side in Fig. 2.
In formula (4), L represents the formed effectual chord length of effective three-phase line of contact, angle Φ as shown in Figure 4, can draw along the size of the dielectric wetting power on X-direction and added driving voltage square and be directly proportional by formula (4), formed chord length L is directly proportional with effective three-phase line of contact, therefore, under identical driving voltage, effectively the formed chord length L of three-phase line of contact is larger, and the dielectric wetting power that acts on drop is also just larger.Therefore, under the prerequisite that increases chord length, can obtain desirable dielectric driving force with lower driving voltage, thereby realize reducing the purpose of digital microcurrent-controlled chip drives voltage.
Be applied to the impact of the driving voltage on chip when the change of other physical parameters one timing liquid-drop contact angles of chip, voltage is larger, and contact angle change amount will be larger, until the contact angle of drop reaches capacity.conversely, when driving voltage one timing, the change amount of liquid-drop contact angle can be subject to again the impact of other physical parameters on the moistening chip of dielectric, size as thickness and the dielectric constant of dielectric layer, the shape of drive electrode etc., wherein the shape of drive electrode is based on structural parameters very important in the moistening effect chip of dielectric, because the shape of drive electrode can affect the distribution of electric field in chip, the distribution of electric field can affect the change of liquid-drop contact angle, and the change amount of liquid-drop contact angle is to weigh a major criterion of dielectric wetting power size, just the shape of drive electrode on the moistening chip of dielectric there is certain requirement in order to obtain larger contact angle change amount.In early stage research, the common drive electrode that uses is square, as first figure of left side in Fig. 2, is depicted as single square drive electrode, and in Fig. 2, middle electrode is tooth shaped drive electrode relatively more commonly used at present.
For the weak point in square and the making of tooth shaped drive electrode and use procedure, novel semilune drive electrode has been proposed, its structure as shown in Figure 3, the semilune drive electrode shape of right side half one in the horizontal direction is semicircle, projection (the cross section circle of drop) in the horizontal direction is consistent with drop, like this, drop setting in motion front portion and drive electrode constantly has a more uniform distance, stressed will compare even of drop.In respectively Fig. 2 three kinds of drive electrodes in a certain order permutation and combination just can form the array electrode chip, use simultaneously the drop that these three kinds of drive electrodes combine to drive effect not within this paper research range, the drop when the present embodiment is only considered this three kinds of independent assembled arrangement of electrode drives effect.
Describe in Fig. 4 be drop cross section circle (broken circle) and 2 square, 2 tooth shapeds and 2 semilune drive electrode arrangement make up schematic diagrames.As shown in (a) in Fig. 4, drop cross section circle major part is positioned on left electrodes, and square-shaped electrode is of a size of 1.4 * 1.4mm; In Fig. 4 (b), the outline of tooth shaped electrode is 1.4 * 1.4mm, and prong length is 200 μ m, is highly 157 μ m; In Fig. 4, the outline of (c) figure semilune electrode is 1.4 * 1.4mm, and the arc radius of semilune drive electrode is 800 μ m.In Fig. 4 in three kinds of drive electrode situations the initial position of drop identical, the major part of drop all is positioned on left electrodes; The arrangement initial position of left side drive electrode is also identical, and right side is square, tooth shaped and the conducting of semilune drive electrode; In Fig. 4, heavy line represents the formed effective three-phase line of contact of drop contact circle.Effectively three-phase line of contact is one section circular arc that drop contact circle is positioned at conduction drive electrode top, this circular arc with detest water layer, air dielectric contacts and forms.As mentioned before, when the drive electrode conducting of right side, effectively on three-phase line of contact along X-axis (liquid drop movement direction) to per unit length on dielectric wetting power size be expressed as formula (2), the dielectric wetting power of per unit length is carried out integration along effective three-phase line of contact just can obtain acting on the expression formula of dielectric wetting power size total on drop, shown in (4).
Fig. 5 represents semilune driving electrode array schematic diagram, and this array electric number of poles is 5, and between drive electrode, spacing is 50 μ m.
For the reasoning that makes the suffered dielectric wetting power of drop initial time size in three kinds of drive electrode situations has general generality, the present embodiment can drive the scope of droplet size according to chip, calculated respectively the length of the corresponding corresponding chord length L of effective three-phase line of contact of different droplet sizes, result of calculation is summarized as Fig. 6.As can be known, when droplet size increased to 4.79 μ L from 1.89 μ L, on the square drive electrode structure, formed chord length L increased to maximum 1400 μ m from zero to Fig. 6 gradually.When droplet size is 1.89 μ L, chord length L on the tooth shaped drive electrode is 471 μ m, in the situation that the chord length on square and semilune drive electrode is all zero, can drive drop, but the tooth shaped drive electrode is made complicated, due to the existence of prong structure, when electrode conduction, the larger easily defective chip of the electric-field intensity on tip.In addition, the structural maximum effectual chord length L of tooth shaped drive electrode is 1298 μ m, less than square and tooth shaped drive electrode.Chord length L situation of change on the semilune drive electrode be when droplet size hour, the cross section circle of drop is tangent with right side conduction drive electrode circular arc, does not form effective three-phase line of contact, this moment, chord length L was zero; When droplet size increased to maximum from minimum, chord length L can remain on 1400 μ m.In Fig. 6, three kinds of structural chord length L of drive electrode can increase along with the increase of droplet size, and wherein, as long as the volume of drop can drive the minimum volume of drop greater than chip, the amplitude that the semilune drive electrode increases is maximum.In addition, in the situation that the minimum volume that droplet size can drive greater than chip, can obtain volume when drop on three kinds of drive electrode chips when identical by Fig. 6 analysis, the effectual chord length that can form on the semilune drive electrode is maximum in three kinds of drive electrodes, when the drop of this explanation driving equal volume size adopts the semilune drive electrode, the dielectric driving force is maximum, and the dielectric driving force just can well guarantee the continuity of liquid drop movement on chip greatly.
As shown in Figure 7a, adopt the base material of ito glass as the moistening micro-fluidic chip of dielectric, process drive electrode and the contact conductor of three kinds of shapes by wet etching technique.Shown in ginseng Fig. 7 b, by the dielectric layer material of spin coating SU-8 as chip, the dielectric constant of SU-8 is 3.2.Evenly be coated with the dielectric layer of the thick SU-8 of one deck 1 μ m as chip on the ito glass of having carved electrode.Fig. 7 c is depicted as and adopts electronics to fluoridize the Teflon solution of liquid as solvent dilution DuPont company, and by spin coating, the techniques such as baking obtain the water layer of detesting of 50 nanometer left and right thicknesses.The top crown of chip is directly detested water layer in the conduct of ito glass surface spin coating one deck teflon coatings, and manufacture craft is the same with the manufacture craft that bottom crown is detested water layer.Then link together as upper bottom crown with two-sided tape, the spacing H=300 μ m between upper bottom crown.
In experimentation, with micro syringe, first the deionized water drop of certain volume size is placed on adjacent two drive electrodes of chip bottom crown, detests the existence of water layer because chip surface has Teflon, the initial contact angle θ of drop
0Can reach and be about 120 °, as shown in Figure 8, then with the thick two-sided tape of 300 μ m, top crown and bottom crown be combined formation " sandwich " structure.The signal voltage that signal generator is produced amplifies and produces the required voltage of driving drop through drive power supply for piezoelectric ceramics, and frequency is fixed as 100Hz, and the motion conditions of deionized water drop is carried out record by the CCD camera.
2 μ L deionized water liquid drop movement situation video interception as shown in Figure 9.Because being obtains drive electrode with ito glass by etching, and ito glass has light transmission; In addition, the drive electrode top scribbles one deck white SU-8 dielectric layer; Deionized water is the water white transparency shape, so relative position for better display driver electrode and drop, the present embodiment is according to physical location and the outline of true form, position and the drop of drive electrode, in Fig. 9 (a) and (b) in dashed lines drive electrode and drop outline are showed, in Fig. 9, the droplet profile of (c) does not have with dashed lines to represent, its profile is its true form.In Fig. 9, A figure, in E figure and I, drop is in driven initial time, figure B, C and D; F, G and H; J, power up for chronologically respectively in K and L figure drive electrode 1,2 and 3.
As shown in Figure 9, at driving voltage V
RM3During=32V, the drop on the tooth shaped drive electrode in the square drive electrode and 9 (b) in Fig. 9 (a) can not be driven, and the position of drop does not change.I in Fig. 9 (c), J, the drop in K and L figure is successfully driven, and drop moves right.In the moistening chip of semilune drive electrode dielectric, as described in the drive electrode analysis of design scheme, effectively the formed chord length of three-phase line of contact is long in Fig. 9 (c).When drop is driven, the first half semicircular in shape of liquid drop movement, equal with the left side outline circular arc distance of adjacent right side semilune drive electrode, during drop right-hand part semicircular in shape, the anterior various piece of drop is stressed evenly, and drop can successfully be driven and move right.
The relation of square, tooth shaped and semilune electrode numeral micro-fluidic chip minimum driving voltage and droplet size as shown in figure 10.As shown in Figure 10, when droplet size is 1.89 μ L of minimum, only have the tooth shaped electrode to drive drop with the voltage of 38V left and right, this be mainly because when drop cross section circle hour, the special construction of tine design can make the relative distance of adjacent two electrodes obtain shortening, thereby the effectual chord length that can produce a certain size is 471 μ m.The minimum driving voltage that can drive liquid drop movement along with three kinds of drive electrode shapes of increase of droplet size all can increase as shown in Figure 9, but the amplitude that traditional square and tooth shaped drive electrode increases is wanted the amplitude that obviously greater than the semilune drive electrode, increases, when droplet size reaches 4.79 μ L of maximum, square and the driving voltage tooth shaped electrode is respectively 85V, 90V, and the minimum driving voltage on this moment semilune drive electrode is 51V.As shown in Figure 10, except minimum volume, minimum driving voltage on semilune drive electrode chip than tooth shaped drive electrode chip minimum driving voltage reduced approximately 37%, reduced approximately 67% than the minimum driving voltage on square drive electrode chip, so, contrast square and tooth shaped drive electrode chip, semilune drive electrode chip can obtain with lower driving voltage the dielectric driving force of equal size.
The average speed of 2 μ L deionized water drops on three kinds of drive electrode chips and the graph of a relation of driving voltage (driving voltage is all virtual value) as shown in figure 11.In order to reduce error, on the lower three kinds of chips of each driving voltage value, the driving of drop experiment is carried out 5 times, then according to move distance and the run duration of drop in each video, obtains the average speed of drop under each driving voltage.As shown in Figure 11, driving voltage is larger, and the average speed of drop is just larger.Under the minimum driving voltage of three kinds of drive electrodes, the average speed that draws drop on semilune drive electrode chip can the drop average speed contrast when drop can successfully be driven is 1.8cm/s to the maximum, obviously greater than average speed 0.4cm/s and the 0.8cm/s of drop on square and tooth shaped drive electrode chip.
In sum, the present invention is based on poplar-lippmann's equation,, through deriving, draw the formula of the suffered dielectric driving force of drop, effectual chord length is larger as can be known by this drop force bearing formulae, and on chip, the suffered dielectric driving force of drop will be larger.Contrasted under certain condition in digital microcurrent-controlled chip on square, tooth shaped drive electrode commonly used and semilune drive electrode and contact the size of justifying relevant effectual chord length with drop, effectual chord length on the semilune drive electrode is maximum in three kinds of drive electrodes by analysis, so little drop dielectric driving force of the digital microcurrent-controlled chip drives equal volume size of semilune drive electrode is maximum.
To those skilled in the art, obviously the invention is not restricted to the details of above-mentioned one exemplary embodiment, and in the situation that do not deviate from spirit of the present invention or essential characteristic, can realize the present invention with other concrete form.Therefore, no matter from which point, all should regard embodiment as exemplary, and be nonrestrictive, scope of the present invention is limited by claims rather than above-mentioned explanation, therefore is intended to include in the present invention dropping on the implication that is equal to important document of claim and all changes in scope.Any Reference numeral in claim should be considered as limit related claim.
In addition, be to be understood that, although this specification is described according to embodiment, but not each embodiment only comprises an independently technical scheme, this narrating mode of specification is only for clarity sake, those skilled in the art should make specification as a whole, and the technical scheme in each embodiment also can, through appropriate combination, form other embodiments that it will be appreciated by those skilled in the art that.
Claims (6)
1. a micro-fluidic chip transports the method for drop, it is characterized in that, comprising:
S1, provide a micro-fluidic chip, described micro-fluidic chip to comprise the drive electrode that array arranges, described drive electrode is semilune, on the drop throughput direction, one lateral edges of drive electrode is the arc of convex, and the opposite side edge is the arc of concavity, and is concavo-convex relative between adjacent electrode;
S2, apply the electromotive force of 32V～60V between the adjacent driven electrode, with driving, be positioned at liquid drop movement on drive electrode.
2. micro-fluidic chip according to claim 1 transports the method for drop, it is characterized in that: described micro-fluidic chip comprises bottom crown and the top crown that is oppositely arranged, described bottom crown comprise the first substrate and be formed at successively the described first suprabasil described drive electrode, dielectric layer and first is detested water layer; Described top crown comprises the second substrate and is formed at described second suprabasil second detests water layer.
3. micro-fluidic chip according to claim 2 transports the method for drop, it is characterized in that: described first substrate and second substrate are ito glass.
4. micro-fluidic chip according to claim 2 transports the method for drop, it is characterized in that: the material of described dielectric layer is SU-8.
5. micro-fluidic chip according to claim 2 transports the method for drop, it is characterized in that: described first detests water layer and second, and to detest the material of water layer be Teflon.
6. the preparation method of micro-fluidic chip claimed in claim 2, is characterized in that, comprising:
(a) adopt the base material of ito glass as the moistening micro-fluidic chip of dielectric, by wet etching technique, process drive electrode and contact conductor;
(b) by the dielectric layer material of spin coating SU-8 as chip;
(c) adopt electronics to fluoridize liquid as solvent dilution Teflon solution, by spin coating, baking process, obtain detesting water layer, obtain top crown;
(d) detest water layer in the conduct of ito glass surface spin coating one deck teflon coatings, obtain top crown;
(e) with two-sided tape, upper bottom crown is linked together, obtain micro-fluidic chip.
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