CN110237873A - It is a kind of based on surface acoustic wave for particle separation without sheath stream micro-fluidic chip - Google Patents
It is a kind of based on surface acoustic wave for particle separation without sheath stream micro-fluidic chip Download PDFInfo
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- CN110237873A CN110237873A CN201910349727.3A CN201910349727A CN110237873A CN 110237873 A CN110237873 A CN 110237873A CN 201910349727 A CN201910349727 A CN 201910349727A CN 110237873 A CN110237873 A CN 110237873A
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- 239000002245 particle Substances 0.000 title claims abstract description 54
- 238000000926 separation method Methods 0.000 title claims abstract description 16
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 11
- 239000002699 waste material Substances 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 239000012530 fluid Substances 0.000 claims abstract description 11
- 230000001133 acceleration Effects 0.000 claims abstract description 10
- 239000007788 liquid Substances 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 8
- 230000008569 process Effects 0.000 claims abstract description 4
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 11
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000001259 photo etching Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical group C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims 2
- 230000009471 action Effects 0.000 abstract description 3
- 230000008901 benefit Effects 0.000 abstract description 3
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 6
- 238000001514 detection method Methods 0.000 description 4
- 239000004205 dimethyl polysiloxane Substances 0.000 description 4
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 4
- 230000004907 flux Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004113 cell culture Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000011005 laboratory method Methods 0.000 description 1
- -1 polydimethylsiloxane Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/10—Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/12—Specific details about materials
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- Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
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- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Automatic Analysis And Handling Materials Therefor (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The invention discloses a kind of based on surface acoustic wave for particle separation without sheath stream micro-fluidic chip, including input area, acceleration region, focal zone, sorting region, output area.Wherein input area realizes sample injection, so that fluid stable when reaching acceleration region;Acceleration region is for accelerating fluid and pre-concentrating particle;Focal zone realizes the centre that the particle in liquid is deflected into pipeline;After the realization of sorting region applies identical radio frequency (RF) driving signal in the interdigital electrode (IDT) of two sides, standing wave is formed on the substrate, so that the different size of particle in pipeline realizes selectivity offset under the action of acoustic irradiation power.Output area includes waste fluid channel and collection channel, respectively corresponds invalid waste liquid and the particle sub-elected after sorting.Due to using the structure and SAW sorting of no sheath stream, so the micro-fluidic chip has many advantages, such as that structure is simple, power is low, sample process is high-efficient.
Description
Technical field
The present invention relates to microfluidic analysis technical fields, and in particular to a kind of to be used for what particle separated based on surface acoustic wave
Without sheath stream micro-fluidic chip.
Background technique
In recent years, the on piece laboratory technique based on micro-fluidic chip had been achieved for many research achievements, realized
Such as cell culture, sorting, cracking, solution example preparation, reaction, separation, detection etc..Due to its have it is few to reagent demand,
The advantages such as closed-loop operation, system price be cheap have huge in the research of future biological medicine and the field quick detection field (POC)
Big application potential.
Currently, realizing that cell/particle sorting principle is mainly based upon the physical and chemical category of difference of particle using micro-fluidic chip
Property, such as according to the different dielectric attribute of particle, sorting can be realized under electrophoretic force;Whether it is fluorescently labeled according to particle, fluorescence
Sorting can be achieved in activation;According to quality difference, sorting can be realized under inertia force;It, can be lateral according to the of different sizes of particle
Sorting is realized under acoustic irradiation power.Compared to other separation methods, the particle separation system based on surface acoustic wave has as follows
Advantage: structure is simple, mainly includes Piezoelectric Substrates, IDTs, microchannel;Separating effect is easy to control, and is added in as long as adjusting
RF power on IDTs;Bio-compatibility is good, and sorting does not influence the activity of cell.
For existing micro-fluidic particle sorting system, when particle flows through the sorting region in microfluidic channel, in order to
It avoids particle from being influenced by turbulent flow, vortex, requires and focusing is realized to stuff and other stuff, form single arrangement between guaranteeing in the channel
Particle flux, to realize: when sort region function enable when, intended particle can flow out from collection port, and when sort area
When the function in domain does not enable, particle is only flowed out from waste liquid port.
Particle is focused, common effective ways are to inject sheath stream by using multiple input ports, make sample flow in week
It realizes and focuses under the action of perisarc stream.However, multiple sheath stream input ports mean multiple miniflow pumps, system complexity is increased.
Meanwhile often flow velocity limits mutually with separating effect in the existing work using sheath stream, i.e., after sorting function enabling, point
The flow velocity of favored area particle is slower, and separating effect is higher, and the quantity that intended particle flows to waste liquid port will be fewer, and sorting flux is just
It is lower.So plus the method for sheath stream the problem of although overcoming focusing, but the flow of sheath stream is commonly greater than the flow of sample flow
Twice or more, in order to reach higher separative efficiency, it has to which the flow velocity of sample flow is reduced.
So the design of no sheath stream reduces miniflow pump compared with the design with sheath stream for micro-fluidic sorting chip
Quantity avoids flow velocity and limits mutually with separating effect, reduce the time of pattern detection, is more conducive to the integrated of system
With miniaturization.
Summary of the invention
In order to solve it is existing in the prior art alleviate sample in micro-fluidic separation system focus with sample separative efficiency it
Between contradiction the problem of, the invention proposes a kind of microfluidic separation chip design scheme without sheath stream based on sound wave face standing wave.
Realize that particle focuses by Stokes drag and Sa Fuman lift, the sound being subject to based on the particle being suspended in microchannel
Wave radiation power is proportional to the relational implementation particle separation of particle volume.To reduce the need for the equipment for pumping driving sheath stream to miniflow
It asks, while reducing the time of detection under equivalent sample and required precision.
To achieve the goals above, the technical solution adopted by the present invention: lentor is applied using what particle was subject in a fluid
Drag and Sa Fuman lift realize that particle focuses, and using acoustic irradiation power, realization separates different size of particle.It should
System can be divided into five regions, be input area, acceleration region, focal zone, sorting region, output area respectively.Its
Environmental liquids are pumped into pipeline by middle input area by conduit, and in the disturbance into particle and fluid before acceleration region
It can settle out.Acceleration region, by a series of semi-circular raised structures, duct width is up to 135 μm, minimum 35 μ
M, it would be possible to focus on intermediate region in advance along the particle that lower surface moves, prevent the particle slided along duct wall from entering
Still cause to focus along inner wall sliding after focal zone and fail, secondly there can be high flow velocity when entering focal zone.It is poly-
Burnt region, since fluid is to flow into from a vertex of focal zone, and the sectional area of entrance is much smaller than the section of focal zone
Product, so forming a big velocity gradient field in entrance, particle is in inertia force, this drag of Stoker and Sa Fuman
It is moved under the action of lift towards the direction of entrance distal end, realizes the effect of focusing.Region is sorted, respectively has one to insert in its two sides
Finger transducer (IDTs), the IDTs of two sides are parallel to each other, but with microchannel at 10 ° of angle.When on IDTs add radio frequency
After power signal, standing wave is formed on lithium niobate substrate surface.In microchannel, perpendicular to substrate side be upwardly formed it is right therewith
The traveling wave answered.Traveling wave forms acoustic irradiation power in the scattering etc. of particle surface, so that particle is moved along the position of standing wave node
It is dynamic.The radiant force being subject to due to different particles is different, so that the bigger particle of volume can deviate the streamline of focusing and be moved to
Outlet is collected, other particles are then flowed out from waste port.Output area, in the end of separated region, main pipeline is by two
Pipeline, respectively waste liquid output pipe and collection conduit, are respectively collected waste liquid and target sample.
Further, slotting finger transducer is that lithium niobate lining is fabricated directly in by the method for photoetching process and Al ion implantation
On bottom.
Further, the polydimethylsiloxane structural (PDMS) with microchannel groove and lithium niobate substrate use
It is bonded again after Ion Cleaning.
Compared with the prior art, it the present invention has the following beneficial effects: compared with traditional pipeline with sheath stream, needs
Less miniflow syringe pump is wanted, under the sample of same volume, under conditions of guarantee reaches approximate target sharpness of separation, is reduced
Total sorting time.
Detailed description of the invention
Fig. 1 is the 3D structure of micro-fluidic chip of the invention;
Fig. 2 is the top view of micro-fluidic chip of the invention;
Fig. 3 is Micro-flow pipe structure chart;
Fig. 4 is the focal track schematic diagram of particle of no sheath stream Micro-flow pipe under Comsol emulation.
Specific embodiment
The present invention will be further described below with reference to the drawings.
As shown in Figure 1-3, it is of the invention based on surface acoustic wave for particle separation without sheath stream micro-fluidic chip, including
Micro-flow pipe and slotting finger transducer, the micro-fluidic chip be divided into input area, acceleration region, focal zone, sorting region,
Output area.The structure in each region is as follows.
Input area: the radius of 7 circular hole of duct entry is 700 μm, and the length of pipeline is 1300 μm, and the minimum of pipeline is wide
Degree is 135 μm, and duct entry 7 accesses sample input channel 1.
Acceleration region: duct length is 1600 μm, and minimum duct width is 35um, and maximum duct width is 135 μm, packet
Containing six and half semi-circular array of protrusions 8, radius is 100 μm, and the minimum interval between semicircle is 50 μm.
Focal zone: duct length is 2780 μm, 800 μm of duct width.60 ° of wedge angles are set at left border, it should
Region is equipped with anchor point 9.
Sort region: duct length be 7220 μm, 800 μm of duct width, and be equipped with insert finger transducer 2.
Output area: the sectional area ratio of waste fluid channel 10 and collection channel 11 is 3:1, and the folder between them at 60 degree
The length of angle, waste fluid channel 10 and collection channel 11 is all 2500 μm, and end is respectively provided with the waste liquid outlet 12 that radius is 700 μm
13 are exported with collecting, is respectively used to access waste pipe 3 and collecting duct 4.
Form the Micro-flow pipe in PDMS structure 5, PDMS structure 5 with and lithium niobate substrate 6 it is clear using plasma
It is bonded, is formed without sheath stream micro-fluidic chip, particle can be realized focusing under the driving of no surface acoustic wave again after washing.
Insert finger transducer 2(IDTs) it is that lithium niobate substrate is fabricated directly in by the method for photoetching process and Al ion implantation
On, piezoelectric substrate materials are that 128 ° of Y cut lithium niobate.Each IDTs has 25 pairs to insert finger and 6 reflection bars, is divided between inserting between referring to
40 μm, wavelength is 160 μm.The length of IDTs is 5mm, and with microchannel at 10 ° of angle.By on the IDTs of two sides
Apply identical rf power signal, standing wave can be formed on the substrate between IDTs, and then forms sound wave spoke on particle
Power is penetrated, particle, from streamline deviation collection outlet is focused, realizes particle sorting under acoustic irradiation power.
As shown in figure 4, the focal track of the particle without sheath stream Micro-flow pipe under Comsol emulation.
The above is only a preferred embodiment of the present invention.It is noted that, coming for those skilled in the art
It says, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should be regarded as
Protection scope of the present invention.
Claims (5)
1. a kind of changing without sheath stream micro-fluidic chip, including Micro-flow pipe, slotting refer to for particle separation based on surface acoustic wave
Energy device and lithium niobate substrate (6), the micro-fluidic chip are divided into input area, acceleration region, focal zone, sort region, is defeated
Region out, it is characterised in that:
The input area is equipped with duct entry (7), and the radius of duct entry (7) circular hole is 700 μm, duct entry (7) access
Sample input channel (1);Acceleration region is set there are six half semi-circular array of protrusions (8), and radius is 100 μm, between semicircle
Minimum interval is 50 μm;60 ° of wedge angles are arranged in focal zone at left border, which is equipped with anchor point (9);Sort area
Domain sets that there are two be distributed in the slotting finger transducers (2) of Micro-flow pipe two sides;Output area is equipped with waste fluid channel (10) and collects
Channel (11), waste fluid channel (10) and the sectional area ratio of collection channel (11) are 3:1, and angle is 60 °, waste fluid channel (10) and receipts
Collection channel (11) end is respectively equipped with waste liquid outlet (12) and collects outlet (13), waste liquid outlet (12) and collection outlet (13) point
Waste pipe (3) and collecting duct (4) Yong Yu not accessed.
2. as described in claim 1 based on sound standing surface wave for particle separation without sheath stream micro-fluidic chip, feature
Be: the Micro-flow pipe is formed on PDMS structure (5), PDMS structure (5) with and lithium niobate substrate (6) be bonded.
3. as claimed in claim 2 based on surface acoustic wave for particle separation without sheath stream micro-fluidic chip, feature exists
In: the slotting finger transducer (2) is formed directly into lithium niobate substrate by photoetching process and Al ion implantation, the lithium niobate
The material of substrate is that 128 ° of Y cut lithium niobate.
4. as described in claim 1 based on surface acoustic wave for particle separation without sheath stream micro-fluidic chip, feature exists
In: each inserting finger transducer (2) has 25 pairs to insert finger and 6 reflection bars, and 40 μm are divided between inserting between referring to, wavelength is 160 μm,
With microchannel at 10 ° of angle.
5. as claimed in claim 4 based on surface acoustic wave for particle separation without sheath stream micro-fluidic chip, feature exists
In: by applying identical rf power signal on the IDTs of two sides, standing wave, Jin Er are formed on the substrate between IDTs
Acoustic irradiation power is formed on particle, particle, from streamline deviation collection outlet is focused, realizes particle sorting under acoustic irradiation power.
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110653014A (en) * | 2019-10-28 | 2020-01-07 | 西安交通大学 | Particle multilayer film structure generating device based on surface acoustic wave |
CN111157616A (en) * | 2020-01-21 | 2020-05-15 | 杭州电子科技大学 | Detection platform integrating acoustic surface standing wave cell sorting and lensless imaging |
CN112973986A (en) * | 2019-12-14 | 2021-06-18 | 深圳先进技术研究院 | Centrifugal device |
CN113736649A (en) * | 2021-09-03 | 2021-12-03 | 中国科学院深圳先进技术研究院 | Apparatus and method for screening particles within a fluid sample |
CN115382590A (en) * | 2022-08-19 | 2022-11-25 | 南京理工大学 | Sheath-flow-free particle sorting micro-fluidic chip based on surface acoustic waves |
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CN210171474U (en) * | 2019-04-28 | 2020-03-24 | 杭州电子科技大学 | Sheath-flow-free microfluidic chip for particle separation based on surface acoustic waves |
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CN113736649A (en) * | 2021-09-03 | 2021-12-03 | 中国科学院深圳先进技术研究院 | Apparatus and method for screening particles within a fluid sample |
CN115382590A (en) * | 2022-08-19 | 2022-11-25 | 南京理工大学 | Sheath-flow-free particle sorting micro-fluidic chip based on surface acoustic waves |
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