CN106076219A - A kind of it is applicable to mixing, particle rich and the microfabricated chemical reactor device separated - Google Patents
A kind of it is applicable to mixing, particle rich and the microfabricated chemical reactor device separated Download PDFInfo
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- CN106076219A CN106076219A CN201610407634.8A CN201610407634A CN106076219A CN 106076219 A CN106076219 A CN 106076219A CN 201610407634 A CN201610407634 A CN 201610407634A CN 106076219 A CN106076219 A CN 106076219A
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- interdigital transducer
- barrier film
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00002—Chemical plants
- B01J2219/00004—Scale aspects
- B01J2219/00011—Laboratory-scale plants
- B01J2219/00013—Miniplants
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00801—Means to assemble
- B01J2219/0081—Plurality of modules
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00851—Additional features
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00873—Heat exchange
- B01J2219/0088—Peltier-type elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00889—Mixing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/0095—Control aspects
- B01J2219/00952—Sensing operations
- B01J2219/00954—Measured properties
- B01J2219/00961—Temperature
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- Chemical Kinetics & Catalysis (AREA)
- Automatic Analysis And Handling Materials Therefor (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
A kind of being applicable to mixing, particle rich and the microfabricated chemical reactor device separated, including circular-base, big interdigital transducer, lower diaphragm plate, little interdigital transducer group, upper barrier film and structure of controlling temperature, the biggest interdigital transducer sputters in circular-base；Lower diaphragm plate is sputtered in circular-base and is covered by big interdigital transducer；Little interdigital transducer group sputters on barrier film；Upper barrier film sputters on barrier film and little interdigital transducer group is covered；Structure of controlling temperature sputters on barrier film.The present invention can complete simultaneously the mixing of reactant liquor, granule enrichment with the series reaction such as separate, and suitably facilitate the microfabricated chemical reactor of other many, structure of controlling temperature can monitor and adjust reacting liquid temperature in real time simultaneously, it is ensured that reaction is carried out at a suitable temperature.This invention equipment is the most portable, and integrated level is high, needs sample less, and energy consumption is relatively low, and reaction efficiency is high, and temperature controls fast accurate, reacts open easy operation and maintenance, is integrated with multiple difference in functionality.
Description
Technical field
The invention belongs to technical field of micro-nano manufacture, relate to a kind of being applicable to mixing, particle rich and the macro separated
Reaction member.
Background technology
Along with the development of minute manufacturing technology, people are for the miniaturization of various reactions, rapid, integrated, warp
The requirement of Jiization is more and more higher.Microfluidic system in minute manufacturing technology can integrated detection circuit, complete as chemistry simultaneously
Reaction mix, react, the link such as detection realize intelligentized control method.But existing microfluidic system relies primarily on different runner divides
Stage completes, and links relies on different runner realization to be difficult to the most integrated, and runner easily blocks, and is not easily cleaned maintenance,
With high costs.Currently mainly promoting reagent mixing and reaction by mechanical vibration, equipment is difficult to integrated, and when reagent is less, efficiency is very
Low.
Summary of the invention
It is an object of the invention to provide one can mix with integrated reagent, react, detect so particle rich with separate
Multi-functional being applicable to mixing, particle rich and the microfabricated chemical reactor device separated, this device has that volume is little, efficiency is high, easy
Integrated, can the feature of temperature control.
For reaching above-mentioned purpose, the present invention adopts the following technical scheme that and is achieved:
A kind of it is applicable to mixing, particle rich and the microfabricated chemical reactor device separated, including circular-base, big interdigital transducing
Device, lower diaphragm plate, little interdigital transducer group, upper barrier film and structure of controlling temperature, the biggest interdigital transducer sputters in circular-base；
Lower diaphragm plate is sputtered in circular-base and is covered by big interdigital transducer；Little interdigital transducer group sputters on barrier film；Upper barrier film
Sputter on barrier film and little interdigital transducer group is covered；Structure of controlling temperature sputters on barrier film.
The present invention is further improved by, and described circular-base material is piezoelectric lithium columbate crystal.
The present invention is further improved by, and described big interdigital transducer is by a pair interdigital and circular reflecting grating group of involute
Becoming, the base circle diameter (BCD) of involute is 2 millimeters, and the center of circle of basic circle overlaps with the center of circle of circular-base, and involute expanded angle is
1080 degree, the periphery of involute is furnished with circular reflecting grating.
The present invention is further improved by, and described lower diaphragm plate, lower diaphragm plate are silica membrane.
The present invention is further improved by, and described circular-base height is 500 μm, big interdigital transducer, little interdigital changes
The height of energy device group and structure of controlling temperature is 50nm；The height of upper barrier film and lower diaphragm plate is 70nm.
The present invention is further improved by, if described little interdigital transducer group is changed by the involute that stem structure is identical is interdigital
Can device composition, the interdigital expanded angle of involute is 1080 degree, and the center of circle of the basic circle of involute is evenly distributed on basic circle, several
Involute is interdigital to being uniformly arranged, and the base radius of involute presses requirements set.
The present invention is further improved by, and described structure of controlling temperature is made up of Peltier and temperature detecting resistance, Peltier, thermometric
Resistance and basic circle are concentric circular.
Relative to prior art, the invention has the beneficial effects as follows: during reaction, directly reactant liquor is dropped in device center, right
Each interdigital fourth finger transducer of big interdigital transducer and little interdigital transducer group applies the alternating voltage of corresponding frequencies respectively, respectively
The surface acoustic wave that individual interdigital transducer any point produces all is propagated along the tangential direction of oneself basic circle.Work at big interdigital transducer
Rotating around basic circle with lower drop, each fork value transducer basic circle center of circle of fork value transducer group is all on basic circle, and they can be by
The different size particle rich that each surface acoustic wave of different frequency is corresponding is in the basic circle of oneself.Temperature detecting resistance and Peltier group
The temperature control system become can ensure that reactant liquor maintains suitable reaction temperature.
The temperature control system of temperature detecting resistance of the present invention and Peltier composition can ensure that reactant liquor maintains suitable reaction temperature.
Only big interdigital transducer being applied suitable frequency conversion alternating voltage, drop rotates around basic circle under surface acoustic wave encourages, permissible
Realize particle rich, promote that reagent mixing, reaction are carried out；If again each interdigital transducer of little interdigital transducer group is executed simultaneously
Adding the alternating voltage of corresponding frequencies, the surface acoustic wave of the different frequency that each fork value transducing energy device is excited can by correspondence not
It is enriched to respectively with sized particles in the basic circle of oneself, it is achieved the separation of granule.
This invention equipment is the most portable, and integrated level is high, needs sample less, and energy consumption is relatively low, and reaction efficiency is high, and temperature controls
Fast accurate, reacts open easy operation and maintenance, is integrated with multiple difference in functionality.
Utilize the present invention can complete simultaneously the mixing of reactant liquor, granule enrichment with the series reaction such as separate, simultaneously
It also is adapted for promoting the microfabricated chemical reactor of other many.
Accompanying drawing explanation
Fig. 1 is the sectional view of the present invention.
Fig. 2 is the top view of the big interdigital transducer of the present invention.
Fig. 3 is the top view of lower diaphragm plate of the present invention and little interdigital transducer group.
Fig. 4 is the view that structure of controlling temperature of the present invention is bowed.
In figure: 1 is substrate, and 2 is big interdigital transducer, and 3 is lower diaphragm plate, and 4 is little interdigital transducer group, and 5 is upper barrier film, 6
For structure of controlling temperature, 7 is Peltier, and 8 is temperature detecting resistance, and 9 is big interdigital transducer basic circle, and 10 is reflecting grating.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is described in further detail.
Seeing Fig. 1, the present invention is a kind of to be applicable to reagent mixing, particle rich and the open micro chemical reactor separated
Part, including circular-base 1, big interdigital transducer 2, lower diaphragm plate 3, little interdigital transducer group 4, upper barrier film 5 and structure of controlling temperature 6,
The biggest interdigital transducer 2 sputters in circular-base 1；Lower diaphragm plate 3 is sputtered in circular-base 1 and by big interdigital transducer 2
Cover；Little interdigital transducer group 4 sputters on barrier film 3；Upper barrier film 5 sputters on barrier film 3 and little interdigital transducer group 4 is covered
Lid；Structure of controlling temperature 6 sputters on barrier film 5.
Described circular-base 1 height is 500 μm, big interdigital transducer 2, little interdigital transducer group 4 and structure of controlling temperature 6
It is highly 50nm；The height of upper barrier film 5 and lower diaphragm plate 3 is 70nm.
Seeing Fig. 2, described big interdigital transducer 2 is that to sputter at a pair involute in circular-base 1 interdigital.The most interdigital change
Can be made up of a pair interdigital and circular reflecting grating 10 of involute by device 2, a diameter of 2 millimeters of the basic circle 9 of involute, the center of circle of basic circle 9
Overlapping with the center of circle of circular-base 1, involute expanded angle is 1080 degree, and the periphery of involute is furnished with circular reflecting grating 10.
Seeing Fig. 3, described little interdigital transducer group 4 is that to sputter at one group of involute on lower diaphragm plate 3 interdigital right.Little interdigital
If transducer group 4 is made up of the involute interdigital transducer that stem structure is identical, the interdigital expanded angle of involute is 1080 degree, gradually
The center of circle of the basic circle burst at the seams is evenly distributed on basic circle 9, and several involutes are interdigital to being uniformly arranged, and the base radius of involute is pressed
Requirements set.
Seeing Fig. 4, structure of controlling temperature 6 is made up of Peltier 7 and temperature detecting resistance 8, Peltier 7, temperature detecting resistance 8 and basic circle 9
For concentric circular.
Working method of the present invention is as follows: reactant liquor drops in the central authorities of reaction member of the present invention, if only to big interdigital transducing
Device applies the frequency-changing AC voltage of certain frequency scope, owing to the surface acoustic wave of interdigital transducer any point generation is all along from hexyl
The tangential direction of circle is propagated, and big interdigital transducer 2 excites surface acoustic wave to promote drop to rotate around basic circle 9, it is possible to realize promoting
The mixing of reactant liquor, by reactant liquor particle rich to basic circle 9 and promote each function that reaction carries out；If simultaneously to little fork
Each little interdigital transducer of finger transducer group 4 applies the alternating voltage of respective frequencies, and each little interdigital transducer can be by each
Different size particle rich corresponding to the surface acoustic wave of different frequency is in the basic circle of oneself, thus realizes different scale granule
Separate.Structure of controlling temperature 6 includes can monitoring and adjust reaction liquid temperature in real time with the Peltier 7 of heating and cooling and temperature detecting resistance 8
Degree, it is ensured that reaction is carried out at a suitable temperature.
The present invention utilizes the sound of surface acoustic wave to cause miniflow effect, utilizes involute characteristic with involute interdigital transducer as core
The heart, it is possible to complete simultaneously the mixing of reactant liquor, granule enrichment with the series reaction such as separate, also be adapted for promoting that other are permitted simultaneously
Many microfabricated chemical reactors, structure of controlling temperature can be monitored in real time and adjust reacting liquid temperature, it is ensured that reaction is entered at a suitable temperature
OK.The present invention uses micro-nano technology technique, substantially reduces equipment volume, and integrated level is high compared with existing legacy equipment, carry
Convenience, energy efficient, processing cost are low, need sample few, use complete fixing equipment in course of reaction simultaneously, it is to avoid pass
System equipment is the defect that the equipment dependability caused reduces because parts move.
Claims (7)
1. one kind is applicable to mixing, particle rich and the microfabricated chemical reactor device separated, it is characterised in that include circular-base
(1), big interdigital transducer (2), lower diaphragm plate (3), little interdigital transducer group (4), upper barrier film (5) and structure of controlling temperature (6), wherein
Big interdigital transducer (2) sputters in circular-base (1)；Lower diaphragm plate (3) is sputtered in circular-base (1) and by big interdigital transducing
Device (2) covers；Little interdigital transducer group (4) sputters on barrier film (3)；Upper barrier film (5) sputters on barrier film (3) and by little interdigital
Transducer group (4) covers；Structure of controlling temperature (6) sputters on barrier film (5).
The most according to claim 1 a kind of it is applicable to mixing, particle rich and the microfabricated chemical reactor device separated, its feature
Being, described circular-base (1) material is piezoelectric lithium columbate crystal.
The most according to claim 1 a kind of it is applicable to mixing, particle rich and the microfabricated chemical reactor device separated, its feature
Being, described big interdigital transducer (2) is made up of a pair interdigital and circular reflecting grating of involute (10), the basic circle (9) of involute
A diameter of 2 millimeters, the center of circle of basic circle (9) overlaps with the center of circle of circular-base (1), and involute expanded angle is 1080 degree, gradually opens
The periphery of line is furnished with circular reflecting grating (10).
The most according to claim 1 a kind of it is applicable to mixing, particle rich and the microfabricated chemical reactor device separated, its feature
Being, described lower diaphragm plate (3), lower diaphragm plate (5) are silica membrane.
The most according to claim 1 a kind of it is applicable to mixing, particle rich and the microfabricated chemical reactor device separated, its feature
Being, described circular-base (1) height is 500 μm, big interdigital transducer (2), little interdigital transducer group (4) and structure of controlling temperature
(6) height is 50nm；The height of upper barrier film (5) and lower diaphragm plate (3) is 70nm.
The most according to claim 1 a kind of it is applicable to mixing, particle rich and the microfabricated chemical reactor device separated, its feature
Being, described little interdigital transducer group (4) is if being made up of the involute interdigital transducer that stem structure is identical, the exhibition that involute is interdigital
Angle of release degree is 1080 degree, and the center of circle of the basic circle of involute is evenly distributed on basic circle (9), and several involutes are interdigital to uniformly setting
Putting, the base radius of involute presses requirements set.
The most according to claim 1 a kind of it is applicable to mixing, particle rich and the microfabricated chemical reactor device separated, its feature
Being, described structure of controlling temperature (6) is made up of Peltier (7) and temperature detecting resistance (8), Peltier (7), temperature detecting resistance (8) and base
Circle (9) is concentric circular.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610407634.8A CN106076219B (en) | 2016-06-12 | 2016-06-12 | It is a kind of to be applied to mixing, particle rich and the microfabricated chemical reactor device separated |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610407634.8A CN106076219B (en) | 2016-06-12 | 2016-06-12 | It is a kind of to be applied to mixing, particle rich and the microfabricated chemical reactor device separated |
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| Publication Number | Publication Date |
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| CN106076219A true CN106076219A (en) | 2016-11-09 |
| CN106076219B CN106076219B (en) | 2017-12-15 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109781810A (en) * | 2019-02-26 | 2019-05-21 | 西安交通大学 | The quickly array surface acoustic wave paper substrate micro-fluidic system of detection concentration of heavy metal ion |
| CN109781805A (en) * | 2018-12-21 | 2019-05-21 | 西安交通大学 | A kind of micro- reaction system of surface acoustic wave improving micro liquid electrochemical reaction efficiency |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109967148B (en) * | 2019-04-24 | 2020-08-04 | 西安交通大学 | Integrated temperature control system suitable for surface acoustic wave micro-channel |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130192958A1 (en) * | 2012-01-31 | 2013-08-01 | The Penn State Research Foundation | Microfluidic manipulation and sorting of particles using tunable standing surface acoustic wave |
| CN103667051A (en) * | 2013-12-20 | 2014-03-26 | 河南省医药科学研究院 | Surface acoustic micro-fluidic chip for tumor cell separation |
| CN104928173A (en) * | 2015-05-26 | 2015-09-23 | 西安交通大学 | Three-dimensional integrated microchemical reaction device applicable to mixing and disruption of cells |
-
2016
- 2016-06-12 CN CN201610407634.8A patent/CN106076219B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130192958A1 (en) * | 2012-01-31 | 2013-08-01 | The Penn State Research Foundation | Microfluidic manipulation and sorting of particles using tunable standing surface acoustic wave |
| CN103667051A (en) * | 2013-12-20 | 2014-03-26 | 河南省医药科学研究院 | Surface acoustic micro-fluidic chip for tumor cell separation |
| CN104928173A (en) * | 2015-05-26 | 2015-09-23 | 西安交通大学 | Three-dimensional integrated microchemical reaction device applicable to mixing and disruption of cells |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109781805A (en) * | 2018-12-21 | 2019-05-21 | 西安交通大学 | A kind of micro- reaction system of surface acoustic wave improving micro liquid electrochemical reaction efficiency |
| CN109781805B (en) * | 2018-12-21 | 2020-05-19 | 西安交通大学 | Surface acoustic wave micro-reaction system for improving electrochemical reaction efficiency of trace liquid |
| CN109781810A (en) * | 2019-02-26 | 2019-05-21 | 西安交通大学 | The quickly array surface acoustic wave paper substrate micro-fluidic system of detection concentration of heavy metal ion |
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| CN106076219B (en) | 2017-12-15 |
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Effective date of registration: 20201225 Address after: 214200 No.53, Xinguan East Road, Guanlin Town, Yixing City, Wuxi City, Jiangsu Province Patentee after: WUXI JIANGNAN CABLE Co.,Ltd. Address before: Beilin District Xianning West Road 710049, Shaanxi city of Xi'an province No. 28 Patentee before: XI'AN JIAOTONG University |
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