CN220425377U - Microfluidic device for particle sorting based on phonon crystal structure - Google Patents
Microfluidic device for particle sorting based on phonon crystal structure Download PDFInfo
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Abstract
The utility model discloses a micro-fluidic device for particle sorting based on a photonic crystal structure, which comprises a piezoelectric interdigital transducer structure, a photonic crystal structure bonded on the upper layer of the piezoelectric interdigital transducer structure by ultrasonic coupling glue, a bulk acoustic wave reflection area surrounded by the photonic crystal structure, a micro-channel structure in the bulk acoustic wave reflection area, a packaging layer above the micro-channel structure, a micro-channel inlet and three micro-channel outlets in the packaging layer. The utility model discloses a microfluidic device for particle sorting based on phonon crystal structure, which has the characteristics of high flux and low shearing force, and can not damage the bioactivity of particles in a sorted sample while sorting in large quantities. In the utility model, particle sorting is realized by using only a single acoustic wave excitation device, namely a piezoelectric interdigital transducer structure, and then an upper layer of phonon crystal structure is bonded on the piezoelectric interdigital transducer by using ultrasonic coupling glue, so that the number of interdigital transducers is reduced while acoustic waves are effectively controlled.
Description
Technical Field
The utility model relates to the biomedical field, in particular to a microfluidic device for particle sorting based on phonon crystal structure.
Background
Heterogeneous particle and cell mixture separation is an important task for various applications in the fields of chemical science, biology and medicine, especially for cell-based therapies and medical research, separating different cells and removing unwanted particles such as bacteria and debris from cell solutions, which are vital for diagnosis and treatment of related diseases. Researchers have developed a variety of different microfluidic sorting devices by using external field effects such as electric, magnetic and acoustic fields, or by using specific microstructures and their induced microfluidic effects. Among them, active sorting technology, which generates a sound field using bulk acoustic waves, has been widely focused on the advantages of its rapid response, high throughput, and low shear force.
When a liquid is stored in a cuboid shape, a micro-channel is made of a solid substrate, if travelling bulk acoustic waves exist in the bottom and side wall of the micro-channel and the solid substrate, the bulk acoustic waves are coupled into the liquid from the solid substrate in a refraction mode due to mismatching of sound speeds of the solid substrate and the liquid, and the bulk acoustic waves are called leaky waves in the liquid. When there are two rows of opposite bulk acoustic waves in the solid substrate, there will also be two rows of opposite leaky waves after coupling into the liquid, which will produce a coherent effect, thereby producing some acoustic forces that will equilibrate in fixed areas, called pressure nodes and pressure anti-nodes. As long as the particle diameter suspended in the microchannel liquid is much smaller than half the wavelength of Yu Loubo, these acoustic forces will drive the particle motion, particles of different densities will move towards the pressure node or pressure anti-node, and the larger diameter particles will move faster, according to this principle particle sorting can be achieved.
In recent decades, photonic crystal devices have been successfully used in the fields of radio frequency communications, acousto-optic modulation, and micromechanical vibration damping. In recent years, the application of phonon crystals in the field of microfluidics is a new research direction, and the transmission direction of sound waves can be effectively controlled by utilizing the characteristic that the phonon crystals can reflect sound waves with the frequency in the forbidden band range, so that the direction of acoustic force generated by refraction of the sound waves into microfluidics is controlled, and a complex microfluidic function is realized. In addition, because the phonon crystal is manufactured by using a plane photoetching process, the manufacturing of the device has the characteristics of low cost and large batch, and the application of the phonon crystal in the field of microfluidics is a good choice.
At present, a common microfluidic particle sorting device is manufactured by an acoustic method, a plurality of groups of metal interdigital electrodes are manufactured on a piezoelectric device, and the transmission direction of sound waves is controlled by utilizing the difference of the arrangement directions of the metal interdigital electrodes for generating the sound waves. In view of the above problems, a solution is provided below.
Disclosure of Invention
The utility model aims to provide a micro-fluidic device for particle sorting based on a photonic crystal structure, which can reduce the cost of a traditional device and simultaneously apply the photonic crystal to a new function of particle acoustic sorting.
The technical aim of the utility model is realized by the following technical scheme:
in this application, include from bottom to top piezoelectric acoustic wave excitation device, ultrasonic coupling material, acoustic wave control region, microchannel structure, cuboid packaging structure that set gradually.
In the application, the piezoelectric acoustic wave excitation device is characterized in that a metal interdigital electrode is manufactured on a 128-degree Y-X lithium niobate piezoelectric material, a periodic electric field is generated after alternating current is applied, and a surface acoustic wave with the same frequency as the periodic electric field is generated on the surface of the piezoelectric material by utilizing the inverse piezoelectric effect of the piezoelectric material, wherein the propagation direction of the surface acoustic wave is perpendicular to the metal interdigital electrode.
In this application, the ultrasonic coupling material is mainly composed of a water-soluble gel material, and is used to transfer the surface acoustic wave generated by the piezoelectric acoustic wave excitation device to the acoustic wave control area of the upper layer, and generate the bulk acoustic wave on the upper layer and make the bulk acoustic wave work in the acoustic wave control area.
In this application, the acoustic wave control region at least includes: phonon crystals and bulk acoustic wave reflection regions. The phonon crystal is a Bragg scattering phonon crystal processed by a deep reactive ion etching process on a substrate, the substrate is a (100) crystal orientation monocrystalline silicon material, the shape of a scatterer is a cylindrical through hole, and the plane shape of a lattice unit is square. The bulk acoustic wave reflection area is a rectangular area surrounded by periodically distributed phonon crystal units and is arranged on a silicon substrate serving as a bulk acoustic wave propagation medium and used for controlling the transmission and distribution of bulk acoustic waves in the silicon substrate.
In this application, cuboid packaging structure material is Polydimethylsiloxane (PDMS), includes than little wide cuboid of microchannel structure to and the through-hole that runs through the cuboid.
The cuboid packaging structure is used for sealing the micro-channel structure at the lower layer. And the volatilization of the microfluid in the flowing process of the microfluid in the micro-channel is reduced while the micro-fluid inlet and the micro-fluid outlet are provided for the micro-channel.
The through holes penetrating through the cuboid are four in number and are cylindrical through holes. Is divided into a microfluidic inlet through hole and three microfluidic outlet through holes. The diameter of the through hole at the inlet is consistent with the width of the micro-flow channel below, and the collecting opening of the micro-flow channel below is smaller at the outlet, so that the outside is not benefited to collect the sorted micro-flow, and the diameter of the through hole at the outlet is designed to be larger than the width of the collecting opening of the micro-flow channel.
In this application, the micro flow channel structure is a key part of sorting mixed particles. And the volume acoustic wave reflecting area is covered by the cuboid packaging structure. The micro-channel structure comprises a micro-channel and three particle collecting ports, and when the micro-channel structure works, sound waves are refracted from the bulk sound wave reflecting area and enter liquid in the micro-channel.
In this application, the device during operation carries the micro-fluid sample of two kinds of mixed suspended particles of different diameters, flows by the device of outside storage sample through plastic conduit to cuboid packaging structure's entry, then gets into from packaging structure's entry micro-channel, can separate the mixed suspended particles in the liquid according to different diameter sizes after the micro-channel. Different suspended particles enter different particle collecting ports in the micro-channel, then flow into an outlet of the cuboid packaging structure from the collecting ports, flow out through the outlet and are collected outside the device.
As described above, the microfluidic device for particle sorting based on phonon crystal structure of the present application has the following advantages: according to the method, only a single group of metal interdigital electrodes are required to be manufactured on the piezoelectric material, the generated surface acoustic wave is coupled to an acoustic wave control area on the silicon substrate through ultrasonic coupling glue, and then sound waves after phonon crystal control are refracted and enter liquid in the micro-channel, and mixed suspended particles in the liquid in the micro-channel can be sorted according to different diameters. On the basis that a plurality of groups of metal interdigital electrodes are required to be manufactured in a traditional acoustic sorting device so as to generate acoustic waves in different directions, the number of the metal interdigital electrodes is reduced, and the manufacturing cost is reduced; according to the method, the micro-channel structure is manufactured on the silicon wafer, so that the manufacturing cost and the material cost of the micro-channel are reduced, and the device is detachable due to the fact that the device is assembled by using the ultrasonic coupling adhesive for bonding, so that the piezoelectric acoustic wave excitation device with the highest cost can be reused.
Drawings
FIG. 1 is an overall external view of an embodiment of a microfluidic device for particle sorting based on photonic crystal structures, wherein the encapsulation layer and the microchannel structure capped under the encapsulation layer are enlarged;
fig. 2 is a schematic diagram of an assembly structure of a microfluidic device for particle sorting based on phonon crystal structure according to an embodiment;
fig. 3 is a schematic diagram of the structure of an acoustic wave excitation device, i.e., an interdigital transducer, in the microfluidic device for performing particle sorting based on phonon crystal structure according to the embodiment;
FIG. 4 is a schematic view of the shape of an ultrasonic coupling gel of a connection layer between an acoustic wave excitation device and an acoustic wave control layer of a microfluidic device according to an embodiment;
fig. 5 is a schematic structural diagram of an acoustic wave control layer in the microfluidic device according to the embodiment;
FIG. 6A is a schematic view showing details of phonon crystals of an acoustic wave control layer in an embodiment of a microfluidic device, including a silicon substrate, and a via-shaped diffuser;
fig. 6B is a schematic view showing a micro flow channel structure of an acoustic wave control layer in detail, including a main flow channel and three collection ports at the tail end, in the micro flow control device according to the embodiment;
FIG. 6C is a schematic diagram showing details of the photonic crystal unit structure in the microfluidic device according to the embodiment;
FIG. 7A is a schematic diagram showing a process of refracting a bulk acoustic wave into a liquid in a microchannel by a bulk acoustic wave reflection region in a microfluidic device according to an embodiment;
FIG. 7B is an illustration of acoustic forces created by refraction of bulk acoustic waves into a microfluidic channel liquid, and pressure nodes and pressure anti-node regions created thereby, in an example microfluidic device;
FIG. 8A is a schematic diagram illustrating the propagation directions of incident and reflected waves on a photonic crystal substrate in a microfluidic device according to an embodiment;
FIG. 8B is a schematic diagram of a pressure node formed by coupling an incident wave and a reflected wave into a microchannel in a microfluidic device according to an embodiment;
FIG. 8C is a schematic diagram showing mixing of suspended particles with different diameters in a microchannel to separate the suspended particles in a microfluidic device according to an embodiment;
fig. 9A is a schematic diagram of an overall structure of a packaging layer of a micro flow channel in the micro flow control device according to the embodiment, wherein the packaging layer is located above the micro flow channel;
fig. 9B is a schematic alignment diagram of the encapsulation layer and the lower layer of the micro fluidic channel in the micro fluidic device according to the embodiment.
Reference numerals: 1. a piezoelectric material substrate; 2. a metal interdigital electrode; 3. an ultrasonic coupling adhesive layer; 4. a monocrystalline silicon material substrate; 5. phonon crystal structure; 6. a bulk acoustic wave reflection region; 7. a micro flow channel structure; 8. an encapsulation layer; 9. a small-diameter particle collection port of the micro flow channel; 10. a large-diameter particle collection port of the micro flow channel; 11. a silicon substrate of a phonon crystal of a silicon-air structure; 12. a cylindrical through hole of the phonon crystal with a silicon-air structure, wherein the inside of the cylindrical through hole is air; 13. a particle inlet via penetrating the encapsulation layer; 14. a small diameter particle outlet through hole penetrating the encapsulation layer; 15. and a large-diameter particle outlet through hole penetrating the encapsulation layer.
Detailed Description
The following description is only of the preferred embodiments of the present utility model, and the scope of the present utility model should not be limited to the examples, but should be construed as falling within the scope of the present utility model.
Referring to fig. 1, an embodiment of the present utility model relates to a microfluidic device for particle sorting based on phonon crystal structure. As shown in fig. 1 and 2, the microfluidic device includes: the piezoelectric material comprises a piezoelectric material substrate 1, metal interdigital electrodes 2, an ultrasonic coupling adhesive layer 3, a monocrystalline silicon substrate 4, a phonon crystal structure 5, a bulk acoustic wave reflection area 6, a micro-channel structure 7 and a micro-channel packaging layer 8. Wherein the piezoelectric material substrate 1 and the metal interdigital electrode 2 are combined to form an interdigital transducer for generating sound waves; an ultrasonic coupling glue layer 3 is coated between the monocrystalline silicon substrate 4 and the piezoelectric material substrate 1 and is used for transferring sound waves generated on the piezoelectric material 1 to the monocrystalline silicon substrate 4; by fabricating a phonon crystal structure 5 on a monocrystalline silicon substrate 4, and leaving a bulk acoustic wave reflection region 6 for controlling the propagation direction of acoustic waves; the micro-channel structure 7 is manufactured through the bulk acoustic wave reflection area 6 on the monocrystalline silicon substrate, a sorting channel is provided for a micro-fluid sample mixed with suspended particles, and meanwhile, a specific acoustic force is generated by utilizing the limiting effect of the bulk acoustic wave reflection area 6 on the acoustic waves and acts on the suspended particles, so that sorting is realized; and a packaging layer 8 is manufactured above the micro-channel structure 7, and an inlet and an outlet are provided for exchanging samples between the micro-channel and the outside while a closed top cover is provided for the micro-channel.
Wherein the piezoelectric material substrate 1 can generate a surface acoustic wave with the same frequency as the periodic electric field by applying the periodic electric field on the surface thereof due to the inverse piezoelectric effect, and the piezoelectric material is typically lithium niobate (LiNbO) 3 ) Zinc oxide (ZnO), aluminum nitride (AlN), and the like. In the example of the utility model, the piezoelectric substrate selects 128 DEG Y lithium niobate which propagates along the tangential X direction, and the sound velocity of the material is about c=3992 m/s.
The metal interdigital electrode 2 can be manufactured on the surface of the piezoelectric substrate material to generate a periodic electric field, and the propagation direction of the generated surface acoustic wave is vertical to the metal interdigital electrode as shown in fig. 3. In the embodiment of the utility model, in order to generate the surface acoustic wave with enough intensity, the metal interdigital electrode 2 is formed by a titanium adhesion layer with the thickness of 20nm and a gold conductive layer with the thickness of 200nm on a piezoelectric material substrate by using a deposition process, and in order to generate the surface acoustic wave with the frequency f on the piezoelectric material substrate, the design basis of the width w and the spacing d of the metal electrode is as follows: w=d=c/(4 f).
As shown in fig. 4, an ultrasonic coupling adhesive layer 3 is provided for coupling a surface acoustic wave generated on a piezoelectric material substrate to an upper layer single crystal silicon substrate. The ultrasonic coupling adhesive is made of water-soluble molecular material, and the main component of the ultrasonic coupling adhesive used in the embodiment of the utility model is trichlorohydroxydiphenyl ether, and the ultrasonic coupling adhesive with the thickness of about 300-500um is uniformly coated on the surface acoustic wave propagation area of the piezoelectric material when in use.
The ultrasonic surface wave generated by the surface of the piezoelectric material can be transferred to the monocrystalline silicon substrate 4 by using the ultrasonic coupling glue layer 3, and the transmission mode of the acoustic wave in the monocrystalline silicon substrate is bulk acoustic wave.
As shown in fig. 5, a periodic phonon crystal structure 5, a bulk acoustic wave reflection region 6, and a micro flow channel structure 7 are fabricated on a single crystal silicon substrate 4. In which details of the periodic photonic crystal structure are shown in fig. 6A, periodic cylindrical through holes are etched as scatterers of each photonic crystal unit in a region designed on the single crystal silicon substrate, and the pitch of each cylindrical through hole is the same, so that each cylindrical through hole 12 and the single crystal silicon material 11 around it form one square lattice photonic crystal unit as shown in fig. 6C. The micro flow channel structure 7, as shown in fig. 6B, includes one main flow channel and three collection ports.
The most important physical property of phononic crystal units is the forbidden band characteristic, i.e. the ability to block and reflect incident sound waves with frequencies in their forbidden band frequency range.
In the prior art, the research of acoustic sorting for micro-flow control, it has been found that a pressure node can be generated in a micro-flow channel by utilizing acoustic coherent waves, so that suspended particles in the micro-flow channel can be captured to the pressure node. As shown in FIG. 7A, which shows a cross section of a rectangular microchannel, when a traveling bulk acoustic wave contacts a liquid at the bottom of the liquid in the microchannel, the viscosity of the liquid relative to the substrate increases, resulting in refraction of a portion of the acoustic wave into the liquid at an angle of refractionWherein c l And c s The speed of sound waves in the liquid in the micro flow channel and the speed of sound waves in the solid substrate on which the micro flow channel is formed are respectively. When the travelling sound wave contacts the liquid at the side wall of the micro-channel liquid, the sound wave is refracted into the liquid in a constant direction, and the refraction angle is 0.
In the present embodiment, two rows of bulk acoustic waves with opposite directions and a fixed phase difference are generated by using phonon crystals, and as shown in fig. 7B, after the two rows of waves are refracted into the liquid, they are mutually overlapped in the liquid, so as to generate an acoustic coherent wave field. The following acoustic forces are thereby generated: acoustic radiation force F rad Viscous drag F induced by sum acoustic flow drag Acting on suspended particles in the liquid, the suspended particles being subjected to their own gravity G and buoyancy F f As shown in fig. 7B.
Acoustic radiation force:
viscous resistorForce: f (F) drag ＝3πηd p (v p -v f )
Wherein p is 0 V is the sound pressure in the liquid p To suspend the volume of the particles beta f For compressibility of the liquid, λ and k are the wavelength and wave vector of the acoustic wave refracted into the liquid, respectively, x is the vertical distance of the particle from the pressure node region, ρ f And ρ p The density of the liquid and the density of the particles suspended in the liquid, respectively, eta is the dynamic viscosity of the liquid, d p For the diameter of the suspended particles, v f And v p The flow rate of the liquid and the movement velocity of the particles suspended in the liquid, respectively.Called acoustic contrast coefficient, when->At the time of F rad And F drag Under the combined action, the suspended particles move towards the pressure node, otherwise when +.>When the suspended particles move toward the pressure anti-node. The acceleration of the acoustic force driving the spherical particles to move is: it can be seen that the particle diameter d of the same density p The greater the acceleration a p The larger. In the example of the utility model, two spherical particles with different diameters and the same density are selected and mixed in liquid to be used as a sample to be sorted. The density of the particles and the density of the liquid are chosen such that +.>The particles move towards the pressure node when subjected to acoustic forces. The acceleration of the particles with different diameters moving to the pressure node is different in the flowing process, so that the speed of the particles moving to the pressure node is also different, and the acceleration of the particles with larger diameters is higher, so that the speed is higherAnd on the contrary, the small-diameter particles move to the pressure node at a slower speed, so that the particles with different diameters can be separated according to the principle and collected at the outlet of the micro-channel respectively.
In the present example, the phonon crystal has its characteristic forbidden band characteristics. The piezoelectric substrate is used for generating sound waves with the frequency within the forbidden band range of the phonon crystal, the sound waves enter the silicon substrate through the ultrasonic coupling glue to form bulk sound waves, the bulk sound waves enter the bulk sound wave reflection area and then are reflected by the boundary of the phonon crystal, and then the reflected sound waves interfere with the incident sound waves and are refracted into the micro-channel 7 to form pressure nodes. A bulk acoustic wave reflection region 6 is thus provided in the region enclosed by the periodic phonon crystal structure for inputting acoustic waves and receiving reflected acoustic waves, the reflection region being a rectangular region enclosed in the plane 4 by the phonon crystal structure 5. The incident and reflected paths of the sound wave on the monocrystalline silicon substrate are shown in fig. 8A, the incident wave and the reflected wave enter the liquid in the micro-channel in a fluid-solid coupling mode, an interference effect is formed, and as shown in fig. 8B, the pressure nodes are approximately distributed on a line near the central axis of the micro-channel.
In the example of the present utility model, as shown in fig. 8C, separation of white particles from black and white mixed particles can be finally achieved. In the process of mixing two kinds of liquid with suspended particles with different diameters, the suspended particles can move towards a pressure node in the middle of the micro-flow channel under the action of acoustic force when flowing to the collecting port from the beginning end of the micro-flow channel at a proper speed. The diameter of the black spherical particles is larger, and the acceleration of the acoustic force driving the black spherical particles to move is larger, whereas the acceleration of the white spherical particles with smaller diameters is smaller, so that the black particles move to the pressure node more quickly and can move to the pressure node earlier. Eventually, as shown in fig. 8C, the smaller diameter white particles move to the both side collecting ports 9, and the larger diameter black particles move to the middle collecting port 10 together with a small number of white particles. By this method, high-purity small-diameter white particles can be rapidly extracted, and after that, the sample obtained in the collection port 10 is subjected to a plurality of sorting, and also high-purity large-diameter black particles can be extracted.
In the above-described operation, a process in which a liquid moves in a micro flow channel is described, and a complete particle sorting process is that, after the device is energized, a sample is transported from the outside into the micro flow channel, and at the same time, a sorted sample needs to be collected from the inside of the micro flow channel to the outside. However, since the collection port of the micro-channel is generally narrow, and the micro-channel cannot be directly connected with the outside through a pipeline, the embodiment of the utility model designs a cover plate with a micro-channel structure as shown in fig. 9, which is used as a packaging layer of the micro-channel, and provides a larger inlet and outlet for the connection of the micro-channel with the outside.
As shown in fig. 9A, in the structure of the encapsulation layer 8, through holes 13 are used for transporting the liquid carrying the mixed particles from the outside into the lower micro flow channels, and through holes 14 and 15 are used for collecting the particles in the particle collection ports 9 and 10 of the lower micro flow channels, respectively.
The packaging layer 7 and the lower monocrystalline silicon substrate are fixed in such a way that plasma is used for processing the surface of the monocrystalline silicon substrate to attach a layer of chemical bond on the surface, then the inlet and outlet of the packaging layer are aligned with the micro-channels on the monocrystalline silicon substrate to bond, the alignment of the packaging layer and the micro-channels is as shown in fig. 9B, the bottom surface of the through hole 13 is aligned with the initial end of the lower micro-channel, and the bottom surfaces of the through holes 14 and 15 are respectively aligned with the collecting ports 9 and 10 of the lower micro-channel. The material of the encapsulation layer 7 is Polydimethylsiloxane (PDMS), and four through holes with proper diameters are formed at designated positions on the PDMS with a cuboid shape to obtain the encapsulation layer 7.
In summary, the micro-channel structure is introduced into the bulk acoustic wave reflection area surrounded by the periodically distributed square lattice phonon crystals, so that the phonon crystals are successfully applied to the acoustic sorting function in the micro-fluidic field. In the utility model, a periodic electric field is generated on the upper surface of a piezoelectric material substrate by utilizing a metal interdigital electrode, then a surface acoustic wave is generated by utilizing the inverse piezoelectric effect of the piezoelectric material, and then the surface acoustic wave is only required to be transferred into an upper monocrystalline silicon substrate, and a plurality of groups of metal interdigital electrodes with opposite directions are required to be manufactured by a traditional acoustic standing wave particle sorting device so as to generate surface acoustic waves with opposite directions; the key part of the micro-flow control in the utility model is to manufacture on a monocrystalline silicon substrate, and the processing cost and the material cost are low. Therefore, the utility model successfully reduces the manufacturing cost based on the traditional acoustic sorting device and has high industrial utilization value.
The technical problems, technical solutions and advantageous effects solved by the present utility model have been further described in detail in the above-described embodiments, and it should be understood that the above-described embodiments are only illustrative of the present utility model and are not intended to limit the present utility model, and any modifications, equivalent substitutions, improvements, etc. within the spirit and principle of the present utility model should be included in the scope of protection of the present utility model.
Claims (8)
1. The utility model provides a micro-fluidic device based on photonic crystal structure carries out particle sorting, includes piezoelectricity sound wave excitation device, ultrasonic wave coupling glue film (3), photonic crystal structure (5) and encapsulation layer (8), its characterized in that, photonic crystal structure (5) are located the top of piezoelectricity sound wave excitation device one side, just photonic crystal structure (5) are connected with piezoelectricity sound wave excitation device through ultrasonic wave coupling glue film (3), photonic crystal structure (5) surface is equipped with bulk acoustic wave reflection area (6), be equipped with particle sorting microchannel on bulk acoustic wave reflection area (6), be equipped with encapsulation layer (8) on the particle sorting microchannel.
2. The microfluidic device for particle sorting based on phononic crystal structure according to claim 1, wherein the piezoelectric acoustic wave excitation device comprises a piezoelectric material substrate (1), and the surface of the piezoelectric material substrate (1) is provided with metal interdigital electrodes (2).
3. Microfluidic device for particle sorting based on phononic crystal structure according to claim 1, characterized in that the ultrasound coupling glue layer (3) is provided with ultrasound coupling glue, which is located between the bulk acoustic wave reflection area (6) and the piezoelectric acoustic wave excitation device.
4. The microfluidic device for particle sorting based on a photonic crystal structure according to claim 1, wherein the photonic crystal structure (5) is a two-dimensional square lattice silicon-air photonic crystal, the photonic crystal structure (5) comprises a solid substrate and an acoustic wave scattering structure arranged on the solid substrate, the solid substrate is a silicon substrate, the acoustic wave scattering structure is a cylindrical through hole, and the acoustic wave scattering structure is distributed on the silicon substrate according to the square lattice structure.
5. A microfluidic device for particle sorting based on a photonic crystal structure according to claim 1, characterized in that the bulk acoustic wave reflecting region (6) comprises a bulk acoustic wave propagation medium and a photonic crystal structure (5) arranged around the bulk acoustic wave propagation medium, the bulk acoustic wave propagation medium being a silicon material in the shape of a cuboid plate, the photonic crystal being a two-dimensional square lattice silicon-air photonic crystal, the bulk acoustic wave reflecting region (6) being arranged to reflect the bulk acoustic wave entering the region through the bulk acoustic wave propagation medium such that the reflected wave overlaps with the incident wave, thereby forming a coherent wave in the reflecting region.
6. The micro-fluidic device for particle sorting based on a photonic crystal structure according to claim 1, wherein the particle sorting micro-channel comprises a micro-channel structure (7) and three collection ports, the particle sorting micro-channel is located in a bulk acoustic wave reflection area (6), the three collection ports are all arranged at one end of the micro-channel structure (7), and the three collection ports are used for collecting particles with different diameters after sorting.
7. The microfluidic device for particle sorting based on phononic crystal structure according to claim 1, wherein the encapsulation layer (8) comprises a solid cover plate with a cuboid shape, a microfluidic inlet and three microfluidic outlets, wherein the microfluidic inlet is positioned at one end of the solid cover plate, the three microfluidic outlets are positioned at the other end of the solid cover plate, the solid cover plate with a cuboid shape is a polydimethylsiloxane substrate, and the encapsulation layer (8) of the particle sorting microchannel is positioned above the particle sorting microchannel.
8. The microfluidic device of claim 6, wherein when a liquid is present in the particle sorting microchannel, coherent waves are refracted into the liquid to exert an acoustic force on particles suspended in the microchannel liquid to push the particles to the force nodes.
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