CN205785612U - A kind of surface acoustic wave sensor based on microgap pressure monitoring - Google Patents
A kind of surface acoustic wave sensor based on microgap pressure monitoring Download PDFInfo
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- CN205785612U CN205785612U CN201620520746.XU CN201620520746U CN205785612U CN 205785612 U CN205785612 U CN 205785612U CN 201620520746 U CN201620520746 U CN 201620520746U CN 205785612 U CN205785612 U CN 205785612U
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- microgap
- acoustic wave
- surface acoustic
- interdigital transducer
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Abstract
This utility model relates to a kind of surface acoustic wave sensor based on microgap pressure monitoring, including two pieces of piezoelectric substrates, two pieces of piezoelectric pads and two groups of interdigital transducers, two pieces of piezoelectric pads connect two pieces of piezoelectric substrates and form the inner chamber of hollow, two groups of interdigital transducers are all located in inner chamber, and are individually fixed on two pieces of piezoelectric substrates.Compared with prior art, this utility model hollow space two sides is open, and processes wire lead-out wire can ensure that accurately, and then improving measurement accuracy, furthermore both sides substrate is respectively provided with sensor circuit, can realize the measurement that two sides pressure is surveyed.
Description
Technical field
This utility model relates to a kind of surface acoustic wave sensor, especially relates to a kind of based on microgap pressure monitoring
Surface acoustic wave sensor.
Background technology
Because the theory analysis of microgap contact pressure is difficult to accurately, actual quantification is the most difficult, contact pressure monitor
Though part is of a great variety, but mainly utilize the piezoelectricity of material and piezoresistive effect to realize, but have weak point.Piezoelectric type
Contact pressure Sensitive Apparatus has the requirement of harshness to measuring circuit, and current range of application is also subject to certain restrictions.
Capacitance pressure transducer is highly sensitive, but due to self petite electric capacity, is vulnerable to circuit parasitic capacitance interference.
Additionally, newly turnover existing utilize the pressure transducer of new material development little and not reproducible owing to there is sensitive volume
The shortcomings such as measurement, also in continuing conceptual phase.Found by research, surface acoustic wave (Surface Acoustic
Wave, SAW) device can realize the working method of passive and wireless, and made by processing technique and can meet microgap
The structure of pressure monitoring, functional requirement.
Chinese patent CN 204439245 U discloses a kind of surface acoustic wave temperature and pressure sensor, including: lining
The end, parallel on substrate two delaying type saw sensor pattern are installed, are respectively as follows: pressure figure and temperature
Figure；Pressure figure and temperature graph include respectively: unidirectional interdigital transducer and multiple reflecting grating, pressure figure
Unidirectional interdigital transducer is connected with the unidirectional interdigital transducer of temperature graph；Being fixed with pedestal under substrate, pedestal exists
Pressure conducting bores is offered below multiple reflecting gratings of pressure figure；Caping, caping and pedestal it is additionally provided with on pedestal
Form a cavity.But this sensor has with lower curve, first its hollow structure used fully seals formula,
Because SAW device size is small, processes wire lead-out wire is it is difficult to ensure that accurately；Its hollow structural mechanical
Not improving measurement accuracy；Second, a lateral pressure can only be measured by it.
Utility model content
Defect that the purpose of this utility model is contemplated to overcome above-mentioned prior art to exist and provide a kind of based on micro-
The surface acoustic wave sensor of clearance pressure monitoring.
The purpose of this utility model can be achieved through the following technical solutions:
A kind of surface acoustic wave sensor based on microgap pressure monitoring, including two pieces of piezoelectric substrates, two pieces of pressures
Electric material pad and two groups of interdigital transducers, described two pieces of piezoelectric pads connect two pieces of piezoelectric substrates shape
Becoming the inner chamber of hollow, two groups of interdigital transducers are all located in inner chamber, and are individually fixed on two pieces of piezoelectric substrates.
Described interdigital transducer is delay line type interdigital transducer, and often group interdigital transducer at least includes an input fork
Finger transducer and output interdigital transducer, and input interdigital transducer and output interdigital transducer be individually fixed in piezoelectricity
The two ends of material base.
Described sensor also includes metal electrode board, and this metal electrode board is connected with all interdigital transducers.
At least one piece of piezoelectric substrate is provided with fixing fixing hole.
Described fixing hole is provided with four altogether.
Compared with prior art, this utility model has the advantage that
1) hollow space two sides is open, and processes wire lead-out wire can ensure that accurately, and then promotes survey
Accuracy of measurement, furthermore both sides substrate be respectively provided with sensor circuit, can realize two sides pressure survey measurement.
2) can reduce substrate heat conductivity and electrode directly contacts the interference of flow field stream field, have stronger anti-dry
Disturb ability.
3) there is in effective range the good linearity.
4), when such device works under normal temperature condition, there is the features such as degree of stability is high, power consumption is little.
5) due to such device use semiconductor planar integrated technique prepare, have miniaturization, integrability excellent
Point.
Accompanying drawing explanation
Fig. 1 is contact pressure schematic diagram between complicated contact surface；
Fig. 2 is structural representation of the present utility model；
Fig. 3 is microgap contact pressure monitoring system diagram；
Fig. 4 is SAW pressure sensor graphics；
Wherein: 1, piezoelectric substrate, 2, piezoelectric pad, 3, input interdigital transducer, 4, output
Interdigital transducer, 5, metal electrode board, 6, wire, 7, vector function generator, 8, computer, 9, frequently
Spectrometer.
Detailed description of the invention
With specific embodiment, this utility model is described in detail below in conjunction with the accompanying drawings.The present embodiment is new with this practicality
Implement premised on type technical scheme, give detailed embodiment and concrete operating process, but this practicality
Novel protection domain is not limited to following embodiment.
As it is shown in figure 1, for being in two metals or non-metallic objectsit is not a metal object (A and B), and some local bullet
For the microgap of property medium C (thickness is at 1-5mm), the basic principle of the measurement of its contact pressure is by power
Sensing element seals in power architecture, because of the measurement demand of microgap, it is achieved passive, wireless monitor and corresponding
Force sensing element get over Bao Yuehao, the smaller the better.Except this, some special measurement environment force sensing elements to be required can be certainly
By bending, as measured human pressure's distribution.It is two that complicated contact surface contact pressure is present in object A and object B
Individual metal or non-metallic objectsit is not a metal object form the curve clearance of spacing d (1-5mm), and object B passes through elastic fluid
Support.
It has been investigated that, the cardinal principle of SAW Micro-force sensor utilizes surface acoustic wave theoretical and crystalline material
Piezoelectric property, it is achieved pressure transducer is passive, wireless transmission function.Additionally, by changing SAW sensor
The real underlying structure of tradition, for pressure measxurement, this utility model uses the SAW sensor of hollow structure substrate.
This mechanism can be divided into upper and lower double-layer structure, and the position of fixing four circular holes of SAW pressure sensor, at two
Contact between metal or non-metallic objectsit is not a metal object and the most some local elasticity'ies medium contact surface (thickness is at 1-5mm)
The measurement of micro-pressure (0-0.2N), utilizes the piezoelectricity of material and piezoresistive effect to realize double sided pressure and measure.SAW
The FInite Element that is designed with of sensor carries out the finite element analysis of substrate, to piezoelectricity base according to different frame for movement
The stress and strain of body carries out various sizes of analytical calculation, and statistical data is gone forward side by side line linearity fractional analysis, calculates substrate
Mechanism's test data under different length L, determine input interdigital transducer and the position of output interdigital transducer.
Concrete, a kind of surface acoustic wave sensor based on microgap pressure monitoring, as shown in Figure 2 and Figure 4, bag
Include 1, two pieces of piezoelectric pads 2 of two pieces of piezoelectric substrates and two groups of interdigital transducers, two pieces of piezoresistive material backing straps
Sheet 2 connects two pieces of piezoelectric substrates 1 and forms the inner chamber of hollow, and two groups of interdigital transducers are all located in inner chamber,
And be individually fixed on two pieces of piezoelectric substrates 1.
Interdigital transducer is delay line type interdigital transducer, and often group interdigital transducer at least includes that inputs interdigital changing
Can device 3 and output interdigital transducer 4, and input interdigital transducer 3 and output interdigital transducer 4 be individually fixed in
The two ends of piezoelectric substrate 1, the some signal of input is transformed into by input interdigital transducer 3 by inverse piezoelectric effect
Acoustical signal, this acoustical signal is propagated along substrate surface, finally by output interdigital transducer 4, acoustical signal is transformed into telecommunications
Number output.
Sensor also includes metal electrode board 5, and this metal electrode board 5 is connected with all interdigital transducers.At least one
Block piezoelectric substrate 1 is provided with fixing fixing hole, and fixing hole is provided with four altogether.
The SAW device of this hollow structure compared with conventional SAW device, the SAW sensor of hollow structure,
Can reduce substrate heat conductivity and electrode directly contacts the interference of flow field stream field, there is stronger capacity of resisting disturbance；
There is in effective range the good linearity；When such device works under normal temperature condition, there is degree of stability
The features such as height, power consumption are little；Simultaneously as such device uses semiconductor planar integrated technique to prepare, have miniature
Change, the advantage of integrability.
As it is shown on figure 3, microgap pressure monitor system includes sensor side and inquiry end.Sensor side is passed by micro-strip
Defeated line G, miniature antenna H, medium substrate I and SAW device F composition.Assembly needed for inquiry end includes receiving
Antenna E and transmitting antenna D, vector function generator 7, computer 8 and spectrum analyzer 9.System is worked
Journey is as follows: computer 8 controls vector function generator 7 and produces the electromagnetic wave in certain frequency range, by believing with vector
Signal is launched by number transmitting antenna D that generator 7 is connected, the sensor side outside excitation certain distance
SAW sensor F, the reception antenna E being connected with spectrum analyzer 9 receive the feedback signal of sensor side also
Being input to spectrum analyzer 9, utilize computer 8 to analyze the signal frequency received, further analyte sensors is supervised
Survey the pressure changing at position.
Claims (5)
1. a surface acoustic wave sensor based on microgap pressure monitoring, it is characterised in that include two pieces of piezoelectricity
Material base, two pieces of piezoelectric pads and two groups of interdigital transducers, described two pieces of piezoelectric pads connect two pieces
Piezoelectric substrate also forms the inner chamber of hollow, and two groups of interdigital transducers are all located in inner chamber, and are individually fixed in two
On block piezoelectric substrate.
A kind of surface acoustic wave sensor based on microgap pressure monitoring the most according to claim 1, it is special
Levying and be, described interdigital transducer is delay line type interdigital transducer, often group interdigital transducer at least include one defeated
Enter interdigital transducer and output interdigital transducer, and input interdigital transducer and output interdigital transducer are individually fixed in
The two ends of piezoelectric substrate.
A kind of surface acoustic wave sensor based on microgap pressure monitoring the most according to claim 1 and 2,
It is characterized in that, described sensor also includes metal electrode board, and this metal electrode board is connected with all interdigital transducers.
A kind of surface acoustic wave sensor based on microgap pressure monitoring the most according to claim 1, it is special
Levying and be, at least one piece of piezoelectric substrate is provided with fixing fixing hole.
A kind of surface acoustic wave sensor based on microgap pressure monitoring the most according to claim 1, it is special
Levying and be, fixing hole is provided with four altogether.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620520746.XU CN205785612U (en) | 2016-06-01 | 2016-06-01 | A kind of surface acoustic wave sensor based on microgap pressure monitoring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620520746.XU CN205785612U (en) | 2016-06-01 | 2016-06-01 | A kind of surface acoustic wave sensor based on microgap pressure monitoring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205785612U true CN205785612U (en) | 2016-12-07 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620520746.XU Expired - Fee Related CN205785612U (en) | 2016-06-01 | 2016-06-01 | A kind of surface acoustic wave sensor based on microgap pressure monitoring |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106725328A (en) * | 2016-12-30 | 2017-05-31 | 上海工程技术大学 | Sleep quality data acquisition device and monitoring system based on surface acoustic wave sensor |
| CN107061998A (en) * | 2017-03-28 | 2017-08-18 | 上海工程技术大学 | Wall inner conduit leakage inspector and detection process system |
-
2016
- 2016-06-01 CN CN201620520746.XU patent/CN205785612U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106725328A (en) * | 2016-12-30 | 2017-05-31 | 上海工程技术大学 | Sleep quality data acquisition device and monitoring system based on surface acoustic wave sensor |
| CN107061998A (en) * | 2017-03-28 | 2017-08-18 | 上海工程技术大学 | Wall inner conduit leakage inspector and detection process system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161207 Termination date: 20200601 |