CN103926017A - Surface acoustic wave temperature sensor based on special quartz material - Google Patents
Surface acoustic wave temperature sensor based on special quartz material Download PDFInfo
- Publication number
- CN103926017A CN103926017A CN201310012890.3A CN201310012890A CN103926017A CN 103926017 A CN103926017 A CN 103926017A CN 201310012890 A CN201310012890 A CN 201310012890A CN 103926017 A CN103926017 A CN 103926017A
- Authority
- CN
- China
- Prior art keywords
- acoustic wave
- surface acoustic
- interdigital electrode
- temperature sensor
- special quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
The invention provides a surface acoustic wave temperature sensor based on a special quartz material. The surface acoustic wave temperature sensor based on the special quartz material comprises an interdigital electrode, a plurality of reflecting grating bars and a substrate material, wherein the interdigital electrode is arranged on the substrate material in a weighted overlapping mode, the reflecting grating bars are arranged on the substrate material in a preset weighted phase lattice mode, and thus the Q value of a device is further improved. A surface acoustic wave device is adopted to convert the variable quantity of temperature into the variable quantity of device central frequencies, the variable quantity of the frequencies is output, and high sampling speed and accuracy are achieved.
Description
Technical field
The present invention relates to a kind of SAW Temperature Sensors based on special quartz material, belong to semiconductor planar manufacturing technology field.
Background technology
Traditional SAW (Surface Acoustic Wave) resonator generally designs without weighting, there is individually the design of single or two weightings, be presented as the apodization of cutting toe weighted sum reflecting grating of interdigital transducer, although obtain weighted effect, for example inhibition point is strengthened, Q value increases, and has but increased the insertion loss of device.
Traditional temperature sensor is first by the variation of certain measured physical quantity, is converted into the changes in amplitude of other physical quantity, then changes into frequency variation by digital technology; This way is sample rate and precision low (13.5kHz ~ 13.5MHz) not only, has increased other conversion process simultaneously, and quantity of information incurs loss.
Summary of the invention
The present invention solves the sample rate of existing surface acoustic wave temperature sensor technology existence and the problem that precision is lower, conversion process information loss is more, and then a kind of SAW Temperature Sensors based on special quartz material is provided.For this reason, the invention provides following technical scheme:
A kind of SAW Temperature Sensors based on special quartz material, comprise an interdigital electrode, several reflection grizzly bar and backing materials, described interdigital electrode is arranged on described backing material with the form of windowed overlapping, and described several reflection grizzly bars are arranged on described backing material with the form of the phase place dot matrix weighting be scheduled to.
The present invention adopts SAW (Surface Acoustic Wave) device temperature variation to be converted into the variable quantity of device centre frequency, and through by the variable quantity output of frequency, has higher sample rate and precision; The SAW (Surface Acoustic Wave) device adopting is an one-port saw resonator, and wherein reflecting grating array adopts dot matrix phase weighting technology, has further improved the Q value of device.
Brief description of the drawings
In order to be illustrated more clearly in the technical scheme of the embodiment of the present invention, below the accompanying drawing of required use during embodiment is described is briefly described, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structural representation of the SAW Temperature Sensors based on special quartz material that provides of the specific embodiment of the present invention;
Fig. 2 is the structural representation of the SAW Temperature Sensors that is provided with helical antenna that provides of the specific embodiment of the present invention;
Fig. 3 is the principle schematic of the reflecting grating array phase place dot matrix weighting technique that provides of the specific embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiment.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtaining under creative work prerequisite, belong to the scope of protection of the invention.
This embodiment provides a kind of SAW Temperature Sensors based on special quartz material, as shown in Figure 1, comprise an interdigital electrode 1, several reflection grizzly bar 2 and backing materials 3, interdigital electrode 1 is arranged on backing material 3 with the form of windowed overlapping, and several reflection grizzly bars 2 are arranged on backing material 3 with the form of the phase place dot matrix weighting be scheduled to.
Preferably, because the velocity of sound in the inside all directions of anisotropy crystal crystal and electromechanical coupling factor are different, therefore this embodiment adopts the crystal crystal substrates of AT37.82 ° ~ 40.45 ° of cuttings as the backing material of one-port saw resonator, and the temperature in this particular orientation and frequency meet desired linear dependence.
Concrete, interdigital electrode 1 is arranged on backing material 3 with the form of windowed overlapping, and one end is signal input part, and the other end is signal output part.As shown in Figure 2, the signal of helical antenna 4 is defeated is connected as held with the signal output of interdigital electrode.On the surface of falling speed in crystal material N-gt, find certain to meet the sound transmission pattern direction of desired frequency-temperature variation relation, the actual cutting crystal crystal of direction (AT37.82 °-40.45 °) calculating along this, and make wafer, and utilize existing fine process to make surface acoustic wave one-port resonator.Several reflection grizzly bars 2 are arranged on backing material 3 with the form of the phase place dot matrix weighting be scheduled to.
Peripheral circuit matches, need to measure in advance through connect signal and acoustical signal, and acoustical signal is done to suitable delay and realize the inhibition (acoustical signal of existence and the complete different physical quantities of electric signal in this embodiment) that multipath is disturbed, radiofrequency signal is launched by helical antenna.Supporting PCB circuit board and surface acoustic wave temperature sensing chip are arranged on the top of backing material, and the match circuit of surface acoustic wave temperature sensing chip is arranged on the bottom of backing material.
In actual production, by the method for the positive glue stripping technology in microfabrication photoetching process, make this product/technique/technology can ensure the interdigital transducer of all designing requirements in SAW (Surface Acoustic Wave) resonator and the precision of reflecting grating array line thickness, finally realized specification product/technique/technology.
The technical scheme that adopts this embodiment to provide, by adopting SAW (Surface Acoustic Wave) device temperature variation to be converted into the variable quantity of device centre frequency, and through by the variable quantity output of frequency, has higher sample rate and precision; The SAW (Surface Acoustic Wave) device adopting is an one-port saw resonator, and wherein reflecting grating array adopts dot matrix phase weighting technology, has further improved the Q value of device.
The above; it is only preferably embodiment of the present invention; but protection scope of the present invention is not limited to this; any be familiar with those skilled in the art the embodiment of the present invention disclose technical scope in; the variation that can expect easily or replacement, within all should being encompassed in protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claim.
Claims (3)
1. the SAW Temperature Sensors based on special quartz material, it is characterized in that, comprise an interdigital electrode, several reflection grizzly bar and backing materials, described interdigital electrode is arranged on described backing material with the form of windowed overlapping, and described several reflection grizzly bars are arranged on described backing material with the form of the phase place dot matrix weighting be scheduled to.
2. SAW Temperature Sensors according to claim 1, is characterized in that, described backing material is for adopting the crystal crystal substrates of AT37.82 ° ~ 40.45 ° of cuttings.
3. SAW Temperature Sensors according to claim 1, is characterized in that, described sensor also comprises helical antenna, the signal of described helical antenna defeated as end with as described in the signal of interdigital electrode export and be connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310012890.3A CN103926017A (en) | 2013-01-14 | 2013-01-14 | Surface acoustic wave temperature sensor based on special quartz material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310012890.3A CN103926017A (en) | 2013-01-14 | 2013-01-14 | Surface acoustic wave temperature sensor based on special quartz material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103926017A true CN103926017A (en) | 2014-07-16 |
Family
ID=51144315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310012890.3A Pending CN103926017A (en) | 2013-01-14 | 2013-01-14 | Surface acoustic wave temperature sensor based on special quartz material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103926017A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104359584A (en) * | 2014-11-12 | 2015-02-18 | 中国科学院微电子研究所 | High-temperature surface acoustic wave temperature sensor |
| CN104990638A (en) * | 2015-06-30 | 2015-10-21 | 深圳华远微电科技有限公司 | Chip based on wireless temperature sensor |
| CN105245199A (en) * | 2015-10-28 | 2016-01-13 | 江苏声立传感技术有限公司 | Acoustic surface wave resonator having high Q value and one port applied to wireless temperature sensor |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1486377A (en) * | 1974-02-25 | 1977-09-21 | United Aircraft Corp | Surface acoustic wave transducer |
| CN102435344A (en) * | 2011-10-10 | 2012-05-02 | 北京中讯四方科技股份有限公司 | Sound surface wave temperature sensor |
| FR2971584A1 (en) * | 2011-02-10 | 2012-08-17 | Senseor | Passive temperature sensor, has acoustic wave resonator made of piezoelectric material and provided with metal electrodes made of alloy comprising aluminum and copper or alloy comprising aluminum, copper and element |
| CN102708394A (en) * | 2012-04-17 | 2012-10-03 | 重庆大学 | SAW (surface acoustic wave)-based passive temperature tag and SAW-based passive temperature tag reader |
-
2013
- 2013-01-14 CN CN201310012890.3A patent/CN103926017A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1486377A (en) * | 1974-02-25 | 1977-09-21 | United Aircraft Corp | Surface acoustic wave transducer |
| FR2971584A1 (en) * | 2011-02-10 | 2012-08-17 | Senseor | Passive temperature sensor, has acoustic wave resonator made of piezoelectric material and provided with metal electrodes made of alloy comprising aluminum and copper or alloy comprising aluminum, copper and element |
| CN102435344A (en) * | 2011-10-10 | 2012-05-02 | 北京中讯四方科技股份有限公司 | Sound surface wave temperature sensor |
| CN102708394A (en) * | 2012-04-17 | 2012-10-03 | 重庆大学 | SAW (surface acoustic wave)-based passive temperature tag and SAW-based passive temperature tag reader |
Non-Patent Citations (1)
| Title |
|---|
| 肖鸣山 等: "《声表面波器件基础》", 31 January 1980, 山东科学技术出版社 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104359584A (en) * | 2014-11-12 | 2015-02-18 | 中国科学院微电子研究所 | High-temperature surface acoustic wave temperature sensor |
| CN104990638A (en) * | 2015-06-30 | 2015-10-21 | 深圳华远微电科技有限公司 | Chip based on wireless temperature sensor |
| WO2017000615A1 (en) * | 2015-06-30 | 2017-01-05 | 深圳华远微电科技有限公司 | Wireless temperature sensor based chip |
| CN104990638B (en) * | 2015-06-30 | 2018-06-22 | 深圳华远微电科技有限公司 | A kind of chip based on radio temperature sensor |
| CN105245199A (en) * | 2015-10-28 | 2016-01-13 | 江苏声立传感技术有限公司 | Acoustic surface wave resonator having high Q value and one port applied to wireless temperature sensor |
| CN105245199B (en) * | 2015-10-28 | 2018-08-03 | 江苏声立传感技术有限公司 | High q-factor one-port saw resonator applied to radio temperature sensor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104990638B (en) | A kind of chip based on radio temperature sensor | |
| TWI251077B (en) | Saw sensor with improved temperature stability | |
| CN102928111B (en) | Surface acoustic wave temperature sensor | |
| CN101405938B (en) | Elastic wave resonator | |
| CN106404247A (en) | Surface acoustic wave double-resonator integrated torque sensor based on Rayleigh wave mode | |
| CN101008586A (en) | Wireless accessed surface acoustic wave sensors | |
| CN102052986A (en) | Wireless passive surface acoustic wave (SAW) impedance load transducer | |
| CN101964642A (en) | Boundary acoustic wave device | |
| CN103926017A (en) | Surface acoustic wave temperature sensor based on special quartz material | |
| CN104215917A (en) | Boundary wave resonance type magnetic sensor | |
| CN101471640A (en) | Narrow-band filter component | |
| CN104092446B (en) | A kind of SAW resonator and preparation method thereof | |
| CN107543570A (en) | A kind of wireless and passive MEMS sensor based on X-type phonon crystal | |
| CN106911317A (en) | SAW resonator | |
| CN203949722U (en) | A kind of sense vibrations sensing arrangement with temperature compensation based on surface acoustic wave | |
| CN100553128C (en) | Sonic surface wave composite structure material and application | |
| CN101847216A (en) | Surface acoustic wave radio frequency electronic tag with large data capacity | |
| CN104019886B (en) | The sense vibrations sensing arrangement with temperature-compensating based on surface acoustic wave | |
| CN203504508U (en) | Surface acoustic wave filter used for mobile phone | |
| CN204013438U (en) | A kind of SAW (Surface Acoustic Wave) resonator | |
| CN205647458U (en) | High sensitivity's bi -polar is to resonant mode surface acoustic wave detector | |
| CN100582769C (en) | Double-sound-channel surface acoustic wave device for gas sensor | |
| CN214471088U (en) | Ultrasonic flowmeter oscillator and ultrasonic flowmeter | |
| Ha et al. | A study of the effect of IDTs and input signals on the amplitude of propagation waves of the passive SAW structure | |
| CN103033298A (en) | Surface acoustic wave sensor for slit and manufacture method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20140716 |