CN103196617B - Cylinder type ultra-high-pressure sensor of side cavity oil charging structure - Google Patents
Cylinder type ultra-high-pressure sensor of side cavity oil charging structure Download PDFInfo
- Publication number
- CN103196617B CN103196617B CN201310091705.4A CN201310091705A CN103196617B CN 103196617 B CN103196617 B CN 103196617B CN 201310091705 A CN201310091705 A CN 201310091705A CN 103196617 B CN103196617 B CN 103196617B
- Authority
- CN
- China
- Prior art keywords
- oil
- pressure
- bearing cylinder
- filled
- filled chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
A cylinder type ultra-high-pressure sensor of a side cavity oil charging structure comprises an elastic element base, wherein the upper portion of the elastic element base is a pressure bearing cylinder, a pressure bearing hole is formed in the center of the pressure bearing cylinder, and the side wall of the pressure bearing cylinder is provided with one or more than one oil charging cavity. A Wheatstone bridge of a sensitive element is connected with a patch board through a gold wire lead, one end of a cable is connected with the output of the patch board, the other end of the cable is connected with an external circuit, incompressible silicone oil is filled in the oil charging cavity, pressure of measured media directly acts inside the pressure bearing hole, the oil charging cavity produces size deformation which is directly proportional to the measured pressure, and the deformation is transmitted to the sensitive element through the incompressible silicone oil. On the basis of the monocrystalline silicon piezoresistive effect, resistance of four voltage dependent resistors on the sensitive element changes, under drive of a stabilized power source, the four voltage dependent resistors constitute the Wheatstone bridge to output electric signals which are directly proportional to the measured pressure, and therefore detection of ultra-high-pressure can be conducted. The cylinder type ultra-high-pressure sensor can bear pressure more than 1.5 GPa.
Description
Technical field
The present invention relates to a kind of pressure transducer, particularly the drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber.
Background technology
Pressure transducer all becomes the emphasis of research and development all the time because of the huge market demand, so far existing a lot of products are based on principle of work such as pressure resistance type, piezoelectric type and strain-types, the range of these sensors mainly concentrates between 1MPa to 100MPa, for the hyperpressure sensor of high range and the more difficult realization of the micro-pressure sensor of lower range.The application requirements that exists many hyperpressures to measure in industrial development and national defense construction, not only in commercial production, application scenario is a lot, and same armament systems also need the pressure to reaching GPa rank to carry out Real-Time Monitoring.But due to foreign technology block and the development of China correlation technique more late, this respect is always immature, superhigh pressure sensor product is less.In existing market, mainly contain SOI silicon piezoresistive pressure sensor, SOS(Silicon on Sapphire) pressure transducer, sputtered thin film pressure transducer and adopt silicon foil gauge or pressure transducer that high-temperature foil strain gauge is made etc.From measurement mechanism, these sensors are all based on electricresistance effect; Structure, the flexible member of these sensors and sensitive element can divide and be integrated and fabricated structure two classes.The major advantage with the piezoresistance, pressure sensor of elastic sensing element integral structure comprises: 1) precision and highly sensitive, and to follow-up signal treatment circuit, without particular/special requirement, application cost is lower; 2) lightweight, Dynamic response is high, utilized bandwidth is up to more than 1MHz; 3) stable performance, reliability are high, and because the work elastic strain of silicon is low to moderate microstrain, maximum displacement is at submicron order, thereby without wearing and tearing, fatigue and catabiosis, the life-span reaches 10
7inferior above pressure cycling; 4) silicon adopts MEMS(Micro Mechanical-electro System, micromachine electronic system) technology realizes mass and makes, and cost is low etc.But also there is following problem: 1) maximum amount journey is no more than 150MPa; 2) measured medium not only will with sheathing material compatibility, simultaneously also must with silicon, glass and encapsulating material compatibility, thereby range of application relative narrower.
Flexible member and sensitive element are that the main advantage of the hyperpressure sensor of fabricated structure is: 1) range is large, more than can reaching 1000MPa; 2) metallic elastic component and pressure interface are to be processed by a whole high-strength stainless steel, can select different materials according to different applicating mediums (as corrosive medium), are suitable for measured medium wide ranges; 3) there is not O type circle in inner pressure seal, and sealing reliability is high.But this class sensor also has certain weak point: 1) if sensitive element based on metallic resistance effect, as the pressure transducer of sputtered film or employing high temperature paper tinsel formula metal strain plate, because the resistivity of metal is little, the sensitivity very little (only several mV/V) of sensor, thereby poor signal to noise, follow-up signal processing circuit is had relatively high expectations; 2) if sensitive element by measure elastic body produce displacement measure, in encapsulation process, need strictly to control sensitive element and elastomeric position relationship, otherwise the stability of sensor will be affected, in addition general drum type brake hyperpressure sensor increase wall thickness has impact to the sensitivity of sensor, and the output of sensor is diminished.
Summary of the invention
In order to overcome the shortcoming of above-mentioned prior art, the object of the present invention is to provide the drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber, not only effectively utilize the anamorphic effect of cylinder, and there is larger barrel thickness compared with the hyperpressure sensor of general cylindrical structure, load-bearing capacity is stronger, more than can reaching 1.5GPa, and sensor has avoided the pressure transducer of displacement effect to need the strict technological difficulties of controlling package position relation.
In order to achieve the above object, the technical scheme that the present invention takes is:
The drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber, comprise flexible member base 1, flexible member base 1 top is pressure-bearing cylinder 3, pressure-bearing holes 2 at the center of pressure-bearing cylinder 3, the sidewall of pressure-bearing cylinder 3 is provided with one or more oil-filled chamber 7, in the time being provided with an oil-filled chamber 7, it is monotrysian type structure, the top of the upper end of oil-filled chamber 7 and pressure-bearing cylinder 3 communicates, sensitive element 9 is assemblied in the upper end of oil-filled chamber 7, sensitive element 9 is provided with Wheatstone bridge, by spun gold lead-in wire 10, Wheatstone bridge is connected with card extender 4; Card extender 4 is arranged on the top of pressure-bearing cylinder 3, and shell 5 is contained on flexible member base 1, and flexible member base 1 the first half is surrounded by shell 5, and all parts except cable 6 are all surrounded by shell; One end of cable 6 is connected with the output of card extender 4; The other end of cable 6 is fixed and is passed shell 5 by solidus cap and is connected with external circuit, and oil-filled chamber 7 sidewalls have oil-filled seal bore 8, are full of incompressible silicone oil in oil-filled chamber 7.
In the time being provided with more than one oil-filled chamber 7, it is open grain structure, the center, hole of oil-filled chamber 7 is along axisymmetric being arranged in pressure-bearing cylinder 3 sidewalls of circle taking pressure-bearing hole 2 as the center of circle, the top of pressure-bearing cylinder 3 is provided with upper cover 12, sensitive element 9 is arranged on upper cover 12, sensitive element 9 is provided with Wheatstone bridge, by spun gold lead-in wire 10, Wheatstone bridge is connected with the input of card extender 4; Card extender 4 is arranged on the top of upper cover 12, and shell 5 is contained on flexible member base 1, and flexible member base 1 the first half is surrounded by shell 5, and all parts except cable 6 are all surrounded by shell, and one end of cable 6 is connected with the output of card extender 4; Shell 5 is fixed and passed to the other end of cable 6 by solidus cap, is connected with external circuit, and oil-filled chamber 7 sidewalls have oil-filled seal bore 8, is full of incompressible silicone oil in oil-filled chamber 7.
Described upper cover 12 is oblate rod structure, there is oil-through hole 14 center, the face that upper cover 12 contacts with pressure-bearing cylinder 3 had oil groove 11, cross oil groove 11 for petal distribution, crossing oil groove 11 is connected with oil-through hole 14, the marginal position of upper cover 12 is provided with second quasi-mark 13-2, while ensureing that upper cover 12 contacts with pressure-bearing cylinder 3, crosses oil groove 11 and is communicated with oil-filled chamber 7.
Described pressure-bearing cylinder 3 is cylindrical barrel, after processing, self-enhancement can bear the pressure of 1.5GPa, and form elastic layer and ductile bed, and elastic layer is interior, and ductile bed is outside, pressure-bearing hole 2 is at ductile bed, directly contact measured medium, oil-filled chamber 7 is the blind hole at pressure-bearing cylinder 3 sidewalls, opening direction is contrary with pressure-bearing hole 2, be arranged in elastic layer, the edge at pressure-bearing cylinder 3 tops of open grain structure is provided with first quasi-mark 13-1.
Described sensitive element 9 is by the presser sensor chip of MEMS fabrication techniques, and perimeter mounted is in oil-filled chamber 7 one end.
Described pressure-bearing cylinder 3 is to adopt high-strength material spring steel to make.
Because pressure-bearing cylinder 3 is for having adopted the self-enhancement thick cyclinder of high-strength material, compared with the cylinder of general use self-enhancement processing, oil-filled chamber is in pressure-bearing cylinder interior sidewall, autofrettaged cylinder materials for support is continued to have in oil-filled chamber outside, make pressure-bearing cylinder 3 have thicker thickness, calculate and know by theory, this structure can be born the pressure of 1.5GPa, overcome the little shortcoming of silica-base material structure measurement range, and larger at the transducer range on autofrettaged cylinder surface than general sensitive element, security is better.; Due to this high-strength material and measuring media compatibility good, this sensor also overcomes the general narrower shortcoming of silica-base material integrated transducer range of application; Because sensitive element 9 is the sensitive elements that adopt MEMS fabrication techniques, piezoresistance coefficient is higher.More than so the output sensitivity of sensor can reach 20mV/V, far away higher than sputtered film or adopt the output sensitivity (only several mV/V) of the pressure transducer of high temperature paper tinsel formula metal strain plate, therefore sensitivity and signal to noise ratio (S/N ratio) are all better, have reduced the requirement to follow-up modulate circuit; Because flexible member base is different from the way of contact of the way of contact of sensitive element and the pressure transducer of sputtered film or employing high temperature paper tinsel formula metal strain plate, the difference of thermal expansivity is very little to the performance impact of sensor between the two, and therefore stability also can significantly promote; After being heated, cylinder with oil-filledly there is positive temperature coefficient at sensitive element end, therefore can select the chip of negative temperature coefficient, these two kinds of temperatures coefficient compensate mutually, can make sensor have desirable temperature coefficient.
Brief description of the drawings
Fig. 1 is the structural representation of monotrysian type sensor of the present invention.
Fig. 2 is the structural representation of porous type sensor of the present invention.
Fig. 3-a is upper cover 12 structural front view of porous type sensor.
Fig. 3-b is the upper cover 12 structure upward views of porous type sensor.
Fig. 4-a is the front view of the structure of porous type pressure-bearing cylindrical portions.
Fig. 4-b is the vertical view of Fig. 4-a.
Fig. 5 is principle of work sketch.
Embodiment
Below in conjunction with accompanying drawing to structural principle of the present invention, principle of work more detailed description.
With reference to figure 1, the drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber, comprise flexible member base 1, flexible member base 1 top is pressure-bearing cylinder 3, is pressure-bearing holes 2 at the center of pressure-bearing cylinder 3, and it is monotrysian type structure that the sidewall of pressure-bearing cylinder 3 is provided with an oil-filled chamber 7(), the top of the upper end of oil-filled chamber 7 and pressure-bearing cylinder 3 communicates, sensitive element 9 is assemblied in the upper end of oil-filled chamber 7, and sensitive element 9 is provided with Wheatstone bridge, by spun gold lead-in wire 10, Wheatstone bridge is connected with card extender 4; Card extender 4 is arranged on the top of pressure-bearing cylinder 3, and shell 5 is contained on flexible member base 1, and flexible member base 1 the first half is surrounded by shell 5, and all parts except cable 6 are all surrounded by shell; One end of cable 6 is connected with the output of card extender 4; Shell 5 is fixed and passed to the other end of cable 6 by solidus cap, is connected with external circuit, and oil-filled chamber 7 sidewalls have oil-filled seal bore 8, is full of incompressible silicone oil in oil-filled chamber 7; Pressure-bearing cylinder 3 is to adopt high-strength material spring steel 60SI2CrVA to make, and the thick cyclinder of process self-enhancement processing.
With reference to figure 2, the drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber, comprise flexible member base 1, flexible member base 1 top is pressure-bearing cylinder 3, pressure-bearing holes 2 at the center of pressure-bearing cylinder 3, it is open grain structure that the sidewall of pressure-bearing cylinder 3 is provided with more than one oil-filled chamber 7(), the center, hole of oil-filled chamber 7 is along axisymmetric being arranged in pressure-bearing cylinder 3 sidewalls of circle taking pressure-bearing hole 2 as the center of circle, the top of pressure-bearing cylinder 3 is provided with upper cover 12, sensitive element 9 is arranged on upper cover 12, sensitive element 9 is provided with Wheatstone bridge, by spun gold lead-in wire 10, Wheatstone bridge is connected with the input of card extender 4, card extender 4 is arranged on the top of upper cover 12, and shell 5 is contained on flexible member base 1, and flexible member base 1 the first half is surrounded by shell 5, and all parts except cable 6 are all surrounded by shell, and one end of cable 6 is connected with the output of card extender 4, shell 5 is fixed and passed to the other end of cable 6 by solidus cap, is connected with external circuit, and oil-filled chamber 7 sidewalls have oil-filled seal bore 8, is full of incompressible silicone oil in oil-filled chamber 7, pressure-bearing cylinder 3 is to adopt high-strength material spring steel 60SI2CrVA to make, and the thick cyclinder of process self-enhancement processing.
With reference to Fig. 3, upper cover 12 is oblate rod structure, there is oil-through hole 14 center, the face that upper cover contacts with pressure-bearing cylinder had oil groove 11, cross oil groove 11 for petal distribution, cross oil groove 11 and be connected with oil-through hole 14, marginal position is provided with the second alignment mark 13-2, while ensureing that upper cover 12 contacts with pressure-bearing cylinder 3, cross oil groove 11 and be communicated with oil-filled chamber 7.
With reference to figure 4, described pressure-bearing cylinder 3 is cylindrical barrel, can bear the pressure of 1.5GPa, and form elastic layer and ductile bed after self-enhancement is processed, elastic layer is interior, outside, pressure-bearing hole 2, at ductile bed, directly contacts measured medium to ductile bed, oil-filled chamber 7 is the blind hole at pressure-bearing cylinder 3 sidewalls, opening direction is contrary with pressure-bearing hole 2, is arranged in elastic layer, and oil-filled chamber 7 perforate modes have monotrysian type and two kinds of modes of porous type; The pressure-bearing cylinder 3 of open grain structure is because will aim at upper cover 12, and therefore there is the first alignment mark 13-1 at the edge at pressure-bearing cylinder 3 tops; Sensitive element 9 is by the presser sensor chip of MEMS fabrication techniques, and perimeter mounted is in oil-filled chamber 7 one end.
Principle of work of the present invention is:
With reference to figure 5, measured medium pressure acts directly in the pressure-bearing hole 2 of flexible member base 1 pressure-bearing cylinder 3 inside, pressure-bearing cylinder 3 can bear the pressure of 1.5GPa after self-enhancement is processed, after oil-filled chamber 7 pressurizeds, occur and the cubic deformation amount being directly proportional by measuring pressure, then this deflection is delivered on the sensitive element 9 on oil-filled chamber 7 tops by incompressible silicone oil, based single crystal silicon piezoresistive effect, four voltage dependent resistor (VDR) resistances on sensitive element 9 change, under stabilized power source excitation, form the output of Hui Sitong full-bridge and the electric signal being directly proportional by measuring pressure by four voltage dependent resistor (VDR)s, thereby carry out the detection of UHV (ultra-high voltage) pressure, owing to making in design, the size of sensitive element 9 and the cubic deformation of oil-filled chamber generation are flux matched, therefore more than sensitivity can reach 20mV/V.The sensor that adopts the inventive method to prepare, its technical parameter can reach following requirement:
(1) measurement range: 0～1.5GPa
(2) precision: be better than 1%FS
(3) Full-span output: be greater than 20mV/V
(4) serviceability temperature scope: the serviceability temperature scope that depends on sensitive chip and silicone oil
(5) overload capacity: 120%FS
(6) serviceable life:>=10
6inferior.
Claims (5)
1. the drum type brake hyperpressure sensor of the oil-filled structure in side chamber, comprise flexible member base (1), it is characterized in that: flexible member base (1) top is pressure-bearing cylinder (3), pressure-bearing hole (2) at the center of pressure-bearing cylinder (3), the sidewall of pressure-bearing cylinder (3) is provided with one or more oil-filled chamber (7), in the time being provided with an oil-filled chamber (7), it is monotrysian type structure, the top of the upper end of oil-filled chamber (7) and pressure-bearing cylinder (3) communicates, sensitive element (9) is assemblied in the upper end of oil-filled chamber (7), sensitive element (9) is provided with Wheatstone bridge, by spun gold lead-in wire (10), Wheatstone bridge is connected with card extender (4), card extender (4) is arranged on the top of pressure-bearing cylinder (3), shell (5) is contained on flexible member base (1), flexible member base (1) the first half is surrounded by shell (5), and all parts except cable (6) are all surrounded by shell, one end of cable (6) is connected with the output of card extender (4), shell (5) is fixed and passed to the other end of cable (6) by solidus cap, be connected with external circuit, oil-filled chamber (7) sidewall has oil-filled seal bore (8), and oil-filled chamber is full of incompressible silicone oil in (7),
In the time being provided with more than one oil-filled chamber (7), it is open grain structure, the center, hole of oil-filled chamber (7) is along axisymmetric being arranged in pressure-bearing cylinder (3) sidewall of circle taking pressure-bearing hole (2) as the center of circle, the top of pressure-bearing cylinder (3) is provided with upper cover (12), sensitive element (9) is arranged on upper cover (12), sensitive element (9) is provided with Wheatstone bridge, by spun gold lead-in wire (10), Wheatstone bridge is connected with the input of card extender (4); Card extender (4) is arranged on the top of upper cover (12), shell (5) is contained on flexible member base (1), flexible member base (1) the first half is surrounded by shell (5), all parts except cable (6) are all surrounded by shell, and one end of cable (6) is connected with the output of card extender (4); Shell (5) is fixed and passed to the other end of cable (6) by solidus cap, be connected with external circuit, oil-filled chamber (7) sidewall has oil-filled seal bore (8), and oil-filled chamber is full of incompressible silicone oil in (7).
2. the drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber according to claim 1, it is characterized in that: described upper cover (12) is oblate rod structure, there is oil-through hole (14) center, the face that upper cover (12) contacts with pressure-bearing cylinder (3) had oil groove (11), cross oil groove (11) for petal distribution, crossing oil groove (11) is connected with oil-through hole (14), the marginal position of upper cover (12) is provided with second quasi-mark (13-2), while ensureing that upper cover (12) contacts with pressure-bearing cylinder (3), crossing oil groove (11) is communicated with oil-filled chamber (7).
3. the drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber according to claim 1, it is characterized in that: described pressure-bearing cylinder (3) is cylindrical barrel, after processing, self-enhancement can bear the pressure of 1.5GPa, and form elastic layer and ductile bed, elastic layer is interior, ductile bed outside, pressure-bearing hole (2) is at ductile bed, directly contact measured medium, oil-filled chamber (7) is the blind hole at pressure-bearing cylinder (3) sidewall, opening direction is contrary with pressure-bearing hole (2), be arranged in elastic layer, the edge at pressure-bearing cylinder (3) top of open grain structure is provided with first quasi-mark (13-1).
4. the drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber according to claim 1, it is characterized in that: described sensitive element (9) is by the presser sensor chip of MEMS fabrication techniques, perimeter mounted is in oil-filled chamber (7) one end.
5. the drum type brake hyperpressure sensor of the oil-filled structure in a kind of side chamber according to claim 1, is characterized in that: described pressure-bearing cylinder (3) is to adopt high-strength material spring steel to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310091705.4A CN103196617B (en) | 2013-03-21 | 2013-03-21 | Cylinder type ultra-high-pressure sensor of side cavity oil charging structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310091705.4A CN103196617B (en) | 2013-03-21 | 2013-03-21 | Cylinder type ultra-high-pressure sensor of side cavity oil charging structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103196617A CN103196617A (en) | 2013-07-10 |
| CN103196617B true CN103196617B (en) | 2014-10-15 |
Family
ID=48719312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310091705.4A Expired - Fee Related CN103196617B (en) | 2013-03-21 | 2013-03-21 | Cylinder type ultra-high-pressure sensor of side cavity oil charging structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103196617B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104535250B (en) * | 2014-12-16 | 2017-01-11 | 西安交通大学 | High-temperature resistant ultrahigh pressure sensor of self-reinforced cylindrical double-liquid-cavity structure |
| CN110793715A (en) * | 2019-11-20 | 2020-02-14 | 西安交通大学 | Dynamic calibration device for miniature ultrahigh pressure sensor |
| CN112539775A (en) * | 2020-11-16 | 2021-03-23 | 希优(常州)智能科技有限公司 | High-voltage-resistant electronic system based on oil filling in pressure guide shell and preparation process thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0278341A2 (en) * | 1987-02-06 | 1988-08-17 | Rbs - Technische Anlagen Und Apperatebau Gmbh | Pressure sensor and mounting method therefor |
| EP0710826A2 (en) * | 1994-11-02 | 1996-05-08 | Motorola, Inc. | High pressure sensor structure and method |
| CN101738281A (en) * | 2008-11-20 | 2010-06-16 | 昆山双桥传感器测控技术有限公司 | Improved wind load pressure sensor |
| CN102012288A (en) * | 2010-10-28 | 2011-04-13 | 西安交通大学 | Composite micro-electro-mechanical system (MEMS) high-temperature resistant ultrahigh-pressure sensor |
| CN102052985A (en) * | 2010-12-31 | 2011-05-11 | 西安交通大学 | MEMS cylinder-type high-temperature and superhigh-pressure resistant sensor |
| CN202066613U (en) * | 2011-05-30 | 2011-12-07 | 中国电子科技集团公司第四十九研究所 | Oil-filled temperature pressure combined sensor |
| CN102818673A (en) * | 2012-05-05 | 2012-12-12 | 上海市计量测试技术研究院 | High-accuracy static extra high pressure sensor and pressure measurement method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4774678B2 (en) * | 2003-08-29 | 2011-09-14 | 富士電機株式会社 | Pressure sensor device |
-
2013
- 2013-03-21 CN CN201310091705.4A patent/CN103196617B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0278341A2 (en) * | 1987-02-06 | 1988-08-17 | Rbs - Technische Anlagen Und Apperatebau Gmbh | Pressure sensor and mounting method therefor |
| EP0710826A2 (en) * | 1994-11-02 | 1996-05-08 | Motorola, Inc. | High pressure sensor structure and method |
| CN101738281A (en) * | 2008-11-20 | 2010-06-16 | 昆山双桥传感器测控技术有限公司 | Improved wind load pressure sensor |
| CN102012288A (en) * | 2010-10-28 | 2011-04-13 | 西安交通大学 | Composite micro-electro-mechanical system (MEMS) high-temperature resistant ultrahigh-pressure sensor |
| CN102052985A (en) * | 2010-12-31 | 2011-05-11 | 西安交通大学 | MEMS cylinder-type high-temperature and superhigh-pressure resistant sensor |
| CN202066613U (en) * | 2011-05-30 | 2011-12-07 | 中国电子科技集团公司第四十九研究所 | Oil-filled temperature pressure combined sensor |
| CN102818673A (en) * | 2012-05-05 | 2012-12-12 | 上海市计量测试技术研究院 | High-accuracy static extra high pressure sensor and pressure measurement method |
Non-Patent Citations (2)
| Title |
|---|
| 杜晓松等.薄膜式锰铜传感器――一种新型的超高压力传感器.《仪表技术与传感器》.2000,(第01期),4-7. |
| 薄膜式锰铜传感器――一种新型的超高压力传感器;杜晓松等;《仪表技术与传感器》;20000130(第01期);4-7 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103196617A (en) | 2013-07-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102012288B (en) | Composite micro-electro-mechanical system (MEMS) high-temperature resistant ultrahigh-pressure sensor | |
| US8443676B2 (en) | Pressure sensor for hydraulic media in motor vehicle brake systems | |
| CN106197776B (en) | Pressure sensor, pressure measuring device, braking system and the method for measuring pressure | |
| JP5432129B2 (en) | Electrostatic pressure sensor with porous dielectric diaphragm | |
| CN205785644U (en) | MEMS minute-pressure pressure transducer | |
| CN107209076B (en) | Pressure transmitter with overpressure protection | |
| WO2010101986A8 (en) | Media-compatible electrically isolated pressure sensor for high temperature applications | |
| RU2012157960A (en) | DIFFERENTIAL PRESSURE SENSOR WITH PRESSURE MEASUREMENT IN THE LINE | |
| CN101738281B (en) | Improved wind load pressure sensor | |
| US10288510B2 (en) | Footed pressure measuring device | |
| CN103196617B (en) | Cylinder type ultra-high-pressure sensor of side cavity oil charging structure | |
| CN207636232U (en) | A kind of strain-type differential pressure pickup | |
| CN203178006U (en) | Pressure transducer packaging structure | |
| KR100773759B1 (en) | Micro Pressure Sensor | |
| EP3515858B1 (en) | Method of manufacturing a sensor using anodic bonding | |
| CN110542510A (en) | Fiber grating pore water pressure sensor | |
| US8511168B2 (en) | Sensor element for capacitively measuring differential pressure | |
| US9506831B2 (en) | Micromechanical measuring element and method for producing a micromechanical measuring element | |
| WO2019116212A3 (en) | Sensing using nanoparticle based strain sensors | |
| CN107907262A (en) | A kind of MEMS oil-filled pressure transducers for negative pressure measurement | |
| CN102052985B (en) | MEMS cylinder-type high-temperature and superhigh-pressure resistant sensor | |
| CN202083516U (en) | Pressure sensor based on micro-melting technology | |
| KR20150129913A (en) | Piezoresistive typed ceramic pressure sensor | |
| CN203606066U (en) | Dielectric isolation packaging structure for pressure sensor | |
| CN2483705Y (en) | Nano pressure sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141015 Termination date: 20170321 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |