CN204881935U - Capacitanc pressure sensing device - Google Patents

Capacitanc pressure sensing device Download PDF

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Publication number
CN204881935U
CN204881935U CN201520476131.7U CN201520476131U CN204881935U CN 204881935 U CN204881935 U CN 204881935U CN 201520476131 U CN201520476131 U CN 201520476131U CN 204881935 U CN204881935 U CN 204881935U
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CN
China
Prior art keywords
metal base
circular metal
sensing device
pressure sensing
differential capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn - After Issue
Application number
CN201520476131.7U
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Chinese (zh)
Inventor
金黎华
高剑琳
姚良珩
田泉林
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Shanghai Instrument And Meter For Automation Co Ltd
Shanghai Automation Instrumentation Co Ltd
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Shanghai Instrument And Meter For Automation Co Ltd
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Priority to CN201520476131.7U priority Critical patent/CN204881935U/en
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Abstract

The utility model discloses a capacitanc pressure sensing device, wherein, comprises a housin, have a cavity in the casing, a differential capacitor diaphragm chamber is installed in the casing, install a temperature measurement chip in the differential capacitor diaphragm chamber, the face all is equipped with a ring and has corrugated isolation diaphragm with the lower surface above the differential capacitor diaphragm chamber, fix differential capacitor diaphragm chamber upper surface be fixed with a circular flange on the ring, the one end of a capillary with the central through hole welding of circular flange, the other end of capillary with the casing is connected, in the casing the lower part welding of differential capacitor diaphragm chamber has a procedural attachment head. The utility model discloses a change the design of differential capacitive sensor mounting structure, make changer ressure measurement part can adopt threaded connection's mode direct mount to put at process control system's pressure test, can exert the strong advantage of the anti overload capacity of differential capacitive sensor, be convenient for simultaneously install, reduce the manufacturing cost of product.

Description

Capacitive pressure sensing device
Technical field
The utility model relates to a kind of pressure transducer, particularly relates to a kind of capacitive pressure sensing device.
Background technology
Conventional differential capacitive structure sensor is used for measuring differential pressure signal.Alternative pressure unit is carried out with differential pressure transmitter, its shortcoming is that cost is high, install inconvenient, and the utility model is by changing the design of differential capacitance sensor (bellows) mounting structure, make transmitter pressure measurement unit that the mode be threaded can be adopted to be directly installed on the pressure testing point of Process Control System.The strong advantage of differential capacitance sensor anti-overload ability can be played like this, be convenient to install simultaneously, reduce the manufacturing cost of product.
Utility model content
The utility model discloses a kind of capacitive pressure sensing device, high in order to solve differential capacitive structure sensor cost in prior art, the problem of inconvenience is installed.
Above-mentioned purpose of the present utility model is achieved through the following technical solutions:
A kind of capacitive pressure sensing device, wherein, comprise a housing, have a cavity in described housing, a differential capacitor diaphragm capsule is arranged in described housing; One thermometric chip is installed in described differential capacitor diaphragm capsule; The face, top of described differential capacitor diaphragm capsule and lower surface are equipped with an annulus and are with ripply isolation diaphragm; The described annulus being fixed on described differential capacitor diaphragm capsule upper surface is fixed with a circular flange, and one end of a kapillary is welded with the central through hole of described circular flange, and the other end of described kapillary is connected with described housing; In described housing, the lower weld of described differential capacitor diaphragm capsule has a process connector.
Capacitive pressure sensing device as above, wherein, described differential capacitor diaphragm capsule comprises: about one symmetrically arranged first circular metal base, the second circular metal base, be provided with a cylindrical cavity between described first circular metal base and described second circular metal base; One pressure-sensitive diaphragm is horizontally set in described cylindrical cavity, and the outer of described pressure-sensitive diaphragm is arranged between the surface of contact of described first circular metal base and described second circular metal base, and the outer of described pressure-sensitive diaphragm is provided with the first welding ring; Also comprise two vitreums, described two vitreums are filled in the both sides of described pressure-sensitive diaphragm, and vitreum described in two all plates towards the side of described pressure-sensitive diaphragm and is provided with spheric electrode, and described in two, spheric electrode is all drawn by cellular conductor; One ceramic core is through vitreum, described second circular metal base described in described first circular metal base, two; One thermometric chip is embedded in described second circular metal base.
Capacitive pressure sensing device as above, wherein, described ceramic core and described vitreum fuse fixing.
Capacitive pressure sensing device as above, wherein, described thermometric chip contacts with a thermal conductive silicon glue-line.
Capacitive pressure sensing device as above, wherein, described thermometric chip adopts DS18B20 series thermometric chip.
Capacitive pressure sensing device as above, wherein, described annulus and described isolation diaphragm are fixed on described differential capacitor diaphragm capsule by the second welding ring.
Capacitive pressure sensing device as above, wherein, described process connector is welded on described housing bottom.
Capacitive pressure sensing device as above, wherein, is filled with epoxy resin in described housing.
Capacitive pressure sensing device as above, wherein, described ceramic core has two, the described vitreum that ceramic core described in passes described first circular metal base and is placed in the first circular metal base, the described vitreum that ceramic core described in another passes described second circular metal base and is placed in the second circular metal base.
Capacitive pressure sensing device as above, wherein, described housing has circumferential weld, and described kapillary is connected with described housing by described circumferential weld.
In sum, owing to have employed technique scheme, the utility model solves differential capacitive structure sensor conventional in prior art and is used for measuring differential pressure signal, alternative pressure unit is carried out with differential pressure transmitter, cost is high, install inconvenient problem, the utility model, by changing the design of differential capacitance sensor (bellows) mounting structure, makes transmitter pressure measurement unit that the mode be threaded can be adopted to be directly installed on the pressure testing point of Process Control System.The strong advantage of differential capacitance sensor anti-overload ability can be played like this, be convenient to install simultaneously, reduce the manufacturing cost of product.
Accompanying drawing explanation
Fig. 1 is the structure cut-open view of the utility model capacitive pressure sensing device.
Embodiment
Below in conjunction with drawings and Examples, the utility model is described further:
Fig. 1 is the structure cut-open view of the utility model capacitive pressure sensing device, refers to Fig. 1, a kind of capacitive pressure sensing device, and wherein, comprise a housing 29, have a cavity in housing 29, a differential capacitor diaphragm capsule is arranged in housing 29; One thermometric chip 19 is installed in differential capacitor diaphragm capsule; The face, top of differential capacitor diaphragm capsule and lower surface are equipped with an annulus 4 and are with ripply isolation diaphragm 5; The annulus 4 being fixed on differential capacitor diaphragm capsule upper surface is fixed with a circular flange 1, and circular flange welds formation the 3rd weld seam 3, kapillary 27 one end with annulus 4 is welded with the central through hole of circular flange 1, and the other end of kapillary 27 is connected with housing 29; In housing 29, the lower weld of differential capacitor diaphragm capsule has a process connector 13, and process connector 13 is welded on housing 29 by the 4th welding ring 16.
Kapillary 27 of the present utility model welds formation second weld seam 2 with circular flange 1 center pit.
Differential capacitor diaphragm capsule of the present utility model comprises: be provided with a cylindrical cavity between about one symmetrically arranged first circular metal base 8, second circular metal base 11, first circular metal base 8 and the second circular metal base 11; One pressure-sensitive diaphragm 9 is horizontally set in cylindrical cavity, the pressure-sensitive diaphragm 9 adopted in the utility model can for circular elastic metallic pressure-sensitive diaphragm, the outer of pressure-sensitive diaphragm 9 is arranged between the first circular metal base 8 and the surface of contact of the second circular metal base 11, and the outer of pressure-sensitive diaphragm 9 is provided with the first welding ring 10; Also comprise two vitreums 7, two vitreums 7 are filled in the both sides of pressure-sensitive diaphragm 9, two vitreums 7 all plate towards the side of pressure-sensitive diaphragm 9 and are provided with spheric electrode, and two spheric electrodes are all drawn by cellular conductor, and cellular conductor comprises: the first cellular conductor 24, second cellular conductor 25; Two spheric electrodes comprise: upper spheric electrode 21, lower spheric electrode 22, ceramic core 17 are through the first circular metal base 8, two vitreum 7, second circular metal base 11; One thermometric chip 19 is embedded in the second circular metal base 11, and ceramic core 17 adopts ceramic core with holes.
Ceramic core 17 of the present utility model and vitreum 7 fuse fixing.
Thermometric chip 19 of the present utility model contacts with a heat conductive silica gel 18 layers.
Thermometric chip 19 of the present utility model adopts DS18B20 series thermometric chip 19, temperature signal directly can be converted to digital signal and export, and precision can reach ± and 0.5 DEG C.
Annulus 4 of the present utility model is fixed on differential capacitor diaphragm capsule with isolation diaphragm 5 by the second welding ring, and the second welding ring has two, comprises welding ring 6, second time welding ring 14 on second.
Process connector 13 of the present utility model is welded on housing 29 bottom, and process connector 13 is welded on housing 29 by the 3rd welding ring 15.
Epoxy resin 26 is filled with in housing 29 of the present utility model.
The upper surface of the first circular metal base 8 of the present utility model and the lower surface of the second circular metal base 11 are all coated with silicon layer 23, lower silicon layer 12.
Ceramic core 17 of the present utility model has two, the vitreum 7 that one ceramic core 17 passes the first circular metal base 8 and is placed in the first circular metal base 8, the vitreum 7 that another ceramic core 17 passes the second circular metal base 11 and is placed in the second circular metal base 11.
Housing 29 of the present utility model has circumferential weld 28, and kapillary 27 is connected with housing 29 by circumferential weld 28.
The pressure sensing data that the utility model obtains and temperature signal are drawn by the first wire 20, second wire 31, privates 32.
The beneficial effects of the utility model: capacitance differential pressure transducer and high-resolution hydrocode chip are contained in simultaneously in a columniform metal shell, constituting one adopts screw thread installation form to be applicable to the transmitter measured for pressure parameter, its physical dimension is less than general differential pressure/pressure transmitter, can meet multiple occasion needs.At sensor internal, temperature sensor is housed, the temperature reference value of medium can be obtained, thus accurate temperature compensation is carried out to pressure transducer.Adopt the structure of full welded seal, the negative pressure end of sensor, is extracted by kapillary and is connected with metal shell, has so just had a reference value compared with atmospheric pressure.
The utility model adopts the principle of electric capacitance change to carry out detected pressures signal, the medium temperature carried out detecting sensor itself with the integrated thermometric chip of high precision that special mathematicization exports and contact with it.It has low-profile exquisiteness, lightweight, be easy to conventional method manufacture feature.The transmitter of various difference in functionality can be produced on this basis.The departments such as chemical industry, oil, metallurgy, power station can being widely used in, for measuring thermal technology's basic parameter such as pressure, liquid level of liquid, gas and steam, being with a wide range of applications.

Claims (10)

1. a capacitive pressure sensing device, is characterized in that, comprises a housing, has a cavity in described housing, and a differential capacitor diaphragm capsule is arranged in described housing; One thermometric chip is installed in described differential capacitor diaphragm capsule; The face, top of described differential capacitor diaphragm capsule and lower surface are equipped with an annulus and are with ripply isolation diaphragm; The described annulus being fixed on described differential capacitor diaphragm capsule upper surface is fixed with a circular flange, and one end of a kapillary is welded with the central through hole of described circular flange, and the other end of described kapillary is connected with described housing; In described housing, the lower weld of described differential capacitor diaphragm capsule has a process connector.
2. capacitive pressure sensing device according to claim 1, it is characterized in that, described differential capacitor diaphragm capsule comprises: about one symmetrically arranged first circular metal base, the second circular metal base, be provided with a cylindrical cavity between described first circular metal base and described second circular metal base; One pressure-sensitive diaphragm is horizontally set in described cylindrical cavity, and the outer of described pressure-sensitive diaphragm is arranged between the surface of contact of described first circular metal base and described second circular metal base, and the outer of described pressure-sensitive diaphragm is provided with the first welding ring; Also comprise two vitreums, described two vitreums are filled in the both sides of described pressure-sensitive diaphragm, and vitreum described in two all plates towards the side of described pressure-sensitive diaphragm and is provided with spheric electrode, and described in two, spheric electrode is all drawn by cellular conductor; One ceramic core is through vitreum, described second circular metal base described in described first circular metal base, two; One thermometric chip is embedded in described second circular metal base.
3. capacitive pressure sensing device according to claim 2, is characterized in that, described ceramic core and described vitreum fuse fixing.
4. capacitive pressure sensing device according to claim 2, is characterized in that, described thermometric chip contacts with a thermal conductive silicon glue-line.
5. capacitive pressure sensing device according to claim 2, is characterized in that, described thermometric chip adopts DS18B20 series thermometric chip.
6., according to the arbitrary described capacitive pressure sensing device of claim 1 or 2, it is characterized in that, described annulus and described isolation diaphragm are fixed on described differential capacitor diaphragm capsule by the second welding ring.
7. capacitive pressure sensing device according to claim 1, is characterized in that, described process connector is welded on described housing bottom.
8., according to the arbitrary described capacitive pressure sensing device of claim 1 or 2, it is characterized in that, in described housing, be filled with epoxy resin.
9. capacitive pressure sensing device according to claim 2, it is characterized in that, described ceramic core has two, the described vitreum that ceramic core described in passes described first circular metal base and is placed in the first circular metal base, the described vitreum that ceramic core described in another passes described second circular metal base and is placed in the second circular metal base.
10. capacitive pressure sensing device according to claim 2, is characterized in that, described housing has circumferential weld, and described kapillary is connected with described housing by described circumferential weld.
CN201520476131.7U 2015-07-02 2015-07-02 Capacitanc pressure sensing device Withdrawn - After Issue CN204881935U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520476131.7U CN204881935U (en) 2015-07-02 2015-07-02 Capacitanc pressure sensing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520476131.7U CN204881935U (en) 2015-07-02 2015-07-02 Capacitanc pressure sensing device

Publications (1)

Publication Number Publication Date
CN204881935U true CN204881935U (en) 2015-12-16

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CN201520476131.7U Withdrawn - After Issue CN204881935U (en) 2015-07-02 2015-07-02 Capacitanc pressure sensing device

Country Status (1)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105021325A (en) * 2015-07-02 2015-11-04 上海自动化仪表有限公司 Capacitive pressure sensor
CN105784212A (en) * 2016-03-25 2016-07-20 深圳安培龙科技股份有限公司 Ceramic capacitive pressure sensor and preparation method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105021325A (en) * 2015-07-02 2015-11-04 上海自动化仪表有限公司 Capacitive pressure sensor
CN105021325B (en) * 2015-07-02 2017-11-14 上海自动化仪表有限公司 Capacitance pressure transducer,
CN105784212A (en) * 2016-03-25 2016-07-20 深圳安培龙科技股份有限公司 Ceramic capacitive pressure sensor and preparation method thereof

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C14 Grant of patent or utility model
GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20151216

Effective date of abandoning: 20171114

AV01 Patent right actively abandoned