CN201047788Y - OEM pressure sensor - Google Patents
OEM pressure sensor Download PDFInfo
- Publication number
- CN201047788Y CN201047788Y CNU2007201162511U CN200720116251U CN201047788Y CN 201047788 Y CN201047788 Y CN 201047788Y CN U2007201162511 U CNU2007201162511 U CN U2007201162511U CN 200720116251 U CN200720116251 U CN 200720116251U CN 201047788 Y CN201047788 Y CN 201047788Y
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- China
- Prior art keywords
- sensor chip
- shell
- presser sensor
- pipe shell
- oem
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model provides an OEM pressure sensor, which comprises a pipe shell 1, a switching terminator 3 arranged on the inner upper part of the pipe shell 1 and a pressure sensitive chip arranged at the inner lower part of the pipe shell 1, wherein, the pipe shell 1 is filled with silicon oil 5, the switching terminator 3 is sealed and fixed through glass 2, a blocking steel ball 4 is arranged at the controlling position on the upper part of the pipe shell 1 that is filled with the silicon oil 5, the pressure sensitive chip is arranged at the bottom of the switching terminator 3, a convoluted diaphragm 6 is arranged below the pressure sensitive chip, the convoluted diaphragm 6 is connected with a pressure-measuring element through a connecting part, and the pressure sensitive chip is connected with the switching terminator 3. The utility model has small volume, high accuracy, wide application temperature range, long service life and good long-term stability.
Description
(1) technical field
The utility model relates to sensor technology, is specifically related to a kind of pressure transducer.
(2) background technology
General OEM pressure transducer adopts presser sensor chip, and because the problem ubiquity serviceability temperature scope of encapsulation is restricted poor corrosion resistance simultaneously, shortcoming such as range limited aspect measured medium, efficient is low, and shutoff is unreliable.
(3) summary of the invention
The purpose of this utility model is to provide a kind of corrosion resistance and good, the serviceability temperature scope of broad is arranged, efficient height, the reliable OEM pressure transducer of shutoff.
The purpose of this utility model is achieved in that it comprises shell 1, is arranged on the conversion terminal 3 of shell 1 internal upper part and is arranged on the presser sensor chip of bottom in the shell 1, be filled with silicone oil 5 in the shell 1, conversion terminal 3 is fixing by glass 2 encapsulation, control place of shell 1 top filling silicon oil 5 is provided with shutoff steel ball 4, presser sensor chip is arranged on conversion terminal 3 bottoms, the presser sensor chip below is provided with convoluted diaphragm 6, convoluted diaphragm 6 is connected with the pressure measurement device by link, and presser sensor chip is connected with conversion terminal 3.
The utility model also has some technical characterictics like this:
1, described presser sensor chip is the SOI presser sensor chip;
2, described convoluted diaphragm 6 is a 316L stainless steel diaphragm.
OEM pressure transducer of the present utility model, as the basic device of changing between pressure-electric signal, through the pressure unit that forms after signal amplification, the normalized, can be widely used in fields such as automobile, oil, chemical industry, by detection, reach the purpose of automatic control to pipeline, pressure system pressure.
The utility model utilizes silicon piezoresistive effect principle, adopts soi structure, utilizes semiconductor process techniques to make.When on the convoluted diaphragm that is acted on the OEM pressure transducer by measuring pressure, silicone oil by inside passes to the SOI presser sensor chip with pressure, sensitive chip just produces and the electric signal that is directly proportional by measuring pressure, thereby realizes the conversion between pressure signal and the electric signal.Because adopt the SOI presser sensor chip of wider range, therefore, this OEM pressure transducer has the serviceability temperature scope of broad, can reach-50 ℃～125 ℃.Simultaneously, owing to adopt 316L stainless steel diaphragm media isolated, and the 316L stainless steel has very superior decay resistance, therefore, the usable range of this OEM pressure transducer is more vast aspect measured medium.The energy storage welding is adopted in the silicone oil shutoff, the efficient height, and shutoff is reliable.
The welded structure that can adopt store energy welding that is connected of the utility model OEM pressure transducer and pressure unit housing, simple to operate, reliable, the efficient height.
(4) description of drawings
Accompanying drawing is a structural representation of the present utility model.
(5) embodiment
Below in conjunction with accompanying drawing the utility model is further described:
In conjunction with the accompanying drawings, present embodiment comprises shell 1, be arranged on the conversion terminal 3 of shell 1 internal upper part and be arranged on the presser sensor chip of bottom in the shell 1, be filled with silicone oil 5 in the shell 1, conversion terminal 3 is fixing by glass 2 encapsulation, control place of shell 1 top filling silicon oil 5 is provided with shutoff steel ball 4, presser sensor chip is arranged on conversion terminal 3 bottoms, the presser sensor chip below is provided with convoluted diaphragm 6, convoluted diaphragm 6 is connected with the pressure measurement device by link, and presser sensor chip is connected with conversion terminal 3.
Adopt 316L stainless steel diaphragm 6 to isolate during present embodiment OEM pressure sensor package, in fill silicone oil 5 and transmit pressure, adopt the 316L stainless shot as shutoff steel ball 4 and tap into the shutoff of capable silicone oil by store energy welding, by carrying out electrical interconnecting at shell 1 upper glass 2 sintering conversion terminals 3, the welded structure that adopts store energy welding that is connected of OEM pressure transducer and transmitter.
Present embodiment product OEM pressure transducer generally need carry out signal and amplify as the basic conversion element of pressure one electric signal, normalized, thereby voltage or current signal that output meets the demands.Environment for use: temperature range is-50 ℃～125 ℃, and measured medium is gas or the liquid with 316L stainless steel compatibility.
Claims (3)
1. OEM pressure transducer, it comprises shell (1), be arranged on the conversion terminal (3) of shell (1) internal upper part and be arranged on the presser sensor chip of the interior bottom of shell (1), it is characterized in that: be filled with silicone oil (5) in the shell (1), conversion terminal (3) is fixing by glass (2) encapsulation, shell (1) top filling silicon oil (5) locates to be provided with shutoff steel ball (4), presser sensor chip is arranged on conversion terminal (3) bottom, the presser sensor chip below is provided with convoluted diaphragm (6), convoluted diaphragm (6) is connected with the pressure measurement device by link, and presser sensor chip is connected with conversion terminal (3).
2. OEM pressure transducer according to claim 1 is characterized in that described presser sensor chip is the SOI presser sensor chip.
3. OEM pressure transducer according to claim 1 and 2 is characterized in that described diaphragm (6) is a 316L stainless steel diaphragm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201162511U CN201047788Y (en) | 2007-05-23 | 2007-05-23 | OEM pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201162511U CN201047788Y (en) | 2007-05-23 | 2007-05-23 | OEM pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201047788Y true CN201047788Y (en) | 2008-04-16 |
Family
ID=39300376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007201162511U Expired - Fee Related CN201047788Y (en) | 2007-05-23 | 2007-05-23 | OEM pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201047788Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013159583A1 (en) * | 2012-04-28 | 2013-10-31 | 浙江三花股份有限公司 | Heat exchange device and pressure sensor thereof |
| CN105021322A (en) * | 2015-07-10 | 2015-11-04 | 四川奇胜科技有限公司 | Integrated pressure sensor |
| CN108106777A (en) * | 2011-05-30 | 2018-06-01 | 埃普科斯股份有限公司 | Pressure sensor and the method for manufacturing pressure sensor |
| CN113567039A (en) * | 2021-08-30 | 2021-10-29 | 陕西奥立纬物联科技有限公司 | Pipeline pressure measurement terminal system |
-
2007
- 2007-05-23 CN CNU2007201162511U patent/CN201047788Y/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108106777A (en) * | 2011-05-30 | 2018-06-01 | 埃普科斯股份有限公司 | Pressure sensor and the method for manufacturing pressure sensor |
| CN108106777B (en) * | 2011-05-30 | 2020-11-24 | 埃普科斯股份有限公司 | Pressure sensor and method for producing a pressure sensor |
| WO2013159583A1 (en) * | 2012-04-28 | 2013-10-31 | 浙江三花股份有限公司 | Heat exchange device and pressure sensor thereof |
| CN105021322A (en) * | 2015-07-10 | 2015-11-04 | 四川奇胜科技有限公司 | Integrated pressure sensor |
| CN113567039A (en) * | 2021-08-30 | 2021-10-29 | 陕西奥立纬物联科技有限公司 | Pipeline pressure measurement terminal system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080416 |