CN201141790Y - High-temperature high-frequency response double-membrane oil-filled pressure transducer - Google Patents
High-temperature high-frequency response double-membrane oil-filled pressure transducer Download PDFInfo
- Publication number
- CN201141790Y CN201141790Y CNU2008200304632U CN200820030463U CN201141790Y CN 201141790 Y CN201141790 Y CN 201141790Y CN U2008200304632 U CNU2008200304632 U CN U2008200304632U CN 200820030463 U CN200820030463 U CN 200820030463U CN 201141790 Y CN201141790 Y CN 201141790Y
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- stainless steel
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- sintered body
- frequency response
- sinter
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Abstract
The utility model relates to a structure of high-temperature high-frequency response double-film oil-filling pressure sensor for measuring high temperature steam and high temperature gas flow of aeroengine, which is characterized in that: a silicone pressure sensitive chip is adhered on a stainless steel glass sinter, an installation joint, a front-end 316L film and a front-end connector are welded, a stainless steel capillary tube, a front-end connector and a rear-end connector are welded, the rear-end connector, a rear-end 316L film and the stainless steel sinter are welded, high temperature silicone oil is filled inside the sensor, a temperature compensation circuit is arranged on the pin of the stainless steel sinter, a signal microprocessor circuit board is connected with the pin of the stainless steel sinter, an output lead wire is elicited from the signal microprocessor circuit board, the shell and the stainless steel glass sinter are welded, the tail part of the shell is clamped to fix the output lead wire. The structure of high-temperature high-frequency response double-film oil-filling pressure sensor has the advantages of small size, light weight, stainless steel sealing structure, pressure and corrosion resistance, high-temperature gas flow resistance and fuel impact resistance, and also has high frequency response and can measure high temperature pulse pressure.
Description
Technical field
The utility model relates to the two film precharge pressure sensor constructions of a kind of high temperature high frequency sound of the high-temperature fuel gas stream of measuring high-temperature steam and aeromotor, measuring media is the pressure of high temperature pulsation, belongs to high temperature high frequency sound pressure transducer technical field.
Background technology
The kind of current gaging pressure sensor is a lot, and it is-55 ℃～125 ℃ that diffuse si piezoresistive pressure sensor, working temperature are mainly typically arranged; Ceramic pressure sensor, working temperature are-40 ℃～125 ℃; Sputtered thin film pressure transducer, working temperature are-40 ℃～220 ℃; Measure the pressure of high-temperature steam and aeromotor and vehicle motor high-temperature fuel gas stream, its working temperature is more than 200 ℃.Though the sputtered thin film pressure transducer working temperature can reach 220 ℃, the response of its frequency of operation is lower, can not satisfy the measurement of high temperature fluctuation pressure.More than several moneys aspect the high-temperature fuel gas flowing pressure measurement of high-temperature steam and aeromotor, have technological deficiency.
Summary of the invention
The purpose of this utility model is intended to overcome the existing in prior technology defective, utilizes the characteristics of diffuse si pressure resistance type pressure chip miniaturization, proposes the two film precharge pressure sensor constructions of a kind of high temperature high frequency sound; Utilize the oil-filled technology of secondary to make the sensor sensing chip, and adopt pressure complete the conduct to chip sensitive area of capillary pressure guiding pipe, isolate high temperature simultaneously, sensor can be operated in the normal temperature range high-temperature medium away from high-temperature medium.The oil-filled isolation of two films, the stainless steel capillary heat radiation is operated in the reliable environment diffuse si pressure resistance type sensitive chip, can carry out the measurement of high-frequency pressure simultaneously.
Technical solution of the present utility model: its structure is that wherein the Silicon pressure sensitive chip sticks on the stainless steel glass sintered body, erection joint and front end 316L diaphragm and preceding terminal adapter welding, stainless steel capillary and preceding terminal adapter, back terminal adapter welding, back terminal adapter and rear end 316L diaphragm and the welding of stainless steel glass sintered body, inner filling high-temperature silicon oil, temperature-compensation circuit is installed on the pin of stainless steel glass sintered body, signal micro-processor interface circuit plate links to each other with the pin of stainless steel glass sintered body, output lead is drawn from the signal micro-processor interface circuit, housing and the welding of stainless steel glass sintered body, the afterbody of clamping housing is output lead fixedly.
Advantage of the present utility model: this type sensor has that volume is little, in light weight, all steel hermetically-sealed construction, withstand voltage anticorrosion, the characteristics that high temperature resistance gas-flow and fuel oil impact, and the frequency response height can be measured the high temperature fluctuation pressure.
Description of drawings
Accompanying drawing 1 is a structural representation of the present utility model.
Embodiment
Contrast accompanying drawing, its structure comprise stainless steel glass sintered body 9, Silicon pressure sensitive chip 7, stainless steel glass sintered body, stainless steel capillary 4, preceding terminal adapter 3, back terminal adapter 5, front end 316L diaphragm 2, filling high-temperature silicon oil 6, temperature-compensation circuit 10, signal micro-processor interface circuit 8, housing 13, erection joint 1, output lead 14, embedding silica gel 12; Wherein Silicon pressure sensitive chip 7 sticks on the stainless steel glass sintered body 9, erection joint 1 and front end 316L diaphragm 2 and 3 welding of preceding terminal adapter, stainless steel capillary 4 and preceding terminal adapter 3, back terminal adapter 5 welding, back terminal adapter 5 and rear end 316L diaphragm 8 and 9 welding of stainless steel glass sintered body, inner filling high-temperature silicon oil 6, temperature-compensation circuit 10 is installed on the pin of stainless steel glass sintered body 9, signal micro-processor interface circuit 11 links to each other with the pin of stainless steel glass sintered body 9, output lead 14 is drawn from signal micro-processor interface circuit 11, housing 13 and 9 welding of stainless steel glass sintered body, the afterbody of clamping housing 13 is output lead 14 fixedly.
Temperature-compensation circuit 10 is the corrections by resistor network, makes the temperature drift of sensor in-55 ℃～125 ℃ reach 0.02%/FS/ ℃.Signal micro-processor interface circuit 11 is to adopt the XTR105 circuit, is the electric current output of 4～20mA through processing and amplifying with the millivolt signal of sensor.
Pressure is by erection joint 1 and front end 316L diaphragm 2 and preceding terminal adapter 3, act on the front end 316L diaphragm 2, front end 316L diaphragm 2 is delivered to pressure on the rear end 316L diaphragm 8 by filling high-temperature silicon oil 6, rear end 316L diaphragm 8 is delivered on the Silicon pressure sensitive chip 7 by filling high-temperature silicon oil 6, the signal that Silicon pressure sensitive chip 7 produces outputs to temperature-compensation circuit 10 by the pin of stainless steel glass sintered body 9, the signal that temperature-compensation circuit 10 is handled is through the standard signal that is enlarged into of signal micro-processor interface circuit plate 11, and standard signal is through output lead 14 outputs.
Claims (1)
1, the two film precharge pressure sensors of high temperature high frequency sound, it is characterized in that the Silicon pressure sensitive chip sticks on the stainless steel glass sintered body, erection joint and front end 316L diaphragm and preceding terminal adapter welding, stainless steel capillary and preceding terminal adapter, back terminal adapter welding, back terminal adapter and rear end 316L diaphragm and the welding of stainless steel glass sintered body, inner filling high-temperature silicon oil, temperature-compensation circuit is installed on the pin of stainless steel glass sintered body, signal micro-processor interface circuit plate links to each other with the pin of stainless steel glass sintered body, output lead is drawn from the signal micro-processor interface circuit, housing and the welding of stainless steel glass sintered body, the afterbody of clamping housing is output lead fixedly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200304632U CN201141790Y (en) | 2008-01-07 | 2008-01-07 | High-temperature high-frequency response double-membrane oil-filled pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200304632U CN201141790Y (en) | 2008-01-07 | 2008-01-07 | High-temperature high-frequency response double-membrane oil-filled pressure transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201141790Y true CN201141790Y (en) | 2008-10-29 |
Family
ID=40069501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200304632U Expired - Lifetime CN201141790Y (en) | 2008-01-07 | 2008-01-07 | High-temperature high-frequency response double-membrane oil-filled pressure transducer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201141790Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103201607A (en) * | 2010-11-11 | 2013-07-10 | 拜杜瑟姆生产过程用检测仪有限公司 | Diaphragm assembly for a pressure sensor, and a pressure sensor provided with such assembly |
| CN107976275A (en) * | 2017-12-19 | 2018-05-01 | 上海立格仪表有限公司 | A kind of multi-temperature step compensation pressure transmitter |
| CN111220325A (en) * | 2019-12-02 | 2020-06-02 | 中国航空工业集团公司北京长城计量测试技术研究所 | Sine pressure generation method |
| CN113865772A (en) * | 2021-09-17 | 2021-12-31 | 苏州森斯缔夫传感科技有限公司 | Heat dissipation structure, pressure sensor with heat dissipation structure and preparation method of pressure sensor |
| CN115326270A (en) * | 2022-07-28 | 2022-11-11 | 北京航天动力研究所 | High-temperature-resistant pressure sensor with capillary tube with water cooling structure |
-
2008
- 2008-01-07 CN CNU2008200304632U patent/CN201141790Y/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103201607A (en) * | 2010-11-11 | 2013-07-10 | 拜杜瑟姆生产过程用检测仪有限公司 | Diaphragm assembly for a pressure sensor, and a pressure sensor provided with such assembly |
| CN103201607B (en) * | 2010-11-11 | 2016-03-09 | 拜杜瑟姆生产过程用检测仪有限公司 | For pressure transducer diaphragm assembly and be provided with the pressure transducer of this assembly |
| CN107976275A (en) * | 2017-12-19 | 2018-05-01 | 上海立格仪表有限公司 | A kind of multi-temperature step compensation pressure transmitter |
| CN111220325A (en) * | 2019-12-02 | 2020-06-02 | 中国航空工业集团公司北京长城计量测试技术研究所 | Sine pressure generation method |
| CN111220325B (en) * | 2019-12-02 | 2021-07-06 | 中国航空工业集团公司北京长城计量测试技术研究所 | Sine pressure generation method |
| CN113865772A (en) * | 2021-09-17 | 2021-12-31 | 苏州森斯缔夫传感科技有限公司 | Heat dissipation structure, pressure sensor with heat dissipation structure and preparation method of pressure sensor |
| CN115326270A (en) * | 2022-07-28 | 2022-11-11 | 北京航天动力研究所 | High-temperature-resistant pressure sensor with capillary tube with water cooling structure |
| CN115326270B (en) * | 2022-07-28 | 2024-07-09 | 北京航天动力研究所 | High-temperature-resistant pressure sensor with capillary tube having water cooling structure |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20081029 |
|
| CX01 | Expiry of patent term |