CN201173834Y - Small volume high over load all-noncorrodible steel oil-charging structural pressure sensor - Google Patents
Small volume high over load all-noncorrodible steel oil-charging structural pressure sensor Download PDFInfo
- Publication number
- CN201173834Y CN201173834Y CNU2008200316038U CN200820031603U CN201173834Y CN 201173834 Y CN201173834 Y CN 201173834Y CN U2008200316038 U CNU2008200316038 U CN U2008200316038U CN 200820031603 U CN200820031603 U CN 200820031603U CN 201173834 Y CN201173834 Y CN 201173834Y
- Authority
- CN
- China
- Prior art keywords
- stainless steel
- glass sintering
- sintering base
- steel glass
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
The utility model relates to a small volume high overload entire stainless steel oil-filled structure pressure sensor, a silicon pressure sensitive chip is stuck on a stainless steel glass sintering base, a bonding pad on the silicon pressure sensitive chip is connected with a lead foot on the stainless steel glass sintering base through gold wires, a field joint is welded with a stainless steel isolating diaphragm and the stainless steel glass sintering base, silicon oil is filled in the stainless steel isolating diaphragm, a temperature compensating circuit board is mounted on the lead foot of the stainless steel glass sintering base, a shielded conductor is extracted from the temperature compensating circuit board, a shell is welded with the stainless steel glass sintering base, and the tail of the shell is clamped to fix the shielded conductor. The small volume high overload entire stainless steel oil-filled structure pressure sensor has the advantages of good sealing property and insulating ability. The sensor realizes overload capacity four times of full range under Phi 15 X 14, and pressure-proof achieves 56 Mpa. A compound mode of a diode and a resistive network is adopted to carry out the compensation of zero point of the sensor and sensitivity temperature drift. The sensor has small volume, light weight and wide measuring range.
Description
Technical field
The utility model relates to the oil-filled structural pressure sensor of a kind of small size high overload all steel, is to belong to diffuse si piezoresistive pressure sensor technical field.
Background technology
Advantages such as the diffuse si piezoresistive pressure sensor is little with volume, sensitivity height gain great popularity in fields such as Aero-Space, industrial automation, automobile, environmental protection, chemical industry, medical treatment.But for a long time, encapsulation technology is the key factor of development of restriction silicon piezoresistance type pressure sensor and widespread use always.It is little how to develop volume, and the high performance silicon piezoresistive pressure sensor that overload quantity is big again is very difficult; The overload capacity of current medium and small range is at 2～3 times, and the overload of wide range (more than the 6MPa) has only 0.5～1.5 times, and, measurement range little for installing space is big, overload capacity requires 3～4 times occasion, has technological deficiency with existing sensors.
Summary of the invention
The purpose of this utility model is intended to realize the small size and the high overload of silicon piezoresistance type pressure sensor, the oil-filled structural pressure sensor of a kind of small size high overload all steel is proposed, tensile strength, the argon arc welding of employing low-grade fever stainless steel and technique for temperature compensation by the science calculating sensor, make volume only for the sensor of Φ 15X14 millimeter, welding penetration reaches more than 1 millimeter, overload capacity reaches three to four-fold in full scale, and the measurement range of sensor is (0～14) MPa.
Technical solution of the present utility model: its structure is that the Silicon pressure sensitive chip sticks on the stainless steel glass sintering base, pad on the Silicon pressure sensitive chip links to each other with pin on the stainless steel glass sintering base by spun gold 3, erection joint and stainless steel isolation diaphragm and the welding of stainless steel glass sintering base, the inner filling silicone oil of stainless steel isolation diaphragm, the temperature-compensation circuit plate is installed on the pin of stainless steel glass sintering base, shielded conductor is drawn from the temperature-compensation circuit plate, housing and 6 welding of stainless steel glass sintering base, the afterbody fixed mask lead of clamping housing.
Advantage of the present utility model: volume is little, in light weight, and measurement range is wide, and the overload capacity height makes sensor realize being four times in the overload capacity of full scale under the volume of Φ 15X14, and voltage endurance capability reaches 56MPa.
Description of drawings
Accompanying drawing 1 is a structural representation of the present utility model.
Among the figure 1 is erection joint, the 2nd, stainless steel isolation diaphragm, the 3rd, spun gold, the 4th, silicone oil, the 5th, Silicon pressure sensitive chip, the 6th, stainless steel glass sintering base, the 7th, temperature-compensation circuit plate, the 8th, housing, the 9th, shielded conductor.
Embodiment
Temperature-compensation circuit on the temperature-compensation circuit plate 7 is a temperature characterisitic of utilizing diode drop, has adopted the array mode of diode and resistor network to carry out the zero point of sensor and the compensation that Sensitivity Temperature is floated.
Pressure is by installing pressure head 1, act on the stainless steel isolation diaphragm 2, stainless steel isolation diaphragm 2 transfers the pressure on the Silicon pressure sensitive chip 5 by silicone oil 3, the signal that Silicon pressure sensitive chip 5 produces outputs to temperature-compensation circuit by the pin of stainless steel glass sintering base 6, temperature-compensation circuit carries out temperature compensation to electric signal, and signal is through shielded conductor 9 outputs.
The structural design of optimizing:,, make pressure cavity be issued to higher load-carrying ability at less volume by the calculating of science in order to realize the small size of sensor Φ 15X14; The pressure-bearing base adopts the glass sintering technology, and 316L stainless steel base and metal pins are sintered into one, and has guaranteed sealing and insulativity; Stainless steel entrance pressure head, stainless steel isolation diaphragm and 316L stainless steel glass sintering base are welded into an organic whole, to reach the ability of high overload.
The all steel welding technology: stainless steel welds and adopts the welding of low-grade fever argon arc, and the electric current and the arc length of welding are controlled accurately, adopts and puts arc automatically, receives measure assurance welding reliability such as arc automatically.
Diode and resistor network mixing temperature compensate for process: utilize the temperature characterisitic of diode drop, adopted the array mode of diode and resistor network to carry out the zero point of sensor and the compensation that Sensitivity Temperature is floated, and derived relevant confirmed formula.
Claims (1)
1, the oil-filled structural pressure sensor of small size high overload all steel, it is characterized in that the Silicon pressure sensitive chip sticks on the stainless steel glass sintering base, pad on the Silicon pressure sensitive chip links to each other with pin on the stainless steel glass sintering base by spun gold, erection joint and stainless steel isolation diaphragm and the welding of stainless steel glass sintering base, the inner filling silicone oil of stainless steel isolation diaphragm, the temperature-compensation circuit plate is installed on the pin of stainless steel glass sintering base, shielded conductor is drawn from the temperature-compensation circuit plate, housing and the welding of stainless steel glass sintering base, the afterbody fixed mask lead of clamping housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200316038U CN201173834Y (en) | 2008-01-31 | 2008-01-31 | Small volume high over load all-noncorrodible steel oil-charging structural pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200316038U CN201173834Y (en) | 2008-01-31 | 2008-01-31 | Small volume high over load all-noncorrodible steel oil-charging structural pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201173834Y true CN201173834Y (en) | 2008-12-31 |
Family
ID=40200961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200316038U Expired - Lifetime CN201173834Y (en) | 2008-01-31 | 2008-01-31 | Small volume high over load all-noncorrodible steel oil-charging structural pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201173834Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104596678A (en) * | 2013-10-31 | 2015-05-06 | 精工爱普生株式会社 | Force detection device,robot,electronic part transmission device and inspection device |
| CN105021322A (en) * | 2015-07-10 | 2015-11-04 | 四川奇胜科技有限公司 | Integrated pressure sensor |
| CN108267258A (en) * | 2018-02-12 | 2018-07-10 | 西安航天动力研究所 | A kind of big overload high-precision strain pressure transducer |
| CN109959481A (en) * | 2017-12-14 | 2019-07-02 | 浙江三花制冷集团有限公司 | A kind of pressure sensor |
| CN110494729A (en) * | 2017-04-07 | 2019-11-22 | 株式会社鹭宫制作所 | Pressure sensor |
-
2008
- 2008-01-31 CN CNU2008200316038U patent/CN201173834Y/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104596678A (en) * | 2013-10-31 | 2015-05-06 | 精工爱普生株式会社 | Force detection device,robot,electronic part transmission device and inspection device |
| CN105021322A (en) * | 2015-07-10 | 2015-11-04 | 四川奇胜科技有限公司 | Integrated pressure sensor |
| CN110494729A (en) * | 2017-04-07 | 2019-11-22 | 株式会社鹭宫制作所 | Pressure sensor |
| CN110494729B (en) * | 2017-04-07 | 2023-12-05 | 株式会社鹭宫制作所 | Pressure Sensor |
| CN109959481A (en) * | 2017-12-14 | 2019-07-02 | 浙江三花制冷集团有限公司 | A kind of pressure sensor |
| CN109959481B (en) * | 2017-12-14 | 2021-03-26 | 浙江三花制冷集团有限公司 | Pressure sensor |
| CN108267258A (en) * | 2018-02-12 | 2018-07-10 | 西安航天动力研究所 | A kind of big overload high-precision strain pressure transducer |
| CN108267258B (en) * | 2018-02-12 | 2020-06-09 | 西安航天动力研究所 | Large-overload high-precision strain type pressure sensor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201173834Y (en) | Small volume high over load all-noncorrodible steel oil-charging structural pressure sensor | |
| CN101718605B (en) | Sensor for measuring pressure of water in soil at bottom of dam, river and lake and measuring method | |
| CN201149496Y (en) | Pipe type installation structure pressure temperature sensor | |
| CN101832830B (en) | Flush packaged pressure sensor with high temperature resistance and high frequency response | |
| CN201149497Y (en) | Sensor for detecting temperature, humidness atmos surroundings | |
| KR20160104551A (en) | Microfused silicon strain gauge (msg) pressure sensor package | |
| CN103759880B (en) | A kind of SOI absolute pressure Sensitive Apparatus adopting leadless packaging structure | |
| CN112146728B (en) | Weighing sensor | |
| CN203178006U (en) | Pressure transducer packaging structure | |
| CN201138258Y (en) | Surface mounted combined pressure sensor | |
| CN201535706U (en) | Permeable membrane soil hydraulic pressure sensor | |
| CN114354033A (en) | Force sensor and manufacturing method thereof | |
| CN217403499U (en) | Welding sealed temperature and pressure composite sensor | |
| CN212363529U (en) | Pressure transmitter | |
| CN209802563U (en) | Embedded pressure sensor | |
| CN113483941A (en) | Leadless packaging dynamic pressure sensor integrated with ASIC chip | |
| CN111811725A (en) | Pressure transmitter and manufacturing method thereof | |
| CN201945368U (en) | Weighing sensor | |
| CN210827408U (en) | Pressure sensitive element and pore water pressure meter | |
| CN201149535Y (en) | Measuring unit for multipath pressure integration | |
| CN112985667B (en) | Plate-ring type tension sensor, wireless detection system and method based on plate-ring type tension sensor | |
| CN213714540U (en) | Waterproof piezoelectric vibration sensor | |
| CN201569531U (en) | Reliable-pressure sensor with high dual-redundancy | |
| CN110241804B (en) | Pressure sensitive element, packaging method and pore water pressure gauge | |
| CN211205612U (en) | Pressure sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20081231 |