CN212228296U - Pressure sensor - Google Patents
Pressure sensor Download PDFInfo
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- CN212228296U CN212228296U CN202022794190.2U CN202022794190U CN212228296U CN 212228296 U CN212228296 U CN 212228296U CN 202022794190 U CN202022794190 U CN 202022794190U CN 212228296 U CN212228296 U CN 212228296U
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Abstract
The utility model provides a pressure sensor, include: the device comprises a shell, a transmission medium and a control device, wherein one end of the shell is provided with a mounting groove, the other end of the shell is provided with a medium inlet, the medium inlet extends inwards and is communicated with the mounting groove to form a medium channel, and the medium channel is filled with the transmission medium; the isolation diaphragm is arranged at one end of the shell, which is provided with the medium inlet, and covers the medium inlet; the sensor core body, the sensor core body includes base, pressure sensing element and guide pin, and the base embedding is in the mounting groove, and the guide pin passes the base, and the top of base is extended to the top of guide pin, and the bottom of base is extended to the bottom of guide pin, and the sensor core body sets up in the medium passageway with the medium entry is relative, and the flip-chip of pressure sensing element welds the top at the guide pin. The pressure sensor has simple packaging mode, correspondingly reduces the production cost of the pressure sensor, and is beneficial to large-scale popularization and use.
Description
Technical Field
The utility model relates to a sensor manufacturing technical field, in particular to pressure sensor.
Background
The sensor, as a kind of detecting device, can sense the information of the person to be measured, and can convert the sensed information into an electric signal or other information output in a required form according to a certain rule, so as to meet the requirements of information transmission, processing, storage, display, recording, control and the like. With the continuous progress of society and the continuous development of scientific technology, the application field of the sensor in daily life is more and more extensive, and the sensor is more and more developed towards the direction of miniaturization, multi-functionalization, systematization and the like.
In the field of existing sensors, a pressure sensor is one of important sensors, and the pressure sensor has played an important role in the fields of automobiles, electronics, medicine, and the like. For example, pressure sensors are important for detecting pressure signals in fire extinguishers to control the flow of media, measuring gas pressure in air compressors to feed back systems for pressure and safety control, and the like.
However, the packaging structure of the existing pressure sensor is complex, so that the production cost of the pressure sensor is high, and the popularization and the use in a large range are not facilitated.
SUMMERY OF THE UTILITY MODEL
Based on this, the utility model aims at providing a pressure sensor to solve prior art's pressure sensor's packaging structure comparatively complicated, lead to the higher problem of manufacturing cost.
A pressure sensor, comprising:
the device comprises a shell, a transmission medium and a control device, wherein one end of the shell is provided with an installation groove, the other end of the shell is provided with a medium inlet, the medium inlet extends inwards and is communicated with the installation groove to form a medium channel, and the medium channel is filled with the transmission medium;
the isolation diaphragm is arranged at one end of the shell, which is provided with the medium inlet, and covers the medium inlet;
the sensor core body comprises a base, a pressure sensitive element and a guide pin, the base is embedded into the mounting groove, the guide pin penetrates through the base, the top end of the guide pin extends out of the top of the base, the bottom end of the guide pin extends out of the bottom of the base, the sensor core body is arranged in the medium channel opposite to the medium inlet, and the pressure sensitive element is in flip-chip welding with the top end of the guide pin.
The utility model has the advantages that: the mounting groove is formed in one end of the shell, the medium inlet is formed in the other end of the shell, and the mounting groove is communicated with the medium inlet to form a medium channel. During the encapsulation, with the base embedding of sensor core in the mounting groove, because the top of base is extended to the top of guide pin, then directly with the flip-chip bonding of pressure sensitive element on the top of guide pin, fill transmission medium to the medium passageway again, cover the isolation diaphragm and install on the medium entry at last to accomplish this pressure sensor's encapsulation. This kind of packaging method can directly fix the pressure sensing element on the top of guide pin, then pack transmission medium into the medium channel for the ambient pressure that this pressure sensor received can directly transmit to the pressure sensing element through isolation diaphragm and transmission medium on, the pressure sensing element converts ambient pressure into pressure signal and passes through the guide pin output again, with this detection to the ambient pressure of completion, and packaging method is simple, corresponding reduction this pressure sensor's manufacturing cost, be favorable to on a large scale popularization and use.
Preferably, the base is provided with a liquid injection hole, and a sealing steel ball is arranged at the opening at the bottom of the liquid injection hole so as to seal the liquid injection hole.
Preferably, the liquid injection hole is formed in one side of the base.
Preferably, the base is provided with a containing hole, the containing hole is filled with an insulating medium, and the guide pin is fixed on the base through the insulating medium.
Preferably, the accommodation hole is provided in the middle of the base.
Preferably, the base is provided as a sintered base.
Preferably, an annular sealing groove is formed in the outer wall of the shell.
Preferably, one side of the isolation diaphragm, which is far away from the medium inlet, is provided with a pressing ring.
Preferably, the pressure ring is made of stainless steel.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
Fig. 1 is a schematic structural diagram of a pressure sensor according to a first embodiment of the present invention;
fig. 2 is a schematic structural diagram of a pressure sensor according to a second embodiment of the present invention.
Description of the main element symbols:
| |
10 | |
11 |
| |
12 | |
13 |
| |
14 | |
20 |
| |
30 | |
31 |
| Pressure |
32 | |
33 |
| |
311 | |
40 |
| Containing |
312 | |
34 |
| |
15 | |
50 |
The following detailed description of the invention will be further described in conjunction with the above-identified drawings.
Detailed Description
In order to facilitate understanding of the present invention, the present invention will be described more fully hereinafter with reference to the accompanying drawings. Several embodiments of the invention are given in the accompanying drawings. The invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1, a pressure sensor according to a first embodiment of the present invention is shown, in which:
the pressure sensor includes:
the device comprises a shell 10, wherein one end of the shell 10 is provided with a mounting groove 11, the other end of the shell 10 is provided with a medium inlet 12, the medium inlet 12 extends inwards and is communicated with the mounting groove 11 to form a medium channel 13, and a transmission medium 14 is filled in the medium channel 13;
an isolation diaphragm 20 disposed at one end of the housing 10 where the medium inlet 12 is opened, and the isolation diaphragm 20 covers the medium inlet 12;
the sensor core body 30 comprises a base 31, a pressure sensitive element 32 and a guide pin 33, the base 31 is embedded in the installation groove 11, the guide pin 33 penetrates through the base 31, the top end of the guide pin 33 extends out of the top of the base 31, the bottom end of the guide pin 33 extends out of the bottom of the base 31, the sensor core body 30 is arranged in the medium channel 13 opposite to the medium inlet 12, and the pressure sensitive element 32 is in flip-chip bonding with the top end of the guide pin 33.
In the present embodiment, as shown in fig. 1, it should be noted that the overall structure of the housing 10 is configured as a cylinder, and the housing 10 is made of stainless steel. Wherein, mounting groove 11 has been seted up at the one end of casing 10, correspondingly, medium inlet 12 has been seted up at the other end of casing 10, and medium inlet 12 extends to the direction of mounting groove 11, and form medium channel 13 with mounting groove 11 intercommunication, as shown in the figure, it can be understood, in order to transmit ambient pressure to the one end of mounting groove 11 from the one end of medium inlet 12, it is filled with transmission medium 14 to pack in medium channel 13, specifically, in this embodiment, transmission medium 14 sets up to silicon oil, utilize the characteristic of silicon oil, can be quick transmit ambient pressure to pressure sensing element 32 on, specifically, pressure sensing element 32 sets up to pressure chip.
In the present embodiment, as shown in fig. 1, it should be noted that an isolation diaphragm 20 is disposed at one end of the housing 10 where the medium inlet 12 is opened, specifically, the isolation diaphragm 20 is made of stainless steel, and the isolation diaphragm 20 is fixedly mounted on the end surface of the housing 10 where the medium inlet 12 is opened by laser welding. In use, the isolation diaphragm 20 can perform a sufficient sealing function on the housing 10, and on the other hand, the isolation diaphragm 20 can accurately receive the external pressure and transmit the external pressure to the pressure sensitive element 32 through the transmission medium 14.
In the present embodiment, as shown in fig. 1, it should be noted that, in order to facilitate the sensor core 30 to receive the external pressure, the sensor core 30 is disposed in the medium passage 13 opposite to the medium inlet 12, specifically, the base 31 is inserted into the mounting groove 11 and fixed in the mounting groove 11 by laser welding. In this embodiment, it should be noted that the base 31 is configured as a sintered base, in other cases, the base 31 may also be configured as a PCB or ceramic board according to the actual production requirement, all within the protection scope of this embodiment, as shown in fig. 1, a containing hole 312 is formed on the base 31, specifically, the containing hole 312 is disposed in the middle of the base 31, and an insulating medium 34 is filled in the containing hole 312, the guide pin 33 is fixed on the base 31 through the insulating medium 34, as shown in the figure, it is noted that the guide pin 33 passes through the base 31, specifically, the top end of the guide pin 33 extends out of the top of the base 31, the bottom end of the guide pin 33 extends out of the bottom of the base 31, and the pressure sensitive element 32 is fixed at the top end of the guide pin 33 by flip-chip welding and electrically connected with the guide pin 33. In this embodiment, it should be noted that the insulating medium 34 is made of glass, the glass has a very low thermal expansion coefficient, does not crack under severe alternating temperature environments, can be applied to the refrigerant pressure detection field with severe temperature environments, and can simultaneously bear very high pressure.
In the present embodiment, as shown in fig. 1, in order to facilitate the injection of the transport medium 14 into the medium channel 13, the base 31 is provided with an injection hole 311, and a sealing steel ball 40 is provided at the bottom opening of the injection hole 311 to close the injection hole 311 and prevent the transport medium 14 from leaking out of the bottom of the injection hole 311. Specifically, the liquid injection hole 311 is disposed on one side of the base 31, the liquid injection hole 311 is disposed as a circular through hole, and the sealing steel ball 40 is made of stainless steel and fixed at the bottom opening of the liquid injection hole 311 by energy storage welding to complete the sealing of the liquid injection hole 311. In the present embodiment, in order to further improve the sealing performance of the pressure sensor, an annular seal groove 15 is formed in the outer wall of the housing 10, and an O-ring seal may be mounted in the annular seal groove 15 in order to improve the sealing performance of the pressure sensor in use.
In specific implementation, a mounting groove 11 is formed at one end of the housing 10, a medium inlet 12 is formed at the other end of the housing, and the mounting groove 11 is communicated with the medium inlet 12 and forms a medium channel 13. During packaging, the base 31 of the sensor core 30 is embedded in the mounting groove 11, the top end of the guide pin 33 extends out of the top of the base 31, then the pressure sensitive element 32 is directly flip-chip welded on the top end of the guide pin 33, the transmission medium 14 is filled in the medium channel 13, and finally the isolation diaphragm 20 is covered and mounted on the medium inlet 12, thereby completing the packaging of the pressure sensor. The packaging method can directly fix the pressure sensitive element 32 at the top end of the guide pin 33, and then the transmission medium 14 is filled in the medium channel 13, so that the external pressure received by the pressure sensor can be directly transmitted to the pressure sensitive element 32 through the isolation diaphragm 20 and the transmission medium 14, the pressure sensitive element 32 converts the external pressure into a pressure signal and outputs the pressure signal through the guide pin 33, and thus the detection of the external pressure is completed.
It should be noted that the above implementation process is only for illustrating the applicability of the present application, but this does not represent that the pressure sensor of the present application has only the above-mentioned one implementation flow, and on the contrary, the pressure sensor of the present application can be incorporated into the feasible embodiments of the present application as long as the pressure sensor of the present application can be implemented.
Referring to fig. 2, a pressure sensor according to a second embodiment of the present invention is shown, in which the pressure sensor of the present embodiment is different from the pressure sensor of the first embodiment in that:
in this embodiment, as shown in fig. 2, it should be noted that, in order to further improve the installation stability of the isolation diaphragm 20, so as to prevent the isolation diaphragm 20 from falling off and causing the transmission medium 14 to leak, a pressing ring 50 is disposed on one side of the isolation diaphragm 20 away from the medium inlet 12, specifically, the pressing ring 50 is fixedly mounted on the isolation diaphragm 20 by laser welding, and the pressing ring 50 is made of stainless steel, which facilitates the production of the pressing ring 50.
It should be noted that the device provided by the second embodiment of the present invention, which implements the same principle and produces some technical effects as the first embodiment, can refer to the corresponding contents in the first embodiment for the sake of brief description, where this embodiment is not mentioned.
To sum up, the utility model provides a pressure sensor's packaging method is simple to corresponding reduction this pressure sensor's manufacturing cost is favorable to on a large scale popularization and use.
The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.
Claims (9)
1. A pressure sensor, comprising:
the device comprises a shell, a transmission medium and a control device, wherein one end of the shell is provided with an installation groove, the other end of the shell is provided with a medium inlet, the medium inlet extends inwards and is communicated with the installation groove to form a medium channel, and the medium channel is filled with the transmission medium;
the isolation diaphragm is arranged at one end of the shell, which is provided with the medium inlet, and covers the medium inlet;
the sensor core body comprises a base, a pressure sensitive element and a guide pin, the base is embedded into the mounting groove, the guide pin penetrates through the base, the top end of the guide pin extends out of the top of the base, the bottom end of the guide pin extends out of the bottom of the base, the sensor core body is arranged in the medium channel opposite to the medium inlet, and the pressure sensitive element is in flip-chip welding with the top end of the guide pin.
2. The pressure sensor of claim 1, wherein: a liquid injection hole is formed in the base, and a sealing steel ball is arranged at the opening of the bottom of the liquid injection hole to seal the liquid injection hole.
3. The pressure sensor of claim 2, wherein: the liquid injection hole is formed in one side of the base.
4. The pressure sensor of claim 1, wherein: the base is provided with a containing hole, an insulating medium is filled in the containing hole, and the guide pin is fixed on the base through the insulating medium.
5. The pressure sensor of claim 4, wherein: the containing hole is arranged in the middle of the base.
6. The pressure sensor of claim 1, wherein: the base is configured as a sintering base.
7. The pressure sensor of claim 1, wherein: an annular sealing groove is formed in the outer wall of the shell.
8. The pressure sensor of claim 1, wherein: and a pressure ring is arranged on one side of the isolation diaphragm, which is far away from the medium inlet.
9. The pressure sensor of claim 8, wherein: the pressure ring is made of stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022794190.2U CN212228296U (en) | 2020-11-27 | 2020-11-27 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022794190.2U CN212228296U (en) | 2020-11-27 | 2020-11-27 | Pressure sensor |
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| Publication Number | Publication Date |
|---|---|
| CN212228296U true CN212228296U (en) | 2020-12-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022794190.2U Active CN212228296U (en) | 2020-11-27 | 2020-11-27 | Pressure sensor |
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| CN (1) | CN212228296U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114812914A (en) * | 2022-04-21 | 2022-07-29 | 江苏长虹智能装备股份有限公司 | Isolated liquid pressure measuring mechanism |
-
2020
- 2020-11-27 CN CN202022794190.2U patent/CN212228296U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114812914A (en) * | 2022-04-21 | 2022-07-29 | 江苏长虹智能装备股份有限公司 | Isolated liquid pressure measuring mechanism |
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