CN107389229A - A kind of ceramic capacitive pressure sensors - Google Patents
A kind of ceramic capacitive pressure sensors Download PDFInfo
- Publication number
- CN107389229A CN107389229A CN201710581563.8A CN201710581563A CN107389229A CN 107389229 A CN107389229 A CN 107389229A CN 201710581563 A CN201710581563 A CN 201710581563A CN 107389229 A CN107389229 A CN 107389229A
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- Prior art keywords
- fixed electrode
- sensitive diaphragm
- pressure sensors
- capacitive pressure
- electrode
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a kind of ceramic capacitive pressure sensors, including fixed electrode and movable electrode, variable electric capacity room is formed between fixed electrode and movable electrode, sensitive diaphragm experiences pressure change and produces corresponding deformational displacement, movable electrode produces change with the displacement of sensitive diaphragm, and then the capacitance of electric capacity room changes, pressure size is measured by the change of capacitance.The ceramic capacitive pressure sensors of the present invention set glass dielectric layer on fixed electrode; when test pressure exceedes design measured value; movable electrode and glass dielectric layer on sensitive diaphragm are close together; prevent fixed electrode and movable electrode short circuit; position limitation protection effect is played, prevents sensor from being damaged caused by overload.
Description
Technical field
The present invention relates to detection device field, more particularly to a kind of ceramic capacitive pressure sensors.
Background technology
Pressure sensor is a kind of sensor the most commonly used in industrial practice, and it is widely used in various industrial automatic control rings
Border, be related to water conservancy and hydropower, railway traffic, intelligent building, production automatic control, Aero-Space, military project, petrochemical industry, oil well, electric power, ship,
Numerous industries such as lathe, pipeline.Pressure sensor is a kind of the most widely used sensor, and traditional pressure sensor is with machine
Based on the device of tool structural type, pressure is indicated with the deformation of flexible member, but this physical dimension is big, quality weight, it is impossible to provide
Electricity exports.With the development of semiconductor technology, semiconductor pressure sensor also arises at the historic moment, and is characterized in small volume, quality
Gently, the degree of accuracy is high, good temp characteristic, in particular with the development of MEMS technology, semiconductor transducer towards miniaturization, and
And its small power consumption, reliability are high.At present, the most widely used pressure measurement technology has condenser type, pressure resistance type and silicon resonance etc.
Three kinds.
Capacitance pressure transducer, is that one kind utilizes capacitance sensitive elements by tested pressure conversion into therewith into certain relation
Electricity output pressure sensor, feature is low input power and dwarf's energy, high dynamic response, small natural effect, ring
Border adaptability is good.Capacitance pressure transducer, typically uses the electricity of circular metal film or metal-coated films as capacitor
Pole, when film is experienced pressure and deformed, the capacitance formed between film and fixed electrode changes, and passes through measuring circuit
The i.e. exportable electric signal with voltage into certain relation.Capacitance pressure transducer, includes ceramic capacitive pressure sensors, compares
It is sensor in metal capacitance, ceramic capacitive pressure sensors may be directly applied to hygiene-type industry, and Korrosionsmedium
Measurement, it is cost-effective, can be applied to the pressure measxurement of liquid, gas or various fluids.But ceramic capacitive pressure sensors
Easily because of overload and caused by damage, the life-span is shorter, adds production cost.
Therefore, how to change in the prior art, the present situation that ceramic capacitive pressure sensors are easily damaged by overload, be ability
Field technique personnel's urgent problem to be solved.
The content of the invention
It is an object of the invention to provide a kind of ceramic capacitive pressure sensors, to solve to ask existing for above-mentioned prior art
Topic, ceramic capacitive pressure sensors are enable to be effectively protected in overload.
To achieve the above object, the invention provides following scheme：The present invention provides a kind of ceramic capacitive pressure sensors,
Including pedestal, binding post, fixed electrode, sensitive diaphragm and movable electrode, the binding post is arranged on the pedestal, the base
One end of seat has spherical groove, and the fixed electrode is arranged on the spherical groove, the fixed electrode and the wiring
Post is connected, and glass dielectric layer is provided with the fixed electrode, and the sensitive diaphragm is connected with the pedestal, it is described can power transformation
Pole is arranged on the sensitive diaphragm and close to the pedestal side, electricity is formed between the fixed electrode and the movable electrode
Hold room.
Preferably, the fixed electrode includes the first fixed electrode and the second fixed electrode, and first fixed electrode is
Spheric, second fixed electrode are annular, and first fixed electrode is arranged concentrically with second fixed electrode.
Preferably, ceramic capacitive pressure sensors also include shading ring, and the shading ring is arranged on the sensitive diaphragm,
The shading ring is set around the movable electrode.
Preferably, the quantity of the binding post is four, and circumferentially shape is uniform for four binding posts, four wiring
Post is connected with first fixed electrode, second fixed electrode, the movable electrode and the shading ring respectively.
Preferably, passage is opened up on the pedestal, the passage is connected with the electric capacity room.
Preferably, the first positioning hole is set on the spherical groove, the sensitive diaphragm with the first positioning hole phase
The position of matching sets the second positioning hole.
Preferably, the pedestal is cylindrical base, and the spherical groove is arranged on a bottom surface of the pedestal, institute
Pedestal is stated by AL2O3Material is made.
Preferably, the fixed electrode, the movable electrode and the shading ring are made up of gold, silver, copper or platinum product matter, institute
It is disc to state sensitive diaphragm, and the sensitive diaphragm is made up of the thin plate of ceramic material.
Preferably, ceramic capacitive pressure sensors also include sensitive diaphragm measurement end screen layer, the sensitive diaphragm measurement
End shield layer is arranged on the sensitive diaphragm, and the sensitive diaphragm measurement end screen layer and the movable electrode are respectively arranged at
The both sides of the sensitive diaphragm.
The present invention achieves following technique effect relative to prior art：The ceramic capacitive pressure sensors of the present invention, bag
Fixed electrode and movable electrode are included, variable electric capacity room, sensitive diaphragm impression pressure are formed between fixed electrode and movable electrode
Power changes and produces corresponding deformational displacement, and movable electrode produces change, and then electric capacity room with the displacement of sensitive diaphragm
Capacitance change, pressure size is measured by the change of capacitance.The ceramic capacitive pressure sensors of the present invention are solid
Glass dielectric layer is set on fixed electrode, when test pressure exceedes design measured value, movable electrode and glass on sensitive diaphragm
Insulating barrier is close together, and prevents fixed electrode and movable electrode short circuit, plays position limitation protection effect, prevents sensor because of overload
Cause to damage.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to institute in embodiment
The accompanying drawing needed to use is briefly described, it should be apparent that, drawings in the following description are only some implementations of the present invention
Example, for those of ordinary skill in the art, without having to pay creative labor, can also be according to these accompanying drawings
Obtain other accompanying drawings.
Fig. 1 is the overall cutting structural representation of ceramic capacitive pressure sensors of the present invention；
Fig. 2 is the cutting structural representation of ceramic capacitive pressure sensors pedestal of the present invention；
Fig. 3 is the schematic top plan view of ceramic capacitive pressure sensors pedestal of the present invention；
Fig. 4 is the cutting structural representation of ceramic capacitive pressure sensors sensitive diaphragm of the present invention；
Fig. 5 is the schematic top plan view of ceramic capacitive pressure sensors sensitive diaphragm of the present invention；
Wherein, 1 is pedestal, and 101 be spherical groove, and 102 be passage, and 103 be the first positioning hole, and 2 be binding post, and 3 are
Fixed electrode, 301 be glass dielectric layer, and 302 be the first fixed electrode, and 303 be the second fixed electrode, and 4 be sensitive diaphragm, 401
It is movable electrode for the second positioning hole, 5,6 be electric capacity room, and 7 be shading ring, and 8 be sensitive diaphragm measurement end screen layer.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
It is an object of the invention to provide a kind of ceramic capacitive pressure sensors, to solve to ask existing for above-mentioned prior art
Topic, ceramic capacitive pressure sensors are enable to be effectively protected in overload.
In order to facilitate the understanding of the purposes, features and advantages of the present invention, it is below in conjunction with the accompanying drawings and specific real
Applying mode, the present invention is further detailed explanation.
It refer to Fig. 1 extremely, Fig. 1 is the overall cutting structural representation of ceramic capacitive pressure sensors of the present invention, and Fig. 2 is this
The cutting structural representation of invention ceramic capacitive pressure sensors pedestal, Fig. 3 are ceramic capacitive pressure sensors pedestal of the present invention
Schematic top plan view, Fig. 4 be ceramic capacitive pressure sensors sensitive diaphragm of the present invention cutting structural representation, Fig. 5 is this hair
The schematic top plan view of bright ceramic capacitive pressure sensors sensitive diaphragm.
The present invention provides a kind of ceramic capacitive pressure sensors, including pedestal 1, binding post 2, fixed electrode 3, sensitive diaphragm
4 and movable electrode 5, binding post 2 be arranged on pedestal 1, one end of pedestal 1 has spherical groove 101, and fixed electrode 3 is arranged at
On spherical groove 101, fixed electrode 3 is connected with binding post 2, and glass dielectric layer 301, sensitive membrane are provided with fixed electrode 3
Piece 4 is connected with pedestal 1, and movable electrode 5 is arranged on sensitive diaphragm 4 and close to the side of pedestal 1, fixed electrode 3 and movable electrode 5
Between form electric capacity room 6.
The ceramic capacitive pressure sensors of the present invention, including fixed electrode 3 and movable electrode 5, fixed electrode 3 and can power transformation
Variable electric capacity room 6 is formed between pole 5, sensitive diaphragm 4 experiences pressure change and produces corresponding deformational displacement, movable electrode
5 produce change with the displacement of sensitive diaphragm 4, and then the capacitance of electric capacity room 6 changes, and pass through the change of capacitance
Measure pressure size.The ceramic capacitive pressure sensors of the present invention set glass dielectric layer 301 on fixed electrode 3, work as test
When pressure exceedes design measured value, movable electrode 5 and glass dielectric layer 301 on sensitive diaphragm 4 are close together, and prevent from fixing
Electrode 3 and the short circuit of movable electrode 5, play position limitation protection effect, prevent sensor from being damaged caused by overload, effectively protect ceramic electrical
Hold pressure sensor.
Specifically, pedestal 1 and sensitive diaphragm 4 are sintered together to form a closed electric capacity room 6, according to institute's measuring pressure
Size sets the thickness of sensitive diaphragm 4, surrenders ability according to sensitive diaphragm 4 THICKNESS CALCULATION sensitive diaphragm 4, and then design sensitive
The maximum allowable displacement of diaphragm 4, the song of spherical groove 101 on pedestal 1 is determined according to the maximum allowable displacement of sensitive diaphragm 4
Face diameter, the displacement space of electric capacity room 6 is arranged within allowed band, ensure ceramic condenser pressure so as to form mechanical protection
Force snesor can bear the multiple for exceeding measurement pressure, be provided simultaneously with freezing stress damage function.
Wherein, fixed electrode 3 includes the first fixed electrode 302 and the second fixed electrode 303, and the first fixed electrode 302 is
Spheric, the second fixed electrode 303 are annular, and the first fixed electrode 302 is arranged concentrically with the second fixed electrode 303.First
Fixed electrode 302 forms electric capacity C with movable electrode 51, the second fixed electrode 303 and movable electrode 5 form electric capacity C2, when pressure passes
Pass on sensitive diaphragm 4, sensitive diaphragm 4 produces deformation, changes the fixed electrode of movable electrode 5 and first on sensitive diaphragm 4
302nd, the distance between second fixed electrode 303, so as to cause electric capacity C1With electric capacity C2The change of capacitance, electric capacity C1And electric capacity
C2The change of capacitance relation proportional to institute measuring pressure, (C1-C2)/(C1+C2) value as ceramic capacitive pressure sensors
Electric signal output, realize accurate pressure measxurement.
More specifically, ceramic capacitive pressure sensors also include shading ring 7, shading ring 7 is arranged on sensitive diaphragm 4, screen
Ring 7 is covered to set around movable electrode 5.Shading ring 7 is located at the periphery of the first fixed electrode 302 and the second fixed electrode 303, it is ensured that
Fixed electrode 3 and the antijamming capability of movable electrode 5, improve sensor accuracy of detection.Pass through coating process system on sensitive diaphragm 4
Make to be produced on the periphery of movable electrode 5, plated film relative to the suitable movable electrode 5 of the diameter of the second fixed electrode 303, shading ring 7
Technique can use one kind in the techniques such as thick film screen printing, vacuum coating or magnetron sputtering.In this embodiment, shield
Ring 7 is made up of silver-colored material, and thickness is 30 μm；The present invention other embodiments in, shading ring 7 can also by gold, copper,
The conductive materials such as platinum support, and the thickness of shading ring 7 is 15-50 μm.
Further, the quantity of binding post 2 is four, and circumferentially shape is uniform for four binding posts 2, and four binding posts 2 are distinguished
It is connected with the first fixed electrode 302, the second fixed electrode 303, movable electrode 5 and shading ring 7.Four of crosswise distribution connect
Terminal 2 is connected with electric capacity room 6.
Further, passage 102 is opened up on pedestal 1, passage 102 is connected with electric capacity room 6.Passage 102
Setting, electric capacity room 6 and sensitive diaphragm 4 is similarly hereinafter put at normal atmospheric pressure being not added with pressure condition, solve because of closed appearance
Room can not using atmospheric pressure as witness mark and closed gas by temperature expansion and caused by zero point error problem, improve sensing
Device accuracy of detection.After passage 102 is blocked, pedestal 1 and sensitive diaphragm 4 sinter under vacuum conditions, are in electric capacity room 6
Vacuum state, ceramic capacitive pressure sensors are absolute pressure transducer.
In addition, setting the first positioning hole 103 on spherical groove 101, sensitive diaphragm 4 matches with the first positioning hole 103
Position set the second positioning hole 401.Positioned by the first positioning hole 103 and the second positioning hole 401, make sensitive diaphragm 4 and base
Corresponding binding post 2 on seat 1, accurate docking are connected, and are placed in 800 DEG C of sintering 20min in high temp tunnel stove, make pedestal 1 and quick
Sense diaphragm 4 is sintered together, and the glass dielectric layer 301 that thickness is 90 μ m-thicks is formed on ball recess 101, variable to prevent
Short circuit caused by electrode 5 overloads, and avoid the loss of significance caused by the change of humidity and environment of gauge pressure type sensor.
Pedestal 1 is cylindrical base, and spherical groove 101 is arranged on a bottom surface of pedestal 1, and pedestal 1 is by AL2O3Material
It is made.
Fixed electrode 3, movable electrode 5 and shading ring 7 are made up of gold, silver, copper or platinum product matter, and sensitive diaphragm 4 is disc,
Sensitive diaphragm 4 is made up of the thin plate of ceramic material.
Ceramic capacitive pressure sensors also include sensitive diaphragm measurement end screen layer 8, and sensitive diaphragm measurement end screen layer 8 is set
It is placed on sensitive diaphragm 4, sensitive diaphragm measurement end screen layer 8 and movable electrode 5 are respectively arranged at the both sides of sensitive diaphragm 4.When
When measured medium is conducting medium, the electrode inside ceramic capacitive pressure sensors can form multiple interference capacitors with metal shell
Causing measurement error and failure, sensitive diaphragm measurement end screen layer 8 can isolate because of conducting medium the interference capacitors as caused by water,
Ensure the accuracy of measurement, widen the application of ceramic capacitive pressure sensors.Sensitive diaphragm measurement end screen layer 8 can be with
It is made up of conducting metal material, in this embodiment, it is contemplated that corrosion resistance and stability, sensitive diaphragm measurement end screen
Cover layer 8 to be made up of golden material, thickness is 15-50 μm.The diameter of sensitive diaphragm measurement end screen layer 8 and the diameter of sensitive diaphragm 4
Unanimously, the second positioning hole 401 on sensitive diaphragm 4 is through hole, and sensitive diaphragm measurement end screen layer 8 passes through the second positioning hole 401
Realization is connected with shading ring 7.
The ceramic capacitive pressure sensors of the present invention, including fixed electrode 3 and movable electrode 5, fixed electrode 3 and can power transformation
Variable electric capacity room 6 is formed between pole 5, sensitive diaphragm 4 experiences pressure change and produces corresponding deformational displacement, movable electrode
5 produce change with the displacement of sensitive diaphragm 4, and then the capacitance of electric capacity room 6 changes, and pass through the change of capacitance
Measure pressure size.It is emphasized that the ceramic capacitive pressure sensors of the present invention set glass insulation on fixed electrode 3
Layer 301, when test pressure exceedes design measured value, movable electrode 5 and glass dielectric layer 301 on sensitive diaphragm 4 are close to
Together, the spherical groove 101 on pedestal 1 and glass dielectric layer 301 play position limitation protection effect, so that sensor has anti-mistake
Loading capability, and prevent because liquid at low ambient temperatures icing volumetric expansion and caused by mechanical stress sensor is caused to damage,
The mistake of sensor is avoided to export, shading ring 7 is connected with the modulate circuit of periphery, and anti-jamming circuit combination improves anti-interference energy
Power, improve the accuracy of measurement.
Specific case is applied in the present invention to be set forth the principle and embodiment of the present invention, above example
Illustrate to be only intended to help the method and its core concept for understanding the present invention；Meanwhile for those of ordinary skill in the art, according to
According to the thought of the present invention, in specific embodiments and applications there will be changes.In summary, this specification content
It should not be construed as limiting the invention.
Claims (9)
- A kind of 1. ceramic capacitive pressure sensors, it is characterised in that：Including pedestal, binding post, fixed electrode, sensitive diaphragm and can Variable electrode, the binding post are arranged on the pedestal, and one end of the pedestal has spherical groove, and the fixed electrode is set In on the spherical groove, the fixed electrode is connected with the binding post, and glass insulation is provided with the fixed electrode Layer, the sensitive diaphragm are connected with the pedestal, and the movable electrode is arranged on the sensitive diaphragm and close to the pedestal Side, electric capacity room is formed between the fixed electrode and the movable electrode.
- 2. ceramic capacitive pressure sensors according to claim 1, it is characterised in that：It is solid that the fixed electrode includes first Fixed electrode and the second fixed electrode, first fixed electrode are spheric, and second fixed electrode is annular, described One fixed electrode is arranged concentrically with second fixed electrode.
- 3. ceramic capacitive pressure sensors according to claim 2, it is characterised in that：Also include shading ring, the shielding Ring is arranged on the sensitive diaphragm, and the shading ring is set around the movable electrode.
- 4. ceramic capacitive pressure sensors according to claim 3, it is characterised in that：The quantity of the binding post is four Individual, circumferentially shape is uniform for four binding posts, and four binding posts are consolidated with first fixed electrode, described second respectively Fixed electrode, the movable electrode are connected with the shading ring.
- 5. ceramic capacitive pressure sensors according to claim 1, it is characterised in that：Passage is opened up on the pedestal, The passage is connected with the electric capacity room.
- 6. ceramic capacitive pressure sensors according to claim 1, it is characterised in that：First is set on the spherical groove Positioning hole, the sensitive diaphragm set the second positioning hole in the position to match with first positioning hole.
- 7. ceramic capacitive pressure sensors according to claim 1, it is characterised in that：The pedestal is cylindrical base, The spherical groove is arranged on a bottom surface of the pedestal, and the pedestal is by AL2O3Material is made.
- 8. ceramic capacitive pressure sensors according to claim 3, it is characterised in that：It is the fixed electrode, described variable Electrode and the shading ring are made up of gold, silver, copper or platinum product matter, and the sensitive diaphragm is disc, and the sensitive diaphragm is by making pottery The thin plate of porcelain material is made.
- 9. ceramic capacitive pressure sensors according to claim 1, it is characterised in that：Also include sensitive diaphragm measurement end screen Cover layer, the sensitive diaphragm measurement end screen layer is arranged on the sensitive diaphragm, the sensitive diaphragm measurement end screen layer and The movable electrode is respectively arranged at the both sides of the sensitive diaphragm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710581563.8A CN107389229A (en) | 2017-07-17 | 2017-07-17 | A kind of ceramic capacitive pressure sensors |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710581563.8A CN107389229A (en) | 2017-07-17 | 2017-07-17 | A kind of ceramic capacitive pressure sensors |
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| CN107389229A true CN107389229A (en) | 2017-11-24 |
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| CN201710581563.8A Pending CN107389229A (en) | 2017-07-17 | 2017-07-17 | A kind of ceramic capacitive pressure sensors |
Country Status (1)
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107843379A (en) * | 2017-12-13 | 2018-03-27 | 沈阳市传感技术研究所 | The capacitive pressure transducer of assembled fixed electrode |
| CN108362434A (en) * | 2018-04-15 | 2018-08-03 | 无锡盛赛传感科技有限公司 | A kind of ceramic pressure sensor diaphragm structure |
| CN109115393A (en) * | 2018-10-18 | 2019-01-01 | 沈阳市传感技术研究所 | Using the electrode single-end suspension type capacitive pressure transducer of metal fixed electrode |
| CN110715757A (en) * | 2019-11-05 | 2020-01-21 | 中国计量大学 | Capacitive pressure sensor based on carbonized cotton fabric film electrode |
| CN110823442A (en) * | 2019-11-22 | 2020-02-21 | 东台市高科技术创业园有限公司 | Capacitive pressure sensor |
| WO2020192660A1 (en) * | 2019-03-27 | 2020-10-01 | 西人马联合测控（泉州）科技有限公司 | Pressure sensor and manufacturing method therefor |
| CN112556892A (en) * | 2020-11-13 | 2021-03-26 | 北京遥测技术研究所 | High-precision resonant ball type pressure sensor |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107843379A (en) * | 2017-12-13 | 2018-03-27 | 沈阳市传感技术研究所 | The capacitive pressure transducer of assembled fixed electrode |
| CN107843379B (en) * | 2017-12-13 | 2023-09-22 | 沈阳市传感技术研究所 | Capacitive pressure sensor with assembled fixed electrode |
| CN108362434A (en) * | 2018-04-15 | 2018-08-03 | 无锡盛赛传感科技有限公司 | A kind of ceramic pressure sensor diaphragm structure |
| CN109115393A (en) * | 2018-10-18 | 2019-01-01 | 沈阳市传感技术研究所 | Using the electrode single-end suspension type capacitive pressure transducer of metal fixed electrode |
| CN109115393B (en) * | 2018-10-18 | 2023-11-10 | 沈阳市传感技术研究所 | Electrode single-end suspension type capacitance pressure sensor adopting metal fixed electrode |
| WO2020192660A1 (en) * | 2019-03-27 | 2020-10-01 | 西人马联合测控（泉州）科技有限公司 | Pressure sensor and manufacturing method therefor |
| CN110715757A (en) * | 2019-11-05 | 2020-01-21 | 中国计量大学 | Capacitive pressure sensor based on carbonized cotton fabric film electrode |
| CN110823442A (en) * | 2019-11-22 | 2020-02-21 | 东台市高科技术创业园有限公司 | Capacitive pressure sensor |
| CN110823442B (en) * | 2019-11-22 | 2021-06-22 | 东台市高科技术创业园有限公司 | Capacitive pressure sensor |
| CN112556892A (en) * | 2020-11-13 | 2021-03-26 | 北京遥测技术研究所 | High-precision resonant ball type pressure sensor |
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