CN206531462U - A kind of self-temperature compensating gage - Google Patents
A kind of self-temperature compensating gage Download PDFInfo
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- CN206531462U CN206531462U CN201621482394.XU CN201621482394U CN206531462U CN 206531462 U CN206531462 U CN 206531462U CN 201621482394 U CN201621482394 U CN 201621482394U CN 206531462 U CN206531462 U CN 206531462U
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Abstract
The utility model belongs to field of sensing technologies, and in particular to one kind is applied to alternating temperature, especially there is the New temperature self-compensating strain meter used under thermograde, environment；The strain gauge includes four electrodes and four sensitive grids being orthogonally set in substrate and substrate, and described four sensitive grids are by four sizes are identical, thickness is uniform and isotropic sensitive grid foil is constituted；Four described sensitive grids are interconnected to constitute two adjacent sensitive grid in Wheatstone electric bridges, electric bridge and constitute current channel all the way, and four sensitive grids are interconnected to constitute four road current channels；Four described road current channels are connected with four electrodes respectively.The strain gauge by self structure can real-Time Compensation by sensitive grid material itself resistance temperature effect, and measurement error caused by sensing element and test block expanded by heating, therefore only rely on and only can be very good to ensure the effect temperature compensation of strain gauge by the uniformity of processing technology and material, without extra temperature-compensation circuit.
Description
Technical field
The utility model belongs to field of sensing technologies, and in particular to one kind especially has under thermograde, environment in alternating temperature
Accurate measurement stress or the strain gauge of strain.
Background technology
Strain gauge measures and made various physical quantitys (power, gravity, pressure, displacement, acceleration and moment of torsion) in structural stress
Obtained a wide range of applications in terms of sensor, modern strain gauge technology be popularized in space flight, aviation, atomic energy, chemical industry, machinery,
The every field such as building, communications and transportation and bioengineering.However, most of strain gauge is all very sensitive to temperature, and by temperature
Interference output (temperature effect) caused by degree and strain output quantity are substantially in an order of magnitude.The most frequently used temperature-compensating mode
It is to set up Wheatstone electric bridges using at least two identical strain gauges；Another way is then to be disposed about temperature in strain gauge
Spend sensor, and the output according to the data of temperature sensor to strain gauge is modified.In engineer applied, both approaches
Also it can be used in combination with.
But the above method only just has preferable effect temperature compensation in fixed temperature environment.In varying temperature environment, especially have
In the case of thermograde, each discrete component temperature difference certain because existing, therefore larger null offset and measurement error can be caused.
For example, when carrying out hypersonic wind tunnel experiment, high-temperature gas can heat aerodynamic model and transfer heat to inside model
On strain balance, because Model angle of attack, gas temperature, gas flow for testing every time etc. may be different, therefore strain balance
Temperature and thermograde can all change.In this case, two kinds of above-mentioned temperature compensations can not all suppress to answer well
Become the temperature effect of meter.
The content of the invention
The purpose of this utility model is to provide a kind of temperature self-compensation type strain gauge, and such strain gauge can overcome above-mentioned side
The defect of method and can by self structure to temperature effect carry out self compensation；Such strain gauge directly can be exported and strained
Proportional voltage signal；The resistance temperature effect of strain gauge materials in itself, and the temperature expansion between strain gauge and test block
Difference of coefficients, the output with such strain gauge are unrelated, i.e. the output of such strain gauge is related only to the strain of test block.
To achieve these goals, the utility model uses following technical scheme：
Four electrodes being orthogonally set on a kind of self-temperature compensating gage, including substrate and substrate and four sensitivities
Grid, described four sensitive grids are by four sizes are identical, thickness is uniform and isotropic sensitive grid foil is constituted；Described four
Individual sensitive grid is interconnected to constitute two adjacent sensitive grid in Wheatstone electric bridges, electric bridge and constitutes current channel, four all the way
Sensitive grid is interconnected to constitute four road current channels；Four described road current channels are connected with four electrodes respectively.
Four described sensitive grids are square, and are connected with each other composition square shape.
Four described sensitive grids are sector, and are connected with each other the circular shape of composition.
Described electrode and sensitive grid is arranged on described by way of stickup, sputtering, deposition, ion implanting or diffusion
In substrate.
A kind of two layers of the sensitive grid set on self-temperature compensating gage, including substrate and substrate, every layer of sensitive grid contains
Separated between two sensitive resistances, two layers of sensitive grid by a layer insulating；The size of four described sensitive resistances is identical and by phase
Same sensitive grid foil is made；Two layers described of sensitive grid, which interlocks 90 °, to be superimposed, and can be spatially completely superposed.
A kind of four layers of sensitive grid set on self-temperature compensating gage, including substrate and substrate, every layer of sensitive grid contains
Separated between one sensitive resistance, every two layers of sensitive grid by a layer insulating；The size of four described sensitive resistances it is identical and
It is made up of identical sensitive grid foil；Four layers of described sensitive grid, which interlock 90 °, to be superimposed, and can be spatially completely superposed.
Above-described sensitive grid foil is metal strain electric resistance alloy, semi-conducting material or metal oxide.
Remarkable result of the present utility model is：
1. without complicated temperature-compensating means, only by processing technology and the uniformity of material to reach good temperature
Compensation effect；
2. because its own can be influenceed with compensation temperature, therefore the temperature characterisitic of the selection of sensitive grid material not by material in itself
Limitation；
3. manufacture craft is simple, due to only improving sensitive grid structure, therefore it can be made using the ripe of conventional strain gauge
Technique.
4. described in strain gauge can direct voltage output signal.
Brief description of the drawings
Fig. 1 is a kind of structural representation of self-temperature compensating gage；
Fig. 2 is the application method schematic diagram of strain gauge shown in Fig. 1；
Fig. 3 is a kind of circular self-temperature compensating gage structural representation that can be used for measuring pressure；
Fig. 4 is a kind of configuration schematic diagram for the self-temperature compensating gage being made up of two layers of sensitive structure；
Fig. 5 is a kind of configuration schematic diagram for the self-temperature compensating gage being made up of four layers of sensitive structure.
In figure：1. the insulation between the insulating barrier between strain gauge substrate, 2. two layers of sensitive structure, 3~5. 4 layers of sensitive structure
Layer, 10. lead electrodes, 11. direct voltage sources, 12. voltage output signal detecting elements, the sensitivity of 12~15. another shapes
Grid, R1~R4. constitutes four sensitive grids of Wheatstone electric bridges on piece.
Embodiment
Below in conjunction with the accompanying drawings and specific embodiment is counted as into one to New temperature self-compensating strain described in the utility model
Step is described in detail.
Fig. 1 is a kind of strain gauge structure schematic diagram of the present utility model.Strain gauge is by strain gauge substrate 1, lead electrode 10
With four symmetrical sensitive grid R1~R4 compositions；The material for making lead electrode 10 can be identical with sensitive grid R1~R4, also
The more preferable material of electric conductivity may be selected；The structures such as lead electrode 10, sensitive grid R1~R4 in substrate 1 can be by pasting, splashing
Penetrate, deposit, ion implanting, the mode such as diffusion make.Sensitive grid R1~R4 sizes are identical, uniform and each to same by using thickness
The sensitive grid foil of property, sensitive grid R1~R4 resistance value can preferably be met：
Therefore, the utility model proposes strain be calculated as in a monolithic strain gauge substrate make four equivalent resistance structures
To constitute the strain sensitive device of resistance bridge.
Described sensitive grid foil is one kind in metal strain electric resistance alloy, semi-conducting material or metal oxide.
In the electric bridge that foil gauge is constituted, only as R1 × R3=R2 × R4, electric bridge is just balanced, but actually each bridge arm
Between resistance will not essentially equal (may also be caused by resistance value be slightly changed after strain gauge adhesion), cause electric bridge one
Start that equilibrium condition cannot be met, therefore have a zero-bit output., can by adjusting sensitive grid R1~R4 resistance value size
Further to fine-tune bridge balance.Regulative mode can be using the sensitive grid material in removal part, increase compensation resistance etc.
Mode.
Second condition of strain gauge zero point temperature drift compensation is temperature-coefficient of electrical resistance condition, i.e.,
α1+α3=α2+α4 (2)
To ensure keep balance in different temperature points electric bridge.
The utility model proposes strain gauge on four sensitive grids by being made with a collection of technique on adjacent position,
Therefore can preferably be realized with guaranteed conditions (1) and condition (2) by processing technology and the uniformity of material.
Fig. 2 is the application method schematic diagram of the strain gauge.The two panels lead electrode 10 of direct voltage source 11 and strain gauge connects
Connect, so as to form current channel all the way on sensitive grid R1 and R4 and form another paths on sensitive grid R2 and R3；Voltage output
Signal detection component 12, such as voltmeter, are connected with the another two electrode 10 of strain gauge.When the electric bridge on strain gauge causes in response to change
During disequilibrium, element 12 will detect voltage output signal corresponding with strain facies.
In actual strain measurement, strain gauge needs to be fixed to test block surface by modes such as stickups, to cause test
The deformation that part stress is produced can be delivered to thereon.When there is temperature change, strain gauge produces uniform strain along surrounding, sensitive
Grid R1~R4 equal proportions are deformed upon, and formula (1) is set up so electric bridge keeps balance；When strain gauge occurs along arrow A directions
During strain, sensitive grid R1 and R3 resistance increase, and sensitive grid R2 and R4 resistance value reduce, formula (1) is no longer set up so electric
Bridge not releveling, now element 12 will detect voltage output signal corresponding with strain facies, it is defeated and in certain range of strain
Go out signal amplitude and be proportional to input dependent variable.It can thus be seen that by using single chip integrated full-bridge sensitive structure, this practicality
The strain gauge of new proposition can be on the basis of temperature effect be significantly inhibited, the accurately strain on measurement test block.
Fig. 3 is a kind of circular temperature self-compensation type strain gauge, and four size identical sensitive grid R1~R4 are in fan-shaped equal
It is even to be distributed on strain gauge substrate 1.Sensitive grid R2 and R4 are used to detect circumferential strain, and sensitive grid R1 and R3 resistance value become
Change strain with radial direction and its shape and present position is relevant on the base 1.The strain gauge of this type can be used for detection to apply
Pressure thereon.
Compared to Figure 1, main change is that sensitive structure is made up of two layers of sensitive grid to Fig. 4.Sensitive grid R1 and R4 is direct
It is placed on strain gauge substrate 1, and sensitive grid R2 and R3 are placed on sensitive grid R1 and R4, between two layers of sensitive grid by one layer absolutely
Edge layer 2 is separated.Insulating barrier 2 possesses good electrical insulation performance and very thin thickness.Sensitive grid R1~R4 sizes are identical and by phase
Same material is made.Two layers of sensitive grid can be spatially superimposed completely, to ensure mutual temperature consistency, so that further
Reduction temperature effect caused by thermograde.
Strain gauge shown in Fig. 5 is superimposed upon in strain gauge substrate 1 by four layers of sensitive grid R1~R4 and constituted, between each layer sensitive grid
Separated by insulating barrier 3~5.Compared with strain gauge structure shown in Fig. 1 and Fig. 4, the temperature difference between sensitive grid R1~R4 further subtracts
It is small, therefore possess more preferable effect temperature compensation.
The utility model proposes the effect temperature compensation of strain gauge will not be by test block and strain gauge in itself hot swollen
Swollen performance difference influence.The thermal expansion of test block and strain gauge causes strain gauge to produce uniform deformation along its plane, this
Electric bridge is still balanced in the case of homogeneous deformation.
Therefore the utility model proposes strain gauge also can compensation be hot swollen because of each material automatically by the structure of itself
Temperature effect caused by swollen difference of coefficients.In addition, compared to the strain gauge of other forms, the temperature on any one sensitive grid becomes
Change needs to be delivered to test block by connecting material to be delivered in other collocation structures or compensation circuit again, the utility model proposes
Sensitive grid R1~R4 be that the performance change of element caused by entirety, temperature change can obtain the rapid benefit of itself electric bridge
Repay, due to good heat-conductive characteristic and very short Heat transmission distance, this compensation process can be very fast.
Sensitive grid structure described herein is only a kind of embodiment, actually has many kinds of sensitive grid structures to realize this reality
With the temperature self-compensation function in new, it is every according to the utility model technical spirit above example is made it is any simple
Modification, change and equivalent structure change, still fall within protection domain of the present utility model.
Claims (8)
1. a kind of self-temperature compensating gage, it is characterised in that：Including four electrodes being orthogonally set in substrate and substrate
With four sensitive grids, described four sensitive grids are by four sizes are identical, thickness is uniform and isotropic sensitive grid foil structure
Into；Four described sensitive grids are interconnected to constitute two adjacent sensitive grid in Wheatstone electric bridges, electric bridge and constitute electricity all the way
Circulation road, four sensitive grids are interconnected to constitute four road current channels；Four described road current channels connect with four electrodes respectively
Connect.
2. self-temperature compensating gage as claimed in claim 1, it is characterised in that：Four described sensitive grids are pros
Shape, and it is connected with each other composition square shape.
3. self-temperature compensating gage as claimed in claim 1, it is characterised in that：Four described sensitive grids are sector,
And it is connected with each other the circular shape of composition.
4. self-temperature compensating gage as claimed in claim 1, it is characterised in that：Described electrode and sensitive grid passes through viscous
Patch, sputtering, deposition, ion implanting or the mode of diffusion are arranged in described substrate.
5. a kind of self-temperature compensating gage, it is characterised in that：Including two layers of the sensitive grid set in substrate and substrate, every layer quick
Sense grid contain to be separated between two sensitive resistances, two layers of sensitive grid by a layer insulating；The size phase of four described sensitive resistances
It is made up together and of identical sensitive grid foil；Two layers described of sensitive grid, which interlocks 90 °, to be superimposed, and can spatially be weighed completely
Close.
6. a kind of self-temperature compensating gage, it is characterised in that：Including the four layers of sensitive grid set in substrate and substrate, every layer quick
Sense grid contain to be separated between a sensitive resistance, every two layers of sensitive grid by a layer insulating；The chi of four described sensitive resistances
It is very little identical and be made up of identical sensitive grid foil；Four layers of described sensitive grid, which interlock 90 °, to be superimposed, and spatially can be complete
Full weight is closed.
7. a kind of self-temperature compensating gage as described in any in claim 1 to 6, it is characterised in that：Described sensitive grid
Foil is metal strain electric resistance alloy.
8. a kind of self-temperature compensating gage as described in any in claim 1 to 6, it is characterised in that：Described sensitive grid
Foil is semi-conducting material or metal oxide.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201621482394.XU CN206531462U (en) | 2016-12-30 | 2016-12-30 | A kind of self-temperature compensating gage |
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| CN201621482394.XU CN206531462U (en) | 2016-12-30 | 2016-12-30 | A kind of self-temperature compensating gage |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108267076A (en) * | 2016-12-30 | 2018-07-10 | 中国空气动力研究与发展中心超高速空气动力研究所 | A kind of self-temperature compensating gage |
| CN108917587A (en) * | 2018-05-17 | 2018-11-30 | 大连理工大学 | A kind of resistance-strain type curvature sensor based on favour stone full-bridge principle |
| CN110895130A (en) * | 2019-12-28 | 2020-03-20 | 中航电测仪器股份有限公司 | Diaphragm type strain gauge and optimization method thereof |
| CN113324729A (en) * | 2021-07-08 | 2021-08-31 | 中国空气动力研究与发展中心高速空气动力研究所 | Physical compensation method for temperature drift of wind tunnel balance |
-
2016
- 2016-12-30 CN CN201621482394.XU patent/CN206531462U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108267076A (en) * | 2016-12-30 | 2018-07-10 | 中国空气动力研究与发展中心超高速空气动力研究所 | A kind of self-temperature compensating gage |
| CN108917587A (en) * | 2018-05-17 | 2018-11-30 | 大连理工大学 | A kind of resistance-strain type curvature sensor based on favour stone full-bridge principle |
| CN110895130A (en) * | 2019-12-28 | 2020-03-20 | 中航电测仪器股份有限公司 | Diaphragm type strain gauge and optimization method thereof |
| CN110895130B (en) * | 2019-12-28 | 2021-07-20 | 中航电测仪器股份有限公司 | Diaphragm type strain gauge and optimization method thereof |
| CN113324729A (en) * | 2021-07-08 | 2021-08-31 | 中国空气动力研究与发展中心高速空气动力研究所 | Physical compensation method for temperature drift of wind tunnel balance |
| CN113324729B (en) * | 2021-07-08 | 2022-10-21 | 中国空气动力研究与发展中心高速空气动力研究所 | Physical compensation method for temperature drift of wind tunnel balance |
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