CN106643463A - Flexible full-bridge resistance strain sheet - Google Patents
Flexible full-bridge resistance strain sheet Download PDFInfo
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- CN106643463A CN106643463A CN201611176264.8A CN201611176264A CN106643463A CN 106643463 A CN106643463 A CN 106643463A CN 201611176264 A CN201611176264 A CN 201611176264A CN 106643463 A CN106643463 A CN 106643463A
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- sensing unit
- electrode
- strain sensing
- resistance
- strain
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
Abstract
The present invention belongs to the resistance strain sheet correlation technology field, and discloses a flexible full-bridge resistance strain sheet. The flexible full-bridge resistance strain sheet comprises a flexible substrate, a resistance strain sensing unit, a middle insulation layer and a covering layer. The resistance strain sensing unit comprises a first resistance strain sensing unit, a second resistance strain sensing unit, a third resistance strain sensing unit and a fourth resistance strain sensing unit which form a Wheatstone full-bridge circuit. The third resistance strain sensing unit and the fourth resistance strain sensing unit are both pasted on the flexible substrate, the middle insulation layer covers the third resistance strain sensing unit and the fourth resistance strain sensing unit; the first resistance strain sensing unit and the second resistance strain sensing unit are pasted on the middle insulation layer; and the covering layer covers the first resistance strain sensing unit and the second resistance strain sensing unit.
Description
Technical field
The invention belongs to foil gauge manufacture correlative technology field, more particularly, to a kind of flexible full-bridge type resistance-strain
Piece.
Background technology
Resistance strain gage, as a kind of high-acruracy survey element, is to measure component using deforming together with tested component
Logarithmic strain.Under different operating modes, the measuring method of resistance strain gage is different.For the tested component of regular geometry,
Four single resistance strain gages are typically symmetrically pasted onto two-by-two traditional measurement method the upper and lower surface composition of tested component
Favour stone full-bridge circuit is measured, and using the method resistance strain gage temperature-compensating can be realized, while making output voltage
Sensitivity is maximum.However, the method needs to paste four resistance strain gages, this will bring great error to measurement result, together
When also increase human cost, reduce the efficiency of measurement.When tested component geometry is irregular, traditional foil gauge cannot
Effective favour stone full-bridge circuit is formed on tested component, single strain gage testing, but single arm measurement can only be adopted to deposit
In temperature drift errors, it will cause measurement structure inaccurate, and affect the sensitivity of output voltage.
In addition, in some special operation conditions, it usually needs the curved surface or structure larger to some Curvature varyings is more multiple
Miscellaneous thin-wall member is measured, when these parts deform, not only elongation strain also bending strain simultaneously, and it is current
Strain gage testing scope on sale on the market is too little and is not suitable for by the situation of strain measurement caused by Curvature varying, it is impossible to
Meet industrial requirement.For the problems referred to above, relevant technical staff in the field has done some researchs, such as patent
CN104142118 is described on a flexible substrate with the carbon nanotube thin film of CNT (CNT) fibre structure as sensitive grid so that
Resistance strain gage can detect the strain more than 80%；And for example patent CN104880206 is described using rubber as flexible base
Bottom, the metallic film with micron or nano gap as sensitive grid, the electricity of the strain for being prepared for that maximum 200% can be measured
Resistance foil gauge.The above two patent, as base material, can make foil gauge have certain extension all using flexible material
Property, it is suitable for the situation of big elongation strain, but due to containing micron or nano gap in the structure of sensitive grid, when foil gauge quilt
During bending, the stability and reliability of foil gauge do not know, and affect the accuracy of measurement, nor being adapted to Curvature varying causes
Curved surface strain.Correspondingly, this area has a kind of resistance strain gage that can be applied to curved surface strain measurement of development.
The content of the invention
For the disadvantages described above or Improvement requirement of prior art, the invention provides a kind of flexible full-bridge type resistance-strain
Piece, it is based on the work characteristics of resistance strain gage, for the connection between the structure and part of flexible full-bridge type resistance strain gage
Relation is designed.The flexible full-bridge type resistance strain gage construction itself has favour stone full-bridge circuit, has both realized strain
Piece temperature-compensating, in turn ensure that the sensitivity of output voltage, while reducing cost, improve measurement efficiency.Additionally, middle exhausted
The region of edge layer correspondence first resistor strain sensing unit and second resistance strain sensing unit is respectively formed with boss so that institute
When stating flexible full-bridge type resistance strain gage and only being strained by planar stretch, it is also possible to ensure that the flexible full-bridge type resistance strain gage is complete
Bridge is exported.
For achieving the above object, the invention provides a kind of flexible full-bridge type resistance strain gage, it includes flexible substrates, electricity
Resistance strain sensing unit, intermediate insulating layer and coating, it is characterised in that：
The resistance-strain sensing unit includes first resistor strain sensing unit and the first resistor strain sensing list
The 3rd resistor that first spaced second resistance strain sensing unit and the second resistance strain sensing unit interval are arranged
Strain sensing unit and the 4th resistance-strain sensing unit arranged with the 3rd resistor strain sensing unit interval；
The 3rd resistor strain sensing unit and the 4th resistance-strain sensing unit are attached to the flexible base
On bottom；The intermediate insulating layer is arranged in the flexible substrates and covers the 3rd resistor strain sensing unit and described
Four resistance-strain sensing units；The first resistor strain sensing unit and the second resistance strain sensing unit are attached to institute
State on intermediate insulating layer；The coating is arranged on the intermediate insulating layer and covers the first resistor strain sensing unit
And the second resistance strain sensing unit；The first resistor strain sensing unit, the second resistance strain sensing unit,
The 3rd resistor strain sensing unit and the 4th resistance-strain sensing unit constitute favour stone full-bridge circuit.
Further, the grid of the resistance-strain unit is self-similar structure.
Further, the grid is foil piece.
Further, the electrode include first electrode, second electrode, the 3rd electrode, the 4th electrode, the 5th electrode, the
Six electrodes, the 7th electrode and the 8th electrode, the first electrode and the second electrode are connected to the first resistor should
Become the two ends of sensing unit；3rd electrode and the 4th electrode are connected to the second resistance strain sensing unit
Two ends；5th electrode and the 6th electrode are connected to the two ends of the 3rd resistor strain sensing unit；Institute
State the 7th electrode and the 8th electrode is connected to the two ends of the 4th resistance-strain sensing unit.
Further, the intermediate insulating layer offers spaced first through hole, the second through hole, third through-hole and
Four through holes, the first electrode and the 8th electrode are connected by the first through hole, the second electrode and the described 6th
Electrode is connected by second through hole, and the 3rd electrode and the 7th electrode are connected by the third through-hole, described
4th electrode and the 5th electrode are connected by the fourth hole.
Further, the intermediate insulating layer correspondence first resistor strain sensing unit and second resistance strain
The region of sensing unit is respectively formed with boss, i.e., described first resistor strain sensing unit and the second resistance strain sensing
Unit is separately positioned on the boss.
Further, the form and dimension of two boss is identical；The boss is along perpendicular to the flexible substrates
Direction has predetermined altitude.
In general, by the contemplated above technical scheme of the present invention compared with prior art, it is soft that the present invention is provided
Property full-bridge type resistance strain gage, its own is configured with favour stone full-bridge circuit, has both realized foil gauge temperature-compensating, in turn ensure that
The sensitivity of output voltage, while reducing cost, improves measurement efficiency.Additionally, intermediate insulating layer correspondence first resistor should
The region for becoming sensing unit and second resistance strain sensing unit is respectively formed with boss so that the flexible full-bridge type resistance should
When change piece is only strained by planar stretch, it is also possible to ensure the flexible full-bridge type resistance strain gage full-bridge output.
Description of the drawings
Fig. 1 is the structural representation of the flexible full-bridge type resistance strain gage that first embodiment of the invention is provided.
Fig. 2 is sectional view of the flexible full-bridge type resistance strain gage in Fig. 1 along A-A directions.
Fig. 3 is the favour stone full-bridge that the resistance-strain sensing unit of the flexible full-bridge type resistance strain gage in Fig. 1 is connected into
The schematic diagram of circuit.
Fig. 4 is the schematic diagram of the grid of the resistance-strain sensing unit of the flexible full-bridge type resistance strain gage in Fig. 1.
Fig. 5 is use state schematic diagram when the flexible full-bridge type resistance strain gage in Fig. 1 acts on the first measured piece.
Fig. 6 is view when the flexible full-bridge type resistance strain gage in Fig. 5 is strained.
Fig. 7 is use state schematic diagram when the flexible full-bridge type resistance strain gage in Fig. 1 acts on the second measured piece.
Fig. 8 is the structural representation of the flexible full-bridge type resistance strain gage that second embodiment of the invention is provided.
Fig. 9 is sectional view of the flexible full-bridge type resistance strain gage in Fig. 8 along B-B directions.
In all of the figs, identical reference be used for represent identical element or structure, wherein：1- first electrodes,
2- first resistor strain sensing units, 3- second electrodes, the electrodes of 4- the 3rd, 5- second resistance strain sensing units, 6- the 4th is electric
Pole, 7- coatings, 8- intermediate insulating layers, 9- flexible substrates, the electrodes of 10- the 5th, 11- 3rd resistor strain sensing units, 12-
Six electrodes, the electrodes of 13- the 7th, the resistance-strain sensing units of 14- the 4th, the electrodes of 15- the 8th, 16- flexibility full-bridge type resistance-strains
Piece, the measured pieces of 17- first, the measured pieces of 18- second.
Specific embodiment
In order that the objects, technical solutions and advantages of the present invention become more apparent, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that specific embodiment described herein is only to explain the present invention, and
It is not used in the restriction present invention.As long as additionally, technical characteristic involved in invention described below each embodiment
Not constituting conflict each other just can be mutually combined.
Refer to Fig. 1, Fig. 2 and Fig. 5, the flexible full-bridge type resistance strain gage 16 that first embodiment of the invention is provided, institute
Flexible full-bridge type resistance strain gage 16 is stated for full bridge structure.The flexible full-bridge type resistance strain gage 16 is not only suitable for measurement stretching
Strain, is also suitable for measuring bending strain.
The flexible full-bridge type resistance strain gage 16 includes flexible substrates 9, resistance-strain sensing unit, electrode, centre absolutely
Edge layer 8 and coating 7.The intermediate insulating layer 8 is located between the flexible substrates 9 and the coating 7.
The resistance-strain sensing unit includes first resistor strain sensing unit 2 and the first resistor strain sensing
The spaced second resistance strain sensing unit 5 of unit 2 and the second resistance strain sensing unit 5 be oppositely arranged
Three resistance-strain sensing units 11 and with spaced 4th resistance-strain of the 3rd resistor strain sensing unit 11 sensing
Unit 14, the first resistor strain sensing unit 2, the second resistance strain sensing unit 5,3rd resistor strain are passed
Connection between sense unit 11 and the 4th resistance-strain sensing unit 14 forms favour stone full-bridge circuit.
Fig. 3 and Fig. 4 is referred to, in present embodiment, the grid of the resistance-strain sensing unit is foil piece, the grid
Extremely self-similar structure, when resistance-strain sensing unit stretch or bend there is large deformation when, the grid also can be extended,
The stability of the resistance-strain sensing unit will not be so destroyed, is conducive to the big strain measurement of curved-surface structure.
The electrode includes that first electrode 1, second electrode 3, the 3rd electrode 4, the 4th electrode 6, the 5th electrode the 10, the 6th are electric
It is electric that pole 12, the 7th electrode 13 and the 8th electrode 15, the first electrode 1 and the second electrode 3 are connected to described first
The two ends of resistance strain sensing unit.3rd electrode 4 and the 4th electrode 6 are connected to the second resistance strain and pass
The two ends of sense unit 5, the 5th electrode 10 and the 6th electrode 12 are connected to the 3rd resistor strain sensing list
The two ends of unit 11, the 7th electrode 13 and the 8th electrode 15 are connected to the 4th resistance-strain sensing unit 14
Two ends.
The 3rd resistor strain sensing unit 11, the 5th electrode for being connected to the 3rd resistor strain sensing unit 11
10 and the 6th electrode 12, the 4th resistance-strain sensing unit 14 and it is connected to the 4th resistance-strain sensing unit 14
7th electrode 13 and the 8th electrode 15 are arranged in the flexible substrates 9, wherein the 3rd resistor strain sensing unit 11
And the 4th resistance-strain sensing unit 14 is attached to respectively in the flexible substrates 9.
The intermediate insulating layer 8 covers the 3rd resistor strain sensing unit 11, the 4th resistance-strain sensing unit 14
And the flexible substrates 9 towards the coating 7 surface not by the 3rd resistor strain sensing unit 11 and the described 4th
The region that resistance-strain sensing unit 14 is covered.In present embodiment, between the flexible substrates 9 and the intermediate insulating layer 8
The shape and area on relative surface is identical；The 3rd resistor strain sensing unit 11 and the 4th resistance-strain sensing are single
Unit 14 is embedded in the intermediate insulating layer 8.
The first resistor strain sensing unit 2, it is connected to the described first electric of the first resistor strain sensing unit 2
Pole 1 and the second electrode 3, the second resistance strain sensing unit 5 and it is connected to the second resistance strain sensing list
3rd electrode 4 and the 4th electrode 6 of unit 5 is arranged at a surface of the intermediate insulating layer 8 away from the flexible substrates 9
On, wherein the first resistor strain sensing unit 2 and the second resistance strain sensing unit 5 to be attached to the centre exhausted
In edge layer 8.
The coating 7 covers institute first resistor strain sensing unit 2 and the second resistance strain sensing unit 5, with
Sealing protection is carried out to the first resistor strain sensing unit 2 and the second resistance strain sensing unit 5.
In present embodiment, the intermediate insulating layer 8 offers spaced first through hole, the second through hole, threeway
Hole and fourth hole, the first electrode 1 and the 8th electrode 15 are connected by the first through hole, the second electrode 3
And the 6th electrode 12 is connected by second through hole, the 3rd electrode 4 and the 7th electrode 13 are by described the
Three through holes are connected, and the 4th electrode 6 and the 5th electrode 10 are connected by the fourth hole.During measurement, described second
Electrode 3 and the 3rd electrode 4 are by lead and external input voltage U1It is connected, the first electrode 1 and the 4th electrode 6
By lead and outside output voltage U0It is connected.
Fig. 6 is referred to, the flexible full-bridge type resistance strain gage 16 is pasted onto on first measured piece 17, described first
Measured piece 17 is aircraft wing, and the surface of aircraft wing belongs to complex-curved.When first measured piece 17 bends strain
When, the flexible full-bridge type resistance strain gage 16 also can be deformed upon therewith, and corresponding resistance value changes, so as to measure
State the strained situation of the first measured piece 17.
When first measured piece 17 deforms, the first resistor strain sensing unit 2 (R1) and described second electric
Resistance strain sensing unit 5 (R2) will be pressurized, and the 3rd resistor strain sensing unit 11 (R3) and the 4th resistance-strain are passed
By tension, but the resistance change amount of four resistance-strain sensing units is identical for sense unit 14 (R4), so when output voltage be
Full-bridge output voltage, four when voltage sensibility is exported for single armed times.Hereinafter the full-bridge for theoretically explaining present embodiment is surveyed
Amount：
When the flexible full-bridge type resistance strain gage 16 is strained：
Due to R1=R2=R3=R4=R, so when UO=0, electric bridge keeps balance.
When the flexible full-bridge type resistance strain gage 16 is strained：
Due to the initial resistivity value of four resistance-strain sensing units it is identical, and change resistance value it is identical, i.e. R1=R2
=R3=R4=R and Δ R1=Δ R, so formula (2) can be with abbreviation：
The flexible full-bridge type resistance strain gage 16 is can be seen that when measurement of curved surface is carried out, protect all the time from formula (3) formula
Hold full-bridge output, four when output voltage sensitivity is exported for single armed times.In present embodiment, full-bridge circuit is configured in described soft
On property full-bridge type resistance strain gage 16, foil gauge temperature-compensating can be realized, it is to avoid temperature drift error during single arm measurement.
Fig. 7 is referred to, the flexible full-bridge type resistance strain gage 16 is arranged on the second measured piece 18, and described second is tested
Part 18 is artificial blood vessel, and artificial blood vessel is a kind of extremely complex curved-surface structure, and caliber changes greatly, is not medically closed at present
Suitable detection method detects its working condition, but artificial blood vessel has a characteristic, and with blood vessel aging, it can relax and cause surface
Curvature changes.Therefore the described flexible full-bridge type resistance strain gage 16 that present embodiment can be utilized is adapted to check that curved surface should
The characteristic of change is checking.The flexible full-bridge type resistance strain gage 16 by measuring artificial blood vessel surface strain caused by curvature become
Change to detect whether blood vessel can work on.
Refer to Fig. 8 and Fig. 9, the flexible full-bridge type resistance strain gage that second embodiment of the invention is provided and the present invention the
The flexible full-bridge type resistance strain gage 16 that one embodiment is provided is essentially identical, and difference is the correspondence of the intermediate insulating layer 8
The region of the first resistor strain sensing unit 2 and the second resistance strain sensing unit 5 is respectively arranged with boss, i.e. institute
State first resistor strain sensing unit 2 and the second resistance strain sensing unit 5 is separately positioned on the boss, two institutes
State the shape of boss and equivalently-sized.The boss protrudes from surface of the intermediate insulating layer away from the flexible substrates 9, its
With edge perpendicular to the direction of the flexible substrates 9 predetermined altitude.The flexible full-bridge type that second embodiment of the invention is provided
What resistance strain gage was adapted to strain when only being strained by planar stretch measures, when the flexible full-bridge type resistance strain gage is pasted onto table
Presence and the material of the intermediate insulating layer 8 on the smooth tested exemplar in face and when being stretched strain, due to the boss
The property of material, the first resistor strain sensing unit 2 and the second resistance strain sensing unit 5 on two boss
Will be pressurized to middle shrinkage, the 3rd resistor strain sensing unit 11 and the 4th resistance-strain sensing unit 14 will be received
Draw, when the timing of height one of the boss, the variable quantity of the resistance value of four resistance-strain sensing units is identical, so when export
Voltage be full-bridge output voltage, four when voltage sensibility is exported for single armed times.
In present embodiment, the thickness of the flexible full-bridge type resistance strain gage is 35 microns；The flexible substrates 9
It is by made by flexible material PDMS；The flexible full-bridge type resistance strain gage is made by spin-coated, photoetching and evaporation process.
The flexible full-bridge type resistance strain gage that the present invention is provided, its own is configured with favour stone full-bridge circuit, both realized
Foil gauge temperature-compensating, in turn ensure that the sensitivity of output voltage, while reducing cost, improve measurement efficiency.Additionally, in
Between insulating barrier correspondence first resistor strain sensing unit and the region of second resistance strain sensing unit be respectively formed with boss, make
Flexible full-bridge type resistance strain gage when only being strained by planar stretch, it is also possible to ensure the flexible full-bridge type resistance-strain
Piece full-bridge is exported.
As it will be easily appreciated by one skilled in the art that the foregoing is only presently preferred embodiments of the present invention, not to
The present invention, all any modification, equivalent and improvement made within the spirit and principles in the present invention etc. are limited, all should be included
Within protection scope of the present invention.
Claims (7)
1. a kind of flexible full-bridge type resistance strain gage, it includes flexible substrates (9), resistance-strain sensing unit, intermediate insulating layer
And coating (7) (8), it is characterised in that：
The resistance-strain sensing unit includes first resistor strain sensing unit (2) and the first resistor strain sensing list
First (2) spaced second resistance strain sensing unit (5) and the second resistance strain sensing unit (5) interval setting
3rd resistor strain sensing unit (11) and with spaced 4th resistance of the 3rd resistor strain sensing unit (11)
Strain sensing unit (14)；
The 3rd resistor strain sensing unit (11) and the 4th resistance-strain sensing unit (14) are attached to described soft
In property substrate (9)；The intermediate insulating layer (8) is arranged in the flexible substrates (9) and covers the 3rd resistor strain and passes
Sense unit (11) and the 4th resistance-strain sensing unit (14)；The first resistor strain sensing unit (2) and described
Two resistance-strain sensing units (5) are attached on the intermediate insulating layer (8)；It is exhausted that the coating (7) is arranged on the centre
In edge layer (8) and cover the first resistor strain sensing unit (2) and the second resistance strain sensing unit (5)；It is described
First resistor strain sensing unit (2), the second resistance strain sensing unit (5), the 3rd resistor strain sensing unit
(11) and the 4th resistance-strain sensing unit (14) constitute favour stone full-bridge circuit.
2. flexibility full-bridge type resistance strain gage as claimed in claim 1, it is characterised in that：The grid of the resistance-strain unit
For self-similar structure.
3. flexibility full-bridge type resistance strain gage as claimed in claim 2, it is characterised in that：The grid is foil piece.
4. flexibility full-bridge type resistance strain gage as claimed in claim 1, it is characterised in that：The electrode includes first electrode
(1), second electrode (3), the 3rd electrode (4), the 4th electrode (6), the 5th electrode (10), the 6th electrode (12), the 7th electrode
(13) and the 8th electrode (15), the first electrode (1) and the second electrode (3) are connected to the first resistor strain
The two ends of sensing unit (2)；3rd electrode (4) and the 4th electrode (6) are connected to the second resistance strain
The two ends of sensing unit (5)；5th electrode (10) and the 6th electrode (12) are connected to the 3rd resistor should
Become the two ends of sensing unit (11)；7th electrode (13) and the 8th electrode (15) are connected to the 4th resistance
The two ends of strain sensing unit (14).
5. flexibility full-bridge type resistance strain gage as claimed in claim 4, it is characterised in that：The intermediate insulating layer (8) opens up
There are spaced first through hole, the second through hole, third through-hole and a fourth hole, the first electrode (1) and described 8th electric
Pole (15) is connected by the first through hole, and the second electrode (3) and the 6th electrode (12) are by second through hole
Be connected, the 3rd electrode (4) and the 7th electrode (13) are connected by the third through-hole, the 4th electrode (6) and
5th electrode (10) is connected by the fourth hole.
6. the flexible full-bridge type resistance strain gage as described in any one of claim 1-5, it is characterised in that：The intermediate insulating layer
(8) region of the correspondence first resistor strain sensing unit (2) and the second resistance strain sensing unit (5) is formed respectively
There is boss, i.e., described first resistor strain sensing unit (2) and the second resistance strain sensing unit (5) are separately positioned on institute
State on boss.
7. flexibility full-bridge type resistance strain gage as claimed in claim 6, it is characterised in that：The shape of two boss and big
It is little identical；The boss edge has predetermined altitude perpendicular to the direction of the flexible substrates (9).
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| CN108709490A (en) * | 2018-06-27 | 2018-10-26 | 常州二维碳素科技股份有限公司 | Strain gauge transducer and the method and measurement device for utilizing its acquisition highly sensitive |
| CN108917587A (en) * | 2018-05-17 | 2018-11-30 | 大连理工大学 | A kind of resistance-strain type curvature sensor based on favour stone full-bridge principle |
| CN109341514A (en) * | 2018-12-11 | 2019-02-15 | 中国地质大学（武汉） | A kind of Novel resistor foil gauge and strain measurement method |
| CN109883315A (en) * | 2019-03-22 | 2019-06-14 | 中国科学院力学研究所 | A kind of two-sided resistance strain and strain measurement method |
| CN109883316A (en) * | 2019-03-22 | 2019-06-14 | 中国科学院力学研究所 | A kind of resistance strain and strain measurement method |
| CN110455647A (en) * | 2019-09-09 | 2019-11-15 | 招商局重庆交通科研设计院有限公司 | Shear strain amplifying device |
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