CN106643463B - A kind of flexibility full-bridge type resistance strain gage - Google Patents
A kind of flexibility full-bridge type resistance strain gage Download PDFInfo
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- CN106643463B CN106643463B CN201611176264.8A CN201611176264A CN106643463B CN 106643463 B CN106643463 B CN 106643463B CN 201611176264 A CN201611176264 A CN 201611176264A CN 106643463 B CN106643463 B CN 106643463B
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- sensing unit
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
Abstract
The invention belongs to foil gauge correlative technology fields, and it discloses a kind of flexible full-bridge type resistance strain gage, the flexibility full-bridge type resistance strain gage includes flexible substrates, resistance-strain sensing unit, intermediate insulating layer and coating.The resistance-strain sensing unit include constitute the first resistor strain sensing unit of favour stone full-bridge circuit, second resistance strain sensing unit, 3rd resistor strain sensing unit and with the 4th resistance-strain sensing unit.The 3rd resistor strain sensing unit and the 4th resistance-strain sensing unit are attached in the flexible substrates；The intermediate insulating layer covers the 3rd resistor strain sensing unit and the 4th resistance-strain sensing unit；The first resistor strain sensing unit and the second resistance strain sensing unit are attached on the intermediate insulating layer；The coating covers the first resistor strain sensing unit and the second resistance strain sensing unit.
Description
Technical field
The invention belongs to foil gauges to manufacture correlative technology field, more particularly, to a kind of flexible full-bridge type resistance-strain
Piece.
Background technique
Resistance strain gage is to measure component using deforming together with tested component as a kind of high-acruracy survey element
Logarithmic strain.Under different operating conditions, the measurement method of resistance strain gage is different.For the tested component of regular geometry,
Traditional measurement method is usually the upper and lower surface composition that four individual resistance strain gages are symmetrically pasted onto tested component two-by-two
Favour stone full-bridge circuit measures, and can be realized resistance strain gage temperature-compensating using this method, while making output voltage
Sensitivity is maximum.However, the method needs to paste four resistance strain gages, this will bring great error to measurement result, together
When also increase human cost, reduce the efficiency of measurement.When tested component geometry is irregular, traditional foil gauge can not
Effective favour stone full-bridge circuit is formed on tested component, single strain gage testing can only be used, but single arm measurement is deposited
In temperature drift errors, it will cause measurement structure inaccurate, and influence the sensitivity of output voltage.
In addition, in some special operation conditions, it usually needs more multiple to the biggish curved surface of some Curvature varyings or structure
Miscellaneous thin-wall member measures, and when these parts deform, not only there is elongation strain also bending strain simultaneously, and current
Strain gage testing range on sale is too small on the market and the situation of the unsuitable strain measurement as caused by Curvature varying, can not
Meet industrial requirement.In view of the above-mentioned problems, relevant technical staff in the field has done some researchs, such as patent
CN104142118 is described uses the carbon nanotube thin film of carbon nanotube (CNT) fibre structure as sensitive grid on a flexible substrate, so that
Resistance strain gage is able to detect the strain greater than 80%；For another example patent CN104880206 is described using rubber as flexible base
Bottom, the metallic film with micron or nano gap as sensitive grid are prepared for that the electricity of the strain of maximum 200% can be measured
Hinder foil gauge.Two patents described above all use flexible material as base material, and foil gauge can be made to have certain extend
Property, it is suitable for the situation of big elongation strain, but due to containing micron or nano gap in the structure of sensitive grid, when foil gauge quilt
When bending, the stability and reliability of foil gauge are uncertain, influence the accuracy of measurement, nor Curvature varying is suitble to cause
Curved surface strain.Correspondingly, there is develop a kind of resistance strain gage that can be suitable for curved surface strain measurement for this field.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provides a kind of flexible full-bridge type resistance-strains
Piece, the work characteristics based on resistance strain gage, for the connection between the structure and component of flexible full-bridge type resistance strain gage
Relationship is designed.The flexibility full-bridge type resistance strain gage self construction has favour stone full-bridge circuit, has both realized strain
Piece temperature-compensating in turn ensures the sensitivity of output voltage, reduces costs simultaneously, improves measurement efficiency.In addition, intermediate exhausted
Edge layer corresponds to first resistor strain sensing unit and the region of second resistance strain sensing unit is respectively formed with boss, so that institute
When stating flexible full-bridge type resistance strain gage and only being strained by planar stretch, it can also guarantee that the flexible full-bridge type resistance strain gage is complete
Bridge output.
To achieve the above object, the present invention provides a kind of flexible full-bridge type resistance strain gages comprising flexible substrates, electricity
Hinder strain sensing unit, intermediate insulating layer and coating, it is characterised in that:
The resistance-strain sensing unit includes first resistor strain sensing unit and the first resistor strain sensing list
The spaced second resistance strain sensing unit of member, the 3rd resistor with second resistance strain sensing unit interval setting
Strain sensing unit and the 4th resistance-strain sensing unit being arranged with the 3rd resistor strain sensing unit interval；
The 3rd resistor strain sensing unit and the 4th resistance-strain sensing unit are attached to the flexible base
On bottom；The intermediate insulating layer is arranged in the flexible substrates and the covering 3rd resistor strain sensing unit and described the
Four resistance-strain sensing units；The first resistor strain sensing unit and the second resistance strain sensing unit are attached to institute
It states on intermediate insulating layer；The coating is arranged on the intermediate insulating layer and the covering first resistor strain sensing unit
And the second resistance strain sensing unit；The first resistor strain sensing unit, the second resistance strain sensing unit,
The 3rd resistor strain sensing unit and the 4th resistance-strain sensing unit constitute favour stone full-bridge circuit.
Further, the grid of the resistance-strain unit is self-similar structure.
Further, the grid is foil piece.
Further, the electrode includes first electrode, second electrode, third electrode, the 4th electrode, the 5th electrode,
Six electrodes, the 7th electrode and the 8th electrode, the first electrode and the second electrode are connected to the first resistor and answer
Become the both ends of sensing unit；The third electrode and the 4th electrode are connected to the second resistance strain sensing unit
Both ends；5th electrode and the 6th electrode are connected to the both ends of the 3rd resistor strain sensing unit；Institute
It states the 7th electrode and the 8th electrode is connected to the both ends of the 4th resistance-strain sensing unit.
Further, the intermediate insulating layer offers spaced first through hole, the second through-hole, third through-hole and
Four through-holes, the first electrode and the 8th electrode are connected by the first through hole, the second electrode and the described 6th
Electrode is connected by second through-hole, and the third electrode and the 7th electrode are connected by the third through-hole, described
4th electrode and the 5th electrode are connected by the fourth hole.
Further, the intermediate insulating layer corresponds to the first resistor strain sensing unit and second resistance strain
The region of sensing unit is respectively formed with boss, i.e., the described first resistor strain sensing unit and the second resistance strain sensing
Unit is separately positioned on the boss.
Further, the form and dimension of two boss is identical；The boss is along perpendicular to the flexible substrates
Direction has predetermined altitude.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, it is provided by the invention soft
Property full-bridge type resistance strain gage, its own is configured with favour stone full-bridge circuit, has both realized foil gauge temperature-compensating, in turn ensures
The sensitivity of output voltage, reduces costs simultaneously, improves measurement efficiency.It is answered in addition, intermediate insulating layer corresponds to first resistor
The region for becoming sensing unit and second resistance strain sensing unit is respectively formed with boss, so that the flexibility full-bridge type resistance is answered
When change piece is only strained by planar stretch, it can also guarantee the flexible full-bridge type resistance strain gage full-bridge output.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the flexible full-bridge type resistance strain gage that first embodiment of the invention provides.
Fig. 2 is cross-sectional view of the flexible full-bridge type resistance strain gage in Fig. 1 along the direction A-A.
Fig. 3 is the favour stone full-bridge that the resistance-strain sensing unit of the flexible full-bridge type resistance strain gage in Fig. 1 is connected into
The schematic diagram of circuit.
Fig. 4 is the schematic diagram of the grid of the resistance-strain sensing unit of the flexible full-bridge type resistance strain gage in Fig. 1.
Fig. 5 is use state diagram when flexible full-bridge type resistance strain gage in Fig. 1 acts on the first measured piece.
Fig. 6 is status diagram when the flexible full-bridge type resistance strain gage in Fig. 5 strains.
Fig. 7 is use state diagram when flexible full-bridge type resistance strain gage in Fig. 1 acts on the second measured piece.
Fig. 8 is the structural schematic diagram for the flexible full-bridge type resistance strain gage that second embodiment of the invention provides.
Fig. 9 is cross-sectional view of the flexible full-bridge type resistance strain gage in Fig. 8 along the direction B-B.
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which: 1- first electrode,
2- first resistor strain sensing unit, 3- second electrode, 4- third electrode, 5- second resistance strain sensing unit, the 4th electricity of 6-
Pole, 7- coating, 8- intermediate insulating layer, 9- flexible substrates, the 5th electrode of 10-, 11- 3rd resistor strain sensing unit, 12-
Six electrodes, the 7th electrode of 13-, the 4th resistance-strain sensing unit of 14-, the 8th electrode of 15-, 16- flexibility full-bridge type resistance-strain
Piece, the first measured piece of 17-, the second measured piece of 18-.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
Referring to figure 1, figure 2 and figure 5., the flexible full-bridge type resistance strain gage 16 that first embodiment of the invention provides, institute
Stating flexible full-bridge type resistance strain gage 16 is full bridge structure.The flexibility full-bridge type resistance strain gage 16 is not only suitable for measurement and stretches
Strain is also suitable for measurement bending strain.
The flexibility full-bridge type resistance strain gage 16 is exhausted including flexible substrates 9, resistance-strain sensing unit, electrode, centre
Edge layer 8 and coating 7.The intermediate insulating layer 8 is between the flexible substrates 9 and the coating 7.
The resistance-strain sensing unit includes first resistor strain sensing unit 2 and the first resistor strain sensing
The spaced second resistance strain sensing unit 5 of unit 2, the be oppositely arranged with the second resistance strain sensing unit 5
Three resistance-strain sensing units 11 and with spaced 4th resistance-strain of the 3rd resistor strain sensing unit 11 sense
Unit 14, the first resistor strain sensing unit 2, the second resistance strain sensing unit 5,3rd resistor strain pass
Connection forms favour stone full-bridge circuit between sense unit 11 and the 4th resistance-strain sensing unit 14.
Please refer to Fig. 3 and Fig. 4, in present embodiment, the grid of the resistance-strain sensing unit is foil piece, the grid
Extremely self-similar structure, when resistance-strain sensing unit is stretched or is bent, and large deformation occurs, the grid can be also extended,
The stability that the resistance-strain sensing unit will not so be destroyed is conducive to the big strain measurement of curved-surface structure.
The electrode includes first electrode 1, second electrode 3, third electrode 4, the 4th electrode 6, the 10, the 6th electricity of the 5th electrode
Pole 12, the 7th electrode 13 and the 8th electrode 15, the first electrode 1 and the second electrode 3 are connected to first electricity
Hinder the both ends of strain sensing unit.The third electrode 4 and the 4th electrode 6 are connected to the second resistance strain and pass
Feel the both ends of unit 5, the 5th electrode 10 and the 6th electrode 12 are connected to the 3rd resistor strain sensing list
The both ends of member 11, the 7th electrode 13 and the 8th electrode 15 are connected to the 4th resistance-strain sensing unit 14
Both ends.
The 3rd resistor strain sensing unit 11, the 5th electrode for being connected to the 3rd resistor strain sensing unit 11
10 and the 6th electrode 12, the 4th resistance-strain sensing unit 14 and it is connected to the 4th resistance-strain sensing unit 14
7th electrode 13 and the 8th electrode 15 are arranged in the flexible substrates 9, wherein the 3rd resistor strain sensing unit 11
And the 4th resistance-strain sensing unit 14 is attached to respectively in the flexible substrates 9.
The intermediate insulating layer 8 covers the 3rd resistor strain sensing unit 11, the 4th resistance-strain sensing unit 14
And the flexible substrates 9 towards the surface of the coating 7 not by the 3rd resistor strain sensing unit 11 and the described 4th
The region that resistance-strain sensing unit 14 covers.In present embodiment, between the flexible substrates 9 and the intermediate insulating layer 8
The shape and area on opposite surface are identical；The 3rd resistor strain sensing unit 11 and the 4th resistance-strain sensing are single
Member 14 is embedded in the intermediate insulating layer 8.
The first resistor strain sensing unit 2, first electricity for being connected to the first resistor strain sensing unit 2
Pole 1 and the second electrode 3, the second resistance strain sensing unit 5 and it is connected to the second resistance strain sensing list
The third electrode 4 and the 4th electrode 6 of member 5 are arranged at a surface of the intermediate insulating layer 8 far from the flexible substrates 9
On, wherein to be attached to the centre exhausted for the first resistor strain sensing unit 2 and the second resistance strain sensing unit 5
In edge layer 8.
The coating 7 covers institute's first resistor strain sensing unit 2 and the second resistance strain sensing unit 5, with
Protection is sealed to the first resistor strain sensing unit 2 and the second resistance strain sensing unit 5.
In present embodiment, it is logical that the intermediate insulating layer 8 offers spaced first through hole, the second through-hole, third
Hole and fourth hole, the first electrode 1 and the 8th electrode 15 are connected by the first through hole, the second electrode 3
And the 6th electrode 12 is connected by second through-hole, the third electrode 4 and the 7th electrode 13 pass through described the
Three through-holes are connected, and the 4th electrode 6 and the 5th electrode 10 are connected by the fourth hole.When measurement, described second
Electrode 3 and the third electrode 4 pass through lead and external input voltage U1It is connected, the first electrode 1 and the 4th electrode 6
Pass through lead and external output voltage U0It is connected.
Referring to Fig. 6, the flexibility full-bridge type resistance strain gage 16 is pasted on first measured piece 17, described first
Measured piece 17 is aircraft wing, and the surface of aircraft wing belongs to complex-curved.When first measured piece 17 bends strain
When, the flexibility full-bridge type resistance strain gage 16 also can deformation occurs therewith, corresponding resistance value changes, to measure institute
State the strained situation of the first measured piece 17.
When first measured piece 17 deforms, the first resistor strain sensing unit 2 (R1) and second electricity
Hindering strain sensing unit 5 (R2) will be pressurized, and the 3rd resistor strain sensing unit 11 (R3) and the 4th resistance-strain pass
Feel unit 14 (R4) for tension, but the resistance change amount of four resistance-strain sensing units is identical, so when output voltage be
Full-bridge output voltage, voltage sensibility are four times when single armed exports.Theoretically explain that the full-bridge of present embodiment is surveyed below
Amount:
When the flexibility full-bridge type resistance strain gage 16 does not strain:
Due to R1=R2=R3=R4=R, so when UO=0, electric bridge keeps balance.
When the flexibility full-bridge type resistance strain gage 16 strains:
Since the initial resistivity value of four resistance-strain sensing units is identical, and the resistance value changed is identical, i.e. R1=R2
=R3=R4=R and Δ R1=Δ R, so formula (2) can be with abbreviation are as follows:
It can be seen that the flexible full-bridge type resistance strain gage 16 when carrying out measurement of curved surface from formula (3) formula, protect always
Full-bridge output is held, output voltage sensitivity is four times when single armed exports.In present embodiment, full-bridge circuit is configured in described soft
On property full-bridge type resistance strain gage 16, it can be realized foil gauge temperature-compensating, avoid temperature drift error when single arm measurement.
Referring to Fig. 7, the flexibility full-bridge type resistance strain gage 16 is arranged on the second measured piece 18, described second is tested
Part 18 is artificial blood vessel, and artificial blood vessel is a kind of extremely complex curved-surface structure, and caliber change is big, and medically there is no close at present
Suitable detection method detects its working condition, but artificial blood vessel has a characteristic, and with blood vessel aging, it, which can relax, leads to surface
Curvature changes.Therefore the flexible full-bridge type resistance strain gage 16 that can use present embodiment is suitble to check that curved surface is answered
The characteristic of change is examined.The flexibility full-bridge type resistance strain gage 16 is become by measuring curvature caused by artificial blood vessel surface strain
Change to detect whether blood vessel can work on.
Please refer to Fig. 8 and Fig. 9, the flexible full-bridge type resistance strain gage and the present invention that second embodiment of the invention provides the
The flexible full-bridge type resistance strain gage 16 that one embodiment provides is essentially identical, and difference is that the intermediate insulating layer 8 is corresponding
The region of the first resistor strain sensing unit 2 and the second resistance strain sensing unit 5 is respectively arranged with boss, i.e. institute
It states first resistor strain sensing unit 2 and the second resistance strain sensing unit 5 is separately positioned on the boss, two institutes
Shape and the size for stating boss are identical.The boss protrudes from surface of the intermediate insulating layer far from the flexible substrates 9,
With the predetermined altitude along the direction perpendicular to the flexible substrates 9.The flexible full-bridge type that second embodiment of the invention provides
Resistance strain gage is suitble to the measurement strained when only being strained by planar stretch, when the flexible full-bridge type resistance strain gage is pasted onto table
When on the smooth tested exemplar in face and being stretched strain, due to the presence of the boss and the material of the intermediate insulating layer 8
The property of material, the first resistor strain sensing unit 2 and the second resistance strain sensing unit 5 on two boss
It will be pressurized to middle shrinkage, the 3rd resistor strain sensing unit 11 and the 4th resistance-strain sensing unit 14 will be by
Draw, when the timing of height one of the boss, the variable quantity of the resistance value of four resistance-strain sensing units is identical, so when export
Voltage is full-bridge output voltage, and voltage sensibility is four times when single armed exports.
In present embodiment, the flexibility full-bridge type resistance strain gage with a thickness of 35 microns；The flexible substrates 9
It is made of flexible material PDMS；The flexibility full-bridge type resistance strain gage is made of spin-coated, photoetching and evaporation process.
Flexibility full-bridge type resistance strain gage provided by the invention, its own is configured with favour stone full-bridge circuit, both realized
Foil gauge temperature-compensating in turn ensures the sensitivity of output voltage, reduces costs simultaneously, improves measurement efficiency.In in addition,
Between insulating layer correspond to first resistor strain sensing unit and the region of second resistance strain sensing unit is respectively formed with boss, make
Flexible full-bridge type resistance strain gage when only being strained by planar stretch, can also guarantee the flexible full-bridge type resistance-strain
The output of piece full-bridge.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (6)
1. a kind of flexibility full-bridge type resistance strain gage comprising flexible substrates (9), resistance-strain sensing unit, intermediate insulating layer
(8) and coating (7), it is characterised in that:
The resistance-strain sensing unit includes first resistor strain sensing unit (2) and the first resistor strain sensing list
First (2) spaced second resistance strain sensing unit (5) is arranged with the second resistance strain sensing unit (5) interval
3rd resistor strain sensing unit (11) and with spaced 4th resistance of 3rd resistor strain sensing unit (11)
Strain sensing unit (14)；
The 3rd resistor strain sensing unit (11) and the 4th resistance-strain sensing unit (14) are attached to described soft
In property substrate (9)；The intermediate insulating layer (8) is arranged on the flexible substrates (9) and the covering 3rd resistor strain passes
Feel unit (11) and the 4th resistance-strain sensing unit (14)；The first resistor strain sensing unit (2) and described
Two resistance-strain sensing units (5) are attached on the intermediate insulating layer (8)；Coating (7) setting is exhausted in the centre
In edge layer (8) and cover the first resistor strain sensing unit (2) and the second resistance strain sensing unit (5)；It is described
First resistor strain sensing unit (2), the second resistance strain sensing unit (5), the 3rd resistor strain sensing unit
(11) and the 4th resistance-strain sensing unit (14) constitutes favour stone full-bridge circuit, i.e., the described flexible full-bridge type resistance-strain
Piece self construction has favour stone full-bridge circuit；
The corresponding first resistor strain sensing unit (2) of the intermediate insulating layer (8) and the second resistance strain sensing list
The region of first (5) is respectively formed with boss, i.e., the described first resistor strain sensing unit (2) and the second resistance strain sensing
Unit (5) is separately positioned on the boss.
2. flexibility full-bridge type resistance strain gage as described in claim 1, it is characterised in that: the grid of the resistance-strain unit
For self-similar structure.
3. flexibility full-bridge type resistance strain gage as claimed in claim 2, it is characterised in that: the grid is foil piece.
4. flexibility full-bridge type resistance strain gage as described in claim 1, it is characterised in that: the flexibility full-bridge type resistance-strain
Piece includes electrode, and the electrode includes first electrode (1), second electrode (3), third electrode (4), the 4th electrode (6), the 5th electricity
Pole (10), the 6th electrode (12), the 7th electrode (13) and the 8th electrode (15), the first electrode (1) and the second electrode
(3) both ends of the first resistor strain sensing unit (2) are connected to；The third electrode (4) and the 4th electrode
(6) both ends of the second resistance strain sensing unit (5) are connected to；5th electrode (10) and the 6th electrode
(12) both ends of the 3rd resistor strain sensing unit (11) are connected to；7th electrode (13) and the 8th electricity
Pole (15) is connected to the both ends of the 4th resistance-strain sensing unit (14).
5. flexibility full-bridge type resistance strain gage as claimed in claim 4, it is characterised in that: the intermediate insulating layer (8) opens up
There are spaced first through hole, the second through-hole, third through-hole and fourth hole, the first electrode (1) and the 8th electricity
Pole (15) is connected by the first through hole, and the second electrode (3) and the 6th electrode (12) pass through second through-hole
Be connected, the third electrode (4) and the 7th electrode (13) are connected by the third through-hole, the 4th electrode (6) and
5th electrode (10) is connected by the fourth hole.
6. flexibility full-bridge type resistance strain gage as described in claim 1, it is characterised in that: the shape of two boss and big
It is small identical；The boss has predetermined altitude along the direction perpendicular to the flexible substrates (9).
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| CN108917587B (en) * | 2018-05-17 | 2019-08-09 | 大连理工大学 | A kind of resistance-strain type curvature sensor based on favour stone full-bridge principle |
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| CN109341514A (en) * | 2018-12-11 | 2019-02-15 | 中国地质大学（武汉） | A kind of Novel resistor foil gauge and strain measurement method |
| CN109883316B (en) * | 2019-03-22 | 2021-01-29 | 中国科学院力学研究所 | Resistance type strain sensor and strain measurement method |
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| CN112747775A (en) * | 2020-12-22 | 2021-05-04 | 浙江理工大学 | Multi-strain-sensing strip-shaped resistance strain gauge component |
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