CN109883316A - A kind of resistance strain and strain measurement method - Google Patents
A kind of resistance strain and strain measurement method Download PDFInfo
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- CN109883316A CN109883316A CN201910223791.7A CN201910223791A CN109883316A CN 109883316 A CN109883316 A CN 109883316A CN 201910223791 A CN201910223791 A CN 201910223791A CN 109883316 A CN109883316 A CN 109883316A
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Abstract
The present invention provides a kind of resistance strain and strain measurement method, which can carry out temperature-compensating automatically during strain measurement, while improve the sensitivity of strain measurement.It include: strain resistor and substrate, strain resistor is fixed in substrate, which is characterized in that substrate is made of insulating material, and is curved configuration, and substrate includes at least two rows, and two rows of substrates are set side by side, and end is respectively connected to a paste-side；Strain resistor in two rows of substrates is connected at one end, realizes the temperature-compensating during strain measurement；The central axes of strain resistor in two rows of substrates are located at the different location of substrate, realize the difference of resistance change during strain measurement.When strain measurement, by above-mentioned resistance strain, a lead is picked out respectively to half bridge measurement circuit at two electricity ends of concatenated strain resistor and series connection conducting and is demarcated, measurement half bridge voltage output obtains the strain of determinand.
Description
Technical field
The invention belongs to strain transducer design fields, and in particular to a kind of resistance with curved shape electric resistance structure
Formula strain transducer and strain measurement method, the resistance strain are capable of the strain of precise measurement super large range, and
The temperature change in strain measurement can be compensated.
Background technique
The strain of object is a very important geometric parameter, and accurately measurement has a very important significance.It answers
Becoming sensor is for measuring a kind of sensor strained caused by object receiving force deformation.Strain transducer it is many kinds of,
By principle point, have resistance-type, it is capacitive, piezoelectric type, inductance type and optical profile type, etc..Resistance-type strain sensing
Device, resistance material can be divided into metal, semiconductor, solution, conducting polymer, graphite, etc. again.
In test, foil gauge is pasted on the surface of determinand securely with adhesive, with test specimen stress deformation,
The sensitive grid of foil gauge also obtains same deformation, so that its resistance is made to change therewith, and this resistance variations is and test specimen
Strain it is proportional, so if this resistance variations are converted to voltage or curent change by centainly measuring route, then
It is shown and is recorded with display recorder table again, just can know that the size of determinand dependent variable.
The elastic range of traditional strain transducer based on semiconductor and metal foil is usually less than 2%, is not able to satisfy big
The measurement request of range, thus people developed with carbon black, graphene, carbon nanotube, zinc oxide nanowire, metal nanometer line,
Metal nano film etc. is the large deformation strain transducer of sensing material.Required large deformation ability can be realized in terms of two: one
Aspect is using the advanced sensing material with excellent intrinsic big strain property, can only be born using sensing material
Small strain however with large deformation ability mechanical structure.
In the development course of large deformation strain transducer, Beijing nanometer energy institute, Stanford University, Nankai University, Soviet Union
A large amount of design and Optimization Work have all done in state nanometer institute and Tsinghua University.Although these researchs have considerable on design scheme
Progress, but the permanent destruction or creep of micro-structure can all occur in range for almost all of strain transducer, and height is stretched
Malleability is all based on silica type elastomer, thus is not all suitable for long-term accurate measurement.
Summary of the invention
The object of the present invention is to provide a kind of resistance strains, have curved shape electric resistance structure, can accurately survey
The strain resistor of larger range ability is measured, meanwhile, which can carry out temperature benefit automatically during strain measurement
It repays, while improving the sensitivity of strain measurement.
The present invention also provides the methods for carrying out strain measurement using above-mentioned resistance strain.
In order to achieve the above object, the specific technical solution of the present invention is as follows:
A kind of resistance strain, comprising: strain resistor and substrate, the strain resistor are fixed on the substrate
On, it is curved configuration that the substrate, which is made of insulating material,
The substrate includes at least two rows, and two rows of substrates are set side by side, and end is respectively connected to a paste-side；
Strain resistor in two rows of substrates is connected at one end, realizes the temperature-compensating during strain measurement；
The central axes of strain resistor in two rows of substrates are located at the different location of the substrate, realize strain measurement
The difference of the resistance change of two rows of strain resistors in journey.
Further, in two strain resistors of two rows of substrates, the central axes of one of them strain resistor are always
Positioned at the outside of the curved configuration central axes of place substrate, base where the central axes of another strain resistor are always positioned at
The inside of the curved configuration central axes at bottom.
Further, in the strain transducer, in two rows of strain resistors, the strain on the outside of curved configuration
The width of resistance is larger, and the width of the strain resistor on the inside of curved configuration is smaller.
Further, the curved configuration is the combination knot of one or more of circular arc, elliptic arc, sine curve
Structure.
Further, it in the strain transducer, at two strain resistors series connection conductings, is connected with and measuring circuit
The curved shape resistance of connection,
The curved shape resistance is located at side by side between two rows of substrates, the elongated end of the curved shape resistance and the strain
Another paste-side of sensor connects.
Further, the width of the substrate is 2 times or 2 times or more of the strain resistor width.
It further, further include linkage section, the curved configuration includes one or more, multiple curved configurations
It is connected with each other by the linkage section, the head and the tail both ends of multiple curved configurations interconnected are respectively equipped with and determinand
Connected paste-side；
Before and after the strain transducer is stretched, the average curvature variable quantity of the linkage section is less than the curved configuration
Average curvature variable quantity；
The resistance value of strain resistor on the linkage section is less than the resistance value of the strain resistor in the curved configuration.
Further, the material of the substrate is one of polyimides, polyester, phenolic resin, epoxy resin；
The material of the strain resistor is constantan or new constantan；
Or,
The material of the strain resistor is gold, aluminium, copper, nichrome, nichrome aluminum alloy, Aludirome, platinum, the conjunction of platinum tungsten
One kind of gold.
It further, further include packaging film, the packaging film is coated in the resistance strain；
Preferably, the material of the packaging film is dimethyl silicone polymer or Ecoflex series silicon rubber.
A kind of strain measurement method provided by the invention, by above-mentioned resistance strain, concatenated strain resistor
Both ends and series connection conducting at pick out a lead respectively to half bridge measurement circuit and demarcate, measure half bridge voltage output obtain to
Survey the strain of object；
Preferably, when picking out lead from series connection conducting place, direct welding lead or the curved shape electric resistance structure by adding
The paste-side at two electricity ends of concatenated strain resistor is guided to, further and is drawn.
Resistance strain provided by the invention, substrate is curved configuration, and then defines electrostrictive strain thereon
The structure of resistance is also curved configuration, and range scope of design can be thousands of from a few percent to percent, at the same be set side by side to
Lack two rows substrates, the strain resistor in two rows of substrates is connected at one end, realizes the temperature-compensating during strain measurement；Two rows of bases
The central axes of strain resistor on bottom are located at the different location of substrate, realize the resistance of two rows of strain resistors during strain measurement
The difference of variable quantity.
Detailed description of the invention
Fig. 1 a is a kind of structural schematic diagram of resistance strain provided by the invention；
Fig. 1 b is the enlarged drawing for the signal period arranged on Fig. 1 a；
Fig. 1 c is the enlarged drawing for the signal period arranged under Fig. 1 a；
Fig. 2 is half bridge measurement circuit diagram；
Fig. 3 is the structural schematic diagram of another resistance strain provided by the invention；
1. substrate, 2. strain resistors, 3. paste-sides, 4. linkage sections, 5. curved shape resistance.
Specific embodiment
Present invention problem, technical solution and advantage are illustrated by reference to exemplary embodiment.However, the present invention is not
It is limited to exemplary embodiment as disclosed below, it can be realized by different form.
In the following contents described range be strain resistor reach its can normal use maximum strain when strain sensing
The extensibility of device." super large range " herein refer to range scope of design from a few percent to percent it is thousands of within.Text
In " inside " and " outside " refer respectively in curved configuration, the side far from the center of curvature is outside, in the curvature
The side of the heart is inside.
A kind of resistance strain is mainly made of strain resistor 2 and substrate 1, and strain resistor 2 is fixed on substrate 1
On, substrate 1 is connect or is affixed directly on test specimen to be measured with test specimen to be measured, and strain resistor 2 and substrate 1 are in company with test specimen one to be measured
It rises and is deformed, the resistance value of strain resistor 2 changes therewith while deformation, and the resistance of variation is after processing of circuit with electricity
The form output for pressing signal, finally obtains answering for test specimen to be measured according to relationship between the voltage and strain demarcated on strain transducer
Variate.
In the present solution, the substrate 1 of strain transducer is made of insulating material, it is curved configuration, and curved configuration
Substrate 1 can determine that the structure of strain resistor 2 thereon is also curved shape, and actual measurement, strain transducer provided by the invention has
Imitating range can be thousands of from a few percent to percent.
In the present solution, as shown in Figure 1a, substrate 1 includes at least two rows, two rows of substrates 1 are set side by side, and end connects respectively
It is connected to a paste-side 3；Strain resistor 2 in two rows of substrates 1 is connected at one end, realizes that the temperature during strain measurement is mended
It repays.The position of the central axes of strain resistor 2 in two rows of substrates 1 on the base 1 is different, and resistance becomes during realizing strain measurement
The difference of change amount.It is exactly, for including the strain transducer of two rows of substrates 1, two strain resistors 2 in two rows of substrates 1,
Its respectively relative position on the base 1 it is different, citing, one of strain resistor 2 is located at the central axes of place substrate 1
On, another strain resistor 2 is then located at the side of 1 central axes of place substrate.Such as the song that Fig. 1 b and 1c are signal period in Fig. 1 a
The enlarged drawing of line segment, it can clearly be seen that the position of strain resistor 2 is arranged in substrate 1.
In one embodiment of the present invention, in two strain resistors 2 of two rows of substrates 1, one of strain resistor 2
The outside of the curved section central axes of substrate 1 where central axes are always positioned at, the central axes of another strain resistor 2 position always
In the inside of the curved section central axes of place substrate 1.
In one embodiment of the present invention, in the strain transducer, in the strain resistor 2 in two rows of substrates 1, axis
The width that line is located at the strain resistor 2 on the outside of the center of curvature is larger, and central axes are located at the width of the strain resistor 2 on the inside of the center of curvature
It spends smaller.Certainly different widths are smaller both, and the two width ratio is close to its radius of curvature ratio, both in other words approximate geometry
It is similar.(namely mainly in the camber line fragment position of substrate 1, do not include linkage section 4 described in its back), so to reach
The resistance value of two rows of electric resistance structures is identical.
In one embodiment of the present invention, in the strain transducer, two strain resistors 2 are connected at conducting, connection
There is the curved shape resistance 5 being connected to measuring circuit, specifically when setting, the curved shape resistance 5 can be set and be located at two bases side by side
Between bottom 1, the elongated end of curved shape resistance 5 is connect with another paste-side 3 of the strain transducer, in this way, making the resistance
When formula strain transducer, directly the curved shape resistance 5 is completed together, when needing to access circuit detection, it is only necessary to from answering
The same end for becoming sensor is drawn to be connect with the node of circuit, and not only product is arranged such and is easy to save, while after convenience
The circuit connection of phase, when strain transducer is by deformation, which strains simultaneously.Alternatively, can also be most
After when measuring, then from the series connection conducting place connection one of two strain resistors 2 draw resistive conductor, do not need for its elongated end to be fixed on
The paste-side 3 of the strain transducer other end, directly with circuit node connect, such setting not only need access circuit it
Preceding connection extraction resistive conductor, meanwhile, it connects after drawing resistive conductor, not easy to maintain since structure is more open, the structure
Setting, when strain transducer strains, extraction resistive conductor can not deformation occurs for this.
In one embodiment of the present invention, in order to improve measurement accuracy and sensitivity coefficient, the width of preferred substrate 1 is extremely
Few 2 times for 2 width of strain resistor thereon.When the width of strain resistor 2 is greater than the half of 1 width of substrate, then strain resistor 2
A part of region can cross the central axes of substrate 1, at this point, strain resistor 2 is symmetrically positioned on the part of 1 central axes two sides of substrate
Resistance due to part tensile strain, resistance increases, and partial compression strain, resistance reduces, and partial ohmic variation thereon can just
It is negative to offset, cause half bridge voltage output measured value to become smaller, causes strain result precision smaller.Therefore, it is provided according to this programme
Strain transducer, the width of substrate 1 is at least 2 times of 2 width of strain resistor thereon, to guarantee the precision of strain measurement.We
In case, more preferable 1 width of substrate is 6 times or 6 times or more of 2 width of strain resistor thereon, can guarantee strain transducer in this way
The preferable sensitivity and splendid measurement accuracy that can be obtained in measurement process.
In one embodiment of the present invention, in order to simplify calculating process, preference curve shape structure be circular arc, elliptic arc,
The composite structure of one or more of sine curve or cosine curve, for change more regular circular arc, elliptic arc or
Sine curve, predetermined electrical resistance changing value and strain between relational process in comparatively be easy.Certainly, this programme is not limited to
The above-mentioned several curved configurations enumerated can also be selected and change more irregular asymmetric curvilinear structures.
In one embodiment of the present invention, curved configuration therein may be considered individual circular arc, an ellipse
King-size large scale curved configuration can also be arranged according to the length of practical test specimen to be measured, by two in arc or sine curve
A or more than two circular arcs or elliptic arc or sine curve head and the tail connect and compose large scale curved configuration, or can also be by
Two kinds or more of head and the tail respectively in circular arc, elliptic arc or sine curve connect, and constitute large scale curved configuration, meet
The length requirement of practical test specimen to be measured.Certainly, when multiple curved configurations are arranged, it can join end to end and constitute king-size big ruler
Very little curved configuration multiple curved configurations can also be set side by side, and two ends pass through the same connection jointly of paste-side 3
To test specimen to be measured.
When the radius of semicircle camber line is arranged, the basic width ratio according to the sweep and substrate 1 that are substrate 1 is got over
Greatly, then the range of strain transducer is bigger, and sweep is arranged according to default range.Sweep in curved configuration can be with
It is equal can also be unequal, when multiple sweeps of setting are equal, preparatory calculating can be easier.If curved shape is arranged
Multiple sweeps in structure are unequal, then can be relatively complicated in numerical value calculating, and can reduce the sensitive system of measurement
Number.
In one embodiment of the present invention, since two neighboring curved configuration is after head and the tail connect, junction
Resistance change is more complicated, in order to reduce the resistance value of junction strain resistor 2 for the strain resistor 2 in curved configuration
Resistance change influence, excessively reduce to avoid sensitivity coefficient, while further increasing the range of strain transducer, preferably
Linkage section 4 is set in junction, the resistance value of the strain resistor 2 on the linkage section 4 is set less than the electrostrictive strain in curved configuration
The resistance value of resistance 2.
It is preferred that linkage section 4 is straightway, structure is simple, and range is easily designed.As shown in Fig. 1 a, 1b, 1c and Fig. 3, respectively
Attached drawing middle connecting segment 4 is linear, when the resistance value of strain resistor 2 on linkage section 4 is sufficiently small, in actual measurement and is calculated
The influence of the partial ohmic can then be ignored in journey, improve sensitivity coefficient.Certainly, when the resistance value on linkage section 4 is smaller then right
It is more advantageous in the sensitivity of this strain transducer.When specific setting, the resistance value of strain resistor 2 should be much smaller than curve on linkage section 4
The resistance value of strain resistor 2 in section, since the deformation of straightway is smaller, resistance variations are smaller, if its resistance is larger, can reduce whole
The sensitivity coefficient of a sensor.So the width that setting is located at the strain resistor 2 on linkage section 4 is much larger than curved portion substrate 1
The width of upper strain resistor 2, actual measurement, strain transducer can reach ideal sensitivity, need strain resistor 2 on linkage section 4
Resistance value differs at least one order of magnitude with the resistance value of strain resistor 2 in curved portion substrate 1, while needing to be arranged on linkage section 4
2 width of strain resistor it is equal with the width of the part of substrate 1 or be slightly less than its width.
In above embodiment, as shown in Fig. 1 a, 1b, 1c and Fig. 3, in attached drawing, oblique line fill part is by polymeric material
The substrate 1 of curved configuration made of expecting, filled black part are strain resistor 2.Wherein, for being preferably selected as polyamides Asia
One of amine, polyester, phenolic resin, epoxy resin, four kinds of materials not only insulate but also soft, and elastic stretching rate
It is higher than metal and non-aging.
, it is preferable to use gold production strain resistor 2 in one embodiment of the present invention.Magnetron sputtering goldleaf can be accomplished
100 nanometers of even tens nanometer thins, required plasma etching times are few.The chemical property of gold is stablized simultaneously, and resistivity is low.When
So, the material of strain resistor 2 can also select constantan, new constantan, aluminium, copper, nichrome, nichrome aluminum alloy, Aludirome,
One of platinum, platinum-tungsten alloys.
In one embodiment of the present invention, according to the difference of the use environment of strain transducer, it can also be passed in strain
Packaging film for protecting strain transducer is set outside sensor.When the use environment of strain transducer is relatively closed
When, it may not be necessary to carry out surface encapsulation.And when strain transducer use environment influenced by extraneous factor it is more or larger
When, it needs to protect strain resistor 2, packaging film can be coated in the outer surface of strain transducer at this time.When what is used
When strain transducer needs to encapsulate, the both ends of strain transducer can be pasted on test specimen to be measured and be tested, it can also be straight
It connects for the strain transducer after encapsulation to be integrally pasted on test specimen to be measured and test.Because of the curve of strain transducer after encapsulation
Shape substrate 1 and strain resistor 2 will not strictly be consolidated with the surface of test specimen.It, can also be direct if measured object surface is softer
The strain transducer of unencapsulated elastic film is integrally pasted on determinand and is tested.It is excellent in order to not influence measurement accuracy
Selecting the packaging film is spring packaging film.General Purpose Rubber preparation can be used in the spring packaging film, or can also use
Dimethyl silicone polymer (PDMS) and Ecoflex series silicon rubber, and two kinds of materials have high-insulativity, high resiliency, Gao La
Rate, the performance of low elastic modulus are stretched, elastic recovery capability is good, will not influence the stability of strain transducer.Certainly, according to reality
The difference needed is measured, other silica gel or rubber material also can be used.
Resistance strain provided by the invention can be made by the following method: purchase or spin coating make polymer
Film plates layer of metal film in dielectric base 1, becomes composite layered plate as dielectric base 1；
Production photoetching mother matrix: covering a layer photoresist on metal film, is selectively exposed using mother matrix, keeps photoresist aobvious
Shadow etches 5 structure of curved shape resistance by predetermined pattern with plasma etching machine, removes photoresist, pressed with plasma etching machine
Predetermined pattern etches the shape of dielectric base 1.
Welding lead-out wire: a line is respectively picked out from the all-in resistance both ends after conducting place and series connection.Do not encapsulate or select elasticity
Film (such as PDMS film) encapsulation.Three leads are accessed into half bridge measurement circuit, voltage-strain stress relation of calibration sensor.
The method for carrying out strain measurement to determinand using resistance strain provided by the invention, specifically includes:
A lead is picked out respectively to half bridge measurement circuit at the both ends of concatenated strain resistor 2 and series connection conducting and is marked
Fixed, measurement half bridge voltage output obtains the strain of determinand；
By strain resistor 2 access half bridge measurement circuit when, can will the both ends of the all-in resistance after series connection and series connection conducting at
A lead is picked out respectively to half bridge measurement circuit and is demarcated, and measure output voltage obtains strain resistor 2 in deformation process
Strain size；Or as shown in Figure 1a, from series connection conducting place pick out lead when, as shown in Figure 1a, can direct welding lead,
Or as shown in figure 3, as the bonding where 5 structure 5 of curved shape resistance added guides to two electricity ends of concatenated strain resistor
End further and is drawn.
Specific half-bridge circuit is as shown in Fig. 2, include two concatenated measuring resistance R3And R4, go here and there on resistance sensor
Two strain resistor R of connection1And R2, two groups of concatenated resistor coupled in parallel constitute the half-bridge circuit, wherein U0For circuit power, UmIt surveys
Measure R1And R2The changing value of voltage on the branch of place.
Resistance strain provided by the invention, temperature-compensating can specifically be obtained by following principle relationship:
If Fig. 1 a is the resistance strain that one kind can carry out temperature-compensating automatically, a, b, c sections are respectively corresponded
The end a, b, c of half bridge measurement circuit in Fig. 2.3 lines picked out are built into two measuring resistances in external equipment jointly again
For the half bridge measurement circuit of Fig. 2.The half-bridge structure output voltage of Fig. 2 are as follows:
If designing in circuit, and consider and change because of stretching, obtains:
When the temperature is changed, the resistivity of metal film changes, therefore resistance R1And R2Also it changes, however due to
This is equivalent to the molecule of above formula and denominator simultaneously multiplied by a coefficient, and ratio is constant, therefore output voltage UmNot by temperature shadow
It rings.
Two-sided resistance strain provided by the invention, sensitivity with higher:
By the way that in resistance strain, two strain resistors 2 that setting is located in two substrates 1 are not wide, to protect
Demonstrate,prove the R in Fig. 2 half bridge measurement circuit1≈R2, then by zeroing, obtain
When two rows of strain resistors 2 is not at central axes the same side, Δ R1With Δ R2Contrary sign, therefore Δ R1-ΔR2It is absolute
It is worth larger, output voltage UmHigher, sensitivity coefficient is high.
Resistance strain provided by the invention, range scope of design can be from a few percent to a few percent
Thousand, while measurement accuracy is high.Meanwhile multiplicating measurement is carried out using the strain transducer, measurement result is able to maintain good
Good consistency has preferable stability.
Resistance strain provided by the invention, range scope of design can be from a few percent to a few percent
Thousand, can be automatically for temperature-compensating be carried out during strain strain measurement, measurement accuracy is high.It is carried out using the strain transducer
Measurement is repeated several times, measurement result is able to maintain good consistency, has preferable stability.
The characteristics of illustrating resistance strain in the present invention below by specific embodiment.In following embodiment, base
Bottom 1 is all made of PI film, and strain resistor 2 is goldleaf.
Embodiment 1: for the embodiment of the resistance strain of structure shown in Fig. 1.
The PI film thickness 0.05mm of the strain transducer, PI thin-film width is 0.05mm at circular arc and straightway, average half
Diameter 0.15mm, straight line segment length 0.15mm.Goldleaf is 10nm, the gold of curved section with a thickness of the adhesive layer chromium between 100nm, with PI film
Wide tinsel cord is respectively 2 μm and 2.25 μm, the respectively inside edge distance PI 0.015mm and distance PI outer ledge 0.015mm；Directly
The goldleaf and PI film of line segment are the same as wide.The PI a length of 1.13mm, width 0.4mm for being used to paste measured object on both sides.
Preparation method:
Purchase or spin coating production thin polymer film plate layer of metal film on the base 1, become composite layered plate as substrate 1；
Production photoetching mother matrix: covering a layer photoresist on metal film, is selectively exposed using mother matrix, keeps photoresist aobvious
Shadow etches 5 structure of curved shape resistance by predetermined pattern with plasma etching machine, removes photoresist, pressed with plasma etching machine
Predetermined pattern etches the shape of polymeric substrates 1；
Weld lead-out wire: the solder joint of left end two respectively picks out a line (a and c in Fig. 2), and the solder joint of right end picks out a line
Voltage output one end (b in Fig. 2) as half-bridge circuit.Do not encapsulate or select elastic film (such as PDMS film) to encapsulate.
Three leads are accessed into half bridge measurement circuit, voltage-strain stress relation of calibration sensor.
Embodiment 2: for the embodiment of the resistance strain of structure shown in Fig. 3.
The PI film thickness 0.05mm of the strain transducer, PI thin-film width is 0.05mm at circular arc and straightway, average half
Diameter 0.15mm, straight line segment length 0.15mm.Goldleaf is 10nm, the gold of curved section with a thickness of the adhesive layer chromium between 100nm, with PI film
Wide tinsel cord is respectively 2 μm and 2.25 μm, the respectively inside edge distance PI 0.015mm and distance PI outer ledge 0.015mm；Directly
The goldleaf and PI film of line segment are the same as wide.The PI a length of 1.53mm, width 0.4mm for being used to paste measured object on both sides.
Preparation method:
Purchase or spin coating production thin polymer film plate layer of metal film on the base 1, become composite layered plate as substrate 1；
Production photoetching mother matrix: covering a layer photoresist on metal film, is selectively exposed using mother matrix, keeps photoresist aobvious
Shadow etches 5 structure of curved shape resistance by predetermined pattern with plasma etching machine, removes photoresist, pressed with plasma etching machine
Predetermined pattern etches the shape of polymeric substrates 1；
Weld lead-out wire: upper, middle and lower three solder joints in left end respectively pick out a line (a, b and c in Fig. 2).It does not encapsulate or selects
Elastic film (such as PDMS film) encapsulation.Three leads are accessed into half bridge measurement circuit, voltage-strain of calibration sensor is closed
System.
More than, although the description of several embodiments of the invention, but these embodiments are intended only as example proposition
, it is not intended to limit the scope of the present invention.For these new embodiments, can be implemented with various other ways,
In the range of not departing from the gist of the invention, it is able to carry out various omissions, displacement and change.These embodiments and its change
Shape while being contained in scope and spirit of the present invention, is also contained in the invention recorded in claims and its impartial model
In enclosing.
Claims (10)
1. a kind of resistance strain, comprising: strain resistor and substrate, the strain resistor is fixed on the substrate,
It is characterized in that, the substrate is made of insulating material, it is curved configuration,
The substrate includes at least two rows, and two rows of substrates are set side by side, and end is respectively connected to a paste-side；It is two rows of
Strain resistor in the substrate is connected at one end, realizes the temperature-compensating during strain measurement；
The central axes of strain resistor in two rows of substrates are located at the different location of the substrate, during realization strain measurement
The difference of the resistance change of two rows of strain resistors.
2. resistance strain according to claim 1, which is characterized in that
In two strain resistors of two rows of substrates, substrate where the central axes of one of them strain resistor are always positioned at
The outside of curved configuration central axes, the curved configuration of substrate where the central axes of another strain resistor are always positioned at
The inside of central axes.
3. resistance strain according to claim 2, which is characterized in that
In the strain transducer, in two rows of strain resistors, the width of the strain resistor on the outside of curved configuration compared with
Greatly, the width of the strain resistor on the inside of curved configuration is smaller.
4. resistance strain according to claim 1-3, which is characterized in that
The curved configuration is the composite structure of one or more of circular arc, elliptic arc, sine curve.
5. resistance strain according to claim 1, which is characterized in that
In the strain transducer, at two strain resistor series connection conductings, it is connected with the curved shape being connected to measuring circuit
Resistance,
The curved shape resistance is located at side by side between two rows of substrates, the elongated end and the strain sensing of the curved shape resistance
Another paste-side of device connects.
6. resistance strain according to claim 1, which is characterized in that
The width of the substrate is 2 times or 2 times or more of the strain resistor width.
7. resistance strain according to claim 1-6, which is characterized in that
It further include linkage section, the curved configuration includes one or more, and multiple curved configurations pass through the connection
Section is connected with each other, and the head and the tail both ends of multiple curved configurations interconnected are respectively equipped with the stickup being connected with determinand
End；
Before and after the strain transducer is stretched, the average curvature variable quantity of the linkage section is less than the flat of the curved configuration
Equal Curvature varying amount；
The resistance value of strain resistor on the linkage section is less than the resistance value of the strain resistor in the curved configuration.
8. resistance strain according to claim 1-7, which is characterized in that
The material of the substrate is one of polyimides, polyester, phenolic resin, epoxy resin；
The material of the strain resistor is constantan or new constantan；
Or,
The material of the strain resistor is gold, aluminium, copper, nichrome, nichrome aluminum alloy, Aludirome, platinum, platinum-tungsten alloys
It is a kind of.
9. resistance strain according to claim 1-7, which is characterized in that
It further include packaging film, the packaging film is coated in the resistance strain；
Preferably, the material of the packaging film is dimethyl silicone polymer or Ecoflex series silicon rubber.
10. strain measurement method, by any one of the claim 1-9 resistance strain, concatenated strain resistor
Both ends and series connection conducting at pick out a lead respectively to half bridge measurement circuit and demarcate, measure half bridge voltage output obtain to
Survey the strain of object；
Preferably, when picking out lead from series connection conducting place, direct welding lead or the curved shape electric resistance structure by adding are guided to
Bonding end where two electricity ends of concatenated strain resistor further and is drawn.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN111521106A (en) * | 2020-03-09 | 2020-08-11 | 江苏柔世电子科技有限公司 | Resistance type strain sensor |
| CN112414435A (en) * | 2020-11-18 | 2021-02-26 | 南通大学 | Multifunctional flexible fabric sensor and use method thereof |
| CN113551791A (en) * | 2021-07-02 | 2021-10-26 | 中国科学院力学研究所 | Resistance type strain sensor capable of being rapidly prepared and preparation method thereof |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111162018A (en) * | 2019-12-24 | 2020-05-15 | 陕西电器研究所 | Method for adjusting zero position of thin film sensor through plasma etching |
| CN111162018B (en) * | 2019-12-24 | 2023-06-06 | 陕西电器研究所 | Method for adjusting zero position of thin film sensor by plasma etching |
| CN111521106A (en) * | 2020-03-09 | 2020-08-11 | 江苏柔世电子科技有限公司 | Resistance type strain sensor |
| CN112414435A (en) * | 2020-11-18 | 2021-02-26 | 南通大学 | Multifunctional flexible fabric sensor and use method thereof |
| CN112414435B (en) * | 2020-11-18 | 2022-09-02 | 南通大学 | Multifunctional flexible fabric sensor and use method thereof |
| CN113551791A (en) * | 2021-07-02 | 2021-10-26 | 中国科学院力学研究所 | Resistance type strain sensor capable of being rapidly prepared and preparation method thereof |
| CN113834418A (en) * | 2021-09-06 | 2021-12-24 | 电子科技大学 | Flexible strain sensor with adjustable Poisson ratio |
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