CN109738097A - A kind of multifunction electronic skin and preparation method thereof, plane external force detection method - Google Patents

A kind of multifunction electronic skin and preparation method thereof, plane external force detection method Download PDF

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Publication number
CN109738097A
CN109738097A CN201910184135.0A CN201910184135A CN109738097A CN 109738097 A CN109738097 A CN 109738097A CN 201910184135 A CN201910184135 A CN 201910184135A CN 109738097 A CN109738097 A CN 109738097A
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China
Prior art keywords
plane
flexible substrate
force detection
external force
conductive
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CN201910184135.0A
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龚兴龙
丁丽
宣守虎
王宇
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University of Science and Technology of China USTC
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University of Science and Technology of China USTC
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Priority to CN201910184135.0A priority Critical patent/CN109738097A/en
Publication of CN109738097A publication Critical patent/CN109738097A/en
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Abstract

The application provides a kind of multifunction electronic skin and preparation method thereof, plane external force detection method, the multifunction electronic skin includes that plane internal force detection layers and multiple plane external force positioned at a surface of plane internal force detection layers detect mould group, each plane external force detection mould group includes tip detecting part and plane external force test section, since tip detecting part can sense stress, larger deformation occurs, so that electronic skin is in stress, after deformation caused by stress capable of being amplified and being transferred to plane external force test section, the second conductive film generates electric signal on plane external force test section, data processing module, which is transferred to, by the second conductive path carries out data processing, the first conductive film generates force electrical signal in plane in plane internal force detection layers simultaneously, and the data processing module is also transmitted to by the first conductive path and carries out data processing, According to data processed result, the size and Orientation for the plane external force that electronic skin is subject to is calculated, to realize that plane external force detects.

Description

Multifunctional electronic skin, manufacturing method thereof and plane external force detection method
Technical Field
The invention relates to the technical field of materials, in particular to a multifunctional electronic skin, a manufacturing method thereof and a plane external force detection method.
Background
Electronic skins play an extremely important role in the technical fields of intelligent interaction, human body bionics, intelligent robot manufacturing and the like. With the increasing demands in the fields of medical monitoring, human-computer communication and the like, the research and development of artificial electronic skin with high sensitivity and more powerful functions to more accurately simulate the human skin function is an urgent need.
The sensor is a key part in the electronic skin, most sensors on the market have single functions and insufficient flexibility, and the requirements of future intelligent skin cannot be met. Meanwhile, the most common planar internal stress-strain sensor is not suitable for or beneficial to detecting planar external force, and cannot well detect the change of the planar external force.
With the development of intelligent robots, the requirements for sensing force of the intelligent robots are higher and higher, and how to provide an electronic skin with multiple functions becomes an urgent problem to be solved.
Disclosure of Invention
In view of the above, the present invention provides a multifunctional electronic skin, a manufacturing method thereof, and a planar external force detection method thereof, so as to solve the problem that the electronic skin having only a planar internal force detection function and no planar external force detection function in the prior art is single in function, so that the multifunctional skin can sense the internal force and the external force at the same time, and in addition, by additionally providing other structures, the multifunctional electronic skin can be used for detecting stretching and pressing of the electronic skin, external temperature and humidity, and external magnetic field flow field changes, and distinguishing electronic skin state changes and external influence signals.
In order to achieve the purpose, the invention provides the following technical scheme:
a multifunctional electronic skin, comprising:
the in-plane force detection layer is used for detecting in-plane force and comprises a first surface and a second surface which are oppositely arranged;
the in-plane force detection layer comprises a first flexible substrate, a first conductive film and a first conductive path, wherein the first conductive film is formed on the first flexible substrate, and the first conductive path is used for transmitting a first stress signal on the first conductive film to a data processing module for data processing;
the plane external force detection modules are positioned on the first surface and are protruded relative to the first surface, and the plane external force detection modules are used for sensing and detecting plane external force;
every plane external force detects the module and includes: a tip sensing part and a plane external force detecting part;
the plane external force detection part is positioned on the first surface of the plane internal force detection layer and is raised relative to the plane internal force detection layer;
the tip sensing part is positioned on one side of the plane external force detection part, which is deviated from the plane internal force detection layer;
the plane external force detection portion is an axisymmetric structure, the symmetry axis of which is perpendicular to the first surface, and the plane external force detection portion includes: the flexible printed circuit board comprises a second flexible substrate, a plurality of separated second conductive films and second conductive paths which are electrically connected with the second conductive films in a one-to-one correspondence mode;
the second flexible substrate is in a horn shape which expands outwards from the tip sensing part to the in-plane force detection layer;
the second conductive film is arranged on the surface, away from the in-plane force detection layer, of the second flexible substrate;
the second conductive path is used for transmitting a second stress signal on the second conductive film to the data processing module for data processing.
Preferably, the tip sensing part is a structure disposed perpendicular to the first surface.
Preferably, the tip sensing part comprises a multi-section structure, wherein one section is made of a thermochromic material; the other section is made of a magnetorheological elastomer.
Preferably, a humidity sensing layer is further arranged on the surface of the in-plane force detection layer.
Preferably, the first conductive film and the second conductive film are both films formed by attaching linear conductive substances to a flexible substrate, and the linear conductive substances include carbon nanotubes, graphene or nanowires;
the material of the nano-wire comprises at least one or a mixture of silver, gold, copper, platinum and nickel.
Preferably, the second flexible substrate is formed by splicing a plurality of triangular planes, and the second conductive film is triangular; or, the second flexible substrate is a conical side surface, and the second conductive film is fan-shaped.
Preferably, the first flexible substrate and the second flexible substrate are both made of silicon gel.
The invention also provides a plane external force detection method, which is applied to the multifunctional electronic skin, and comprises the following steps:
acquiring a first stress signal on a first conductive film on an in-plane force detection layer;
acquiring a plurality of second stress signals on a plurality of second conductive films on the plane external force detection part;
comparing the magnitudes of the plurality of second stress signals, wherein the largest second stress signal is taken as the out-of-plane force value;
collecting the first stress signal and the plurality of second stress signals in a preset time period, and judging the fluctuation types and the fluctuation sizes of the first stress signal and the plurality of second stress signals;
and judging the type of the plane external force according to a pre-established data model, wherein the data model is a relation model of the plane external force, the fluctuation type and the fluctuation size.
The invention also provides a manufacturing method of the multifunctional electronic skin, which is used for manufacturing and forming the multifunctional electronic skin, and the manufacturing method comprises the following steps:
forming a first flexible substrate and a plurality of second flexible substrates, wherein the plurality of second flexible substrates are positioned on the surface of the first flexible substrate and are raised relative to the first flexible substrate, and the second flexible substrates are horn-shaped and retract along the direction away from the first flexible substrate;
carrying out oxygen plasma treatment on areas outside a plurality of second flexible substrates on the first flexible substrate;
forming a first conductive film on a plurality of regions outside a second flexible substrate on the first flexible substrate, and forming a plurality of second conductive films insulated and separated from each other on each second flexible substrate;
forming a first conductive path and a second conductive path on the first flexible substrate in regions outside the plurality of second flexible substrates, wherein the first conductive path is electrically connected with the first conductive film, and the second conductive path is electrically connected with the second conductive film;
and forming a tip sensing part at one end of the second flexible substrate, which faces away from the first flexible substrate.
Preferably, the forming a first conductive film on the first flexible substrate in a region outside a plurality of second flexible substrates, and forming a plurality of second conductive films insulated and separated from each other on each of the second flexible substrates specifically include:
spin-coating or spray-coating a linear conductive substance dispersion liquid on a plurality of areas outside a second flexible substrate on the first flexible substrate and on the second flexible substrate, wherein the linear conductive substance dispersion liquid is a solution formed by dispersing a linear conductive substance in an organic solvent or a blended solution of ethanol and acetone;
or,
dispersing a linear conductive substance modified by carboxylic acid hydrophilic functional groups in plasma water;
and then dropping the plasma water on the areas outside the plurality of second flexible substrates on the first flexible substrate and on the second flexible substrate.
According to the technical scheme, the multifunctional electronic skin provided by the invention comprises an in-plane force detection layer and a plurality of in-plane force detection modules positioned on one surface of the in-plane force detection layer, wherein each in-plane force detection module comprises a tip sensing part and an out-plane force detection part, the tip sensing part can sense stress and generate large deformation, so that when the electronic skin is stressed, the deformation caused by the stress can be amplified and transmitted to the in-plane force detection part, a second conductive film on the in-plane force detection part generates an electric signal which is transmitted to a data processing module through a second conductive path for data processing, meanwhile, a first conductive film on the in-plane force detection layer generates an in-plane force electric signal which is also transmitted to the data processing module through a first conductive path for data processing, and the size and the direction of the in-plane force applied to the electronic skin are calculated according to the data processing result, thereby realizing plane external force detection.
That is to say, the multifunctional electronic skin provided by the invention not only can detect the in-plane force, but also can detect the out-plane force, and the magnitude and the direction of the stress of the electronic skin are obtained by combining the in-plane force detection and the out-plane force detection.
In addition, the invention also provides a manufacturing method of the multifunctional electronic skin, which is used for forming the multifunctional electronic skin.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a multifunctional electronic skin according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of another multifunctional electronic skin provided in an embodiment of the present invention;
fig. 3 is a schematic structural diagram of an external shape of a planar external force detecting portion according to an embodiment of the present invention;
FIG. 4 is a side view of another external force detecting portion according to an embodiment of the present invention;
FIG. 5 is a top view of another external force detecting portion according to an embodiment of the present invention;
fig. 6 is a schematic top view of a planar external force detecting portion according to an embodiment of the present invention;
FIG. 7 is a schematic top view of another planar external force detecting portion according to an embodiment of the present invention;
fig. 8 is a schematic top view of an in-plane force detection layer according to an embodiment of the present invention.
Detailed Description
As described in the background section, in the prior art, the electronic skin has a single function, and can only detect the in-plane force, but does not have the functions of sensing and detecting the plane external force, and cannot detect the plane external force.
The inventor finds that the above phenomenon occurs because the electronic skin in the prior art is usually only provided with the in-plane force detection sensing layer, so that only in-plane force detection can be realized, and the magnitude and direction of the in-plane force cannot be realized.
Based on this, the present invention provides a multifunctional electronic skin comprising:
the in-plane force detection layer is used for detecting in-plane force and comprises a first surface and a second surface which are oppositely arranged;
the in-plane force detection layer comprises a first flexible substrate, a first conductive film and a first conductive path, wherein the first conductive film is formed on the first flexible substrate, and the first conductive path is used for transmitting a first stress signal on the first conductive film to a data processing module for data processing;
the plane external force detection modules are positioned on the first surface and are protruded relative to the first surface, and the plane external force detection modules are used for sensing and detecting plane external force;
every plane external force detects the module and includes: a tip sensing part and a plane external force detecting part;
the plane external force detection part is positioned on the first surface of the plane internal force detection layer and is raised relative to the plane internal force detection layer;
the tip sensing part is positioned on one side of the plane external force detection part, which is deviated from the plane internal force detection layer;
the plane external force detection portion is an axisymmetric structure, the symmetry axis of which is perpendicular to the first surface, and the plane external force detection portion includes: the flexible printed circuit board comprises a second flexible substrate, a plurality of separated second conductive films and second conductive paths which are electrically connected with the second conductive films in a one-to-one correspondence mode;
the second flexible substrate is in a horn shape which expands outwards from the tip sensing part to the in-plane force detection layer;
the second conductive film is arranged on the surface, away from the in-plane force detection layer, of the second flexible substrate;
the second conductive path is used for transmitting a second stress signal on the second conductive film to the data processing module for data processing.
The invention provides a multifunctional electronic skin, which comprises an in-plane force detection layer and a plurality of in-plane force detection modules positioned on one surface of the in-plane force detection layer, wherein each in-plane force detection module comprises a tip sensing part and an out-plane force detection part, because the tip sensing part can sense stress and generate large deformation, when the electronic skin is stressed, the deformation caused by the stress can be amplified and transmitted to the in-plane force detection part, a second conductive film on the in-plane force detection part generates an electric signal which is transmitted to a data processing module through a second conductive path for data processing, and a first conductive film on the in-plane force detection layer generates an in-plane force electric signal which is also transmitted to the data processing module through the first conductive path for data processing, and the size and the direction of the in-plane force applied to the electronic skin are calculated according to the data processing result, thereby realizing plane external force detection.
That is to say, the multifunctional electronic skin provided by the invention not only can detect the in-plane force, but also can detect the out-plane force, and the magnitude and the direction of the stress of the electronic skin are obtained by combining the in-plane force detection and the out-plane force detection.
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a multifunctional electronic skin according to an embodiment of the present invention; the multifunctional electronic skin includes: an in-plane force detection layer 3 for detecting an in-plane force, the in-plane force detection layer 3 including a first surface and a second surface that are disposed opposite to each other; the in-plane force detection layer 3 includes a first flexible substrate, a first conductive film formed on the first flexible substrate, and a first conductive path for transmitting a first stress signal on the first conductive film to the data processing module for data processing.
The plane external force detection modules are positioned on the first surface and are convex relative to the first surface, and the plane external force detection modules are used for sensing and detecting plane external force; every plane external force detects the module and includes: a tip sensing section 1 and a plane external force detection section 2; the plane external force detection part 2 is positioned on the first surface of the plane internal force detection layer 3 and is convex relative to the plane internal force detection layer 3; the tip sensing part 1 is located on a side of the in-plane force detecting part 2 away from the in-plane force detecting layer 3.
Plane external force detection portion 2 is the axisymmetric structure, and its symmetry axis is perpendicular with first surface, and plane external force detection portion 2 includes: the second flexible substrate, a plurality of separated second conductive films and second conductive paths which are electrically connected with the second conductive films in a one-to-one correspondence mode; the second flexible substrate is in a horn shape which is expanded from the tip sensing part 1 to the in-plane force detection layer 3; the second conductive film is arranged on the surface of the second flexible substrate, which is far away from the in-plane force detection layer 3; the second conductive path is used for transmitting a second stress signal on the second conductive film to the data processing module for data processing.
It should be noted that, in the present invention, the tip sensing portion 1 is used for sensing the magnitude of the planar external force, and generates a larger deformation under the action of a smaller external force, so as to amplify the action of the external force and transmit the amplified action to the planar external force detecting portion 2, therefore, in this embodiment, optionally, the tip sensing portion is arranged perpendicular to the first surface, so that the forces detected by the tip sensing portion in all directions are mutually symmetrical, and the external force sensing is more convenient.
In addition, the tip sensing part in the embodiment of the present invention must have strong flexibility, and the specific material of the tip sensing part 1 is not limited in this embodiment, and optionally, a rubber material may be used, and more preferably, a silicone material is used to ensure the flexibility; in addition, the specific size of the tip sensing part 1 is not limited in the embodiment of the present invention, and may be specifically set according to the overall size of the electronic skin.
It should be noted that, in the embodiment of the present invention, the tip sensing portion 1 may have a single-stage structure or a multi-stage structure, when the tip sensing portion 1 has a multi-stage structure, please refer to fig. 2, and fig. 2 is a schematic structural view of another multifunctional electronic skin provided in the embodiment of the present invention; the tip sensing part 1 is of a multi-section structure and comprises a first section 9 and a second section 10, wherein the first section 9 and the second section 10 can detect external forces of different types according to the external forces, different materials are adopted, if the first section 9 is made of temperature sensing color-changing materials, the temperature sensing color-changing materials can be temperature sensing color-changing rubber, and the temperature sensing color-changing rubber is formed by mixing temperature sensing color-changing particles and rubber. The rubber is silicon rubber, natural rubber, polyurethane, acrylic resin, butadiene rubber, blends of the silicon rubber and the natural rubber, and the like, and soft silicon rubber is preferred in the embodiment. In order to detect the magnitude of the external magnetic force, the material of the second section 10 in the multi-section structure of the tip sensing portion in this embodiment may further include a magnetorheological elastomer, and the magnetorheological elastomer is a product obtained by heat-treating a mixture of magnetic particles, a matrix, a curing agent, and an additive. The matrix is silicon rubber, natural rubber, polyurethane, acrylic resin, butadiene rubber, blends of the silicon rubber, the natural rubber, the polyurethane, the acrylic resin and the butadiene rubber, and the like, and the silicon rubber is preferred in the embodiment.
The tip sensing part provided in this embodiment includes a magnetorheological elastomer and a thermochromic rubber, so that the tip sensing part can be used to sense the temperature and amplify the external magnetic stimulation, thereby transmitting a signal to the planar external force detection part 2.
In the embodiment of the present invention, the specific shape of the plane external force detecting part 2 is not limited as long as it can satisfy the trumpet-shaped structure gradually expanding from the tip sensing part 1 to the plane internal force detecting layer 3, and optionally, the shape of the plane external force detecting part 2 may be a hollow cone structure, a polygonal star structure, a hollow polygonal pyramid structure, or the like, that is, the second flexible substrate forms the trumpet-shaped structure expanding outwards, or may be a hollow polygonal pyramid structure formed by splicing a plurality of triangular planes, and refer to the structure of the plane external force detecting part 2 shown in fig. 1 and the schematic configuration diagram shown in fig. 3; the structure may be a hollow cone structure formed by a side surface of a cone, and the structure of the planar external force detection part shown in fig. 2 and the side view of the external structure shown in fig. 4 can be referred to. In other embodiments of the present invention, a multi-angle star structure is also possible, and the outline structure is shown in a top view in fig. 5.
Then, forming a second conductive film on the surface of the second flexible substrate, where the shape of the second conductive film is not limited in this embodiment, and the second conductive film may be arranged according to the shape of the second flexible substrate, and if the second flexible substrate is a hollow polygonal pyramid structure, the corresponding second conductive film may be a triangular structure; if the second flexible substrate is a hollow cone structure, the corresponding second conductive thin film 5 may be a fan-shaped structure, please refer to fig. 7, which is a schematic top view structure diagram of the fan-shaped second conductive thin film 5 disposed on the second flexible substrate 42.
It should be noted that, in this embodiment, the material of the second conductive film is not limited, and optionally, the second conductive film is a film formed by attaching a linear conductive substance to a flexible substrate, where the linear conductive substance includes a carbon nanotube, graphene, or a nanowire; the material of the nano-wire comprises at least one or a mixture of silver, gold, copper, platinum and nickel.
Referring to fig. 6 and 7, the planar external force detecting portion further includes a second conductive path 6 for electrically connecting each second conductive film, and then transmitting the electrical signal on the second conductive film 5 to an external data processing module for processing data to obtain the magnitude and direction of the external force.
In the embodiment of the present invention, the second conductive path 6 includes a portion located on the surface of the second flexible substrate 42 and a portion connected to the external data processing module, and the portion connected to the external data processing module is disposed on the first flexible substrate 41, as shown in fig. 6 and 7, the second flexible substrate 42 protruding from the first surface is located inside the dotted line, and the first flexible substrate 41 located on the first surface is located outside the dotted line. The second conductive path 6 includes a conductive path located above the second conductive film 5, such as a conductive path in the central portion in fig. 6 and 7 (the conductive path serves as one electrode of the second conductive path 6), the second conductive path 6 further includes a conductive path below the edge of the second conductive film 5 (serves as the other electrode of the second conductive path 6), the second conductive path 6 further includes a conductive path between two adjacent second conductive films 5 and insulated from both of the two adjacent second conductive films 5, for leading out an electrode, and the conductive path located on the first flexible substrate 41 may also be referred to as a conductive path below the second conductive film 5. The "upper" and "lower" are both upper and lower in the three-dimensional space, and are based on the in-plane force detection layer, the direction away from the in-plane force detection layer is the upper direction, and the direction toward the in-plane force detection layer is the lower direction.
In addition, the in-plane force detection layer 3 in the embodiment of the present invention also includes a first flexible substrate, and a first conductive thin film and a first conductive via formed on the first flexible substrate, where the material of the first flexible substrate may be the same as that of the second flexible substrate, and the first flexible substrate is formed by using a silicone material, so that the first flexible substrate and the second flexible substrate can be formed in the same step, so as to simplify the manufacturing process. Or may be different from the second flexible substrate material, which is not limited in this embodiment.
It should be noted that the in-plane force detection layer provided in this embodiment uses a flexible substrate and a conductive thin film formed on the flexible substrate to replace the in-plane force detection layer formed by using a metal layer in the prior art, so that the flexibility of the in-plane force detection layer can be improved, and the flexibility of the in-plane force detection layer can meet the application requirements of electronic skin.
In order to further increase the function of the multifunctional electronic skin, the in-plane force detection layer of the electronic skin in this embodiment may further include a humidity sensing layer, please refer to fig. 8, and fig. 8 is a schematic top view of the in-plane force detection layer according to the embodiment of the present invention. An in-plane force sensing layer 7 (i.e. a first conductive film) and a humidity sensing layer 8 are formed on the first flexible substrate 41, wherein the humidity sensing layer 8 can sense the humidity of the environment where the electronic skin is located, and transmit a humidity signal to the data processing module.
In addition, in the present embodiment, the distribution density and the thickness of the conductive material of the second conductive film and the first conductive film 7 on the planar external force detecting portion 2 are not limited, and may be specifically designed according to the required strain sensitivity coefficient.
The invention provides a multifunctional electronic skin, which comprises an in-plane force detection layer and a plurality of in-plane force detection modules positioned on one surface of the in-plane force detection layer, wherein each in-plane force detection module comprises a tip sensing part and an out-plane force detection part, because the tip sensing part can sense stress and generate large deformation, when the electronic skin is stressed, the deformation caused by the stress can be amplified and transmitted to the in-plane force detection part, a second conductive film on the in-plane force detection part generates an electric signal which is transmitted to a data processing module through a second conductive path for data processing, and a first conductive film on the in-plane force detection layer generates an in-plane force electric signal which is also transmitted to the data processing module through the first conductive path for data processing, and the size and the direction of the in-plane force applied to the electronic skin are calculated according to the data processing result, thereby realizing plane external force detection.
That is to say, the multifunctional electronic skin provided by the invention not only can detect the in-plane force, but also can detect the out-plane force, and the magnitude and the direction of the stress of the electronic skin are obtained by combining the in-plane force detection and the out-plane force detection.
And through setting up the material of most advanced sensing portion, external force such as can detect magnetic field, wind field and rivers to monitoring pulling force, pressure, human motion, external environment (such as magnetic field, temperature, humidity, wind-force etc.) change well. The multifunctional electronic skin has diversified functions and wider application.
The multifunctional electronic skin provided by the invention detects the external force, the speed and the direction by changing the contact resistance among the second conductive films in each plane external force detection module, the conductive path of the whole plane external force detection module and the data comparison of different second conductive paths in one plane external force detection module through the stimulation applied from the outside. Meanwhile, the environment temperature and the change of the environment temperature can be additionally detected through the color change of the temperature sensing color-changing material.
Specifically, based on the same inventive concept, the present invention further provides a planar external force detection method, applied to the multifunctional electronic skin in the above embodiment, the planar external force detection method comprising:
acquiring a first stress signal on a first conductive film on an in-plane force detection layer;
acquiring a plurality of second stress signals on a plurality of second conductive films on the plane external force detection part;
comparing the magnitudes of the plurality of second stress signals, wherein the largest second stress signal is taken as the out-of-plane force value.
The direction and magnitude of the external force are determined by comparing the direction and magnitude of the data signals of the different conductive films on the in-plane force detecting section 2 and the in-plane force detecting layer 3.
For example, a magnetic field detection method is described as an example, and the detection content includes the magnitude and direction of the magnetic field. The detection method comprises the following steps: the magnitude of the magnetic field is determined according to the bending amplitude of the tip sensing part 1; the bending amplitude can be obtained by direct observation and measurement by naked eyes, and can also be obtained by data of the plane external force detection part 2; the magnetic field direction is judged according to the bending direction of the tip sensing part 1, and the bending direction can be obtained by direct observation and measurement of naked eyes and can also be obtained by data of the plane external force detection part 2; the data of the plane external force detection part 2 is processed and analyzed by the integrated processor, and the conclusion is drawn by comparing the corresponding conditions of the established data model or the existing data.
In addition, the detection of external force such as wind force and water flow can be detected, similarly, the fluctuation of data signals of different sensing layers on the plane external force detection part 2 and the plane internal force detection layer 3 is compared, and the type of the plane external force can be judged according to the condition corresponding to the established data model or the existing data.
In an embodiment of the present invention, the direction and magnitude of the out-of-plane force can be determined by comparing the magnitude of the data signal on different second conductive films in the out-of-plane force detection portion 2, wherein the out-of-plane force has various stimuli, including water flow, wind, magnetic field, and the like. In one embodiment of the present invention, as shown in fig. 6, the planar external force sensing layer (i.e. the plurality of second conductive thin films) and the conductive paths are distributed, when a stimulus is applied, the region ii is the maximum signal value, the region vi is the negative maximum signal value, and the signals in the regions i and iii, viii and IV, vii and V are the same, the external force direction is determined to be in the direction vi; if the area II is the maximum signal value, the area VI is the negative maximum signal value, and the area I is different from the area III, the area VIII, the area IV, the area VII and the area V, the direction of the external force is judged to be approximately towards the direction VI, the difference values are compared, and the maximum signal value and the direction of the external force after calibration are obtained by inputting the difference values into a data model tested at the early stage; the magnitude of the external force is the maximum signal value or the force value corresponding to the maximum signal value after calibration.
Collecting data signals on a plurality of second conductive films on the plane external force detection part 2 within a preset time period; and data signals on different first conductive films on the in-plane force detection layer 3, and the type of the external plane force can be judged by comparing the corresponding conditions of the established data model or the existing data according to the fluctuation type and the fluctuation size of the data signals, wherein the data model is a relational model comprising the external plane force, the fluctuation type and the fluctuation size. Specifically, in one embodiment of the present invention, the humidity sensing layer as shown in fig. 8 and the planar external force sensing layer and the conductive paths as described in fig. 6 are distributed.
Under a natural environment, if the signal value of the humidity sensing layer is in a high humidity range and the maximum signal value area is unchanged, oscillation with lower frequency occurs in the signal value area, and then the electronic skin can be judged to be in a laminar flow area; if the maximum signal value area is in the adjacent 2-3 areas and the signal value in the area generates oscillation with higher frequency, the electronic skin can be judged to be in the transitional flow area; if the maximum signal value area is not constant in swing and the signal value changes in the area and generates large-frequency and large-amplitude oscillation, the electronic skin can be judged to be in a turbulent flow area. Under the natural environment, if the signal value of the humidity sensing layer is in a low humidity range, and the change of the area condition of the maximum signal value is the same as the above condition, the influence of wind on the electronic skin can be judged. If the signal value of the humidity sensing layer is in a low humidity range, and the signal in the area with the maximum signal value is stable and remains unchanged, the influence of the magnetic field on the electronic skin can be judged.
Based on the same inventive concept, the present invention also provides a method for manufacturing a multifunctional electronic skin, for manufacturing and forming the multifunctional electronic skin described in the above embodiments, the manufacturing method includes:
s1: forming a first flexible substrate and a plurality of second flexible substrates, wherein the plurality of second flexible substrates are positioned on the surface of the first flexible substrate and are raised relative to the first flexible substrate, and the second flexible substrates are horn-shaped and retract along the direction away from the first flexible substrate;
in this embodiment, a specific method of forming the first flexible substrate and the plurality of second flexible substrates is not limited, and alternatively, a prepolymer is formed into the first flexible substrate and the second flexible substrate by using a mold or by using a 3D printing method.
S2: carrying out oxygen plasma treatment on areas outside a plurality of second flexible substrates on the first flexible substrate;
s3: forming a first conductive film on a plurality of regions outside a second flexible substrate on the first flexible substrate, and forming a plurality of second conductive films insulated and separated from each other on each second flexible substrate;
specifically, a linear conductive substance dispersion liquid is spin-coated or spray-coated on a plurality of areas outside a second flexible substrate on the first flexible substrate and on the second flexible substrate, wherein the linear conductive substance dispersion liquid is a solution of a linear conductive substance dispersed in an organic solvent or a blended solution of ethanol and acetone;
or dispersing the linear conductive substance modified by the carboxylic acid hydrophilic functional group in plasma water; and then dropping the plasma water on the areas outside the plurality of second flexible substrates on the first flexible substrate and on the second flexible substrates to form a first conductive film and a second conductive film.
S4: forming a first conductive path and a second conductive path on the first flexible substrate in regions outside the plurality of second flexible substrates, wherein the first conductive path is electrically connected with the first conductive film, and the second conductive path is electrically connected with the second conductive film;
in this embodiment, the first conductive path and the second conductive path may be formed by electron beam, magnetron sputtering, or vapor deposition.
In addition, when the in-plane force detection layer further includes a humidity sensing layer, the method may further include:
forming composite films on the first flexible substrate subjected to oxygen plasma treatment in areas outside the plurality of second flexible substrates;
the composite film comprises: the composite material comprises a plurality of polyimide layers and a plurality of multi-wall carbon nanotubes, wherein the polyimide layers and the multi-wall carbon nanotubes are alternately stacked.
S5: and forming a tip sensing part at one end of the second flexible substrate, which faces away from the first flexible substrate.
The tip sensing portion is formed using a prepolymer for a combination mold in this embodiment.
The method for manufacturing the multifunctional electronic skin provided by the embodiment of the invention is used for forming the multifunctional electronic skin, so that the plane internal force detection can be realized, and the plane external force detection can be realized at the same time. The multifunctional electronic skin provided by the invention has the advantages of simple structure, low preparation and operation cost, industrial production and capability of monitoring the frequency and the size of external wind power, water flow and magnetic field according to the output electrical signals, thereby being conveniently used for environment perception and evaluation.
It should be noted that, in the present specification, the embodiments are all described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments may be referred to each other.
It is further noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that an article or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such article or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in an article or device that comprises the element.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. A multifunctional electronic skin, comprising:
an in-plane force detection layer (3) for detecting an in-plane force, the in-plane force detection layer (3) comprising a first surface and a second surface arranged opposite to each other;
the in-plane force detection layer (3) comprises a first flexible substrate, a first conductive film formed on the first flexible substrate and a first conductive path, wherein the first conductive path is used for transmitting a first stress signal on the first conductive film to a data processing module for data processing;
the plane external force detection modules are positioned on the first surface and are protruded relative to the first surface, and the plane external force detection modules are used for sensing and detecting plane external force;
every plane external force detects the module and includes: a tip sensing unit (1) and a plane external force detection unit (2);
the plane external force detection part (2) is positioned on the first surface of the plane internal force detection layer (3) and is protruded relative to the plane internal force detection layer (3);
the tip sensing part (1) is positioned on one side, away from the in-plane force detection layer (3), of the plane external force detection part (2);
plane external force detection portion (2) are the axisymmetric structure, its symmetry axis with first surface is perpendicular, plane external force detection portion (2) include: the flexible printed circuit board comprises a second flexible substrate, a plurality of separated second conductive films and second conductive paths which are electrically connected with the second conductive films in a one-to-one correspondence mode;
the second flexible substrate is in a horn shape which is expanded from the tip sensing part (1) to the in-plane force detection layer (3);
the second conductive film is arranged on the surface, away from the in-plane force detection layer (3), of the second flexible substrate;
the second conductive path is used for transmitting a second stress signal on the second conductive film to the data processing module for data processing.
2. Multifunctional electronic skin according to claim 1, characterized in that the tip sensing part (1) is a structure arranged perpendicular to the first surface.
3. The multifunctional electronic skin according to claim 1, wherein the tip sensing part (1) comprises a structure divided into a plurality of sections, wherein one section is made of thermochromic material; the other section is made of a magnetorheological elastomer.
4. The multifunctional electronic skin according to claim 1, wherein the in-plane force detection layer surface is further provided with a humidity sensitive layer.
5. The multifunctional electronic skin according to claim 1, wherein the first conductive film and the second conductive film are both films formed by attaching linear conductive substances onto a flexible substrate, and the linear conductive substances comprise carbon nanotubes, graphene or nanowires;
the material of the nano-wire comprises at least one or a mixture of silver, gold, copper, platinum and nickel.
6. The multifunctional electronic skin according to claim 1, wherein said second flexible substrate is formed by a plurality of triangular flat patches, said second conductive film is triangular;
or, the second flexible substrate is a conical side surface, and the second conductive film is fan-shaped.
7. The multifunctional electronic skin according to claim 1, wherein the first flexible substrate and the second flexible substrate are both made of silicone.
8. A planar external force detection method applied to the multifunctional electronic skin of any one of claims 1 to 7, the planar external force detection method comprising:
acquiring a first stress signal on a first conductive film on an in-plane force detection layer;
acquiring a plurality of second stress signals on a plurality of second conductive films on the plane external force detection part;
comparing the magnitudes of the plurality of second stress signals, wherein the largest second stress signal is taken as the out-of-plane force value;
collecting the first stress signal and the plurality of second stress signals in a preset time period, and judging the fluctuation types and the fluctuation sizes of the first stress signal and the plurality of second stress signals;
and judging the type of the plane external force according to a pre-established data model, wherein the data model is a relation model of the plane external force, the fluctuation type and the fluctuation size.
9. A method for manufacturing multifunctional electronic skin, which is used for manufacturing and forming the multifunctional electronic skin of any one of claims 1-7, the manufacturing method comprising:
forming a first flexible substrate and a plurality of second flexible substrates, wherein the plurality of second flexible substrates are positioned on the surface of the first flexible substrate and are raised relative to the first flexible substrate, and the second flexible substrates are horn-shaped and retract along the direction away from the first flexible substrate;
carrying out oxygen plasma treatment on areas outside a plurality of second flexible substrates on the first flexible substrate;
forming a first conductive film on a plurality of regions outside a second flexible substrate on the first flexible substrate, and forming a plurality of second conductive films insulated and separated from each other on each second flexible substrate;
forming a first conductive path and a second conductive path on the first flexible substrate in regions outside the plurality of second flexible substrates, wherein the first conductive path is electrically connected with the first conductive film, and the second conductive path is electrically connected with the second conductive film;
and forming a tip sensing part at one end of the second flexible substrate, which faces away from the first flexible substrate.
10. The method for manufacturing multifunctional electronic skin according to claim 12, wherein the forming a first conductive film on the first flexible substrate in an area outside a plurality of second flexible substrates, and forming a plurality of second conductive films on each of the second flexible substrates, which are insulated and separated from each other, specifically comprises:
spin-coating or spray-coating a linear conductive substance dispersion liquid on a plurality of areas outside a second flexible substrate on the first flexible substrate and on the second flexible substrate, wherein the linear conductive substance dispersion liquid is a solution formed by dispersing a linear conductive substance in an organic solvent or a blended solution of ethanol and acetone;
or,
dispersing a linear conductive substance modified by carboxylic acid hydrophilic functional groups in plasma water;
and then dropping the plasma water on the areas outside the plurality of second flexible substrates on the first flexible substrate and on the second flexible substrate.
CN201910184135.0A 2019-03-12 2019-03-12 A kind of multifunction electronic skin and preparation method thereof, plane external force detection method Pending CN109738097A (en)

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