CN111473895B - Touch sensor - Google Patents
Touch sensor Download PDFInfo
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- CN111473895B CN111473895B CN202010183532.9A CN202010183532A CN111473895B CN 111473895 B CN111473895 B CN 111473895B CN 202010183532 A CN202010183532 A CN 202010183532A CN 111473895 B CN111473895 B CN 111473895B
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- cantilever
- temperature sensing
- tactile sensor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
Abstract
The invention discloses a tactile sensor, comprising: the cantilever platform is fixedly connected with a cantilever, the cantilever comprises an inner cantilever and an outer cantilever, the inner cantilever has conductivity, a plurality of cracks are arranged in the inner cantilever, and the inner cantilever is electrically connected with a stress signal receiving device arranged on the cantilever platform; the inner cantilever and the outer cantilever are fixedly connected, the elastic modulus of the inner cantilever is smaller than that of the outer cantilever, and one end, far away from the inner cantilever, of the outer cantilever is provided with a contact layer. Because the elastic modulus of outer cantilever is high, produces when receiving the stress and deflects, also can concentrate completely to transmit to interior cantilever to slight stress change, and a plurality of fissures in the interior cantilever make interior cantilever just can produce great resistance change when producing little deformation, have promoted touch sensor's perception sensitivity.
Description
Technical Field
The invention relates to the field of touch sensing, in particular to a touch sensor.
Background
With the rapid development of intelligent machines, touch sensing also becomes an important research direction of intelligent machines, and accurate detection of surface textures of an object is a target which is constantly pursued by machine touch sensing.
Thus, there is a need for improvements and enhancements in the art.
Disclosure of Invention
The present invention is directed to provide a touch sensor, which solves the above-mentioned problems of the prior art, and aims to solve the problem of low sensitivity of the touch sensor in the prior art.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows:
a tactile sensor, the tactile sensor comprising: the cantilever platform is fixedly connected with a cantilever, the cantilever comprises an inner cantilever and an outer cantilever, the inner cantilever has conductivity, a plurality of cracks are arranged in the inner cantilever, and the inner cantilever is electrically connected with a stress signal receiving device arranged on the cantilever platform; the inner cantilever and the outer cantilever are fixedly connected, the elastic modulus of the inner cantilever is smaller than that of the outer cantilever, and one end, far away from the inner cantilever, of the outer cantilever is provided with a contact layer.
The tactile sensor of, wherein the contact comprises at least one protrusion, the protrusion being tapered.
The touch sensor, wherein the slits include a plurality of transverse slits and a plurality of vertical slits, and the transverse slits and the vertical slits are staggered.
The crack is located at the center of the inner cantilever, and the elastic modulus of the inner cantilever is gradually increased from inside to outside.
The touch sensor, wherein, the cantilever still includes the transition cantilever, interior cantilever with outer cantilever passes through the transition cantilever is connected, the both ends of transition cantilever respectively with interior cantilever with outer cantilever fixed connection, the elastic modulus of transition cantilever is less than the elastic modulus of outer cantilever just is greater than the elastic modulus of interior cantilever.
The touch sensor is characterized in that a temperature sensing structure is further arranged on the outer cantilever and comprises a support body fixedly connected with the outer cantilever and a temperature sensing layer fixed inside the support body, a temperature signal receiving device is further arranged on the cantilever platform, and the temperature sensing layer is electrically connected with the temperature signal receiving device.
The touch sensor, wherein, the temperature sensing structure still includes the hydrophobic layer, the hydrophobic layer sets up the supporter is kept away from one side of outer cantilever, the material of hydrophobic layer is hydrophobic material.
The temperature sensing layer comprises two films with metal conducting layers, the metal conducting layers of the two films are arranged oppositely, and a space exists between the two films.
The tactile sensor described above, wherein the support is a rigid object.
The tactile sensor, wherein the temperature sensing structure is disposed between the contact layer and the outer cantilever, the contact layer being a rigid object.
Has the advantages that: compared with the prior art, the invention provides a touch sensor, which transmits the stress change generated at the tail end of a cantilever through the cantilever, and is provided with the cantilever comprising an outer cantilever with high elastic modulus and an inner cantilever with low elastic modulus, wherein when the outer cantilever is contacted with an object and is stressed due to the texture of the surface of the object, the stress is transmitted to the inner cantilever, the elastic modulus of the inner cantilever is low and has conductivity, and when the outer cantilever is stressed, the outer cantilever generates bending deformation to generate opening and closing change of cracks in the inner cantilever, so that the inner part of the inner cantilever is divided to generate resistance change, the stress change received by the outer cantilever is converted into an electric signal, and because the elastic modulus of the outer cantilever is high, the deformation is not easy to generate but the deflection when the stress is received, the slight stress change can be transmitted to the inner cantilever in a concentrated and complete manner, and the plurality of cracks in the inner cantilever can generate larger resistance change when the inner cantilever generates slight deformation, the perception sensitivity of the touch sensor is improved.
Drawings
Fig. 1 is a schematic overall structure diagram of a tactile sensor according to the present invention;
FIG. 2 is an enlarged view of another angle at A in FIG. 1;
FIG. 3 is a schematic diagram illustrating the distribution of cracks in the inner cantilever of a tactile sensor according to the present invention;
fig. 4 is a schematic view of an overall structure of a temperature sensing structure in a touch sensor according to the present invention;
fig. 5 is another enlarged view of an angle B in fig. 4.
Detailed Description
In order to make the objects, technical solutions and effects of the present invention clearer and clearer, the present invention is further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1-2, fig. 1 is a schematic overall structure diagram of an embodiment of a tactile sensor provided in the present invention, fig. 2 is an enlarged view of a portion a of fig. 1, and the tactile sensor includes a cantilever platform 100, a cantilever 200 fixedly connected to the cantilever platform 100, and specifically, the cantilever platform 100 may be provided with a cantilever attachment 110, the cantilever attachment 110 is fixed to the cantilever platform 100 by a screw 120, the cantilever connecting frame 110 may also be integrally disposed with the cantilever platform 100, the cantilever 200 is fixedly connected with the cantilever connecting frame 110, the cantilever 200 includes an inner cantilever 210 and an outer cantilever 220, the inner cantilever 210 and the outer cantilever 220 are fixedly connected, one end of the outer cantilever 220, which is far away from the inner cantilever 210, is provided with a contact layer 221, and the contact layer 221 is used for contacting an object to be detected.
The elastic modulus of the outer cantilever 220 is greater than that of the inner cantilever 210, because the elastic modulus of the outer cantilever 220 is greater, the outer cantilever 220 is made of a material with a high elastic modulus, such as polyethylene terephthalate, and the like, the outer cantilever 220 is not easy to deform when being subjected to external stress, and the outer cantilever 220 may be a rigid object; the elastic modulus of the inner cantilever 210 is small, and the inner cantilever 210 is easily deformed when being subjected to external stress, and is a flexible object, the inner cantilever 210 has conductivity, the inner cantilever 210 may be made of a material with a low elastic modulus (e.g. a flexible material such as silica gel), a conductive material (e.g. carbon nanotube) and a curing agent by mixing and curing, a plurality of cracks 211 (as shown in fig. 3) are arranged inside the inner cantilever 210, when the inner cantilever 210 deforms, such as bending or twisting, the plurality of slits 211 open or close along with the deformation of the inner cantilever 210, so as to divide the inside of the inner cantilever 210, such that the resistance of the inner cantilever 210 changes, the cantilever platform 100 is further provided with a stress signal receiving device 130, and the stress signal receiving device 130 is electrically connected to the inner cantilever 210 and receives an electrical signal generated by the inner cantilever 210 due to resistance change.
As shown in fig. 1, when the tactile sensor is used, the contact layer 221 contacts an object 001 to scratch the object 001, when a texture exists on the object 001, the contact layer 221 may jump up and down, the outer cantilever 220 is stressed, and since the outer cantilever 220 has a large elastic modulus and is not easily deformed, the stress applied to the outer cantilever 220 does not deform the outer cantilever 220 such as bending, but deflects, the stress at one end of the contact layer 221 is completely concentrated and transmitted to the other end of the outer cantilever 220, and then transmitted to the inner cantilever 210 fixedly connected to the outer cantilever 220, and the deformation of the inner cantilever 210 after being stressed generates bending or twisting, so that the plurality of cracks 211 in the inner cantilever 210 are opened or closed, and the resistance of the inner cantilever 210 changes, corresponding electric signals are output to the stress signal receiving device 130, and the received electric signals are analyzed and processed, so that the stress condition of the outer cantilever 220 can be obtained, and the surface texture condition of the object contacted by the contact layer 221 can be known.
In a possible implementation manner, in order to make the contact layer 221 more sensitive to the reaction of the surface of the object contacted, the contact layer 221 includes at least one protrusion, and the protrusion may be in a cone shape, that is, the end contacted with the object is a sharp end, and a finer texture can be detected. The elastic modulus of the contact layer 221 is the same as or larger than that of the outer cantilever 220, the contact layer 221 may be a rigid object, that is, the contact layer 221 is not easily deformed when being subjected to external stress, so that when contacting an object, the texture change of the object surface only makes the contact layer 221 jump without deformation to cause partial attraction to be absorbed by deformation.
The outer cantilever 220 may be a long strip shape, so that the stress transmitted to the inner cantilever 210 can be amplified due to the lever effect, and the sensitivity of the touch sensor can be further improved.
As shown in fig. 3, the slit 211 inside the inner cantilever 210 may include a plurality of longitudinal slits 2111 and a plurality of transverse slits 2112, the longitudinal slits 2111 and the transverse slits 2112 are arranged in a staggered manner, and the longitudinal slits 2111 and the transverse slits 2112 are distributed in a three-dimensional manner, relative to the slit arrangement in a single direction, so that the transverse deformation and the longitudinal deformation generated by the inner cantilever 210 may be detected, thereby realizing three-dimensional detection of stress, and determining the direction of the stress more accurately, thereby improving the sensing accuracy of the tactile sensor for the surface problem of the object.
Furthermore, in order to prevent the crack 211 from expanding and affecting the strength of the inner cantilever 210 and damaging the inner cantilever 210 during the use of the tactile sensor, the crack 211 is located at the center of the inner cantilever 210, and the elastic modulus of the inner cantilever 210 gradually increases from inside to outside, that is, the elastic modulus of the outer surface of the inner cantilever 210 is greater than that of the center, and a substance with a high elastic modulus is not easily deformed, so that the part with a high elastic modulus located at the outer surface of the inner cantilever 210 can prevent the crack 211 located at the center of the inner cantilever 210 from further expanding and damaging the inner cantilever 210.
In a possible implementation manner, the cantilever 200 further includes a transition cantilever 230, the inner cantilever 210 and the outer cantilever 220 are connected through the transition cantilever 230, two ends of the transition cantilever 230 are respectively and fixedly connected to the inner cantilever 210 and the outer cantilever 220, and an elastic modulus of the transition cantilever 230 is lower than an elastic modulus of the outer cantilever 220 and is greater than an elastic modulus of the inner cantilever 210, so that an elastic modulus transition portion exists between the connection of the inner cantilever 210 and the connection of the outer cantilever 220, and a situation that the outer cantilever 220 and the inner cantilever 210 are damaged or the connection is broken due to an excessively large difference in elastic modulus between the outer cantilever 220 and the inner cantilever 210 is prevented. Further, the modulus of elasticity of the transition cantilever 230 may gradually increase from the side connected with the inner cantilever 210 to the side connected with the outer cantilever 220, so that the transition of the modulus of elasticity between the inner cantilever 210 and the outer cantilever 220 is smoother.
In a possible embodiment, the tactile sensor provided by the present invention further has a temperature sensing function, specifically, as shown in fig. 1-2, a temperature sensing structure 240 is further disposed on the outer cantilever 220, and the temperature sensing structure 240 may be disposed on the outer cantilever 220 alone or between the contact layer 221 and the outer cantilever 220 (fig. 1-2 shows a case where the temperature sensing structure 240 is disposed between the contact layer 221 and the outer cantilever 220). As shown in fig. 4-5, fig. 4 is a schematic structural diagram of the temperature sensing structure 240, fig. 5 is an enlarged view of a position B in fig. 4, the temperature sensing structure 240 includes a supporting body 241 fixedly connected to the outer cantilever 220 and a temperature sensing layer 242 fixed inside the supporting body 241, as shown in fig. 1, the cantilever platform 100 is further provided with a temperature signal receiving device 140, and the temperature signal receiving device 140 is electrically connected to the temperature sensing layer 242 and receives a signal emitted by the temperature sensing layer 242.
Specifically, the temperature sensing layer 242 may be embedded inside the supporting body 241, or a recess may be provided inside the supporting body 241, and the temperature sensing layer 242 is disposed inside the recess.
In order to enable the tactile sensor to detect the temperature of a wet object or to normally operate in a wet environment, the temperature sensing structure 240 further includes a hydrophobic layer 243, the hydrophobic layer 243 is disposed on a side of the supporting body 241 away from the outer cantilever, that is, the hydrophobic layer 243 encloses the temperature sensing layer 242 inside the supporting body 241, the hydrophobic layer 243 is made of a hydrophobic material, for example, the hydrophobic layer 243 may be formed by mixing and curing epoxy resin, polydimethylsiloxane, silica particles, and the like, and the hydrophobic layer 243 prevents external moisture from entering the inside of the supporting body 241, so that the temperature sensing layer 231 can normally operate in a wet environment.
The temperature sensing layer 242 may be an existing temperature sensor that, in one possible implementation, the temperature sensing layer 242 comprises two films 245, the films 245 having a metallic conductive layer 2451, the metal conductive layers 2451 of the two films 245 are oppositely arranged, and a space exists between the two films 245, so that an electric potential is generated between the two metal conductive layers 2451, when the ambient temperature around the temperature sensing layer changes, the spacing between the films changes, the potential between the metal conductive layers 2451 changes, thereby generating a corresponding signal, the generated signal is transmitted to the temperature signal receiving device 140 electrically connected to the temperature sensing layer 242, the ambient temperature of the temperature sensing layer 242 can be obtained by analyzing the signal generated by the potential change generated by the temperature sensing layer 242, so as to realize the temperature detection by the tactile sensor. The thin films 245 may be polyvinyl chloride thin films, the distance between the thin films 243 may be 100-500 microns, and the metal conductive layer 2451 may be made by plating metal particles (such as gold particles or silver particles) on the thin films, although the above are only examples, and those skilled in the art can select different materials or parameters to make the temperature sensing layer 242 according to the operation principle of the temperature sensing layer 242 described above.
Since the temperature sensing layer 242 detects temperature according to the change of the distance between the thin films 245, it is preferable that the support 241 is a rigid object, so as to prevent the support 241 from deforming due to the stress generated after the touch sensor contacts the object, which affects the distance between the thin films 245 and causes an inaccurate temperature detection result. Likewise, when the temperature sensing structure 240 is disposed between the contact layer 221 and the outer cantilever 220, the contact layer 221 is also preferably a rigid object, which prevents the deformation of the contact layer 221 due to stress variation from affecting the accuracy of the temperature detection result.
In summary, the present embodiment provides a tactile sensor, in which a change in stress generated at a distal end of a cantilever is transmitted through the cantilever, and the cantilever includes an outer cantilever having a high elastic modulus and an inner cantilever having a low elastic modulus, the outer cantilever, when contacting an object, transmits the stress to the inner cantilever when receiving the stress due to a texture on a surface of the object, the inner cantilever has a low elastic modulus and is electrically conductive, and when receiving the stress, the outer cantilever is bent and deformed to generate an opening and closing change in a crack inside the inner cantilever, thereby dividing the inside of the inner cantilever to generate a resistance change, thereby converting the stress change received by the outer cantilever into an electrical signal, and since the elastic modulus of the outer cantilever is high, the change in the stress is not easily deformed but deflected, and can be completely transmitted to the inner cantilever in a concentrated manner even for a slight stress change, and a large resistance change can be generated when the inner cantilever is slightly deformed due to a plurality of cracks inside the inner cantilever, the perception sensitivity of the touch sensor is improved.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.
Claims (9)
1. A tactile sensor, characterized in that the tactile sensor comprises: the cantilever platform is fixedly connected with a cantilever, the cantilever comprises an inner cantilever and an outer cantilever, the inner cantilever has conductivity, a plurality of cracks are arranged in the inner cantilever, and the inner cantilever is electrically connected with a stress signal receiving device arranged on the cantilever platform; the inner cantilever and the outer cantilever are fixedly connected, the elastic modulus of the inner cantilever is smaller than that of the outer cantilever, and a contact layer is arranged at one end, far away from the inner cantilever, of the outer cantilever; still be provided with temperature sensing structure on the outer cantilever, temperature sensing structure include with outer cantilever fixed connection's supporter and fix the inside temperature sensing layer of supporter, still be provided with temperature signal receiving arrangement on the cantilever platform, temperature sensing layer with temperature signal receiving arrangement electricity is connected.
2. A tactile sensor according to claim 1, wherein the contact layer comprises at least one protrusion, the protrusion being tapered.
3. The tactile sensor according to claim 1, wherein the slits comprise a plurality of transverse slits and a plurality of vertical slits, the transverse slits and the vertical slits being staggered.
4. The tactile sensor according to claim 3, wherein the slit is located at a central position of the inner cantilever, and an elastic modulus of the inner cantilever is gradually increased from inside to outside.
5. The tactile sensor according to claim 1, wherein the cantilever further comprises a transition cantilever, the inner cantilever and the outer cantilever are connected by the transition cantilever, both ends of the transition cantilever are fixedly connected with the inner cantilever and the outer cantilever respectively, and the elastic modulus of the transition cantilever is smaller than the elastic modulus of the outer cantilever and larger than the elastic modulus of the inner cantilever.
6. The touch sensor of claim 1, wherein the temperature sensing structure further comprises a hydrophobic layer disposed on a side of the support body away from the outer cantilever, and the hydrophobic layer is made of a hydrophobic material.
7. A tactile sensor according to claim 1, wherein the temperature sensing layer comprises two films with metal conductive layers, the metal conductive layers of the two films being disposed opposite each other with a space therebetween.
8. A tactile sensor according to claim 7, wherein the support is a rigid object.
9. The tactile sensor of claim 7, wherein the temperature sensing structure is disposed between the contact layer and the outer cantilever, the contact layer being a rigid object.
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| CN202010183532.9A CN111473895B (en) | 2020-03-16 | 2020-03-16 | Touch sensor |
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| CN202010183532.9A CN111473895B (en) | 2020-03-16 | 2020-03-16 | Touch sensor |
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| CN111473895B true CN111473895B (en) | 2021-06-29 |
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Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0096156A2 (en) * | 1982-04-06 | 1983-12-21 | Bran & Luebbe Industrie Automation GmbH & Co. | Process for the quasi-hermetic, almost reactionless covering of sensitive physical structures, especially strain gauges |
| EP0290648B1 (en) * | 1987-05-12 | 1992-03-11 | International Business Machines Corporation | Atomic force sensor head for investigating the topography of a surface |
| CN1185494A (en) * | 1996-12-19 | 1998-06-24 | 村田机械株式会社 | Yarn tension testing sensor |
| CN1877277A (en) * | 2005-06-09 | 2006-12-13 | Tdk株式会社 | Micro structure, cantilever, scanning probe microscope and a method of measuring deformation quantity for the fine structure |
| CN101010751A (en) * | 2004-07-08 | 2007-08-01 | 里兰斯坦福初级大学理事会 | Torsional harmonic cantilevers for detection of high frequency force components in atomic force microscopy |
| CN101308051A (en) * | 2008-07-01 | 2008-11-19 | 西安交通大学 | Three-dimensional micro- force silicon micro- sensor |
| CN101957246A (en) * | 2010-07-20 | 2011-01-26 | 清华大学 | Integrated detector for micro-force micro-displacement measurement system |
| CN105628269A (en) * | 2015-12-25 | 2016-06-01 | 湖南师范大学 | Micro force and micro displacement amplification sensor |
| CN107236075A (en) * | 2017-05-31 | 2017-10-10 | 浙江理工大学 | Pressure-sensitive polymer composite foam with hierarchical porous structure and preparation method thereof |
| CN108760102A (en) * | 2018-05-25 | 2018-11-06 | 浙江大学 | A kind of piezoresistance sensor and preparation method thereof with super-elasticity porous structure |
| CN109443580A (en) * | 2018-12-19 | 2019-03-08 | 宁波富德能源有限公司 | A kind of multi-measuring point temperature sensor |
| CN109738097A (en) * | 2019-03-12 | 2019-05-10 | 中国科学技术大学 | A kind of multifunction electronic skin and preparation method thereof, plane external force detection method |
| CN110388998A (en) * | 2019-07-09 | 2019-10-29 | 浙江大学 | A kind of stiffness variable sensor array based on flexible cellular material |
| CN110440957A (en) * | 2019-07-18 | 2019-11-12 | 浙江清华柔性电子技术研究院 | Flexible dielectric body, pliable pressure sensor and its respective preparation method |
-
2020
- 2020-03-16 CN CN202010183532.9A patent/CN111473895B/en active Active
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0096156A2 (en) * | 1982-04-06 | 1983-12-21 | Bran & Luebbe Industrie Automation GmbH & Co. | Process for the quasi-hermetic, almost reactionless covering of sensitive physical structures, especially strain gauges |
| EP0290648B1 (en) * | 1987-05-12 | 1992-03-11 | International Business Machines Corporation | Atomic force sensor head for investigating the topography of a surface |
| CN1185494A (en) * | 1996-12-19 | 1998-06-24 | 村田机械株式会社 | Yarn tension testing sensor |
| CN101010751A (en) * | 2004-07-08 | 2007-08-01 | 里兰斯坦福初级大学理事会 | Torsional harmonic cantilevers for detection of high frequency force components in atomic force microscopy |
| CN1877277A (en) * | 2005-06-09 | 2006-12-13 | Tdk株式会社 | Micro structure, cantilever, scanning probe microscope and a method of measuring deformation quantity for the fine structure |
| CN101308051A (en) * | 2008-07-01 | 2008-11-19 | 西安交通大学 | Three-dimensional micro- force silicon micro- sensor |
| CN101957246A (en) * | 2010-07-20 | 2011-01-26 | 清华大学 | Integrated detector for micro-force micro-displacement measurement system |
| CN105628269A (en) * | 2015-12-25 | 2016-06-01 | 湖南师范大学 | Micro force and micro displacement amplification sensor |
| CN107236075A (en) * | 2017-05-31 | 2017-10-10 | 浙江理工大学 | Pressure-sensitive polymer composite foam with hierarchical porous structure and preparation method thereof |
| CN108760102A (en) * | 2018-05-25 | 2018-11-06 | 浙江大学 | A kind of piezoresistance sensor and preparation method thereof with super-elasticity porous structure |
| CN109443580A (en) * | 2018-12-19 | 2019-03-08 | 宁波富德能源有限公司 | A kind of multi-measuring point temperature sensor |
| CN109738097A (en) * | 2019-03-12 | 2019-05-10 | 中国科学技术大学 | A kind of multifunction electronic skin and preparation method thereof, plane external force detection method |
| CN110388998A (en) * | 2019-07-09 | 2019-10-29 | 浙江大学 | A kind of stiffness variable sensor array based on flexible cellular material |
| CN110440957A (en) * | 2019-07-18 | 2019-11-12 | 浙江清华柔性电子技术研究院 | Flexible dielectric body, pliable pressure sensor and its respective preparation method |
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