CN107843379B - Capacitive pressure sensor with assembled fixed electrode - Google Patents
Capacitive pressure sensor with assembled fixed electrode Download PDFInfo
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- CN107843379B CN107843379B CN201711325860.2A CN201711325860A CN107843379B CN 107843379 B CN107843379 B CN 107843379B CN 201711325860 A CN201711325860 A CN 201711325860A CN 107843379 B CN107843379 B CN 107843379B
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- fixed electrode
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
Abstract
The utility model provides a capacitive pressure sensor of assembled fixed electrode, has solved current capacitive pressure sensor's accessory many, and the gaseous adhesion easily in the ceramic insulator influences vacuum, and nonlinearity is big, and the deformation of movable electrode does not match with the fixed electrode surface shape scheduling problem. The fixed electrode insulator made of sapphire single crystal is fixedly supported at the central position in the clamping ring cavity with the cover by utilizing an elastic positioner, a film movable electrode with a noble metal layer plated on two sides and made of constant elastic metal is pressed between the annular plane at the bottom of the fixed electrode insulator and the annular plane of a support with a pressure guiding port in a supported mode, and the film movable electrode with the noble metal layer plated on two sides is tightly contacted with the fixed electrode insulator by pressing the film movable electrode with the noble metal layer plated on two sides through a three-wave gold-plated pressure spring. The device has the advantages of simple structure, reasonable design, easy manufacture, high production efficiency, reliable use, no need of zeroing for a long time, reduced air suction and air discharge, greatly reduced leakage rate, long-term maintenance of vacuum degree, and remarkable improvement of measurement stability and measurement accuracy.
Description
Technical Field
The application relates to a capacitance pressure sensor for measuring a gaseous medium, in particular to a capacitance pressure sensor with fixed electrodes and supported electrode electrodes which are packaged together in an assembled mode. It is suitable for measuring the minute pressure of gaseous medium, minute absolute pressure (vacuum gauge).
Background
At present, a capacitance pressure sensor based on a parallel plate capacitance principle is an absolute advantage for measuring the tiny pressure of a gas medium, namely the tiny absolute pressure (vacuum gauge), particularly the medium with certain corrosiveness. The MKS company in the united states is the major monopoly of this type of product and is limited to being sold. The MKS company adopts an assembled fixed electrode structure, as shown in fig. 4 to 5, which comprises a thin film movable electrode 14, a fixed electrode 95 ceramic insulator 15, a support 16 with a pressure-introducing port, an upper clamping ring 17 with a shell, a conductive bolt 18, a flat pad 19, a nut 20, a glass seal electrode 21, a conical spring 22, a getter chamber 23, a disk-shaped pressure spring 24, a metal composite tube 25, an upper cover 26, a pressure spring lower gasket 27, a tripod gasket 28, a polyester film layer 29, a measuring electrode 30, a reference electrode 31, a measuring electrode conductive bolt hole 32, a reference electrode conductive bolt hole 33 and the like. The fixed electrode 95 ceramic insulator 15 is in a plane, thick film measuring electrodes 30 and reference electrodes 31 are manufactured on two parallel surfaces by thick film circuit technology, and the fixed electrodes are manufactured by leading the front reference electrodes 31 and the measuring electrodes 30 of the insulator to ohmic contact film layers on the back surfaces by using conductive bolts 18, flat pads 19 and nuts 20; a thin film movable electrode having a thickness of 20 μm (for a vacuum gauge having a measuring range of 0.1 Torr) was produced by using Inconel X-750. The film movable electrode is fixedly supported by clamping and welding two accessories of a movable electrode shell 17 made of the same Inconel X-750 alloy and a support 16 with a pressure guiding port. The fixed electrode 95 ceramic insulator 15 is pressed and sealed on the movable electrode shell 17 by the disc spring 24, the pressure spring lower gasket 27 and the three-foot gasket 28. A certain gap is left between the fixed electrode 95 ceramic insulator 15 and the outer shell, and the fixed electrode 95 ceramic insulator 15 is not necessarily center-symmetrical with respect to the gap. A gap of about 200 μm is left between the thin film movable electrode 14, and the gap is reserved for the thin film movable electrode 14 to be deformed by pressure. An Inconel X-750 superposition area of about 4mm is arranged between the fixed electrode 95 ceramic insulator 15 and the movable film electrode 14. The upper cover 26 of the fixed pressing belleville spring 24 is welded to the movable electrode housing 17. The upper cover 26 is welded with an inner copper and outer stainless steel metal composite pipe 25 for vacuumizing, and when the reference chamber is vacuumized, the pipe is sealed by mechanical pressing to realize sealing; the upper cover 26 is welded with a getter chamber 23 filled with high temperature activated getter; two glass seal electrodes 21 are welded on the upper cover 26, conical springs 22 are respectively fixed on the glass seal electrodes 21, and the reference electrode 31 on the ceramic insulator 15 and the ohmic contact film layer of the measuring electrode 30 are contacted with the fixed electrode 95 by pressure, so that the electric conduction of the capacitor is realized.
The vacuum gauge of MKS has the following problems: because of the assembled structure of the fixed electrode, the fixed electrode and the movable electrode are packaged in a non-contact mode, and the deformation of the fixed electrode and the movable electrode can be changed asymmetrically. This is the main reason why MKS corporation makes the fixed electrode a flat electrode. Because the fixed electrode is a plane electrode, the movable electrode is deformed in a parabolic shape by being pressed and is deformed with the plane fixed electrodeThe non-matching and non-linearity is large, so that the reference electrode 31 and the measuring electrode 30 are made on the flat fixed electrode, namely, the capacitance pressure sensor with the reference capacitance is made. Although the nonlinearity of the measurement capacitance can be corrected by the reference capacitance 31, the circuit is complicated and troublesome, and the portion of the effective area of the fixed electrode for the measurement electrode 30 is reduced due to the mismatch between the deformation of the electrode and the surface shape of the fixed electrode, and the output capacitance variation is small. The main problem is that there is a 4mm overlap region between the fixed electrode and the movable electrode in the longitudinal direction, and the expansion coefficient of Inconel X-750 is about 1 time greater than that of 95 ceramics, and the error generated at + -1 ℃ is about 28 multiplied by 10 -5 For MKS vacuum gauges with nominal resolution up to one ten thousandth, the entire sensor must work at constant temperature; the fixed electrode is plane, the movable electrode is pressed and deformed in a parabolic shape, the curvature of the center of the movable electrode is larger than that of the edge, the movable electrode is used for a deformation interval in an effective range, and the distance between the fixed electrode and the movable electrode under zero voltage is only about 100 microns. The range of the sensor is reduced by more than 50% due to the narrow range. Moreover, the 95 ceramic insulator contains a large amount of gas, so that the adsorption surface is too large; because the structure has more accessories and adopts more than 20 accessories and getters, the preparation process is complex and the production efficiency is low. Besides the large adsorption surface, a large number of gas collecting gaps exist, so that the gas extraction time is too long, and the vacuum degree is not high. In addition, more weld ends and longer weld joints are used, and although the getter is used, the getter is very fast in failure due to the limited dosage, so that the vacuum degree is relatively difficult to maintain, and the long-term stability is poor. Therefore, a zero-point potentiometer is arranged on the product. MKS corporation specifies in the regulations that every time it is formally used, the zero point must be adjusted under high vacuum. This vacuum is the pressure of the minimum resolution of the sensor, and after such high vacuum is reached, zero-point adjustment is performed, and temporary zero-point migration is performed with a circuit. For example, 626-type capacitance absolute pressure sensor with absolute value of 0-15 Pa is required to be 10 -4 Pa down-regulates the zero point. Otherwise, the accuracy of calibration cannot be achieved. This zero-adjustment operation is very time-consuming in application, is cumbersome and sometimes cannot be achieved at all.
The present inventors have devised new products for solving the above problems, such as "parallel plate dry type capacitive pressure sensor" with publication No. CN 105910751A, "electrokinetic plate gold-plated capacitive pressure sensor" with publication No. CN 106225962A, "sapphire insulator fixed electrode capacitive pressure sensor" with publication No. CN 106644187A, "capacitive pressure sensor with transitional weld ring" with publication No. CN 106353014A, "parallel capacitive pressure sensor" with publication No. CN 106289592A, "vertical type electrokinetic electrode capacitive pressure sensor" with publication No. CN 106289593A, "electrode plate gold-plated capacitive pressure sensor" with publication No. CN 106225962A, and the like. Although overcoming the defects of the 626-type capacitance absolute pressure sensor to a certain extent, the minimum measuring range which can be found by us is about 0-15 Pa because the effective electrode diameter of the sensor is 27mm and the thickness of the electrode with the absolute pressure of 15Pa is only 20 mu m, which is not small enough for most vacuum measurement.
Disclosure of Invention
The application aims to provide a capacitance pressure sensor of an assembled fixed electrode, which solves the problems that the existing capacitance pressure sensor has more accessories, gas in a ceramic insulator is easy to adhere, the vacuum degree is influenced, the nonlinearity is large, the deformation of the movable electrode is not matched with the surface shape of the fixed electrode, and the like.
The technical scheme adopted by the application is as follows: the capacitive pressure sensor of the assembled fixed electrode comprises a shell and a support with a pressure leading port, wherein a fixed electrode insulator, a sealing electrode and an electrode are assembled in the shell, and the capacitive pressure sensor is technically characterized in that: the shell adopts a clamping ring with a cover, and the movable electrode adopts a film movable electrode with noble metal layers plated on both sides and made of constant elastic metal; the periphery of a metallized guide hole at the upper part of the fixed electrode insulator manufactured by the sapphire single crystal is provided with an annular ohmic contact conductive layer, the periphery of a parabolic concave surface at the bottom of the fixed electrode insulator is provided with an annular plane supporting a movable electrode, the surface of the parabolic concave surface of the fixed electrode insulator is plated with a conductive film layer, the conductive film layer is communicated with the ohmic contact conductive layer at the upper part through the metallized guide hole of the fixed electrode insulator, and the surface of the conductive film layer is covered with an insulating film layer; the upper surface of a support with a pressure-guiding opening is provided with a parabolic concave surface which is of a symmetrical structure with the bottom of a fixed electrode insulator and an annular plane which depends on a movable electrode, a thin film electrode plated with a noble metal layer on two sides is sealed between a clamping pressure ring with a cover and the support with the pressure-guiding opening in an extreme pressure manner, the fixed electrode insulator is fixedly supported in a cavity of the clamping pressure ring with the cover through an elastic positioner which is inserted in a vertical groove of a cylinder, so that the fixed electrode insulator always keeps a central position, a sealing electrode which is brazed above the clamping pressure ring with the cover by a sapphire insulator is communicated with an ohmic contact conducting layer on the upper part of the fixed electrode insulator by utilizing a gold plating conical spring; a three-wave gold-plated pressure spring is arranged between the upper part of the fixed electrode insulator and the bottom of the upper cover of the clamping pressure ring with the cover, the fixed electrode insulator is bound in the cavity of the clamping pressure ring with the cover by pressing the three-wave gold-plated pressure spring, and the movable thin film electrode with the noble metal layer plated on the two sides is pressed between the annular plane of the bottom of the fixed electrode insulator and the annular plane of the support with the pressure guiding port in a supported manner.
The thin film electrode with the noble metal plating layer on the two sides is a thin film movable electrode with gold plating, ruthenium plating or iridium plating on the two sides.
The elastic positioner is a short pipe with an inclined section at the end part, which is made of plastic deformation materials.
The application has the advantages and positive effects that: the application adopts the film movable electrode with the double-sided noble metal plating layer made of constant elastic metal, and utilizes the elastic positioner to fixedly support the fixed electrode insulator made of the sapphire single crystal which is always kept at the central position in the cavity of the clamping ring with the cover, the fixed electrode insulator is pressed between the annular plane at the bottom of the fixed electrode insulator and the annular plane of the support with the pressure leading port by the three-wave gold plating pressure spring, the film movable electrode with the double-sided noble metal plating layer is tightly contacted with the fixed electrode insulator, so that the capacitance pressure sensor is subject to temperature drift caused by temperature change, only the area of the fixed electrode insulator is slightly changed in the transverse direction caused by temperature change, and the relative distance between the fixed electrode insulator and the film movable electrode with the double-sided noble metal plating layer is unchanged in the longitudinal direction, namely zero.
In addition, after the fixed electrode insulator and the supported electrode are packaged in a pressure-bonding way, the fixed electrode insulator made of sapphire single crystal is equivalent to the pressure applied by a spring on the basis that the thin film electrode with the noble metal layer plated on the two sides is welded and fixedly supported, and the sapphire is tightly contacted with the electrode because of the inherent characteristic of the sapphire, namely the characteristic that the dry friction coefficient can be as small as below 0.02. The metal coating on the electrode plays a role in lubrication, so that the movable electrode is fixedly supported by the sapphire and can be freely displaced. Thus, the paraboloid deformed by the pressure of the movable electrode is always coaxial and symmetrical with the paraboloid on the fixed electrode insulator. Therefore, even if the fixed electrode insulator is assembled, the asymmetric change of the curved surface shape is not caused, and no extra error is generated. This is fundamentally different from the current production of assembled fixed electrodes for MKS in the united states of monopoly vacuum gauge worldwide. Under the condition that the diameter of the electrode is the same as that of the MKS fixed electrode, the capacitance variation of the electrode is far greater than that of MKS, and the electrode can keep the leading position in the world currently.
Because the capacitance pressure sensor has few accessories, besides the sapphire fixed electrode insulator, other accessories adopt gold plating treatment, so that the air suction amount and the air discharge amount are reduced, the number of welded junctions is reduced, the length of the welded joints is reduced, and the leakage rate is greatly reduced. The absolute pressure sensor is made without getter in the reference chamber and the vacuum degree can be maintained for a long time.
In summary, the application solves the problems of the existing capacitive pressure sensor that the fittings are more, the gas in the ceramic insulator is easy to adhere, the vacuum degree is affected, the nonlinearity is large, the deformation of the movable electrode is not matched with the surface shape of the fixed electrode, and the like.
Drawings
The application is further described below with reference to the accompanying drawings.
FIG. 1 is a schematic view of a construction of the present application;
FIG. 2 is an enlarged schematic view of the portion I of FIG. 1;
FIG. 3 is a cross-sectional view taken along line A-A of FIG. 1;
FIG. 4 is a schematic diagram of a prior art capacitive vacuum gauge;
FIG. 5 is a schematic view of a construction of the ceramic insulator of the stationary electrode 95 of FIG. 4.
The serial numbers in the figures illustrate: a film movable electrode with a noble metal layer plated on both sides, a fixed electrode insulator 2, a support with a pressure leading port 3, a clamping compression ring with a cover 4, a three-wave gold-plated compression spring 5, a gold-plated conical compression spring 6, a sealed electrode 7, a metallized guide hole 8, a gas pumping hole when the guide hole is pressed by 9 gauge and absolute pressure, an elastic positioner 10, a conductive film layer 11, an insulating film layer 12, a conductive film layer 13 in ohmic contact, a film movable electrode 14, a fixed electrode 95, a ceramic insulator 15, a ceramic support with a pressure leading port 16, a shell 17, a conductive bolt 18, a flat pad 19, a 20 nut, a glass sealing electrode 21, a conical spring 22, a getter chamber 23, a disc-shaped compression spring 24, a metal composite tube 25, an upper cover 26, a lower compression spring 27, a three-foot pad 28, a polyester film layer 29, a measuring electrode 30, a reference electrode 31, a conductive bolt hole 32 measuring electrode and a conductive bolt hole 33 reference electrode.
Detailed Description
The specific structure of the present application will be described in detail with reference to fig. 1to 5. The capacitive pressure sensor of the assembled fixed electrode comprises a shell, a support 3 with a pressure leading port, a fixed electrode insulator 2, a sealing electrode 7, a movable electrode and other parts which are assembled in the shell. Wherein the shell adopts a clamping ring 4 with a cover, and the movable electrode adopts a film movable electrode 1 with noble metal layers plated on both sides and made of constant elastic metal. The film movable electrode 1 with noble metal plating on both sides can adopt film movable electrodes with gold plating, ruthenium plating or iridium plating on both sides according to actual needs. The periphery of the metallized guide hole 8 at the upper part of the fixed electrode insulator 2 made of sapphire single crystal is provided with an annular ohmic contact conductive layer 13. The outer periphery of the parabolic concave surface at the bottom of the fixed electrode insulator 2 is provided with an annular plane supporting the movable electrode, and the surface of the parabolic concave surface of the fixed electrode insulator 2 is plated with a conductive film layer 11. The conductive film 11 is connected to the upper ohmic contact conductive layer 13 through the metallized via 8 of the fixed electrode insulator 2, and the surface of the conductive film 11 is covered with the insulating film 12. The upper surface of a support 3 with a pressure guiding port is provided with a parabolic concave surface and an annular plane, wherein the parabolic concave surface and the annular plane supports a movable electrode, the structure of the parabolic concave surface and the annular plane supports the movable electrode, the upper surface of the support 3 is symmetrical to the bottom of a fixed electrode insulator 2, and the movable electrode 1 with a noble metal layer plated on the two surfaces is pressed and sealed between a clamping press ring 4 with a cover and the support 3 with the pressure guiding port. The fixed electrode insulator 2 is fixedly supported in the cavity of the clamping ring 4 with the cover through an elastic positioner 10 inserted in the vertical groove of the column body, so that the fixed electrode insulator 2 always keeps a central position. The sealing electrode 7 soldered above the capped clamping ring 4 by a sapphire insulator is communicated with the ohmic contact conductive layer 13 on the upper part of the fixed electrode insulator 2 by a gold-plated conical spring 6. A three-wave gold-plated pressure spring 5 is arranged between the upper part of the fixed electrode insulator 2 and the bottom of the upper cover of the clamping ring 4 with the cover, the fixed electrode insulator 2 is restrained in the cavity of the clamping ring 4 with the cover by pressing the three-wave gold-plated pressure spring 5, and the film movable electrode 1 with the noble metal layer plated on the two sides is pressed between the annular plane of the bottom of the fixed electrode insulator 2 and the annular plane of the support 3 with the pressure guiding port in a supported manner. The elastic positioner 10 can be a short pipe with an inclined section at the end part, which is made of plastic deformation materials such as fluorinated ethylene propylene and the like which are resistant to high temperature and do not bleed under high vacuum.
In this embodiment, the thin film movable electrode 1 using a noble metal layer plated on both sides with gold, ruthenium or iridium is made of a constant elastic metal such as Inconel X-750 alloy. The thickness (according to the measuring range) is about 20-50 μm by isotropic rolling technique. Under the condition of measuring expansion and flattening, a clamping ring 4 with a cover and made of constant elastic metal (the same as the material of the movable electrode) such as Inconel X-750 and the like and a support 3 with a pressure guiding port are clamped by hydraulic pressure, the thin film movable electrode 1 with noble metal layers on the two sides of the measuring expansion is plated, redundant parts of the thin film are cut off, and the fixed support is welded. The surface of the fixed electrode insulator 2 is subjected to strict polishing, and particularly the contact part with the thin film movable electrode 1 with the double-sided noble metal plating layer reaches the roughness below 5A. The clamping ring 4 with the cover is a sealing structure body of a low expansion alloy shell which can be welded with Inconel X-750 alloy and the Ni50 gold-plated sealing electrode 7, and can resist high temperature of 200 ℃ for a long time without air leakage. The metallized guide hole 8 on the fixed electrode insulator 2 is not only used for conducting electricity, but also used as a guide hole during pressure guiding and vacuum pumping. The gauge pressure guide hole on the clamping ring 4 with the cover and the air suction hole 9 under absolute pressure are welded and sealed by an electron beam or a laser beam under high vacuum when the required vacuum degree is reached in the reference cavity. The end of the elastic locator 10 is provided with a short pipe end (in the shape of a syringe needle) with an inclined section, so that the elastic locator is convenient to be inserted in a vertical groove of a cylinder of the fixed electrode insulator 2 in an interference manner, positioning and supporting in the whole temperature adapting region under high and low temperatures are realized, and the fixed electrode insulator 2 is always kept at a central position.
The capacitance pressure sensor of the assembled fixed electrode can be gauge pressure type, or can be used for pumping out the gas in a reference pressure cavity to prepare an absolute pressure sensor (vacuum gauge).
Claims (2)
1. The utility model provides a capacitive pressure sensor of assembled fixed electrode, includes shell and the support of taking the pressure port, assembles fixed electrode insulator and sealed electrode and the movable electrode in the shell, its characterized in that: the shell adopts a clamping ring with a cover, and the movable electrode adopts a film movable electrode with noble metal layers plated on both sides and made of constant elastic metal; the periphery of a metallized guide hole at the upper part of the fixed electrode insulator manufactured by the sapphire single crystal is provided with an annular ohmic contact conductive layer, the periphery of a parabolic concave surface at the bottom of the fixed electrode insulator is provided with an annular plane supporting a movable electrode, the surface of the parabolic concave surface of the fixed electrode insulator is plated with a conductive film layer, the conductive film layer is communicated with the ohmic contact conductive layer at the upper part through the metallized guide hole of the fixed electrode insulator, and the surface of the conductive film layer is covered with an insulating film layer; the upper surface of a support with a pressure-guiding opening is provided with a parabolic concave surface which is of a symmetrical structure with the bottom of a fixed electrode insulator and an annular plane which depends on a movable electrode, a thin film electrode plated with a noble metal layer on two sides is sealed between a clamping pressure ring with a cover and the support with the pressure-guiding opening in an extreme pressure manner, the fixed electrode insulator is fixedly supported in a cavity of the clamping pressure ring with the cover through an elastic positioner which is inserted in a vertical groove of a cylinder, so that the fixed electrode insulator always keeps a central position, a sealing electrode which is brazed above the clamping pressure ring with the cover by a sapphire insulator is communicated with an ohmic contact conducting layer on the upper part of the fixed electrode insulator by utilizing a gold plating conical spring; a three-wave gold-plated pressure spring is arranged between the upper part of the fixed electrode insulator and the bottom of the upper cover of the clamping pressure ring with the cover, the fixed electrode insulator is bound in the cavity of the clamping pressure ring with the cover by pressing the three-wave gold-plated pressure spring, and the movable thin film electrode with the noble metal layer plated on the two sides is pressed between the annular plane of the bottom of the fixed electrode insulator and the annular plane of the support with the pressure guiding port in a supported manner.
2. The capacitive pressure sensor of the assembled stationary electrode of claim 1, wherein: the elastic positioner is a short pipe with an inclined section at the end part, which is made of plastic deformation materials.
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| CN107843379B true CN107843379B (en) | 2023-09-22 |
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| CN109115392B (en) * | 2018-10-18 | 2023-11-10 | 沈阳市传感技术研究所 | Electrode suspension type capacitance pressure sensor adopting assembled fixed electrode |
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