CN107144938B - Device for centering infrared lens group at low temperature - Google Patents
Device for centering infrared lens group at low temperature Download PDFInfo
- Publication number
- CN107144938B CN107144938B CN201710388013.4A CN201710388013A CN107144938B CN 107144938 B CN107144938 B CN 107144938B CN 201710388013 A CN201710388013 A CN 201710388013A CN 107144938 B CN107144938 B CN 107144938B
- Authority
- CN
- China
- Prior art keywords
- frame
- mounting
- hole
- heat insulation
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/003—Alignment of optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/007—Pressure-resistant sight glasses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/028—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
Abstract
The invention discloses a device for centering an infrared lens group at low temperature, which comprises a shell base, a cold transmission copper cavity, a liquid storage liner, a strain adjusting frame, a mounting cap, a micrometer nut, a magnet, a lens group tube seat, a transition mounting block, an air exhaust interface, a lead interface and a light transmission window. The cavity body composed of the outer shell base, the cold transmission copper cavity, the liquid storage liner and the mounting cap provides a low-temperature vacuum environment for the adjusted lens group. Magnets are placed on the strain adjusting frame and the outer portion of the shell, the millnuts outside the adjusting device drive the lens to be centered and finely adjusted by repulsive force generated by the change of the distance between the magnets. And after centering, performing spot welding fixing on the lens fixing edge and the lens group shell by using a laser welding machine to finish the centering operation of the lens group at low temperature. The invention solves the problem of centering adjustment of the infrared lens group at low temperature and improves the centering assembly and calibration precision.
Description
Technical Field
The invention relates to an infrared detector assembly packaging technology and an infrared lens set low-temperature optical centering technology, in particular to an infrared lens set centering, assembling and correcting device and an assembling and correcting method for working at a liquid nitrogen temperature zone, which are suitable for centering and adjusting operation of an infrared lens set for an infrared detector assembly at a low temperature.
Background
The infrared detector component preparation technology has important significance in the field of aerospace and aviation infrared. With the expansion of the wavelength to the long wave and the improvement of the detection sensitivity, the infrared detector can work only at the deep low temperature, so that the infrared detector is mostly formed into an infrared detector dewar component by adopting dewar packaging during the application. In the development direction of infrared detector assembly packaging technology, one trend is towards low-temperature rear optical path integrated packaging. The development of the low-temperature rear optical path integrated package is firstly because some long-wave interference detectors require that the rear optical lens must work in a deep low-temperature environment, and in addition, when the lens is close to the detector, the size of the optical system can be reduced, especially for an F # smaller optical system, and the way of packaging the optical lens at the low-temperature end is beneficial to the stray light suppression of the whole optical system. However, the lens group needs to be integrated into the assembly, and the centering accuracy of ten microns or even several microns is required, and meanwhile, the requirement of the centering accuracy at low temperature is also met, which brings about the problem of high-accuracy centering during the assembly of the lenses of the infrared lens group working at low temperature. For a lens group working at low temperature, the conventional method is to perform centering operation between lenses at normal temperature and then apply the lens group at low temperature. Due to the influence of assembly stress and expansion and contraction of the lens structure, the centering precision at normal temperature is inevitably inaccurate and the deviation cannot be measured at low temperature. In the traditional infrared lens group preparation, one method is to realize the control of the centering precision by controlling the tolerance fit of parts and repeated assembly measurement, and not only is the processing precision requirement of each part extremely high, but also the processing and preparation cost, the subsequent inspection and the assembly and preparation cost are high; in addition, a method for centering and adjusting an infrared lens by using a dual optical path measuring instrument is described in a patent "an infrared lens adjusting method" (publication No. CN 102998767A). However, the two methods cannot realize the centering operation of the lens group at low temperature, and therefore, the problems of misalignment and non-measurable deviation of the centering precision of the lens group in low-temperature use cannot be solved. Aiming at the problem of low-temperature assembly and centering among lenses of the infrared lens group, an efficient and feasible solution needs to be explored.
Disclosure of Invention
The invention aims to provide a low-temperature optical centering and assembling and correcting device of an infrared lens group for an infrared detector assembly, which is suitable for centering and assembling and correcting the infrared lens group for the low-temperature infrared detector assembly at low temperature. The invention solves the problem of assembly and calibration of the infrared lens group at low temperature and improves the centering assembly and calibration precision.
The purpose of the invention is realized by the following steps: the device for centering the infrared lens group at low temperature is shown in the attached drawing 1 and mainly comprises a shell base 1, an activated carbon box 2, a cold transmission copper cavity 3, a liquid storage liner 4, a heat insulation flange 5, a strain adjusting frame 6, a mounting cap 7, a micrometer nut frame 8, a magnet 9, an upper side light-transmitting window 10, an auxiliary fixing frame 11, a rough adjusting screw 12, a transition mounting block 14, an air extraction interface 15, a lead interface 16, activated carbon 17 and a lower side light-transmitting window 19.
The shell base 1 is of a cylindrical structure, is made of stainless steel, has the thickness of 1.5-3 mm and the height of 60-70 mm, is provided with a fixing hole 102 at the outer side of the bottom, is provided with a base sealing ring groove 103 and a base mounting hole 104 at the upper part, is provided with an air suction interface mounting hole 105 and a lead interface mounting hole 106 at one side of the barrel wall, and is provided with a lower side window mounting hole 107 in the middle of the bottom, as shown in fig. 2.
The activated carbon box 2 is of a circular ring structure, is made of aluminum alloy, has the wall thickness of 1mm-2mm and the height of 15mm-20mm, is provided with air holes 201 which are uniformly distributed at the bottom, and is provided with a fixed internal thread 202 for installing the activated carbon box 2 in the middle, as shown in fig. 3.
The cold transfer copper cavity 3 is of a circular ring structure, is made of oxygen-free copper and is 40mm-60mm high, the middle of the cold transfer copper cavity is a light transmission cavity 301, and the upper end of the cold transfer copper cavity is provided with a transition block fixing screw hole 302 as shown in fig. 4.
The liquid storage liner 4 is of a thin-wall barrel structure, is made of stainless steel, has a wall thickness of 0.2mm-0.3mm and a thin wall height of 40mm-50mm, has a lower end provided with a fixed external thread 401 for mounting the activated carbon box 2, a welding convex edge 402 at the top end and a copper cavity guide hole 403 in the middle, and is shown in fig. 5.
The heat insulation flange 5 is a disc-shaped part made of stainless steel, a strain frame mounting screw hole 501, a shell base mounting screw hole 502, a mounting cap mounting screw hole 503 and a heat insulation air guide groove 504 are respectively arranged on the flange surface of the heat insulation flange, a liner welding convex edge 505 protrudes from the periphery of the middle part, a copper cavity through hole 506 is formed in the middle of the flange, a liquid nitrogen injection hole 507 is arranged on one side of the heat insulation flange 5, the wall thickness of a thin-wall heat insulation ring 508 ranges from 0.15mm to 0.2mm, and the wall thickness height ranges from 15mm to 20mm, as shown in fig. 6 and 7.
The strain adjusting frame 6 is of an upper layer and a lower layer of circular ring structures, the material is stainless steel, the diameter of the strain connecting rod 602 is 0.5mm-2mm, the length of the strain connecting rod is 25mm-30mm, a heat insulation boss 601 with the height of 3mm-5mm is arranged on the lower end face of the strain adjusting frame 6, and an auxiliary frame fixing screw hole 603 is arranged on the upper end face of the strain adjusting frame 6, as shown in fig. 8.
The mounting cap 7 is of an inverted barrel structure, is made of stainless steel, and has a wall thickness of 2-3 mm and a height of 40-60 mm. The bottom is provided with a mounting cap seal ring groove 702 and a mounting cap mounting hole 703, the periphery of the top is provided with a micrometer nut frame mounting screw hole 704, and the middle of the top is provided with an upper side window mounting hole 705, as shown in fig. 9.
The micrometer nut frame 8 is a disk structure with the thickness of 5mm-10mm, the material is aluminum alloy, the micrometer nuts 801 are arranged around the micrometer nut frame 8, the top of the micrometer nut frame 8 is provided with nut frame fixing holes 802, and micrometer nut fixing columns 804 are arranged inside the micrometer nut fixing holes 803, as shown in fig. 9.
The auxiliary fixing frame 11 is a circular disc belt grabbing structure made of stainless steel and 1mm-2mm thick, an auxiliary frame mounting hole 1101 is formed in the upper portion, and an auxiliary frame top foot 1102 structure is formed in the bottom portion, as shown in fig. 8.
The transitional mounting block 14 is of a wafer structure, is made of oxygen-free copper and is 2mm-5mm thick, a pipe seat fixing hole 1401 is formed in the bottom of the transitional mounting block 14, a light through hole 1402 is formed in the middle of the transitional mounting block, a transitional block fixing hole 1403 is formed in the outer side of the transitional mounting block, and a pipe seat guide step 1404 is formed on the circumferential protruding edge of the upper portion of the transitional mounting block, as shown in fig. 11.
The upper side light-transmitting window 10 and the lower side light-transmitting window 19 are of light-transmitting wafer structures, the diameter is 20mm-40mm, the thickness is 1mm-3mm, and the materials are K7 glass.
The air exhaust interface 15 and the lead interface 16 are welded on the side surface of the casing base 1, and the lower side light-transmitting window 19 is glued on the lower end surface of the casing base 1. Stock solution inner bag 4 and thermal-insulated flange 5 welding together, pass cold copper chamber 3 and pass thermal-insulated flange 5 and install on stock solution inner bag 4, thermal-insulated flange 5 with pass cold copper chamber 3 welding together, on stock solution inner bag 4 with pass cold copper chamber 3 welding together. The activated carbon 17 is put into the activated carbon box 2, and then the activated carbon box 2 is fixed with the liquid storage liner 4 in a threaded manner. The upper end of the housing base 1 and the heat insulation flange 5 are fixed together in a sealing manner. The transitional mounting block 14 and the cold-conducting copper cavity 3 are fixedly mounted through screws, and the temperature-measuring platinum resistor 18 is glued to the side face of the transitional mounting block 14. The S poles of the four magnets 9 are fixed around the top end of the strain adjusting frame 6 in a glued joint mode, and the auxiliary fixing frame 11 is arranged on the strain adjusting frame 6. The upper side light-transmitting window 10 is hermetically glued at the upper end of the mounting cap 7, the four thousandths of nuts 24 are mounted on the thousandths of nut frame 8, the S poles of the four magnets 9 are glued on the four thousandths of nuts 24, and the thousandths of nut frame 8 and the thousandths of nut frame on the mounting cap 7 are fixed through screws. The strain adjustment frame 6 provided with the auxiliary fixing frame 11 is placed on the heat insulation flange 5, and the auxiliary fixing frame 11 is pressed on the upper end of the strain adjustment frame. The four coarse adjusting screws 12 respectively support against the auxiliary fixing frame 11. The magnets 9 of the micrometer nut frame 8 respectively correspond to the magnets 9 on the strain adjusting frame 6, and the mounting cap 7 and the heat insulation flange 5 are fixed through screws. The above completes an apparatus for centering an infrared lens group at low temperature, as shown in fig. 1.
When the lens group is centered and adjusted, a lens group tube seat 13 provided with a secondary mirror 23 and a secondary mirror fixing ring 21 is fixed on a transitional mounting block 14, the device is vacuumized through an air suction interface 15, and the vacuum is higher than 1.0 multiplied by 10 -3 Pa. And (3) continuously injecting a proper amount of liquid nitrogen into the liquid nitrogen injection hole 507, measuring the resistance of a pin which is connected with the temperature measurement platinum resistor 18 on the lead interface 16, sealing the air exhaust interface 15 airtight after the resistance value shown by the temperature measurement platinum resistor 18 is stable, and keeping the vacuum of the activated carbon 17 in the device through low-temperature air suction. The center of the lens group tube seat 13 is adjusted to be consistent with that of the double-light-path equipment, then 4 micrometer nuts 24 are respectively adjusted, the auxiliary fixing frame 11 is driven to enable the secondary mirror fixing ring 21 to generate corresponding displacement through homopolar repulsion force between magnets, and centering operation of the secondary mirror 23 and the lens group tube seat 13 is completed. The device is taken down from the double-optical-path equipment, and the secondary mirror fixing ring 21 is subjected to circumferential multi-point laser welding fixation through the upper light-transmitting window 10. The mounting cap 7 and the auxiliary fixing frame 11 are removed, the main mirror fixing ring 20 with the main mirror 22 is placed at the top of the lens group tube seat 13, four rough adjusting screws 12 are screwed, and then the mounting cap 7 is hermetically fixed on the heat insulation flange 5. The center of the centering adjustment platform of the dual-optical-path adjustment device is consistent with the center of the secondary mirror 23, and then the corresponding 4 millesimal nuts 24 are respectively adjusted to complete the centering operation of the primary mirror 22 and the secondary mirror 23. The apparatus is removed from the dual optical path device, and the main mirror fixing ring 20 is subjected to circumferential multi-point laser welding through the upper light-transmitting window 10, as shown in fig. 13. This achieves centering of the infrared lens group at low temperatures.
The realization method of the invention is as follows:
1. the air exhaust interface 15 is welded on the air exhaust interface hole 105 of the casing base 1 through laser, the lead interface 16 is welded on the lead interface hole 106 of the casing base 1 through laser, and the lower light-transmitting window 18 is hermetically glued on the lower window mounting hole 107 of the casing base 1 through epoxy glue.
2. The welding flange 402 on the liquid storage liner 4 and the liner welding flange 505 on the heat insulation flange 5 are welded in an airtight mode through laser welding, then the cold transfer copper cavity 3 penetrates through the copper cavity through hole 506 on the heat insulation flange 5 to be installed on the copper cavity guide hole 403 on the liquid storage liner 4, and the copper cavity through hole 506 of the heat insulation flange 5 and the copper cavity guide hole 403 of the liquid storage liner 4 are welded in an airtight mode through brazing with the cold transfer copper cavity 3.
3. The activated carbon 17 is placed in the activated carbon box 2, and then the fixed internal thread 202 of the activated carbon box 2 and the fixed external thread 401 of the liquid storage liner 4 are rotatably installed and fixed. The O-shaped sealing ring is placed in the base sealing ring groove 103 of the shell tube seat 1, the heat insulation flange 5 is placed on the upper end face of the shell base 1, and the mounting screw hole 502 of the heat insulation flange 5 is fixed with the base mounting hole 104 on the shell base 1 through a screw.
4. The lens group tube seat 13 provided with the secondary mirror 23 and the secondary mirror fixing ring 21 is nested and arranged in the tube seat guide step 1404, the tube seat fixing hole 1401 of the transitional mounting block 14 and the lens group tube seat 13 are fixedly installed through screws, and finally the transitional block fixing hole 1403 of the transitional mounting block 14 and the transitional block fixing screw hole 302 on the cold transfer copper cavity 3 are fixedly installed through screws.
5. And (3) gluing a temperature-measuring platinum resistor 19 communicated with the lead interface 16 to the side surface of the transitional mounting block 14 by using epoxy glue. The secondary mirror 23 is fixed in the secondary mirror fixing ring 21 by using epoxy glue, the secondary mirror fixing ring 21 to which the secondary mirror 23 is fixed is placed on the secondary mirror fixing ring mounting surface 1302 at the bottom of the lens group tube base 13, and the primary mirror 22 is fixed in the primary mirror fixing ring 20 by using epoxy glue for standby.
6. The S poles of the four magnets 9 are fixed around the top end of the strain adjustment frame 6 by using epoxy glue, and the auxiliary frame mounting holes 1101 of the auxiliary fixing frame 11 and the auxiliary frame fixing screw holes 603 of the strain adjustment frame 6 are fixedly mounted by screws. The upper light-transmitting window 10 is hermetically glued to the upper window mounting hole 705 of the mounting cap 7 using epoxy glue.
7. The four thousandths of nuts 24 and the four thousandths of nut holders 8 are fixed through epoxy glue, the S poles of the four magnets 9 are glued to the four thousandths of nuts 24 through epoxy glue, the nut holder fixing holes 802 of the thousandths of nut holders 8 and the thousandths of nut holder mounting screw holes 704 of the mounting caps 7 are fixed through screws, and the thousandths of nuts 24 are adjusted to the maximum scale.
8. The fixing hole 102 on the base 1 of the device shell is fixed with the centering adjusting platform of the double-light path equipment through a screw, and the center of the centering adjusting platform of the double-light path equipment is adjusted to be consistent with the center of the lens group tube seat 13.
9. The mounting heat insulation boss 601 on the strain adjusting frame 6 provided with the auxiliary fixing frame 11 and the strain frame mounting screw hole 501 on the heat insulation flange 5 are fixedly mounted through screws, and four coarse adjusting screws 12 are screwed to enable the auxiliary frame top foot 1102 to clamp the secondary mirror fixing ring 21.
10. The O-shaped sealing ring 25 is placed in the sealing ring groove 702 of the mounting cap, and the micrometer nut frame 8 is placed at the upper end of the mounting cap 7 and fixed through screws. And finally, fixing the mounting cap mounting hole 703 of the mounting cap 7 and the mounting cap screw hole 503 of the heat insulation flange 5 through screws.
11. The air exhaust interface 15 of the device is vacuumized by a vacuum pump set, and the vacuum degree is required to be higher than 1.0 multiplied by 10 -3 Pa. A proper amount of liquid nitrogen is injected into a liquid nitrogen injection hole 507 of the heat insulation flange 5 by using a liquid nitrogen funnel, a universal meter is used for measuring the resistance of a pin which is connected with the temperature measurement platinum resistor 18 on the lead interface 16, the liquid nitrogen is supplemented in due time, the liquid nitrogen is prevented from being consumed, after the resistance value shown by the temperature measurement platinum resistor 18 is stable, the air suction interface 15 is sealed and airtight, and the vacuum of the device is maintained by using the low-temperature air suction effect of active carbon 17 in the device.
12. Adjusting the double-optical-path equipment, respectively adjusting the corresponding micrometer nuts 24 according to the deviation relation between the secondary mirror 23 displayed by the equipment and the center of the equipment, enabling the distance between the magnet 9 on the micrometer nut 24 and the magnet 9 on the strain adjusting frame 6 to be close, enabling the strain connecting rod 602 of the strain adjusting frame to be stressed and deformed through homopolar repulsion force between the magnets, driving the auxiliary fixing frame 11 to enable the secondary mirror fixing ring 21 to generate corresponding displacement, and finishing the centering operation of the secondary mirror 23 and the lens group tube seat 13.
13. The device is taken down from the double-light-path equipment, each thousandth nut 24 is prevented from being touched, a laser welding machine is used, the secondary mirror gap adjusting seam 2101 is subjected to circumferential multi-point laser welding fixation through the upper light-transmitting window 10, and the liquid nitrogen waiting device is emptied from residual liquid nitrogen in the liquid storage liner 4 to achieve temperature return.
14. The mounting cap 7 and the auxiliary mount 11 are removed, the main mirror fixing ring 20 with the main mirror 22 is placed on the main mirror fixing ring mounting surface 1303 on the top of the lens group barrel base 13, and the four rough adjusting screws 12 are screwed to tighten the main mirror fixing ring 20.
15. Repeating the steps (10) - (12), capturing the center of the secondary mirror 23 by using the lower light path of the dual-light-path equipment through the light-transmitting cavity 301 of the cold-transmitting copper cavity 3, and adjusting the centering adjustment platform of the dual-light-path equipment to complete centering of the secondary mirror 23 and the equipment.
16. And adjusting an upper light path of the double-light-path equipment, capturing the vertex position of the primary mirror 22, and respectively adjusting corresponding thousandths of nuts 801 according to the deviation relation between the vertex position of the primary mirror 22 displayed by the equipment and the center of the equipment to finish the centering operation of the primary mirror 22 and the secondary mirror 23.
17. The device is taken down from the double-optical-path equipment, the dial nuts 801 are prevented from being touched, a laser welding machine is used, the upper light-transmitting window 10 is penetrated to carry out circumferential multi-point laser welding fixing on the main mirror gap adjusting seam 2001, and residual liquid nitrogen waiting device in the liquid storage liner 4 is emptied to return to the temperature.
The alignment, installation and correction of the infrared lens group at low temperature are realized.
The invention has the advantages that:
1, realizing the centering adjustment function of the lens group at low temperature;
2 the fine adjustment frame in the device can be replaced and used according to different lens groups, so that the operation requirements of various lens groups are met;
3 at low temperatures, the deviation between the lenses can be measured by a dual optical path device.
Drawings
FIG. 1 is a structural diagram of a lens low-temperature centering device;
in the figure: 1-housing base; 2-an activated carbon cartridge; 3-cold transfer copper cavity; 4-liquid storage liner; 5, a heat insulation flange; 6-a strain adjustment frame; 7, mounting a cap; 701, installing a cap sealing ring; 8-micrometer nut frame; 9-a magnet; 10-upper side light-transmitting window; 11-auxiliary fixing frame; 12-coarse adjustment screw; 13-lens group tube seat; 14-a transition mounting block; 15-air extraction interface; 16-a lead interface; 17-activated carbon; 18-measuring the temperature of a platinum resistor; 19-lower side light-transmitting window; 24-thousandths of a nut; 25-O-ring seal;
FIG. 2 is a schematic view of a housing base;
in the figure: 102-a fixing hole; 103-base seal ring groove; 104-base mounting holes; 105-suction port mounting holes; 106-lead interface mounting holes; 107-lower window mounting hole;
FIG. 3 is a schematic view of an activated carbon cartridge;
in the figure: 201-air holes; 202-fixing internal threads;
FIG. 4 is a schematic view of a cold transfer copper chamber;
in the figure: 301-light transmissive cavity; 302-transition block fixing screw hole;
FIG. 5 is a schematic view of the reservoir;
in the figure: 401-fixing external threads; 402-welding a convex edge; 403-copper cavity guide hole;
FIG. 6 is a top view of an insulating flange;
in the figure: 501, mounting screw holes on a strain rack; 502-mounting screw holes on the base of the housing; 503-mounting a screw hole on the mounting cap; 504-heat insulation and gas guide groove;
FIG. 7 is a cross-sectional view of an insulating flange;
in the figure: 505-welding a convex edge of the inner container; 506-via hole of copper cavity; 507-liquid nitrogen injection hole; 508-thin-walled thermal insulation ring;
FIG. 8 is a schematic view of the structure of the adjusting bracket;
in the figure: 601, installing a heat insulation boss; 602-a strain link; 603-fixing screw holes on the auxiliary frame; 1101-auxiliary frame mounting holes; 1102-auxiliary frame top leg;
FIG. 9 is a schematic view of the mounting cap;
in the figure: 702-installing a cap seal groove; 703-mounting a cap mounting hole; 704-mounting screw holes on the micrometer nut frame; 705 — upper side window mounting hole; 801-thousandth nut; 802-nut holder fixing holes; 803-micrometer nut fixing hole; 804, fixing a column by using the millnut;
FIG. 10 is a schematic view of a lens barrel holder;
in the figure: 1301, mounting a screw hole; 1302-secondary mirror fixing ring mounting surface; 1303 — mounting surface of fixing ring of main mirror;
FIG. 11 is a schematic view of a transition mounting block;
in the figure: 1401-tube seat fixing hole; 1402-light through hole; 1403-transition block fixing holes; 1404 — a stem guide step;
FIG. 12 is a schematic view of a lens stack block assembly;
in the figure: 21-secondary mirror fixing ring; 2101-secondary mirror gap adjustment seam; 20-a primary mirror fixing ring; 2001-primary mirror gap adjustment slit; 22-primary mirror; 23-secondary mirror;
fig. 13 is a schematic view of the main mirror alignment.
Detailed Description
The following detailed description of embodiments of the invention is provided in conjunction with the appended drawings:
an example is the use of a lens set in a longwave infrared detector package project for center alignment. The lens group is integrated in a Dewar of the detector assembly, and the working temperature is 80K.
1. The preparation method of each part of the invention comprises the following steps:
the material of shell base 1 be the stainless steel, bucket wall thickness is 2mm, highly be 65mm, 8 diameters of bottom outside equipartition are 4.5 mm's fixed orifices 102, there is base seal groove 103 on upper portion, the groove width is 2mm, the groove depth is 1mm, 8 diameters of base mounting hole 104 circumference equipartition 4.5mm unthreaded holes, there are interface mounting hole 105 and lead wire interface mounting hole 106 of bleeding on bucket wall one side, be downside window mounting hole 107 in the middle of the bottom, the diameter is 30mm, as shown in fig. 2.
The activated carbon box 2 is made of aluminum alloy, the wall thickness is 1mm, the height is 17mm, 12 air holes 201 with the diameter of 2mm are uniformly distributed at the bottom, the fixing internal thread 202 is M20, and the length is 9mm, as shown in figure 3.
The material of cold copper chamber 3 that passes is oxygen-free copper, and the diameter is 20mm, and highly is 50mm, and the diameter of middle light-transmitting chamber 301 is 14mm, and transition piece fixed screw 302 is 4M 2 screw holes of circumference, as shown in fig. 4.
The liquid storage liner 4 is made of stainless steel, is 42mm in height and 0.2mm in wall thickness, has M20 as a fixing external thread 401 used for mounting the activated carbon box 2 at the lower end and 9mm in length, has a welding convex edge 402 at the top end protruding out of the outer surface of a thin wall by 0.5mm, and has a middle copper cavity guide hole 403 with an inner diameter of 20mm and a height of 1.5mm as shown in FIG. 5.
The material of thermal-insulated flange 5 be the stainless steel, the diameter is 102mm, height 21mm, strain frame installation screw 501 is 4M 2's screw, shell base installation screw 502 and installation cap installation screw 503 are respectively 8M 4 screw that the circumference was arranged, and the rotation angle between two holes is 8, the diameter of copper chamber via hole 506 is 20mm, the diameter of the liquid nitrogen filling hole 507 of thermal-insulated flange 5 side is 6mm, thin wall heat insulating ring 508 wall thickness is 0.15mm, height is 18mm, as shown in fig. 6 and 7.
The material of the strain adjusting frame 6 is stainless steel, the diameter of the strain connecting rod 602 is 1mm, the length of the strain connecting rod is 30mm, the height of the heat insulation boss 601 arranged on the lower end face of the strain adjusting frame 6 is 3mm, and the auxiliary frame fixing screw holes 603 on the upper end face of the strain adjusting frame 6 are 4M 2 screw holes, as shown in FIG. 8.
The mounting cap 7 is made of stainless steel, the wall thickness is 2mm, the height is 50mm, 8 mounting cap mounting holes 703 with the diameter of 4.2mm are uniformly distributed at the bottom, a mounting cap sealing ring groove 702 with the diameter of 2mm is arranged at the outer side of the bottom, blind holes with 4M 2 micrometer nut frame mounting screw holes 704 are arranged at the top, and the diameter of a window mounting hole 705 is 30mm, as shown in FIG. 9.
The micrometer nut frame 8 is made of aluminum alloy and has a thickness of 6mm, 4 micrometer nuts 24 with an adjusting stroke of 0-20mm are circumferentially and uniformly distributed, and the nut frame fixing holes 802 at the top are 4 through holes with a diameter of 2.2mm, as shown in fig. 9.
The auxiliary fixing frame 11 is made of stainless steel, the thickness is 1.5mm, the length is 38mm, 4 auxiliary frame mounting holes 1101 with the diameter of 2.2mm are arranged at the upper part, and the structure of an auxiliary frame vertex angle 1102 is arranged at the bottom part, as shown in fig. 8.
The transition mounting block 14 is made of oxygen-free copper and is 4mm thick, 4 tube seat fixing holes 1401 with the diameter of 2.2mm are formed in the bottom of the transition mounting block 14, the diameter of the middle light through hole 1402 is 15mm, the outer side transition block fixing holes 1403 are 4 through holes with the diameter of 2.2mm, and the protruding height of the tube seat guide step 1404 is 2mm, as shown in fig. 11.
The upper side light-transmitting window 10 and the lower side light-transmitting window 18 are of light-transmitting wafer structures, the diameter is 30mm, the thickness is 2mm, and the materials are K5 glass.
2. Assembling and using steps:
(1) The air suction interface 15 is welded on an air suction interface hole 105 of the shell base 1 through laser, the lead interface 16 is welded on a lead interface hole 106 of the shell base 1 through laser, the welding power is 0.66kw, and the pulse width is 7ms. The lower light-transmitting window 18 is hermetically bonded to the lower window mounting hole 107 of the housing base 1 using an epoxy adhesive.
(2) The welding flange 402 on the liquid storage liner 4 and the liner welding flange 505 on the heat insulation flange 5 are welded in an airtight mode through laser welding, the cold transfer copper cavity 3 penetrates through the copper cavity through hole 506 on the heat insulation flange 5 to be installed on the copper cavity guide hole 403 on the liquid storage liner 4, the copper cavity through hole 506 of the heat insulation flange 5 and the copper cavity guide hole 403 of the liquid storage liner 4 are welded in an airtight mode with the cold transfer copper cavity 3 through brazing, and the brazing temperature is 1050 ℃.
(3) And placing fourteen grams of activated carbon 17 into the activated carbon box 2 to be tiled, rotatably installing the fixed internal threads 202 of the activated carbon box 2 and the fixed external threads 401 on the liquid storage liner 4, and extruding the activated carbon 17 to be fixed. The O-shaped sealing ring 25 is coated with vacuum grease and then placed in the base sealing ring groove 103 of the shell tube seat 7, the heat insulation flange 5 is placed on the base sealing ring 101, and the mounting screw holes 502 of the heat insulation flange 5 and the base mounting holes 104 on the shell base 1 are fixed through 8M 4 screws.
(4) The lens group tube seat 13 provided with the secondary mirror 23 and the secondary mirror fixing ring 21 is nested in the tube seat guide step 1404, the tube seat fixing hole 1401 of the transitional mounting block 14 and the lens group tube seat 13 are fixedly installed through 4M 2 screws, and finally the transitional block fixing hole 1403 of the transitional mounting block 14 and the transitional block fixing screw hole 302 on the cold transfer copper cavity 3 are fixedly installed through 4M 2 screws.
(5) And (3) gluing a temperature-measuring platinum resistor 19 communicated with the lead interface 16 to the side position of the transitional mounting block 14 by using DW3 type epoxy glue. The secondary mirror 23 is fixed in the secondary mirror fixing ring 21 by using DW3 type epoxy glue, the secondary mirror fixing ring 21 fixed with the secondary mirror 23 is placed on the secondary mirror fixing ring mounting surface 1302 at the bottom of the lens group tube seat 13, and the primary mirror 22 is fixed in the primary mirror fixing ring 20 by using DW3 type epoxy glue for standby.
(6) The south poles of 4 magnets 9 with the diameter of 5mm multiplied by 3mm are fixed around the top end of the strain adjusting frame 6 by using epoxy glue, and the auxiliary frame mounting holes 1101 of the auxiliary fixing frame 11 and the auxiliary frame fixing screw holes 603 are fixedly mounted through 4M 2 screws. The upper light-transmitting window 10 is hermetically bonded to the upper window mounting hole 705 of the mounting cap 7 using DW3 type epoxy.
(7) The four micrometer nuts 24 with the stroke of 0-20mm and 4 micrometer nut fixing holes 803 which are circumferentially arranged on the micrometer nut frame 8 are fixed by DW3 type epoxy glue, then the S poles of 4 magnets 9 with the diameter of 5mm multiplied by 3mm are glued on the top ends of the four micrometer nuts 24 by the epoxy glue, the nut frame fixing holes 802 of the micrometer nut frame 8 and the micrometer nut frame mounting screw holes 704 of the mounting cap 7 are fixed by 4M 2 screws, and the position of each micrometer nut 24 to the maximum stroke of 20mm is adjusted.
(8) The centering adjustment platform of the fixed hole 102 on the base 1 of the device and the double-light-path equipment is fixed through 8M 4 screws, the dial indicator of the double-light-path equipment is aligned to the outer wall of the lens group tube seat 13, the degree change of the dial indicator is smaller than 5um by adjusting the centering adjustment platform, and the centering of the lens group tube seat 13 and the equipment is completed.
(9) The mounting heat insulation boss 601 of the strain adjusting frame 6 provided with the auxiliary fixing frame 11 and the strain frame mounting screw hole 501 on the heat insulation flange 5 are fixedly mounted through 4M 2 screws, and four coarse adjusting screws 12 are screwed to enable the auxiliary frame top foot 1102 to clamp the secondary mirror fixing ring 21.
(10) The O-shaped sealing ring 25 with the inner diameter of 87mm and the diameter of 2mm is placed in the mounting cap sealing ring groove 702, and the micrometer nut bracket 8 is placed at the upper end of the mounting cap 7 and fixed through screws. Magnet 9 on the thousandth nut frame 8 and the corresponding installation of magnet 9 on the regulation frame 6 that meets an emergency, 4 thousandth nut frame 8's on the installation cap 7 magnet 9 and the regulation frame 6 that meets an emergency go up 4 magnet 9 and aim at the installation, will install cap mounting hole 703 and thermal-insulated flange 5 on the installation cap installation screw 503 through 8M 4 fix with screws at last.
(11) Vacuumizing an air exhaust interface 15 of the device by an Agilent vacuum exhaust unit, wherein the vacuum is higher than 5.0 multiplied by 10 -4 And when the temperature is Pa, a liquid nitrogen funnel is used for continuously injecting a proper amount of liquid nitrogen into the liquid nitrogen injection hole 507 of the heat insulation flange 5, the liquid nitrogen injection hole is easy to frost, nitrogen is used for blowing to avoid frosting, and when the resistance value shown by the temperature measurement platinum resistor 18 is 23.6 omega and the temperature is 85K, the vacuum of the device is maintained by virtue of the low-temperature air suction effect of the active carbon 17 in the device.
(12) And adjusting the double-optical-path equipment and capturing the vertex position of the secondary mirror 23, adjusting the deviation between the unadjusted primary mirror 23 and the center of the equipment to 65 mu m, respectively adjusting the corresponding millnut 24, and finally making the deviation between the secondary mirror 23 and the center of the equipment to 1 mu m to finish the centering operation of the secondary mirror 23 and the lens group tube seat 13.
(13) The device is taken down from the double-optical-path equipment, the secondary mirror gap adjusting seam 2101 is subjected to laser welding fixing of 4 points at each position through the upper light-transmitting window 10 by using a laser welding machine to avoid touching each thousandth nut 24, residual liquid nitrogen in the liquid storage liner 4 is emptied, and nitrogen is used for blowing air to the liquid storage liner 4 through the liquid nitrogen injection hole 507 to accelerate the temperature return of the device, as shown in figure 12.
(14) The mounting cap 7 and the auxiliary mount 11 are removed, the main mirror fixing ring 20 with the main mirror 22 is placed on the main mirror fixing ring mounting surface 1303 on the top of the lens group barrel base 13, and the four rough adjustment screws 12 are screwed so that the four rough adjustment screws 12 clamp the main mirror fixing ring 20.
(15) Repeating the steps (10) - (12), capturing the vertex of the secondary mirror 23 by using the lower optical path of the dual-optical-path equipment through the light-transmitting cavity 301 of the cold-transmitting copper cavity 3, adjusting the deviation between the previous secondary mirror 23 and the center of the equipment to be 40 mu m without adjusting, adjusting the corresponding micrometer nuts 801 respectively, and finally enabling the deviation between the secondary mirror 23 and the center of the equipment to be 1 mu m.
(16) The upper optical path of the dual optical path device is adjusted to capture the vertex position of the primary mirror 22, the deviation between the primary mirror 22 and the center of the device is 72 μm before the adjustment, the corresponding millnuts 801 are respectively adjusted, and finally the deviation between the primary mirror 22 and the center of the device is 1 μm, so that the centering operation of the primary mirror 22 and the secondary mirror 23 is completed, as shown in fig. 13.
(17) The device is taken down from the double-optical-path equipment, each millnut 24 is prevented from being touched, a German ROFIN laser welding machine is used, the upper side light-transmitting window 10 is penetrated to carry out laser welding fixing of 4 points of each position in the circumferential direction on the primary mirror gap adjusting seam 2001, residual liquid nitrogen in the liquid storage liner 4 is emptied, and nitrogen is used for blowing the air to the liquid storage liner 4 through the liquid nitrogen injection hole 507 to accelerate the temperature return of the device.
The lens group in a long-wave infrared detector assembly project can be centered, assembled and corrected.
Claims (1)
1. A lens group low-temperature centering device for an infrared detector assembly comprises a shell base (1), an activated carbon box (2), a cold transmission copper cavity (3), a liquid storage inner container (4), a heat insulation flange (5), a strain adjusting frame (6), a mounting cap (7), a micrometer nut frame (8), a magnet (9), an upper side light-transmitting window (10), an auxiliary fixing frame (11), a rough adjusting screw (12), a lens group tube seat (13), a transition mounting block (14), an air extraction interface (15), a lead interface (16), activated carbon (17) and a lower side light-transmitting window (19); the method is characterized in that:
the shell base (1) is of a barrel-shaped structure and made of stainless steel, the thickness of the barrel wall is 1.5-3 mm, the height of the barrel wall is 60-70 mm, the outer side of the bottom of the barrel is provided with a fixing hole (102), the upper part of the barrel wall is provided with a base sealing ring groove (103) and a base mounting hole (104), one side of the barrel wall is provided with an air suction interface mounting hole (105) and a lead interface mounting hole (106), and the middle of the bottom of the barrel wall is provided with a lower side window mounting hole (107);
the activated carbon box (2) is of a circular ring structure, is made of aluminum alloy, has the wall thickness of 1mm-2mm, is provided with air holes (201) which are uniformly distributed at the bottom and have the height of 15mm-20mm, and is provided with a fixed internal thread (202) for installing the activated carbon box (2) in the middle;
the cold transfer copper cavity (3) is of a circular ring structure and made of oxygen-free copper, the middle of the cold transfer copper cavity with the height of 40mm-60mm is a light transmission cavity (301), and the upper end of the cold transfer copper cavity is provided with a transition block fixing screw hole (302);
the liquid storage liner (4) is of a thin-wall barrel structure, is made of stainless steel, has the wall thickness of 0.2-0.3 mm and the thin-wall height of 40-50 mm, is provided with a fixed external thread (401) for installing the activated carbon box (2) at the lower end, a welding convex edge (402) at the top end and a copper cavity guide hole (403) in the middle;
the heat insulation flange (5) is a disc-shaped part made of stainless steel, a strain frame mounting screw hole (501), a shell base mounting screw hole (502), a mounting cap mounting screw hole (503) and a heat insulation and air guide groove (504) are respectively arranged on the flange surface of the heat insulation flange, an inner container welding convex edge (505) is protruded in the circumferential direction of the middle part, a copper cavity through hole (506) is formed in the middle, a liquid nitrogen injection hole (507) is formed in one side of the heat insulation flange (5), the wall thickness of the thin-wall heat insulation ring (508) is 0.15-0.2 mm, and the wall thickness height is 15-20 mm;
the strain adjusting frame (6) is of an upper layer and a lower layer of circular ring structures, the material is stainless steel, the diameter of a strain connecting rod (602) is 0.5-2 mm, the length of the strain connecting rod is 25-30 mm, a mounting heat insulation boss (601) with the height of 3-5 mm is arranged on the lower end face of the strain adjusting frame (6), and an auxiliary frame fixing screw hole (603) is arranged on the upper end face of the strain adjusting frame (6);
the mounting cap (7) is of an inverted barrel structure, is made of stainless steel, has the wall thickness of 2-3 mm and the height of 40-60 mm, is provided with a mounting cap sealing ring groove (702) and a mounting cap mounting hole (703) at the bottom, is provided with micrometer nut frame mounting screw holes (704) at the periphery of the top end, and is provided with an upper side window mounting hole (705) in the middle of the top end;
the micrometer nut frame (8) is of a disc structure with the thickness of 5mm-10mm, the material is aluminum alloy, micrometer nuts (801) are arranged on the periphery of the micrometer nut frame (8), nut frame fixing holes (802) are formed in the top of the micrometer nut frame (8), and micrometer nut fixing columns (804) are arranged inside the micrometer nut fixing holes (803);
the auxiliary fixing frame (11) is of a disc belt grab structure, is made of stainless steel, is 1-2 mm thick, is provided with an auxiliary frame mounting hole (1101) at the upper part and is provided with an auxiliary frame top foot (1102) structure at the bottom;
the transition mounting block (14) is of a wafer structure, is made of oxygen-free copper and has the thickness of 2mm-5mm, a pipe seat fixing hole (1401) is formed in the bottom of the transition mounting block (14), a light through hole (1402) is formed in the middle of the transition mounting block, a transition block fixing hole (1403) is formed in the outer side of the transition mounting block, and a pipe seat guide step (1404) is formed in the circumferential protruding edge of the upper portion of the transition mounting block;
the upper side light-transmitting window (10) and the lower side light-transmitting window (19) are of light-transmitting wafer structures, the diameter is 20-40 mm, the thickness is 1-3 mm, and the materials are K7 glass;
the air exhaust interface (15) and the lead interface (16) are welded on the side surface of the shell base (1), and the lower side light-transmitting window (19) is glued on the lower end surface of the shell base (1); the liquid storage liner (4) is welded with the heat insulation flange (5), the cold transfer copper cavity (3) penetrates through the heat insulation flange (5) to be installed on the liquid storage liner (4), the heat insulation flange (5) is welded with the cold transfer copper cavity (3), and the liquid storage liner (4) is welded with the cold transfer copper cavity (3); the activated carbon (17) is put into the activated carbon box (2), and then the activated carbon box (2) is fixed with the liquid storage liner (4) in a threaded connection manner; the upper end of the shell base (1) is sealed and fixed with the heat insulation flange (5); the transitional mounting block (14) and the cold transfer copper cavity (3) are fixedly mounted through screws, and the temperature measurement platinum resistor (18) is glued to the side face of the transitional mounting block (14); s poles of the four magnets (9) are fixed to the periphery of the top end of the strain adjusting frame (6) in a glued mode, and the auxiliary fixing frame (11) is placed on the strain adjusting frame (6); the upper side light-transmitting window (10) is hermetically bonded at the upper end of the mounting cap (7), four thousandths of nuts (801) are mounted on the thousandth of nut frame (8), S poles of four magnets (9) are bonded on the four thousandths of nuts (801), and the thousandths of nut frame (8) and the thousandths of nut frame on the mounting cap (7) are fixed through screws; the strain adjusting frame (6) provided with the auxiliary fixing frame (11) is placed on the heat insulation flange (5), and the auxiliary fixing frame (11) is pressed at the upper end of the strain adjusting frame; the four coarse adjusting screws (12) respectively support the auxiliary fixing frame (11); magnets (9) of the micrometer nut frame (8) respectively correspond to the magnets (9) on the strain adjusting frame (6), and the mounting cap (7) and the heat insulation flange (5) are fixed through screws.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710388013.4A CN107144938B (en) | 2017-05-27 | 2017-05-27 | Device for centering infrared lens group at low temperature |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710388013.4A CN107144938B (en) | 2017-05-27 | 2017-05-27 | Device for centering infrared lens group at low temperature |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107144938A CN107144938A (en) | 2017-09-08 |
| CN107144938B true CN107144938B (en) | 2022-11-08 |
Family
ID=59779871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710388013.4A Active CN107144938B (en) | 2017-05-27 | 2017-05-27 | Device for centering infrared lens group at low temperature |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107144938B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109683278B (en) * | 2019-01-30 | 2020-11-17 | 杭州电子科技大学 | Adjustable supporting device of large-caliber infrared telescope based on gradient porous structure |
| CN112946852B (en) * | 2021-03-24 | 2023-04-11 | 中国科学院西安光学精密机械研究所 | Primary and secondary mirror system adjustment method |
| CN113985559B (en) * | 2021-10-27 | 2023-08-22 | 河南平原光电有限公司 | Wide-spectrum long-focal-length high-resolution lens and adjustment method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001304564A (en) * | 2000-04-17 | 2001-10-31 | Matsushita Electric Ind Co Ltd | High frequency heating device |
| JP2010197892A (en) * | 2009-02-27 | 2010-09-09 | Hitachi Media Electoronics Co Ltd | Lens drive device and optical pickup device incorporating the same |
| CN102928088A (en) * | 2012-11-01 | 2013-02-13 | 中国科学院上海技术物理研究所 | Poly-lens profound hypothermia infrared detector pipe casing structure packaged in Dewar |
| CN206804968U (en) * | 2017-05-27 | 2017-12-26 | 中国科学院上海技术物理研究所 | For at low temperature to the device of Infrared Lens group centering |
-
2017
- 2017-05-27 CN CN201710388013.4A patent/CN107144938B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001304564A (en) * | 2000-04-17 | 2001-10-31 | Matsushita Electric Ind Co Ltd | High frequency heating device |
| JP2010197892A (en) * | 2009-02-27 | 2010-09-09 | Hitachi Media Electoronics Co Ltd | Lens drive device and optical pickup device incorporating the same |
| CN102928088A (en) * | 2012-11-01 | 2013-02-13 | 中国科学院上海技术物理研究所 | Poly-lens profound hypothermia infrared detector pipe casing structure packaged in Dewar |
| CN206804968U (en) * | 2017-05-27 | 2017-12-26 | 中国科学院上海技术物理研究所 | For at low temperature to the device of Infrared Lens group centering |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107144938A (en) | 2017-09-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107144938B (en) | Device for centering infrared lens group at low temperature | |
| CN201344989Y (en) | An optical lens and lens group | |
| CN102928088B (en) | A kind of poly-lens profound hypothermia infrared detector package structure be encapsulated in Dewar | |
| US9588309B2 (en) | Optical fibre feedthrough assembly | |
| CA2676246C (en) | Transducer for measuring environmental parameters | |
| CN110196476A (en) | In one kind/long wave heavy caliber Infrared Lens flexible support structure | |
| US8429979B2 (en) | Capacitance type pressure sensor | |
| CN108227111A (en) | A kind of method for reducing aspherical heavy caliber hollow reflective mirror adhesive stress | |
| CN210005768U (en) | medium/long wave large caliber infrared lens flexible supporting structure | |
| CN104697697A (en) | High-precision shock-proof pressure gauge | |
| CN102103028A (en) | Method for sealing fiber pressure sensor | |
| CN101571389B (en) | Method for precisely assembling space remote sensing camera body structure | |
| CN107728085B (en) | Sample cavity for material magnetism measurement system | |
| CN206804968U (en) | For at low temperature to the device of Infrared Lens group centering | |
| CN110716274B (en) | Low-stress conductive sealing assembly and adjustment device and method for aviation optical window | |
| CN116380402A (en) | Transient radiation heat flow sensor for high enthalpy expansion wind tunnel and mounting and manufacturing method | |
| CN113753271B (en) | Preposed filter supporting device of space solar telescope | |
| CN113588117B (en) | High-stability radiation temperature measurement miniature probe for turbine disc of aircraft engine | |
| CN105511050B (en) | A kind of speculum elastic center supporting construction | |
| CN113916287A (en) | Temperature and pressure integrated sensor | |
| CN107843379B (en) | Capacitive pressure sensor with assembled fixed electrode | |
| CN207976223U (en) | A kind of infrared temperature sensor | |
| CN106324793B (en) | A kind of small-bore reflecting mirror support structure | |
| US8049898B2 (en) | Transducer for measuring environmental parameters | |
| CN211717608U (en) | Optical fiber acoustic sensor sensing head shell structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |