CN102854751B - Focusing adjustment leveling mechanism of photolithographic machine and leveling mechanism of photolithographic machine - Google Patents
Focusing adjustment leveling mechanism of photolithographic machine and leveling mechanism of photolithographic machine Download PDFInfo
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- CN102854751B CN102854751B CN201110182278.1A CN201110182278A CN102854751B CN 102854751 B CN102854751 B CN 102854751B CN 201110182278 A CN201110182278 A CN 201110182278A CN 102854751 B CN102854751 B CN 102854751B
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Abstract
The invention relates to a focusing adjustment leveling mechanism of photolithographic machine, including: a base; piezoelectric ceramic driver assemblies, including fixedly connected piezoelectric ceramic driver and ball head bearings, the number of the piezoelectric ceramic driver assemblies is three, the piezoelectric ceramic driver is fixed on the base, the three piezoelectric ceramic driver assemblies are configured in a manner of right triangle; a load-bearing stage assembly including a load-bearing stage, the load-bearing stage assembly is set with an arc-shaped groove for holding a first ball head bearing, a strip-shaped for holding a second ball head bearing and a plane boss for holding a third ball head bearing; a tension spring assembly connected with the base and the load-bearing stage for realizing force sealing of the load-bearing stage and the base. The invention has specific position under natural placement state; under the action of driving, the invention has specific movement, thus solving the problem of restricting shortage of existing focusing adjustment leveling mechanism. By adopting kinematic structure, the invention eliminates the redundant degree of freedom in vertical direction of three-point support type leveling mechanism, improves rigidity and stability of the mechanism.
Description
[technical field]
The present invention relates to field of precision instruments, particularly relate to a kind of photo-etching machine focusing levelling gear and litho machine levelling gear.
[background technology]
Litho machine is as the core driving force that promotes integrated circuit development, and the development of integrated circuit has proposed more and more higher requirement to litho machine resolution.But along with the raising of litho machine resolution, the depth of focus of photo-etching machine objective lens is acceleration shortening trend, if actual focal does not reach the depth of focus tolerance limit that photoetching process requires, will have a strong impact on the yield rate of exposure lines quality and integrated circuit.Depth of focus has become and has hindered light projection lithography technology to the key factor of high resolving power development more.In order to make full use of the limited depth of focus of optical system, when exposure, need to focus and leveling to silicon chip.Therefore, accurate, focusing and leveling mechanism is very great to the meaning of light projection lithography efficiently.
At present, the bikini focusing and leveling mechanism using in litho machine is mainly divided into two kinds, and a kind of is flexible hinge chain type supported at three point focusing and leveling mechanism, and another kind is screw type supported at three point focusing and leveling mechanism.Flexible hinge chain type supported at three point focusing and leveling mechanism includes three piezoelectric ceramic actuators that are equilateral triangle configuration, and one end and the base of one of them driver are connected, and the other end and plummer are connected by flexible hinge and base and plummer.This focusing and leveling mechanism has one around the rotational freedom of vertical direction under state of nature, and mechanism is in underconstrained state; But under input state, mechanism has two degree of freedom, the driving of mechanism input number is less than number of degrees of freedom,, mechanism is in owing to determine motion state.Due to the existence around vertical direction rotational freedom, Zhe Shi mechanism reduces greatly in the rigidity of this direction, is easy to cause plummer to tilt, the poor stability of mechanism; In leveling process, in this direction, be easy to relatively rotate, thereby leveling work is brought to uncertainty, cause leveling speed of convergence low, reduced leveling efficiency, and be unfavorable for the maintenance of silicon chip leveling precision.Meanwhile, the design of flexible hinge structure and control complexity in mechanism, processing and manufacturing cost is high.Screw type supported at three point focusing and leveling mechanism includes three groups of motor/leading screw supporting constructions, and is equilateral triangle configuration.Mechanism freedom and about beam analysis show: this levelling gear exists equally underconstrained and owes to determine motion problems, the poor stability of mechanism.In leveling process, plummer likely occurs, around the rotation of vertical direction or the translation in plane, to cause leveling speed of convergence low, has reduced leveling efficiency.Meanwhile, this mechanism only can realize leveling, can not focus, and needs to adopt separately parallelogram flexible hinge structure to focus, and this has increased the size of mechanism at vertical direction greatly, and complex structure is compact not.
[summary of the invention]
Based on this, be necessary to provide a kind of Complete Bind, there is Kinematic determination, low processing cost and meet the photo-etching machine focusing levelling gear of Real-time Focusing leveling requirement.
A photo-etching machine focusing levelling gear, comprising: base; Piezoelectric ceramic actuator assembly, comprise the piezoelectric ceramic actuator and the bulb supporting that are fixedly connected with, the quantity of described piezoelectric ceramic actuator assembly is three, and described piezoelectric ceramic actuator is fixed on described base, three rectangular triangular arrangement of described piezoelectric ceramic actuator assembly; Plummer assembly, comprise plummer, described plummer assembly offers for the deep-slotted chip breaker of accommodating the first bulb supporting, for the strip slot of accommodating the second bulb supporting and the plane boss supporting for accommodating the 3rd bulb, and deep-slotted chip breaker, strip slot and the rectangular triangular arrangement of plane boss; Tension spring component, is fixedly connected with plummer with described base, for realizing the force-closed of plummer and base.
Preferably, described right-angle triangle is isosceles right triangle, and right angle is the corresponding angle of described deep-slotted chip breaker.
Preferably, described deep-slotted chip breaker is taper hole or circular hole, and the cross section of described strip slot is V-arrangement or circular arc, and the groove of strip slot is identical to the right-angle side direction with its place, plane boss is set for accommodating described the 3rd bulb on described plummer.
Preferably, described tension spring component comprises interconnective extension spring and rod assembly, the quantity of described rod assembly is two and is arranged at respectively one end of extension spring, described rod assembly comprises bearing seat, oscillating bearing and thread, described oscillating bearing is located in bearing seat, connect described oscillating bearing and thread, described bearing seat is provided with opening, described thread is connected with described extension spring from described opening projecting shaft bearing, the first rod assembly in described rod assembly is fixedly connected with base, and the second rod assembly is fixedly connected with plummer.
Preferably, described oscillating bearing is a kind of in thrust articulated bearing, angular contact articulated bearing and bulb spherical plain bearing rod end.
Above-mentioned photo-etching machine focusing levelling gear, under natural laying state, 6 degree of freedom of focusing and leveling mechanism plummer are by Complete Bind, and plummer has definite position, has solved thus the underconstrained problem of existing focusing and leveling mechanism.Under the driving of piezoelectric ceramic actuator assembly, the input number of focusing and leveling mechanism equals the number of degrees of freedom, of mechanism, and mechanism has definite motion, and what solved thus existing focusing and leveling mechanism owes to determine motion problems.By adopting kinematic structure, eliminated the redundant degree of freedom of Three-points supporting type levelling gear vertical direction, avoided this degree of freedom to destroy the problem of silicon chip leveling precision, and improved rigidity and the stability of mechanism, there is deformed element little, the feature that environmental suitability is strong; Meanwhile, by kinematics interface, cancel the flexible hinge structure of levelling gear, greatly simplified the Design and manufacture of system, reduced cost.
A kind of photo-etching machine focusing levelling gear is also provided.
A photo-etching machine focusing levelling gear, comprising: base; Piezoelectric ceramic actuator assembly, comprise the piezoelectric ceramic actuator and the bulb supporting that are fixedly connected with, the quantity of described piezoelectric ceramic actuator assembly is three, and described piezoelectric ceramic actuator is fixed on described base, three rectangular triangular arrangement of described piezoelectric ceramic actuator assembly; Plummer assembly, comprises plummer, and described plummer assembly offers the strip slot that is respectively used to accommodating three bulbs supporting; Tension spring component, is fixedly connected with plummer with described base, for realizing the force-closed of plummer and base.
Preferably, the cross section of described strip slot is V-arrangement or circular arc, and it is identical to the right-angle side direction with its place to be positioned at the groove of strip slot of right-angle side.
A kind of litho machine levelling gear is also provided.
A litho machine levelling gear, comprising: base; Piezoelectric ceramic actuator assembly, comprises the piezoelectric ceramic actuator and the bulb supporting that are fixedly connected with, and the quantity of described piezoelectric ceramic actuator assembly is two, and described piezoelectric ceramic actuator is fixed on described base; Bulb pole, comprises pole and the bulb that is fixed on described pole one end, and described pole is fixedly connected with described base; Described two piezoelectric ceramic actuator assemblies and the rectangular triangular arrangement of bulb pole; Plummer assembly, comprise plummer, the platform boss that described plummer assembly is provided with the deep-slotted chip breaker for accommodating described bulb, the strip slot supporting for accommodating the first bulb and supports for accommodating the second bulb, and deep-slotted chip breaker, strip slot and the rectangular triangular arrangement of plane boss; Tension spring component, is fixedly connected with plummer with described base, for realizing the force-closed of plummer and base.
Preferably, described triangle is isosceles right triangle, and right angle is the corresponding angle of described deep-slotted chip breaker.
Preferably, described deep-slotted chip breaker is taper hole or circular hole, and the cross section of described strip slot is V-arrangement or circular arc, and the groove of strip slot is identical to the right-angle side direction with its place.
[accompanying drawing explanation]
Fig. 1 is the structural representation of focusing and leveling mechanism in an embodiment;
Fig. 2 is the left view of the focusing and leveling mechanism in embodiment illustrated in fig. 1;
Fig. 3 is the structural representation of base in an embodiment;
Fig. 4 is the structural representation of piezoelectric ceramic actuator assembly in an embodiment;
Fig. 5 is the structural representation of the bulb pole of piezoelectric ceramic actuator assembly in an embodiment;
Fig. 6 is the structural representation of plummer assembly in an embodiment;
Fig. 7 is the structural representation of plummer in an embodiment;
Fig. 8 is the phantom view of tension spring component.
[embodiment]
For the object of the invention, feature and advantage can more be become apparent, below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail.
Fig. 1 is the structural representation of focusing and leveling mechanism in an embodiment, Fig. 2 is the left view of the focusing and leveling mechanism in embodiment illustrated in fig. 1, focusing and leveling mechanism 100 comprises base 10, piezoelectric ceramic actuator assembly 20, plummer assembly 30 and tension spring component 40, wherein piezoelectric ceramic actuator assembly 20 is connected with base 10, tension spring component 40 is connected with plummer assembly 30 and base 10 respectively, to realize the force-closed of plummer assembly 30 and base 10.
Fig. 3 is the structural representation of base in an embodiment, on base 10, be provided with three through holes, as shown, be respectively through hole 11, through hole 12 and through hole 13, in the present embodiment, three through holes are isosceles right triangle configuration, and wherein through hole 11 is corresponding hole, right angle, and piezoelectric ceramic actuator assembly 20 is connected by these three through holes and base 10 respectively.
Piezoelectric ceramic actuator assembly 20 comprises bulb supporting and piezoelectric ceramic actuator, wherein bulb supporting is connected with piezoelectric ceramic actuator, the quantity of piezoelectric ceramic actuator assembly 20 is three, Fig. 4 is the structural representation of piezoelectric ceramic actuator assembly in an embodiment, and piezoelectric ceramic actuator assembly 20 comprises the piezoelectric ceramic actuator 22 and bulb supporting 21 being fixedly connected with.The structure of three piezoelectric ceramic actuator assemblies is identical, and the structural drawing of two other piezoelectric ceramic actuator assembly does not provide herein.In the present embodiment, three piezoelectric ceramic actuator assemblies 20 are isosceles right triangle configuration, wherein the through hole 11 on the first piezoelectric ceramic actuator and base is connected, through hole 12 on the second piezoelectric ceramic actuator and base is connected, and the through hole 13 on the 3rd piezoelectric ceramic actuator and base is connected.
Fig. 6 is the structural representation of plummer assembly in an embodiment, plummer assembly 30 comprises plummer 31, plummer assembly 30 offers for the deep-slotted chip breaker 32 of accommodating the first bulb supporting with for strip slot 33, the three bulb supportings of accommodating the second bulb supporting and is located on the plane boss 34 of plummer 31.In the present embodiment, deep-slotted chip breaker 32 is taper hole, and strip slot 33 is V-shaped groove.In other embodiments, deep-slotted chip breaker 32 can replace with circular hole, and strip slot 33 is replaceable is arc groove.
Fig. 7 is the structural representation of plummer in an embodiment, is provided with three through holes on plummer 31, is respectively through hole 311, through hole 312 and through hole 313, and three through holes are isosceles right triangle configuration in the present embodiment, and wherein right angle is corresponding is through hole 311.Plummer assembly 30 comprises that the first contact platform, the second contact platform contact platform with the 3rd.After embedding through hole separately, three contact platforms by threaded fastener, are fixed on plummer 31 again.In the present embodiment, be to offer deep-slotted chip breaker 32 on the first contact platform, on the second contact platform, offer strip slot 33, and the groove of strip slot 33 is to along right-angle side direction.
The first bulb supporting of piezoelectric ceramic actuator assembly 20 respectively with plummer assembly 30 on the taper hole of deep-slotted chip breaker 32 to form ball-taper hole secondary, the second bulb supporting contacts with the groove face of strip slot 33 and forms ball-V-shaped groove kinematic pair, the 3rd bulb supporting contacts with the table top of plane boss 34 and forms ball-planar contact pair, under natural laying state, 6 degree of freedom of the plummer 31 of focusing and leveling mechanism, 3 rotational freedoms and 3 translational degree of freedom are by Complete Bind, plummer 31 has definite position, has solved thus the underconstrained problem of existing focusing and leveling mechanism.Under the driving of piezoelectric ceramic actuator assembly 20, the input number of focusing and leveling mechanism equals the number of degrees of freedom, of mechanism, and mechanism has and determines motion, and what solved thus existing focusing and leveling mechanism owes to determine motion problems.
Fig. 8 is the phantom view of tension spring component.Tension spring component 40 comprises extension spring 41, lower thrust articulated bearing 42, step 43, upper thrust articulated bearing 44, top chock 45, upper thread 46 and lower thread 47.In other embodiments, thrust articulated bearing is replaceable is angular contact articulated bearing or bulb spherical plain bearing rod end.In the present embodiment, top chock 45 and the plummer 31 of tension spring component 40 are connected, and step 43 is connected with base 10, in order to realize the force-closed of plummer 31 and base 10.Extension spring 41 is arranged on the middle part of tension spring component, one end is connected with upper thrust articulated bearing 44 by upper thread 46, the other end is connected with lower thrust articulated bearing 42 by lower thread 47, and by upper thread 46 and lower thread 47 regulating spring pulling force, thereby regulate the size to the confining force of plummer 31 and base 10.
Above-mentioned focusing and leveling mechanism 100, by adopting kinematic structure, eliminated the redundant degree of freedom of traditional levelling gear vertical direction, avoided this degree of freedom to destroy the problem of silicon chip leveling precision, and rigidity, stability and the leveling efficiency of mechanism have been improved, there is deformed element little, the strong and feature of environmental suitability; Meanwhile, by kinematics interface, cancel traditional flexible hinge structure, greatly simplified the Design and manufacture of system, reduced cost.
A kind of levelling gear is also provided.The piezoelectric ceramic actuator assembly that is positioned at place, summit, right angle 20 of above-mentioned focusing and leveling mechanism 100 is adopted to the replacement of bulb poles, and other structures are constant, obtain a kind of levelling gear.
As shown in Figure 5, bulb pole 50 comprises pole 51 and is fixed on the bulb 54 of pole 50 one end the structural representation of bulb pole.Bulb pole 50 contacts with the deep-slotted chip breaker 32 of plummer assembly 30 by bulb 54.Bulb pole 50 is connected with base 10 by the through hole 11 on base 10.
Another kind of photo-etching machine focusing levelling gear is also provided, and the key distinction of itself and above-mentioned focusing and leveling mechanism 100 is deep-slotted chip breaker 32 and plane boss 34 all to replace to strip slot 33.
The above embodiment has only expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (10)
1. a photo-etching machine focusing levelling gear, is characterized in that, comprises
Base;
Piezoelectric ceramic actuator assembly, comprise the piezoelectric ceramic actuator and the bulb supporting that are fixedly connected with, the quantity of described piezoelectric ceramic actuator assembly is three, and described piezoelectric ceramic actuator is fixed on described base, three rectangular triangular arrangement of described piezoelectric ceramic actuator assembly;
Plummer assembly, comprise plummer, described plummer assembly is provided with for the deep-slotted chip breaker of accommodating the first bulb supporting, for the strip slot of accommodating the second bulb supporting and the plane boss supporting for accommodating the 3rd bulb, and deep-slotted chip breaker, strip slot and the rectangular triangular arrangement of plane boss;
Tension spring component, is fixedly connected with plummer with described base, for realizing the force-closed of plummer and base.
2. photo-etching machine focusing levelling gear according to claim 1, is characterized in that, described right-angle triangle is isosceles right triangle, and right angle is the corresponding angle of described deep-slotted chip breaker.
3. photo-etching machine focusing levelling gear according to claim 1, it is characterized in that, described deep-slotted chip breaker is taper hole or circular hole, the cross section of described strip slot is V-arrangement or circular arc, and the groove of strip slot is identical to the right-angle side direction with its place, plane boss is set for accommodating described the 3rd bulb on described plummer.
4. photo-etching machine focusing levelling gear according to claim 1, it is characterized in that, described tension spring component comprises interconnective extension spring and rod assembly, the quantity of described rod assembly is two and is arranged at respectively one end of extension spring, described rod assembly comprises bearing seat, oscillating bearing and thread, described oscillating bearing is located in bearing seat, connect described oscillating bearing and thread, described bearing seat is provided with opening, described thread is connected with described extension spring from described opening projecting shaft bearing, the first rod assembly in described rod assembly is fixedly connected with base, the second rod assembly is fixedly connected with plummer.
5. photo-etching machine focusing levelling gear according to claim 4, is characterized in that, described oscillating bearing is a kind of in thrust articulated bearing, angular contact articulated bearing and bulb spherical plain bearing rod end.
6. a photo-etching machine focusing levelling gear, is characterized in that, comprising:
Base;
Piezoelectric ceramic actuator assembly, comprise the piezoelectric ceramic actuator and the bulb supporting that are fixedly connected with, the quantity of described piezoelectric ceramic actuator assembly is three, and described piezoelectric ceramic actuator is fixed on described base, three rectangular triangular arrangement of described piezoelectric ceramic actuator assembly;
Plummer assembly, comprises plummer, and described plummer assembly offers the strip slot that is respectively used to accommodating three bulbs supporting;
Tension spring component, is fixedly connected with plummer with described base, for realizing the force-closed of plummer and base.
7. a photo-etching machine focusing levelling gear according to claim 6, is characterized in that, the cross section of described strip slot is V-arrangement or circular arc.
8. a litho machine levelling gear, is characterized in that, comprises
Base;
Piezoelectric ceramic actuator assembly, comprises the piezoelectric ceramic actuator and the bulb supporting that are fixedly connected with, and the quantity of described piezoelectric ceramic actuator assembly is two, and described piezoelectric ceramic actuator is fixed on described base;
Bulb pole, comprises pole and the bulb that is fixed on described pole one end, and described pole is fixedly connected with described base;
Plummer assembly, comprises plummer, and described plummer assembly offers for the deep-slotted chip breaker of the described bulb of accommodating described bulb pole with for the strip slot of accommodating the first bulb supporting, and described the second bulb supporting is located on described plummer;
Tension spring component, is fixedly connected with plummer with described base, for realizing the force-closed of plummer and base.
9. litho machine levelling gear according to claim 8, is characterized in that, described triangle is isosceles right triangle, and right angle is angle corresponding to described bulb pole.
10. litho machine levelling gear according to claim 8, is characterized in that, described deep-slotted chip breaker is taper hole or circular hole, and the cross section of described strip slot is V-arrangement or circular arc, and the groove of strip slot is identical to the right-angle side direction with its place.
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| CN201110182278.1A CN102854751B (en) | 2011-06-30 | 2011-06-30 | Focusing adjustment leveling mechanism of photolithographic machine and leveling mechanism of photolithographic machine |
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| CN201110182278.1A CN102854751B (en) | 2011-06-30 | 2011-06-30 | Focusing adjustment leveling mechanism of photolithographic machine and leveling mechanism of photolithographic machine |
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| CN108897187B (en) * | 2018-06-20 | 2020-11-27 | 苏州佳世达光电有限公司 | Projector with a light source |
| CN110185902A (en) * | 2019-07-02 | 2019-08-30 | 中国科学院青岛生物能源与过程研究所 | Three axis levelling devices of one kind and its application |
| CN112161936B (en) * | 2020-09-29 | 2024-05-24 | 杭州海康威视数字技术股份有限公司 | Optical detection device for cigarette packets |
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| CN113547493B (en) * | 2021-07-12 | 2023-05-09 | 浙江科技学院 | Automatic leveling method for working platform |
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Application publication date: 20130102 Assignee: Dongguan Hezhi Intelligent Technology Co.,Ltd. Assignor: SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY CHINESE ACADEMY OF SCIENCES Contract record no.: X2023980040928 Denomination of invention: Lithography machine focusing and leveling mechanism and lithography machine leveling mechanism Granted publication date: 20141210 License type: Common License Record date: 20230831 |
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