CN103309166B - Movable lens adjusting device and apply its adjustable optical system - Google Patents
Movable lens adjusting device and apply its adjustable optical system Download PDFInfo
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- CN103309166B CN103309166B CN201210062631.7A CN201210062631A CN103309166B CN 103309166 B CN103309166 B CN 103309166B CN 201210062631 A CN201210062631 A CN 201210062631A CN 103309166 B CN103309166 B CN 103309166B
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- movable lens
- adjusting device
- support arm
- lens barrel
- adjustable optical
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Abstract
The invention discloses a kind of movable lens adjusting device and apply its adjustable optical system, for adjusting the position of movable lens relative to lens barrel.Movable lens adjusting device comprises driving element, lever, first pair of ball bearing and second pair of ball bearing.Lever comprises body and supporting seat, and supporting seat is arranged at lens barrel, and body is arranged at supporting seat rotationally, and body has the first support arm and the second support arm.First pair of ball bearing connects driving element and the first support arm.Second pair of ball bearing connects the second support arm and movable lens.The present invention, by two two ball bearing structures, can avoid lever in rotation process, its first support arm and driving element and between the second support arm and movable lens, sliding phenomenon occurs.
Description
Technical field
The present invention relates to a kind of litho machine equipment, particularly relate to a kind of movable lens adjusting device and apply its adjustable optical system.
Background technology
In photoetching projection objective lens, due to manufacture and the rigging error of eyeglass, the imaging picture element of object lens is deteriorated.In order to address this problem, the general movable lens that adopts is to compensate manufacture and the rigging error of eyeglass.
Be in the U.S. Patent Application Publication file of US20080204905 at publication number, movable lens is supported by three uniform flexible blocks, is realized the movement of movable lens by the elastic deformation of flexible block.Be in the Chinese patent application open file of CN200810204974 at application number, movable lens is supported by three uniform leverages, is realized the movement of movable lens by the rotation of lever.
But above-mentioned two kinds of technology have certain limitation in realization.US20080204905 realizes the movement of movable lens by the elastic deformation of flexible block, and the stroke of its movable lens is limited, is not suitable for the movable lens having Long Distances to move demand.In CN200810204974, movable mirror group is supported by three uniform leverages, and directly and the end thereof contacts of lever, the other end of lever directly contacts with movable lens motor driving stem.In the rotation process of lever, between motor driving stem and lever, can radial slippage be there is, and also radial slippage can occur between lever and movable lens.Therefore, in the moving process of movable lens, play phenomenon can be there is, cause Adjustment precision not high, be not thus suitable for the movable lens that Adjustment precision is higher.
Summary of the invention
The object of the present invention is to provide a kind of movable lens adjusting device and apply its adjustable optical system, to improve the disappearance of prior art.
For solving the problems of the technologies described above, movable lens adjusting device provided by the invention is for adjusting the position of movable lens relative to lens barrel.Movable lens adjusting device comprises driving element, lever, first pair of ball bearing and second pair of ball bearing.Lever comprises body and supporting seat, and supporting seat is arranged at lens barrel, and body is arranged at supporting seat rotationally, and body has the first support arm and the second support arm.First pair of ball bearing connects driving element and the first support arm.Second pair of ball bearing connects the second support arm and movable lens.
In one embodiment of this invention, driving element is stepper motor.
In one embodiment of this invention, lever also comprises rotating shaft, is arranged at supporting seat rotationally, and connects body.
In one embodiment of this invention, between rotating shaft and body be wringing fit.
In one embodiment of this invention, lever also comprises without oily lining, is arranged between rotating shaft and supporting seat.
In one embodiment of this invention, lever also comprises extension spring, and the two ends of extension spring connect body and lens barrel respectively.
The present invention also provides a kind of adjustable optical system, comprises lens barrel, movable lens and at least one movable lens adjusting device.Movable lens is arranged at lens barrel movably.Movable lens adjusting device is for adjusting the position of movable lens relative to lens barrel.Movable lens adjusting device comprises driving element, lever, first pair of ball bearing and second pair of ball bearing.Lever comprises body and supporting seat, and supporting seat is arranged at lens barrel, and body is arranged at supporting seat rotationally, and body has the first support arm and the second support arm.First pair of ball bearing connects driving element and the first support arm.Second pair of ball bearing connects the second support arm and movable lens.
In one embodiment of this invention, adjustable optical system also comprises support shell fragment, and movable lens is arranged at lens barrel by supporting shell fragment.
In one embodiment of this invention, lens barrel is hollow form, and movable lens is positioned at lens barrel, supports shell fragment and is located on lens barrel and movable lens.
In one embodiment of this invention, adjustable optical system also comprises preloaded spring, and be arranged at and support in shell fragment, one end of preloaded spring compresses movable lens.
In one embodiment of this invention, the quantity of movable lens adjusting device is three, arranges equably around lens barrel.
Movable lens adjusting device provided by the invention, two ball bearing structure is all adopted at the driving element link of lever and movable lens link, avoid lever in rotation process, its first support arm and driving element and between the second support arm and movable lens, sliding phenomenon occurs, and then eliminate the play phenomenon occurred in the axial adjustment process of movable lens, improve Adjustment precision.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the adjustable optical system of a preferred embodiment of the present invention;
Fig. 2 is the schematic diagram of lens barrel in Fig. 1;
Fig. 3 is movable lens and the connection diagram supporting shell fragment in Fig. 1;
Fig. 4 is the front cut-away view of Fig. 1;
Fig. 5 is the enlarged diagram of movable lens adjusting device in Fig. 4;
Fig. 6 is the lever principle schematic diagram of a preferred embodiment of the present invention.
Embodiment
Be described further below with reference to the technique effect of accompanying drawing to design of the present invention, concrete structure and generation, to understand object of the present invention, characteristic sum effect fully.
Fig. 1 is the schematic diagram of the adjustable optical system of a preferred embodiment of the present invention.Fig. 2 is the schematic diagram of lens barrel in Fig. 1.Fig. 3 is movable lens and the connection diagram supporting shell fragment in Fig. 1.Please refer to Fig. 1 ~ Fig. 3.In the present embodiment, adjustable optical system 1 comprises lens barrel 10, movable lens 11, supports shell fragment 12, first fixture 13, second fixture 14, preloaded spring 15 and movable lens adjusting device 16.Movable lens 11 is arranged at lens barrel 10 movably by supporting shell fragment 12.Support shell fragment 12 is connected to movable lens 11 and lens barrel 10 by the first fixture 13 and the second fixture 14 respectively.Preloaded spring 15 is positioned at and supports shell fragment 12.Movable lens adjusting device 16 is for adjusting the position of movable lens 11 relative to lens barrel 10.But the present invention does not impose any restrictions this.
In the present embodiment, lens barrel 10 is bases that total is installed, for movable lens 11 provides reference for installation.At this, lens barrel 10 can be hollow form, such as, be hollow circular cylinder, and its circumference side can be formed corresponding accommodation space 100, to hold the part-structure of movable lens adjusting device 16.In addition, multiple first fixed orifice 101 can also be formed at the upper surface of lens barrel 10.But the concrete form of the present invention to lens barrel 10 does not impose any restrictions.
In the present embodiment, movable lens 11 can be arranged at the hollow bulb of lens barrel 10.Specifically, movable lens 11 can comprise ring-type fixed part 110 and eyeglass body 111.Eyeglass body 111 can be inlayed in the inner around the inner ring surface of ring-type fixed part 110.In addition, the upper surface of ring-type fixed part 110 can form multiple second fixed orifices 1100 and multiple guidepost 1101.But the present invention does not impose any restrictions this.
In the present embodiment, support shell fragment 12 and also can be ring-type, be located on lens barrel 10 and movable lens 11.Specifically, the upper surface supporting shell fragment 12 can form multiple 3rd fixed orifices 120 and multiple 4th fixed orifice 121 respectively.First fixed orifice 101 of the corresponding lens barrel 10 of the second fixed orifice the 1100, four fixed orifice 121 of the corresponding movable lens 11 of the 3rd fixed orifice 120.First fixture 13 can be arranged in the 3rd fixed orifice 120 and the second fixed orifice 1100 successively, supports shell fragment 12 and movable lens 11 to connect.Second fixture 14 can be arranged in the first fixed orifice 101 and the 4th fixed orifice 121 successively, with fixed support shell fragment 12 and lens barrel 10.At this, can have screw thread respectively in the first fixed orifice 101 and the 4th fixed orifice 121, the second fixture 14 can be screw, with fixed support shell fragment 12 and lens barrel 10.But the present invention does not impose any restrictions this.In other embodiments, support between shell fragment 12 and lens barrel 10 and also fix by snap fit.
In addition, in the present embodiment, also can have screw thread, and the second fixed orifice 1100 can be only common through hole in the 3rd fixed orifice 120, the first fixture 13 can be the threaded stud of bottom tool accordingly.Preloaded spring 15 is sheathed on the first fixture 13, can do upper and lower micro-displacement by relative support shell fragment 12 to make movable lens 11.Specifically, namely preloaded spring 15 is in compressive state under preset state, and its upper end can be positioned at the step surface place on stud top, and lower end can directly compress movable lens 11, to guarantee the stability of movable lens 11 when axially (that is, above-below direction) moves.At this, the size of pretightning force then depends on the compression distance of preloaded spring 15 and the rigidity of preloaded spring 15, and the present invention does not impose any restrictions this.
In the present embodiment, support shell fragment 12 and also pilot hole 122 can be set, the guidepost 1101 of corresponding movable lens 11, with when movable lens 11 moves vertically, a guide effect is formed to movable lens 11.But the present invention does not impose any restrictions this.
In the present embodiment, the number of movable lens adjusting device 16 can be three, arranges equably around lens barrel 10, to form three strong points to movable lens 11.At this, movable lens adjusting device 16 can be arranged by the accommodation space 100 respectively on corresponding lens barrel 10 side.In addition, three movable lens adjusting devices 16 can make synchronous adjustment to the position of movable lens 11, to realize the adjustment of movable lens 11 at axial location, also can adjust the position of movable lens 11 independently, to realize movable lens 11 horizontal direction tilt adjustments.The number of the present invention to movable lens adjusting device 16 does not impose any restrictions.
Be described specifically to the concrete structure of movable lens adjusting device 16 with adjustment principle below.Please refer to Fig. 4 ~ Fig. 6.Fig. 4 is the front cut-away view of Fig. 1.Fig. 5 is the enlarged diagram of movable lens adjusting device in Fig. 4.Fig. 6 is the lever principle schematic diagram of a preferred embodiment of the present invention.
In the present embodiment, movable lens adjusting device 16 comprises driving element 160, lever 161, first pair of ball bearing 162 and second pair of ball bearing 163.
In the present embodiment, driving element 160 can be stepper motor, for the movement of movable lens 11 provides power resources.But the present invention does not impose any restrictions this.In other embodiments, driving element 160 also can be cylinder.
In the present embodiment, lever 161 can comprise body 1610, supporting seat 1611, rotating shaft 1612, without oily lining 1613 and extension spring 1614.Supporting seat 1611 can be arranged at lens barrel 10, and rotating shaft 1612 is arranged at supporting seat 1611 rotationally, and connects body 1610, to make body 1610 relative support seat 1611 be rotatable.At this, be wringing fit, i.e. gapless between rotating shaft 1612 and body 1610, in addition, can arrange between rotating shaft 1612 and supporting seat 1611 without oily lining 1613.Owing to there is low friction without oily lining 1613, without the need to advantages such as lubrication, gapless, high duplication, low hysteresis, therefore, can guarantee that rotating shaft 1612 is done gapless and rotated.But the present invention does not impose any restrictions this.
In the present embodiment, the two ends of extension spring 1614 can connect body 1610 and the lens barrel 10 of lever 161 respectively, to give lever 161 1 pretightning forces all the time, improve the stability of whole movable lens adjusting device 16.Specifically, in practical operation, the two ends of extension spring 1614 can connect a fixed connecting base 1615 respectively, and the fixed connecting base 1615 of one end is fixed on the body 1610 of lever 161, the fixed connecting base 1615 of the other end is fixed on a web joint 1616, and this web joint 1616 is fixed on the sidewall of lens barrel 10.But the present invention does not impose any restrictions this.In other embodiments, the two ends of extension spring 1614 directly can connect body 1610 and the lens barrel 10 of lever 161.
In the present embodiment, the body 1610 of lever 161 has the first support arm 1617 and the second support arm 1618.At this, the first support arm 1617 can be the long-armed of lever 161, and the second support arm 1618 can be the galianconism of lever 161.But the present invention does not impose any restrictions this.When practical operation, user can self-defining according to demand.
In the present embodiment, the first pair of ball bearing 162 connects driving element 160 and the first support arm 1617, second pair of ball bearing 163 connects the second support arm 1618 and movable lens 11.Specifically, first pair of ball bearing 162 can comprise two the first ball bearing bodies 1620 and head rod 1621.Head rod 1621 is arranged in the internal face of two the first ball bearing bodies 1620, and connects the driving shaft of driving element 160, to move axially under the driving of driving element 160.At this, the bearing seat of first pair of ball bearing 162, namely the outside wall surface of the first ball bearing body 1620 is then connected to the first support arm 1617.
Similarly, in the present embodiment, second pair of ball bearing 163 comprises two second ball bearing bodies 1630 and the second connecting links 1631.Because second pair of ball bearing 163 has identical structure with first pair of ball bearing 162, therefore do not repeat them here.
In the present embodiment, when the first support arm 1617 of driving element 160 activation lever 161 moves vertically, namely the second support arm 1618 of lever 161 drives movable lens 11 to move axially, to realize the adjustment of movable lens 11 position thereupon.At this, by the rotation of first pair of ball bearing 162 and second pair of ball bearing 163, can avoid lever 161 in rotation process, its first support arm 1617 and driving element 160 and between the second support arm 1618 and movable lens 11, radial slippage occurs, thus improve Adjustment precision.
In sum, the movable lens adjusting device that present pre-ferred embodiments provides, two ball bearing structure is all adopted at the driving element link of lever and movable lens link, avoid lever in rotation process, its first support arm and driving element and between the second support arm and movable lens, sliding phenomenon occurs, and then eliminate the play phenomenon occurred in the axial adjustment process of movable lens, improve Adjustment precision.
More than describe preferred embodiment of the present invention in detail.Should be appreciated that the ordinary skill of this area just design according to the present invention can make many modifications and variations without the need to creative work.Therefore, all technician in the art, all should by the determined protection domain of claims under this invention's idea on the basis of existing technology by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (16)
1. a movable lens adjusting device, for adjusting the position of movable lens relative to lens barrel, described movable lens adjusting device comprises:
Driving element;
Lever, comprises body and supporting seat, and described supporting seat is arranged at described lens barrel, and described body is arranged at described supporting seat rotationally, and described body has the first support arm and the second support arm;
It is characterized in that,
First pair of ball bearing, connects described driving element and described first support arm; And
Second pair of ball bearing, connects described second support arm and described movable lens.
2. movable lens adjusting device according to claim 1, is characterized in that, described driving element is stepper motor.
3. movable lens adjusting device according to claim 1, is characterized in that, described lever also comprises rotating shaft, is arranged at described supporting seat rotationally, and connects described body.
4. movable lens adjusting device according to claim 3, is characterized in that, is wringing fit between described rotating shaft and described body.
5. movable lens adjusting device according to claim 3, is characterized in that, described lever also comprises without oily lining, is arranged between described rotating shaft and described supporting seat.
6. movable lens adjusting device according to claim 1, is characterized in that, described lever also comprises extension spring, and the two ends of described extension spring connect described body and described lens barrel respectively.
7. an adjustable optical system, comprising:
Lens barrel;
Movable lens, is arranged at described lens barrel movably; And
At least one movable lens adjusting device, for adjusting the position of described movable lens relative to described lens barrel, described movable lens adjusting device comprises:
Driving element;
Lever, comprises body and supporting seat, and described supporting seat is arranged at described lens barrel, and described body is arranged at described supporting seat rotationally, and described body has the first support arm and the second support arm;
It is characterized in that,
First pair of ball bearing, connects described driving element and described first support arm; And
Second pair of ball bearing, connects described second support arm and described movable lens.
8. adjustable optical system according to claim 7, is characterized in that, described adjustable optical system also comprises support shell fragment, and described movable lens is arranged at described lens barrel by described support shell fragment.
9. adjustable optical system according to claim 8, is characterized in that, described lens barrel is hollow form, and described movable lens is positioned at described lens barrel, and described support shell fragment is located on lens barrel and described movable lens.
10. adjustable optical system according to claim 8, is characterized in that, described adjustable optical system also comprises preloaded spring, and be arranged in described support shell fragment, one end of described preloaded spring compresses described movable lens.
11. adjustable optical systems according to claim 7, is characterized in that, the quantity of described movable lens adjusting device is three, arranges equably around described lens barrel.
12. adjustable optical systems according to claim 7, is characterized in that, described driving element is stepper motor.
13. adjustable optical systems according to claim 7, is characterized in that, described lever also comprises rotating shaft, are arranged at described supporting seat rotationally, and connect described body.
14. adjustable optical systems according to claim 13, is characterized in that, are wringing fit between described rotating shaft and described body.
15. adjustable optical systems according to claim 13, is characterized in that, described lever also comprises without oily lining, are arranged between described rotating shaft and described supporting seat.
16. adjustable optical systems according to claim 7, is characterized in that, described lever also comprises extension spring, and the two ends of described extension spring connect described body and described lens barrel respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210062631.7A CN103309166B (en) | 2012-03-09 | 2012-03-09 | Movable lens adjusting device and apply its adjustable optical system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210062631.7A CN103309166B (en) | 2012-03-09 | 2012-03-09 | Movable lens adjusting device and apply its adjustable optical system |
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| CN103309166A CN103309166A (en) | 2013-09-18 |
| CN103309166B true CN103309166B (en) | 2016-03-30 |
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| CN201210062631.7A Active CN103309166B (en) | 2012-03-09 | 2012-03-09 | Movable lens adjusting device and apply its adjustable optical system |
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| CN103676081B (en) * | 2013-12-19 | 2016-08-17 | 丹阳丹耀光学有限公司 | Gluing just solidifies centralising device |
| CN105807384B (en) * | 2014-12-29 | 2019-02-01 | 上海微电子装备（集团）股份有限公司 | A kind of movable lens adjustment mechanism |
| CN108398761A (en) * | 2018-03-28 | 2018-08-14 | 中国科学院光电技术研究所 | Three-dimensional dynamic adjusting and locking mechanism |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101609193A (en) * | 2009-07-24 | 2009-12-23 | 上海微电子装备有限公司 | A kind of movable optical element adjusting and positioning device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US6671294B2 (en) * | 1997-07-22 | 2003-12-30 | Cymer, Inc. | Laser spectral engineering for lithographic process |
| US7738193B2 (en) * | 2004-06-29 | 2010-06-15 | Carl Zeiss Smt Ag | Positioning unit and alignment device for an optical element |
| CN1851557B (en) * | 2006-06-02 | 2010-05-12 | 中国科学院光电技术研究所 | Two-dimensional scanning precision laser exposure system |
| CN201081770Y (en) * | 2007-09-21 | 2008-07-02 | 上海微电子装备有限公司 | Movable lens adjusting device |
| US8228618B2 (en) * | 2008-07-01 | 2012-07-24 | Konica Minolta Opto, Inc. | Drive mechanism, drive device, and lens drive device |
| CN101464554A (en) * | 2008-12-30 | 2009-06-24 | 上海微电子装备有限公司 | Micro-regulating mechanism for movable lens |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101609193A (en) * | 2009-07-24 | 2009-12-23 | 上海微电子装备有限公司 | A kind of movable optical element adjusting and positioning device |
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Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
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