CN113447054A - Adjusting platform - Google Patents

Adjusting platform Download PDF

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Publication number
CN113447054A
CN113447054A CN202110790775.3A CN202110790775A CN113447054A CN 113447054 A CN113447054 A CN 113447054A CN 202110790775 A CN202110790775 A CN 202110790775A CN 113447054 A CN113447054 A CN 113447054A
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China
Prior art keywords
elastic
hole
supporting
piece
fixing
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CN202110790775.3A
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CN113447054B (en
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吴克非
葛永梅
庞祥超
唐斌
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Southwest University of Science and Technology
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Southwest University of Science and Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00Component parts of measuring arrangements not specially adapted for a specific variable
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/30Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058Kind of property studied
    • G01N2203/0076Hardness, compressibility or resistance to crushing
    • G01N2203/0078Hardness, compressibility or resistance to crushing using indentation
    • G01N2203/008Residual indentation measurement

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  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
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  • Pathology (AREA)
  • Vibration Prevention Devices (AREA)

Abstract

The invention relates to an adjustment platform comprising: the device comprises a supporting part, at least three elastic parts, a fixing part and a driving assembly, wherein one end of each elastic part is connected with the supporting part, and the other end of each elastic part is connected with the fixing part; the driving assembly is connected with the supporting piece, and the supporting piece enables at least one elastic piece to deform and/or at least partially recover to deform under the driving of the driving assembly. Through setting up drive assembly and support piece, elastic component and the mounting that connects gradually, drive assembly is connected with support piece, and drive assembly exerts the drive power of equidimension not to support piece to the elastic component that makes and be connected with support piece takes place to deform or at least partially resumes deformation.

Description

Adjusting platform
Technical Field
The invention relates to the technical field of precision measurement, in particular to an adjusting platform.
Background
Piezoelectric ceramics are functional ceramic materials that can interconvert mechanical energy and electrical energy. When an external force is applied to the piezoelectric ceramic, the piezoelectric sheet generates electric charges, and the pressure is converted into voltage. When an electric field is applied to the piezoelectric sheet, the piezoelectric ceramic sheet is mechanically deformed, and the deformation is proportional to the strength of the electric field.
At present, most of precision instruments adopt piezoelectric ceramics to perform fine positioning and adjustment. For example, the piezoelectric scanning stage uses piezoelectric ceramics as a driving source, and can realize nanometer positioning accuracy by generating very small displacement through controlling small change of voltage.
However, the piezoelectric ceramic is manufactured by a plurality of processes, the manufacturing process is complex, and the manufacturing process is higher in requirements especially in occasions with higher use precision requirements. And the cost of the piezoelectric ceramics is high, so that the piezoelectric ceramics cannot be generally used.
Disclosure of Invention
Therefore, it is necessary to provide an adjustment platform to solve the problem of high cost of the adjustment platform in the existing test instrument.
An adjustment platform, comprising: the device comprises a supporting part, at least three elastic parts, a fixing part and a driving assembly, wherein one end of each elastic part is connected with the supporting part, and the other end of each elastic part is connected with the fixing part; the driving assembly is connected with the supporting piece, and the supporting piece enables at least one elastic piece to deform and/or at least partially recover to deform under the driving of the driving assembly.
In one embodiment, the device further comprises a base body, and the fixing piece is mounted on the base body.
In one embodiment, the fixing member comprises a base plate and a circumferential wall which are connected, the base body comprises a cylinder wall with a hollow structure, the base plate is connected with the elastic member, and the circumferential wall is connected with the cylinder wall.
In one embodiment, a first connecting hole is formed in the cylinder wall, and a second connecting hole is formed in the circumferential wall at a position corresponding to the first connecting hole.
In one embodiment, the driving assembly comprises a traction part and a power part, wherein the traction part is provided with a fixed end and a free end which are opposite, the fixed end of the traction part is connected with the supporting part, and the free end is connected with the power part.
In one embodiment, the power part further comprises a controller, and the power part is connected with the controller.
In one embodiment, the support part is provided with a mounting hole, the power part is provided with an output hole, and the central lines of the mounting hole and the output hole are superposed; the fixed end of the traction part is located in the mounting hole, and the free end of the traction part penetrates through the output hole and is connected with the power part.
In one embodiment, the elastic member is provided with a threading hole, the fixing member is provided with a wire outlet hole, the central lines of the threading hole and the wire outlet hole are coincident with the central line of the mounting hole, and the free end of the traction part sequentially penetrates through the threading hole and the wire outlet hole to be connected with the power part.
In one embodiment, at least one of the following is included:
the elastic piece and the supporting piece are provided with a concave part and a convex structure which are matched with each other;
the elastic piece and the fixing piece are provided with mutually matched low concave part and boss structures.
In one embodiment, the supporting member, the elastic member and the fixing member are made of metal, and both the elastic modulus of the supporting member and the elastic modulus of the fixing member are greater than the elastic modulus of the elastic member.
Above-mentioned regulation platform, support piece, elastic component and the mounting through setting up drive assembly and connecting gradually, drive assembly is connected with support piece, and drive assembly exerts the drive power of equidimension not to support piece to the elastic component that makes and support piece be connected takes place to deform or at least partially resumes deformation.
Drawings
Fig. 1 is a top-view projection of an adjusting platform according to an embodiment of the present invention.
Fig. 2 is a cross-sectional view of fig. 1.
Fig. 3 is a schematic structural diagram of a supporting member in an adjustment platform according to an embodiment of the present invention.
Fig. 4 is a bottom perspective view of a support member in an adjustable platform according to an embodiment of the present invention.
Fig. 5 is a partial cross-sectional view of fig. 4.
Fig. 6 is a schematic structural diagram of a fixing member in an adjustment platform according to an embodiment of the present invention.
Fig. 7 is a schematic structural view of another angle of the fixing member in the adjustment platform according to an embodiment of the present invention.
Fig. 8 is a top perspective view of a fixing member in an adjustment platform according to an embodiment of the present invention.
Fig. 9 is a partial cross-sectional view of fig. 8.
Fig. 10 is a schematic structural diagram of an elastic member in an adjustment platform according to an embodiment of the present invention.
Fig. 11 is a front perspective view of an elastic member in an adjustment platform according to an embodiment of the present invention.
Fig. 12 is a schematic cross-sectional view of fig. 11.
Detailed Description
This invention can be embodied in many different forms than those herein described and many modifications may be made by those skilled in the art without departing from the spirit of the invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", and the like, indicate orientations and positional relationships based on the orientations and positional relationships shown in the drawings, and are used merely for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.
Referring to fig. 1 and 2, fig. 1 is a top view of an adjustment platform according to an embodiment of the present invention, and fig. 2 is a cross-sectional view of fig. 1. The adjusting platform provided by one embodiment of the invention comprises a base body 100 and a leveling component 200, wherein the base body 100 is used for installing and fixing the leveling component 200, and the leveling component 200 is used for leveling a workpiece.
Referring to fig. 2, the base body 100 is a hollow cylindrical structure having a cylindrical wall 110, and a first opening 111 and a second opening 112 opposite to each other, and the first opening 111 and the second opening 112 are communicated with an inner hollow region of the base body 100. The cylindrical wall 110 is uniformly provided with a plurality of first connection holes 113 along the circumferential direction. The leveling member 200 is connected to the base 100 through the first opening 111 and the second opening 112. The substrate 100 is made of stainless steel.
Referring to fig. 2, the leveling assembly 200 includes a supporting member 300, an elastic member 400, and a fixing member 500, which are connected in sequence, and a driving assembly 600. Referring to fig. 1, at least three elastic members 400 are disposed between the supporting member 300 and the fixing member 500, and the driving assembly 600 is connected to the supporting member 300.
The supporting member 100 is used for carrying a workpiece to be tested, and the fixing member 500 is used for fixing the leveling assembly 200 on the base member 100 and carrying the elastic member 400 and the supporting member 100. The driving assembly 600 is configured to apply different forces to the supporting member 300 to elastically deform and/or at least partially restore the at least one elastic member 400 connected to the supporting member 300, so as to vertically displace the region of the supporting member 100 corresponding to the elastic member 400, and finally vertically reposition different portions of the workpiece.
Referring to fig. 3, fig. 3 shows a schematic structural view of the supporting member 300. In the present embodiment, the support 300 has a disc-shaped structure. As also shown in fig. 5, the support 300 includes an upper surface 310, a lower surface 320, and a circumferential side 330. The upper surface 310 and the lower surface 320 are parallel to each other, and the circumferential side 330 is located between the upper surface 310 and the lower surface 320 and is perpendicular to the upper surface 310 and the lower surface 320, respectively. The upper surface 310 is in direct contact with the workpiece and the lower surface 320 engages the resilient member 400.
Referring to fig. 3 and 4, the supporting member 300 is provided with a recess 340, and the recess 340 is used for cooperating with the elastic member 400. Specifically, referring also to FIG. 5, FIG. 5 illustrates a partial cross-sectional view of the support 300. The recess 340 is a groove having a recessed surface 341 recessed from the lower surface 320 of the support 300 toward the upper surface 310 by a predetermined depth. Referring to fig. 4, in the present embodiment, three concave portions 340 are provided and are uniformly distributed around the central axis of the supporting member 300, that is, the connecting lines of the central points of the three concave portions 340 are isosceles triangles. The three recesses 340 are respectively engaged with the corresponding three elastic members 400.
Referring to fig. 5, the depressed surfaces 341 have different circumferential sizes in the up-down direction. In the present embodiment, the circumferential dimension of the depressed surface 341 gradually becomes smaller in the direction from the lower surface 320 to the upper surface 310 of the supporter 300. In this embodiment, the recessed surface 341 is tapered.
The shape of the recess 340, the recess depth, and the circumferential dimension of the recess surface 341 may be configured accordingly according to the actual shape and dimension of the elastic member 400 engaged with the support member 300.
Referring to fig. 4 and 5, the supporter 300 is provided with a mounting hole 350, and the mounting hole 350 is used for connecting with the driving assembly 600. The mounting holes 350 penetrate the upper surface 310 and the lower surface 320 of the support 300. The mounting hole 350 communicates with the recess 340. The central axis of the mounting hole 350 coincides with the central axis of the recess 340. The number of the mounting holes 350 is three, and the mounting holes communicate with the corresponding recesses 340, respectively.
Referring to fig. 5, the mounting hole 350 may be a countersunk hole or a tapered hole, etc. If the mounting hole 350 is a tapered hole, the diameter of the mounting hole 350 gradually decreases in the direction from the upper surface 310 to the lower surface 320 of the support 300.
In this embodiment, the supporting member 300 is made of stainless steel or other metal material with elastic modulus greater than that of the elastic member 400. The upper surface 310 of the supporter 300 is subjected to a high precision polishing process.
Referring to fig. 6 and 7, fig. 6 and 7 respectively illustrate the fixing member 500 at different angles. The fixing member 500 includes a circumferential wall 510 and a base plate 520, the base plate 520 has a disk shape, and the circumferential wall 510 has a hollow cylindrical structure. The base plate 520 covers the end of the circumferential wall 510. The base plate 520 is connected to the spring 400 and the circumferential wall 510 is used to connect to the cylinder wall 110 in the base body 100. For convenience of description, a surface of the base plate 520 facing away from the circumferential wall 510 is referred to as an upper surface 521, and a surface of the base plate 520 facing the circumferential wall 510 is referred to as a lower surface 522. In the present embodiment, the diameter of the substrate 520 is the same as the diameter of the support 300.
Referring to fig. 6, the upper surface 521 of the substrate 520 is provided with a concave portion 511, and the concave portion 511 is used for cooperating with the elastic member 400. Referring to fig. 9, which is a partial cross-sectional view of the fixing member 500, the low recess 511 is a groove with a low recess 512 formed by recessing a set depth from the upper surface 521 to the lower surface 522 of the substrate 510.
Referring to fig. 8, fig. 8 is a schematic top view of the fixing member 500. In the present embodiment, the number of the low recesses 511 is three, and the low recesses 511 are distributed at equal angles around the central axis of the substrate 520, and the connecting lines of the central points of the three low recesses 511 are isosceles triangles. The three low recesses 511 are respectively engaged with the corresponding three elastic members 400.
Referring to FIG. 9, the low concave surface 512 has a different circumferential dimension. The circumferential dimension of the depressed surface 512 gradually decreases in a direction from the upper surface 521 to the lower surface 522 of the base plate 520. In the present embodiment, the low concave surface 512 of the low concave portion 511 is tapered. The shape of the low recess 511, the depth of the depression, and the circumferential dimension of the low recess surface 512 may be configured accordingly according to the actual shape and dimension of the elastic member 400.
Referring to fig. 6 and 9, the base plate 520 is provided with an outlet 513, and the outlet 513 is used for connecting with the driving element 600. The wire holes 513 extend through the upper surface 521 and the lower surface 522 of the substrate 520. The outlet hole 513 is located at a position of a central region of the low recess 511, that is, a central axis of the outlet hole 513 coincides with a central axis of the low recess 511. The number of the outlet holes 513 is three, and the central axes of the three outlet holes 513 coincide with the central axes of the corresponding low recesses 511, respectively.
Referring to fig. 7 and 9, the circumferential wall 510 is provided with a second connecting hole 514. In the present embodiment, the second connection holes 514 are provided in three and uniformly arranged in the circumferential direction of the circumferential wall 510. Referring to fig. 2, the second connection hole 514 corresponds to the first connection hole 113 of the base 100, the fixing member 500 is fixed on the cylinder wall 110 of the base 100 through the second connection hole 514, and the base plate 520 and the cylinder wall 110 may be connected by screws or other methods.
In this embodiment, the fixing member 500 is made of stainless steel or other metal material with elastic modulus greater than that of the elastic member 400.
Referring to fig. 10, fig. 10 shows a schematic structural diagram of the elastic member 400. The elastic member 400 includes a cylinder 410, and the cylinder 410 includes an upper end surface 411 and a lower end surface 412 that are parallel to each other.
Referring to fig. 11, fig. 11 shows a front perspective view of the elastic member 400. The upper end surface 411 of the column 410 is provided with a protrusion structure 413, and the protrusion structure 413 extends and forms from the upper end surface 411 to a direction away from the column 410. The protrusion 413 is configured to form a conical contact with a recess 340 provided on the support 300. Referring also to fig. 12, the cross-sectional area of the protrusion 413 gradually decreases in a direction from the upper end surface 411 to a direction away from the pillar 410. Referring to fig. 11, the protrusion 413 is symmetrical about a central axis of the elastic element 400 itself in the up-down direction, and the central axis of the protrusion 413 coincides with the central axis of the column 410. In the present embodiment, the protrusion 413 is integrally formed with the cylinder 410.
Referring to fig. 11, a boss structure 414 is disposed on a lower end surface 412 of the cylinder 410, and the boss structure 414 is formed to extend from the lower end surface 412 in a direction away from the cylinder 410. Boss structure 414 is adapted to mate with a low recess 511 provided on mount 500 to form a tapered contact. The cross-sectional area of the boss structure 414 gradually decreases in a direction away from the lower end face 412 toward the cylinder 410. Referring to fig. 11, the boss 414 is symmetrical about the central axis of the spring 400 itself, and the central axis of the boss 414 coincides with the central axis of the cylinder 410. In this embodiment, the boss structure 414 is integrally formed with the cylinder 410.
Referring to fig. 11, in the present embodiment, the protrusion 413 formed on the upper end surface 411 of the pillar 410 and the protrusion 414 formed on the lower end surface 412 have the same shape, that is, the elastic element 400 is symmetrical about its horizontal center line. Referring to fig. 2, in the present embodiment, the protrusion 413 is engaged with the recess 340, and the protrusion 414 is engaged with the recess 511, so that the supporting element 300 and the elastic element 400, and the elastic element 400 and the fixing element 500 are stably connected.
In other embodiments, a convex structure may be disposed on a side of the supporting member 300 facing the elastic member 400, and a concave portion may be disposed on a side of the elastic member 400 facing the supporting member 300; a boss structure is provided on the side of the fixing member 500 facing the elastic member 400, and a depression is provided on the side of the elastic member 400 facing the fixing member 500.
Referring to fig. 10 and 12, a central region of the elastic member 400 is provided with a threading hole 420, and the threading hole 420 is used to connect with the driving assembly 600. The central axis of the threading hole 420 coincides with the central axis of the cylinder 410.
In this embodiment, the elastic member 400 is made of brass to obtain a more precise deformation amount according to its mechanical properties. In other embodiments, the elastic member 400 may be made of other metal materials with higher elastic modulus.
The elastic modulus of the supporting member 300 and the elastic modulus of the fixing member 500 are both greater than the elastic modulus of the elastic member 400.
Referring to fig. 1 and fig. 2, when the adjustment platform is in an assembled state, the three concave portions 340 disposed on the supporting member 300 are respectively matched with the convex structures 413 of the upper end surfaces 411 of the three elastic members 400; three low recesses 511 provided on the fixing member 500 are respectively engaged with the boss structures 414 of the lower end surfaces 412 of the three elastic members 400; that is, three elastic members 400 are disposed at equal angles between the supporting member 300 and the fixing member 500. The central axis of the low recess 511, the central axis of the boss structure 413, the central axis of the boss structure 414, and the central axis of the recess 340 coincide. The center lines of the mounting hole 350 provided on the supporting member 300, the threading hole 420 provided on the elastic member 400, and the wire outlet hole 513 provided on the fixing member 500 coincide with each other.
In the adjusting platform of the present embodiment, the supporting member 300 and the elastic member 400 are respectively configured to be in a conical surface fit, and the fixing member 500 and the elastic member 400 are configured to be in a conical surface fit, so that the supporting member 300 and the elastic member 400 are horizontally limited, and the elastic member 400 and the fixing member 500 are horizontally limited. Therefore, the adjusting platform cannot deviate in the horizontal direction, and the leveling precision is ensured.
Referring to fig. 2, the driving assembly 600 includes a pulling portion 610 and a power portion 620, wherein one end of the pulling portion 610 is connected to the supporting member 300, and the other end is wound on the power portion 620, and can be unwound or wound by the power portion 620. For convenience of description, an end of the traction part 610 connected to the support 300 is referred to as a fixed end 611, and an end of the traction part 610 connected to the power part 620 is referred to as a free end 612.
Referring to fig. 2, the power unit 620 is disposed in a hollow area in the base body 100 and is mounted on the cylinder wall 110. The power part 620 is located below the base plate 520. The power unit 620 is provided with an output hole 621. The center line of the output hole 621 coincides with the center lines of the mounting hole 350 provided on the support member 300, the threading hole 420 provided on the elastic member 400, and the outlet hole 513 provided on the fixing member 500, so that the drawing portion 610 does not deflect in the up-down direction.
Referring to fig. 2, the fixed end 611 of the traction part 610 is disposed in the mounting hole 350 of the supporter 300 and fixed with respect to the mounting hole 350. For example, the fixed end 611 of the traction portion 610 may be fixed in the mounting hole 350 by an expansion bolt, or other connection methods may be used, which are not limited herein. The free end 612 of the traction part 610 sequentially passes through the coaxial threading hole 420, the outlet hole 513 and the output hole 621 and is wound on the power part 620.
The power parts 620 are provided in three numbers and are uniformly distributed along the center line of the cylinder wall 110. Accordingly, there are three traction portions 610 connected to the corresponding power portions 620. That is, the three sets of driving assemblies 600 are respectively connected to three different positions of the supporting member 300 to apply forces to the different positions of the supporting member 300, so that the three independent elastic members 400 respectively engaged with the supporting member 300 are respectively deformed or at least partially restored to be deformed.
In this embodiment, the power portion 620 is a stepper motor, or other power device that can provide precise movement.
The driving assembly 600 further includes a controller connected to the power unit 620 to control the power unit 620 to drive the traction unit 610 to wind or unwind, and apply different pulling forces to the traction unit 610.
Referring to fig. 2, in the present embodiment, the adjusting platform is in an assembled state, and the fixing member 500 is embedded in the base 100 and located at the first opening 111. The upper surface 521 of the base plate 520 of the fixture 500 does not protrude from the cartridge wall 110. The outer surface of the circumferential wall 510 mates with the inner surface of the cartridge wall 110, and the circumferential wall 510 is secured to the cartridge wall 110 by screws. The convex structure 414 at one end of the elastic element 400 is matched with the low concave part 511 on the fixed element 500, and the convex structure 413 at the other end is matched with the concave part 340 on the supporting element 300, namely, the elastic element 400 is clamped between the supporting element 300 and the fixed element 500. The fixed end 611 of the traction part 610 is connected to the support 300, and the free end 612 passes through the threading hole 420, the outlet hole 513 and the output hole 621 and is wound on the power part 620.
Three elastic members 400 are uniformly arranged in the circumferential direction between the supporting member 300 and the fixing member 500, and thus, a plane can be defined and leveling can be achieved simply and efficiently. In other embodiments, the number of the elastic members 400 disposed between the supporting member 300 and the fixing member 500 may be greater than three, and accordingly, the number of the recesses 340 of the supporting member 300 for engaging with the elastic members 400 may be changed, and similarly, the number of the recesses 511 of the fixing member 500 for engaging with the elastic members 400 may be changed.
The adjusting platform is simple in structure, low in process difficulty and easy to realize, and different leveling accuracies can be obtained by replacing the material of the elastic piece 400. In the case of high precision requirement, the cost is greatly reduced compared with the piezoelectric ceramic.
Before leveling work is carried out on a workpiece to be tested, the three groups of traction parts 610 are wound by a set length, when the traction parts 610 are driven by the power part 620 to wind, the traction parts 610 pull the support part 300 to move downwards and apply pressure on the elastic part 400, and the elastic part 400 is elastically deformed, which can be called as pre-deformation. Then, the upper surface 310 of the support 300 is leveled to be in a horizontal state.
In the process of leveling the workpiece to be tested, if the position of the workpiece to be tested on the supporting member 300 needs to be lifted, the power part 620 drives the traction part 610 to unreel; at this time, the pulling force applied to the supporting member 300 becomes small enough to keep the elastic member 400 in the current deformation amount, and the elastic member 400 at least partially restores to deform to push the corresponding position of the supporting member 300 to move upwards, so as to lift the workpiece to be tested. On the contrary, if the position of the workpiece to be detected needs to be lowered, the power part 629 drives the traction part 610 to perform winding operation; the support member 300 is pulled downward by the pulling portion 610, and the support member 300 compresses the elastic member 400 downward to deform it downward. By adjusting the deformation of the three independent elastic members 400, the displacement of the supporting member 300 in the vertical direction can be realized, and the leveling of the workpiece to be measured can be further realized.
In practical experiments, the material of the elastic member 400 is brass, the elastic modulus of the brass is 140GPa, the Poisson ratio of the brass is 0.34, and the length of the elastic member 400 is set to be 10 mm. The force-bearing area of the single elastic member 400 is 0.0003m2When 0.1N force is applied to the elastic member 400, the amount of deformation of the elastic member 400 is 10nm, and leveling accuracy of a nanometer level can be achieved.
The adjusting platform can be used for leveling work and can also be applied to a nanoindentation measurement technology. For example, the workpiece is placed on the adjusting platform, continuous dynamic ultralow load is applied to the workpiece, nanoscale compression depth is obtained, and mechanical properties of the workpiece can be measured on a nanoscale.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims (10)

1. An adjustment platform, comprising: the device comprises a supporting part, at least three elastic parts, a fixing part and a driving assembly, wherein one end of each elastic part is connected with the supporting part, and the other end of each elastic part is connected with the fixing part; the driving assembly is connected with the supporting piece, and the supporting piece enables at least one elastic piece to deform and/or at least partially recover to deform under the driving of the driving assembly.
2. The adjustment platform of claim 1, further comprising a base, wherein the fixture is mounted to the base.
3. The adjustment platform of claim 2, wherein the fixing member comprises a base plate and a circumferential wall connected to each other, the base comprises a cylinder wall having a hollow structure, the base plate is connected to the elastic member, and the circumferential wall is connected to the cylinder wall.
4. The adjustment platform of claim 3, wherein the cylinder wall has a first connection hole, and the circumferential wall has a second connection hole at a position corresponding to the first connection hole.
5. The adjustable platform of claim 1, wherein the drive assembly includes a traction portion having opposite fixed and free ends, the fixed end of the traction portion being coupled to the support member and the free end being coupled to the power portion.
6. The adjustment platform of claim 5, further comprising a controller, the power section being coupled to the controller.
7. The adjusting platform according to claim 5, wherein the support member is provided with a mounting hole, the power portion is provided with an output hole, and the center lines of the mounting hole and the output hole are coincident; the fixed end of the traction part is located in the mounting hole, and the free end of the traction part penetrates through the output hole and is connected with the power part.
8. The adjusting platform according to claim 7, wherein the elastic member is provided with a threading hole, the fixing member is provided with a wire outlet hole, the center lines of the threading hole and the wire outlet hole are coincident with the center line of the mounting hole, and the free end of the traction part sequentially passes through the threading hole and the wire outlet hole to be connected with the power part.
9. The adjustment platform of claim 1, comprising at least one of:
the elastic piece and the supporting piece are provided with a concave part and a convex structure which are matched with each other;
the elastic piece and the fixing piece are provided with mutually matched low concave part and boss structures.
10. The adjustable platform of claim 1, wherein the supporting member, the elastic member and the fixing member are made of metal, and both the elastic modulus of the supporting member and the elastic modulus of the fixing member are greater than the elastic modulus of the elastic member.
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CN108254007A (en) * 2018-01-15 2018-07-06 张帝 One kind can automatic leveling machine components detecting system
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CN210390135U (en) * 2019-07-24 2020-04-24 肇庆学院 SLM forming platform with leveling function
CN211696424U (en) * 2020-01-13 2020-10-16 四川道通达工程技术有限公司 Horizontal reference platform
CN113075219A (en) * 2021-03-24 2021-07-06 上海御微半导体技术有限公司 Leveling and focusing device
US20220161583A1 (en) * 2019-07-24 2022-05-26 Korea Institute Of Machinery & Materials Leveling unit for imprinting and imprint apparatus comprising same

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108254007A (en) * 2018-01-15 2018-07-06 张帝 One kind can automatic leveling machine components detecting system
CN109001029A (en) * 2018-06-26 2018-12-14 安徽六启教育软件科技有限公司 The compressive strength tester device of the thin-wall part of balance-adjustable
CN208283544U (en) * 2018-06-27 2018-12-25 北京行易道科技有限公司 Levelling mechanism and corner reflector levelling device
KR101930364B1 (en) * 2018-09-28 2018-12-18 (주)뉴비전네트웍스 Protection systems for leveling equipment
CN210390135U (en) * 2019-07-24 2020-04-24 肇庆学院 SLM forming platform with leveling function
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CN113075219A (en) * 2021-03-24 2021-07-06 上海御微半导体技术有限公司 Leveling and focusing device

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