CN113447054B - Adjusting platform - Google Patents

Adjusting platform Download PDF

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Publication number
CN113447054B
CN113447054B CN202110790775.3A CN202110790775A CN113447054B CN 113447054 B CN113447054 B CN 113447054B CN 202110790775 A CN202110790775 A CN 202110790775A CN 113447054 B CN113447054 B CN 113447054B
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Prior art keywords
piece
elastic
hole
adjustment platform
support
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CN113447054A (en
Inventor
吴克非
葛永梅
庞祥超
唐斌
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Southern University of Science and Technology
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Southern University of Science and Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00Component parts of measuring arrangements not specially adapted for a specific variable
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/30Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058Kind of property studied
    • G01N2203/0076Hardness, compressibility or resistance to crushing
    • G01N2203/0078Hardness, compressibility or resistance to crushing using indentation
    • G01N2203/008Residual indentation measurement

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Vibration Prevention Devices (AREA)

Abstract

The invention relates to an adjustment platform, comprising: the device comprises a support piece, at least three elastic pieces, a fixing piece and a driving assembly, wherein one end of each elastic piece is connected with the support piece, and the other end of each elastic piece is connected with the fixing piece; the driving assembly is connected with the supporting piece, and the supporting piece is driven by the driving assembly to deform and/or at least partially recover deformation of at least one elastic piece. Through setting up drive assembly and support piece, elastic component and the mounting that connects gradually, drive assembly is connected with support piece, and drive assembly applys not equidimension's driving force to support piece to make the elastic component who is connected with support piece take place deformation or at least partly resume deformation.

Description

Adjusting platform
Technical Field
The invention relates to the technical field of precision measurement, in particular to an adjusting platform.
Background
Piezoelectric ceramics are functional ceramic materials that can mutually convert mechanical energy and electrical energy. When an external force is applied to the piezoelectric ceramic, the piezoelectric plate generates electric charges, and pressure is converted into voltage. When an electric field is applied to the piezoelectric sheet, the piezoelectric ceramic sheet is mechanically deformed, and the deformation amount is proportional to the strength of the electric field.
Most of the current precision instruments adopt piezoelectric ceramics for fine positioning and adjustment. For example, the piezoelectric scanning table uses piezoelectric ceramics as a driving source, and can realize nano-scale positioning accuracy by controlling small displacement generated by small change of voltage.
However, the piezoelectric ceramic is manufactured by a plurality of processes, the manufacturing process is complex, and particularly, the manufacturing process is higher in the occasion with higher precision requirement. And the cost of the piezoelectric ceramics is high, and the piezoelectric ceramics cannot be widely used.
Disclosure of Invention
Based on this, it is necessary to provide an adjustment platform for the problem of high cost of the adjustment platform in the existing test instrument.
An adjustment platform, comprising: the device comprises a support piece, at least three elastic pieces, a fixing piece and a driving assembly, wherein one end of each elastic piece is connected with the support piece, and the other end of each elastic piece is connected with the fixing piece; the driving assembly is connected with the supporting piece, and the supporting piece is driven by the driving assembly to deform and/or at least partially recover deformation of at least one elastic piece.
In one embodiment, the device further comprises a base body, and the fixing piece is mounted on the base body.
In one embodiment, the fixing member includes a base plate and a circumferential wall connected to each other, the base body includes a hollow cylindrical wall, the base plate is connected to the elastic member, and the circumferential wall is connected to the cylindrical wall.
In one embodiment, the cylinder wall is provided with a first connecting hole, and the circumferential wall is provided with a second connecting hole at a position corresponding to the first connecting hole.
In one embodiment, the drive assembly includes a traction portion having opposite fixed and free ends, the fixed end of the traction portion being connected to the support member and the free end being connected to the power portion.
In one embodiment, the device further comprises a controller, and the power part is connected with the controller.
In one embodiment, the support member is provided with a mounting hole, the power part is provided with an output hole, and the center lines of the mounting hole and the output hole are coincident; the fixed end of the traction part is positioned in the mounting hole, and the free end passes through the output hole to be connected with the power part.
In one embodiment, the elastic piece is provided with a threading hole, the fixing piece is provided with a wire outlet hole, the center lines of the threading hole and the wire outlet hole are coincident with the center line of the mounting hole, and the free end of the traction part sequentially penetrates through the threading hole and the wire outlet hole to be connected with the power part.
In one embodiment, at least one of the following is included:
the elastic piece and the supporting piece are provided with concave parts and convex structures which are matched with each other;
the elastic piece and the fixing piece are provided with a concave part and a boss structure which are matched with each other.
In one embodiment, the supporting member, the elastic member and the fixing member are all made of metal, and the elastic modulus of the supporting member and the elastic modulus of the fixing member are both greater than the elastic modulus of the elastic member.
Above-mentioned regulation platform is through setting up drive assembly and support piece, elastic component and the mounting that connects gradually, and drive assembly is connected with support piece, and drive assembly applys not equidimension's driving force to support piece to make the elastic component who is connected with support piece take place deformation or at least partly resume deformation.
Drawings
Fig. 1 is a top perspective view of an adjustment platform according to an embodiment of the present invention.
Fig. 2 is a cross-sectional view of fig. 1.
Fig. 3 is a schematic structural view of a support member in an adjustment platform according to an embodiment of the invention.
Fig. 4 is a bottom perspective view of a support member in an adjustment platform according to an embodiment of the present invention.
Fig. 5 is a schematic partial cross-sectional view of fig. 4.
Fig. 6 is a schematic structural diagram of a fixing member in an adjustment platform according to an embodiment of the invention.
Fig. 7 is a schematic view of another angle of the fixing member in the adjusting platform according to an embodiment of the present invention.
Fig. 8 is a top perspective view of a fixture in an adjustment platform according to an embodiment of the present invention.
Fig. 9 is a schematic partial cross-sectional view of fig. 8.
Fig. 10 is a schematic structural view of an elastic member in an adjustment platform according to an embodiment of the invention.
Fig. 11 is a front projection view of an elastic member in an adjustment platform according to an embodiment of the present invention.
Fig. 12 is a schematic cross-sectional view of fig. 11.
Detailed Description
The present invention may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the invention, so that the invention is not limited to the specific embodiments disclosed below.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and to simplify the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
The terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.
Referring to fig. 1 and 2, fig. 1 shows a top view of an adjusting platform according to an embodiment of the invention, and fig. 2 is a schematic cross-sectional view of fig. 1. The adjusting platform provided by the embodiment of the invention comprises a base body 100 and a leveling assembly 200, wherein the base body 100 is used for installing and fixing the leveling assembly 200, and the leveling assembly 200 is used for leveling a workpiece.
Referring to fig. 2, the base 100 has a hollow cylindrical structure with a cylindrical wall 110, and opposite first and second openings 111 and 112, the first and second openings 111 and 112 communicating with an inner hollow region of the base 100. The cylinder wall 110 is provided with a plurality of first coupling holes 113 uniformly along a circumferential direction. The leveling assembly 200 is connected to the base 100 through the first opening 111 and the second opening 112. The substrate 100 is made of stainless steel.
Referring to fig. 2, the leveling assembly 200 includes a support 300, an elastic member 400, and a fixing member 500, which are sequentially connected, and a driving assembly 600. Referring also to fig. 1, there are at least three elastic members 400 between the supporting member 300 and the fixing member 500, and the driving assembly 600 is connected to the supporting member 300.
The supporting member 100 is used for carrying a workpiece to be tested, and the fixing member 500 is used for fixing the leveling assembly 200 on the base 100 and carrying the elastic member 400 and the supporting member 100. The driving assembly 600 is used for applying different amounts of force to the supporting member 300, so as to elastically deform and/or at least partially recover the elastic deformation of at least one elastic member 400 connected to the supporting member 300, thereby displacing the region of the supporting member 100 corresponding to the elastic member 400 in the vertical direction, and finally changing the position of different parts of the workpiece in the vertical direction.
Referring to fig. 3, fig. 3 shows a schematic structural view of a support 300. In this embodiment, the support 300 has a disk-like structure. Referring also to fig. 5, the support 300 includes an upper surface 310, a lower surface 320, and a circumferential side 330. The upper surface 310 and the lower surface 320 are parallel to each other, and the circumferential side 330 is located between the upper surface 310 and the lower surface 320 and perpendicular to the upper surface 310 and the lower surface 320, respectively. The upper surface 310 is in direct contact with the workpiece and the lower surface 320 mates with the resilient member 400.
Referring to fig. 3 and 4, the support 300 is provided with a recess 340, and the recess 340 is used to cooperate with the elastic member 400. In particular, referring also to fig. 5, fig. 5 shows a schematic partial cross-section of the support 300. The recess 340 is a groove having a recess surface 341 formed by recessing a set depth from the lower surface 320 of the support 300 toward the upper surface 310. Referring to fig. 4, in the present embodiment, three concave portions 340 are provided and are uniformly distributed around the central axis of the support 300, that is, the connection line of the central points of the three concave portions 340 is isosceles triangle. The three recesses 340 are respectively engaged with the corresponding three elastic members 400.
Referring to fig. 5, the concave surface 341 has circumferential dimensions of different sizes in the up-down direction. In the present embodiment, the circumferential dimension of the concave surface 341 gradually becomes smaller from the lower surface 320 of the support 300 to the upper surface 310. In this embodiment, the concave surface 341 is tapered.
The shape of the recess 340, the depth of the recess, and the circumferential dimension of the recess surface 341 may be correspondingly configured according to the actual shape and dimension of the elastic member 400 that is engaged with the support member 300.
Referring to fig. 4 and 5, the support 300 is provided with a mounting hole 350, and the mounting hole 350 is used to connect with the driving assembly 600. Mounting holes 350 extend through the upper surface 310 and the lower surface 320 of the support 300. The mounting hole 350 communicates with the recess 340. The central axis of the mounting hole 350 coincides with the central axis of the recess 340. The number of the mounting holes 350 is three, which are respectively communicated with the corresponding recesses 340.
As shown in fig. 5, the mounting hole 350 may be a counter-bored hole, a tapered hole, or the like. If the mounting hole 350 is a tapered hole, the hole diameter of the mounting hole 350 becomes gradually smaller in the direction from the upper surface 310 to the lower surface 320 of the support 300.
In this embodiment, the material of the supporting member 300 is stainless steel, or other metal materials with a modulus of elasticity greater than that of the elastic member 400. The upper surface 310 of the support 300 is subjected to a high precision polishing process.
Referring to fig. 6 and 7, fig. 6 and 7 show schematic structural views of the fixing member 500 at different angles, respectively. The fixing member 500 includes a circumferential wall 510 and a base plate 520, the base plate 520 has a disk shape, and the circumferential wall 510 has a hollow cylindrical structure. The base plate 520 covers the end of the circumferential wall 510. The base plate 520 is connected to the elastic member 400, and the circumferential wall 510 is connected to the cylinder wall 110 in the base 100. For ease of description, the surface of the base plate 520 facing away from the circumferential wall 510 is referred to as an upper surface 521, and the surface of the base plate 520 facing toward the circumferential wall 510 is referred to as a lower surface 522. In this embodiment, the diameter of the base plate 520 is the same as the diameter of the support 300.
Referring to fig. 6, the upper surface 521 of the base 520 is provided with a recess 511, and the recess 511 is used to cooperate with the elastic member 400. Referring to fig. 9, fig. 9 is a schematic partial cross-sectional view of the fixture 500, and the concave recess 511 is a groove with a concave surface 512 formed by recessing a set depth from the upper surface 521 of the substrate 510 toward the lower surface 522.
Referring to fig. 8, fig. 8 shows a schematic top view of the fixture 500. In the present embodiment, the number of the concave recesses 511 is three, and the concave recesses 511 are distributed around the central axis of the substrate 520 at equal angles, and the line connecting the central points of the three concave recesses 511 is isosceles triangle. The three depressed portions 511 are respectively engaged with the corresponding three elastic members 400.
Referring to fig. 9, the low concave surface 512 has circumferential dimensions of different sizes. The circumferential dimension of the low concave surface 512 becomes gradually smaller from the upper surface 521 to the lower surface 522 of the substrate 520. In this embodiment, the low concavity 512 of the low concavity 511 is tapered. The shape of the concave depression 511, the depth of the depression, and the circumferential dimension of the concave depression 512 may be configured according to the actual shape and dimension of the elastic member 400.
Referring to fig. 6 and 9, a wire outlet 513 is formed in the substrate 520, and the wire outlet 513 is connected to the driving assembly 600. The wire outlet hole 513 penetrates through the upper surface 521 and the lower surface 522 of the substrate 520. The wire outlet hole 513 is located at a position of the central region of the low recess 511, that is, the central axis of the wire outlet hole 513 coincides with the central axis of the low recess 511. The number of the wire outlet holes 513 is three, and the central axes of the three wire outlet holes 513 are respectively coincident with the central axes of the corresponding depressed portions 511.
Referring to fig. 7 and 9, the circumferential wall 510 is provided with a second connection hole 514. In the present embodiment, the second connection holes 514 are provided in three, and are uniformly provided along the circumferential direction of the circumferential wall 510. Referring to fig. 2, the second connecting hole 514 corresponds to the first connecting hole 113 of the base 100, the fixing member 500 is fixed to the cylinder wall 110 of the base 100 through the second connecting hole 514, and the base 520 and the cylinder wall 110 may be connected by a screw or other means.
In this embodiment, the fixing member 500 is made of stainless steel or other metal materials with a modulus of elasticity greater than that of the elastic member 400.
Referring to fig. 10, fig. 10 shows a schematic structural view of the elastic member 400. The elastic member 400 includes a cylinder 410, and the cylinder 410 includes an upper end face 411 and a lower end face 412 that are parallel to each other.
Referring to fig. 11, fig. 11 shows a front projection view of the elastic member 400. The upper end face 411 of the column 410 is provided with a protruding structure 413, and the protruding structure 413 is formed by extending from the upper end face 411 in a direction away from the column 410. The protruding structure 413 is configured to cooperate with the recess 340 provided on the support 300 to form a conical surface contact. Referring also to fig. 12, the cross-sectional area of the protrusion 413 gradually decreases in a direction from the upper end face 411 toward the column 410. Referring to fig. 11, the protrusion 413 is symmetrical about the central axis of the elastic member 400 in the up-down direction, and the central axis of the protrusion 413 coincides with the central axis of the cylinder 410. In this embodiment, the protrusion 413 is integrally formed with the post 410.
Referring to fig. 11, a boss structure 414 is provided on a lower end surface 412 of the column 410, and the boss structure 414 is formed by extending from the lower end surface 412 in a direction away from the column 410. The boss structure 414 is adapted to cooperate with a recess 511 provided on the fixture 500 to form a conical surface contact. The cross-sectional area of the boss structure 414 gradually decreases in a direction from the lower end face 412 toward away from the cylinder 410. Referring to fig. 11, the boss structure 414 is symmetrical about the central axis of the elastic member 400 itself, and the central axis of the boss structure 414 coincides with the central axis of the cylinder 410. In this embodiment, the boss structure 414 is integrally formed with the cylinder 410.
Referring to fig. 11, in the present embodiment, the protrusion 413 formed on the upper end 411 of the pillar 410 has the same shape as the protrusion 414 formed on the lower end 412, that is, the elastic member 400 is symmetrical about its horizontal center line. Referring to fig. 2, in the present embodiment, the protrusion 413 is engaged with the recess 340, and the boss 414 is engaged with the recess 511, so that a stable connection relationship is formed between the support 300 and the elastic member 400, and between the elastic member 400 and the fixing member 500.
In other embodiments, a convex structure may be provided on a side of the support 300 facing the elastic member 400, and a concave portion may be provided on a side of the elastic member 400 facing the support 300; a boss structure is provided at a side of the fixing member 500 facing the elastic member 400, and a recess is provided at a side of the elastic member 400 facing the fixing member 500.
Referring to fig. 10 and 12, the elastic member 400 has a threading hole 420 at a central region thereof, and the threading hole 420 is used for connecting with the driving assembly 600. The central axis of the threading hole 420 coincides with the central axis of the cylinder 410.
In this embodiment, the elastic member 400 is made of brass, so as to obtain a more precise deformation according to its mechanical properties. In other embodiments, the elastic member 400 may be made of other metal materials with higher elastic modulus.
The elastic modulus of the supporter 300 and the elastic modulus of the supporter 500 are both greater than those of the elastic member 400.
Referring to fig. 1 and 2, when the adjustment platform is in an assembled state, three concave portions 340 provided on the support member 300 are respectively correspondingly matched with the convex structures 413 of the upper end faces 411 of the three elastic members 400; three concave recesses 511 provided on the fixing member 500 are respectively engaged with the boss structures 414 of the lower end faces 412 of the three elastic members 400; namely, three elastic members 400 distributed at equal angles are provided between the supporting member 300 and the fixing member 500. The central axis of the low recess 511, the central axis of the raised structure 413, the central axis of the boss structure 414, and the central axis of the recess 340 coincide. The centerlines of the installation hole 350 provided on the support 300, the threading hole 420 provided on the elastic member 400, and the wire outlet hole 513 provided on the fixing member 500 coincide.
In the adjusting platform of the present embodiment, the supporting member 300 and the elastic member 400 are respectively set to be in conical surface fit, and the fixing member 500 and the elastic member 400 are respectively set to be in conical surface fit, so that the supporting member 300 and the elastic member 400 can be mutually limited in the horizontal direction, and the elastic member 400 and the fixing member 500 can be mutually limited in the horizontal direction. Therefore, the adjusting platform cannot shift horizontally, and the leveling precision is ensured.
Referring to fig. 2, the driving assembly 600 includes a traction portion 610 and a power portion 620, wherein one end of the traction portion 610 is connected to the support 300, and the other end is wound around the power portion 620, and can be unwound or wound up under the driving of the power portion 620. For convenience of description, an end of the traction portion 610 connected to the supporter 300 is referred to as a fixed end 611, and an end of the traction portion 610 connected to the power portion 620 is referred to as a free end 612.
Referring to fig. 2, the power portion 620 is disposed in a hollow region in the base 100 and is mounted on the cylinder wall 110. The power portion 620 is located below the substrate 520. The power unit 620 is provided with an output hole 621. The center line of the output hole 621 coincides with the center line of the mounting hole 350 provided on the support 300, the threading hole 420 provided on the elastic member 400, and the wire outlet hole 513 provided on the fixing member 500 so that the traction portion 610 does not deflect in the up-down direction.
Referring to fig. 2, the fixing end 611 of the traction portion 610 is disposed in the mounting hole 350 of the support 300 and fixed with respect to the mounting hole 350. The fixing end 611 of the traction portion 610 may be fixed in the mounting hole 350 by an expansion bolt, for example, or may be connected by other means, which is not limited herein. The free end 612 of the traction portion 610 is wound around the power portion 620 through the coaxial wire passing hole 420, the wire outlet hole 513 and the output hole 621 in order.
The power parts 620 are arranged in three and are uniformly distributed along the center line of the cylinder wall 110. Accordingly, there are three traction portions 610 connected to the corresponding power portions 620. That is, the three sets of driving assemblies 600 are respectively connected to three different positions of the supporting member 300 to apply forces to the different positions of the supporting member 300, so that the three independent elastic members 400 respectively engaged with the supporting member 300 are respectively deformed or at least partially restored to be deformed.
In this embodiment, the power unit 620 is a stepper motor, or other power device that can provide precise movement.
The driving assembly 600 further includes a controller, which is connected to the power portion 620 to control the power portion 620 to drive the traction portion 610 to wind or unwind, and apply different amounts of tensile force to the traction portion 610.
Referring to fig. 2, in the present embodiment, the adjustment platform is in an assembled state, and the fixing member 500 is embedded in the base 100 and is located at the first opening 111. The upper surface 521 of the base 520 of the fixing member 500 does not protrude from the cylinder wall 110. The outer surface of the circumferential wall 510 mates with the inner surface of the cartridge wall 110, and the circumferential wall 510 is secured to the cartridge wall 110 by screws. The boss structure 414 at one end of the elastic member 400 is engaged with the concave portion 511 of the fixing member 500, and the boss structure 413 at the other end is engaged with the concave portion 340 of the supporting member 300, i.e., the elastic member 400 is sandwiched between the supporting member 300 and the fixing member 500. The fixed end 611 of the traction portion 610 is connected to the support 300, and the free end 612 is wound around the power portion 620 through the wire passing hole 420, the wire outlet hole 513 and the output hole 621.
Three elastic members 400 which are uniformly arranged in the circumferential direction are arranged between the supporting member 300 and the fixing member 500, and the leveling purpose can be simply and efficiently achieved while a plane is determined. In other embodiments, the number of elastic members 400 provided between the support member 300 and the fixing member 500 may be greater than three, and accordingly, the number of concave portions 340 on the support member 300 for engaging with the elastic members 400 may be changed, and similarly, the number of concave portions 511 on the fixing member 500 for engaging with the elastic members 400 may be changed.
The adjusting platform is simple in structure, low in process difficulty and easy to realize, and different leveling accuracy can be obtained by changing the material of the elastic piece 400. Under the condition of requiring high precision, the cost is greatly reduced compared with piezoelectric ceramics.
Before leveling the workpiece, the three groups of traction parts 610 are rolled by a set length, and when the traction parts 610 are rolled under the drive of the power part 620, the traction parts 610 pull the supporting piece 300 to move downwards and apply pressure to the elastic piece 400, and the elastic piece 400 is elastically deformed, which can be called as pre-deformation. The upper surface 310 of the support 300 is then leveled to be in a horizontal state.
In the process of leveling the workpiece to be measured, if a certain position of the workpiece to be measured on the supporting member 300 needs to be raised, the power part 620 drives the traction part 610 to unreel; at this time, the tensile force applied to the supporting member 300 becomes small enough to enable the elastic member 400 to still maintain the current deformation amount, and the elastic member 400 at least partially recovers the deformation to push the corresponding position of the supporting member 300 to move upwards, so that the workpiece to be tested is lifted. Conversely, if a certain position of the workpiece to be measured needs to be lowered, the power part 629 drives the traction part 610 to perform winding work; the supporting member 300 is pulled downward by the pulling portion 610, and the supporting portion 300 compresses the elastic member 400 downward to deform downward. By adjusting the deformation amounts of the three independent elastic members 400, the displacement amount of the supporting member 300 in the up-down direction can be realized, and thus the leveling of the workpiece to be measured can be realized.
In the practical experimental process, the elastic member 400 is made of brass, the elastic modulus of the brass is 140GPa, the poisson ratio thereof is 0.34,the length of the elastic member 400 is set to 10mm. The stress area of the single elastic member 400 was 0.0003m 2 When a force of 0.1N is applied to the elastic member 400, the deformation amount of the elastic member 400 is 10nm, and thus the leveling accuracy of the nanometer level can be realized.
The adjusting platform not only can be used for leveling work, but also can be applied to nanoindentation measurement technology. For example, the workpiece is placed on an adjusting platform, and a continuous dynamic ultra-low load is applied to the workpiece to obtain the nano-scale pressure depth, so that the mechanical property of the workpiece can be measured on the nano scale.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.

Claims (10)

1. An adjustment platform, comprising: the device comprises a support piece, at least three elastic pieces, a fixing piece and a driving assembly, wherein one end of each elastic piece is connected with the support piece, and the other end of each elastic piece is connected with the fixing piece; the driving assembly is connected with the supporting piece, and the supporting piece is driven by the driving assembly to deform and/or at least partially recover deformation of at least one elastic piece;
the elastic piece comprises a cylinder, and the cylinder comprises an upper end face and a lower end face which are parallel to each other;
comprising at least one of the following:
the elastic piece and the supporting piece are provided with concave parts and convex structures which are matched with each other;
the elastic piece and the fixing piece are provided with a concave part and a boss structure which are matched with each other.
2. The adjustment platform of claim 1, further comprising a base, the fixture being mounted to the base.
3. The adjustment platform of claim 2, wherein the securing member comprises a base plate and a circumferential wall connected, the base body comprising a hollow cylindrical wall, the base plate being connected to the resilient member, the circumferential wall being connected to the cylindrical wall.
4. An adjustment platform according to claim 3, characterized in that the cylinder wall is provided with a first connection hole and the circumferential wall is provided with a second connection hole at a position corresponding to the first connection hole.
5. The adjustment platform of claim 1, wherein the drive assembly comprises a traction portion and a power portion, the traction portion having opposite fixed and free ends, the fixed end of the traction portion being connected to the support member and the free end being connected to the power portion.
6. The adjustment platform of claim 5, further comprising a controller, wherein the power section is coupled to the controller.
7. The adjustment platform of claim 5, wherein the support member has a mounting hole, the power portion has an output hole, and a center line of the mounting hole and the output hole coincide; the fixed end of the traction part is positioned in the mounting hole, and the free end passes through the output hole to be connected with the power part.
8. The adjustment platform of claim 7, wherein the elastic member is provided with a threading hole, the fixing member is provided with a wire outlet hole, the center lines of the threading hole and the wire outlet hole are coincident with the center line of the mounting hole, and the free end of the traction portion sequentially passes through the threading hole and the wire outlet hole to be connected with the power portion.
9. The adjustment platform of claim 1, wherein the support member, the elastic member, and the fixing member are all metallic.
10. The adjustment platform of claim 9, wherein the support member and the securing member each have a modulus of elasticity that is greater than a modulus of elasticity of the elastic member.
CN202110790775.3A 2021-07-13 2021-07-13 Adjusting platform Active CN113447054B (en)

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CN210390135U (en) * 2019-07-24 2020-04-24 肇庆学院 SLM forming platform with leveling function
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CN113075219A (en) * 2021-03-24 2021-07-06 上海御微半导体技术有限公司 Leveling and focusing device

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KR102213854B1 (en) * 2019-07-24 2021-02-10 한국기계연구원 Imprinting head and imprinting apparatus comprising the same

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Publication number Priority date Publication date Assignee Title
CN108254007A (en) * 2018-01-15 2018-07-06 张帝 One kind can automatic leveling machine components detecting system
CN109001029A (en) * 2018-06-26 2018-12-14 安徽六启教育软件科技有限公司 The compressive strength tester device of the thin-wall part of balance-adjustable
CN208283544U (en) * 2018-06-27 2018-12-25 北京行易道科技有限公司 Levelling mechanism and corner reflector levelling device
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