CN113305914A

CN113305914A - Positioning device and positioning and conveying system

Info

Publication number: CN113305914A
Application number: CN202011332160.8A
Authority: CN
Inventors: 西尾仁孝
Original assignee: Mitsuboshi Diamond Industrial Co Ltd
Current assignee: Mitsuboshi Diamond Industrial Co Ltd
Priority date: 2020-02-27
Filing date: 2020-11-24
Publication date: 2021-08-27
Also published as: JP7076828B2; KR20210109431A; TW202133316A; JP2021136354A

Abstract

The invention provides a positioning device and a positioning and conveying system capable of efficiently positioning a substrate by a simple structure. The positioning device (10) according to the present invention comprises: at least a pair of moving sections (100A, 100C) supported so as to be able to approach and separate from each other in a direction parallel to the substrate (F); pins (110) which are respectively arranged on the pair of moving parts (100A, 100C) and lock the periphery of the substrate (F); a support member (120) which is disposed between the pair of moving sections (100A, 100C) and is axially supported by a shaft member (124) perpendicular to the substrate (F); a pair of links (130A, 130C) that respectively connect the support member (120) and the moving sections (100A, 100C); and a drive unit (140) that rotates the support member (120) relative to the shaft member (124).

Description

Positioning device and positioning and conveying system

Technical Field

The present invention relates to a positioning device for positioning a substrate and a positioning and conveying system having the same.

Background

Generally, when a substrate made of a brittle material such as a glass substrate is divided, a scribing step of forming a scribe line on the substrate and a breaking step of dividing the substrate along the scribe line are performed. In the scribing step, an alignment mark is added to a predetermined position of the substrate in advance. The substrate is placed on the table so that the portion to which the alignment mark is added is located at a predetermined position of the table.

In the substrate processing method disclosed in patent document 1 below, an alignment mark is added to a corner portion of a substrate, and when the substrate is placed on a stage, an imaging reference position is imaged by a camera provided in a scribe head. The image taken by the camera is output to a control unit of the scribing apparatus. The control unit determines whether or not the alignment mark stored in the storage unit matches the shape of the mark to be photographed. When no mark is captured or the captured mark does not match the alignment mark, the substrate is captured while gradually changing the imaging area, and the alignment mark is searched for.

When the alignment mark is confirmed, the control unit corrects the position at which machining starts, based on a deviation between the imaging reference position and the position of the alignment mark. Then, the scribing process is started from the corrected position.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open No. 2012 and 138548.

Problems to be solved by the invention

In patent document 1, for example, even when the alignment mark is far from the imaging reference position, the alignment mark is searched while gradually moving the imaging region. In this case, it takes time to confirm the alignment mark and the start of the scribing process is delayed, so that the scribing process cannot be efficiently performed.

Such a phenomenon may occur when the substrate placed on the stage is in an improper posture. Therefore, it is necessary to position the substrate with respect to the table so that the posture of the substrate on the table is appropriate.

Disclosure of Invention

In view of the above problem, an object of the present invention is to provide a positioning device and a positioning and conveying system capable of efficiently positioning a substrate with a simple configuration.

Means for solving the problems

A first aspect of the invention relates to a positioning device. The positioning device according to the present embodiment includes: at least one pair of moving portions supported so as to be able to approach and separate from each other in a direction parallel to the substrate; pins which are respectively arranged on the pair of moving parts and lock the periphery of the substrate; a support member disposed between the pair of moving portions and axially supported by a shaft member perpendicular to the substrate; a pair of links that respectively connect the support member and the moving portions; a driving portion that rotates the support member relative to the shaft member.

According to the configuration of the present aspect, when the support member is rotated in the predetermined direction by the driving portion, the pair of moving portions simultaneously move in the direction of approaching each other in accordance with the rotation of the support member. Thus, when the pair of moving portions move, the substrate is sandwiched in the in-plane direction by the pins disposed in the respective moving portions. Thereby, the substrate is positioned at the intermediate position between the pair of moving portions. Therefore, according to the positioning device of the present embodiment, the pair of moving portions can be moved synchronously by one driving portion, and the substrate can be positioned at a predetermined position. Therefore, the substrate can be positioned efficiently with a simple configuration.

In the positioning device according to the present aspect, the moving unit includes: a slide member provided with the pin; a coupling member that is disposed on the support member side with respect to the slide member and is coupled to the link; a magnet that causes the sliding member and the coupling member to attract each other.

According to the configuration of this aspect, when the positioning pin abuts against the substrate, the substrate becomes an obstacle, and the slide member cannot move further toward the substrate side. On the other hand, since the coupling member is coupled to the link, when the support member further rotates thereafter, the coupling member is separated from the slide member against the attracting force by the magnet, and moves solely to the support member side. Thus, when the positioning pin is in contact with the substrate, no excessive load is applied to the substrate. Therefore, the substrate can be prevented from being damaged or deformed.

In the positioning device according to the present aspect, the positioning device may be configured such that: the two pins are disposed in the moving portion so as to be spaced apart from each other in a direction intersecting with a moving direction of the moving portion, and a plurality of sets of two holes into which the two pins are inserted are provided in the moving portion so as to be spaced apart from each other in the moving direction of the moving portion, and the holes of the respective sets are spaced apart from each other.

According to the configuration of the present aspect, when the substrate has a diagonal line in the diagonal direction in a plan view, the substrate can be positioned by engaging the two pins disposed in the respective moving portions with the respective corners of the substrate. Further, since a plurality of sets of holes having different pitches are provided in each moving portion, the interval between the two pins can be changed by changing the hole into which the pin is fitted. For example, when the substrate is large in size, the wider the pitch between the two pins is, the more stable the substrate can be positioned. Therefore, according to the above configuration, the substrate can be positioned more stably according to the size of the substrate.

In the positioning device according to the present aspect, the positioning device may be configured such that: the pair of moving portions and the pair of links are arranged in plural at different positions around the shaft member.

According to the configuration of the present aspect, the substrate can be positioned by sandwiching the substrate between the pins at a plurality of different positions on the outer periphery of the substrate. Therefore, the substrate can be positioned more appropriately.

In the positioning device according to the present aspect, the positioning device may be configured such that: the pair of moving portions and the two sets of the pair of links are disposed at two positions orthogonal to each other around the shaft member, respectively, and the two pins are disposed in the moving portions of the respective sets so as to be spaced apart in a direction intersecting a moving direction of the moving portions.

According to the configuration of the present embodiment, when the substrate is square in a plan view, the two pins can be engaged with the four corners of the substrate. Therefore, the square substrate can be appropriately positioned.

A second aspect of the present invention relates to a positioning and conveying system. The positioning and conveying system according to the present embodiment includes: a positioning device for positioning a position of the substrate; a transport device that transports the substrate to the positioning device. The positioning device has: at least one pair of moving portions supported so as to be able to approach and separate from each other in a direction parallel to the substrate; pins which are respectively arranged on the pair of moving parts and lock the periphery of the substrate; a support member disposed between the pair of moving portions and axially supported by a shaft member perpendicular to the substrate; a pair of links that respectively connect the support member and the moving portions; a driving portion that rotates the support member relative to the shaft member.

With the configuration according to the present embodiment, the same effects as those of the first embodiment are obtained.

In the positioning and conveying system according to the present aspect, the conveying device includes: a stage on which the substrate is placed; a conveying part for conveying the worktable. The stage may be configured to suck the substrate placed thereon by an air pressure applied by an air pressure source, and the transport device may be configured to release the suction of the substrate while the substrate is positioned by the positioning device, and to perform the suction operation of the substrate based on the positioning of the substrate by the positioning device.

According to the configuration of the present aspect, the substrate positioned by the positioning device can be transported while being held in position by suction.

In this case, the positioning and conveying system may be configured to: the positioning device includes a detection unit for detecting a movement position of the moving unit, and the transport device starts the suction operation of the stage with respect to the substrate based on the detection by the detection unit that the moving unit has moved to a position corresponding to the size of the substrate.

Effects of the invention

As described above, according to the present invention, it is possible to provide a positioning device and a positioning and conveying system that can efficiently position a substrate with a simple configuration.

The effects and significance of the present invention will be more apparent from the following description of the embodiments. However, the embodiment described below is merely an example for carrying out the present invention, and the present invention is not limited to the contents described in the embodiment below.

Drawings

Fig. 1 is a perspective view showing a structure of a positioning device according to an embodiment.

Fig. 2 is a perspective view showing a structure of a positioning device according to an embodiment.

Fig. 3 is a perspective view showing a structure of a positioning device according to an embodiment.

Fig. 4 is a perspective view showing a structure of a part of the positioning device according to the embodiment.

Fig. 5 (a) and (b) are schematic diagrams for explaining the operation of the positioning device according to the embodiment.

Fig. 6 (a) is a schematic diagram for explaining the operation of the positioning device according to the embodiment. Fig. 6 (b) is a schematic diagram showing a positional relationship between the substrate and the pins in the positioning device according to the embodiment.

Fig. 7 (a) to (c) are schematic diagrams for explaining the operation of the positioning and conveying system according to the embodiment.

Fig. 8 is a block diagram showing the configuration of the positioning and conveying system.

Fig. 9 (a) is a flowchart showing the operation of the moving units 100A to 100D of the positioning device. Fig. 9 (b) is a flowchart showing the operation of the transport device 20.

Detailed Description

Hereinafter, embodiments of the present invention will be described with reference to the drawings. For convenience, X, Y, and Z axes orthogonal to each other are shown in the drawings. The X-Y plane is parallel to the horizontal plane, and the Z-axis direction is vertical. The positive side of the Z axis is the upper side, and the negative side of the Z axis is the lower side. In the following description, the upward and downward movements mean movements to the positive and negative sides of the Z axis.

< embodiment >

[ positioning transport system ]

A brittle material substrate such as a glass substrate (hereinafter simply referred to as "substrate F") is subjected to various processes to form a final product. Examples of such steps include a step of dividing the mother substrate into substrates F having a predetermined size, a step of forming scribe lines on the divided substrates F, and a step of dividing the substrates F along the scribe lines. The substrate F is carried into a predetermined processing table in each step, and when one step is completed, is carried out to another processing table for the next step.

The positioning and conveying system according to the present embodiment will be described as a conveying system for performing the following operations: the stage on which the substrate is placed is received at a predetermined position, the substrate F is positioned with respect to the stage, and then the stage is transported to the scribing apparatus together with the substrate.

Examples of the type of the substrate F include organic material substrates (including films and sheets) such as resin substrates of polyimide resin, polyester resin such as polyamide resin and PET, polyolefin resin such as polyethylene and polypropylene, and polyethylene resin such as polystyrene and polyvinyl chloride. The resin substrate may be a laminate of different substrates, for example, a laminate of PET, polyimide resin, and PET in this order from the lower layer. Further, a glass substrate, a ceramic substrate such as low-temperature sintered ceramic or high-temperature sintered ceramic, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, a quartz substrate, or the like may be used. In addition, the substrate F may have a thin film or a semiconductor material, which is not a brittle material, attached to or contained in the surface or the inside thereof. In the present embodiment, an alumina substrate is used as the substrate F.

In the present embodiment, the substrate F formed in a square shape is positioned.

The positioning and conveying system has a positioning device for positioning the substrate F with respect to the table, and a conveying device for conveying the substrate F and the table at the same time.

[ positioning device ]

First, the structure of the positioning device 10 will be described with reference to fig. 1 to 4.

Fig. 1 is a perspective view showing the structure of a positioning device 10. Fig. 2 is a perspective view showing the structure of the positioning device 10.

As shown in fig. 1 and 2, the positioning device 10 includes four moving portions 100A to 100D, a pin 110, a support member 120, four links 130A to 130D, a driving portion 140, and a detection portion 150. The positioning device 10 is mounted on the frame 2.

Fig. 3 is a perspective view of fig. 2 as viewed from the lower side (Z-axis negative side). The chassis 2 and the driving unit 140 are omitted in fig. 2 and 3.

As shown in fig. 2, the four moving portions 100A to 100D are arranged at different positions around the axis of a shaft member 124 (see fig. 4) that supports the support member 120. The four moving units 100A to 100D can be divided into two groups of moving

units

100A and 100C and moving

units

100B and 100D. The group of moving

units

100A and 100C and the group of moving

units

100B and 100D are arranged in pairs. That is, the moving

portions

100A and 100C are disposed at symmetrical positions with respect to the shaft member 124 (see fig. 4). Similarly, the moving

portions

100B and 100D are disposed at symmetrical positions with respect to the shaft member 124 (see fig. 4). The moving

units

100A and 100C are arranged in the X-axis direction, and the moving

units

100B and 100D are arranged in the Y-axis direction. That is, the arrangement positions of the moving

portions

100A and 100C are different from the arrangement positions of the moving

portions

100B and 100D by 90 degrees around the shaft member 124 (see fig. 4).

Since each of the four moving portions 100A to 100D is configured in the same manner, the description will be made by taking the structure of the moving portion 100A as a representative.

The moving unit 100A includes a slide member 101, a coupling member 102, a magnet 103, and a shaft 104. The magnet 103 is not shown in fig. 2, but is shown in fig. 5 (a) to 6 (a).

The slide member 101 is a plate-like member formed in an L-shape. As shown in fig. 2 and 3, four holes 101b to 101e are formed in the bottom surface 101a of the slide member 101. The holes 101b to 101e are stepped holes. The holes 101b to 101e can be divided into two groups of

holes

101b and 101c and

holes

101d and 101 e.

The groups of

holes

101b and 101c are arranged in the Y-axis direction. The same applies to the sets of

holes

101d, 101 e. The group of

holes

101b and 101c is disposed closer to the support member 120 than the group of

holes

101d and 101 e. Further, the distance between the

holes

101d, 101e is narrower than the distance between the

holes

101b, 101 c.

The same applies to the arrangement of the holes 101b to 101e in the sliding member 101 of the moving portion 100C.

In the moving

portions

100B and 100D, the groups of holes 101B and 101c are arranged in the X-axis direction. The same applies to the sets of

holes

101d, 101 e. The group of

holes

101b and 101c is disposed closer to the support member 120 than the group of

holes

101d and 101 e. Further, the distance between the

holes

101d, 101e is narrower than the distance between the

holes

101b, 101 c.

Further, in the side wall 101f of the slide member 101, three magnets 103 are provided on the support member 120 side (see fig. 5a to 6 a).

The coupling member 102 is a rectangular block-shaped member. The coupling member 102 has a stepped hole formed in an upper surface thereof. The stepped hole is used when connecting to the link 130A. The coupling member 102 is connected to a magnet 103 provided on the slide member 101. Therefore, the coupling member 102 is formed of a member made of a magnetic material.

Alternatively, a sheet made of a magnetic material may be attached to a side surface of the coupling member 102, and the sheet may be attracted to the magnet 103.

Further, the magnet 103 may be provided at the coupling member 102. In this case, the slide member 101 is formed of a magnetic material. Further, as described above, a sheet made of a magnetic material may be attached to the sliding member 101, and the sheet may be attracted to the magnet 103.

The side wall 101f of the slide member 101 and the coupling member 102 are formed with two holes penetrating in the X-axis direction. In a state where the slide member 101 and the coupling member 102 are coupled via the magnet 103, the shafts 104 are inserted into two holes formed in the side wall 101f and the coupling member 102, respectively. The ends of the two shafts 104 on the X-axis negative side are fitted into two holes formed in the locking plate 105 and fixed thereto. The ends of the two shafts 104 on the X-axis positive side are fixed to a base 123 described later.

With such a configuration, the slide member 101 and the coupling member 102 can move along the shaft 104 while being integrated by the magnet 103.

As described above, the moving

units

100B, 100C, and 100D have the same configuration as the moving unit 100A.

Two pins 110 are provided for each of the slide members 101 of the moving portions 100A to 100D. As shown in fig. 2 and 3, the two pins 110 are respectively inserted into any two holes of the holes 101b to 101 e. In this case, the pin 110 is fitted from the lower surface side (Z-axis negative side) of the bottom surface portion 101a of the slide member 101.

In fig. 2 and 3, in the slide member 101 of the moving portion 100A, two pins 110 are inserted into the

holes

101b, 101 e. In the sliding member 101 of the moving portion 100B, two pins 110 are inserted into the

holes

101c, 101 d. In the sliding members 101 of the moving

portions

100C, 100D, two pins 110 are fitted into the holes 101b, 101C. The operation of the two pins 110 arranged in this manner will be described later.

As shown in fig. 2, the support member 120 is composed of a base portion 121 and a shaft portion 122 provided at the center of the base portion 121. A hole 120a in the Z-axis direction is formed in the center of the support member 120. The hole 120a is formed by connecting circular holes having the same diameter formed in the centers of the base portion 121 and the shaft portion 122.

The base portion 121 of the support member 120 is a plate-shaped member formed in a cross shape. The base portion 121 has one stepped hole formed at each of the end portions of four plate members arranged at equal intervals in a radial pattern. The stepped holes are used for connecting the links 130A to 130D to be described later to the support member 120.

As shown in fig. 3, a base 123 is disposed below the support member 120. The base 123 is formed in a shape in which four corners are cut off from a rectangular plate-like member. A circular hole 123a is formed in the center of the base 123 in the Z-axis direction.

In the moving portion 100B, end portions of the two shafts 104 (end portions opposite to the end portions fixed to the locking plate 105) are fitted into and fixed to two holes formed in the side surface of the base 123. The side surface of the base 123 on which the two holes are formed is located at a position facing the moving portion 100B.

The two shafts 104 provided in the moving

portions

100A, 100C, and 100D are also fitted into and fixed to respective holes formed in the base 123, similarly to the shaft 104 of the moving portion 100B.

Fig. 4 is a perspective view showing a structure of a part of the positioning device 10.

As shown in fig. 2 to 4, shaft member 124 is inserted into hole 120a of support member 120 and hole 123a of base 123. The shaft member 124 is fixed to the support member 120 by a bearing and a nut. The lower end of the shaft member 124 is fixed to the base 123 by an expansion sleeve. With this structure, the shaft member 124 supports the support member 120 and the base 123. The support member 120 is rotatably shaft-supported with respect to the base 123 by a shaft member 124.

As shown in fig. 2, the four links 130A to 130D are plate-like members formed in an arcuate shape. The links 130A to 130D connect the four moving portions 100A to 100D to the support member 120, respectively. The set of

links

130A and 130C and the set of

links

130B and 130D are disposed so as to be orthogonal to each other about the axis of shaft member 124 (see fig. 4).

The links 130A to 130D have both ends coupled to the coupling members 102 and the support members 120 of the moving portions 100A to 100D. As shown in fig. 2 and 4, in the connection of the link 130A and the moving portion 100A, a stepped screw 131 is inserted into a hole of the link 130A from above, and a washer is inserted through a shaft portion of the stepped screw 131. The screw portion of the stepped screw 131 is inserted into a stepped hole formed in the upper surface of the coupling member 102 of the moving part 100A and is screwed.

As shown in fig. 2 and 4, in the connection of the link 130A and the support member 120, a stepped screw 132 is inserted into a hole of the link 130A from below, and a washer is inserted into a shaft portion of the stepped screw 132. The screw portion of the shoulder screw 132 is inserted into a shoulder hole formed in the base portion 121 and screwed.

Thereby, the link 130A rotates about the step screw 131 when the support member 120 rotates.

The link 130C is coupled to the coupling member 102 and the support member 120 of the moving portion 100C, similarly to the link 130A.

As shown in fig. 2 and 4, in the connection of the link 130B and the moving portion 100B, a stepped screw 131 is inserted into a hole of the link 130B from above, and a shaft portion of the stepped screw 131 is covered with a collar 133. The screw portion of the stepped screw 131 is inserted into a stepped hole formed in the upper surface of the coupling member 102 of the moving portion 100B and is screwed.

As shown in fig. 2 and 4, in the connection of the link 130B and the support member 120, a stepped screw 132 is inserted into a hole of the link 130B from above, and a washer is inserted into a shaft portion of the stepped screw 132. The screw portion of the shoulder screw 132 is inserted into a shoulder hole formed in the base portion 121 and screwed.

Thereby, the link 130B rotates about the stepped screw 131 when the support member 120 rotates.

The link 130D is coupled to the coupling member 102 and the support member 120 of the moving portion 100D, similarly to the link 130B.

As described above, in the connection between the

links

130B and 130D and the respective connecting members 102 of the moving

portions

100B and 100D, the shaft portions of the stepped screws 131 are covered with the collars 133. Thereby, the

links

130B and 130D are located at a different height from the

links

130A and 130C across the support member 120. Therefore, when the support member 120 rotates, the links 130A to 130D can rotate without interfering with each other.

Further, the links 130A to 130D are formed in an arcuate shape. Therefore, when the support member 120 rotates about the shaft member 124, the links 130A to 130D can rotate while avoiding interference with the shaft member 124.

The structure for avoiding interference between the links 130A to 130D and the shaft members 124 is not limited to this. When the links 130A to 130D rotate without interfering with the shaft member 124, the links 130A to 130D may be formed in a linear shape instead of an arcuate shape.

Returning to fig. 1, the driving unit 140 includes a rotary driver 141 and gears 142 and 143. A gear 142 is fitted below the rotary driver 141. Gear 143 is configured to mesh with gear 142.

As shown in fig. 4, the gear 143 is centrally formed with a hole 143 a. The hole 143a is a stepped hole. The gear 143 is screwed to the upper surface of the shaft portion 122 of the support member 120 by a screw (not shown). Thereby, the gear 143 is integrated with the support member 120. Further, the shaft member 124 is inserted into the hole 143a of the gear 143 from the Z-axis positive side. The bearing is fitted between the shaft member 124 and the hole 143 a.

Based on such a structure, when the rotary driver 141 in fig. 1 is rotationally driven, the gear 142 is rotated. Then, the gear 143 engaged with the gear 142 rotates about the shaft member 124. As described above, since the support member 120 is integrated with the gear 143, the support member 120 rotates integrally with the gear 143.

Returning again to fig. 1, a block member 144 is provided above the gear 143. The block member 144 has a hole penetrating in the Z-axis direction, and the shaft member 124 is inserted into the hole and fixed (see fig. 4). A rotary driver 141 is also provided in the block member 144. The side of the block member 144 is fixed to the frame 2. Thereby, the positioning device 10 is mounted to the frame 2 via the block member 144.

As shown in FIGS. 2 and 3, the detection unit 150 includes four sensors 151 to 154. The sensors 151 to 154 are provided on the holding member 155. For example, the holding member 155 disposed between the moving

portions

100B and 100C is composed of three plate members 155a to 155C disposed radially at equal intervals.

The plate member 155a of the holding member 155 is screwed to the Z-axis negative side of the base 123 by a screw (not shown). The plate member 155B is disposed along the shaft 104 provided between the moving portion 100B and the base 123. The four sensors 151 to 154 are provided on the plate material 155b at predetermined intervals.

The plate member 155C of the holding member 155 is disposed along the shaft 104 provided between the moving portion 100C and the base 123. The four sensors 151 to 154 are provided on the plate material 155c at predetermined intervals.

Similarly, a holding member 155 is disposed between the moving

portions

100A and 100D, and a detecting portion 150 (four sensors 151 to 154) is provided.

The sensors 151 to 154 are used to detect the positions of the respective coupling members 102. However, the sensors 151 to 153 are provided according to the size of the substrate F. For example, the outermost sensors 151 of the moving units 100A to 100D are arranged so as to correspond to the positions of the four corners when the positioning device 10 positions the substrate F of the maximum size that can be positioned.

On the other hand, the sensor 154 is provided at a position close to the support member 120. The sensors 151 to 154 will be described in detail later.

[ operation of positioning device ]

Fig. 5 (a) to 6 (a) are plan views schematically showing the positioning apparatus 10 for explaining the operation of the positioning apparatus 10. Fig. 6 (b) is a plan view schematically showing the substrate F and the pins 110 in the state of fig. 5 (b) and fig. 6 (a). For convenience of explanation, fig. 5 (a) to 6 (a) only show the moving portions 100A to 100D, the links 130A to 130D, the support member 120, and the base 123.

Although the substrate F is not shown in fig. 5 (a) to 6 (a), the positioning of the substrate F shown in fig. 1 will be described in the following description. In this case, the substrate F is placed on the stage 210 (see fig. 7 a). The sensor corresponding to the substrate F is the sensor 151 in the detection unit 150 described with reference to fig. 2 and 3.

As shown in fig. 5 (a), in the initial state, the sliding members 101 of the moving portions 100A to 100D are in a state of abutting against the locking plate 105. In fig. 5 (a), each slide member 101 and each coupling member 102 are connected via a magnet 103. The position of each coupling member 102 in fig. 5 (a) is referred to as a "start position".

When the support member 120 rotates counterclockwise in the X-Y plane from the state of fig. 5 (a), the links 130A to 130D coupled to the support member 120 also move in accordance with the rotation of the support member 120. Therefore, when the support member 120 rotates counterclockwise, the slide members 101 and the coupling members 102 of the moving portions 100A to 100D are drawn inward along the shafts 104 by the links 130A to 130D, respectively. Thereby, the sliding members 101 and the coupling members 102 of the moving portions 100A to 100D linearly move along the shafts 104 toward the support member 120 in synchronization with each other. Thereby, the links 130A to 130D are rotated clockwise about the stepped screw 131 in each coupling member 102.

As described above, the links 130A to 130D have the same configuration and are coupled to the support member 120. Since the moving portions 100A to 100D are configured identically to each other, the moving portions 100A to 100D move toward the supporting member 120 simultaneously and by the same amount of movement as the supporting member 120 rotates.

When the slide members 101 and the coupling members 102 of the moving portions 100A to 100D are positioned as shown in fig. 5 (b), the two pins 110 provided in the respective slide members 101 abut on the substrate F. At this time, as shown in fig. 6 (b), the four corners of the substrate F are engaged with the two pins 110. Further, the substrate F is sandwiched in the diagonal direction by a pair of pins 110 arranged in the diagonal direction. As a result, the substrate F is positioned with respect to the table 210 (see fig. 7 a) without moving forward, backward, leftward, and rightward. Thus, the position where the substrate F is positioned by abutting the pin 110, that is, the position of the coupling member 102 in fig. 5 (b), is referred to as "positioning position".

At this time, the sensor 151 constituting the detection unit 150 of fig. 2 detects that the coupling member 102 is located at the positioning position. As described above, the coupling member 102 is already located at the positioning position, which means that the pin 110 provided in the slide member 101 abuts on the substrate F. Thereby, the substrate F is positioned by the pins 110. Therefore, "the coupling member 102 has reached the positioning position" means "positioning of the substrate F is performed".

Therefore, by detecting the position of the coupling member 102 by the detection unit 150, it is possible to grasp whether or not the substrate F is properly positioned.

In the present embodiment, in order to detect the state of the substrate F (whether the substrate F is positioned) as described above, the sensors 151 to 153 are disposed at positions corresponding to the size of the substrate F as described with reference to fig. 2.

In this way, when the support member 120 is rotated after the coupling member 102 has reached the positioning position, the slide member 101 is separated from the coupling member 102 as shown in fig. 6 (a). That is, since the pins 110 are provided on the slide members 101, the substrate F becomes a stopper, and the slide members 101 cannot move further toward the support member 120 side, that is, toward the inside of the substrate F.

On the other hand, the connecting members 102 are connected to the links 130A to 130D, respectively. Therefore, as the support member 120 continues to rotate, each coupling member 102 is separated from each sliding member 101 against the attracting force generated by the magnet 103.

Thereafter, the coupling member 101 separated from the slide member 101 moves toward the support member 120 in accordance with the rotation of the support member 120. In the present embodiment, the position where the coupling member 102 is closest to the support member 120 is referred to as an "end position".

The sensor 154 detects that the coupling member 102 is located at the end position. This makes it possible to grasp that the coupling member 102 is normally separated from the slide member 101 at the positioning position and reaches the end position.

After the coupling member 102 is located at the end position, when the support member 120 rotates in the reverse direction (i.e., clockwise), the coupling member 102 moves to the positioning position. At this time, the links 130A to 130D move in accordance with the rotation of the support member 120.

When the coupling member 102 reaches the positioning position, the coupling member 102 and the slide member 101 are connected via the magnet 103. This corresponds to the state of fig. 5 (b). When the support member 120 rotates, the coupling member 102 moves to the start position integrally with the slide member 101. This corresponds to the state of fig. 5 (a).

As described above, the slide member 101 and the coupling member 102 move from the start position to the positioning position (fig. 5 (a) and (b)) by the counterclockwise rotation of the support member 120, and only the coupling member 102 moves from the positioning position to the end position (fig. 6 (a)). Then, the coupling member 102 moves from the end position to the positioning position again based on the clockwise rotation of the support member 120, and when the coupling member 102 reaches the positioning position, the coupling member moves from the positioning position to the start position while being connected to the slide member 101 via the magnet 103.

Further, when the slide member 101 and the coupling member 102 reach the positioning position, only the coupling member 102 moves from the positioning position to the end position, and moves from the end position to the positioning position again, the positioned substrate F is conveyed by the conveying device 20 described later.

[ operation of the conveyor ]

Next, the conveyance of the substrate F by the conveyance device 20 will be described.

Fig. 7 (a) to (c) are schematic views showing a state in which the substrate F is conveyed to the positioning device 10 by the conveying device 20 in the positioning and conveying system. In addition, only fig. 7 (b) omits the conveying unit 200.

As shown in fig. 7 (a), the conveying device 20 includes a conveying unit 200, a table 210, and a pressing unit 220. The conveying unit 200 is, for example, a robot arm. The transport unit 200 transports the substrate F to a predetermined position by rotating or raising and lowering the table 210 in the X-Y plane while holding the table 210.

A plurality of minute holes are formed in the stage 210. When a negative pressure is applied to the table 210 from a pneumatic source (not shown) by the pressure applying unit 220, a negative pressure is applied to the substrate F through the plurality of holes. Thereby, the substrate F is adsorbed on the stage 210.

On the other hand, when a positive pressure is applied from a pneumatic source (not shown) to the table 210 by the pressing section 220, a positive pressure is applied to the substrate F through the plurality of holes. This releases the suction of the substrate F to the stage 210, and allows the substrate F to move on the stage 210.

When the transport device 20 configured as described above transports the substrate F, the transport unit 200 transports the table 210 on which the substrate F is placed to a position directly below the positioning device 10, as shown in fig. 7 (a). At this time, a negative pressure is applied to the substrate F through the table 210 by the pressure applying section 200. This is to attract the substrate F to the stage 210 so that the substrate F does not move on the stage 210. Then, the conveying unit 200 raises the table 210 to a predetermined position for positioning the substrate F.

As shown in fig. 7 (b), when the stage 210 is located at a predetermined position by the transfer unit 200, the substrate F is positioned by the positioning device 10. Arrows in (b) of fig. 7 indicate: the slide members 101 and the coupling members 102 of the moving portions 100A to 100D move in the direction of the inside of the substrate F, and the substrate F is positioned by the pins 110.

At this time, a positive pressure is applied to the substrate F via the table 210 by the pressure applying unit 200. Accordingly, since the suction of the substrate F to the stage 210 is released, the substrate F can be moved on the stage 210, and the substrate F can be positioned. The state of fig. 7 (b) corresponds to the state of fig. 5 (b).

As shown in fig. 7 (c), when the positioning of the substrate F is completed, the conveying unit 200 raises and lowers the table 210. At this time, a negative pressure is applied to the substrate F through the table 210 by the pressure applying section 200. This can maintain the state in which the substrate F is positioned with respect to the table 210.

In fig. 7 (c), in the positioning device 10, the coupling member 102 is separated from the slide member 101 and moved to the end position (fig. 6 (a)). The coupling member 102 moves from the end position to the positioning position again, and at the positioning position, the coupling member 102 moves from the positioning position to the start position (fig. 5 a) while being connected to the slide member 101 via the magnet 103 (fig. b).

Then, the carrying device 20 carries the stage 210 to the scribing device, for example. Thus, the substrate F is scribed.

Fig. 8 is a block diagram showing the configuration of the positioning and conveying system 1. As shown in fig. 8, the positioning and conveying system 1 includes not only the above-described configuration but also a control unit 30, an input unit 31, and an alarm unit 32.

The control unit 30 includes an arithmetic processing circuit such as a CPU, a ROM, a RAM, a hard disk (hard disk), and the like. The control unit 30 controls each unit according to a program stored in the memory.

The input unit 31 is formed of a touch panel or the like, and receives information input by a user. The alarm unit 32 is configured by a display, a speaker, or the like, and gives an alarm to the user of predetermined information.

Fig. 9 (a) is a flowchart showing the operation of the moving units 100A to 100D of the positioning device 10. This control is executed by the control unit 30 shown in fig. 8. The control of the control unit 30 will be described below with reference to the flowchart of fig. 9 (a) and fig. 5 (a) to 6 (b) as appropriate.

In the "start" of the flowchart in fig. 9 (a), the coupling members 102 of the moving portions 100A to 100D are located at the start positions shown in fig. 5 (a) while being coupled to the sliding members 101 via the magnets 103.

In step S11, control unit 30 drives drive unit 140. Specifically, the rotary actuator 141 is positively driven. When the rotary driver 141 is positively driven, the gear 142 rotates, and the gear 143 rotates by the rotation of the gear 142. As a result, the support member 120 rotates counterclockwise, and the slide members 101 and the coupling members 102 of the moving portions 100A to 100D move from the start positions to the positioning positions as described above. When the slide member 101 and the coupling member 102 move to the positioning positions shown in fig. 5 (b), the substrate F is positioned as described above.

Then, when the rotary driver 141 continues the positive driving, each coupling member 102 is separated from the slide member 101. Then, as shown in fig. 6 (a), the coupling member 102 is moved to the end position alone.

In step S12, the control unit 30 determines whether the coupling member 102 has reached the end position. The control unit 30 makes a determination based on the detection result of the sensor 154 provided at the position closest to the support member 120.

When the sensor 154 detects that the coupling member 102 has reached the end position, the control unit 30 determines that the coupling member 102 has reached the end position (step S12: yes). In this case, the control unit 30 stops the positive drive of the rotary actuator 141 (step S13).

When the sensor 154 does not detect that the coupling member 102 has reached the end position, the control unit 30 determines that the coupling member 102 has not reached the end position (step S12: no). Then, the control unit 30 continues to drive the rotary actuator 141 positively.

In step S14, the control unit 30 drives the rotary actuator 141 in reverse. When the rotary driver 141 is driven reversely, the gear 142 rotates, and the gear 143 rotates by the rotation of the gear 142. Thereby, the support member 120 rotates clockwise. As a result, the support member 120 rotates clockwise, and the slide members 101 and the coupling members 102 of the moving portions 100A to 100D move from the end positions to the positioning positions as described above.

When the coupling member 102 is located at the positioning position shown in fig. 5 (b), the coupling member 102 and the slide member 101 are connected via the magnet 103. Then, the coupling member 102 and the slide member 101 move to the start position.

In step S15, the control unit 30 determines whether the coupling member 102 has reached the start position. When the coupling member 102 has reached the start position (yes in step S15), the controller 30 stops the reverse drive of the rotary actuator 141 (step S16). On the other hand, if the coupling member 102 has not reached the start position (no in step S15), the control unit 30 continues to reversely drive the rotary actuator 141.

This ends the positioning of one substrate F. If there is a substrate F to be positioned, the processing of steps S11 to S16 is repeated.

Fig. 9 (b) is a flowchart showing the operation of the transport device 20. This control is executed by the control unit 30 shown in fig. 8. The control of the control unit 30 will be described below with reference to the flowchart of fig. 9 (b) and fig. 5 (a) to 7 (c) as appropriate.

"start" in the flowchart of fig. 9 (b) is a state in which the substrate F to be positioned is placed on the table 210 of the transport device 20, and the negative pressure is applied to the substrate F through the table 210 by the pressure applying unit 220. Before the flow of fig. 9 (b) is started, the user inputs the size of the substrate F via the input unit 31 of fig. 8. Thus, the control unit 30 specifies a sensor corresponding to the size of the substrate F among the sensors 151 to 153 of the detection unit 150.

As shown in fig. 9 b, in step S21, the control unit 30 drives the conveying unit 200 to convey the table 210 to a predetermined position for positioning (the position of fig. 7 b).

When the substrate F is located at the predetermined position in the process of step S21, the controller 30 causes the pressure applying unit 220 to apply a positive pressure to the substrate F in step S22. This releases the suction of the substrate F to the stage 210. Therefore, the substrate F can move on the stage 210.

In step S23, the control unit 30 determines whether or not each of the coupling members 102 of the moving units 100A to 100D has moved to a position corresponding to the size of the substrate F by the detection unit 150 provided in the moving units 100A to 100D.

In the present embodiment, as shown in fig. 2, the detection units 150 are provided for the moving units 100A to 100D, respectively. The control unit 30 determines whether or not all of the four detection units 150 detect that the coupling members 102 of the moving units 100A to 100D are located at positions corresponding to the size of the substrate F. For example, when the size of the substrate F is the size when the coupling member 102 is located at the position of the sensor 151, the control unit 30 determines that the positioning of the substrate F is completed when all of the four sensors 151 detect the coupling member 102.

For example, in the case where the sensor 151 provided corresponding to the moving portion 100A among the four sensors 151 does not detect the coupling member 102, there is a possibility that the coupling member 102 is separated from the magnet 103 in the moving portion 100A when the positioning position has not been reached. In this case, the pins 110 provided in the slide member 101 of the moving portion 100A cannot accurately lock the substrate F, and therefore, the substrate F cannot be accurately positioned.

Alternatively, a failure may occur in the sensor 151 provided in the moving part 100A. In this case, it is originally impossible to determine whether or not the substrate F is accurately positioned.

For this reason, when all of the four sensors 151 detect the coupling member 102, the control unit 30 determines that the substrate F is already positioned.

Therefore, in step S23, if the control unit 30 determines that the positioning of the substrate F is not completed (no in step S23), the control unit 30 causes the alarm unit 32 to alarm abnormality (step S24). The alarm by the alarm unit 32 is implemented, for example, by displaying "abnormal" on a display. Alternatively, the alarm unit 32 may issue a predetermined alarm sound to alarm the abnormality. In addition, when the alarm unit 32 has an indicator lamp, the indicator lamp may be turned on to give an alarm.

In this case, after the user performs an inspection or the like of the positioning device 10, the substrate F is positioned again.

If the control unit 30 determines in step S23 that the positioning of the substrate F is completed (yes in step S23), the control unit 30 causes the pressure application unit 220 to apply a negative pressure to the substrate F. Thereby, the substrate F is adsorbed on the stage 210 (step S25).

In step S26, the control unit 30 drives the transport unit 200 to transport the substrate F to the scribing device.

Thereby, the positioning and the conveyance of one substrate F are ended. Further, when there is a substrate F to be positioned and transported, the control unit 30 repeatedly executes the processing of steps S21 to S26.

< effects of the embodiment >

With the structure of the present embodiment, the following effects are obtained.

As shown in fig. 1 and 2, the links 130A to 130D of the positioning device 10 are connected to the support member 120 and the moving portions 100A to 100D, respectively. Two pins 110 are provided in each of the moving portions 100A to 100D.

With this configuration, when the driving unit 140 rotates the support member 120 in a predetermined direction, the moving units 100A to 100D move in the direction of the support member 120 simultaneously with each other in accordance with the rotation of the support member 120. When the moving portions 100A to 100D move in this manner, the substrate F is held in the in-plane direction by the pins 110 arranged in the moving portions 100A to 100D. Thereby, the substrate F is positioned near the center of the moving portions 100A to 100D.

Therefore, the substrate F can be positioned at a predetermined position by synchronously moving the moving units 100A to 100D by one driving unit 140. Therefore, the substrate F can be positioned efficiently with a simple configuration.

As shown in fig. 1, 2, and 5 (a), the slide member 101 and the coupling member 102 of each of the moving portions 100A to 100D are coupled to each other by a magnet 103. Each connecting member 102 is connected to links 130A to 130D.

With this structure, when the pin 110 abuts against the substrate F, the substrate F becomes an obstacle, and the slide members 101 cannot move further toward the substrate F. On the other hand, since each coupling member 102 is connected to the links 130A to 130D, when the support member 120 is subsequently further rotated, each coupling member 102 is separated from the slide member 101 against the attracting force by the magnet 103 and moves solely to the support member 120 side. Thus, when the pin 110 abuts against the substrate F, an excessive load is not applied to the substrate F. Therefore, the substrate F can be prevented from being damaged or deformed.

As shown in fig. 2 and 3, holes 101b to 101e are formed in the slide member 101, and two pins 110 are inserted into any two of these holes. When the holes 101b to 101e are divided into the group of

holes

101b and 101c and the group of holes 101D and 101e, the

holes

101b and 101c and the holes 101D and 101e are arranged so as to be separated in a direction intersecting the moving direction of the moving portions 100A to 100D. The pitch of the

holes

101b and 101c is different from the pitch of the

holes

101d and 101 e.

With this configuration, when the substrate F has a diagonal line in the diagonal direction in the plan view, the substrate F can be positioned by engaging the two pins 110 disposed on the respective slide members 101 of the moving portions 100A to 100D with the respective corners of the substrate F.

Further, holes 101b to 101e are formed in the sliding members 101 of the moving portions 100A to 100D. Thus, by changing the hole into which the pin 110 is fitted, the interval between the two pins 110 can be changed. For example, when the size of the substrate F is large, the wider the pitch between the two pins 110 is, the more stable the substrate F can be positioned. Therefore, the substrate F can be positioned more stably according to the size of the substrate F by the above configuration.

In the case of using a robot arm as the transport unit 200, the position of the pin 110 can be appropriately adjusted in order to prevent the arm of the transport unit 200 from interfering with the pin 110 when the substrate F (placed on the table 210) is transported to a predetermined position of the positioning device 10.

For example, in the present embodiment, in the moving

portions

100A and 100B, the two pins 110 are not fitted into the holes 101B and 101c and the

holes

101d and 101e arranged in the direction intersecting the moving direction of the coupling member 102. In the present embodiment, two pins 110 are fitted into the

holes

101b and 101e in the slide member 101 of the moving portion 100A. In the sliding member 101 of the moving portion 100B, two pins 110 are inserted into the

holes

101c, 101 d.

As shown in fig. 1, 2, and 4, the moving portions 100A to 100D and the links 130A to 130D are disposed at different positions around the shaft member 124.

With this structure, the substrate F can be positioned so as to be clamped by the pins 110 at a plurality of different positions on the outer periphery thereof. Therefore, the substrate F can be accurately positioned.

As shown in fig. 1, 2, and 4, the group of the moving

portions

100A and 100C and the

links

130A and 130C and the group of the moving

portions

100B and 100D and the

links

130B and 130D are disposed at positions orthogonal to each other around the shaft member 124. Further, the two pins 110 provided on the slide members 101 of the moving

portions

100A, 100C are arranged so as to be apart in a direction intersecting the moving direction of the moving

portions

100A, 100C. The two pins 110 provided at the slide member 101 of the moving

portions

100B, 100D are also similarly arranged.

With this configuration, when the substrate F is square in a plan view, the two pins 110 can be engaged with the corners of the substrate F. Therefore, the square substrate F can be accurately positioned.

As shown in fig. 7 (a) to (c), in the positioning and conveying system, the conveying portion 200 of the conveying device 20 conveys the table 210 on which the substrate F is placed to a predetermined position. The stage 210 releases the suction of the substrate F while the substrate F is positioned by the positioning device 10, and performs a suction operation of the substrate F based on the positioning of the substrate F by the positioning device 10.

With this configuration, the substrate F positioned by the positioning device 10 can be transported to a predetermined position while maintaining the positioned state.

As shown in fig. 2 and 3, the positioning device 10 includes a detection unit 150, i.e., four sensors 151 to 154, for detecting the coupling members 102 of the moving units 100A to 100D.

When the pin 110 abuts on the substrate F, the coupling members 102 of the moving portions 100A to 100D are separated from the slide member 101 and individually move to the end position. In this way, the position where the coupling member 102 is separated from the slide member 101 is the position where the substrate F is positioned by the pin 110. Therefore, when the positions of all the coupling members 102 are normally detected by the sensors 151 to 153 of the detection unit 150, it can be understood that the substrate F has been positioned.

< modification example >

The embodiments of the present invention can be appropriately and variously changed within the scope of the technical idea shown in the claims.

In the above embodiment, the substrate F is used as a square substrate F, but a rectangular substrate F may be used.

In this case, the group of the moving

portions

100A and 100C is disposed on an extension line of one diagonal line of the substrate F, and the moving

portions

100B and 100D are disposed on an extension line of the other diagonal line. The link 130A is connected to the moving portion 100A and the support member 120. As with the link 130A, the links 130B to 130D are connected to the moving portions 100B to 100D and the support member 120, respectively.

The two pins 110 provided in each slide portion 101 are arranged so as to sandwich four corners of the substrate F.

The substrate F may be formed in a circular shape. Since the moving portions 100A to 100D are radially arranged at equal intervals around the shaft member 124, when the moving portions 100A to 100D move toward the substrate F, the pins 110 abut on the outer periphery of the circular substrate. This enables accurate positioning of the circular substrate F.

Further, when the substrate F is formed in a circular shape, the pins 110 may be brought into contact with the outer periphery of the substrate F from four directions, and one pin 110 may be provided for each slide member 101.

In the above embodiment, the number of the holes for inserting the pins 110 is four, and can be increased as appropriate.

In the above embodiment, four moving portions and links are provided. However, when the substrate F has a square or rectangular shape, a pair of moving portions and a pair of links may be provided.

In this case, the moving

portions

100A and 100C are arranged on an extension line of one diagonal line of the substrate F. Correspondingly,

links

130A and 130C are provided. Thereby, two corners (two corners located on the diagonal line) of the substrate F are sandwiched by the pins 110. Therefore, the substrate F can be accurately positioned.

In the above embodiment, in order to determine whether or not the positioning of the substrate F is completed, the three sensors 151 to 153 detect that the coupling member 102 is located at the positioning position. The sensor may also vary depending on the size of the substrate F.

In the above embodiment, the three sensors 151 to 153 are fixed to the holding member 155, but the structure for detecting the position of the coupling member 102 is not limited to this.

For example, the following may be configured: a slide rheostat (slide volume) is provided from the starting position to the ending position of the connecting member 102, and the amount of movement of the slide contact is detected. In this case, the slide contact of the slide rheostat is coupled to the coupling member 102. As the linking member 102 moves, the sliding contact moves. Thereby, the moving amount of the connecting member 102, that is, the moving amount of the sliding contact is detected.

With this configuration, it is possible to detect that the coupling member 102 has reached the positioning position using one sliding contact with respect to the plurality of substrates F without providing a plurality of sensors.

Further, in the above embodiment, although the sensor 154 for detecting that the coupling member 102 has reached the end position is provided, if a slide rheostat is used, it is possible to simultaneously detect that the coupling member 102 has reached the end position.

Further, the holding member 155 may be provided with a scale, and the user may manually move the sensor 151 according to the scale according to the size of the substrate F. In this case, the detection unit 150 (sensor 151) can accurately detect the positioning position of the substrate F (the position of the coupling member 102) from the size of the substrate F.

Description of the reference numerals

1: positioning a transport system;

10: a positioning device;

20: a conveyance device;

100A to 100D: a moving part;

101: a sliding member;

101b to 101 e: an aperture;

102: a connecting member;

103: a magnet;

110: a pin;

120: a support member;

124: a shaft member;

130A to 130D: a connecting rod;

140: a drive section;

150: a detection unit;

200: a conveying section;

210: a work bench.

Claims

1. A positioning device, comprising:

at least one pair of moving portions supported so as to be able to approach and separate from each other in a direction parallel to the substrate;

pins which are respectively arranged on the pair of moving parts and lock the periphery of the substrate;

a support member disposed between the pair of moving portions and axially supported by a shaft member perpendicular to the substrate;

a pair of links that respectively connect the support member and the moving portions; and

a driving portion that rotates the support member relative to the shaft member.

2. The positioning device of claim 1,

the moving part has:

a slide member provided with the pin;

a coupling member that is disposed on the support member side with respect to the slide member and is coupled to the link; and

a magnet that causes the sliding member and the coupling member to attract each other.

3. The positioning device according to claim 1 or 2,

two of the pins are disposed on the moving portion so as to be spaced apart from each other in a direction intersecting a moving direction of the moving portion,

in the moving portion, a plurality of sets of two holes for inserting the two pins are provided separately in a moving direction of the moving portion,

the spacing of the holes of the respective groups is different from each other.

4. The positioning device according to claim 1 or 2,

the pair of moving portions and the pair of links are arranged in plural at different positions around the shaft member.

5. The positioning device of claim 4,

the pair of moving portions and the pair of links are disposed at two positions orthogonal to each other around the shaft member,

in the moving portion of each of the groups, two of the pins are disposed so as to be spaced apart in a direction intersecting a moving direction of the moving portion.

6. A positioning conveyor system, comprising:

a positioning device for positioning a position of the substrate; and

a carrying device that carries the substrate to the positioning device,

the positioning device has:

a driving portion that rotates the support member relative to the shaft member.

7. The positioning conveyor system according to claim 6,

the conveying device is provided with:

a stage on which the substrate is placed; and

a conveying part for conveying the worktable,

the stage is configured to adsorb the substrate placed thereon by an air pressure applied from an air pressure source,

the transport device releases the suction of the substrate while the substrate is positioned by the positioning device, and performs the suction operation of the substrate based on the positioning of the substrate by the positioning device.

8. The positioning conveyor system according to claim 7,

the positioning device has a detection section for detecting a movement position of the moving section,

the transport device starts the suction operation of the stage with respect to the substrate based on the detection of the movement of the moving portion to the position corresponding to the size of the substrate by the detection portion.