JP2017220495A - Mounting system and conveyance tray - Google Patents

Mounting system and conveyance tray Download PDF

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Publication number
JP2017220495A
JP2017220495A JP2016112052A JP2016112052A JP2017220495A JP 2017220495 A JP2017220495 A JP 2017220495A JP 2016112052 A JP2016112052 A JP 2016112052A JP 2016112052 A JP2016112052 A JP 2016112052A JP 2017220495 A JP2017220495 A JP 2017220495A
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stage
axis direction
positioning
hole
mounting
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利幸 柳本
Toshiyuki Yanagimoto
利幸 柳本
善弘 柳本
Yoshihiro Yanagimoto
善弘 柳本
秦 寛二
Kanji Hata
寛二 秦
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Taiyo Kikai Seisakusho Ltd
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Taiyo Kikai Seisakusho Ltd
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a mounting system capable of mounting with high precision, while mounting a work-piece on a conveyance tray, without transferring the work-piece from the conveyance tray onto a positioning stage.SOLUTION: A mounting system includes a conveyance tray (10) and a mounting device (20). The conveyance tray (10) has a through hole (12), and a support (13) for supporting a work-piece (41) while positioning the periphery thereof at at least a part of the periphery of the through hole (12). The mounting device (20) includes a stage (21) having a positioning support (31) for positioning the work-piece (41) supported by the conveyance tray (10), while supporting through the through hole (12), a Y-axis direction movement mechanism (60) for moving this stage (21) in the Y-axis direction, and an X-axis direction movement mechanism (70) for moving the stage (21) in the X-axis direction.SELECTED DRAWING: Figure 1

Description

この発明は、有機EL(エレクトロルミネッセンス)、液晶表示装置、半導体装置等の実装システムおよび搬送トレイに関する。   The present invention relates to a mounting system such as an organic EL (electroluminescence), a liquid crystal display device, and a semiconductor device, and a transport tray.

従来、COF(Chip On Film:フィルム状の配線基板に半導体チップを実装すること。)を行う実装装置においては、フィルム状のフレキシブル配線基板(FPC)等を穴無しの搬送トレイに搭載して、位置決めステージ上に移して位置決めし、この位置決めされたFPC等にIC(集積回路)チップ等を精度高く実装していた(特許文献1:特開2009−239262号公報)。   Conventionally, in a mounting apparatus that performs COF (Chip On Film: mounting a semiconductor chip on a film-like wiring board), a film-like flexible wiring board (FPC) or the like is mounted on a transport tray without holes, An IC (integrated circuit) chip or the like was mounted with high accuracy on the positioned FPC or the like (Patent Document 1: Japanese Patent Laid-Open No. 2009-239262).

特開2009−239262号公報JP 2009-239262 A

しかしながら、上記従来の実装装置では、FPC等を穴無しの搬送トレイ上から位置決めステージの上に移し換えなければならないので、工数が増えて、迅速に実装することができないという問題があった。   However, the conventional mounting apparatus has a problem that the FPC or the like has to be transferred from the transport tray without holes onto the positioning stage, which increases man-hours and cannot be mounted quickly.

最近の有機EL等の実装においては、3μm以内の平行度が要求されるから、トレイに搭載したままのフィルム状のFPC等はこの3μm以内の平行度をだすことができない。そのため、FPC等を穴無しの搬送トレイ上から実装装置の位置決めステージの上に移し換えなければならない。   In recent mounting of an organic EL or the like, a parallelism within 3 μm is required, so a film-like FPC or the like that is still mounted on a tray cannot exhibit a parallelism within 3 μm. Therefore, it is necessary to transfer the FPC or the like from the transport tray without holes onto the positioning stage of the mounting apparatus.

そこで、この発明の課題は、搬送トレイ上から位置決めステージの上にワークを移し換えしなくても、搬送トレイ上にワークを搭載したままで精度高く実装ができる実装システムを提供することにある。   Accordingly, an object of the present invention is to provide a mounting system that can be mounted with high accuracy while the work is mounted on the transport tray without transferring the work from the transport tray onto the positioning stage.

上記課題を解決するため、この発明の実装システムは、
貫通穴を有すると共に、その貫通穴の周囲の少なくとも一部にワークの周辺部を位置決めして支持する支持部を有する搬送トレイと、
上記搬送トレイ上のワークを、上記貫通穴を通して支持して位置決めする位置決め支持部を有するステージと、このステージをY軸方向に移動させるY軸方向移動機構と、上記ステージをX軸方向に移動させるX軸方向移動機構とを含む実装装置と
を備えることを特徴としている。
In order to solve the above problems, the mounting system of the present invention is:
A transport tray having a through hole and a support portion that positions and supports the peripheral portion of the workpiece at least at a part of the periphery of the through hole; and
A stage having a positioning support portion for supporting and positioning the work on the transport tray through the through hole, a Y-axis direction moving mechanism for moving the stage in the Y-axis direction, and moving the stage in the X-axis direction And a mounting apparatus including an X-axis direction moving mechanism.

上記構成の実装システムによれば、上記搬送トレイの貫通穴に、実装装置のステージの位置決め支持部を貫通させて、上記搬送トレイ上のワークを位置決め支持部で支持して正確に位置決めできて、搬送トレイ上にワークを位置させたままで、例えば、ICチップの圧着などの実装を行うことができて、ワークの搬送トレイからステージへの移し替え工程を不要とすることができて、実装作業を迅速に行うことができる。   According to the mounting system of the above configuration, the positioning support portion of the stage of the mounting apparatus can be passed through the through hole of the transport tray, and the workpiece on the transport tray can be supported and accurately positioned by the positioning support portion. For example, IC chips can be mounted with the workpiece positioned on the transfer tray, and the transfer process from the transfer tray to the stage can be made unnecessary. Can be done quickly.

また、実装後のワークは搬送トレイ上に位置したままであるから、実装後のワークをそのまま直ちに搬送トレイに搭載して搬送することができる。   Further, since the mounted work remains on the transport tray, the mounted work can be immediately mounted on the transport tray and transported.

また、この発明の搬送トレイは、
貫通穴を有すると共に、その貫通穴の周囲の少なくとも一部にワークの周辺部を位置決めして支持する支持部を有する。
The transport tray of the present invention is
In addition to having a through hole, a support portion for positioning and supporting the peripheral portion of the workpiece is provided at least at a part of the periphery of the through hole.

上記構成の搬送トレイによれば、上記支持部で支持されたワークを、実装時等において、上記貫通穴に実装装置のステージの位置決め支持部を貫通させて、ワークを搬送トレイの上に位置させたままで、ワークを上記位置決め支持部で正確に支持して位置決めすることができる。   According to the transport tray having the above-described configuration, when the work supported by the support portion is mounted, the positioning support portion of the stage of the mounting apparatus is passed through the through hole so that the work is positioned on the transport tray. In this state, the workpiece can be accurately supported and positioned by the positioning support portion.

この発明によれば、搬送トレイ上から位置決めステージの上にワークを移し換えしなくても、搬送トレイ上にワークを位置させたままで精度高く迅速に実装ができる。   According to this invention, even if the work is not transferred from the transport tray onto the positioning stage, the work can be quickly and accurately mounted while the work is still positioned on the transport tray.

この発明の1実施形態の実装システムを示す斜視図である。1 is a perspective view showing a mounting system according to an embodiment of the present invention. この発明の1実施形態の実装システムを示す斜視図である。1 is a perspective view showing a mounting system according to an embodiment of the present invention. この発明の1実施形態の実装システムを示す斜視図である。1 is a perspective view showing a mounting system according to an embodiment of the present invention. ICの実装プロセスを説明する説明図である。It is explanatory drawing explaining the mounting process of IC.

以下、この発明を図示の実施形態により詳細に説明する。   Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments.

図1に示すように、この実施形態の実装システムは、搬送トレイ10と実装装置20とを備える。   As shown in FIG. 1, the mounting system of this embodiment includes a transport tray 10 and a mounting device 20.

上記搬送トレイ10は、略矩形の外形を有する本体部11と、この本体部11に整列して設けられた複数の略矩形の貫通穴12,12,…と、この貫通穴12の周囲に設けられた段差部からなる支持部13,13,…とを有する。この貫通穴12の周囲の支持部13は、ワークの一例としての略矩形のFPC41の外周部を支持して粗く位置決めを行う。   The transport tray 10 is provided around a body portion 11 having a substantially rectangular outer shape, a plurality of substantially rectangular through holes 12, 12,... Arranged in alignment with the body portion 11. .. Having a stepped portion formed thereon. The support portion 13 around the through hole 12 supports the outer peripheral portion of a substantially rectangular FPC 41 as an example of a workpiece and performs rough positioning.

一方、上記実装装置20は、略矩形のステージ21を備え、このステージ21は基部30に複数の位置決め支持部31,31,…を整列して設けている。上記位置決め支持部31は略矩形の凸部であり、中央に略十字形状の吸引孔33を有する。上記位置決め支持部31の高さ、つまり、厚さは、搬送トレイ10の支持部13の高さ、つまり、厚さよりも厚くなっていて、上記位置決め支持部31は搬送トレイ10の貫通穴12を貫通して、位置決め支持部31の表面は貫通穴12の支持部13の外側に突出することができるようになっている。   On the other hand, the mounting apparatus 20 includes a substantially rectangular stage 21, and the stage 21 is provided with a plurality of positioning support portions 31, 31,. The positioning support portion 31 is a substantially rectangular convex portion, and has a substantially cross-shaped suction hole 33 in the center. The height of the positioning support portion 31, that is, the thickness is larger than the height of the support portion 13 of the transport tray 10, that is, the thickness, and the positioning support portion 31 passes through the through hole 12 of the transport tray 10. It penetrates and the surface of the positioning support part 31 can protrude outside the support part 13 of the through hole 12.

上記位置決め支持部31の表面は極めて高い精度で加工されていて、例えば、3μm以内の平行度、真直度、平面度を満たすように加工されている。したがって、上記位置決め支持部31の表面に載置されたFPC41等のワークは、極めて高い精度で位置決めができるようになっている。   The surface of the positioning support portion 31 is processed with extremely high accuracy, for example, so as to satisfy parallelism, straightness, and flatness within 3 μm. Therefore, the workpiece such as the FPC 41 placed on the surface of the positioning support portion 31 can be positioned with extremely high accuracy.

また、上記実装装置20は、ステージ21をY軸方向に移動させるY軸方向移動機構60と、ステージ21をX軸方向に移動させるX軸方向移動機構70とを備える。上記Y軸、X軸は、通常の定義と同様で、水平方向に延びていて、互いに直交している。   The mounting apparatus 20 includes a Y-axis direction moving mechanism 60 that moves the stage 21 in the Y-axis direction, and an X-axis direction moving mechanism 70 that moves the stage 21 in the X-axis direction. The Y-axis and the X-axis have the same definition as the normal definition, extend in the horizontal direction, and are orthogonal to each other.

上記Y軸方向移動機構60は、ステージ21に取り付けたスライダ24と、このスライダ24をY軸方向に案内するY軸方向ガイド22と、上記スライダ24をY軸方向ガイド22に沿って駆動するY軸方向駆動部23とからなる。上記X軸方向移動機構70は、Y軸方向ガイド22に固定したスライダ27と、このスライダ27をX軸方向に案内するX軸方向ガイド25と、上記スライダ27をX軸方向ガイド25に沿って駆動するX軸方向駆動部26とからなる。   The Y-axis direction moving mechanism 60 includes a slider 24 attached to the stage 21, a Y-axis direction guide 22 that guides the slider 24 in the Y-axis direction, and a Y that drives the slider 24 along the Y-axis direction guide 22. An axial drive unit 23 is included. The X-axis direction moving mechanism 70 includes a slider 27 fixed to the Y-axis direction guide 22, an X-axis direction guide 25 for guiding the slider 27 in the X-axis direction, and the slider 27 along the X-axis direction guide 25. An X-axis direction driving unit 26 is driven.

また、上記ステージ21を旋回させる旋回機構28をスライダ24とステージ21との間に設けている。   Further, a turning mechanism 28 for turning the stage 21 is provided between the slider 24 and the stage 21.

また、上記ステージ21の4隅にステージ21の姿勢を微調整する調整ネジ51,51,…を設けている。   Further, adjustment screws 51, 51,... For finely adjusting the posture of the stage 21 are provided at the four corners of the stage 21.

なお、45はロボットのアームである。   Reference numeral 45 denotes a robot arm.

Z軸方向移動機構47は、ステージ21を鉛直方向であるZ軸方向に昇降させる。   The Z-axis direction moving mechanism 47 moves the stage 21 up and down in the Z-axis direction that is the vertical direction.

この実装装置20には、図示しないが、ワークを加圧加熱して圧着する圧着装置、ワークを撮像する撮像装置、ワークの位置やワークの表面の高さ等を検出するセンサ、ステージの位置および高さを検出するセンサなどが設けられているが、これらは、この発明の要旨とは関係が少ないので、図示および説明を省略する。   Although not shown in the drawings, the mounting apparatus 20 is a pressure bonding apparatus that pressurizes and heats a workpiece, an imaging apparatus that images the workpiece, a sensor that detects the position of the workpiece, the height of the surface of the workpiece, the position of the stage, and the like. Although sensors for detecting the height are provided, these are not related to the gist of the present invention, and thus illustration and description thereof are omitted.

上記構成の実装システムにおいて、まず、図1および2に示すように、略矩形のFPC41,41,…を搬送トレイ10の略矩形の貫通穴12,12,…の上に位置させ、この貫通穴12,12,…の周囲の段差状の支持部13,13,…にFPC41,41,…の外周部を支持して、FPC41,41,…を搬送トレイ10に搭載して粗く位置決めする。   In the mounting system having the above configuration, first, as shown in FIGS. 1 and 2, the substantially rectangular FPCs 41, 41,... Are positioned on the substantially rectangular through holes 12, 12,. Are supported by the stepped support portions 13, 13,... Around the 12, 12,..., And the FPCs 41, 41,.

次に、図3に示すように、ロボットのアーム45で搬送トレイ10の本体部11を左右より挟持して(二本のアーム45の片側のみを示す)、搬送トレイ10を搬送して実装装置20のステージ21の上に搭載して、略矩形の凸状の位置決め支持部31,31,…に略矩形の貫通穴12,12,…を貫通させて、この位置決め支持部31,31,…の表面にFPC41,41,…を直接に載置する。   Next, as shown in FIG. 3, the robot arm 45 sandwiches the main body 11 of the transport tray 10 from the left and right sides (only one side of the two arms 45 is shown), and transports the transport tray 10 to implement the mounting device. .. Are mounted on 20 stage 21, and substantially rectangular through holes 12, 12,... Are passed through substantially rectangular convex positioning support portions 31, 31,. Are directly mounted on the surface of the FPC.

このように、搬送トレイ10上にFPC41,41,…を位置させたままで、位置決め支持部31,31,…の表面にFPC41,41,…を直接に載置することができて、FPC41,41,…の搬送トレイ10からステージ21への移し替え工程を不要とすることができるから、実装作業を迅速に行うことができる。   As described above, the FPCs 41, 41,... Can be placed directly on the surfaces of the positioning support portions 31, 31,... With the FPCs 41, 41,. ,... Can be dispensed with from the transfer tray 10 to the stage 21, so that the mounting operation can be performed quickly.

このように搬送トレイ10上にFPC41,41,…を位置させたままで、位置決め支持部31,31,…の表面にFPC41,41,…を直接に載置する前に、必要に応じて、Y軸方向移動機構60、X軸方向移動機構70および旋回機構28を適宜作動させて、ステージ21の位置を調整する。   As described above, before the FPCs 41, 41,... Are directly placed on the surfaces of the positioning support portions 31, 31,. The position of the stage 21 is adjusted by appropriately operating the axial movement mechanism 60, the X-axis movement mechanism 70, and the turning mechanism 28.

次に、上記ステージ21の位置決め支持部31,31,…の略十字形状の吸引孔33,33,…でFPC41,41,…を真空吸引して、FPC41,41,…を位置決め支持部31,31,…の上に直接固定する。上記ステージ21の位置決め支持部31,31,…の表面は、搬送トレイ10に比べて極めて高い精度、例えば、3μm以内の平行度を満たすような極めて高い精度で加工されているから、FPC41,41,…を位置決め支持部31,31,…の上に極めて高い精度で位置決めすることができる。もし仮に、FPCを搬送トレイに搭載して位置決めすると、3μm以内の平行度を満たすことができなくなる。   Next, the FPCs 41, 41,... Are vacuum-sucked by the substantially cross-shaped suction holes 33, 33,... Of the positioning support portions 31, 31,. Fix directly on 31,. The surfaces of the positioning support portions 31, 31,... Of the stage 21 are processed with extremely high accuracy compared to the transport tray 10, for example, with extremely high accuracy satisfying parallelism within 3 μm. Can be positioned on the positioning support portions 31, 31,... With extremely high accuracy. If the FPC is mounted on the transport tray and positioned, the parallelism within 3 μm cannot be satisfied.

このようにして、FPC41,41,…をステージ21の位置決め支持部31,31,…の表面上に位置決めして固定した後、図4に示すICの実装プロセスを実行する。   In this way, after the FPCs 41, 41,... Are positioned and fixed on the surfaces of the positioning support portions 31, 31,... Of the stage 21, the IC mounting process shown in FIG.

その前に、必要に応じて、Y軸方向移動機構60、X軸方向移動機構70、Z軸方向移動機構47および旋回機構28を適宜作動させて、ステージ21の位置を調整する。   Before that, the Y-axis direction moving mechanism 60, the X-axis direction moving mechanism 70, the Z-axis direction moving mechanism 47, and the turning mechanism 28 are actuated as necessary to adjust the position of the stage 21.

次に、図4に示すACF(異方性導電フィルム)貼付、IC(集積回路チップ)実装(仮圧着)、IC実装(本圧着)の工程を行う。すなわち、図3および4に示すように、FPC41がステージ21の精度の高い位置決め支持部31の上に正確に位置決めして固定された後、FPC41の所定の位置にACF(異方性導電フィルム)81を図示しない圧着装置で熱圧着して貼り付ける。このときの圧着装置の加圧力は10〜150[N]であり、圧着装置のツールの温度はRT(室温)〜120℃である。   Next, the steps of ACF (anisotropic conductive film) sticking, IC (integrated circuit chip) mounting (temporary pressure bonding), and IC mounting (main pressure bonding) shown in FIG. 4 are performed. That is, as shown in FIGS. 3 and 4, after the FPC 41 is accurately positioned and fixed on the high-precision positioning support portion 31 of the stage 21, an ACF (anisotropic conductive film) is placed at a predetermined position of the FPC 41. 81 is pasted by thermocompression bonding with a crimping device (not shown). At this time, the pressure of the crimping device is 10 to 150 [N], and the temperature of the tool of the crimping device is RT (room temperature) to 120 ° C.

次に、図4に示すように、FPC41に貼り付けられたACF81の上にIC(集積回路)チップ91を仮圧着する。このときの圧着装置の加圧力は10〜50[N]であり、圧着装置のツールの温度はRT(室温)〜120℃である。   Next, as shown in FIG. 4, an IC (integrated circuit) chip 91 is temporarily pressure-bonded onto the ACF 81 attached to the FPC 41. At this time, the pressure of the crimping device is 10 to 50 [N], and the temperature of the tool of the crimping device is RT (room temperature) to 120 ° C.

次に、図4に示すように、FPC41上のACF81上のICチップ91を本圧着する。このときの圧着装置の加圧力は50〜400[N]であり、圧着装置のツールの温度はRT(室温)〜350℃である。このときのステージ21の位置決め支持部31、つまり、バックアップの温度はRT(室温)〜100℃である。なお、以上の加圧力、温度は一例であって、ACFの種類、FPCの種類によって変わる。   Next, as shown in FIG. 4, the IC chip 91 on the ACF 81 on the FPC 41 is finally bonded. At this time, the pressure of the crimping device is 50 to 400 [N], and the temperature of the tool of the crimping device is RT (room temperature) to 350 ° C. The positioning support portion 31 of the stage 21 at this time, that is, the backup temperature is RT (room temperature) to 100 ° C. The above-mentioned applied pressure and temperature are merely examples, and vary depending on the type of ACF and the type of FPC.

このようにして、ACF81,81,…を介してICチップ91,91,…が実装されたFPC41,41,…は、搬送トレイ10の上に位置しているから、FPC41,41,…の搬送トレイ10への移し替え作業を別途することなく、直ちに、搬送トレイ10でFPC41,41,…を搬送することができる。したがって、迅速に実装工程を行うことができる。   In this manner, the FPCs 41, 41,... On which the IC chips 91, 91,... Are mounted via the ACFs 81, 81,. The FPCs 41, 41,... Can be immediately transported by the transport tray 10 without separately performing a transfer operation to the tray 10. Therefore, the mounting process can be performed quickly.

上記実施形態では、ワークの例としてFPCを述べたが、ワークはガラス基板、PWB(プリント配線基板)、セラミック基板等であってもよいのは勿論である。また、搬送トレイの貫通穴の回りの支持部の幅は、前述の実施形態よりも大きくして、例えば、実装するACF以外のFPCの部分を支持する大きさにしてよい。   In the above-described embodiment, the FPC is described as an example of the workpiece. However, the workpiece may be a glass substrate, a PWB (printed wiring substrate), a ceramic substrate, or the like. Further, the width of the support portion around the through hole of the transport tray may be made larger than that of the above-described embodiment, for example, to support the FPC portion other than the ACF to be mounted.

上記実施形態および変形例で述べた構成要素は、適宜、組み合わせてもよく、また、適宜、選択、置換、あるいは、削除してもよいのは、勿論である。   It goes without saying that the constituent elements described in the above-described embodiments and modifications may be combined as appropriate, and may be selected, replaced, or deleted as appropriate.

10 搬送トレイ
12 貫通穴
13 支持部
20 実装装置
21 ステージ
31 位置決め支持部
33 吸引孔
41 FPC
60 Y軸方向移動機構
70 X軸方向移動機構
81 ACF
91 ICチップ
DESCRIPTION OF SYMBOLS 10 Conveyance tray 12 Through-hole 13 Support part 20 Mounting apparatus 21 Stage 31 Positioning support part 33 Suction hole 41 FPC
60 Y-axis direction moving mechanism 70 X-axis direction moving mechanism 81 ACF
91 IC chip

Claims (2)

貫通穴を有すると共に、その貫通穴の周囲の少なくとも一部にワークの周辺部を位置決めして支持する支持部を有する搬送トレイと、
上記搬送トレイ上のワークを、上記貫通穴を通して支持して位置決めする位置決め支持部を有するステージと、このステージをY軸方向に移動させるY軸方向移動機構と、上記ステージをX軸方向に移動させるX軸方向移動機構とを含む実装装置と
を備えることを特徴とする実装システム。
A transport tray having a through hole and a support portion that positions and supports the peripheral portion of the workpiece at least at a part of the periphery of the through hole; and
A stage having a positioning support portion for supporting and positioning the work on the transport tray through the through hole, a Y-axis direction moving mechanism for moving the stage in the Y-axis direction, and moving the stage in the X-axis direction A mounting system comprising a mounting device including an X-axis direction moving mechanism.
貫通穴を有すると共に、その貫通穴の周囲の少なくとも一部にワークの周辺部を位置決めして支持する支持部を有することを特徴とする搬送トレイ。   A transport tray having a through hole and a support portion for positioning and supporting the peripheral portion of the workpiece at least at a part of the periphery of the through hole.
JP2016112052A 2016-06-03 2016-06-03 Mounting system and conveyance tray Pending JP2017220495A (en)

Priority Applications (1)

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Application Number Priority Date Filing Date Title
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Publications (1)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019088591A (en) * 2017-11-15 2019-06-13 株式会社三洋物産 Game machine
JP2019088592A (en) * 2017-11-15 2019-06-13 株式会社三洋物産 Game machine
JP2019088590A (en) * 2017-11-15 2019-06-13 株式会社三洋物産 Game machine
CN111930071A (en) * 2020-08-04 2020-11-13 歌尔光学科技有限公司 Control method based on electronic cam, terminal device and storage medium

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019088591A (en) * 2017-11-15 2019-06-13 株式会社三洋物産 Game machine
JP2019088592A (en) * 2017-11-15 2019-06-13 株式会社三洋物産 Game machine
JP2019088590A (en) * 2017-11-15 2019-06-13 株式会社三洋物産 Game machine
CN111930071A (en) * 2020-08-04 2020-11-13 歌尔光学科技有限公司 Control method based on electronic cam, terminal device and storage medium
CN111930071B (en) * 2020-08-04 2021-10-26 歌尔光学科技有限公司 Control method based on electronic cam, terminal device and storage medium

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