KR20210109431A - Positioning apparatus and transporting system for positioning - Google Patents

Abstract

Provided are a position determination apparatus, which is able to determine the position of a substrate with a high efficiency by a simple configuration, and a position determination returning system. The position determination apparatus (10) comprises: one or more pairs of moving units (100A, 100C) supported to be able to approach or move away from a substrate F in a parallel direction; a pin (110) placed on the pair of moving units (100A, 100C) for binding the outer circumference of the substrate F, respectively; a support member (120) placed between the pair of moving units (100A, 100C) to be axially supported by an axis member (124) which is vertical to the substrate F; a pair of link levers (130A, 130C) connecting the support member (120) and the moving units (100A, 100C), respectively; and a driving unit (140) rotating the support member (120) toward the axis member (124).

Description

POSITIONING APPARATUS AND TRANSPORTING SYSTEM FOR POSITIONING

The present invention relates to a positioning device for positioning a substrate, and a positioning transport system including the positioning device.

In general, in dividing a substrate made of a brittle material such as a glass substrate, a scribing process for forming a scribing line with respect to the substrate, and a scribing process for dividing the substrate along the scribe line A brake process is performed. In the scribing process, an alignment mark is affixed to a predetermined position on the substrate in advance. A board|substrate is mounted on the table so that the part to which this alignment mark was pasted may be positioned at a predetermined position of the table.

In the substrate processing method disclosed by the following patent document 1, the alignment mark is pasted on the corner part of a board|substrate, and when a board|substrate is mounted on a table, an imaging reference position is imaged by the camera provided in the scribe head. The image captured by the camera is output to the control unit of the scribing device. The control unit determines whether the alignment mark stored in the storage unit matches the shape of the imaged mark. When the mark is not imaged, or the imaged mark is inconsistent with the alignment mark, the substrate is imaged while changing the imaging area little by little, and the alignment mark is searched for.

When an alignment mark is confirmed, a control part will correct|amend the position of a processing start from the shift|offset|difference of an imaging reference position and the position of an alignment mark. Then, the scribing process is started from the corrected position.

Japanese Laid-Open Patent Publication No. 2012-138548

In Patent Document 1, for example, even when the alignment mark is greatly separated from the imaging reference position, it is searched while moving the imaging area little by little. In this case, it takes time until the alignment mark is confirmed, and since the start of the scribing process is delayed, the scribing process cannot be efficiently performed.

The above events may occur when the posture of the substrate placed on the table is not appropriate. For this reason, it is necessary to position a board|substrate with respect to a table so that the attitude|position of the board|substrate on a table may become appropriate.

In view of such a subject, an object of this invention is to provide the positioning apparatus and positioning conveyance system which can perform positioning of a board|substrate efficiently with a simple structure.

A first aspect of the present invention relates to a positioning device. The positioning device according to this aspect includes at least a pair of moving parts supported so as to be approachable and spaced apart in a direction parallel to the substrate, and each of the pair of moving parts is arranged to lock the outer periphery of the substrate. a pin, a support member disposed between the pair of moving parts and axially supported by a shaft member perpendicular to the substrate; and a driving unit for rotating the shaft with respect to the shaft member.

According to the structure which concerns on this aspect, when a support member rotates in a predetermined direction by a drive part, a pair of moving parts simultaneously moves in the mutually approaching direction with rotation of a support member. In this way, when a pair of moving parts moves, the board|substrate is pinched|interposed in an in-plane direction by the pin arrange|positioned to each moving part. Accordingly, the substrate is positioned at an intermediate position of the pair of moving parts. Therefore, according to the positioning apparatus which concerns on this aspect, by one drive part, a pair of moving parts can be moved synchronously, and a board|substrate can be positioned to a predetermined position. Therefore, the positioning of the substrate can be efficiently performed with a simple configuration.

In the positioning device according to this aspect, the moving part includes: a slide member on which the pin is disposed; a connection member disposed on the side of the support member with respect to the slide member and connected to the link lever; It may be configured to include magnets for adsorbing the members to each other.

According to the configuration according to the present aspect, when the positioning pin abuts against the substrate, the substrate becomes a stopper, and the slide member cannot move further toward the substrate side. On the other hand, since the connecting member is connected to the link lever, when the supporting member is further rotated after that, the connecting member resists the attraction force of the magnet, separates it from the slide member, and moves to the supporting member side alone. Accordingly, when the positioning pin abuts against the substrate, an excessive load is not applied to the substrate. Accordingly, damage or deformation of the substrate can be prevented.

In the positioning device according to this aspect, two of the pins are arranged on the moving part so as to fall apart in a direction crossing the moving direction of the moving part, and the moving part has two pins for sandwiching the two pins. A plurality of sets of holes may be formed so as to be separated in the moving direction of the moving part, and the distance between the holes of each set may be configured to be different from each other.

According to the configuration according to this aspect, when the substrate has a pair of corners in a diagonal direction in a plan view, by engaging two pins arranged in each moving part to each corner of the substrate, the substrate is location can be determined. In addition, since a plurality of sets of holes having different intervals are formed in each moving part, the interval between the two pins can be changed by changing the hole through which the pins are inserted. For example, when the size of the substrate is large, the larger the distance between the two pins, the more stable the substrate can be positioned. Therefore, according to the said structure, according to the size of a board|substrate, a board|substrate can be positioned more stably.

In the positioning device according to this aspect, the pair of moving parts and the pair of link levers may be configured to be arranged in a plurality at different positions around the shaft member,

Positioning device, characterized in that.

According to the configuration according to the present aspect, the substrate can be positioned by sandwiching the substrate with pins at a plurality of different positions on the outer periphery of the substrate. Accordingly, the substrate can be positioned more appropriately.

In the positioning device according to this aspect, the pair of moving parts and the pair of link levers are respectively arranged at two positions orthogonal to each other around the shaft member, The moving unit may be configured such that the two pins are disposed so as to fall in a direction crossing the moving direction of the moving unit,

Positioning device, characterized in that.

According to the configuration according to the present aspect, when the substrate is square in plan view, the two pins can be engaged with each of the four corners of the substrate. Therefore, the square board|substrate can be positioned appropriately.

A second aspect of the present invention relates to a positioning transport system. A positioning transport system according to this aspect includes a positioning device for positioning a substrate, and a transport device for transporting the substrate to the positioning device. The positioning device includes at least a pair of moving parts supported so as to be approachable and spaced apart in a direction parallel to the substrate; a support member disposed between a pair of moving parts and pivotally supported by a shaft member perpendicular to the substrate; a pair of link levers respectively connecting the support member and each of the moving parts; A driving unit for rotating is provided.

According to the structure according to this aspect, the same effect as that of the first aspect is brought.

In the positioning transport system according to this aspect, the transport device may include a table on which the substrate is placed, and a transport unit that transports the table. The table is configured to suck the placed substrate by pneumatic pressure applied from a pneumatic source, and the conveying device includes a period during which the substrate is positioned by the positioning device. and release the adsorption, and operate adsorption of the substrate based on the positioning of the substrate by the positioning device.

According to the structure which concerns on this aspect, the board|substrate positioned by the positioning apparatus can be hold|maintained at that position by adsorption|suction, and subsequent conveyance can be performed.

In this case, the positioning device includes a detection unit for detecting a movement position of the moving unit, and the conveying apparatus detects that the moving unit has moved to a position corresponding to the size of the substrate by the detection unit. based on, initiate an adsorption operation of the substrate to the table.

As mentioned above, according to this invention, the positioning apparatus and positioning conveyance system which can perform positioning of a board|substrate efficiently with a simple structure can be provided.

The effects and meanings of the present invention will become clearer by the description of the embodiments shown below. However, the embodiment shown below is an example at the time of implementing this invention to the last, and this invention is not restrict|limited at all to what was described in the following embodiment.

BRIEF DESCRIPTION OF THE DRAWINGS It is a perspective view which shows the structure of the positioning device which concerns on embodiment.
Fig. 2 is a perspective view showing the configuration of the positioning device according to the embodiment.
Fig. 3 is a perspective view showing the configuration of the positioning device according to the embodiment.
4 : is a perspective view which shows the structure of a part of the positioning device which concerns on embodiment.
5(a), (b) are schematic diagrams for demonstrating the operation|movement of the positioning apparatus which concerns on each embodiment.
Fig. 6(a) is a schematic diagram for explaining the operation of the positioning device according to the embodiment. Fig. 6(b) is a schematic diagram showing a positional relationship between a substrate and a pin in the positioning device according to the embodiment.
7(a)-(c) are schematic diagrams for demonstrating the operation|movement of the positioning conveyance system which concerns on embodiment.
Fig. 8 is a block diagram showing the configuration of a substrate inverting apparatus according to an embodiment.
9(a), (b) is a flowchart of the operation|movement of the board|substrate inversion apparatus which concerns on each embodiment, respectively.

(Form for implementing the invention)

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described with reference to drawings. In addition, in each figure, the X-axis, Y-axis, and Z-axis orthogonal to each other are appended for convenience. The X-Y plane is parallel to the horizontal plane, and the Z-axis direction is the vertical direction. The positive side of the Z-axis is upward, and the negative side of the Z-axis is downward. In the following description, moving upward and downward means moving to the positive and negative Z-axis sides.

<Embodiment>

[Positioning transfer system]

Brittle material substrates, such as a glass substrate (henceforth, simply called "substrate F") become a final product through various processes. As such a process, for example, there are a step of dividing the mother substrate into a substrate F of a predetermined size, a step of forming a scribe line on the divided substrate F, a break step of dividing the substrate F along the scribe line, and the like. The substrate F is loaded into a predetermined stage for each process, and when one process is finished, it is carried out to another stage for the next process.

The positioning transport system according to the present embodiment receives the table on which the substrate is placed at a predetermined place, positions the substrate F with respect to the table, and then transports the table together with the substrate to the scribing apparatus It is described as a conveying system for

As the type of the substrate F, for example, a resin substrate such as a polyester resin such as polyimide resin, polyamide resin, PET, polyolefin resin such as polyethylene or polypropylene, polyvinyl resin such as polystyrene or polyvinyl chloride, etc. and organic substrates (including films and sheets; the same hereinafter). As the resin substrate, different substrates may be laminated, for example, PET, polyimide resin, and PET may be laminated in this order from the lower layer. Moreover, a glass substrate, ceramic substrates, such as low temperature baking ceramics and high temperature baking ceramics, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, a quartz substrate, etc. may be sufficient. Moreover, the thing which made the thin film or semiconductor material which does not correspond to a brittle material adhere to the surface or the inside of the board|substrate F, or included it may be sufficient as it. In this embodiment, the substrate F is described as an alumina substrate.

In this embodiment, positioning is performed with respect to the board|substrate F formed in the square shape.

A positioning conveyance system is equipped with the positioning apparatus which positions the board|substrate F with respect to the table, and the conveyance apparatus which conveys the board|substrate F together with the said table.

[Positioning device]

First, the configuration of the positioning device 10 will be described with reference to FIGS. 1 to 4 .

1 : is a perspective view which shows the structure of the positioning device 10. As shown in FIG.

As shown in Fig. 1, the positioning device 10 includes four moving parts 100A to 100D, a pin 110, a support member 120, four link levers 130A to 130D, A driving unit 140 and a detection unit 150 are provided. The positioning device 10 is attached to the frame 2 .

2 : is a perspective view which shows the structure of the positioning device 10. As shown in FIG. 3 : is the perspective view which looked at FIG. 2 from the lower side (Z-axis negative side). 2 and 3, the frame 2 and the driving unit 140 are omitted.

As shown in FIG. 2, the four moving parts 100A-100B are arrange|positioned at the different positions around the periphery of the axis|shaft of the shaft member 124 (refer FIG. 4) which supports the support member 120. As shown in FIG. The four moving parts 100A to 100B can be divided into two sets of the moving parts 100A and 100C and the moving parts 100B and 100D. The set of moving parts 100A and 100C and the set of moving parts 100B and 100D are arranged in a unit. That is, the moving parts 100A and 100C are arranged at a position symmetrical with respect to the shaft member 124 (refer to FIG. 4 ). Similarly, the moving parts 100B and 100D are arranged at a position symmetrical with respect to the shaft member 124 (refer to FIG. 4 ). The moving parts 100A and 100C are arranged in the X-axis direction, and the moving parts 100B and 100D are arranged in the Y-axis direction. That is, the arrangement position of the moving parts 100A, 100C and the moving parts 100B, 100D differ by 90 degrees centering on the shaft member 124 (refer FIG. 4).

Since each of the four moving parts 100A-100D is comprised similarly, the structure of 100 A of moving parts is demonstrated representatively.

The moving unit 100A includes a slide member 101 , a connecting member 102 , a magnet 103 , and a shaft 104 . Among them, the magnet 103 is not shown in Fig. 2, but is shown in Figs. 5(a) to 6(a).

The slide member 101 is a plate-shaped member formed in an L-shape. 2 and 3 , four holes 101b to 101e are formed in the bottom face portion 101a of the slide member 101 . The holes 101b to 101e are stepped holes. The holes 101b to 101e can be divided into two sets of the holes 101b and 101c and the holes 101d and 101e.

The groups of holes 101b and 101c are arranged side by side in the Y-axis direction. The roughness of the holes 101d and 101e is also the same. The pairs of holes 101b and 101c are arranged on the support member 120 side rather than the pairs of holes 101d and 101e. Further, the distance between the holes 101d and 101e is smaller than the distance between the holes 101b and 101c.

The arrangement of the holes 101b to 101e is the same in the slide member 101 in the moving part 100C.

In the moving parts 100B and 100D, the groups of the holes 101b and 101c are arranged side by side in the X-axis direction. The roughness of the holes 101d and 101e is also the same. The pairs of holes 101b and 101c are arranged on the support member 120 side rather than the pairs of holes 101d and 101e. Further, the distance between the holes 101d and 101e is smaller than the distance between the holes 101b and 101c.

Further, on the side wall 101f of the slide member 101, three magnets 103 are formed on the side of the support member 120 (refer to Figs. 5(a) to 6(a)).

The connecting member 102 is a rectangular block member. The connecting member 102 is formed with a stepped hole in the upper surface. This stepped hole is used in connection with the link lever 130A. The connecting member 102 is connected to the magnet 103 formed in the slide member 101 . For this reason, the connection member 102 is formed of the member which consists of a magnetic material.

Alternatively, a sheet made of a magnetic material may be adhered to the side surface of the connecting member 102 , and the sheet may be configured to adsorb with the magnet 103 .

Moreover, you may comprise so that the magnet 103 may be formed in the connection member 102. As shown in FIG. In this case, the slide member 101 is formed of a magnetic material. Alternatively, similarly to the above, a sheet made of a magnetic material is adhered to the slide member 101 , and the sheet may be configured to adsorb with the magnet 103 .

The side wall 101f of the slide member 101 and the connection member 102 are each formed with two holes penetrating in the X-axis direction. In a state where the slide member 101 and the connecting member 102 are connected via the magnet 103, the shaft 104 is inserted into each of the two holes formed in the side wall 101f and the connecting member 102 . The ends of the two shafts 104 on the negative side of the X-axis are fitted into and fixed to each of the two holes formed in the lock plate 105 . The ends of the two shafts 104 on the right side of the X-axis are fixed to a base 123 which will be described later.

With this configuration, the slide member 101 and the connecting member 102 can move along the shaft 104 while being integrated by the magnet 103 .

As described above, the moving units 100B, 100C, and 100D have the same configuration as the moving unit 100A.

Two pins 110 are formed in each slide member 101 of the moving parts 100A to 100D. 2 and 3, the two pins 110 are respectively fitted into any two of the holes 101b to 101e. In this case, the pin 110 is fitted from the lower surface side (Z-axis negative side) of the bottom surface portion 101a of the slide member 101 .

2 and 3, the two pins 110 are fitted in the holes 101b and 101e of the slide member 101 of the moving part 100A. In the slide member 101 of the moving part 100B, two pins 110 are fitted in the holes 101c and 101d. In each slide member 101 of the moving parts 100C and 100D, two pins 110 are fitted in the holes 101b and 101c. The action by the arrangement of these two pins 110 will be described later.

As shown in FIG. 2 , the supporting member 120 includes a pedestal part 121 and a shaft part 122 formed in the center of the pedestal part 121 . A hole 120a is formed in the center of the support member 120 in the Z-axis direction. The hole 120a is a hole formed in the center of the pedestal part 121 and the shaft part 122, respectively, and the circular hole of the same diameter is a continuous hole.

In addition, the pedestal part 121 of the support member 120 is a plate-shaped member formed in the shape of a cross shape. In the pedestal part 121, one step hole is formed at the ends of four plate members arranged at equal intervals in a radial shape. This stepped hole is used to connect the link levers 130A to 130D and the supporting member 120, which will be described later.

As shown in FIG. 3 , the base 123 is disposed below the support member 120 . The base 123 is formed in the shape in which the four corners were cut out from the plate-shaped member of a rectangular shape. In the center of the base 123, a circular hole 123a is formed in the Z-axis direction.

In addition, in the moving part 100B, the ends of the two shafts 104 (ends opposite to the end fixed to the stopper plate 105) are each of the two holes formed in the side surface of the base 123, respectively. inserted into and fixed. The side surface of the base 123 in which these two holes are formed is a side surface positioned at a position opposite to the moving part 100B.

The two shafts 104 formed in each of the moving parts 100A, 100C, and 100D are also the same as the shafts 104 in the moving part 100B, and are formed in the respective holes formed in the base 123 . inserted and fixed.

4 : is a perspective view which shows the structure of a part of the positioning device 10. As shown in FIG.

2 to 4 , the shaft member 124 is inserted into the hole 120a of the support member 120 and the hole 123a of the base 123 . The shaft member 124 is fixed to the support member 120 with a bearing and a nut. The lower end of the shaft member 124 is fixed to the base 123 with a power lock. With this configuration, the shaft member 124 supports the support member 120 and the base 123 . The support member 120 is rotatably supported by the shaft member 124 with respect to the base 123 .

As shown in Fig. 2, the four link levers 130A to 130D are plate-shaped members formed in an arcuate shape. The link levers 130A to 130B connect the four moving parts 100A to 100D and the supporting member 120, respectively. A pair of link lever 130A and link lever 130C, and a pair of link lever 130B and link lever 130D are arranged around the shaft of shaft member 124 (refer to Fig. 4) so as to be orthogonal to each other.

Both ends of the link levers 130A to 130D are connected to the connecting member 102 and the supporting member 120 of the moving parts 100A to 100D. The connection between the link lever 130A and the moving part 100A is, as shown in FIGS. 2 and 4, a step screw 131 is inserted into the hole of the link lever 130A from above, and the step screw 131 is A washer is passed through the shaft. The threaded part of the step screw 131 is inserted into the step hole formed in the upper surface of the connecting member 102 of the moving part 100A, and is screwed.

As shown in FIGS. 2 and 4, the link lever 130A and the support member 120 are connected by a step screw 132 inserted into the hole of the link lever 130A from below, and A washer is passed through the shaft. The threaded part of the step screw 132 is inserted into the step hole formed in the pedestal part 121, and is screwed.

Accordingly, when the support member 120 rotates, the link lever 130A rotates around the step screw 131 .

The link lever 130C is the same as the link lever 130A, and is connected to the connecting member 102 and the supporting member 120 of the moving part 100C.

The connection between the link lever 130B and the moving part 100B is, as shown in FIGS. 2 and 4, a step screw 131 is inserted into the hole of the link lever 130B from above, and the step screw 131 is The shaft is covered with a collar 133 . The threaded part of the step screw 131 is inserted into the step hole formed in the upper surface of the connecting member 102 of the moving part 100B, and is screwed.

The connection between the link lever 130B and the supporting member 120 is, as shown in FIGS. 2 and 4, a step screw 132 is inserted into the hole of the link lever 130B from above, and the step screw 132 is A washer is passed through the shaft. The threaded part of the step screw 132 is inserted into the step hole formed in the pedestal part 121, and is screwed.

Accordingly, when the support member 120 rotates, the link lever 130B rotates about the step screw 131 .

The link lever 130D is the same as the link lever 130B, and is connected to the connecting member 102 and the supporting member 120 of the moving part 100D.

As described above, in the connection between the link levers 130B and 130D and the respective connecting members 102 of the moving parts 100B and 100D, the shaft portion of the stepped screw 131 is covered with the collar 133 . Thereby, the link levers 130B, 130D are positioned at different height positions than the link levers 130A and 130C by sandwiching the support member 120 therebetween. For this reason, when the support member 120 rotates, the link levers 130A-130D can rotate without mutually interfering.

Further, the link levers 130A to 130D are formed in an arcuate shape. For this reason, when the support member 120 rotates centering on the shaft member 124, the link levers 130A-130D can rotate, avoiding interference with the shaft member 124. As shown in FIG.

Further, the configuration for avoiding interference between the link levers 130A to 130D and the shaft member 124 is not limited thereto. When the link levers 130A to 130D and the shaft member 124 rotate without interfering, the link levers 130A to 130D may be formed in a straight line shape instead of an arcuate shape.

Returning to FIG. 1 , the drive unit 140 includes a rotary actuator 141 and gears 142 and 143 . A gear 142 is mounted below the rotary actuator 141 . The gear 143 is arranged to mesh with the gear 142 .

As shown in FIG. 4, the gear 143 has the hole 143a formed in the center. The hole 143a is a stepped hole. The gear 143 is screwed to the upper surface of the shaft portion 122 of the support member 120 and screws (not shown). Accordingly, the gear 143 and the support member 120 are integrated. Further, the shaft member 124 is inserted into the hole 143a of the gear 143 from the Z-axis positive side. A bearing is sandwiched between the shaft member 124 and the hole 143a.

With this configuration, when the rotary actuator 141 of FIG. 1 is rotationally driven, the gear 142 rotates. Then, the gear 143 meshed with the gear 142 rotates about the shaft member 124 . As described above, since the support member 120 and the gear 143 are integrated, the gear 143 and the support member 120 rotate integrally.

It returns to FIG. 1 again, and the block member 144 is formed above the gear 143. The block member 144 is provided with a hole penetrating in the Z-axis direction, and the shaft member 124 is inserted into this hole and fixed (refer to FIG. 4). The block member 144 is further provided with a rotary actuator 141 . The side of the block member 144 is fixed to the frame 2 . Accordingly, the positioning device 10 is attached to the frame 2 via the block member 144 .

2 and 3 , the detection unit 150 includes four sensors 151 to 154 . The sensors 151 to 154 are provided on the holding member 155 . For example, the holding member 155 arrange|positioned between the moving parts 100B, 100C is comprised by the three plates 155a-155c arrange|positioned at equal intervals in the radial shape.

The plate 155a of the holding member 155 is screwed onto the Z-axis negative side of the base 123 with screws (not shown). The plate 155b is arranged along the shaft 104 formed between the moving part 100B and the base 123 . The four sensors 151 to 154 are provided on the plate 155b at predetermined intervals.

The plate 155c of the holding member 155 is disposed along the shaft 104 formed between the moving part 100C and the base 123 . The four sensors 151 to 154 are provided on the plate 155c at predetermined intervals.

Also between the moving parts 100A and 100D, the holding member 155 is similarly arrange|positioned, and the detection part 150 (four sensors 151-154) is formed.

All of the sensors 151 to 154 are used to detect the position of each connecting member 102 . However, the sensors 151 to 153 are formed according to the size of the substrate F. For example, the sensor 151 disposed at the outermost side of the moving parts 100A to 100D is four when the substrate F of the largest size that the positioning device 10 can position is positioned. It is arranged so as to correspond to the position of the corner part.

On the other hand, the sensor 154 is formed at a position close to the support member 120 . The sensors 151 to 154 will be described in detail later.

[Operation of positioning device]

5A to 6A are top views schematically showing the positioning device 10 in order to explain the operation of the positioning device 10 . Fig. 6(b) is a top view schematically showing the substrate F and the fins 110 in the states of Figs. 5(b) and 6(a). 5(a) to 6(a), only the moving parts 100A to 100D, the link levers 130A to 130D, the supporting member 120, and the base 123 are shown for convenience of explanation. .

In addition, although the board|substrate F is abbreviate|omitted in FIG.5(a) - FIG.6(a), in the following description, it demonstrates as what performs positioning of the board|substrate F shown in FIG. In this case, the board|substrate F is a state mounted on the table 210 (refer FIG.7(a)). Further, the sensor corresponding to the substrate F is described as being the sensor 151 among the detection units 150 described with reference to FIGS. 2 and 3 .

As shown in FIG. 5A , in the initial state, each slide member 101 of the moving parts 100A to 100D is in contact with the lock plate 105 . In FIG. 5( a ), each slide member 101 and each connection member 102 are connected via a magnet 103 . The position of each connection member 102 in Fig.5 (a) is called a "start position."

From the state of FIG. 5A , when the supporting member 120 rotates counterclockwise in the XY plane, the link levers 130A to 130D connected to the supporting member 120 also rotate the supporting member 120 . move along with For this reason, when the support member 120 rotates counterclockwise, the slide member 101 and the connection member 102 of the moving parts 100A-100D are respectively a shaft by link lever 130A-130D. It is tensioned inward along (104). Thereby, the slide member 101 and the connecting member 102 of the moving parts 100A-100D move linearly toward the support member 120 along the shaft 104 in synchronization with each other. Thereby, the link levers 130A-130D rotate clockwise centering|focusing on the stepped screw 131 in each connection member 102. As shown in FIG.

As described above, the link levers 130A to 130D have the same configuration and are connected to the support member 120 . In addition, the moving parts 100A-100D are mutually comprised similarly. Accordingly, with the rotation of the support member 120 , the moving parts 100A to 100D move toward the support member 120 side at the same time and by the same amount of movement.

After that, when the slide members 101 and the connecting members 102 of the moving parts 100A to 100D are positioned at the positions shown in Fig. 5(b), two are formed on each slide member 101. The pin 110 abuts against the substrate F. At this time, as shown in FIG.6(b), the four corner|angular parts of the board|substrate F engage with the two pins 110. As shown in FIG. Further, the substrate F is sandwiched in a diagonal direction by a pair of pins 110 arranged in a diagonal direction. Thereby, the board|substrate F cannot move forward, backward, left and right, but is positioned with respect to the table 210 (refer FIG.7(a)). Thus, the position where the board|substrate F contacts the pin 110 and is positioned, ie, the position of the connection member 102 in FIG.5(b) is called a "positioning position."

At this time, the sensor 151 constituting the detection unit 150 of FIG. 2 detects that the connection member 102 is positioned at the positioning position. As described above, the fact that the connecting member 102 is positioned at the positioning position means that the pin 110 formed on the slide member 101 abuts against the substrate F. Accordingly, the substrate F is positioned by the pins 110 . Therefore, "the connection member 102 has arrived at the positioning position" means "the positioning of the substrate F has been performed".

For this reason, by detecting the position of the connection member 102 by the detection part 150, it can grasp|ascertain whether the board|substrate F was positioned appropriately.

In this embodiment, in order to detect the state of the substrate F (whether the substrate F is positioned or not) in this way, as described with reference to FIG. 2, the sensors 151 to 153 are positioned at positions corresponding to the size of the substrate F. is placed.

In this way, after the connecting member 102 reaches the positioning position, when the supporting member 120 further rotates, as shown in Fig. 6(a), the slide member 101 and the connecting member 102 are depart That is, since the pin 110 is formed on the slide member 101, the substrate F serves as a stopper, and each slide member 101 cannot move beyond the support member 120 side, that is, the inside of the substrate F. .

On the other hand, each connection member 102 is connected to each of the link levers 130A to 130D. For this reason, when the support member 120 continues to rotate, each connection member 102 will resist the attraction force by the magnet 103, and will separate from each slide member 101. As shown in FIG.

The connecting member 102 spaced apart from the slide member 101 also moves toward the support member 120 with rotation of the support member 120 after that. In the present embodiment, the position at which the connecting member 102 most approaches the supporting member 120 is referred to as an "end position".

The sensor 154 detects that the connecting member 102 has been positioned in the end position. Thereby, it can be grasped|ascertained that the connection member 102 has separated from the slide member 101 normally at a positioning position, and has reached|attained the end position.

After the connecting member 102 is positioned at the end position, when the supporting member 120 rotates in the reverse direction (ie, rotates clockwise), the connecting member 102 moves toward the positioning position. At this time, the link levers 130A-130D move along with the rotation of the support member 120 .

When the connecting member 102 arrives at the positioning position, the connecting member 102 is connected via the slide member 101 and the magnet 103 . This corresponds to the state of Fig. 5(b). After that, when the supporting member 120 rotates, the connecting member 102 and the slide member 101 are integrated to move to the starting position. This corresponds to the state of Fig. 5(a).

In this way, the slide member 101 and the connecting member 102 move from the starting position to the positioning position by the counterclockwise rotation of the supporting member 120 (FIG. 5(a), (b)) , only the connecting member 102 moves from the positioning position to the end position (Fig. 6(a)). Thereafter, by clockwise rotation of the supporting member 120 , the connecting member 102 moves from the end position to the positioning position again, and when the connecting member 102 arrives at the positioning position, the magnet 103 ) in the state connected to the slide member 101, it moves from the positioning position to the starting position.

In addition, while the slide member 101 and the connecting member 102 arrive at the positioning position, only the connecting member 102 moves from the positioning position to the end position, and again moving from the end position to the positioning position. , the positioned substrate F is conveyed by the conveying apparatus 20 mentioned later.

[Operation of conveying device]

Next, conveyance of the board|substrate F by the conveyance apparatus 20 is demonstrated.

7(a)-(c) is a schematic diagram which showed the mode that the conveyance apparatus 20 conveys the board|substrate F to the positioning apparatus 10 in a positioning conveyance system. In addition, only in FIG.7(b), the conveyance part 200 is abbreviate|omitted.

As shown to Fig.7 (a), the conveyance apparatus 20 is equipped with the conveyance part 200, the table 210, and the pressure application part 220. As shown in FIG. The transfer unit 200 is, for example, a robot arm. The conveyance part 200 conveys the board|substrate F to a predetermined place by rotating or raising/lowering the table 210 within an X-Y plane, holding the table 210. As shown in FIG.

A plurality of minute holes are formed in the table 210 . When a negative pressure is applied to the table 210 from a pneumatic source (not shown) by the pressure application unit 220 , a negative pressure is applied to the substrate F through the plurality of holes described above. Accordingly, the substrate F is adsorbed to the table 210 .

On the other hand, when a positive pressure is applied to the table 210 from a pneumatic source (not shown) by the pressure application unit 220 , a positive pressure is applied to the substrate F through the plurality of holes described above. Thereby, the substrate F can move on the table 210 since the adsorption|suction with respect to the table 210 is cancelled|released.

When the conveyance apparatus 20 of the above structures conveys the board|substrate F, as shown to Fig.7 (a), the conveyance part 200 moves the table 210 on which the board|substrate F was mounted to the positioning apparatus 10. ) to a location directly below the At this time, a negative pressure is applied to the substrate F through the table 210 by the pressure application unit 220 . This is because the substrate F is adsorbed to the table 210 so that the substrate F does not move on the table 210 . Then, the conveyance part 200 raises the table 210, and positions the board|substrate F to the predetermined position for positioning.

As shown in FIG.7(b), when the table 210 is positioned at a predetermined position by the conveyance part 200, the positioning of the board|substrate F by the above-mentioned positioning apparatus 10 will be performed. The arrows in FIG. 7(b) indicate that each slide member 101 and each connecting member 102 of the moving parts 100A to 100D move toward the inside of the substrate F, and the position of the substrate F by the pins 110 It indicates that a decision is made.

In addition, at this time, a positive pressure is applied to the substrate F through the table 210 by the pressure application unit 220 . Thereby, since adsorption|suction of the board|substrate F with respect to the table 210 is cancelled|released, it becomes possible to move the board|substrate F on the table 210, and can position the board|substrate F. In addition, the state of FIG.7(b) corresponds to the state of FIG.5(b).

As shown in FIG.7(c), when positioning of the board|substrate F is complete|finished, the conveyance part 200 will raise/lower the table 210. As shown in FIG. At this time, a negative pressure is applied to the substrate F through the table 210 by the pressure application unit 220 . Thereby, the board|substrate F can maintain the state positioned with respect to the table 210. As shown in FIG.

In addition, in the case of FIG.7(c), in the positioning device 10, the connection member 102 separates from the slide member 101, and moves toward an end position (FIG.6(a)). The connecting member 102 moves from the end position to the positioning position again, and in the positioning position, the connecting member 102 is connected to the slide member 101 via the magnet 103 (Fig. 5(b)) , moves from the positioning position to the starting position (Fig. 5(a)).

Then, the conveying apparatus 20 conveys the table 210 to a scribing apparatus, for example. Thereby, the scribing operation with respect to the board|substrate F is performed.

8 is a block diagram showing the configuration of the positioning transport system 1 . As shown in FIG. 8, the positioning conveyance system 1 is provided with the control part 30, the input part 31, and the notification part 32 in addition to the said structure.

The control unit 30 includes an arithmetic processing circuit such as a CPU, and a memory such as a ROM, a RAM, and a hard disk. The control unit 30 controls each unit according to the program stored in the memory.

The input unit 31 is constituted by a touch panel or the like, and receives input of information from a user. The notification unit 32 includes a display, a speaker, or the like, and notifies the user of predetermined information.

9A is a flowchart showing the operation of the moving units 100A to 100D in the positioning device 10 . This control is executed by the control unit 30 shown in Fig. 8 . Hereinafter, the control by the control part 30 is demonstrated with appropriate reference to the flowchart of FIG.9(a), and FIG.5(a) - FIG.6(b) mentioned above.

In the "start" in the flowchart of FIG. 9(a), each connection member 102 of the moving parts 100A-100D is connected to each slide member 101 via the magnet 103, It is positioned at the starting position shown in Fig. 5A.

In step S11 , the control unit 30 drives the driving unit 140 . Specifically, the rotary actuator 141 is driven positively. When the rotary actuator 141 drives positively, the gear 142 rotates, and the gear 143 rotates by rotation of the gear 142 . Thereby, the support member 120 rotates counterclockwise, and as mentioned above, the slide member 101 and the connection member 102 of the moving parts 100A-100D move toward a positioning position from a starting position. . When the slide member 101 and the connection member 102 move to the positioning position shown in FIG.5(b), positioning with respect to the board|substrate F is performed as mentioned above.

After that, when the rotary actuator 141 continues the positive drive, each connecting member 102 is spaced apart from the slide member 101 . And as shown to Fig.6 (a), the connecting member 102 is independent and moves toward the end position.

In step S12, the control unit 30 determines whether or not the connecting member 102 has reached the end position. The control unit 30 determines based on the detection result of the sensor 154 provided at the position closest to the support member 120 .

When the sensor 154 detects that the connecting member 102 has reached the end position, the control unit 30 determines that the connecting member 102 has reached the end position (step S12: YES). In this case, the control unit 30 stops the positive driving of the rotary actuator 141 (step S13).

When the sensor 154 does not detect that the connecting member 102 has reached the end position, the control unit 30 determines that the connecting member 102 has not reached the end position (step S12: NO) . And the control part 30 continuously drives the rotary actuator 141 positively.

In step S14, the control part 30 drives the rotary actuator 141 back. When the rotary actuator 141 is driven back, the gear 142 rotates, and the gear 143 rotates by rotation of the gear 142 . Accordingly, the support member 120 rotates clockwise. Thereby, the support member 120 rotates clockwise, and as mentioned above, the slide member 101 and the connection member 102 of the moving parts 100A-100D move toward a positioning position from an end position. .

When the connecting member 102 is positioned at the positioning position shown in Fig. 5(b) , the connecting member 102 is connected to the slide member 101 via the magnet 103 . Then, the connecting member 102 and the slide member 101 move toward the starting position.

In step S15, the control part 30 determines whether the connection member 102 has reached|attained the starting position. When the connecting member 102 has reached the starting position (step S15: YES), the control unit 30 stops the reverse driving of the rotary actuator 141 (step S16). On the other hand, when the connection member 102 has not reached the starting position (step S15: NO), the control part 30 continues to drive the rotary actuator 141 back.

In this way, positioning with respect to one board|substrate F is complete|finished. When there exists the board|substrate F which should be positioned, the process of steps S11 - S16 is performed repeatedly.

9( b ) is a flowchart showing the operation of the conveying apparatus 20 . This control is executed by the control unit 30 shown in Fig. 8 . Hereinafter, the control by the control part 30 is demonstrated with appropriate reference to the flowchart of FIG.9(b), and FIG.5(a) - FIG.7(c) mentioned above.

As for "start" in the flowchart of FIG.9(b), the board|substrate F which performs positioning is mounted on the table 210 of the conveyance apparatus 20, and the table 210 by the pressure application part 220. ) through which a negative pressure is applied to the substrate F. In addition, before the flowchart of FIG.9(b) is started, the user inputs the size of the board|substrate F through the input part 31 of FIG. Thereby, the control part 30 specifies the sensor corresponding to the size of the board|substrate F among the sensors 151-153 of the detection part 150.

As shown in FIG.9(b), in step S21, the control part 30 drives the conveyance part 200, and the predetermined position for positioning the table 210 (position of FIG.7(b)) returned to

When the substrate F is positioned at a predetermined position in the process of step S21 , in step S22 , the control unit 30 applies a positive pressure to the substrate F to the pressure application unit 220 . Thereby, the adsorption|suction with respect to the table 210 of the board|substrate F is cancelled|released. Because of this, the substrate F can move on the table 210 .

In step S23, the control part 30 respond|corresponds to the size of the board|substrate F by the detection part 150 formed in the moving parts 100A-100D, each connecting member 102 of the moving parts 100A-100D. It is determined whether a movement to the desired position has been detected or not.

In this embodiment, as shown in FIG. 2, the detection part 150 is provided with respect to each of the moving parts 100A-100D. In all of these four detection parts 150, the control part 30 WHEREIN: Whether it was detected that each connection member 102 of the moving parts 100A-100D was positioned at the position corresponding to the size of the board|substrate F was detected. to judge For example, when the size of the substrate F is a size at which the connection member 102 is positioned on the sensor 151 , the control unit 30 detects the connection member 102 in all of the four sensors 151 . In one case, it is determined that the positioning of the substrate F has been completed.

For example, when the sensor 151 formed to correspond to the moving unit 100A among the four sensors 151 does not detect the connecting member 102 , the connecting member 102 in the moving unit 100A There is a possibility that is separated from the magnet 103 at a position other than the positioning position. In this case, since the pin 110 formed in the slide member 101 of 100 A of moving parts cannot hold|lock the board|substrate F properly, the positioning of the board|substrate F cannot be performed properly.

Alternatively, there is a possibility that a problem may occur in the sensor 151 formed in the moving unit 100A. In this case, it cannot be determined whether or not the board|substrate F was positioned properly originally.

For this reason, when all of the four sensors 151 detect the connection member 102, the control part 30 determines that the board|substrate F was positioned.

Therefore, in step S23, when the control part 30 determines that the positioning of the board|substrate F is not complete (step S23: NO), the control part 30 notifies the notification part 32 of an error (step S23). S24). The notification by the notification unit 32 is performed, for example, by a method of displaying &quot;error&quot; on the display. Alternatively, error notification may be performed by outputting a predetermined notification sound from the notification unit 32 . In addition, when the notification unit 32 has a lamp, the notification may be performed by lighting the lamp.

In this case, after the user checks the positioning device 10 and the like, the user positions the substrate F again.

When the control part 30 determines in step S23 that positioning of the board|substrate F is complete (step S23: YES), the control part 30 makes the pressure application part 220 apply a negative pressure to the board|substrate F. Thereby, the board|substrate F is adsorb|sucked to the table 210 (step S25).

In step S26, the control part 30 drives the conveyance part 200, and makes the board|substrate F convey by a scribing apparatus.

In this way, positioning and conveyance with respect to one board|substrate F are complete|finished. In addition, when there exists the board|substrate F which should be positioned and conveyed, the control part 30 repeats the process of steps S21-S26 and performs it.

<Effect of embodiment>

According to the structure of this embodiment, the following effects are brought about.

1 and 2, as for the positioning device 10, link lever 130A-130D is connected to each of the support member 120 and moving part 100A-100D. In addition, two pins 110 are formed in each of the moving parts 100A to 100D.

With this configuration, when the driving unit 140 rotates the supporting member 120 in a predetermined direction, the moving units 100A to 100D move in the direction of the supporting member 120 with the rotation of the supporting member 120 . move simultaneously to In this way, when the moving parts 100A-100D move, the board|substrate F is pinched|interposed in the in-plane direction by the pin 110 arrange|positioned at the moving parts 100A-100D. Accordingly, the substrate F is positioned in the vicinity of the center of the moving parts 100A to 100D.

In this way, the moving parts 100A to 100D can be moved in synchronization with one driving unit 140, and the substrate F can be positioned at a predetermined position. Accordingly, the positioning of the substrate F can be efficiently performed with a simple configuration.

As shown to FIG. 1, FIG. 2, and FIG.5(a), as for the moving parts 100A-100D, the slide member 101 and the connecting member 102 are respectively connected with the magnet 103. As shown in FIG. Each of the connecting members 102 is connected to the link levers 130A to 130D.

With this configuration, when the pins 110 abut against the substrate F, the substrate F becomes a stopper, and the respective slide members 101 cannot move to the substrate F side any longer. On the other hand, since each connecting member 102 is connected to the link levers 130A to 130D, when the supporting member 120 is further rotated after that, each connecting member 102 exerts an attractive force by the magnet 103 . It moves away from the slide member 101 against the resistance and moves to the support member 120 side alone. Accordingly, when the pin 110 is in contact with the substrate F, an excessive load is not applied to the substrate F. Accordingly, damage or deformation of the substrate F can be prevented.

2 and 3, holes 101b to 101e are formed in the slide member 101, and the pins 110 are fitted in any two of them. When the holes 101b to 101e are divided into a set of holes 101b and 101c and a set of holes 101d and 101e, the holes 101b and 101c and the holes 101d and 101e are the moving parts 100A to 100D. are arranged to fall in a direction that intersects the direction of movement. Moreover, the space|interval of the holes 101b, 101c and the space|interval of the holes 101d, 101e are arrange|positioned so that they may differ.

With this configuration, when the substrate F has a pair of corners in the diagonal direction in a plan view, the two pins 110 disposed on the slide members 101 of the moving parts 100A to 100D are attached to the substrate F. By engaging each corner of , the substrate F can be positioned.

Further, holes 101b to 101e are formed in each slide member 101 of the moving parts 100A to 100D. Accordingly, by changing the hole through which the pin 110 is inserted, the interval between the two pins 110 can be changed. For example, when the size of the board|substrate F is large, the one where the space|interval of the two pins 110 is wide can position the board|substrate F stably. Therefore, according to the said structure, according to the size of the board|substrate F, the board|substrate F can be positioned more stably.

In addition, when a robot arm is used as the conveyance part 200, when conveying the board|substrate F (the state mounted on the table 210) to the predetermined position of the positioning apparatus 10, the conveyance part 200 In order to prevent the arm from interfering with the pin 110 , the position of the pin 110 may be appropriately adjusted.

For example, in the present embodiment, in the moving parts 100A and 100B, the holes 101b and 101c arranged in a direction intersecting the moving direction of the connecting member 102 and the holes 101d and 101e are 2 No pins 110 are inserted. In the present embodiment, the two pins 110 are fitted into the holes 101b and 101e of the slide member 101 of the moving part 100A. In the slide member 101 of the moving part 100B, two pins 110 are fitted in the holes 101c and 101d.

1 , 2 , and 4 , the moving parts 100A to 100D and the link levers 130A to 130D are arranged at different positions around the shaft member 124 .

With this configuration, it is possible to position the substrate F with the pins 110 at a plurality of different positions on the outer periphery of the substrate F. As shown in FIG. Accordingly, the substrate F can be appropriately positioned.

As shown in Figs. 1, 2 and 4, a jaw composed of moving parts 100A and 100C and link levers 130A and 130C, moving parts 100B and 100D, and link levers 130B and 130D. The jaws formed are arranged at positions orthogonal to each other around the shaft member 124 . In addition, the two pins 110 formed on the slide member 101 of the moving parts 100A and 100C are arranged so as to be separated from each other in a direction crossing the moving direction of the moving parts 100A and 100C. The two pins 110 formed on the slide member 101 of the moving parts 100B and 100D are also arranged in the same manner.

According to this structure, when the board|substrate F is a square in planar view, the two pins 110 can be engaged with the edge of the board|substrate F. As shown in FIG. Therefore, the square board|substrate F can be positioned appropriately.

As shown to Fig.7 (a)-(c), in the positioning conveyance system 1, the conveyance part 200 of the conveyance apparatus 20 places the table 210 on which the board|substrate F was mounted in a predetermined location. return to The table 210 adsorbs the board|substrate F during the period in which the board|substrate F is positioned by the positioning device 10, and based on that the board|substrate F was positioned by the positioning device 10, adsorption|suction of the board|substrate F make it work

With this configuration, the substrate F positioned by the positioning device 10 can be conveyed to a predetermined place in a state where the positioned state is maintained.

As shown in Figs. 2 and 3, the positioning device 10 includes a detection unit 150 that detects each of the connecting members 102 of the moving units 100A to 100D, that is, four sensors 151 to 154. be prepared

When the pin 110 contacts the board|substrate F, the connecting member 102 of the moving parts 100A-100D separates from the slide member 101 and moves to an end position independently. In this way, the position where the connecting member 102 is separated from the slide member 101 is the position at which the substrate F is positioned by the pin 110 . For this reason, when the positions of the connection member 102 are all normally detected by the sensors 151-153 with which the detection part 150 is equipped, it can grasp|ascertain that the positioning of the board|substrate F was performed.

<Change example>

The embodiment of the present invention can be appropriately modified in various ways within the scope of the technical idea shown in the claims.

In the said embodiment, although the thing of a square shape was used as the board|substrate F, the board|substrate F of a rectangular shape may be sufficient.

In this case, the set of moving parts 100A, 100C is arrange|positioned on one diagonal extension line of the board|substrate F, and moving part 100B, 100D is arrange|positioned on the other diagonal extension line. The link lever 130A is connected to the moving part 100A and the support member 120 . The link levers 130B to 130D are respectively connected to each of the moving parts 100B to 100D and the support member 120 in the same manner as the link lever 130A.

Moreover, the two pins 110 formed in each slide member 101 are arrange|positioned so that the four corner|angular parts of the board|substrate F may be pinched|interposed.

Further, the substrate F may be formed in a circular shape. Since the moving parts 100A to 100D are radially arranged at equal intervals with the shaft member 124 as the center, when the moving parts 100A to 100D move toward the substrate F, the outer periphery of the circular substrate The pin 110 is in contact. Thereby, the positioning of the circular-shaped board|substrate F can be performed suitably.

In addition, when the substrate F is formed in a circular shape, the fins 110 are formed in each slide member 101 in one piece, because the fins 110 may be brought into contact with the outer periphery of the substrate F from four directions. good.

In addition, in the said embodiment, although there were four holes for inserting the pin 110, it can be extended suitably.

Moreover, in the said embodiment, the four moving part and the link lever were formed. However, when the shape of the substrate F is a square shape or a rectangular shape, a pair of moving parts and a pair of link levers may be provided.

In this case, the moving parts 100A, 100C are arrange|positioned on the one diagonal extension line of the board|substrate F. As shown in FIG. Corresponding to this, link levers 130A and 130C are formed. Accordingly, the two corner portions (two corner portions positioned on the diagonal) of the substrate F are sandwiched by the pins 110 . Accordingly, the substrate F is appropriately positioned.

In addition, in the said embodiment, in order to grasp|ascertain whether or not positioning of the board|substrate F was completed, it was detected that the connection member 102 was located in the positioning position with the three sensors 151-153. You may change this sensor according to the size of the board|substrate F.

In addition, in the said embodiment, although the three sensors 151-153 were fixed to the holding member 155, the structure which detects the position of the connection member 102 is not limited to this.

For example, the slide volume may be provided from the start position to the end position of the connection member 102, and it may be comprised so that the movement amount of a switch may be detected. In this case, the switch of the slide volume is connected to the connecting member 102 . The switch moves with the movement of the connecting member 102 . Accordingly, the amount of movement of the connecting member 102 , that is, the amount of movement of the switch is detected.

With such a configuration, it is possible to detect that the connecting member 102 has reached the positioning position with respect to the plurality of substrates F with one switch, without the need to provide a plurality of sensors.

Moreover, in the said embodiment, the sensor 154 was formed in order to detect that the connection member 102 reached|attained to the end position, but when a slide volume is used, it also comes with the arrival of the connection member 102 at an end position. can be detected.

Alternatively, a scale may be formed on the holding member 155, and the user may manually move the sensor 151 in accordance with the scale according to the size of the substrate F. Even in this case, the detection unit 150 (sensor 151 ) can appropriately detect the positioning position (position of the connecting member 102 ) of the substrate F according to the size of the substrate F.

1: Positioning conveying system
10: positioning device
20: conveying device
100A~100D : Moving part
101: slide member
101b~101e: hole
102: connection member
103: magnet
110: pin
120: support member
124: shaft member
130A~130D : Link Lever
140: drive unit
150: detection unit
200: transfer unit
210: table

Claims (8)

At least one pair of moving parts supported so as to be accessible and spaced apart in a direction parallel to the substrate;
a pin disposed in each of the pair of moving parts to lock the outer periphery of the substrate;
a support member disposed between the pair of moving parts and axially supported by a shaft member perpendicular to the substrate;
a pair of link levers respectively connecting the support member and each of the moving parts;
and a drive unit for rotating the support member with respect to the shaft member;
Positioning device, characterized in that. According to claim 1,
The moving unit,
a slide member on which the pin is disposed;
a connecting member disposed toward the support member with respect to the slide member and connected to the link lever;
and a magnet for adsorbing the slide member and the connecting member to each other,
Positioning device, characterized in that. 3. The method of claim 1 or 2,
The two pins are arranged in the moving unit so as to fall in a direction crossing the moving direction of the moving unit,
In the moving part, a plurality of sets of two holes for sandwiching the two pins are formed so as to be separated in the moving direction of the moving part,
The spacing of the holes of each set is different from each other,
A positioning device, characterized in that. 3. The method of claim 1 or 2,
A plurality of pairs of the pair of moving parts and the pair of link levers are arranged at different positions around the shaft member,
Positioning device, characterized in that. 5. The method of claim 4,
The pair of moving parts and the two pairs of the pair of link levers are respectively disposed at two positions orthogonal to each other around the shaft member,
The two pins are arranged on the moving part of each set so as to be spaced apart in a direction intersecting the moving direction of the moving part,
Positioning device, characterized in that. a positioning device for positioning the substrate;
a conveying device for conveying the substrate to a positioning device;
The positioning device is
At least one pair of moving parts supported so as to be accessible and spaced apart in a direction parallel to the substrate;
a pin disposed in each of the pair of moving parts to lock the outer periphery of the substrate;
a support member disposed between the pair of moving parts and axially supported by a shaft member perpendicular to the substrate;
a pair of link levers respectively connecting the support member and each of the moving parts;
and a drive unit for rotating the support member with respect to the shaft member;
A positioning conveyance system, characterized in that. 7. The method of claim 6,
The conveying device is
a table on which the substrate is placed;
and a conveying unit for conveying the table;
The table is configured to adsorb the placed substrate by air pressure applied from a pneumatic source,
In the period during which the substrate is positioned by the positioning device, the transfer device releases adsorption of the substrate and operates the adsorption of the substrate based on the positioning of the substrate by the positioning device ,
A positioning conveyance system, characterized in that. 8. The method of claim 7,
The positioning device includes a detection unit for detecting a movement position of the moving unit,
the transfer device starts an operation of adsorbing the substrate with respect to the table based on detection by the detection unit that the moving unit has moved to a position corresponding to the size of the substrate;
A positioning conveyance system, characterized in that.

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