CN113169095A - 用于在基板上烧结电子器件的烧结压机 - Google Patents

用于在基板上烧结电子器件的烧结压机 Download PDF

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CN113169095A
CN113169095A CN201980078227.9A CN201980078227A CN113169095A CN 113169095 A CN113169095 A CN 113169095A CN 201980078227 A CN201980078227 A CN 201980078227A CN 113169095 A CN113169095 A CN 113169095A
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尼古拉·斯基瓦洛基
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Abstract

一种用于在基板(12)上烧结电子器件(10)的烧结压机(1)，包括：至少一个反作用元件(40)，在第一元件端(40’)和第二元件端(40”)之间沿与压机(1)的压机轴线平行的元件轴线延伸，第一元件端(40’)形成用于各自的基板(12)的支撑平面；至少一个负荷传感器(50)，操作地连接到第二元件端(40”)，并且容纳在操作地连接到冷却线路(54)的传感器保持板(52)中；以及元件板(70)，适于可滑动地支撑至少一个反作用元件(40)并且配备有加热线路(72)。反作用元件(40)具有加热部分(40a)，其穿过元件板(70)并且适于通过传导将元件板(70)的热传递到基板(12)。反作用元件具有冷却部分(40b)，终止于第二端(40”)并且成形为消散从元件板(70)传递到加热部分(40a)的热。加热部分(40a)可以是棱柱的形式。冷却部分(40b)可以包括轴向连续的消散盘，其与元件轴线同轴地延伸。反作用元件(40)的第二端(40”)可以配备有面向负荷传感器(50)的红外屏(46)。烧结压机(1)可以包括多个反作用元件(40)，其由元件板(70)可滑动地支撑，并且负荷传感器(50)与每个反作用元件(40)相关联。加热线路(72)可以适于将元件板(70)加热到240℃和290℃之间的工作温度。冷却线路(54)可以适于将传感器保持板(52)保持在约60℃的温度或将传感器保持板(52)保持在约25℃的温度并且将负荷传感器(50)保持在约60℃的温度。

Description

用于在基板上烧结电子器件的烧结压机
本发明涉及一种用于在基板上烧结电子器件的烧结压机(sintering press)。
众所周知，在一些电子应用中，通过插入烧结膏将集成电子器件(例如，二极管、IGBT、热敏电阻和MOSFET)固定到基板上。为了正确烧结每个器件，必须在其处于烧结温度(例如，大于200℃)时将其压制在基板上。
烧结压机通常包括基部，其形成压制平面，一个或多个基板定位在压制平面上。该压机配备有压制单元，其针对每个基板，配备有一个或多个压制构件，压制构件通过例如液压电路来控制，以便对待烧结的电子器件施加预定压力。
在压机的一些实施例中，基部还配备有一个或多个负荷传感器，其适于检测通过压制构件施加在每个基板的电子器件上的力的总和，以便监测压机的正确操作。负荷传感器是必须在比烧结温度低得多的温度下操作的电子器件。
因此，困扰上述类型的烧结压机的一个问题是将负荷传感器保持在比烧结温度低得多的工作温度下，即使负荷传感器可操作地连接到压制平面，因为负荷传感器必须检测由压制构件施加在基板上的力的正确施加。
本发明的目的是提出一种能够解决这种问题的压机。
上述目的通过根据权利要求1所述的压机实现。从属权利要求描述了本发明的优选实施例。
根据本发明的烧结压机的特征和优点将从以下对其优选实施例的描述中变得明显，参照附图，优选实施例通过指示性和非限制性的示例提供，其中：
-图1是根据本发明的压机的轴向截面图；以及
-图2是反作用元件的透视图。
在上述附图中，根据本发明的烧结压机统一表示为1。
该压机适于在基板12上烧结电子器件10。
在一个实施例中，压机1设计成在多个基板12上同时烧结电子器件。
基板12保持待烧结的电子器件10(例如，IGBT、二极管、热敏电阻和MOSFET)放置在一层烧结膏(sintering paste)上。器件10必须以预定表面压力(例如30Mpa)在预定温度(例如260℃)下处理180秒至300秒。
考虑到器件的厚度因族(family)而变化，因此电子器件10必须以与其突起表面成正比例的力加压。
烧结压机1包括框架8，例如，该框架沿着压机轴线X竖直延伸，该框架8竖直延伸并且在顶部支撑压制单元14并且在底部支撑反作用底座60，并且该反作用底座60支撑至少一个基板12，优选地，多个基板12。
压制单元14和底座60中的一个或两个可相对于另一个沿压机轴线X移动，以使待烧结的电子器件10基本上与压制单元14接触，以便进行压制。
在一个实施例中，针对每个基板12，压制单元14包括一个或多个压制构件10，其适于在电子器件上施加必要的烧结压力。
在一个实施例中，压制单元14包括多杆缸20，其配备有平行且独立的加压杆28。每个加压杆28与各自的待烧结的电子器件10同轴，每个加压杆28的重心在各自的待烧结的电子器件10上，并且具有与要施加在各自的电子器件10上的力成比例的推力段，每个待烧结的电子器件的面积是已知的。术语“重心”意味着每个加压杆28具有与各自的电子器件10的重心重合的杆轴线。
在一个实施例中，加压杆28由加压控制流体驱动。例如，加压杆28与压缩室30连通，其中引入控制流体并且其中容纳相配的控制元件以将由控制流体施加的压力传递到加压杆。例如，该控制元件是膜32的形式。当压缩室30加压到烧结压力时，膜32通过压靠加压杆28的后端28’而变形，以将烧结压力传递到每个加压杆28。
当然，也可以使用其它加压杆致动系统。
根据本发明的一个方面，压机包括至少一个反作用元件40，其在第一元件端40’和第二元件端40”之间沿着平行于压机轴线X的元件轴线延伸。第一元件端40’形成用于各自的基板12的支撑平面。
负荷传感器50可操作地连接到第二元件端40”。负荷传感器50适于通过反作用元件40检测由压制单元14的一个或多个加压杆28施加在位于基板12上的待烧结的电子器件10上的力。
应注意的是，可以根据具体要求简单地使用负荷传感器50来检测已施加到各自的基板上的压力，从而处于开/关操作模式，或者检测例如通过反馈压力控制施加的压力的值。
在一个实施例中，负荷传感器50容纳在传感器保持板52中，其可操作地连接到冷却线路54。
每个反作用元件40由元件板70可滑动地支撑。术语“可滑动地支撑”并不意味着反作用元件必须在元件板70中滑动，而是意味着该元件以引导的方式插入到形成在元件板中的各自的引导座中而不被约束于此。实际上，如将在下面描述的，元件板70必须确保热从其传递到反作用元件40，保持反作用元件40处于平行于压机轴线X的正确位置，但同时不影响由各自的负荷传感器50检测的力。
应该注意的是，在一个优选实施例中，反作用元件的第二端40”总是与负荷传感器50接触，由此，在加压步骤期间，反作用元件40经历基本上为零或可忽略的轴向位移。在这种情况下，反作用元件40提供与由压制构件施加的力的真实对比，而后该对比由待烧结的电子器件完全吸收。
在一个实施例中，通过加热线路72加热元件板70，加热线路72适于使元件板70以及通过传导使反作用元件40达到所需的烧结温度。例如，加热线路72嵌入在围绕元件板70放置的加热体74中。
每个反作用元件40具有加热部分40a，其穿过元件板70并且适于通过传导将元件板70的热传递到各自的基板12。
反作用元件40还具有冷却部分40b，其以第二端40”结束并且以这样的方式成形为消散从元件板70传递到加热部分40a的热。
例如，加热部分40a和冷却部分40b连续地设置。
在一个实施例中，加热部分40a具有基本上等于或略大于元件板70的厚度的轴向延伸部。例如，加热部分40a终止于反作用元件40的第一端40’，该第一端从元件板70轴向突出。
在一个实施例中，元件板70和传感器保持板52通过适于消散反作用元件的热的分离流体(例如空气)轴向地彼此分离。
例如，冷却部分40b具有基本上等于元件板70和传感器保持板52之间的距离的延伸部。
在一个实施例中，加热部分40a是棱柱形的。例如，加热部分40a具有大于基板的支撑平面的直径的轴向延伸部。
在一个实施例中，冷却部分40b包括轴向连续的消散盘44，其与元件轴线同轴地延伸。
在一个实施例中，反作用元件40的第二端40”配备有面向负荷传感器50的红外屏46。
在一个实施例中，加热线路72适于将元件板加热到240℃和290℃之间的工作温度。
例如，元件板由具有高导热性的金属材料制成。
例如，加热线路72包括由电阻温度计控制的电阻器。
在一个实施例中，冷却线路54适于将传感器保持板52保持在约25℃的温度。
例如，冷却系统基于由冷却器调节的冷却剂的循环。
因此，与可加热元件板和可冷却传感器保持板结合的反作用元件允许：
-通过传递从元件板传导到反作用元件的加热部分的热来提供对已烧结基板的加热；
-抵消由上压制构件施加的烧结压力；
-将反作用力传递到负荷传感器；
-减少到负荷传感器的热传递。
因此，冷却线路可以将负荷传感器保持在可接受的工作温度，例如60℃，而没有过多的能量消耗。
对于根据本发明的烧结压机的实施例，本领域的技术人员为了满足可能的需要，在不脱离所附权利要求的范围的情况下，可以对功能上等同的元件进行修改，改变和替换。描述为属于一个可能的实施例的每个特征可以独立于其他描述的实施例实现。

Claims (7)

1.用于在基板上烧结电子器件的烧结压机，包括：
-至少一个反作用元件，在第一元件端和第二元件端之间沿着与所述压机的压机轴线平行的元件轴线延伸，其中，所述第一元件端形成支撑平面，用于相应的基板；
-至少一个负荷传感器，操作地连接到所述第二元件端，使得所述负荷传感器借助于所述反作用元件来检测由所述压机的一个或多个压制构件施加在放置于所述基板上的相应的待烧结的电子器件上的力的总和，所述负荷传感器容纳在传感器保持板中，所述传感器保持板操作地连接到冷却线路；
-元件板，适于能滑动地支撑所述至少一个反作用元件并配备有加热线路，其中：
-所述反作用元件具有加热部分，所述加热部分穿过所述元件板并且适于通过传导将所述元件板的热传递到所述基板；
-所述反作用元件具有冷却部分，所述冷却部分终止于所述第二元件端并且成形为消散从所述元件板传递到所述加热部分的热。
2.根据权利要求1所述的压机，其中，所述加热部分是棱柱的形式。
3.根据权利要求1或2所述的压机，其中，所述冷却部分包括轴向连续的消散盘，所述消散盘与所述元件轴线同轴地延伸。
4.根据前述权利要求中任一项所述的压机，其中，所述反作用元件的所述第二元件端配备有面向所述负荷传感器的红外屏。
5.根据前述权利要求中任一项所述的压机，其中，所述加热线路适于将所述元件板加热到240℃和290℃之间的工作温度。
6.根据前述权利要求中任一项所述的压机，其中，所述冷却线路适于将所述传感器保持板保持在约60℃的温度。
7.根据前述权利要求中任一项所述的压机，包括多个反作用元件，所述多个反作用元件由所述元件板能滑动地支撑，所述负荷传感器与每个反作用元件相关联。
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