CN112955754A

CN112955754A - Probe and inspection tool

Info

Publication number: CN112955754A
Application number: CN201980071406.XA
Authority: CN
Inventors: 笹野直哉; 寺西宏真; 酒井贵浩
Original assignee: Omron Corp
Current assignee: Omron Corp
Priority date: 2018-11-08
Filing date: 2019-10-23
Publication date: 2021-06-11
Also published as: WO2020095679A1; TW202019031A; KR102600799B1; TWI708441B; JP7354534B2; KR20210062046A; JP2020076666A

Abstract

The probe is provided with: an elastic portion that is elastically deformable in a first direction; and a connecting portion provided at one end of the elastic portion in the first direction and capable of connecting a conductor portion of the electric wire.

Description

Probe and inspection tool

Technical Field

The present disclosure relates to probes and inspection tools.

Background

In an electronic component module, a conduction test, an operation characteristic test, and the like are generally performed in a manufacturing process thereof. These inspections are performed by connecting terminals for connection to a main body substrate provided in the electronic component module and terminals of an inspection apparatus using probes.

As such a probe, there is a probe described in patent document 1. The probe is provided with: a pair of contacts which can be brought into contact with electrode terminals of an electronic component and electrode terminals of a connected electronic component, respectively; and a meandering portion that is interposed between the pair of contacts and connects the pair of contacts. In the probe, the meandering portion extends and contracts along an arrangement direction connecting the pair of contacts, and each contact reciprocates along the arrangement direction.

Documents of the prior art

Patent document

Patent document 1: japanese patent laid-open publication No. 2002-134202

Disclosure of Invention

Problems to be solved by the invention

However, with the diversification of inspection apparatuses and inspection objects in recent years, the inspection apparatuses and the inspection objects are configured to be connected to probes via conductor portions of electric wires.

The probe is configured to connect the electromagnetic component and the electronic component to be connected by contacting the contacts with the electrode terminals of the electromagnetic component and the electrode terminals of the electronic component to be connected in the arrangement direction. Therefore, for example, in a case where one or both of the electromagnetic component and the electronic component to be connected are configured to be unable to be connected to the probe unless the conductive portion of the electric wire is interposed therebetween, the electromagnetic component and the electronic component to be connected may not be able to be connected to each other if the probe is used.

An object of the present disclosure is to provide a probe capable of connecting a conductor part of an electric wire and an inspection tool including the probe.

Means for solving the problems

A probe according to an example of the present disclosure includes: an elastic portion that is elastically deformable in a first direction; and a connecting portion provided at one end of the elastic portion in the first direction and capable of connecting a conductor portion of an electric wire.

In addition, an inspection tool according to an example of the present disclosure includes: the probe; and a housing having a housing portion in which the probe is housed such that the connection portion is exposed to the outside.

Effects of the invention

The probe is provided with: an elastic portion that is elastically deformable in a first direction; and a connecting portion provided at one end of the elastic portion in the first direction and capable of connecting a conductor portion of an electric wire. By means of this connection portion, a probe capable of connecting conductor portions of electric wires can be realized.

According to the inspection tool, even if one or both of the inspection device and the object to be inspected cannot be connected without the conductor part of the electric wire, the inspection tool capable of connecting the inspection device and the object to be inspected can be realized by the probe.

Drawings

Fig. 1 is a perspective view showing an inspection tool according to a first embodiment of the present disclosure.

Fig. 2 is a sectional view taken along line II-II of fig. 1.

Fig. 3 is a perspective view showing a probe according to a first embodiment of the present disclosure.

Fig. 4 is a top view of the probe of fig. 3.

Fig. 5 is a plan view showing a first modification of the inspection tool of fig. 1.

Fig. 6 is a plan view showing a second modification of the inspection tool of fig. 1.

Fig. 7 is a perspective view showing an inspection tool according to a second embodiment of the present disclosure.

Fig. 8 is a sectional view taken along line VIII-VIII of fig. 7.

Fig. 9 is a perspective view showing a probe according to a second embodiment of the present disclosure.

Fig. 10 is a top view of the probe of fig. 9.

Detailed Description

Hereinafter, an example of the present disclosure will be described with reference to the drawings. In the following description, terms indicating specific directions or positions (for example, terms including "up", "down", "right" and "left") are used as necessary, but these terms are used to facilitate understanding of the present disclosure with reference to the drawings, and the technical scope of the present disclosure is not limited by the meanings of these terms. The following description is merely exemplary in nature and is not intended to limit the present disclosure, applications, or uses. The drawings are schematic, and the ratio of the dimensions and the like do not always match the reality.

(first embodiment)

As shown in fig. 1 and 2, for example, the probe 10 according to the first embodiment of the present disclosure is used in a state of being housed in a case 100, and constitutes an inspection tool 1 together with the case 100. In the inspection tool 1, as an example, a plurality of thin, long, thin, conductive probes 10 are housed.

As shown in fig. 1, as an example, the housing 100 has a substantially quadrangular prism shape. As shown in fig. 2, a housing 110 is provided inside the case 100, and the housing 110 can house the probe 10 in a state where a connecting portion 30 of the probe 10, which will be described later, is exposed to the outside of the case 100. The storage portions 110 extend in a first direction (for example, Y direction) and are arranged at intervals in a plate thickness direction (for example, X direction) of the stored probes 10. In the first embodiment, 2 rows each including 4 storage units 110 arranged in a plate thickness direction of the stored probe 10 are provided at intervals in a direction (for example, Z direction) orthogonal to the arrangement direction of the rows of the 4 storage units 110.

A first opening 111 and a second opening 112 are provided at both ends of each housing 110 in the first direction. The first opening 111 opens on the first surface 101 which is one of the pair of surfaces facing each other in the Y direction of the housing 100. The connection portion 30 of the probe 10 is exposed to the outside of the case 100 through the first opening 111.

In addition, a terminal hole 120 is provided in the case 100, and the terminal hole 120 extends in the Y direction from the second surface 102 opposite to the first surface 101 in the Y direction. The second opening 112 is opened in the bottom surface 121 of the terminal hole 120. The contact portion 40 of the probe 10, which will be described later, protrudes toward the inside of the terminal hole 120 through the second opening 112, and is disposed so as to be able to contact, for example, a connection terminal 300 (see fig. 4) of an inspection device inserted into the terminal hole 120.

As shown in fig. 3, each probe 10 has a plate shape, and includes an elastic portion 20 elastically deformable in the Y direction (an example of the first direction), and a connection portion 30 and a contact portion 40 provided at both ends of the elastic portion 20 in the Y direction. Each probe is formed by, for example, electroforming, and the elastic portion 20, the connection portion 30, and the contact portion 40 are arranged in series in the Y direction and integrally configured.

As shown in fig. 4, the elastic portion 20 includes a plurality of elastic pieces (4 elastic pieces in the first embodiment) 21, 22, 23, and 24 arranged with a gap therebetween. As shown in fig. 4, each of the

elastic pieces

21, 22, 23, and 24 has an elongated band shape, and has 2 extending

portions

201 and 202 connected to the connecting portion 30 and the contact portion 40, respectively, and 1 bent portion 203 connected to the 2 extending

portions

201 and 202. For example, the extending

portions

201 and 202 are disposed on one side in the width direction (for example, the Z direction) of the body portion 31 of the connecting portion 30 or the body portion 41 of the contact portion 40, and extend substantially linearly in a direction intersecting the first direction. One end in the extending direction of the extending portion 201 constitutes an end of the elastic portion 20 on the side of the connecting portion 30, and one end in the extending direction of the extending portion 202 constitutes an end of the elastic portion on the side of the contact portion 40. As an example, the

elastic pieces

21, 22, 23, and 24 have substantially the same cross-sectional shape.

As shown in fig. 4, the connection portion 30 is configured to be able to connect a conductor portion 200 of an electric wire. Specifically, the connection portion 30 includes: a main body 31 extending in the Y direction; and a pair of

elastic nipping pieces

32, 33 that are capable of extending from the other end of the main body portion 31 in the Y direction along a first direction (for example, the Y direction) and are capable of elastically deforming in a direction (for example, the Z direction) away from each other. One end of the main body 31 in the Y direction is connected to the elastic portion 20. The

elastic nipping pieces

32 and 33 are arranged with a gap 34 therebetween in a second direction (for example, Z direction) orthogonal to the first direction. By inserting the conductor part 200 of the electric wire into the gap 34, the conductor part 200 of the electric wire is held by the

elastic holding pieces

32 and 33. In other words, the connecting portion 30 includes a pair of

elastic nipping pieces

32 and 33 capable of nipping the conductor portion 200 of the electric wire.

The connection portion 30 has a substantially C-shaped through hole 36 penetrating the connection portion 30 in the plate thickness direction. The end 341 of the gap 34 on the main body 31 side has a substantially circular shape as viewed in the plate thickness direction (for example, the X direction). A through hole 36 is disposed around an end 341 of the gap 34 on the body 31 side. The through-hole 36 facilitates elastic deformation of the

elastic nipping pieces

32 and 33 in the Z direction.

As shown in fig. 4, the contact portion 40 includes: a main body portion 41 extending in the Y direction and having one end in the Y direction connected to the elastic portion 20; a pair of

leg portions

42, 43 extending in the Y direction from the other end of the main body portion 41 in the Y direction and capable of flexing in directions away from each other (for example, the Z direction); and a pair of

contact portions

421 and 431 arranged at the ends of the pair of

leg portions

42 and 43 so as to be able to contact the convex contact points of the object to be inspected. Stoppers 44 are provided on the facing surfaces of the

leg portions

42 and 43, respectively. The stoppers 44 project from the facing surfaces of the

legs

42 and 43 in the direction approaching each other. The stopper 44 can prevent, for example, excessive insertion of the connection terminal 300 of the inspection apparatus.

In addition, the connection portion 30 and the contact portion 40 are provided with support portions 50, respectively. Each support portion 50 extends in the Z direction from the

body portions

31, 41, and as shown in fig. 2, when the probe 10 is housed in the housing portion 110 of the housing 100, each support portion 50 is arranged so as to abut against the inner peripheral surface of the housing portion 110. In other words, the probe 10 is held in the housing 110 via the support portions 50.

The probe 10 according to the first embodiment includes: an elastic portion 20 elastically deformable in the Y direction; and a connection portion 30 provided at one end of the elastic portion 20 in the Y direction and capable of connecting a conductor portion 200 of an electric wire. The probe 10 can be connected to the conductor part 200 of the electric wire by the connection part 30.

In the first embodiment, the connecting portion 30 has a pair of

elastic nipping pieces

32, 33, and the pair of

elastic nipping pieces

32, 33 extend in the Y direction and are capable of elastically deforming in directions away from each other to nip the conductor portion 200 of the electric wire. Since the conductor portion 200 of the electric wire can be held by the pair of

elastic holding pieces

32 and 33, the probe 10 can be connected to the conductor portion 200 of the electric wire by pressure bonding.

Further, according to the inspection tool 1, even if one or both of the inspection device and the inspection object cannot be connected without the conductor part 200 of the electric wire, the inspection tool 1 capable of connecting the inspection device and the inspection object can be realized by the probe 10.

The number of the probes 10 housed in each housing portion 110 of the case 100 is not limited to 1, and may be plural. For example, as shown in fig. 5, each housing 110 can house a probe laminate 2 in which a plurality of probes 10 (3 probes 10 in fig. 5) are laminated in the plate thickness direction in a state of being in contact with each other, and the probe laminate 2 is connected to the conductor parts 200 of 1 wire. By using the probe laminate 2 in this manner, for example, the inspection tool 1 in which a large current can flow can be obtained compared to the inspection tool 1 in which 1 probe 10 is stored and held.

As shown in fig. 6, the storage units 110 may be arranged in a staggered manner such that the connection units 30 are alternately shifted in the Z direction while being arranged at intervals in the plate thickness direction (for example, the X direction) of the stored probes 10. In this way, the shape, size, and arrangement of the storage units 110 can be changed according to the shape and size of the probes 10 stored therein, the arrangement of the connection terminals of the inspection apparatus and the inspection object, and the like.

The inspection tool 1 may include at least 1 probe 10 and a case 100 for accommodating the probe 10 therein.

(second embodiment)

As shown in fig. 7 to 10, a probe 10 according to a second embodiment of the present disclosure is different from the first embodiment in that a connection portion 30 has a welding portion 35 to which a conductor portion 200 of an electric wire can be connected by welding. In the second embodiment, the same portions as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted, and differences from the first embodiment will be described.

As shown in fig. 7 and 8, in the second embodiment, the inspection tool 1 includes a housing 100 having a substantially L-shaped cross section along a first direction (for example, Y direction). In the case 100, 15 housing portions 110 are arranged in a row at intervals in the plate thickness direction of the housed probe 10.

As shown in fig. 10, the elastic portion 20 of each probe 10 is composed of a plurality of elastic pieces (2 elastic pieces in the present embodiment) 25 and 26 arranged with a gap therebetween. As shown in fig. 10, each of the

elastic pieces

25 and 26 has an elongated band shape, and has a meandering shape in which a plurality of extending portions (10 extending portions 28 in the second embodiment as an example) extending in the Z direction and a plurality of bent portions 27 (9 bent portions 27 in the second embodiment as an example) having both ends connected to the adjacent extending portions 28 are alternately connected along the Z direction. The extending portions 28 at both ends of the

elastic pieces

25 and 26 in the Y direction are connected to the body portion 31 of the connecting portion 30 and the body portion 41 of the contact portion 40, respectively. As an example, each of the extending portions 28 is disposed on the other end side of one end in the width direction of the body portion 41 when viewed in the plate thickness direction of the probe 10. In other words, each extending portion 28 is disposed on the upper side in the Z direction than the lower end in the Z direction of the width direction of the main body portion 41 when viewed along the thickness direction of the probe 10. Each of the extending portions 28 extends substantially linearly in a direction intersecting with the first direction (for example, a direction orthogonal thereto), one end portion in the extending direction of the extending portion 201 constitutes an end portion of the elastic portion 20 on the side of the connecting portion 30, and one end portion in the extending direction of the extending portion 202 constitutes an end portion of the elastic portion on the side of the contact portion 40.

As shown in fig. 10, the connection portion 30 of each probe 10 includes: a main body portion 31 extending in the Y direction and having one end in the Y direction connected to the elastic portion 20; and a welding portion 35 connected to the other end of the main body 31 in the Y direction. The welded portion 35 has a substantially square ring shape as viewed in the thickness direction (for example, X direction) of the probe 10. In the second embodiment, as shown in fig. 8, the soldering portion 35 of the connection portion 30 of each probe 10 protrudes to the outside of the housing 100 through the first opening 111 of the housing 110.

As shown in fig. 10, the contact portion 40 of each probe 10 includes: a main body portion 41 extending in the Y direction and having one end in the Y direction connected to the elastic portion 20; and a pair of

contact portions

421 and 431 protruding in the Y direction from the other end of the main body portion 41 in the Y direction.

According to the probe 10 of the second embodiment, the connection portion 30 has the soldering portion 35 to which the conductor portion 200 of the electric wire can be connected by soldering. The probe 10 can be connected to the conductor part 200 of the electric wire by soldering by the soldering part 35.

The welded portion 35 is not limited to the second embodiment, and any configuration may be adopted as long as the conductor portion 200 of the electric wire can be connected by welding.

The connection portion 30 is not limited to the first and second embodiments, and other configurations of the conductor portion 200 to which an electric wire can be connected may be employed.

The various embodiments of the present disclosure have been described in detail with reference to the drawings, and finally, various embodiments of the present disclosure are described. In the following description, reference numerals are given to the drawings as an example.

A probe 10 according to a first aspect of the present disclosure includes: an elastic portion 20 elastically deformable in a first direction; and a connection portion 30 provided at one end of the elastic portion 20 in the first direction and capable of connecting a conductor portion 200 of an electric wire.

According to the probe 10 of the first aspect, the probe 10 can be connected to the conductor part 200 of the electric wire via the connection part 30.

In the probe 10 according to the second aspect of the present disclosure, the connecting portion 30 includes a pair of

elastic nipping pieces

32 and 33, and the pair of

elastic nipping pieces

32 and 33 extend in the first direction and are capable of elastically deforming in directions away from each other to nip the conductor portion 200.

According to the probe 10 of the second aspect, since the conductor portion 200 of the electric wire can be clamped by the pair of

elastic clamping pieces

32 and 33, the probe 10 can be realized in which the conductor portion 200 of the electric wire can be connected by pressure bonding.

In the probe 10 according to the third aspect of the present disclosure, the connection portion 30 includes a welding portion 35 that can connect the conductor portion 200 by welding.

According to the probe 10 of the third aspect, the probe 10 in which the conductor part 200 of the electric wire can be connected by soldering can be realized by the soldering part 35.

An inspection tool 1 according to a fourth aspect of the present disclosure includes: the probe 10 in the manner described; and a housing 100 having a housing 110, the housing 110 housing the probe 10 such that the connection portion 30 is exposed to the outside.

According to the inspection tool 1 of the fourth aspect, even if one or both of the inspection device and the object to be inspected cannot be connected without the conductor portion 200 of the electric wire, the inspection tool 1 capable of connecting the inspection device and the object to be inspected can be realized by the probe 10.

In the inspection tool 1 according to the fifth aspect of the present disclosure, the probe 10 is a probe laminate 2, the probe laminate 2 is formed by laminating a plurality of the probes 10 in a plate thickness direction in a state of being in contact with each other, and is connected to the conductor part 200 of 1 of the electric wires, and the housing part 110 can house the probe laminate 2.

According to the inspection tool 1 of the fifth aspect, the probe laminate 2 can provide the inspection tool 1 capable of flowing a large current, for example, compared to the inspection tool 1 in which 1 probe 10 is stored and held.

In the inspection tool 1 according to the sixth aspect of the present disclosure, the probe 10 is a plurality of the probes 10, the housing portions 110 are a plurality of the housing portions 110 capable of housing at least 1 of the probes 10, respectively, the housing portions 110 are arranged at intervals in a plate thickness direction of the housed probes 10, respectively, and the housing portions 110 are arranged in a staggered shape in which the connecting portions 30 are alternately shifted in a second direction intersecting the plate thickness direction as viewed from the first direction.

In addition, any of the various embodiments or modifications described above can be appropriately combined to exhibit the respective effects. In addition, combinations of the embodiments or examples or combinations of the embodiments and examples can be made, and combinations of features in different embodiments or examples can also be made.

The present disclosure is fully described in connection with the preferred embodiments with reference to the drawings, but various modifications and corrections are possible for those skilled in the art. It is to be understood that such changes and modifications are intended to be included within the scope of the present disclosure as set forth in the appended claims.

Industrial applicability

The probe of the present disclosure can be applied to an inspection tool used for inspecting a semiconductor such as a camera device, a USB device, or a QFN device and a SON device, for example.

The inspection tool of the present disclosure can be applied to, for example, an inspection apparatus used for inspecting semiconductors such as camera devices, USB devices, or QFN devices and SON devices.

Description of the symbols

1 inspection tool

2 Probe laminate

10 Probe

20 elastic part

201. 202 extension

203 bending part

21. 22, 23, 24 elastic sheet

25. 26 elastic piece

27 bending part

28 extension part

30 connecting part

31 main body part

32. 33 elastic holding piece

34 gap

341 end portion

35 welding part

36 through hole

40 contact part

41 body part

42. 43 leg part

44 stop

50 support part

100 case

101 first side

102 second side

110 receiving part

111 first opening part

112 second opening part

120 terminal hole

200 conductor part

300 connecting terminal

Claims

1. A probe having a plate shape, comprising:

an elastic portion that is elastically deformable in a first direction; and

and a connecting portion provided at one end of the elastic portion in the first direction and capable of connecting a conductor portion of an electric wire.

2. The probe according to claim 1, wherein,

the connecting portion has a pair of elastic nipping pieces that extend in the first direction and are capable of elastically deforming in directions away from each other to nip the conductor portion.

3. The probe according to claim 1, wherein,

the connecting portion has a welding portion capable of connecting the conductor portions by welding.

4. An inspection tool, the inspection tool having:

the probe of any one of claims 1 to 3; and

and a housing having a housing portion that houses the probe such that the connection portion is exposed to the outside.

5. The inspection tool of claim 4,

the probe is a probe laminate in which a plurality of the probes are laminated in a plate thickness direction in a state of being in contact with each other, and is connected to the conductor portions of 1 of the wires,

the housing section can house the probe laminated body.

6. The inspection tool of claim 4 or 5,

the probe is a plurality of the probes,

the housing portions are a plurality of the housing portions capable of housing at least 1 of the probes, respectively,

the housing portions are arranged at intervals in a plate thickness direction of the probe to be housed, and the housing portions are arranged in a staggered manner such that the connecting portions are alternately shifted in a second direction intersecting the plate thickness direction when viewed from the first direction.