CN1128440C - 具有可拉伸回复力件的微加工反射器 - Google Patents

具有可拉伸回复力件的微加工反射器 Download PDF

Info

Publication number
CN1128440C
CN1128440C CN99812840A CN99812840A CN1128440C CN 1128440 C CN1128440 C CN 1128440C CN 99812840 A CN99812840 A CN 99812840A CN 99812840 A CN99812840 A CN 99812840A CN 1128440 C CN1128440 C CN 1128440C
Authority
CN
China
Prior art keywords
reflector
flat base
chain
longitudinal axis
tieing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN99812840A
Other languages
English (en)
Chinese (zh)
Other versions
CN1325530A (zh
Inventor
J·D·德雷克
J·H·杰曼
J·D·格雷德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seagate Technology LLC
Original Assignee
Seagate Technology LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seagate Technology LLC filed Critical Seagate Technology LLC
Publication of CN1325530A publication Critical patent/CN1325530A/zh
Application granted granted Critical
Publication of CN1128440C publication Critical patent/CN1128440C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/122—Flying-type heads, e.g. analogous to Winchester type in magnetic recording
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/085—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection
    • G11B7/08547—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements
    • G11B7/08564—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements using galvanomirrors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Optical Recording Or Reproduction (AREA)
CN99812840A 1998-09-18 1999-09-17 具有可拉伸回复力件的微加工反射器 Expired - Fee Related CN1128440C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10098998P 1998-09-18 1998-09-18
US60/100,989 1998-09-18

Publications (2)

Publication Number Publication Date
CN1325530A CN1325530A (zh) 2001-12-05
CN1128440C true CN1128440C (zh) 2003-11-19

Family

ID=22282566

Family Applications (1)

Application Number Title Priority Date Filing Date
CN99812840A Expired - Fee Related CN1128440C (zh) 1998-09-18 1999-09-17 具有可拉伸回复力件的微加工反射器

Country Status (7)

Country Link
JP (1) JP4619538B2 (enExample)
KR (1) KR100473693B1 (enExample)
CN (1) CN1128440C (enExample)
AU (1) AU6254999A (enExample)
DE (1) DE19983566T1 (enExample)
GB (1) GB2362224B (enExample)
WO (1) WO2000017865A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7002215B1 (en) * 2002-09-30 2006-02-21 Pts Corporation Floating entrance guard for preventing electrical short circuits

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153870A (en) * 1989-06-29 1992-10-06 Digital Equipment Corporation Rotary head actuator for optical disk
US5202875A (en) * 1991-06-04 1993-04-13 International Business Machines Corporation Multiple data surface optical data storage system
US5629794A (en) * 1995-05-31 1997-05-13 Texas Instruments Incorporated Spatial light modulator having an analog beam for steering light
US5661591A (en) * 1995-09-29 1997-08-26 Texas Instruments Incorporated Optical switch having an analog beam for steering light
JPH09152505A (ja) * 1995-11-30 1997-06-10 Sharp Corp 変形可能ミラー及びその製造方法及び光学装置並びに記録再生装置
US6044056A (en) * 1996-07-30 2000-03-28 Seagate Technology, Inc. Flying optical head with dynamic mirror
WO1998009289A1 (en) * 1996-08-27 1998-03-05 Quinta Corporation Optical head using micro-machined elements
JPH10188319A (ja) * 1996-12-26 1998-07-21 Sharp Corp 変形可能ミラーおよびその変形可能ミラーを用いた光記録再生装置
KR100620341B1 (ko) * 1998-09-02 2006-09-13 엑스로스, 인크. 비틀림 굴곡 힌지에 의해 상대 회전하도록 연결된 미세가공 구조체

Also Published As

Publication number Publication date
GB0109131D0 (en) 2001-05-30
DE19983566T1 (de) 2001-08-16
CN1325530A (zh) 2001-12-05
AU6254999A (en) 2000-04-10
KR100473693B1 (ko) 2005-03-08
GB2362224B (en) 2003-03-19
JP4619538B2 (ja) 2011-01-26
WO2000017865A1 (en) 2000-03-30
KR20010075212A (ko) 2001-08-09
GB2362224A (en) 2001-11-14
JP2002525691A (ja) 2002-08-13

Similar Documents

Publication Publication Date Title
US6594057B1 (en) Micromachined device with stretchable restoring force member
US7375930B2 (en) Apparatus for PZT actuation device for hard disk drives
US7345851B2 (en) Disk drive with rotary piezoelectric microactuator
US8411391B2 (en) Head gimbal assembly
US20060044699A1 (en) Rotary piezoelectric microactuator and disk drive head-suspension assembly
JP2001525972A (ja) 微細加工を使用した光学ヘッド
CN1828726A (zh) 可旋转压电微驱动器及其磁头折片组合和磁盘驱动单元
US20020105750A1 (en) Microactuator for dynamic controlling head-media interaction and fly-height
US20030142597A1 (en) Micro-integrated near-field optical recording head and optical recording system using the same
JPWO2006109687A1 (ja) 微小機械構造体
CN1128440C (zh) 具有可拉伸回复力件的微加工反射器
CN100411015C (zh) 微驱动器、设有该微驱动器的磁头折片组合以及磁盘驱动器
JP2000339725A (ja) マイクロミラー・デバイス及びそれを用いた光ピックアップ装置
JP2711581B2 (ja) 光情報装置における対物レンズ支持機構
JPH1114918A (ja) 焦点制御装置およびこれを用いた光ディスク装置
JP2005043544A (ja) 波面収差補正ミラーおよび光ピックアップ
JP3405451B2 (ja) 圧電体アクチュエータおよびディスク装置
JP2005043407A (ja) 波面収差補正ミラーおよび光ピックアップ
JP3885707B2 (ja) 対物レンズ駆動装置
JP4337472B2 (ja) 光偏向子及びこの光偏向子を適用した光ピックアップ
JPH02179933A (ja) 浮動形光ヘッド駆動機構
JP4263853B2 (ja) 波面収差補正ミラー
JP3552873B2 (ja) 変形可能ミラー
JP2976703B2 (ja) ヘッドアクチュエータ
JP4382051B2 (ja) 磁気ヘッドアセンブリ、磁気ディスク装置、及び磁気ヘッドアセンブリの駆動方法

Legal Events

Date Code Title Description
C06 Publication
C10 Entry into substantive examination
PB01 Publication
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee