KR100473693B1 - 신장가능한 복원력 부재를 가진 마이크로머신 미러 - Google Patents

신장가능한 복원력 부재를 가진 마이크로머신 미러 Download PDF

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Publication number
KR100473693B1
KR100473693B1 KR10-2001-7003528A KR20017003528A KR100473693B1 KR 100473693 B1 KR100473693 B1 KR 100473693B1 KR 20017003528 A KR20017003528 A KR 20017003528A KR 100473693 B1 KR100473693 B1 KR 100473693B1
Authority
KR
South Korea
Prior art keywords
mirror
tether
planar base
longitudinal axis
members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR10-2001-7003528A
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English (en)
Korean (ko)
Other versions
KR20010075212A (ko
Inventor
조셉 디. 드레이크
존 에이치. 저맨
존 디. 그레이드
Original Assignee
시게이트 테크놀로지 엘엘씨
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 시게이트 테크놀로지 엘엘씨 filed Critical 시게이트 테크놀로지 엘엘씨
Publication of KR20010075212A publication Critical patent/KR20010075212A/ko
Application granted granted Critical
Publication of KR100473693B1 publication Critical patent/KR100473693B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/122—Flying-type heads, e.g. analogous to Winchester type in magnetic recording
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/085—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection
    • G11B7/08547—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements
    • G11B7/08564—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements using galvanomirrors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Optical Recording Or Reproduction (AREA)
KR10-2001-7003528A 1998-09-18 1999-09-17 신장가능한 복원력 부재를 가진 마이크로머신 미러 Expired - Fee Related KR100473693B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10098998P 1998-09-18 1998-09-18
US60/100,989 1998-09-18

Publications (2)

Publication Number Publication Date
KR20010075212A KR20010075212A (ko) 2001-08-09
KR100473693B1 true KR100473693B1 (ko) 2005-03-08

Family

ID=22282566

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2001-7003528A Expired - Fee Related KR100473693B1 (ko) 1998-09-18 1999-09-17 신장가능한 복원력 부재를 가진 마이크로머신 미러

Country Status (7)

Country Link
JP (1) JP4619538B2 (enExample)
KR (1) KR100473693B1 (enExample)
CN (1) CN1128440C (enExample)
AU (1) AU6254999A (enExample)
DE (1) DE19983566T1 (enExample)
GB (1) GB2362224B (enExample)
WO (1) WO2000017865A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7002215B1 (en) * 2002-09-30 2006-02-21 Pts Corporation Floating entrance guard for preventing electrical short circuits

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153870A (en) * 1989-06-29 1992-10-06 Digital Equipment Corporation Rotary head actuator for optical disk
US5202875A (en) * 1991-06-04 1993-04-13 International Business Machines Corporation Multiple data surface optical data storage system
US5629794A (en) * 1995-05-31 1997-05-13 Texas Instruments Incorporated Spatial light modulator having an analog beam for steering light
US5661591A (en) * 1995-09-29 1997-08-26 Texas Instruments Incorporated Optical switch having an analog beam for steering light
JPH09152505A (ja) * 1995-11-30 1997-06-10 Sharp Corp 変形可能ミラー及びその製造方法及び光学装置並びに記録再生装置
US6044056A (en) * 1996-07-30 2000-03-28 Seagate Technology, Inc. Flying optical head with dynamic mirror
WO1998009289A1 (en) * 1996-08-27 1998-03-05 Quinta Corporation Optical head using micro-machined elements
JPH10188319A (ja) * 1996-12-26 1998-07-21 Sharp Corp 変形可能ミラーおよびその変形可能ミラーを用いた光記録再生装置
KR100620341B1 (ko) * 1998-09-02 2006-09-13 엑스로스, 인크. 비틀림 굴곡 힌지에 의해 상대 회전하도록 연결된 미세가공 구조체

Also Published As

Publication number Publication date
GB0109131D0 (en) 2001-05-30
DE19983566T1 (de) 2001-08-16
CN1325530A (zh) 2001-12-05
CN1128440C (zh) 2003-11-19
AU6254999A (en) 2000-04-10
GB2362224B (en) 2003-03-19
JP4619538B2 (ja) 2011-01-26
WO2000017865A1 (en) 2000-03-30
KR20010075212A (ko) 2001-08-09
GB2362224A (en) 2001-11-14
JP2002525691A (ja) 2002-08-13

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